Microstructural Characterization - Seoul National...
Transcript of Microstructural Characterization - Seoul National...
![Page 1: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/1.jpg)
Microstructural CharacterizationMicrostructural Characterizationof of
MaterialsMaterials
EunEun SooSoo ParkPark
Office: 33-316 Telephone: 880-7221Email: [email protected] hours: by an appointment
2009 spring
04. 22. 2009
![Page 2: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/2.jpg)
![Page 3: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/3.jpg)
C, Cr, Au-Pd
![Page 4: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/4.jpg)
A purpose of coating
2. Increase the efficiencyof secondary electron
3. Protect the specimensurface against primaryelectron beam
Prevention ofcharge-up
Improvement ofSignal to Noise(S/N) ratio
Reduction of damage
1. Give a conduction to specimen surface
![Page 5: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/5.jpg)
I0Ib Is
Ia
Ib:Back scattered Electron
I0:Primary Beam
Is:Secondary Electron
Ia:Specimen Current
Theory of Scanning Electron MicroscopeTheory of Scanning Electron Microscope
I0= Is +Ib+ Ia Charge-up
![Page 6: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/6.jpg)
Charge-up Phenomena Eliminate Charge-up Phenomena
Vacc:1.5kVVacc:1.5kV Vacc:0.7kVVacc:0.7kV
Specimen : SiO2 on Photo Resist Line Pattern
Observation at lower accelerating voltagesObservation at lower accelerating voltages
![Page 7: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/7.jpg)
conductivitysample
non-conductivitysample
after coating
SE
metal-coating
primary electron beam
SESE SE
Improvement of (S/N) ratio
![Page 8: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/8.jpg)
Non-Conductive Samples Observation
Specimen : Ceramics
Vacc : 5kVUpper Detector
Vacc : 1kVUpper detector
![Page 9: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/9.jpg)
Specimen : Ceramics
Vacc : 1kVUpper Detector
Vacc : 1kVLower Detector
Non-Conductive Samples Observation
![Page 10: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/10.jpg)
![Page 11: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/11.jpg)
![Page 12: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/12.jpg)
(1)
(2)
(3)
(4)
![Page 13: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/13.jpg)
![Page 14: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/14.jpg)
![Page 15: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/15.jpg)
![Page 16: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/16.jpg)
![Page 17: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/17.jpg)
Probe current
거친 imageLoss Damage small
High resolution
Smooth image Deteriorated resolutionlarge
More damage
![Page 18: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/18.jpg)
1/109 A 1/1010 A
1/1011 A
![Page 19: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/19.jpg)
돌기
가장자리
원주
![Page 20: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/20.jpg)
![Page 21: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/21.jpg)
![Page 22: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/22.jpg)
![Page 23: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/23.jpg)
![Page 24: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/24.jpg)
![Page 25: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/25.jpg)
![Page 26: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/26.jpg)
1.0 KV
1.3 KV 10 KV
4 KV
절연도료 초파리
![Page 27: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/27.jpg)
![Page 28: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/28.jpg)
Working distance Aperature size
거친 image
![Page 29: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/29.jpg)
![Page 30: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/30.jpg)
Astigmatism
![Page 31: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/31.jpg)
Astigmatism
![Page 32: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/32.jpg)
꽃가루
Excessive contrast
Excessive brightnessInsufficient brightness
Insufficient contrast
Optimum
Contrast &Brightness
![Page 33: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/33.jpg)
Influenced
Uninfluenced
![Page 34: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/34.jpg)
![Page 35: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/35.jpg)
고무나무유액
![Page 36: Microstructural Characterization - Seoul National Universityocw.snu.ac.kr/sites/default/files/NOTE/5282.pdf · 2018. 1. 30. · Microstructural Characterization of Materials Eun Soo](https://reader033.fdocuments.us/reader033/viewer/2022052805/6056817a638cad7ae67b6a0c/html5/thumbnails/36.jpg)