#4 (Oct. 22) Photolithgraphy -What is photolithgraphy? -Thin-film patterning using phtolithgraphy...
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Transcript of #4 (Oct. 22) Photolithgraphy -What is photolithgraphy? -Thin-film patterning using phtolithgraphy...
#4 (Oct. 22) Photolithgraphy
-What is photolithgraphy?-Thin-film patterning using phtolithgraphy-Applications of photolithgraphy-Trends in minimum pattern sizes
What Is Photolithgraphy?Photo + LithographTechnologies to replicate patterns on a photomask to substrates or thin films on the substrates by using photo-chemical reaction photoresist
Photomask Thin film on a substrate
What Is Photoresit
A material that changes its solubility to developer by irradiation of light (ultraviolet or X ray) and electron beam
Changes:(1) Non-soluble to solvable (positive-type photoresist)(2) Soluble to non-soluble (negative-type photoresist)
Purposes and Features of Photolithography
Purposes-Fabrication of electron devices such as LSIs-Fabrication of micromachines-Packaging of LSIs and micromachines
Features-Minimum size of 1 m or less is achievable-Batch process-Pattern repetition
a
Photoresist ( 1 m )
Chromium thin film( 50 nm)
Fused-quartz substrate (1 mm)
ba b
Photomask Fabrication (1)Chromium thin film deposition and
photoresist deposition
Electron beam scanner
ReticlePhotomask
Stepper
Pattern generator Stepper
Pattern Size Reduction by Stepper
WaferDesign data
Contact aligner
Projection aligner