Photolithography - University of Minnesota 04... · Fig. 2.4 Resist and silicon dioxide patterns...
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Photolithography Prof. Tianhong Cui, Mechanical Engineering ME 8254
Transcript of Photolithography - University of Minnesota 04... · Fig. 2.4 Resist and silicon dioxide patterns...
Photolithography
Prof. Tianhong Cui, Mechanical Engineering
ME 8254
Standard IC Processes
Photolithography Source:Jaeger
Vacuum Systems