Patterning - Photolithography

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Patterning - Photolithography. UV light. mask. Oxidation Photoresist (PR) coating Stepper exposure Photoresist development and bake Acid etchingUnexposed (negative PR)Exposed (positive PR) Spin, rinse, and dry Processing stepIon implantationPlasma etchingMetal deposition - PowerPoint PPT Presentation