The CapaciTorr® HV 200 pump uses the innovative ZAO getter alloy (Ti‐Zr‐V‐Al) in the form of highly porous sintered disks. The pump, which has a very compact design, provides high pumping performance in the high vacuum (HV) regime (i.e. 10‐7 ‐ 10‐9 Torr range) for all getterable gases like H2, N2, H2O, CO/CO2 and O2. This is achieved operating the getter cartridge at moderate temperature (≈200 °C).Thanks to the extremely high gas sorption capacity, the pump can cope with large air leakages or sudden gas burst typical of high vacuum systems.Use of the pump in UHV range is also possible operating the getter cartridge at room temperature.

The CapaciTorr HV 200 consists of:

built‐in heater that directly connects to the flange power feedthrough

an external housing with CF63 connecting flange

a Non Evaporable Getter cartridge using the ZAO sintered disks

The getter cartridge is very durable and designed for prolonged operation. Once spent it can be easily replaced. A bakeable connector provides an easy and fast connection to the pump power supply to activate and power the NEG cartridge.

The CapaciTorr HV 200 is also available with CF 35 connecting flange.

HIGHLIGHTS

Ordering Information

Product Product description Code

CapaciTorr HV 200 pump on CF63 CAPACITORR HV 200 5H0156

CapaciTorr HV 200 pump on CF35 CAPACITORR HV 200 CF35 5H0159Power supply + output cables CAPACITORR HV 200 POWER SUPPLY 3B0455

Input cable CABLE MAINS INPUT CF35 3MT 3B0338

CapaciTorr® HV 200

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General Features

£ High pumping speed for all active gases

£ High sorption capacity and increased lifetime

£ Costant pumping speed in HV, UHV and XHV

£ Reversible pumping of hydrogen and its isotopes

£ Operation in the presence of high magnetic fields

£ Oil free and vibration free

£ Low weight

£ Fast pumpdown after air venting and without baking

£ Capable of coping with large air leaks

£ Suitable for viton sealed systems

Applications

£ Improving ultimate vacuum in combination with ion, diffusion, cryogenic or turbomolecular pumps

£ Surface analysis systems

£ Particle accelerators, synchrotron radiation sources and related equipment

£ Process pumps for vacuum devices and deposition chambers

£ Thin films deposition systems

£ Portable vacuum instrumentation

£ Pumping, storing and releasing hydrogen isotopes

£ Impurities removal in rare gas filled devices

Dimensions in mm

ø114

195

ø123

156

CapaciTorr® HV 200

D.VS.137.3.17

Note: Pumping speed data refer to the initial values measured at pump inlet. The “Single run” capacity is intended as the recommended absorbed quantity per run allowing to perform more than 20 sorption cycles. In case of operation under lower gas loads or at RT, the pump can be reactivated 100 times or more.

© SAES Group. Printed in Italy. All rights reserved. SAES® , ZAO® and CapaciTorr® are registered trademarks of SAES Group. SAES Group reserves the right to change or modify product specifications at any timewithout notice.

The SAES Group manufacturing companies are ISO9001 certified and the Italian companies are also ISO14001 certified. Full information about our certifications for each company of the Group are available on our website at: www.saesgroup.com

SAES Groupwww.saesgroup.comneg_technology@saes‐group.com

oupgr

Number of sorption cycles >20 cycles

Heating parameters

CapaciTorr HV 200 on CF 63Activation 54 W

Operation at 200 °C 8.6 W

CapaciTorr HV 200 on CF 35Activation 54 W

Operation at 200 °C 7.5 W

Typical Pump Characteristics CapaciTorrHV 200 on CF35

CapaciTorrHV 200 on CF63

Alloy Type ZAO

Alloy Composition Zr V Ti AlGetter Mass (g) 140Getter Surface (cm2) 432

Pumping Speed (l/s)@200 °C

H2 105 210

O2 32 90

CO2 25 65

N2 30 60

Sorption Capacity (Torrll)

H2 2800

O2 Single cycle at 200 °C 200

CO2 Single cycle at 200 °C 40

N2 Single cycle at 200 °C 200

1

10

100

1000

CapaciTorr HV 200 sorption test (according to ASTM F798-97)

------ CF63 ----CF35

Sorbed Quantity (Torr ∙ l )

Pum

ping

Spe

ed (l

/s)

Activation: 550°C x 60'

Sorption pressure: 1e-6Torr

Sorption temperature: 200°C

0,0001 0,001 0,01 0,1 1 10 100 1000

H2

CO2

N2

O2

General Features

£ High pumping speed for all active gases

£ High sorption capacity and increased lifetime

£ Costant pumping speed in HV, UHV and XHV

£ Reversible pumping of hydrogen and its isotopes

£ Operation in the presence of high magnetic fields

£ Oil free and vibration free

£ Low weight

£ Fast pumpdown after air venting and without baking

£ Capable of coping with large air leaks

£ Suitable for viton sealed systems

Applications

£ Improving ultimate vacuum in combination with ion, diffusion, cryogenic or turbomolecular pumps

£ Surface analysis systems

£ Particle accelerators, synchrotron radiation sources and related equipment

£ Process pumps for vacuum devices and deposition chambers

£ Thin films deposition systems

£ Portable vacuum instrumentation

£ Pumping, storing and releasing hydrogen isotopes

£ Impurities removal in rare gas filled devices

The CapaciTorr® HV 1600 pump uses the innovative ZAO getter alloy (Ti‐Zr‐V‐Al) in the form of highly porous sintered disks. The pump, which has a very compact design, provides high pumping performance in the high vacuum (HV) regime (i.e. 10‐7 ‐ 10‐9 Torr range) for all getterable gases like H2, N2, H2O, CO/CO2 and O2. This is achieved operating the getter cartridge at moderate temperature (≈200 °C).Thanks to the extremely high gas sorption capacity, the pump can cope with large air leakages or sudden gas burst typical of high vacuum systems.Use of the pump in UHV range is also possible operating the getter cartridge at room temperature.

The CapaciTorr HV 1600 consists of:

built‐in heater that directly connects to the flange power feedthrough

an external housing with CF150 connecting flange

a Non Evaporable Getter cartridge using the ZAO sintered disks

The getter cartridge is very durable and designed for prolonged operation. Once spent it can be easily replaced. A bakeable connector provides an easy and fast connection to the pump power supply to activate and power the NEG cartridge.

* Other models, able to simultaneously drive 2, 3 or 4 pumps are also available.

**The power supply includes also the main input cable

***Longer output cables are available

HIGHLIGHTS

Ordering Information

Product Product description Code

CapaciTorr HV 1600 pump CAPACITORR HV 1600 5H0157Power supply** NEG POWER C1* 3B0501

Output cable*** Cable supply output V1.1‐5 3Mt 3B0337

CapaciTorr® HV 1600

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making innovat ion happen , together

230

257

ø 20

7

ø 203

Dimensions in mm

CapaciTorr® HV 1600

D.VS.138.3.17

Typical Pump Characteristics CapaciTorr HV 1600

Alloy Type ZAO

Alloy Composition Zr V Ti AlGetter Mass (g) 690Getter Surface (cm2) 2190

Pumping Speed (l/s)@180 °C

H2 1700

O2 800

CO2 620

N2 470

Sorption Capacity (Torrll)

H2 13800

O2 Single cycle at 180 °C 800

CO2 Single cycle at 180 °C 160

N2 Single cycle at 180 °C 800

Note: Pumping speed data refer to the initial values measured at pump inlet. The “Single run” capacity is intended as the recommended absorbed quantity per run allowing to perform more than 20 sorption cycles. In case of operation under lower gas loads or at RT, the pump can be reactivated 100 times or more.

© SAES Group. Printed in Italy. All rights reserved. SAES® , ZAO® and CapaciTorr® are registered trademarks of SAES Group. SAES Group reserves the right to change or modify product specifications at any timewithout notice.

The SAES Group manufacturing companies are ISO9001 certified and the Italian companies are also ISO14001 certified. Full information about our certifications for each company of the Group are available on our website at: www.saesgroup.com

SAES Groupwww.saesgroup.comneg_technology@saes‐group.com

oupgr

Number of sorption cycles >20 cycles

Heating parameters

CapaciTorr HV 1600Activation at 550 °C

controlled by thermocoupleOperation at 180 °C

10

100

1000

10000

0,0001 0,001 0,01 0,1 1 10 100 1000 10000

CapaciTorr HV 1600

sorption test (according to ASTM F798-97)

Sorbed Quantity (Torr ∙ l )

Pum

ping

Spe

ed (l

/s)

Activation: 550°C x 60'

Sorption pressure 1e-6Torr

Sorption temperature: 180°C

H2

CO2

N2

O2

General Features

£ High pumping speed for all active gases

£ High sorption capacity and increased lifetime

£ Costant pumping speed in HV, UHV and XHV

£ Reversible pumping of hydrogen and its isotopes

£ Operation in the presence of high magnetic fields

£ Oil free and vibration free

£ Low weight

£ Fast pumpdown after air venting and without baking

£ Capable of coping with large air leaks

£ Suitable for viton sealed systems

Applications

£ Improving ultimate vacuum in combination with ion, diffusion, cryogenic or turbomolecular pumps

£ Surface analysis systems

£ Particle accelerators, synchrotron radiation sources and related equipment

£ Process pumps for vacuum devices and deposition chambers

£ Thin films deposition systems

£ Portable vacuum instrumentation

£ Pumping, storing and releasing hydrogen isotopes

£ Impurities removal in rare gas filled devices

The CapaciTorr® HV 2100 pump uses the innovative ZAO getter alloy (Ti‐Zr‐V‐Al) in the form of highly porous sintered disks. The pump, which has a very compact design, provides high pumping performance in the high vacuum (HV) regime (i.e. 10‐7 ‐ 10‐9 Torr range) for all getterable gases like H2, N2, H2O, CO/CO2 and O2. This is achieved operating the getter cartridge at moderate temperature (≈200 °C).Thanks to the extremely high gas sorption capacity, the pump can cope with large air leakages or sudden gas burst typical of high vacuum systems.Use of the pump in UHV range is also possible operating the getter cartridge at room temperature.

The CapaciTorr HV 2100 consists of:

built‐in heater that directly connects to the flange power feedthrough

an external housing with CF200 connecting flange

a Non Evaporable Getter cartridge using the ZAO sintered disks

The getter cartridge is very durable and designed for prolonged operation. Once spent it can be easily replaced. A bakeable connector provides an easy and fast connection to the pump power supply to activate and power the NEG cartridge.

* Other models, able to simultaneously drive 2, 3 or 4 pumps are also available.

**The power supply includes also the main input cable

***Longer output cables are available

HIGHLIGHTS

Ordering Information

Product Product description Code

CapaciTorr HV 2100 pump CAPACITORR HV 2100 5H0158Power supply** NEG POWER C1* 3B0501

Output cable*** Cable supply output V1.1‐5 3Mt 3B0337

CapaciTorr® HV 2100

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making innovat ion happen, together

Dimensions in mm

ø257

ø253

,5

265

230

CapaciTorr® HV 2100

D.VS.145.2.17

Typical Pump Characteristics CapaciTorr HV 2100Alloy Type ZAO®Alloy Composition Zr V Ti AlGetter Mass (g) 1130Getter Surface (cm2) 3580

Pumping Speed (l/s)@180 °C

H2 2100

O2 1250

CO2 880

N2 625

Sorption Capacity (Torrll)

H2 22600

O2 Single run at 180 °C 1300

CO2 Single run at 180 °C 260

N2 Single run at 180 °C 1300

Note: Pumping speed data refer to the initial values measured at pump inlet. The “Single run” capacity is intended as the recommended absorbed quantity per run allowing to perform more than 20 sorption cycles. In case of operation under lower gas loads or at RT, the pump can be reactivated 100 times or more.

© SAES Group. Printed in Italy. All rights reserved. SAES® , ZAO® and CapaciTorr® are registered trademarks of SAES Group. SAES Group reserves the right to change or modify product specifications at any timewithout notice.

The SAES Group manufacturing companies are ISO9001 certified and the Italian companies are also ISO14001 certified. Full information about our certifications for each company of the Group are available on our website at: www.saesgroup.com

SAES Groupwww.saesgroup.comneg_technology@saes‐group.com

oupgr

Number of runs (sorption cycles) >20

Heating parameters

CapaciTorr HV 2100Activation at 550 °C

controlled by thermocoupleOperation at 180 °C

H2

CapaciTorr HV 2100

sorption test (according to ASTM F798-97)

Sorbed Quantity (Torr ∙ l )

Pum

ping

Spe

ed (l

/s)

Activation: 550° C x 60'

Sorption pressure 1e-6Torr

Sorption temperature: 180° C

0,0001 0,001 0,01 0,1 1 10 100 1000 1000010

100

1000

10000

CO2

N2

O2

Power Supply for CapaciTorr® HV 200The CapaciTorr HV 200 Power Supply is an electronic unit specifically designed for controlling the activation and working processes of the CapaciTorr HV 200 getter pump. The instrument receives line voltage (110 - 240 VAC, 50-60 Hz), converts to DC voltage of 16.5 VDC and supply the getter pump by way of a microprocessor-based electronic control card. The instrument is designed to control the getter pump in two different modes:

ActivationWorking

In the activation mode, the instrument supplies the power necessary to heat up the getter pump to the activation temperature (~500°C). In this operating mode, the CapaciTorr HV 200 power supply deliver 100% of the available power.In the working mode, the instrument supplies the power necessary to heat up the getter pump to the working temperature (~200°C). Working modes for CapaciTorr HV 200 on CF 63 and CF 35 flanges are available.NEG supply output cable 5 meters long is directly integrated in the power supply.

HIGHLIGHTS

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Ordering InformationProduct description CodeCapaciTorr HV 200 Power Supply 3B0455Cable mains input CF 35 3Mt 3B0338

CapaciTorr® HV 200 Power Supply

making innovation happen, together

Line Voltage£ Supply voltage: 110-240 VAC

£ Frequency: 50-60 Hz

£Mains cord connector: IEC Type 6A 250V

£ Over-voltage class: Cat II

Line Protection Required

£ Supply protection: 6 A Fuse or Circuit Breaker

£ Differential switch: 30 mA

£ Isolation type: Class I

Output

£ Output voltage VDC: (8.6- 16.5) V

£ Output power : (4.0 - 6.0) A

Instrument Protection

£ Internal line fuse: (2.0-3.5) A T

£ Overload protection: Electronic control

£ High Temp. Protection: Electronic control

Dimensions

£ 72 x 144 x 300 mm (HxWxD)

Weight

£ 2,1 kg

n n

Input:

£ Maximum power: 3.5 kW

£ Supply voltage: 110-220 VAC

£ Frequency: 50-60 Hz

£ Input current: 1 x 18.5/9 A

£ Noise at 1 mt: < 40 dBA

£Mains cord connector: IEC Type 16A 250V

Output 1-4 at 110 V

£ Output power: 700 W+overload

£ Output voltage: 0-110VDC

£ Overload: 110% for one minute

£ Supply current 10 A (at 70VDC)

Main features of NEG POWER

£ Switching power controller

£ Simultaneous activation/conditioning of up to 4 NEG pumps

£ Local control by user friendly touch screen controller

£ Remote control by RS232 interface with ASCII protocol

£ Remote control by RS485 interface with Modbus protocol (RTU)

£ Remote control by standard Ethernet interface

£ Temperature monitoring and regulation

£ Automatic power regulation for different pump configurations

£ Diagnostic features (open/short connection, broken thermocouple, broken heating filament, overheating control, etc.)

£ Unit switches into stand-by mode after a long time of non-operation

HIGHLIGHTS

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NEG POWER Multicontroller

making innovation happen, together

The SAES Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are also ISO14001 certified. Full information about our certifications for each company of the Group is available on our website at: www.saesgroup.com

© SAES Group. Printed in Italy. All rights reserved. SAES® and CapaciTorr® are registered trademarks of SAES Group. SAES Group reserves the right to change or modify product specifications at any timewithout notice.

Multicontroller for NEXTorr®, CapaciTorr®, CapaciTorr® HV and SORB-AC® pumpsThe NEG POWER is an electronic unit specifically designed to control the activation process of NEXTorr, CapaciTorr, CapaciTorr HV and SORB-AC pumps with or without a thermocouple.The NEG POWER can simultaneously activate up to four different NEXTorr, CapaciTorr, CapaciTorr HV and SORB-AC pumps. It supplies

Adjustable DC voltage up to 110 VCurrent up to 10 APower up to 700 W per channelLAN, RS232 or RS485 remote control.

The unit has a user friendly touch screen display to control the pumps. It is also possible to control the NEG POWER by the SAES remote control software.The parameters of the GP SORB-AC, CapaciTorr, CapaciTorr HV and NEXTorr pump series are preset in the software, making the activation as simple as selecting the pump. The activation process can be easily customized by inputting the electrical parameters and the desired temperature. The summary table below lists the pump models whose parameters are preset in the NEG POWER software.

*It can be upgraded to NEG POWER Models controlling more pumps.** Other cables lenghts are available on request

www.saesgroup.comneg_technology@saes-group.com

D.VS.147.1.17

n n n n

Ordering Information

Product description Code Pump ModelsNEG POWER C1* 3B0501 All pumpsNEG POWER C2* 3B0502 All pumpsNEG POWER C3* 3B0503 All pumpsNEG POWER C4 3B0504 All pumps

Cable supply output V1.1-5 3MT** 3B0337

CapaciTorr D 2000,CapaciTorr D 3500,GP 100, GP 200, GP 500,CapaciTorr HV 1600,CapaciTorr HV 2100

Cable supply output V1.1-4 3MT** 3B0345 GP 100, GP 200, GP 500

Cable supply output with K-TC/3MT-V1.1-HT** 3B0420

CapaciTorr D 1000,NEXTorr D 300-5, NEXTorr D 500-5,NEXTorr D 1000-10,NEXTorr D 2000-10

Cable supply output V1.1-CF 35 3MT** 3B0347 CapaciTorr D 400-2

NEG POWER-NEXTorr D100/D200 OUTPUT CABLE-5MT** 3B0469

NEXTorr D 100-5,NEXTorr D 200-5,CapaciTorr D 100,CapaciTorr D 200

Cable supply output V1.1-2F 3MT** 3B0370 GP 50