Univ.Prof.Dr.Günther Leising Organic Electronics and ... · Organic Electronics and...
Transcript of Univ.Prof.Dr.Günther Leising Organic Electronics and ... · Organic Electronics and...
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Institute of Nanostructured Materials and PhotonicsUniv.Prof.Dr.Günther Leising
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Nanotechnologiesfor
Organic Electronics and Optoelectronics
Univ.Prof.Dr.Günther Leising
Institute of Nanostructured Materials and PhotonicsJOANNEUM RESEARCH
Weiz, Austria
INTERNATIONAL MATERIALS FORUM 2005
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Outline
- JOANNUM RESEARCH Company Profile- Materials- Components- Processes- Packaging- Summary
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Province ofStyria
Problem Solving Training
TransferNetwork
Regional – National –International
Research & Developmentand Consulting
Skilled Employeesfor Trade and Industry
Science – Industry –Politics
15 Institutes 380 employees
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Materials
- organic/inorganic electroactive materials- organic/inorganic dielectric materials- organic/inorganic photoactive materials- organic/inorganic sensoractive materials- organic/inorganic optical materials- inorganic conductors (Cu)- organic/inorganic packaging material
RFID-Module
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supe
rcon
duct
ors
Materials
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TOPDOWN
BOTTOMUP
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Buildingblocks
Discotics
ShapedMolecules
ConjugatedPolymers
•rods•ribbons•cylinders•rings
DendronizedPolymers
Dendrimers
•inorganic core•organic core
•lyotropic•thermotropic
Nanotechnology
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Nanotechnology
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Disorder
hν (POL)
Order
Structure
FunctionElement
‘Circuit’
Macrosystem
Nanoaufbau
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Components
- passive components (R, C, L, antenna)- nonlinear components (diode, Zener, foldback) - active components (FET, LED, laser)- information storage (memory)- sensor components (photodiode, …)- energy storage (battery, …)- optical components (lenses, waveguides, …)- conducting lines and vias
RFID-Module
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oFET - Materials
Gate
Semiconductor
Metal (Au), doped-SC (n++-Si),Conducting polymer, organic
conductor
SourceMetal, doped-SC,
Conducting polymer, organic conductor
DrainMetal, doped-SC,
Conducting polymer, organic conductor
Conjugated polymer, organic semiconductor
semiconductized material
Dielectric- Inorganic
(SiO2, Al2O3, mica,..)- insulating polymer (PMMA)- functional polymer (PVP)- organic layer
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oFET - Structuring
Gate
Semiconductor
- evaporation- spin-coating- ink-jet printing
Source- evaporation- spin-coating- ink-jet printing- nanoimprinting
- evaporation- spin-coating- dip-coating- SAMs- transferprinting- nanolamination
Dielectric- evaporation- spin-coating- dip-coating- SAM
Drain- evaporation- spin-coating- ink-jet printing- nanoimprinting
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Processes
- Soft-LithographyNanoimprintingHot-Embossing
- Thin-Film Growth (PVD)- Ink-Jet Printing- 3D-Structuring (Two-Photon Absorption)
RFID-Module
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Soft Lithography
Hard StampsHard Stamps
EmbossingEmbossingEmbossing PrintingPrintingPrinting
Solvent AssistedMicromolding
Solvent AssistedMicromolding
ReplicaMolding
ReplicaMolding
SoftEmbossing
SoftEmbossing
LiquidEmbossing
LiquidEmbossing
Micro-ContactPrinting
Micro-ContactPrinting
MicrotransferMolding
MicrotransferMolding
MicromoldingIn Capillaries
MicromoldingIn Capillaries
NanoImprinting
NanoImprinting
SOFT Stamps(Soft Lithography)
SOFT Stamps(Soft Lithography)
Thermo-setting Polymer
Thermo-setting Polymer
Flash(UV curable
Polymer)
Flash(UV curable
Polymer)
Soft Stamps(Soft Lithography)
Soft Stamps(Soft Lithography)
MoldingMoldingMolding
Soft Stamps(Soft Lithography)
Soft Stamps(Soft Lithography)
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Nanoimprinting
replicative techniqueHigh resolution (-> 10nm)parallel structuringroom temperature process(UV-Imprinting)direct structuring of flexible, substrates (Hot Embossing)high and low aspect ratiocost effectivehigh volume (-> DVD)
2002
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Imprinted Polymer LaserChristian Doppler Laboratory for Advanced FunctionalMaterials, AT&S, JOANNEUM RESEARCH
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450 500 550 600 650 700
0.0
0.2
0.4
0.6
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1.0 LASER ASE
Nor
m. e
mis
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inte
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Wavelength (nm)
0 5 10 15 20 25
Out
put P
ower
(a.u
.)
Energydensity (µJ/cm2)
Imprinted Polymer Laser
Christian Doppler Laboratory for Advanced FunctionalMaterials, AT&S, JOANNEUM RESEARCH
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Hot-Embossing
Mask-Aligning
2004 2004
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Microimprint Lithographie
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foil, glass
1. Substrate and Gate-contact
2. Gate-Dielectric
OrganicOrganic dielectricdielectric
Spin-on Crosslinking
heat
3. Imprint-resistSpin-on
4. Hot-embossing (EVG 520)
Stampheat
pressure
heat
separation
NanoimprintNanoimprint--LithographyLithography 11
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6. Source- und Drain-contacts
Spin-on evaporation
Source- and Drain-Material
Lift-off
7. Organic semiconductor
Organic Semiconductor
5. EtchingReactive Ionetching
NanoimprintNanoimprint--LithographyLithography 2 2
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Engineering of thin film growth
- substrate (surface energy, roughness,…) and substrate treatment (etching steps, chemicalprocesses,...)
- substrate temperature during evaporation- deposition rate- film thickness
50 nm pentacene on different substrates, 5x5µm-AFM heightimages Au PMMA PVCi PVP
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grainsize – carrier mobility
0
0,05
0,1
0,15
0,2
0,25
0,3
0,35
0,4
0,45
0 1 2 3 4 5 6 7Grain Size (µm)
Mob
ility
(cm
2 /Vs)
SiO2
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All-organic FET
50nm Pentacen auf PMMA mit S/D-Kontakten aus Panipol
-8,0E-07
-7,0E-07
-6,0E-07
-5,0E-07
-4,0E-07
-3,0E-07
-2,0E-07
-1,0E-07
0,0E+00-100-90-80-70-60-50-40-30-20-100
V_DRAIN[V]
I_D
RA
IN[A
]
VG[V]: 0 FORWARDVG[V]: 0 REVERSEVG[V]: -10 FORWARDVG[V]: -10 REVERSEVG[V]: -20 FORWARDVG[V]: -20 REVERSEVG[V]: -30 FORWARDVG[V]: -30 REVERSEVG[V]: -40 FORWARDVG[V]: -40 REVERSEVG[V]: -50 FORWARDVG[V]: -50 REVERSE
50µm
Ink-jet printed polymer electrodes
on 50nm pentacene on PMMA
Output Characteristics
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3D-StructuringTwo Photon Absorption (TPA)
Two-Photon-Absorption (TPA)
Non linear process (prop. I²)Absorption via virtualintermediate stateHigh laser intensity requireddue to short life time of intermediate level
1 photon process
2 photon process
Ground state
Excited state
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Typical setup for TPA
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Characteristics of polymer laserprocessing
Laser direct writing by means of multi photon absorption
True 3D technique in transparent media with µm and sub-µm resolutionmaskless methodSingle writing stepWell suited for small series or rapid prototyping
Structuring by means of non-linearabsorption (2P photopolymerization)Lateral resolution and depthresolution depends on
Velocity, sample feedratewavelengthnumerical apertureIntensity
resolution < 50nm
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Scheme of TPA-Setup @ NMP
Ultrafast Ti:S Laser
PC Control and CAD
BeamAnalysis
Shutter/Attenuator
Stage
MachineVision
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Optical Waveguides
3D Structuring with Two-photon absorption (TPA)
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PackagingOrganic photodiode an newspaper
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Packaging
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Summary- ALL-ORGANIC - > appealing approach- every-day life substrates (paper, textiles) - cost and reliability decide about materials and
processes- replicative processes for high volume
manufacturing –> Nanolithography –nanoimprinting
- packaging strategy open- Integrated organic electronics
-> disruptive technology
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ThankThank youyou !!
© JOANNEUM RESEARCH Forschungsgesellschaft mbH
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