1 2404 Temp Controller, Eurotherm, 2404 A None2 0097-0500-02 RF Finger Gasket A 2

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model

3 02-00055-00 ASSY, FOOT SWITCH B 14 02-00079-00 ASSY, HF CHOKE B 15 02-00080-00 ASSY, HEATER ISO FILTER B 26 02-00085-00 ASSY, INDUCTOR, 420UH 30 A 17 02-00147-00 PCB, ASSY CASS DOOR INT'L B 18 02-00172-00 ASSY, PCB HEATER MONITOR B 19 02-00216-00 PCA, TC FILTER B 110 02-00286-00 Assy, Panel, Purge B 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model11 02-00322-00 ASSY, HIM FILTER BOX C 212 02-021422-00 ASSY,DC POWER SUPPLY I/F BOARD A 213 02-028522-00 ASSY,SYS CNTRLR,P100/16MEG B 214 02-029998-00 None B 215 02-033395-00 ASSY,PED,200MM,D,196,8 JEIDA B 416 02-033395-00 ASSY,PED,200MM,D,196,8 JEIDA B 417 02-034310-00 ASSY,MOD CONT,P100/16M A 418 02-034310-00 ASSY,MOD CONT,P100/16M B 419 02-034310-00 ASSY,MOD CONT,P100/16M B 420 02-042544-00 Light Tower Assy, 4 Color, Wall Mt B 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model21 02-042669-00 None B 222 02-042686-00 ASSY, PCB INTERLOCK BOARD, SPEED-S B 223 02-046180-00 Helium Backside Cooling Assy B 324 02-051458-00 PET Aligner B 125 02-051459-00 PET Aligner B 126 02-053688-00 DC DISTRIBUTION BRD-EXTRA IOC B 427 02-101176-00 ASSY,PROBE,NTM3,SPD-S(NTM 300) B 128 02-10368-00 ASSY, PEDESTAL LIFT, SPEED B 229 02-10589-00 ASSY,RF INTERLOCK BOX B 330 02-111903-00 ASSY, RF FEEDTHRU A 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model31 02-127707-00 ASSY,SYS CNTRLR,P166/64M,+24V B 132 02-127708-00 ASSY,MOD CNTRLR,P166/64M,+24V B 133 02-130072-00 Seal Plate Assy B 234 02-153360-00 Degas Assy, ILDS B 1135 02-251781-00 Pedestal Utilities Box Assy B 236 02-805663-00 Assy, Controller, EPD B 237 03-00209-00 ASSY, CABLE CA246 A 238 03-00258-00 Shower Head, 200mm Liguid Cool A 239 03-00258-00 SHOWER HD, 200MM STYLE B B 540 03-00299-00 ASSY INDUCTOR B 2

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model41 03-034695-00 Converter B 442 03-041149-00 HARNESS,LASER RECV.,R Z CAL B 143 03-041149-03 HARNESS,LASER RECV.,L Z CAL A 444 03-041149-04 HARNESS,LASER RECV.,L XY CAL B 845 03-041150-00 HARNESS,LASER TRANS.,R Z CAL B 246 03-041150-02 HARNESS,LASER TRANS.,R MAP B 847 03-041150-03 HARNESS,LASER TRANS.,L Z CAL B 248 03-10355-00 ASSY, PCB, INTERFACE, OEM-25 B 249 03-10467-00 FA LOWER INTERLOCK PCB B 150 03-10795-00 Interlock Switch B 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model51 03-153541-00 None A 152 03-153541-00 None B 453 03-166293-00 PCA, Toggle, HDP B 154 03-166293-00 PCA, Toggle, HDP A 355 04-047583-00 Optics Assy, Left, Loadlock B 356 04-10075-00 PCA,RF GEN INTF,CVD-D B 157 04-119101-00 Kit, Cable, Shuttle, DLCM-S A 258 05-00085-00 Alarm, Beacom Box C 259 05-164943-00 C2, SPEED, COOL STATION B 160 07-034720-00 Right Load Lock Interface Board, DLCM-S B 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model61 10-00424-00 Tube Assy A None62 10-052632-00 Tube Assy B 263 10-120295-67 Tube Ass'y, Spool, F-M-F,L=1.67, P A 1064 10-144144-00 ASSY TUBE,He SUPPLY TO MNBLK A 665 10-152877-00 Tube Ass'y, HBCQ Coupling 3/8-1/4 A 166 15-00027-00 Guide, Nozzle C 1767 15-00027-00 Guide, Nozzle B 1868 15-00027-02 GUIDE, NOZZLE ADJUSTER B 869 15-00043-02 ADJUSTER, CERAMIC GAS PLATE C 370 15-00075-00 BRACKET, LOAD LOCK SUPPORT B 2

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model71 15-00216-01 HOLDER, FILTER LL BACKFILL B 172 15-00229-00 NUT, FEEDTHRU 1/2-2OUN X.25 B 4873 15-00309-00 HANGER, NOZZLE A 1174 15-00309-00 HANGER, NOZZLE B 5375 15-00309-01 HANGER,NOZZLE B 2176 15-00311-00 CAP, ELECTRICAL FEEDTHRU B 2177 15-00371-00 NUT, HEATER STRAP B 4778 15-00386-00 WASHER, #10 NICKEL C 979 15-00399-02 SCREW, TOP SPINDLE C 780 15-00399-03 SCREW, TOP SPINDLE B 10

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model81 15-00399-04 SCREW, TOP SPINDLE, 1.02LG C 882 15-00457-00 SCREW, HEATER STRAP A 783 15-00457-00 SCREW, HEATER STRAP B 1284 15-00558-01 SHIELD, HTR STRAP 2.00 LG C 385 15-00558-02 SHIELD, HTR STRAP 2.75 LG C 186 15-00558-02 SHIELD, HTR STRAP 2.75 LG A 287 15-00578-00 CAP, CERAMIC FEEDTHRU B 788 15-00648-00 POST, MONITOR A 189 15-00654-00 WASHER, FLANGE B 590 15-00680-00 SLEEVE, CERAMIC A 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model91 15-00685-00 FEEDTHRU, INNER A 492 15-00685-00 FEEDTHRU, INNER B 4893 15-00686-00 WASHER, FT B 794 15-00686-00 WASHER, FT A 895 15-00686-00 WASHER, FT C 2096 15-00698-00 SCREW, FORK A 597 15-00698-00 SCREW, FORK C 3198 15-00699-01 Folk, Finger, Type-01(Standard) B 799 15-00699-01 Folk, Finger, Type-01(Version 1) B 8100 15-00699-01 Folk, Finger, Type-01(Version 2) B 9

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model101 15-00699-02 Folk, Finger, Type-02 B 20102 15-00699-02 Folk, Finger, Type-02(Version 1) A 33103 15-00701-00 FORK, BOTTOM PLATE B 1104 15-00703-00 PLATE, FORK TOP 150mm WAFER B 1105 15-00709-00 EXTENDER, SHAFT B 2106 15-00729-00 Clamp, Flat A 2107 15-00742-00 Tube, Te Ceramic A 2108 15-00866-00 SPRING, CERAMIC PED., WCVD A 11109 15-00949-00 Block, Guide(Pedstal Moer Guide),Ceramic B 2110 15-00949-00 BLOCK, GUIDE, Aluminum + Metal B 20

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model111 15-00951-00 CUP, SCREW COVER B 75112 15-01025-00 Ring, Cap Manometer, Ceramic B 1113 15-01052-00 PADDLE, DIMPLED 200MM A 1114 15-01101-00 HUB,INDEXER B 1115 15-01104-00 SCREW,10-32 X .75 NICKEL A 1116 15-01132-00 HOUSING, BEARING,PURGED C 1117 15-024611-00 PADDLE,200mm,WITH DIMPLES C 6118 15-024881-00 FORK,END,CAP C 5119 15-024948-00 PLATFRM.ENDEFF.150mm,A196-60ML B 2120 15-028190-00 BASE,150MM ESC ONE FLT,SOLD. C 2

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model121 15-028766-00 RING,GUARD,200MM B 3122 15-032014-01 WINDOW,OBS. USE 15-032014-01 B 3123 15-032452-00 WINDOW,LEXAN,CHAMBER,SPEED A 6124 15-032503-00 RING,INSULATOR A 1125 15-032503-00 RING,INSULATOR B 1126 15-032504-00 HUB,PEDESTAL C 1127 15-032939-00 EXCL RING,200MM,2.25MM OH,SEMI B 1128 15-032999-00 None B 1129 15-033103-00 None B 2130 15-033253-00 ADAPTER, BACKFILL,DLCM B 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model131 15-033485-00 Insert, MESC Port, Inligner A 2132 15-033485-00 Insert, MESC Port, Inligner B 2133 15-033741-00 PADDLE,150mm W/DIMPLES B 2134 15-033741-00 PADDLE,150mm W/DIMPLES C 2135 15-033874-00 PLUG INJECTOR, MANIFOLD A 20136 15-034333-00 TUBE,PROCESS INJ.,SPEED B 31137 15-034847-00 HUB UPPER INDEXER B 2138 15-045627-06 INDEXER,150MM W/NI PINS B 1139 15-050160-20 TUBE,INJECTOR,HI PURITY B 8140 15-101482-00 FORK,TOPLATE,A,ANTIDEFLECT,SEQ B 4

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model141 15-101482-01 FORK,TOPLATE,B,ANTIDEFLECT,SEQ B 4142 15-103913-01 FEEDTHRU,COPPER C 2143 15-103913-01 FEEDTHRU,COPPER, Clamp Type C 4144 15-103913-02 CLAMP,STRAP,FEEDTHRU C 5145 15-103913-03 Sheath, Teflon B 6146 15-108174-00 CUP,SCREW COVER A 2147 15-108174-00 CUP,SCREW COVER B 80148 15-109921-00 COVER,ESC,200MM SEMI,ALN A 1149 15-110411-00 Window, Sapphire B 3150 15-11239-00 INSULATOR RING,6 INCH A 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model151 15-11239-00 INSULATOR RING,6 INCH B 1152 15-11244-00 BELLOWS, PEDESTAL B 3153 15-113064-00 Nozzle, Injector C 48154 15-113293-00 BRKT, Holder, Stop, Ped, Lift A 2155 15-116792-00 Tube, RF Break, .25 O.D A 1156 15-116792-00 Tube, RF Break, .25 O.D C 3157 15-118976-00 Plate, Cooling, ESC, IC C 7158 15-118988-00 shield, Safety, Ped, Lift, Speed B 12159 15-119059-00 SCR,1/4-20X.25LG,NICKEL,CAP B 22160 15-120707-00 PADDLE,200MM,INLIGNER,DLCM B 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model161 15-121119-00 Plate, Cooling, ESC, IC C 1162 15-129972-00 Plug, ESC, Sapphire B 2163 15-134732-00 Hub, 200mm, Pedestal, Concetric, Lift B 5164 15-139453-14 INSERT, ORIFICE E38,.014 A 4165 15-139453-15 INSERT, ORIFICE E38,.015 A 4166 15-139453-16 INSERT, ORIFICE E38,.016 A 4167 15-139453-17 INSERT, ORIFICE E38,.017 A 4168 15-139453-18 INSERT, ORIFICE E38,.018 A 4169 15-148386-00 RTNR PEDESTAL BOLT A 2170 15-158185-00 INJECTOR,TUBE,CLN,SPD-S,HI PUR B 6

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model171 15-255518-00 ESC, MC, Plt, Cooling, 6Pin, 200mm C 1172 15-257942-21 Nozzle, 21mil A 2173 15-257942-22 Nozzle, 22mil A 8174 15-257942-23 Nozzle, 23mil A 2175 16-00025-00 VIEWPORT, LOAD LOCK SIDE B 1176 16-00092-00 Wire Insulated Ceramic Pead(Short) B 17177 16-00098-00 Wire Insulated Ceramic Pead(Long) A 2178 16-033931-00 WELDMENT,SHOWER HD PINNED 200 B 4179 16-033931-00 WELDMENT,SHOWER HD PINNED 200 B 5180 16-10268-00 BOX RF SHUNT B 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model181 16-103973-00 SCRN,TURBO PUMP, 8 INCH,ALUM C 6182 16-10518-00 Box, RF, Generator, Interlock B 1183 16-256823-00 Plate, Seal, 200mm, 5Pin, 3/8 B 1184 17-00094-00 STRAP, RF A 5185 17-00148-00 SPRING, FORK B 27186 17-00262-00 SCREEN, RF SHIELD A 1187 17-00262-00 SCREEN, RF SHIELD B 1188 17-00279-XX Bezel,CRT, T/S,150mm-Second Source B 3189 17-026406-00 Bracket, Mtg, MBlk(Nupro) 1.25 B 25190 17-026432-00 None B 9

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model191 17-028652-00 Bracket, Demper B 1192 17-032018-00 SCREEN RF SHIELD, ETCHED B 1193 17-032453-01 Screen RF Shield B 4194 17-045363-00 None B 4195 17-10391-00 FLAG, CASSETTE B 1196 17-103987-00 STRAP,RF A 5197 17-10493-00 Interlock Switch B 1198 17-115229-00 Bracket, Cassette, Present A 5199 17-140415-00 Bracket, Mtg, MFC B 45200 19-00122-00 Eprom, Ram B 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model201 19-00123-00 PCB, Indexer Ext w/Jumpers B 1202 19-00124-00 PCB, Indexer Rot w/Jumpers B 1203 19-00127-00 PCB, ANALOG OUT W/JUMPER B 1204 19-00136-00 PCB, ANALOG OUTPUT(NG) A 2205 19-00156-00 PCB, DIGITAL I/O 519A #1 B 2206 19-00157-00 PCB, DIGITAL I/O(NG) A 2207 19-00206-02 FLOW RESTRICTOR .043 VCR GASKET A 2208 19-00266-01 Ext, Motor, Robot, C1 A 2209 19-00268-01 Lift, Motor, Robot, C1 A 4210 19-00273-00 WASHER, SPRING MOD. A 16

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model211 19-00299-00 HEATED DOA, INJECT MANIFLD/OBS B 5212 19-034573-03 BEARING, BALL, .50 ID X .875 B 1213 19-034573-04 Bearing, Linear A 1214 19-07636-00 PHOTOCOUPLER W/CONNECTOR B 1215 20-00288-00 Belt, Timing B 1216 20-00428-00 RING, RETAIN, CRESCENT 1/2" A 8217 20-00459-00 Bolt, Berg A 19218 21-10138-00 wave Washer, Berg A 34219 22-00179-00 FTG, Q/S 90 DEG.ELBOW 3/ B 1220 22-00179-00 FTG, Q/S 90 DEG.ELBOW 3/ A 2

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model221 22-00288-00 T-SEAL, 15/16ID X 1 3/16 OD A 1222 22-00342-00 NUT, ULTRA-TORR 3/8 TUBE B 1223 22-00342-00 NUT, ULTRA-TORR 3/8 TUBE A 2224 22-00343-00 SLEEVE, ULTRA TORR 3/8 T B 1225 22-00655-00 VALVE, DIAPM. NO, FVCR A 1226 22-023163-00 VALVE, NO, 1/4MVCR A 12227 22-026373-00 Filter, Male in Female out A 6228 22-028206-00 SCREW,10-32 X .50,SHC,NI.PL. A 6229 22-028382-00 SEAL, FLANGE (Large) A 5230 22-042340-00 SEAL, FLANGED A 4

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model231 22-052448-00 VALVE,MONO-BLOCK A 2232 22-101053-00 SEAL ASSY A 5233 22-10149-00 Seal, Lip A 1234 22-10292-00 Seal Door Right B 1235 22-112015-00 Follower, RF, Feedthru B 4236 22-116175-00 ACTUATOR, LINEAR,5/8 SLIDE A 2237 22-121272-00 ASSY,DUAL,V/V,1/4,FEMALE, VERIFLO A 2238 22-121273-00 ASSY,DUAL VALVE,1/8,F/M/M A 2239 27-00001-00 MATCHING NETWORK B 1240 27-00009-00 CTRL,Pres,Throttle Valve(Reactor), Tylan B 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model241 27-00010-01 Thermocouple, Type J, 1/8" B 1242 27-00079-00 Bellows, Control TC B 1243 27-00128-01 LFC Moduie B 7244 27-00141-00 CONT., T-VALVE AC-4 B 1245 27-00161-00 POWER SUPPLY-ET 24 +/- 15VDC B 1246 27-00198-00 CONTROL UNIT, SIGMA 6 B 1247 27-028234-00 Animatics Controller C 1248 27-029889-00 PS,VDC MEGAPACK 7 OUTPUTS A 1249 27-032435-00 PCA, Serial LT TWR, 24 A 1250 27-034079-00 ECC1-1, Power Supply C 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model251 27-048040-00 METER/OBS USE 27-048040-00 B 1252 27-050034-00 PUMP, TURBO, PFEIFFER B None253 27-050054-00 PUMP,TURBO,1100L/S PFEIFFER B 2254 27-10053-00 15VDC, P/S B 1255 27-10069-00 15VDC, P/S B 2256 27-10157-00 I/O CONTROLLER B 2257 27-10318-00 I/O CONTROLLER B 2258 27-10335-00 Tracktball PCB B 1259 27-10341-00 ENI, RF GEN, OEM-50 INTERLOCK B 1260 27-118913-00 Arcnet Card A 2

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model261 27-121645-00 MATCH,TRAZAR,SEQ,IMP COOLING B 1262 27-126029-00 MANOM,HTD,0.1T,HORIZ ELBOW,MKS A 3263 27-152739-00 PCB, CPU, 8086-2(TEOS OPTION) A 2264 27-258087-00 NTM 500 Assy B 1265 31-00176-00 GASKET, 1/8DIA, WIRE MESH RF SHL A 36266 31-118636-10 Shielding, RF, Spira A 1267 31-118636-10 Shielding, RF, Spira A 5268 31-118636-88 Shielding, RF, Spira A 1269 31-118636-88 Shielding, RF, Spira A 6270 34-00056-00 Switch, Interlock B 6

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model271 34-00102-00 Switch, Overtravel, Plunger A 3272 34-029889-12 12VDC, 8.3A, Megapac, P/S A 5273 34-029889-15 15VDC, 10A, Megapac, P/S A 2274 34-029889-24 24VDC, 8.3A, Megapac, P/S A 1275 34-029889-24 24VDC, 8.3A, Megapac, P/S B 1276 34-029889-50 5VDC, 20A, Megapac, P/S A 1277 34-029889-51 5VDC, 30A, Megapac, P/S A 1278 34-029889-90 90VDC, 2.1A, Megapac, P/S A 4279 34-042425-00 Switch, Overtravel, Roller, Plunger A 11280 38-109744-00 Cable Assy, RS-232, FLEX-8 A 2

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model281 39-00023-00 CONN, PNEUMATIC BULK HEAD B 1282 40-055609-27 Rod, Quartz, 4mm B 1283 40-08916-00 Glas, Rod, Tubular, Sensor A 1284 60-00003-00 VALVE, HI-VAC (MAIN 4 IN.) 24V B 2285 60-00033-00 FLTR, BACKFILL, Millipore, WGFG40 H01 A 1286 60-00057-00 OBS,REPLACED WITH 60-143771-00 B 1287 60-00091-00 CYLINDER, 1 1/8 BORE, BUN A-N B 2288 60-00193-00 VACUUM, SWITCH, ATMP A 1289 60-00194-00 VACUUM, SWITCH, 20 TORR A 1290 60-027139-00 TEE,KF-25,ALUM,SHORT B 2

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model291 60-034738-00 SWITCH, PRESSURE CDA 05-100 A 4292 60-10058-00 SWITCH, PRESSURE CDA B 2293 60-10129-00 OBS, REPLACEMENT #02-115275-00 B 1294 60-10317-00 V/V,Throttle, Vac, CTRL, Heated, Tylan C 1295 60-122735-00 Valve, Angle, KF40, Pneu, Heatable A 6296 60-130892-00 Valve, Throttle, 153D MKS A 1297 60-143771-00 OBS,REP, 60-143771-00, GAUGE B 1298 629B-15894 Manometer, 629B-15894, MKS B 2299 6LV-DTFR4-P-BL Valve, Swagelok A 3300 6LV-P1V222P-BA Valve. Swagelok A 2

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model301 6LVV-DPFR4-P-C Valve, Swagelok A 3302 750B11TCE2GK Baratron Gauge, 750B11TCE2GK B 2303 852B12TBB4GA Mano, Pres, Baratron, 100torr, MKS B 2304 AX7685 RPC 8L A 3305 AX7685 RPC 8L A 3306 AX7685 RPC 8L A 3307 CNT-EV-PCI VGA Card A 2308 CP5-23 Pin, Berg A 198309 DSQ-152M RS232 Select Switch A 1310 GD-K11D Gas Detector, RIKEN KEIKI A 16

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model311 GD-K8DG Gas Detector, RIKEN KEIKI A 3312 GD-V11D Gas Detector, RIKEN KEIKI A 3313 L27-049867-00 COMDEL, CLF-5000, 5KW-CE GEN. B 2314 LPG-12A ENI, Generator B 1315 LR250 Banner, Sensor A 1316 MC3 MC3(Reverse, CPU 850Hhz, 256M Ram) A None317 NZM1/2-XV4 C/B Handle Bar A 1318 NZM1-XTVD-NA C/B Handle A 1319 NZM1-XUHIV24AC UPS+AUX A 2320 NZMB1-A20-NA Circuit Breaker A 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model321 OEM-28B ENI, Generator B 1322 QNX-000001-01 QNX CTRL(Reverse, Demo) A 3323 QNX-760070-01 P-166 Board A 1324 QNX-760070-01 P-166 Board B 1325 S2QMICRO302PFSMM S2QMICRO302PFSMM(VERIFLO VALVE) A 1326 SD-11SC Signal Converter, RIKEN KEIKI A 3327 SEC ACRD SEC ACRD B 3328 SP100FF Banner, Sensor A 4329 TCP600 TCP600, Turbo Pump CTRL, PFEIFFER B 3330 VI-PJW01-EYZ Power Supply A 8

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model331 ANIMATICS CTRL CABLE ASS'Y(OLD TYPE) A 1332 ANIMATICS CTRL CABLE ASS'Y(NEW TYPE) A 1333 Rexorite Raw material A 1334 ILDS Heating Jacket Set A 1335 Spindle, 200mm, C2(Revision Type) A 1336 ZIP100, Zip Driver A 1337 MSSD MODULE A 1338 Drive, Motor, C1(Up Grade) B 1339 Acryl Cover B 2 No image340 LPT2200 None B 1

Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Novellus C1/C2 Spare Parts Stock List - (1)Condition EA PhotoDescriptionNo p/n or Model341 19-00154-00 HEATER, 2KW AND 2KW 8(NoNotch) C 3342 19-00155-01 HEATER, BB 150MM C 3343 19-00155-01 HEATER, BB 150MM B 1344 LPI2200 None B 1

Porta300 None B 1345 Porta300 None B 1346 Porta300 None B 1347 Shuttle Shuttle, DLCM B 1348 Shuttle Shuttle, DLCM C 1349 AX1000II Generator, AD-TEC B 1350 0