Refurbishment Program - MKS · MKS highly skilled engineers and technicians who understand your...
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Refurbishment Program ASTRON ® Remote Plasma Sources MKS understands the importance of getting the highest return from your initial capital investment in process tools. Customers in the semiconductor industry tell us that the ASTRON ® remote plasma source remains a critical subcomponent for etch and deposition chamber clean processes. Safeguard your investment in MKS ASTRON 2L, ASTRONi, and ASTRONex products with the MKS-certified Refurbishment Program. MKS factory-certified technicians complete a comprehensive refurbishment and test process developed by the original product design engineers. Trust the original manufacturer to ensure that your ASTRON products are operating at their peak performance, extending the life of your process tools and minimizing any disruption to your existing processes. Trust MKS. Our Commitment MKS highly skilled engineers and technicians who understand your process and requirements keep your equipment up and running—ensuring your success. • Only MKS original parts used for all repairs • Trained technicians use current, proven methods and techniques • All repairs qualified on an MKS-designed test stand • 1-year warranty (excluding consumable plasma blocks) While there are design differences between the ASTRON 2L, ASTRONi and ASTRONex models, the primary scope of work includes: • Proactive replacement of the electronic circuit boards defined by the corresponding bill of materials with new, original MKS parts. The covered electronic circuit boards include: — Power — Control — Fuse — Ignition — Boost (when applicable) • Install new plasma blocks and transformer per the bill of materials of the particular model • Incorporate applicable Service Bulletins and software upgrades • Repair other problems found • Thorough testing on an MKS-designed test stand, following the most current manufacturing processes and procedures • Comprehensive test report Scope of Work
Transcript of Refurbishment Program - MKS · MKS highly skilled engineers and technicians who understand your...
Refurbishment ProgramASTRON® Remote Plasma Sources
MKS understands the importance of getting the highest return from your initial capital investment in process tools. Customers in the semiconductor industry tell us that the ASTRON® remote plasma source remains a critical subcomponent for etch and deposition chamber clean processes. Safeguard your investment in MKS ASTRON 2L, ASTRONi, and ASTRONex products with the MKS-certified Refurbishment Program.
MKS factory-certified technicians complete a comprehensive refurbishment and test process developed by the original product design engineers. Trust the original manufacturer to ensure that your ASTRON products are operating at their peak performance, extending the life of your process tools and minimizing any disruption to your existing processes. Trust MKS.
Our Commitment MKS highly skilled engineers and technicians who understand your process and requirements keep your equipment up and running—ensuring your success.
• Only MKS original parts used for all repairs
• Trained technicians use current, proven methods and techniques
• All repairs qualified on an MKS-designed test stand
• 1-year warranty (excluding consumable plasma blocks)
While there are design differences between the ASTRON 2L, ASTRONi and ASTRONex models, the primary scope of work includes:
• Proactive replacement of the electronic circuit boards defined by the corresponding bill of materials with new, original MKS parts. The covered electronic circuit boards include:
— Power — Control — Fuse — Ignition — Boost (when applicable)
• Install new plasma blocks and transformer per the bill of materials of the particular model
• Incorporate applicable Service Bulletins and software upgrades
• Repair other problems found
• Thorough testing on an MKS-designed test stand, following the most current manufacturing processes and procedures
• Comprehensive test report
Scope of Work
www.MKSINST.com +1-978-645-5500 I +1-800-227-8766
ASTRON Refurbish_06/19 ©2019 MKS Instruments, Inc.
MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Specifications are subject to change without notice. mksinst™ is a trademark and ASTRON® is a registered trademark of MKS Instruments, Inc.
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Qualifying Products
MKS offers comprehensive refurbishment services to improve the reliability and longevity of the following RF Generator models:
• ASTRON®2L Reactive Gas Generator
• ASTRON®ex Reactive Gas Generator
• ASTRON®i Reactive Gas Generator
ASTRON®2L ASTRON®ex ASTRON®i
