NUANCE CenterNorthwestern University

Atomic and Nanoscale Experimental Characterization Center

Professor Vinayak P. Dravid, Ph.D.

Director

NUANCE CENTERNU Atomic and Nanoscale Characterization Experimental User Facilities

NIFTINanoscale Integrated

Fabrication, Testing and

Instrumentation

Keck-IIKeck Interdisciplinary

Surface Science

EPICElectron Probe

Instrumentation

Center

A Unique, Centralized, and Integrated NU Resource

Atomic-Scale Characterization

Surfaces, Interfaces, Nano-Bio Structureswww.nuance.northwestern.edu

Professor Vinayak P. Dravid, Director

SPF

Specimen Preparation Facility

Contact Angle

Zeta Potential and Particles SizeControlled Vacuum Evaporation

Controlled Atmosphere Ovens

Plasma Cleaning System

Cryo-Preparation Laminar Flow Hoods with Sonicators

Controlled Atmosphere Spin Coaters

Dip-Pen Nanolithography (DPN)

Microcontact Printing (mCP)

Nanoimprint Lithography (NIL)

FEG Electron Beam Lithography (eBL)

Focused Ion Beam (FIB)

ToF-SIMS, XPS, UHV STM/AFM

4 SEMs, 3 TEMsEnergy Filtered Cryo-TEM

SNOM, with Femto-s Spectroscopy

Surface Plasmon Resonance (SPR)

Scanning Molecular Force ProbeLaser Fluorescence Optical Microscope

FTIR Microscopy/Spectroscopy

Soft and Hard Lithography

Nano- to Microscale

Measurement/Testing

& Preparation

Imaging, Spectroscopy and Analysis

Nano- to Microscale

Keck-I Biophysics APS-CATs

NUANCE CENTER

Facility Collaboration

NUANCE CENTER

Integrated Atomic-Nanoscale Surface/InterfaceBio/Nano Analytical Capabilities

Merging Length-ScalesFrom Micro-to Nanoscale Fabrication and Analysis

Complete and Open-AccessTrainingCollaborationUser Feed-back

Complementary CapabilitiesKeck BiophysicsArgonne-CATs

EPIC & Sample Prep

Managers for EPIC

TEM: Jian-Guo Zheng, Ph.D. & Shuyou Li, Ph.D.

SEM: Ben Myers

Gajendra Shekhawat, Ph.D. also on Quanta

Specimen Preparation: Shuyou Li, Ph.D.

Electron Probe Instrumentation Center

• Transmission Electron Microscopes — TEM(JEOL JEM-2100F, Hitachi HF-2000, H-8100)

• Scanning Electron Microscopes — SEM(LEO Gemini 1525, Hitachi S-4500, S-3500,FEI Quanta 600)

• Focused Ion Beam — FIB(Hitachi FIB 2000A)

TEM SEM

FIB

Electron diffraction patterns of a membrane

protein: Before and after energy filtering

Atomic resolution of HfO2/SiO2/Si

Atomic resolution of novel

carbon nanostructure

Elemental mapping of Fe-B nano-capsules

DNA-linked gold nanoparticles

Focused Ion Beam:

Site- and shape-specific

trenches for microfluidicsLiposome-nanoparticle

assembly for drug/gene delivery

CdSe nano-material:

Bright/dark field micrographs and diffraction pattern

Gold flowers

Nano-diffraction pattern from nano-Ag

prisms

Nano-cheerios!

Hollow nanoparticles of Pd catalyst

Poly-crystal grains via EBSD—

Mapping crystallography and orientation

Orientational imaging

Image of Ebola virus depicting

the deadly thread morphology

Processed cheese:

Note the fat globules!

Images of human dentinal

Alumina FE tipNano-fetti

Sample Preparation Facility

• Complete Metallography Set-Up

• JEOL Carbon Evaporator

• Fischione Plasma Cleaner

• For TEM—

– VCR Precision Dimplers

– Gatan Dry Pumping Station

– South Bay Electropolisher (Single Jet)

• Ultrasonic and Slurry Disc Cutters

• Precision Ion Polishing System

• IBT

Keck-II

Manager for Keck-II

Nick Wu, Ph.D.

Keck Interdisciplinary Surface Science

• Fourier Transform Infrared Spectroscopy (FT-IR)

• Time-of-Flight Ion Mass Spectrometry (ToF-SIMS)

• Ultra-high Vacuum Scanning Tunneling

Microscopy/Atomic Force Microscopy

(UHV STM/AFM)

• X-ray Photoelectron Spectroscopy (XPS/ESCA)

Focus: surface analysis and nano-scale characterization

Commission: research, collaboration, education and outreach

SIMS-PHI TRIFT IIUHV STM/AFM-Omicron

XPS-OmicronDigital Instrument SPM

Keck-II Power

Chemical map of Mg/MgB2 composite using SIMS

Boron map Mg map

STM image, atomic terrace of Au

STM image, HOPG

NIFTI

NIFTI Manager

Gajendra Shekhawat, Ph.D.

Nano-Scale Integrated Testing, Imagingand Instrumentation User Facility (NIFTI)

• Nano-Scale Characterization and Nanopatterning

• Novel, Unique Capabilities and Operational Platform

• Novel Nanometrology Instrumentation and Techniques

• Nano-Modeling and Integrated Electrical Testing(in development)

Nano-modelling and Integrated

Electrical Testing

Nano-Scale

Characterization

& Nanopatterning

Novel and Unique Capabilities

& Operational Platform

Sample

tip piezo

Stress (MPa)

+14.1

-10.1

Novel Nanometrology

Instrumentation & Techniques

NIFTI

Broad Outreach

Nanofabrication &

Surface Probe

Characterization

Instrumentation

NanoInk NSCRIPTOR

JEOL Environmental SPM Pico Force Microscope

Femto-NSOM Digital Instrument SPM

The NIFTI Arsenal

2.5 m 5 m

ZnS nanoparticles

500 nm500 nm

SPM Imaging of Soft and Hard Materials in Air/Ambient

Latex spheres Magnetotactic bacteriaDPN nanopatterning of

magnetic carriers

20 m

Ge Quantum Dots

500 nm500 nm

CdS nanoparticles

2000 nm2000 nm

JEOL and NSOM Imaging of Soft and Hard Materials

in Air/Vacuum

25 m

Transmission NSOM image of

check board patterns on glass

12 m

Nano-hole arrays with NSOM

Single wall carbon nanotubeDNA

Pores in AO membrane Self-assembled organic molecules

PROJECTED PERFORMANCE GAINS

Nanostructural Metrology

In-Line 3D Nanomechanical Imaging

nondestructive surface/ subsurface defect

identification

XY resolution: < 1nm

Z resolution < 2 nm (defect size)

Sub-surface high resolution “modulus”

imaging

In-vitro imaging of biopolymer,

biomaterials and biological structures

Development of a Unique Near-Field Ultrasonic

Holography (NFAH) System on JEOL 5200 Platform

sample piezosample piezo

wSSam

ple

Sam

ple

tip piezo

AFM tipAFM tip

wTip

Acoustic object waves excited through waferAcoustic object waves excited through wafer

Eliminate Far-Field Acoustic Lenses

and Couplers

Detect phase of transmitted acoustic

wave directly at wafer/device surface:

Eliminate coupling fluid

NFAHAFM

1.5 1.5 mm800 nm800 nm

Defects in Spin on Dielectric TrenchesDefects in Cu Trenches at 50 nm below from Surface

AFM NFAH

Looking Inside Carbon Nanotubes

“Proof-of-Concept”

Administrative Staff for NUANCE Center

Ruth McCullough, Business Manager

Carolyn Turek, Program Assistant

NUANCE email: nuance@northwestern.edu

Web site: www.nuance.northwestern.edu