General Features

£High pumping speed for all active gases

£High sorption capacity and increasedlifetime

£ Costant pumping speed in HV, UHV andXHV

£ Reversible pumping of hydrogen and itsisotopes

£Operation in the presence of highmagnetic fields

£ Oil free and vibration free

£ Low weight

£ Fast pumpdown after air venting andwithout baking

£ Capable of coping with large air leaks

£ Suitable for viton sealed systems

Applications

£ Improving ultimate vacuum incombination with ion, diffusion,cryogenetic or turbomolecular pumps

£ Surface analysis systems

£Particle accelerators, synchrotronradiation sources and related equipment

£Process pumps for vacuum devices anddeposition chambers

£ Thin films deposition systems

£Portable vacuum instrumentation

£Pumping, storing and releasing hydrogenisotopes

£ Impurities removal in rare gas filled devices

The CapaciTorr HV 200 pump uses the innovative ZAO getter alloy (Ti‐Zr‐V‐Al) in the formof highly porous sintered disks. The pump, which has a very compact design, provideshigh pumping performance in the high vacuum (HV) regime (i.e. 10‐7 ‐ 10‐9 Torr range) forall getterable gases like H2, N2, H2O, CO/CO2 and O2. This is achieved operating thegetter cartridge at moderate temperature (≈200 °C).Thanks to the extremely high gas sorption capacity, the pump can cope with large airleakages or sudden gas burst typical of high vacuum systems.Use of the pump in UHV range is also possible operating the getter cartridge at roomtemperature.

The CapaciTorr HV 200 consists of:

built‐in heater that directly connects to the flange power feedthrough

an external housing with CF63 connecting flange

a Non Evaporable Getter cartridge using the ZAO sintered disks

The getter cartridge is very durable and designed for prolonged operation. Once spentit can be easily replaced. A bakeable connector provides an easy and fast connection tothe pump power supply to activate and power the NEG cartridge.

The CapaciTorr HV 200 is also available with CF 35 connecting flange.

HIGHLIGHTS

Ordering Information

Product Product description Code

CapaciTorr HV 200 pump CAPACITORR HV 200 5H0156Power supply + output cables CAPACITORR HV 200 POWER SUPPLY 3B0455

Input cable CABLE MAINS INPUT CF35 3MT 3B0338

CapaciTorr®HV 200

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making innovat ion happen, together PROVISIONAL

Ø116 mm Ø114 mm146 mm

188 mm

Capacitorr Pumps Scheda HV300_bis_Layout 1 02/04/2015 09:01 Pagina 1

CapaciTorr®HV 200

D.VS.137.0.14

Typical Pump Characteristics CapaciTorr HV 200

Alloy Type ZAO

Alloy Composition Zr V Ti AlGetter Mass (g) 140Getter Surface (cm2) 432

Pumping Speed (l/s)@230 °C

H2 210O2 90CO2 65N2 60

Sorption Capacity (Torrll)

H2 2100O2 Single cycle at 230 °C >2000*

CO2 Single cycle at 230 °C >40

N2 Single cycle at 230 °C >200*

Note: Pumping speed data refer to the initial values. Single run capacity based on a minimumsorption speed 10% of the initial value. * These capacities correspond to the continuous sorption of an air leakages of ≈5x10‐6Torrll/secfor 1 year.

CO2

H2

N2

© SAES Group. Printed in Italy. All rights reserved. SAES® , ZAO® and CapaciTorr® are registered trademarks of SAES Group. SAES Group reserves the right to change or modify product specifications at any timewithout notice.

The SAES Group manufacturingcompanies are ISO9001certified and the Italiancompanies are also ISO14001certified. Full informationabout our certifications foreach company of the Groupare available on our website at:www.saesgroup.com

SAES Groupwww.saesgroup.comneg_technology@saes‐group.com

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Number of sorption cycles >20 cycles

O2

CapaciTorr HV 200 sorption test (according to ASTM F798‐97)

Sorbed Quantity (Torr ∙ l )

Pum

ping

Spe

ed (l

/s)

Activation: 550°C x 60' Sorption pressure 1,0 E‐5 TorrSorption temperature: 230 °C

PROVISIONAL

Heating parameters

CapaciTorr HV 200 on CF 63Activation 61 W (12.66 V)Operation at 230 °C 8 W (3.54 V)

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