Micro/Nano Mechanical Systems Lab –Class#1 · 9 Lab #1 –Fabrication. Microsystems Laboratory...

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Microsystems Laboratory UC-Berkeley, ME Dept. 1 Liwei Lin, University of California at Berkeley Micro/Nano Mechanical Systems Lab – Class#1 Liwei Lin Professor, Dept. of Mechanical Engineering Co-Director, Berkeley Sensor and Actuator Center The University of California, Berkeley, CA94720 e-mail: [email protected] http://www.me.berkeley.edu/~lwlin

Transcript of Micro/Nano Mechanical Systems Lab –Class#1 · 9 Lab #1 –Fabrication. Microsystems Laboratory...

Page 1: Micro/Nano Mechanical Systems Lab –Class#1 · 9 Lab #1 –Fabrication. Microsystems Laboratory UC-Berkeley, ME Dept. Lab #2, Micro Robots

Microsystems LaboratoryUC-Berkeley, ME Dept.

1Liwei Lin, University of California at Berkeley

Micro/Nano Mechanical Systems Lab – Class#1

Liwei Lin

Professor, Dept. of Mechanical Engineering Co-Director, Berkeley Sensor and Actuator CenterThe University of California, Berkeley, CA94720

e-mail: [email protected]://www.me.berkeley.edu/~lwlin

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Microsystems LaboratoryUC-Berkeley, ME Dept.

2Liwei Lin, University of California at Berkeley

Outline

Course Administration Introduction

• Top-down Technologies• Bottom-up Processes

Lab Intros

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Microsystems LaboratoryUC-Berkeley, ME Dept.

3Liwei Lin, University of California at Berkeley

Course Website

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Microsystems LaboratoryUC-Berkeley, ME Dept.

4Liwei Lin, University of California at Berkeley

Course Description

Page 5: Micro/Nano Mechanical Systems Lab –Class#1 · 9 Lab #1 –Fabrication. Microsystems Laboratory UC-Berkeley, ME Dept. Lab #2, Micro Robots

Microsystems LaboratoryUC-Berkeley, ME Dept.

5Liwei Lin, University of California at Berkeley

Grading, Quiz & Final Project

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Microsystems LaboratoryUC-Berkeley, ME Dept.

6Liwei Lin, University of California at Berkeley

Weekly Schedule (Tentative)

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Microsystems LaboratoryUC-Berkeley, ME Dept.

7Liwei Lin, University of California at Berkeley

Selected Papers (Tentative)

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Microsystems LaboratoryUC-Berkeley, ME Dept.

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Lab #1 – Energy Harvesters

Design and Fabrication of an Energy Harvester Demonstration of “Energy Harvester” – class competition Challenges

• Efficient Actuator• Harsh environment operatoins

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Microsystems LaboratoryUC-Berkeley, ME Dept.

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Lab #1 – Fabrication

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Microsystems LaboratoryUC-Berkeley, ME Dept.

Lab #2, Micro Robots

Design and Fabrication of a Micro Robot Demonstration of “Walking” – class competition Challenges

• Directional controls• Flying robots

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Microsystems LaboratoryUC-Berkeley, ME Dept.

Lab #2, Fabrication

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Microsystems LaboratoryUC-Berkeley, ME Dept.

Lab #3, Graphene based Devices

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Microsystems LaboratoryUC-Berkeley, ME Dept.

Lab #4, MD Simulation

Lab #5, Microfluidics