MKS 647B Instructions

11
MKS-647B: Multiple Channel Flow Ratio/ Pressure Gas Controller Instruction Manual By: Michael Wilson English 202C

description

Instruction Set

Transcript of MKS 647B Instructions

Page 1: MKS 647B Instructions

MKS-647B: Multiple Channel Flow Ratio/ Pressure Gas Controller

Instruction Manual

By: Michael WilsonEnglish 202C

Page 2: MKS 647B Instructions

Introduction: When working with gases used for experiments, researchers like to have some sort of control over the type, pressure, and flow rate of the gas or gases that they are using. This allows for much more precision and accuracy with the results that they obtain. Many times they use a two device system that allows for this control over the gases. They use a primary multiple channel gas controller for user interface and a secondary mass flow controller that receives commands from the primary device to physically alter the flow rate of the gas. As the name states, this multiple channel gas controller can handle multiple gas inputs at a time. There are approximately 4 channels on the gas controller. Each channel can handle a different gas each with different flow rates and calibration factors which allows 4 different gases to be manipulated at one time. Since there are 4 gases being manipulated at one time, there also has to be 4 mass flow controllers in order to serve as the electronic valve that sets the flow rate of the gas. This instruction set describes the steps needed to calibrate and operate the primary gas controller so that the user can control the rate at which the gas or gases are being introduced into their experiment. It is also important to note that unless stated otherwise, the drawings and technical specifications used in this document have been taken by the actual MKS-647B manual (“Multi Channel Flow Ratio/ Pressure Controller; Type 647B; Instruction Manual”; 1999 by MKS Instrument Deutschland GmbH) to allow a better understanding for the reader.

Definitions:Multiple Channel Gas Controller: A Multiple Channel Gas Controller is a primary control device used to manipulate the flow rate of any fluids (gases or liquids) that are being introduced into a secondary Mass Flow Controller device. The gas controller is basically the computer that allows for user interface. It sends commands via electronic connectors in order to control the flow of gas through the secondary mass flow controller.

Mass Flow Controller: The mass flow controller is a secondary device, essentially behaving as an electronic valve that receives commands from the primary gas controller. It only allows a certain amount of gas through at a time depending on the users setting in the primary device.

Flow Rate: The flow rate is the quantity of a gas or liquid moving through a pipe or channel within a given or standard period.

Correction/Calibration Factor: The correction factor is the number that differentiates the different types of gas that the gas controller can handle.

Page 3: MKS 647B Instructions

Materials:Multiple Channel Gas Controller Mass Flow Controller (1-4)Nylon hose (1-4)Electronic Connectors (1-4)Power cable Gas Tanks (1-4)

Technical Specifications

Page 4: MKS 647B Instructions

Front Panel

Rear Panel

Main Menu

Menu Tree

Page 5: MKS 647B Instructions

I.When starting an experiment and you are unsure if someone tampered with the device:Under Main Menu

Select (2) ‘Extended Display’ Make sure the Unit, Range and Gas settings are appropriate values

for your specific experiment.

If not, please reset the device before use to ensure proper settings.II.To perform a reset for your device:Under Main Menu Select (6) System Setup

Scroll down to ‘Reset’ Press Right arrow button Wait until it says ‘Done’

Page 6: MKS 647B Instructions

III.To manage flow rate settings for your experiment:Under Main Menu Select (5) ‘Instrument Setup’

Select (1) ‘Range Selection’

Manually scroll until the settings match the flow meter settings located on a sticker on top of the mass flow controller for each individual channel.

Select ‘Esc’ Select (2) ‘Gas Selection’

Page 7: MKS 647B Instructions

Scroll through the selections for the desired gas type. Make sure to double check the correction factor for the gas.

Select ‘Esc’

Under Main Menu Select (2) ‘Extended Display’

Use the left and right arrows to move between ‘Set point’, ‘Channel’, and ‘Status’. To turn the flow of gas on

Press ‘ON’- Channel # Press ‘ON’- (0) ‘All’

To turn the flow of gas off Press ‘OFF’- (0) ‘All’ Press ‘OFF’- Channel #

IV.If you are unsure about the calibration of your device:Under Main Menu Select (2) ‘Extended Display’ Make sure the flow of gas is off Actual flow for all channels that are turned off should be 0 If not-

Go to the Main Menu Select (5) ‘Instrument Setup’

Page 8: MKS 647B Instructions

Select (4) ‘Zero Adjust’

Adjust the ‘zero value’ until the ‘actual flow’ is zero.V.Troubleshoot your connector cable and controller:Under Main Menu Select (4) ‘Diagnostics’

Select (2) ‘Signals’

If the set point is the same as the FS Range value, then the output voltage for the selected channel must be 5V or [005000] for it to be working fine. The display is in mV.

Check pins on connector cable with a multi meter to see if 5V is being generated.

For additional support, please contact:United StatesMKS Instruments, Inc.Corporate Service Center651 Lowell Street Methuen, MA 01844Phone: (978)-682-4567

Page 9: MKS 647B Instructions

Fax: (978)-682-8543