300MM Spare Parts 5-3-122

360
Material # Supplier P/N Description 601061 CAB-Folie Modullab CAB-THERMOTRANSFERFOLIE 300MX0,60M IN 6000011 LTC0E1X70103 O-RING P-4 6000127 56003155 Nest Gripper Pin (for 3,9" wide nest) 6000128 56003157 Cover Gripper Pin (for 3,9" wide nest) 6000129 56003156 Nest Gripper Pin (for 3,5" wide nest) 6000130 56003158 Cover Gripper Pin (for 3,5" wide nest) 6000131 66004008 Shoulder Screw 6000132 68001090 Tubing for Pick & Place 6000133 56003038B Locator Pin 6000134 56003068A Diamond Locator Pin 6000136 56003067A Triangle Locator Pin 6000241 AF159 TEMPERATURE CONTROLLER FÜR T108 6000257 DCB-SS8212X02A P/P Kabel 6000273 MOWNH00182 Flow Meter (Refrigerator) 6000392 3002578 SLOPE STRIP HOLDER 6000393 3002593 CATCH 6000412 34001028 STOPPER BOLD 6000415 MKX-D6004 TC Bearing Shaft 6000416 YEE-002695-1 BEARING R-830ZZ-LY81 6000815 1889000323A0 PTFE-RING 12,5X14,6X1 6000866 LJKR-911721-00 CHUCK TABLE 6000950 125153 NEEDLE ROUND TIP L=11,5mm SET a 10 STück 6000951 9642611 VENTILATOR W2S107-AA016/4656Z 6001022 902.249 DISC RUBBER ABSORBER D 4 6001171 144770 DISPENSNADEL 0.3/0.5 6001204 ESA-Y3040G23-11 SERVO-AMPLIFIER FÜR DREHTELLER 6001381 57003246 VACUUM PAD 8.0 x 10.2 6001417 YCY-006607-1 AIRCYLINDER M6741AD CDM2E25-100 6001540 12C3-369 RUBBER TIP HOLDER HITACHI CM700 6001541 12U3-369 RUBBER TIP HOLDER HITACHI CM700 6001542 DCB-SSA161X01 KABEL LD P&P X 6001670 1002-5319 TEC-SENSOR 6001671 908.0403 RESET Z-AXIS 6001672 915.0919 OPTICAL SENSOR 6001674 915.0909 OPTICAL SENSOR 6001675 220.1311.1 FLAT CABLE 6POLE L=700MM 6001676 902.0911 TEMPERATURE SENSOR 6001677 902.0910 TEMPERATURE SENSOR 6001678 915.1046 LEAF SPRING 6001679 916.0905 PROCESS HEATERCARTRIDGE 230VAC / 300 6001682 140.9519.1 LINEAR SLIDE 6001683 908.0410 ROCKER ARM ASSEMBLY for W3100 repairabl 6001730 SBT-0506-1068 DCC INSERT CARRIER 10x12,5MM T11 YELLOW

description

11

Transcript of 300MM Spare Parts 5-3-122

Page 1: 300MM Spare Parts 5-3-122

Material # Supplier P/N Description

601061 CAB-Folie Modullabel CAB-THERMOTRANSFERFOLIE 300MX0,60M IN 101556000011 LTC0E1X70103 O-RING P-4 100876000127 56003155 Nest Gripper Pin (for 3,9" wide nest) 168566000128 56003157 Cover Gripper Pin (for 3,9" wide nest) 168566000129 56003156 Nest Gripper Pin (for 3,5" wide nest) 168566000130 56003158 Cover Gripper Pin (for 3,5" wide nest) 168566000131 66004008 Shoulder Screw 168566000132 68001090 Tubing for Pick & Place 168566000133 56003038B Locator Pin 168566000134 56003068A Diamond Locator Pin 168566000136 56003067A Triangle Locator Pin 168566000241 AF159 TEMPERATURE CONTROLLER FÜR T108 129056000257 DCB-SS8212X02A P/P Kabel 110736000273 MOWNH00182 Flow Meter (Refrigerator) 100876000392 3002578 SLOPE STRIP HOLDER 501026000393 3002593 CATCH 501026000412 34001028 STOPPER BOLD 168566000415 MKX-D6004 TC Bearing Shaft 110736000416 YEE-002695-1 BEARING R-830ZZ-LY81 110736000815 1889000323A0 PTFE-RING 12,5X14,6X1 161286000866 LJKR-911721-00 CHUCK TABLE 100876000950 125153 NEEDLE ROUND TIP L=11,5mm SET a 10 STück 527136000951 9642611 VENTILATOR W2S107-AA016/4656Z 501026001022 902.249 DISC RUBBER ABSORBER D 4 500246001171 144770 DISPENSNADEL 0.3/0.5 503726001204 ESA-Y3040G23-11 SERVO-AMPLIFIER FÜR DREHTELLER 105696001381 57003246 VACUUM PAD 8.0 x 10.2 168566001417 YCY-006607-1 AIRCYLINDER M6741AD CDM2E25-100 110736001540 12C3-369 RUBBER TIP HOLDER HITACHI CM700 137506001541 12U3-369 RUBBER TIP HOLDER HITACHI CM700 137506001542 DCB-SSA161X01 KABEL LD P&P X 110736001670 1002-5319 TEC-SENSOR 500246001671 908.0403 RESET Z-AXIS 500246001672 915.0919 OPTICAL SENSOR 500246001674 915.0909 OPTICAL SENSOR 500246001675 220.1311.1 FLAT CABLE 6POLE L=700MM 500246001676 902.0911 TEMPERATURE SENSOR 500246001677 902.0910 TEMPERATURE SENSOR 500246001678 915.1046 LEAF SPRING 500246001679 916.0905 PROCESS HEATERCARTRIDGE 230VAC / 300 500246001682 140.9519.1 LINEAR SLIDE 500246001683 908.0410 ROCKER ARM ASSEMBLY for W3100 repairabl 500246001730 SBT-0506-1068 DCC INSERT CARRIER 10x12,5MM T11 YELLOW 519516001854 BLB-020972 CONNECTOR BOARD 110736001911 53043162 CENTERING BLOCK INSIDE (STEP3) 501026001915 53043628 CENTERING PIN (STEP3) 501026001917 31022281 STRIP 50102

Kreditor-Nr.

Page 2: 300MM Spare Parts 5-3-122

6001920 YBT-009558 BELT FAN EXIT CHAMBER 110736001971 23001111 TEMPERATURE CONTROLLER CN9120A 512666001996 66004055 Shoulder Screw, M6x4 168566002003 130.0354.1 DC-MOTOR WITH TRANSMISSION 500246002004 YAE-007729-1 Ventil 4/2 Wege Sitzventil VQD1151U-5L-Q 110736002006 E52-CAID M6 1M THERMO COUPLE 100876002125 220.1312.1 FLAT CABLE 20POLE L=370MM 500246002134 81-01992 POGO PIN SOCKET BGA136 GH11 3.3mm 109096002244 MME-111562A001A-1INSERT CARRIER 11x14 DCC DC-062 110736002330 00315253-02 SIPLACE REINIGUNGSTUCH 134166002339 SCRAMBLE BOARD 25 FOR CHIPIDREADER 256M D14 (8x12) 110736002351 SCRAMBLE BOARD 512FOR CHIPIDREADER 512M T11x16 (10x12.5) 110736002352 SCRAMBLE BOARD 512F. CHIPIDREADER 512M T11DUAL (10.5x11.5) 110736002353 SCRAMBLE BOARD FB FOR CHIPIDREADERSDRAM/DDR1 110736002354 SCRAMBLE BOARD FB FOR CHIPIDREADER DDR2 110736002355 SCRAMBLE BOARD 51 FOR CHIPIDREADER 512M D11 (10x12) 110736002356 SCRAMBLE BOARD TS FOR CHIPIDREADER TSOP66 110736002422 YCY-007809-1 W-HEAD CYLINDER CDQSB12D-P4424220 110736002423 YCY-013688-1 EJECTOR CYLINDER 110736002424 A210371 POGO PIN SOCKET BGA96 H90x16 3.3mm 110736002436 56003077 PIN, BASE LOCATOR (DIAMOND) 168566002437 56003078 PIN, BASE LOCATOR (ROUND) 168566002438 91141008 PIN, GUIDE NEST HOLDER 168566002442 AAA-MQDA043-1 SERVO MOTOR DRIVER 110736002443 AAA-MSDA023-1 SERVO MOTOR DRIVER 110736002444 AAA-MSDA043-1 SERVO MOTOR DRIVER 110736002446 BLB-020972X31 IOT BOARD 110736002449 BLB-025841 CNB BOARD 110736002455 DCB-EEC065X01A-1 CABLE 110736002456 DCB-EE16896X01A-1 CABLE 110736002457 DCB-EEC072X01-1 CABLE 110736002458 DCB-EEC072X02-1 CABLE 110736002459 DCB-EEC114X01-1 THERMAL FUSE 110736002460 DCB-EEC114X02-1 THERMAL FUSE 110736002461 DCB-EEC114X03-1 THERMAL FUSE 110736002462 DCB-EEC114X04-1 THERMAL FUSE 110736002466 DCB-ESB933X01-1 CABLE 110736002467 DCB-ESB933X02-1 CABLE 110736002468 DCB-ESB934X01-1 CABLE 110736002469 DCB-ESB934X02-1 CABLE 110736002472 DCB-ESC060X01A-1 CABLE 110736002473 DCB-ESC061X01A-1 CABLE 110736002474 DCB-ESC062X01-1 CABLE 110736002475 DCB-ESC063X01-1 CABLE 110736002476 DCB-ESC074X01C-1 Cable LD P&P M6771 110736002488 DCB-MMB772X01A-1 CABLE 110736002489 DCB-MMB772X02A-1 CABLE 110736002490 DCB-MMB772X03A-1 CABLE 110736002491 DCB-MMC261X01A-1 THERMAL FUSE 110736002493 DCB-MMC263X01A-1 THERMAL FUSE 110736002494 DCB-SSC110X01-1 CABLE 11073

Page 3: 300MM Spare Parts 5-3-122

6002495 DCB-SSC110X02-1 CABLE 110736002496 DEE-002776-1 LN2 VALVE 110736002497 DEE-004432-1 SERVO MOTOR DRIVER 110736002498 DEE-004433-1 SERVO MOTOR DRIVER 110736002503 DMT-004434-1 M6771 LD/UL-X-MOTOR HC-MFS73-S4 117V750W 110736002504 DMT-004435-1 FAN MOTOR 110736002505 DMT-004453-1 M6771 TS-TRANS-MOTOR MSMA022C2A 92V/200 110736002507 DMT-004457-1 M6771 Z-DRIVE-MOTOR MQMA042C2F 108V/400 110736002516 MPX-J5279A-1 BELLOFRAM MODIFY 110736002540 NLP-000248-1 LAMP, HALOGEN 110736002546 YCY-010097-1 AIR CYLINDER 110736002555 DEE-002746-1 LN2 VALVE 110736002558 YVP-005722-1 VACUUM PAD 110736002675 2280336 DFLK-D37 SUB/S VARIOFACE MODUL 106276002683 SBT-0603-1077 INSERT CARRIER 10x13,5 110736002694 DCB-EE7790X01 MOTORKABEL Y-ACHSE M6761 110736002811 YPL-007706 TIMING PULLEY M6541 110736002812 MPX-F8474 ITX-BELT 110736002813 EKMBK-250/0.3/65grd-R Rakelblech 250mm (SATZ a`2 St) 300um 65° 139876002851 AAA-TO404-3 TOUCH PANEL MONITOR M6771AD 110736002852 DCB-EEC067X01-1 CABLE M6771AD 110736002854 DMT-003882 MOTOR MSM022AAA LD-/UL-Y-ACHSE M6741 110736002906 5022500003 Übertragungsscheibe für laterale AU N/A6002907 5022500001 NABE FÜR LATERALE AUSGLEICHSKUPPLUNG 160756002908 5022500002 NABE FÜR LATERALE AUSGLEICHSKUPPLUNG 160756002909 151397 HEIZPATRONE LANG 160W/36V L=0,6m 503726002972 DCB-SS10347X01G-1 POWER TRACK UL Y CABLE M6542 110736002973 DCB-SS10348X01G-1 POWER TRACK LD Y CABLE M6542 110736002974 DCB-SS10349X01C-1 POWER TRACK UL XX CABLE M6542 110736002975 DCB-SS10351X01B-1 POWER TRACK LD X CABLE M6542 110736002979 NP367-060-062-045-1DDR1 Sockel 512MD11 (10x12) 109096002980 NP351-062-062-341F-Konv. Sockel TBL DDR2 (10 x 10.5) 109096003062 5173 Lifting Sliding Base 105856003132 9630435 MOTOR PICK & PLACE X DRIVE FÜR MONMOL-04 501026003149 102.006.282.2AS VACUUM CUP 6MM 155896003153 5022500007 NABE FÜR LATERALE AUSGLEICHSKUPPLUNG 160756003191 00352931-02 REINIGUNGSSTÄBCHEN PACK a 25ST 134166003201 MOKFH133--B FLOW CONTROLLER 512666003236 DCB-EP6674X03 Sensor Amplifier 110736003298 16006111 Linear Bearing 168566003317 LC30G191C-1/30 DC-MOTOR 131206003320 00346524-03 Pipette Typ 735/935 kpl 134166003322 DCB-EP5400X01 Auto Switch 110736003334 34-050250-01 Monitorhalter für 3088 500246003336 9255329 CLAMP PUSH/ KTE-250ALK 120 501026003358 4022.476.0155 PSU 500V 14,5A 24V 4A 21TE 6HE 125956003359 4022.455.0929 Nitrogen Purge Unit (SN:032405PNE)komple 501076003391 EJRM-915009-0 CYLINDER (T2CL) (1) 100876003424 102228672 USB MOUSE (PC-Mouse CRE CM-1090) 500246003515 G4952 BELT TIMING 6T5/200 108586003537 CDU20-25D AIRZYLINDER 200024

Page 4: 300MM Spare Parts 5-3-122

6003546 SEN-1300-01 Ejector Needles (L=11,6; R=0,2;D=0,7) 137506003552 SEN-1299-01 Ejector Needles (L=11,0; R=0,2;D=0,7) 137506003560 00876-MX Spannrolle 00876-MX 135826003561 90864-MLK Zahnriemen 10 T5/330 135826003562 90324-MLK Rillenkugellager 625 2Z 135826003563 5310000007 3phase stepping motor Bgr.=90 shaft=smoo 160756003564 5011100035 Synchronous belt 6T2,5*145 cut 160756003565 5355000002 Inductive proximity switch M8*1 50mm.5m 160756003566 5310020037 DC gear motor d=23, 24V, i=14:1 160756003567 2499000040 Reflected light barrier WL4-2F330 with r 160756003568 5011000025 Flat belt accord.draw.no.80.222 B-34 160756003569 5310020003 DC gear motor d=23, 24V, i=415:1 160756003570 5900000039 Dispenser needle 160756003571 5310020005 DC gear motor d=28, 24V, i=43:1 160756003572 5027020001 Spannmodul EV-15/63 Hub 4mm 160756003573 5027020002 Druckplatte EV-15/63 160756003574 5011100023 Synchronous belt 16T10*2210-V endless 160756003575 5011100007 Synchronous belt 16T5*4 10 160756003576 5011100001 Synchronous belt 25AT5*455 160756003577 5011100004 Synchronous belt 10T5*200 160756003578 5353000007 Micro switch 6A (1005.0401) 160756003579 5310000006 3phase stepping motor Bgr.=60 Shaft=smoo 160756003580 5310000012 3phase stepping motor Bgr.=90 Shaft=adj. 160756003581 DCB-EM58554X03 Thermosicherung M6541 110736003582 YSN-007718 Feder 110736003583 1076-NRUB RUBBER PLATFORM 10x10,5 TOOL#46 Step-3 525326003584 50004558 RUBBER PLATFORM 11x14 TOOL#47 Step-3 525326003585 50004609 RUBBER PLATFORM 10x12,5 TOOL#48 Step-3 525326003586 50004676 RUBBER PLATFORM 10x13,5 TOOL#49 Step-3 525326003587 50004727 RUBBER PLATFORM 10x14 TOOL#51 Step-3 525326003590 00350588S03 PINOLE MIT KUGELRASTERUNG KLP 1/12 1002116003634 OTB-49(102A)-0.8-03 Topless Sockel 500406003635 OTB-90(102A)-0.8-02 Topless Sockel TBL DDR2 500406003636 OTB-48(102)-0.8-07 Topless DDR3 rot 500406003644 BLB-023159 Sleeve Id Reader Board 110736003646 BLB-017407 GPIB Connector Card 110736003647 BLB-019726 Ansteuerungsplatine N2 Ventil 110736003650 BGD-022462 SD-Board 110736003651 BLM-020835 CTL Board 110736003653 LCD Anzeige Monitor M6761 110736003654 BLB-021255 X-ARM CNB 110736003655 BLB-023381 Relais Platine 110736003657 KSP-001176 EMO Switch 110736003658 DCB-EE8167 Taster Sleeve 110736003659 Powerswitch Powerswitch M6761 110736003660 Mainbreaker Mainbreaker M6761 110736003661 DCB-EE8205 Temperatur Fuse 110736003662 DCB-EP5708 Hifix Switch 110736003663 DCB-EP5707 Lamp Switch 110736003664 DCB-EE5513 Speaker 110736003666 SEE-EESPZ402 Omron Amplifer 11073

Page 5: 300MM Spare Parts 5-3-122

6003667 KSE-001239 Door Switch 110736003668 KSE-001214 Switch 110736003669 Sensor Flag Sensor Flag X-Achse M6761 110736003670 SEE-EESX673A Sensor 110736003671 SEE-EESX671A Sensor 110736003673 SEE-EESX672A Sensor 110736003674 DEE-003138-1 Heater Desoak 110736003675 DCB-ES8208 Sensor 110736003676 BLF-022829 ACC-Board 110736003677 DPS-003487 PS Unit for SMD 110736003678 BGD-023054 MDC Board 110736003679 DEE-003582 PMD Board 110736003683 MD Power Supply MD Power M6761 110736003684 DMT-003548-1 Servomotor X-Achse M6761 110736003685 YCR-007463 Coupling 110736003686 DMT-003547 Servomotor Transferarm 110736003687 YCR-007388 Coupling 110736003688 DMT-003455 Motor Testsidetransport 110736003689 DCB-EE5674X01 Motor Assy. Lüfter 110736003690 DCB-EE7438X01 Motor ETX 110736003691 DMT-003538 Servomotor Carry 110736003692 YCR-007393 Coupling 110736003693 YCR-006668 Coupling 110736003694 YPL-006573 Timing Pulley 110736003695 YCR-007399 ETP Bush 110736003696 YPL-006574 Timing Pulley 110736003697 YCR-007398 ETP Bush 110736003698 DMT-003547 Servomotor Y-Achse 110736003699 DEE-002659 Cartridge Heater 110736003700 DST-002090 PT-Sensor 110736003704 137636 PCB AS 456-0-01 Rev.A 503726003757 2013556-00 Zahnriemen 500516003760 7003-100-0012 GLAS BURETTE 518956003763 1000-116-0200 BLOCK BOTTOM GLASS CELL 518956003764 1000-117-0200 BLOCK TOP GLAS CELL 518956003805 125375 BEARING BALL 25/42x9 503726003806 101213 BEARING BALL 5/11x5 F685 ZZ / SSF685ZZ 503726003807 124556 SCHRAEGKUGELLAGER 20/32x7 503726003844 67020002 Amplifier 168566003848 Schleppkette 1 M67761 Transferarm 110736003849 Schleppkette 2 M6761 Y-Achse 110736003860 Schleppkette 3 M6761 X-Achse Loader 110736003861 Schleppkette 4 M6761 X-Achse Unloader 110736003862 BLJ-023250 M6761 Tastenbedienfeld 110736003863 KSE-001212-1 Sensor (Magnet) 110736003864 KSE-001211 Sensor 110736003865 Relais Omron G3R-OA202SZN-UTU 110736003866 Kontrollanzeige M6761 Power/Line 110736003867 Relais Omron1 G9D Safety Relay Unit 110736003868 YRE-006606 Rod End 110736003869 SEC-E3CS20W Sensor 11073

Page 6: 300MM Spare Parts 5-3-122

6003870 DCB-EP6537X04 Sensor 110736003871 DCB-EP5400X01 Sensor 110736003872 DCB-EP5675X03 Sensor 110736003873 DCB-EP5681X01 Sensor 110736003874 DCB-EP7439X03 Sensor 110736003875 DCB-EP7440X02 Sensor Amplifer 110736003876 DCB-EP5676X05 Sensor 110736003877 DCB-EP7419X03 Sensor 110736003878 DCB-EP5514X03 Sensor 110736003879 DCB-EP5675X02 Sensor 110736003880 DCB-EP8830X02 Sensor 110736003881 DEE-002929 Sensor Amplifer 110736003882 YCY-006941 Cylinder SMC CQ2B63-40DC 110736003883 YCY-007422 Cylinder SMC CQSB25-25+40D 110736003884 YCY-006932 Cylinder SMC MDUB40-15DM 110736003885 YCY-006935 Cylinder SMC CXSM15-25 110736003886 YCY-007415 Cylinder CKD FCD-L-25-20 110736003887 YCY-005415 Cylinder SMC CDJ2B16-100-B 110736003888 YCY-007418 Cylinder CKD SSD-KL-16-40 110736003889 YCY-007392 Cylinder SMC CDQSB16C-P1405 110736003890 YCY-006608 Cylinder SMC CDJ2D16-25-B 110736003891 YCY-005295 Cylinder SMC CDJ2B10-20-B 110736003893 YCY-006610 Cylinder CKD-DL-16-10 110736003894 YCY-006933 Cylinder SMC CDUW16-10D 110736003895 YCY-006565 Cylinder SMC CDQB12-30D 110736003896 YCY-006609 Cylinder CKD SSD-BML-25 110736003897 YCY-007425 Cylinder SMC CDQSB12-15DC 110736003898 YCY-006984-1 Cylinder SMC CQ2B12-10T 110736003899 YCY-006996-1 Cylinder SMC CG1BN80-M3100-138 110736003900 YAE-006658 Valve SMC SY7120-5MOZD-02-F2 110736003901 YSN-006657 Spring 110736003902 YSN-006135 Spring 110736003903 YSN-004023 Spring 110736003904 DEE-003266 Cartritge Heater 110736003905 DCB-EE5398X01 Thermal Fuse 110736003906 DCB-HQ6401X01 Fiber 110736003907 210.2102 Lamp 28V 24MA 106836003953 60617747 Leaf Spring 105696003954 32200005 HEATER, INLINE, AIR 168566004249 SY3120-5MOZ-C6 Valve 110736004250 SYJ324-5LOZ Valve 110736004251 4SA019-D2 Valve 110736004252 4SA029-D2 Valve 110736004253 4SB010-C2 Valve 110736004254 YCY-006926 SMC Cylinder CDQSB16-35DC 110736004255 YCY-006613 SMC Cylinder CDQ2A25-25DC 110736004256 YLB-007015 Linear Bush 110736004257 MKX-71676 Slide Shaft 110736004258 DCB-EP4636X01 Auto Switch 110736004259 DCB-EP7441X01 Sensor 110736004260 DEE-003219 Fiber Sensor 11073

Page 7: 300MM Spare Parts 5-3-122

6004261 DCB-EQ8824X01 Fiber Sensor 110736004262 DST-002524 SMC Pressure Switch ISE2-01-15 110736004263 FiberOptic Tray ID Erkennung UL1 110736004264 Kugelgelenk1 SMC JA15-5-080 110736004265 Kugelgelenk2 SMC JA10-4-070 110736004266 Kugelgelenk3 SMC JA6-3-050 110736004267 YKH-007382 SMC Air Dryer IDG50-03B 110736004268 YMV-007276 SMC Air Operated Valve VPA742 110736004269 YKH-005332 SMC Mist Separater AFM3000-02B-2 110736004271 YAE-007421 SMC Air Operated Valve VFA5220 110736004272 YMV-007275 SMC Air Operadet Valve VPA542 110736004273 YKH-007273 SMC Regulator AR2550-02BG 110736004274 YKH-007274 SMC Regulator AR2550-02BG-X92 110736004275 YAE-007650 SMC Solenoid Valve VT307E-1DZ-02-F-X105 110736004276 YKH-004223 SMC Regulator AR1999-M5B-1-X505 110736004277 ASS500 Valve 110736004278 AP100 Pressure Control Valve 110736004279 VM13 Air switch 110736004280 SignalTower M6761 110736004281 A2AX-55 Keyboard 110736004282 SYJ3230-5MOZ Valve 110736004300 101102468 LBO Kristall für EPFTRE-4 106756004301 DCC-0504 Insert Body SBTEK Rev. C/D 519516004307 T9627512 H.E.250W (step2) 501026004309 9627585 H.E.HLP-1/8x11-7/16200W(step2) 501026004311 YCY-13688-1 Aircylinder CDVJ5B6-N40224-15 110736004330 T9627522 H.E. 1000W (step2+3) 501026004331 T9627509 H.E.600W(step2+3) 501026004332 T9627504 H.E.Top100W(step2+3) 501026004333 T9627508 H.E.Top250W (step2+3) 501026004353 147591 Zahnriemen P=2,032 L=355,6 B=3,2 Z=175 503726004354 147593 Zahnriemen P=2,032 L=1016,0 B=3,2 Z=500 503726004355 147594 Zahnriemen P=2,032 L=354 B=3,2 Z=125 503726004455 23540 TFT-Display-NL10276AC 24-05 105696004523 YBB-006316 Bundlager Testside 110736004525 MKM-D6600 STG-T RAIL 110736004526 MCB-078-0.8X0.8-02APOGO PIN SOCKET BGA78 H90 C1molded 146366004527 MCB-077-0.8X0.8-01APOGO PIN SOCKET BGA96 H90x16 C1molded 146366004718 NCPZ-010072-2 -R 1,8KW (CT) Spindel Z1 (Z2) repaired 100876004772 YEE-001481 Bundlager 110736004782 3x7/10.2/4.6/0.2/210 Rakelblech 250mm 200um 65grd geschlitzt 139876004814 MOJTH034 FITTING PML6-D 2000246004818 122380 Microfuse 05.000 AF 125V 503726004874 67001007 Gas Spring 168566004875 DIA250mm(Propeller) Fan others 131206004876 CPJC30-RD12-12 Coupling 131206005000 1889112600 PT100 20mm 501026005070 111556A Insert carrier 10x12,5 110736005273 V800025121 Abzieher Lüfterrad 134156005304 YAE-010113-1 Multihead Ejector M6771 110736005305 24160133 Siliconkautschukschlauch 10569

Page 8: 300MM Spare Parts 5-3-122

6005330 9445803 air cooler 501026005460 MPX-E2572A-1 Air Filter Test Head T5581 110736005510 113080 Board Stop Bearing 124106005511 186206 STRUT HOOD 20mm ENDS 124106005512 700006 SCREW , M4X12 SLTD PAN MACHINE S/S 124106005513 700050 SCREW , M4x6 SLTD PAN MACHINE S/S 124106005514 G1140 BELT ,TIMING (6T5/185) 124106005515 119667 WASHER, U.S.C SOLVENT TANK 124106005516 YAB-007037 GAS SPRING 110736005536 Flamgard-Plus-CH Crowcon Flamgard Plus (kalibriert) 170506005539 YVP-012547 Vacuum pad M6771 (Mitte) 110736005560 YVP-005722 Vacumm pad M6771 (unten) 110736005619 9616347 OPTIC(FIBER)E32-T61S/HIGH TEMP 501026005754 00200333-01 Zahnriemen Synchroflex 6T 2,5/245 134166005755 00200341-01 Zahnriemen Synchroflex 6T 2,5/177,5 134166005782 MH5-1012009-MB Doppelpulley Baugruppe f. Test Chamber F 501006005810 OTB-96(102A)-0.8-02 Topless Sockel 500406005834 3x7/9.2/4.6/0.2/210 Rakelblech 250mm 200um 65grd geschlitzt 139876005890 9400565 NIPPLE/M5-AG 10.01.01.03526 501026005891 31530625 Feedfinger 501026005981 AKHPF-P201 Sensor Fiber 100876005983 EJKM0006 Sensor Amp Unit 100876006040 AKHPF-P003A Fiber (Prism) 100876006075 LU090083TLK1K02P51 Miniaturführung (LIFTING SLIDING BASE) 105856006079 129346 BEARING SRRB/12/21/5/ZZ/A/- 124106006080 129358 BRACKET - H.E. 124106006081 140783 CAM Y HOME HALL EFFECT LOOM BOM 124106006082 DAGE BT SE-KY0003 Tastatur für Series 4000 Joystick rechts 126106006140 13-140D-18 Rubber Tip 527136006158 50.011.416-01 Flachriemen-Segmentlänge 530 mm 12x1062 132026006159 50.011.419-01 Flachriemen 12x1391 132026006170 50.011.418-01 Flachriemen 12x1325 132026006291 LTC/0E2520318 LAMP HALOGEN JR 12V 35W 30° FTH/A3 100876006292 LTC/0E2520301 LAMP HALOGEN JCR 12V-100WB Buse10FL 100876006293 AQLM-100MCR LAMP HALOGEN 12V / 100W MCR100W Maritech 100876006323 81-02152 POGO PIN SOCKET BGA78 H90 3.3mm 110736006333 100.0319.1 POLISHING STRIP EFO (5er Pack) 500246006364 81-02162 POGO PIN SOCKET BGA66 T11 66PIN 3.3mm 109096006365 81-03416 (MCB-066-0.POGO PIN SOCKET BGA66 T11 SYM 109096006374 DCB-SSA162X01 Kabel M6541 LPP X-Achse 110736006376 DCB-SSA163X01 Kabel M6541 LPP Y-Achse 110736006377 DCB-SSA164X01 Kabel M6541 LPP Y-Achse 110736006378 DCB-SSA160X08D Verbindungskabel Ejector zur Platine 110736006379 DCB-EEA578X01 Motorkabel M6541LPP Y-Achse 110736006390 DCB-SSA172X01B Kabel M6541 ULPP X-Achse 110736006391 DCB-SSA173X01 Kabel M6541 ULPP X-Achse 110736006392 DCB-SSA174X01 Kabel M6541 ULPP Y-Achse 110736006395 DCB-EEA578X02 Motorkabel M6541ULPP Y-Achse 110736006396 DCB-ESA128X01A Kabel Transferarm 110736006397 DCB-EPA129X01A Kabel Transferarm 110736006398 DCB-EPA130X01B Kabel Transferarm 11073

Page 9: 300MM Spare Parts 5-3-122

6006402 9620526R Berghof Modul repaired 501026006425 1014QMDD Nest Platform 10x17 PG-TFBGA 84-11 (Norm 525326006431 MOWMH10551 Vacuum Pump 25SKSD6-15ZU 100876006432 LDBN-920002-2 Nut Aluminium 100876006433 LDFN-910241-0 Hub Mount SUS440C 100876006525 3x6W/11.7/6.0/0.2/230 Rakelblech 250mm 200um 65grd geschlitzt 139876006620 902.542R Rocker Z-Wippe 3088, repariert, alte Var 500246006660 135217 LEVER 503726006828 102262234 COPPET ELECTRODE 500246006829 133873 Vakuumsensor 503726006840 57003207 Vacuum Cup 7x7 527266006842 DCB-EM5854x01A-1 Thermal Fuse 110736006843 DCB-SS7480X02A-1 Kabel P&P Y Achse M6741 110736006844 DCB-ES7490X01 cable M6761 110736006846 DCB-ES7491X01 cable M6761 110736006847 DCB-ES7492X01 cable M6761 110736006849 DCB-ES7492X02 cable M6761 110736006855 HTR1-280 HiTemp Rubber Tip, 7,11mm 527136006996 RKW5-120K Schaltnetzteil 5V/120A Kepco 152406007017 G10P5ND100 Cartridge Heater WATLOW 131206007062 00349433S01 Ventilstellantrieb DLM1 134166007091 HC-AQ0235D Servo Motor MITSUBISHI 131206007095 TE203-070703BC Rubber Platform, 9 x 13 ,Tool 15 Step3 168566007097 TE203-070703CC Rubber Platform, 10 x 16 ,Tool 50 Step3 525326007124 SCRAMBLE BOARD DDRFOR CHIPIDREADER DDR3 521966007125 SCRAMBLE BOARD DDRFOR CHIPIDREADER DDR2 (enplas) 527226007130 9626104 electrical connectorpin 501026007131 537616-CP Axialluefter 8550N-ebm papst ORGID 13830 100526007181 MAX-153291 Insert 13.4x20.5x0.82 T025 110736007182 MAX-153301A Insert 13.4x20.5x2.35 T026 110736007183 SBT-0610-1093 Insert Carrier 9.1x13 110736007252 149283 Rubber Tip Holder 12D3 f. Alphasem Die B 527136007253 13-140D-xx Rubber Tip (x-groove) 527136007254 3RH1122-1AP60 Hilfsschuetz 2S+2OE (für K4 Vötsch-Ofen 134166007255 3RH1140-1AP60 Hilfsschütz, 4S ( für K3M Vötsch TU6060) 134166007322 3TH2022-0AL2 Hilfsschuetz 2S+2OE (für K4 Vötsch TU606 134166007323 3TH2244-0AP0 Hilfschuetz 4S+4OE 134166007324 159427 PCB IOSS 134166007325 133963 -R MONITOR 15,1 503726007410 5-001286 PARTICULT CARBON OC200-T33 1001216007411 5-001118 FILTER 5 MICRON DPPPB2 1001216007412 5-001299 FLTR DI WATR DIH2OPCL-211 1001216007413 5-000722 3/16 GARLOCK CHORD 1001216007414 5-001048 GASKET CLEANOUT AM-1028-01 1001216007415 5-001166 FLTR AIR 2 MCRN KT-AF40000 1001216007418 5-001991 RELAY, SOLID STATE 55A 3HP RA 1001216007419 5-001129 RELAY, SOLID STATE 55A 3HP 1001216007420 5-001431 RELAY, SOLID STATE 40A 1HP 60 1001216007428 MKX-K9991A-1 TS LOCK SHAFT 110736007429 MKX-J8670A-1 RETAINER 110736007465 136328 LEADSCREW K8x4 L140 NUT D16,5 M14x1 L24 50372

Page 10: 300MM Spare Parts 5-3-122

6007466 115377 BEARING, LINEAR W120 W44 H30 B32 J36 503726007467 MAX-L1764A-1 VH Base CF 110736007468 MAX-L1765A-1 VH Base CR 110736007510 MAX-H4704D-1 VH Base B 110736007511 DCB-EEB953X01B-1 Photo Electric Switch (Sensor) 110736007513 155614 Camera X Dragchain 124106007514 156035 Ball Roller 124106007515 156256 Roller Counter Plate 124106007516 159037 Camera carriage dragchain 124106007517 160432 Drag Chain Complete 124106007520 00344772S02 Stern montiert SP6 /DLM1 134166007521 00354244S01 Saugteller f. Kugelrastung kpl. DLM1/A 134166007571 2240.600.160 Thermo-Transfer-Folie (CS) 160mm x 600m 101556007572 A250076 DC Carrier 10xs16mm SBT-0504-1065 110736007615 696812 Dichtungssatz Membranpumpe MD4 108396007632 215-7316 Weithals-Flasche (für Aceton, HDPE) 102486007685 137408 SAFETY STRIP 650mm 503726007688 137396 SAFETY STRIP 490mm 503726007693 NT31C-ST143-V3 OMRON Touch Panel für Transfer 1 131206007694 GYS201DC2-T2A-B Motor Magazin Elevator 503766007701 102358 Belt, Timing P=5.08 L=203.2 503726007770 DCB-ES10235X09B Photo Micro Sensor 110736007891 810161-041600 Stopper Assy / Tray Holder Assembly 131206007892 MH5-0308002-00 Unload Picker 501006007922 122852 STEPPER MOTOR (Motor 226) 503726007923 902.285 PUSH ROD ( MAGNET EFO-PLUNGER HEAD) 500246008054 SBT-0701-1098 DC Carrier 8x 12,5mm 519516008111 MCB-084-0.8x0.8-08APogo Pin Sockel 3.3mm FBGA84 146366008113 MCB-063-0.8x0.8-04APogo Pin Sockel 3.3mm FBGA63 T5593 FDS 146366008114 MCB-63-0.8x0.8-03A POGO PIN SOCKET BGA63 Txx fw C1molded 146366008115 760.313 PULLEY T5Z24D10 500246008116 905.2332 PUSHER BLADE 500246008117 180.0351.1 KANTENSCHUTZPROFIL 500246008125 51-01150 Y-T1 Topless Sockel NP448-086-086-001F-T 109096008169 MCB-84-0.8x0.8-05A POGO PIN SOCKET BGA84 Txx fw C1molded 146366008173 R88M-W10030H-B Servo Motor 131206008189 12C-015 RUBBER TIP HOLDER Alphasem 527136008200 13-140A-112 RUBBER TIP 7,9 x 11,6 Alphasem 527136008202 13-140A-113 RUBBER TIP 5,9 x 11,0 Alphasem 527136008203 R1-160-240 RUBBER TIP 4,06 x 6,10 Alphasem 527136008204 R1-160-280 RUBBER TIP 4,06 x 7,11 Alphasem 527136008205 R1-280-480 RUBBER TIP 7,11 x 12,19 Alphasem 527136008206 1003-2577 STEEL WIRE ESEC ( Oerlikon ) 500246008240 MPX-M1618 Bellofram M6542 110736008241 902.364 STOPPER PLATE 500246008317 MCB-104-0.8x1.27-02 POGO PIN SOCKET BGA104 Rambus GRD70 3.3 146366008403 210.2486.1 CABLE LK205 SIL SW L=15 500246008450 915.1114 FLAG 500246008451 916.0900 PCB DH HEATER INTERFACE 500246008492 135572 ACTUATOR SMC D=25 L=100 CD85N25-100C-B 2000246008493 915.0243 CARRIER 50024

Page 11: 300MM Spare Parts 5-3-122

6008494 1001-8379 OPTIC CARRIER 500246008524 631.186 PCB W COMP HIFG58 VGA 500246008604 147700 SWITCH, PROXIMITY Sn0,8mm 503726008700 1000-7501 ECCENTRIC BOLT 500246008722 NP448-086-049-001-2Topless Socket DDR2 109096008800 141146 THK AFB GREASE 124106008955 MKM-J6675 Gleitschiene 110736008956 MKM-J6676 Gleitschiene 110736008957 MKM-J6677 Gleitschiene 110736008990 MAX-163052A Insert 11.55x10.30 T127 110736009001 DCB-ES8068X20 CBL-MTC3NKB1BX20 Kabel M6751 - A 110736009016 YBT-007711 TIMING BELT M6541 110736009017 YBT-007713 TIMING BELT M6541 110736009018 YBT-007710 Timing Belt M6541 110736009060 PA0866 Surveyor Sensor Typ K-NiCr-Ni 154926009109 SBT-0505-1067 Insert carrier 10x17 519516009110 MAX-N2408A Insert 8x14 110816009186 2242300035 Rakelhalter 300mm/ 65° komplett 160756009187 EKMBK-300/0.2/65grd Rakelblech 300mm/ 65° 200µm Satz 160756009188 EKMBK-300/0.3/65grd Rakelblech 300mm/ 65° 300µm Satz 139876009434 PM-L24 Photosensor 131206009636 134032 PROTECTOR, LEADSCREW 503726009637 134061 LED IR EMITTING DIODE AlGaAs 503726009639 155254 HEAT. ELEMENT 120W/36V 24,4x101,6/MINIFI 503726009640 SBT-0705-1106 Insert Carrier 8,5 x 12,5mm 519516009641 SBT-0701-1076 Insert Carrier 8 x 10,5mm 519516009642 A250056 Insert Carrier 10 x 12,5mm 110736009730 NT31C-ST143-V3 OMRON Touch Panel für Transfer 2 131206009742 902.1558 PIVOT SCREW 500246009790 OIK1GN-C Induction Motor 131206009856 NP448-086-50-007 Topless Sockel 2G DDR2 (T70) 109096009907 PMT150 150mm Achse 148806009908 OGN12.5K Gear Head Unloader 131206010041 501090-000099 BOARD ASS'Y OTHERS TFS100 Pattern Genera 501006010045 SBT-0610-1094 DC Carrier 11,5x21,8mm 519516010090 13-087A-58 Rubber Tip (7,1x12,0mm) 527136010214 3054327 VAC.UNIT 501026010216 84-00961 YED448-086-086-001F-1 109096010220 129774 HARD DISK DRIVE IDE MIN 6,4GB type? 503726010430 84-00954 YED448-086-060-007F-1 109096010482 1002-0091 Z HEIGHT PIN GAUGE (Calip Pin) 500246010520 210.3746.1 MOUSE PAD 500246600020 YFN-009698-1 Cross Flow Fan M6771 110736600031 103054 BLATTFEDER A=4,0 G=20,0 S=0,5 D=2,2 E=5, 503726600032 103053 BLATTFEDER A=4,0 G=60,5 S=0,3 H=1,0D=2,2 503726600033 133407 HEIZPATRONE 160W/36V L=0,50m 10x60/ MINI 503726600034 146845 DRIVE BELT P=2,032 L=294,64 B=3,2 Z=145 503726600035 102075 STOSSDAEMPFER TYP TK 21-3M MIT JE 2 KONT 503726600037 101995 VAKUUMFILTER TYP OR-FV-20 503726600038 141738 KAMM 503726600039 110431 FEDER BONDFORCE 50372

Page 12: 300MM Spare Parts 5-3-122

6600040 101526 SILICON_SCHLAUCH SILKOLIT LW 2x4mm 503726600041 140786 PRINT NERLITE 055-024500 503726600042 126569 POSITIONSSENSOR BGA&METALLIC OPTICAL FOR 107336600043 135170 KURVENSCHEIBE 503726600044 137742 ZAHNRIEMEN P=T2,5 L=180 B=6 Z=72 503726600045 138140 THERMOCOUPLE L=0,37m NICR-NI/ROUND 4F/1, 503726600046 114580 NAEHERUNGSSCHALTER SMEO-4-K-LED-24B 503726600047 103414 MIKROSCHALTER MIT HEBEL 7.7 OMRON D2MQ-1 503726600048 126046 POSITIONSSENSOR HALL 6.6V-12.6V/ L=100mm 503726600049 136051 GLUEHLAMPE 12V/2W 503726600050 105424 NAEHERUNGSSCHALTER IFF 08.24.15/L1 503726600083 552912-000004 Heater Wired Rubber MH5-1910005-10 501006600084 551627-000009 Switch Thermo N85 501006600181 53962614 Gripper Finger Step4 501026600182 53962615 Gripper Finger Step4 501026600183 132771 PCB BACKPLANE 270x264 12SLOT 6ISA/4PCI/2 503726600204 MKX-92905C-1 GUIDE SHAFT 110736600301 8520000044 Netzteil für Maschinen-PC von ISYS-JOU J 160756600311 KR110R00B Spares Rebuilt Kit Trebor 110 129056600323 100001 Rubber Tip Holder für R1-12U3 (Alphasem) 527136600324 2304914-00-R Inset thermostat LSO1172-01/ 3.1kW 230V 109906600347 M60000411 RSR 12ZM-70LM 108586600381 902.352 PAD INSULATING 500246600398 81-03818 POGO PIN SOCKET BGA96 4,8mm YAMA 109096600399 81-03819 POGO PIN SOCKET BGA78 4,8mm YAMA 109096600403 915.0906 OPTICAL SENSOR 500246600404 220.1319.1 FLAT CABLE F/F 10POLE 335m 500246600405 220.1320.1 FLAT CABLE F/F 10POLE 355m 500246600406 84-00874 YED448-096-096-002F-1 109096600421 5010120 SMR200/D1 108336600432 902.441 BEARING SHELL 500246600448 10139-90408-000 MTX BIB Slide Plate 501006600494 99995208446-004 Schlauch PFA 5/16"OD 3/16"ID 105456600529 SBT-0801-1118-1 DC Carrier 9,1x12,5mm 519516600530 SBT-0705-1107 DC Carrier 8,5x13,5mm 519516600557 0418699 PVDF.KOLBENSTANGE.D12 L309,5 148206600577 MOKFZS87-Z NOZZLE (SI) SUS303 OR 100876600582 1076-PAD Vacuum Cups 8x8 525326600596 DCB-EMA133X01 Temperatur Fuse M6542 110736600597 21990482 SLIDE BLOCK AB076151 I 523266600598 134204 CABLE ENCODER 7x4x2x0,14XY/96F/7XMTE 503726600611 YCY-010217 AIR CYLINDER M6771 110736600631 1002238567 FLOPPY DISK DRIVE 500246600637 124698 HOOK 503726600640 200DDR-N(9.5)-80Pin 80 Pin Array 146366600661 552012-000013 BREAKER . CURRENT, 15A (Power Box) 501006600662 552012-000052 BREAKER . CURRENT, 08A (Power Box) 501006600663 551915-000056 SSR (Power Box) 501006600668 SCRAMBLE BOARD DDRFOR CHIPIDREADER DDR2 (yamaichi) 527226600701 TFS 100 Driver Board TFS 100 Driver Board 501006600817 2313783-00 gerade Steckvershraubung KJF04-M5 200024

Page 13: 300MM Spare Parts 5-3-122

6600818 2314379-00 KJL 04-99 Winkelsteckverbinduung 2000246600839 VM10004N00 VM1000 Ventil mechanisch betätigt 2000246600861 117117 VENTILATOR 119x119/25 24VDC 503726600862 101255 VENTIL 5/2W 24V 1,5-7BAR M5 KOMPLETT 503726600863 119789 STEPPERMOTOR 0.9DEG 6,0V/1,2A DOUPLE SHA 50372E-3-01-01-0091061 MAX-D5645C-1 CENTER BLOCK 11073E-3-01-01-0091302 DCB-SS9344X04C-1 KABEL P&P M6751 11073E-3-01-02-0089273 CK001 CHANGE KIT WLP 11073E-3-09-01-0071407 MOENL023 COLLAR 10087E-3-09-01-0071722 AKHPF-P003 FIBER PRISM 10087E-3-09-01-0073679 BSP1025SL LINEARLAGER LINTEC LAMINATOR 10087E-3-09-01-0074326 MAJES008--B TABLE ASSY(2-8-1) 10087E-3-09-01-0074328 MOJBL033 FIBER SENSOR (ROBOT) 10087E-3-09-01-0074330 MOENL087--A GEAR(2) 10087E-3-09-01-0074331 MOENL086 GEAR(1) 10087E-3-09-01-0074703 K97279H03-05-01-013TENSION ROLLER (SUS 304 URETHAN) 10087E-3-09-01-0075165 K98407H03-03-02-218COUPLING MM-6K(X-AXIS) 10087E-3-09-01-0078241 MOJES059_R BASE REGENERIERT(NUR MIT MAJES008_R) 10087E-3-09-01-0080144 K98411H03-07-10-206HELICAL COUPLING 3012M 10-12 10087E-3-09-01-0087776 MXU6-5-F9BL DRUCKLUFTZYLINDER 10087E-3-09-01-0089522 19AAA SPRING PLUNGER PJL3-3 MISUMI 10087E-3-09-01-0089931 MOJTZ002--B AIR CYLINDER CRB-115W 10087E-3-09-01-0090674 K01211H03-08-01-059TAPE CH:UPPER SS400/NON UNA-31 10087E-3-09-01-0090677 K01211H03-08-01-058TAPE CH.LOWER SS400/NON UNA 10087E-3-09-01-0091789 K00036H03-03-01-023WAFER SUCTION TABLE A5052P/NON-STICK UNA 10087E-3-09-01-0092372 DEAANUPS201-00 UV LAMP 10087E-3-12-01-0089523 713.180 PCB W COMP YASKAWA 50024E-3-12-01-0089912 902.1121-R ROCKER ARM (F.3088-ERSTVARIANTE)reparier 50024E-3-17-01-0090029 3500688 SEAL RING 50102E-3-35-01-0079794 1030495 TIMING BELT,MXL 1/4"x245 TEETH 50089E-3-35-01-0079795 1032531 TIMING BELT 1/2"x60 13750E-3-35-01-0079796 1030079 TIMING BELT,XL 1/4"Wx385 TEETH 50089E-3-35-01-0079797 1030081 CYLINDER,DA 10MM BORE 1/2"STOK 50089E-3-35-01-0079798 1030082 BUSHING 3/8 BORE 3/4L 50089E-3-35-01-0079799 1028289 BEARING,DU,.188ID.250OD.25W 50089E-3-35-01-0079800 1030083 BUSHING 3/16 BORE 3/8L 50089E-3-35-01-0079801 1030084 BALL BEARING 8MM ID 22MM OD 7L 50089E-3-35-01-0079802 1030085 SPRING,COMPRESSION.3" DIA 2.5L 50089E-3-35-01-0079803 1030087 SPRING,COMPRESSION.3" DIA 1.75 50089E-3-35-01-0079804 1018036 BEARING,BA.500ID 1.125OD.312W 50089E-3-35-01-0079805 1014872 BEARING BA.750ID 1.625OD.44W 50089E-3-35-01-0079806 1030092 BALL BEARING 3/16 ID,1/2 OD 3/ 50089E-3-35-01-0079807 1030093 RETAINING RING 1, 125 ID HSG 50089E-3-35-01-0079808 1030094 RETAINING RING.687 OD SHAFT 50089E-3-35-01-0079809 1030095 COMPRESSION CLAMP, 1.357 DIA S 50089E-3-35-01-0079810 1030096 COMPRESSION CLAMP, 16MM SHAFT 50089E-3-35-01-0079811 1030097 CYLINDER, CLEVIS 50089E-3-35-01-0079812 8030159 SPACER, CLEVIS, GATE CYLINDER 13750E-3-35-01-0079813 2029874 SENSOR,SIDE VIEW,REFLECTIVE FU 13750E-3-35-01-0079814 2028207 AMPLIFIER, SENS,DIGITAL FIBERO 13750E-3-35-01-0079815 2026526 PHOTO AMP, 1 TOUCH SLAVE 13750

Page 14: 300MM Spare Parts 5-3-122

E-3-35-01-0079816 2023190 SENSOR,PHOTOINT,LIGHT/DARK 13750E-3-35-01-0079817 2023195 CABLE, 4 PIN SENSOR 13750E-3-35-01-0079818 8030179 DRIVE PIN,WAFER FRAME 13750E-3-35-01-0079819 8030277 LINK GUIDE BEARING 13750E-3-35-01-0079820 1030278 SHOULDER SCREW, 1/8D X.15LG, 4 50089E-3-35-01-0079821 1019815 RETAINING RING EXT .312 DIA 50089E-3-35-01-0079822 2023192 SENSOR,PHOTOINT,LIGHT/DARK ON 13750E-3-35-01-0079823 1029505 LINEAR BEARING GUIDE,TRANSFER 50089E-3-35-01-0079824 2026151 VALVE (NEST) 13750E-3-35-01-0079825 1030497 VALVE (STACK) 50089E-3-35-01-0079826 1027602 CYLINDER,STACK 50089E-3-35-01-0079827 1027603 SWITCH,CYLINDER SENSE 50089E-3-35-01-0079828 2023746 SENSOR CABLE-DIFFUSE REFLECT 13750E-3-35-01-0079831 2030619 FUSE, 3AG, 15A 13750E-3-35-01-0079832 2020424 STEPMOTER 13750E-3-53-01-0092617 M61000730 ZAHNRIEHMENTRANSPORTEINHEIT, B15mm L2,8m 50531E-3-95-01-0090030 156212 BELT CLAMP 16MM 12410E-3-A3-01-0089301 EJTM-917005-01 Arm Nest Pos. Sensor (Emitter) 10087E-3-A3-01-0089518 50003050-B NEST PLATFORM 10x12 HIGH WARPAG TOOL #20 16856E-3-A3-01-0091062 57003219 VACUUM PAD CONTOUR RECT.9X9X7 16856E-3-A5-01-0089906 PICK&PLACE PICK&PLACE KPL MIT SERVOMOTOR 10569E-3-A5-01-0089907 ÜBERGABEARM ÜBERGABEARM DREHTELLER M.MOTOR 10569E-3-A5-01-0089908 BLISTERTAPE-ÜBERG ÜBERGABEARM BLISTERTAPE M.MOTOR 10569E-3-A5-01-0089910 ZWISCHENABLAGE ZWISCHENABLAGE KPL M. MOTOR 10569E-3-A5-01-0090249 24010217 KOMPAKTZYLINDER 10569E-3-A5-01-0090250 24010228 KURZHUBZYLINDER 10569E-3-A5-01-0090251 24010332 ZYLINDER 10569E-3-A5-01-0090252 24010343 KOMPAKTZYLINDER 10569E-3-A5-01-0090253 28070205 KLEINSTGRENZTASTER 10569E-3-A5-01-0090254 60196022 PLATINE GONG 10569E-3-A5-01-0090255 22020376+164 LINEARLAGER KOMPL. 10569E-3-A5-01-0090256 24110210 STOßDÄMPFER 10569E-3-A5-01-0090257 24010325 SCHWENKMODUL 10569E-3-A5-01-0090258 22130014 ARRETIERBOLZEN 10569E-3-A5-01-0090259 22060083 O-RING/GROß F. CARRIERTAPE 10569E-3-A5-01-0090260 28280030 GABELLICHTSCHRANKE 10569E-3-A5-01-0090262 60622523 RASTUNG KPL. 10569E-3-A5-01-0090264 60614199 TRAY-SLEEVE-CODE 10569E-3-E8-01-0089349 4000-HK-5-2 TESTHAKEN 125µ FUSSLÄNGE 50µDURCHMESSER 12610E-3-E8-01-0089524 DAGE BT DD5877-065 SCHERMEISSEL MODIFIZIERT 062-003 12610E-3-K8-01-0089940 125908 VENTILBLOCK 50372E-3-L5-01-0090325 MH5-1012008-1A FAN PULLEY 13120E-B-01-01-0044546 MAX-H6468 INSERT M-BGA-AB ASY 11073E-B-01-01-0044551 YVP-005722-1 VACUUM PAD 11073E-B-J7-01-0043961 19362 NEEDLES GAUGE 20 12271E-B-J7-01-0047191 2054 BELT TIMING 12271E-B-J7-01-0047192 8627 BULB 28V 0,08A 12271E-B-J7-01-0047193 9118 FTG ST QDX10-32 BR 12271E-B-J7-01-0047194 9925 PROBE 12271E-B-J7-01-0047195 9964 BELT TIMING 12271E-B-J7-01-0047196 11442 FTG PLUG 5/32T PB 12271

Page 15: 300MM Spare Parts 5-3-122

E-B-J7-01-0047197 12531 COMPRESS SPRING 12271E-B-J7-01-0047198 12579 BELT TIMING 12271E-B-J7-01-0047199 12580 BELT TIMING 12271E-B-J7-01-0047200 14939 FILTER FAN GUARD 12271E-B-J7-01-0047201 15088 CONVEYOR SENSOR 12271E-B-J7-01-0047202 17107 MODULE OUTPUT 18-32 VDC 12271E-B-J7-01-0047203 20239 FTG QDE 10-32 BR 12271E-B-J7-01-0047204 20240 FTG QDI 10-32 BR 12271E-B-J7-01-0047205 20577 NUT PLATE 12271E-B-J7-01-0047206 21831 SPRING SWITCH ACTUATOR 12271E-B-J7-01-0047207 25080 WASHER SPHER 1/4 BOLT SS 12271E-B-J7-01-0047208 25285 FUSE 12A GG 10x38 12271E-B-J7-01-0047209 25739 FILTER 10-32 20 MICRON 12271E-B-J7-01-0047210 28397 O-RING 0,28DIAX6,75"ID 12271E-B-J7-01-0047211 28398 O-RING 0,28DIAX5,50"ID 12271E-B-J7-01-0047212 28399 O-RING 0,19DIAX13"ID 12271E-B-J7-01-0047213 28414 RING CENTERING NW25 VITON 12271E-B-J7-01-0047214 28415 RING CENTERING NW40 VITON 12271E-B-J7-01-0047215 28417 RING CENTERING NW10 VITON 12271E-B-J7-01-0047216 28419 SEAL 2-3/4" CFF VITON 12271E-B-J7-01-0047217 28981 LIGHT MODIFIED 12271E-B-J7-01-0047218 29089 VALVE VACUUM 1.05 CV 12271E-B-J7-01-0047219 29855 VALVE RELIEF MODIFIED 12271E-B-J7-01-0047220 32136 BELT 89.625" 12271E-B-J7-01-0047221 32137 BELT 15.750" 12271E-B-J7-01-0049273 19434 NEEDLES GAUGE 23 12271E-B-J7-01-0049383 20114 CLIP, RETAINER 5mm 12271E-B-K0-01-0044750 9961 SOLENOID-LIFT ASSEMBLY 12281E-B-K0-01-0044751 9888 OPTICAL SENSOR ASSEMBLY (SWEEPER BARS) 12281E-B-K0-01-0044752 9811 FIBER OPTIC SENSOR NPN (KEYENCE PSTI) 12281E-B-K0-01-0044753 9889 PHOTO SENSOR (KEYENCE PS46) 12281E-B-K0-01-0044754 4607 TEMPERATUR CONTROL ASSEMBLY 12281E-B-K0-01-0044756 4608 CONTROLLER ASSEMBLY 12281E-B-K0-01-0044757 4601 DRIVE MOTOR MAIN CONVEYOR 12281E-B-K0-01-0044758 4859 POWER SUPPLY 12V 12,5AMP 12281E-B-K0-01-0044761 4600 DRIVE MOTOR-LOAD-UNLOAD ASSEMBLY 12281E-B-K0-01-0044762 4812 LOAD-UNLOAD ASSEMBLY DRIVE BELT 12281E-B-K0-01-0044763 4823 LOAD-UNLOAD SLIDE SENSOR ASSEMBLY 12281E-B-K0-01-0044764 TRANSPORTROLLEN TRANSPORTROLLEN (PLASTEBOX) 12281E-B-K8-01-0047225 114012 BLATTFEDER C2710.049001 univ.Stackmagaz. 50372E-B-K8-01-0047226 103028 BLATTFEDER N0500.010001 50372E-B-K8-01-0047228 121672 NO CHIP SENSOR IR-LED 2X0,25XY/MTE2F 50372E-B-K8-01-0047229 125688 NO CHIP SENSOR N1750.000005 50372E-B-K8-01-0047230 103651 MIKROSCHALTER MIT ROLLENHEBEL 50372E-B-K8-01-0047231 123443 NÄHERUNGSSCHALTER (LITZE 1m) 922LC1 50372E-B-K8-01-0047232 114523 PRINT AS 250-0-01 BESTÜCKT OPTICAL FORK 50372E-B-K8-01-0047233 105961 PRINT DB6 100-0-02 BESTÜCKT OPTICAL FORK 50372E-B-K8-01-0047234 112531 ZAHNRIEMEN P=2.032 L=101.6 B=3.2 Z=50 50372E-B-K8-01-0047235 126045 ZAHNRIEMEN P=2.032 L=822.96 B=3.2 Z=405 50372E-B-K8-01-0047237 126902 ZAHNRIEMEN P=2.032 L=568.96 B=3.2 Z=280 50372E-B-K8-01-0082269 127031 KAMM 50372

Page 16: 300MM Spare Parts 5-3-122

E-B-L5-01-0049504 NX12-R I/O-MODUL repaired 50626E-M-01-00-0080096 DEE-003139 CARTRIGE HEATER 11073E-M-01-01-0012187 YBT-006080-1 BELT NS41UDSO/2BK+L1100 11073E-M-01-01-0019661 YEE-002709-1 SHOCK ABSORBER KSHA6X8C-F-S 11073E-M-01-01-0019662 YCY-005301-1 AIR CYLINDER CDLU6-10D 11073E-M-01-01-0019663 YAB-005779-1 SHOCK ABSORBER FK-1008L-S 11073E-M-01-01-0019664 YLB-005418-1 LINEAR GUIDE RSR9MKUUC1+155LM 11073E-M-01-01-0019669 YCY-005303-1 ROTARY ACTUATOR CDRQBW10-90 11073E-M-01-01-0019674 DEE-002794-1 SENSOR AMPLIFIER SU-7 11073E-M-01-01-0019682 MKX-94361A-1 ITX POSION PIN 11073E-M-01-01-0019684 DEE-002746-1 LN2 VALVE A2-3172 11073E-M-01-01-0019685 DEE-002748-1 LN2 VALVE A2-5957 11073E-M-01-01-0020579 DCB-EP5680X03B SENSOR (UNLOADER) 11073E-M-01-01-0020580 DCB-EP5680X04B SENSOR (UNLOADER) 11073E-M-01-01-0020583 DCB-EP5678X02 SENSOR AMPLIFIER 11073E-M-01-01-0020629 YCY-005312-1 AIR CYLINDER 11073E-M-01-01-0020650 TES-0001 KONTAKTSCHUTZ 11073E-M-01-01-0020652 H4-63258 C-Tray Catch M6741 11073E-M-01-01-0021611 DCB-EE564X01 MOTOR (FAN) 11073E-M-01-01-0022182 DST-002617-1 PT SENSOR NR 35-D2 11073E-M-01-01-0023653 DST-002620-1 PT SENSOR NR 35-D3 11073E-M-01-01-0029303 DCB-EP5673X04-1 CABEL 11073E-M-01-01-0033503 CBL-SHTMAPS3X02 ANTENNE TRAYREADER 11073E-M-01-01-0040950 BGR021762 FM BOARD T5365P 11073E-M-01-01-0040951 BGR020093 36 MB MODULE FÜR T5365P 11073E-M-01-01-0050127 MAJ-D0658B-1 STOPPER UNIT GUIDE 11073E-M-01-01-0050128 YCY-006307-1 AIR CYLINDER (KOGANEI) BDAS10x15 11073E-M-01-01-0053333 DIAGNOSEBOARD T55DIAGNOSEBOARD T5571 11073E-M-01-01-0056371 YCY-004185 AIRCYLINDER 100076E-M-01-01-0056785 DEE-003536-2 SERVO MOTOR DRIVER 11073E-M-01-01-0056786 DEE-003537 SERVO MOTOR DRIVER 11073E-M-01-01-0057123 MPX-92485 BELLOFRAM MODIFRY 11073E-M-01-01-0058463 DMF-001333 LÜFTER TESTKOPF T5365 11073E-M-01-01-0058464 DMF-003562-1 FAN MOTOR 200V 11073E-M-01-01-0059370 CBL-SHTMAPS ANTENNENKABEL 11073E-M-01-01-0060816 DEE-003535 SMD-CARD 11073E-M-01-01-0068311 MKX-D5641 SOAK FAN SHAFT 11073E-M-01-01-0071409 T002x16M67xx Testtrayrahmen M67xx 11073E-M-01-01-0071790 MBX-G2390B-1 SENSOR FLAG 11073E-M-01-01-0074683 AAA-MSD043A109-2 MOTOR DRIVER 11073E-M-01-01-0077169 81-01013 POGO PIN SOCKET BGA60 D11 10909E-M-01-01-0078257 DCB-FF6547X02 DC CABEL CONNECTION T5592 HICAL 11073E-M-01-01-0080350 DBK-003424-1 MOTOR DRIVER POWER SUPPLY BREAKER 11073E-M-01-01-0080592 DCB-SS7950X01A VERBINDUNGSKABEL P&P 11073E-M-01-01-0080953 MKM-D6598 STG-B RAILF 11073E-M-01-01-0080954 MKM-D6599 STG-B RAILR 11073E-M-01-01-0081300 YFA-005373 TÜRVERRIEGELUNG 11073E-M-01-01-0081905 YCY-013550-1 AIR CYLINDER CVJ5B6-N5005-15 11073E-M-01-01-0082078 DEE-003191-2 CARTRIDGE HEATER 11073E-M-01-01-0082079 BLG-022829 HTD BOARD 11073E-M-01-01-0082080 LTP-001622-1 TRANSFORMER 11073

Page 17: 300MM Spare Parts 5-3-122

E-M-01-01-0083661 61-00754 LEITGUMMI 10909E-M-01-01-0085277 BLG-020810X02 HTD BOARD 11073E-M-01-01-0085278 DCB-HQ5432X01 FIBERSENSOR / Doppellichtleiter 11073E-M-01-01-0085279 DCB-HQ7140X01 FIBERSENSOR / Einzellichtleiter 11073E-M-01-01-0085434 MEX-94200 ITX M DRV WIRE ASSY 11073E-M-01-01-0087819 SBLB-020986X10 IOT CONNECTORBOARD 11073E-M-01-01-0092469 DCB-SS8191X04A-1 Y-ACHSEN ENCODERKABEL 11073E-M-01-02-0065652 PBGA352-16-6761 CHANGE KIT 11073E-M-02-01-0012880 108-44914-00 REFRIGERATION COIL DC 15X54MTX 11074E-M-02-01-0012882 108-44917-00 THERMOCOUPLE T38006E-00-15-110 11074E-M-02-01-0012883 108-44918-00 THERMOCOUPLE T38022E-00-15-110 11074E-M-02-01-0012887 108-43295-00 WC AIR FLOW SW JD-20 1-4.0 11074E-M-02-01-0012895 123-43854-00 LIMIT SWITCH 3SE4006 LS 11074E-M-02-01-0012917 128-45248-00 TEMP CONTROLLER 11074E-M-02-01-0012918 103-43981-00 Ventilator(NMB)115VAC 50/60Hz 150/38 mm 11074E-M-02-01-0035986 119-45139-00 SICHERUNGSBLOCK 5SX26 11074E-M-02-01-0083298 SSUPBO10 LAGERGEHÄUSE (MTX-TÜR) 11074E-M-09-01-0019232 MOELH175--B FLOW CHECKER 10087E-M-09-01-0019241 MOELH103 SOLENOID VALVE 10087E-M-09-01-0019244 SBEE-SX672 PHOTO INTERRUPTOR OMRON 10087E-M-09-01-0019260 LAA076A-0000 CARBON BRUSH ASSY 10087E-M-09-01-0080351 MOJAT070 PAD 10087E-M-09-01-0081254 LTC/26013009 FIBER SENSOR FU-66Z 11590E-M-09-01-0084367 MEWEH11255A SAFETY VALVE (SPINDLE COOLANT) 22221 10087E-M-09-01-0084370 MOJBS053--A AIR SLIDE TABLE 10087E-M-09-01-0084372 GEDFD640-007 SURFACE SHEET (600) 10087E-M-09-01-0084941 OE2X006010 CARTRIDGE HEATER 10X30L/50W/DC24V LINTEC 10087E-M-09-01-0088910 AQFG-1ENEC GLOW LAMP 10087E-M-09-01-0088911 AQLM-100MCR LAMP (HALOGEN) 10087E-M-09-01-0088914 MOJER024 O-RING 10087E-M-09-01-0088915 MOJER029 RING,CENTER,THETA 10087E-M-09-01-0088916 MOJET019 PAD,VACUUM (D15) 10087E-M-09-01-0088918 MOJKRA26 V-RING,AXIS,THETA 10087E-M-09-01-0088919 MSCO0565N O-RING 10087E-M-09-02-0019271 MSVSCO-LF SPEED CONTROL VALVE (2) 10087E-M-09-02-0019273 MSVSC6-01A VALVE 10087E-M-09-02-0019274 MSVSC6-M5A VALVE 10087E-M-09-02-0019275 MSCO0013AN O-RING P-14 NOK 10087E-M-09-02-0019282 MS6002ZZ-S RADIAL BALL BEARING NSK 10087E-M-11-01-0067864 2003360 VAKUUM FILTER 13380E-M-11-01-0067869 5002224 ERSATZBÜRSTE FÜR SÄGESPINDEL 13380E-M-11-01-0083737 5943780 GLEITFOLIE 40x15 ETIKETTEN N/AE-M-11-01-0083738 5943782 GLEITFOLIE 40x9.5 ETIKETTEN N/AE-M-11-01-0090574 PS-52 SENSOR-PHOTO PS-52 (Keyence) 50030E-M-11-01-0090575 PS-2-61P AMPLI-PHOTO SENSOR KEYENCE 13380E-M-11-01-0090576 PS-2-61 AMPLI-PHOTO SENSOR KEYENCE N/AE-M-12-01-0016142 902.401 WIRE CLAMP ASSEMBLY 50024E-M-12-01-0016145 190.1564.1 SENSOR FIBER OPTIC F5RPN-PNP 50024E-M-12-01-0016146 190.1884.1 SENSOR FIBER OPTIC F5RH-NPN 50024E-M-12-01-0016147 230.0012.1 THERMOCOUPLE TC/TE TFA 50024E-M-12-01-0016148 230.0035.1 CARTR. HEATER 378X5IN 230 VAC 50024

Page 18: 300MM Spare Parts 5-3-122

E-M-12-01-0016149 730.724 SENSOR CARRIER LIGHT FP&BP 50024E-M-12-01-0016150 140.0614.1 BELT TOOTHED 6T 5/575 50024E-M-12-01-0016151 140.0616.1 BELT TOOTHED 6T 5/165 50024E-M-12-01-0016153 140.9084.1 BELT TOOTHED 6T 2.5/950 50024E-M-12-01-0016186 140.9112.1 BELT Z 12 T 5/835 50024E-M-12-01-0016187 140.9173.1 BELT TOOTHED 8T 2.5/330 50024E-M-12-01-0016188 140.9179.1 BELT TOOTHED 15T 3/600 50024E-M-12-01-0016189 730.1170 CLAMP FIXED 50024E-M-12-01-0016190 730.1171 CLAMP MOVING 50024E-M-12-01-0016194 190.1540.1 CARRIER FOLF5RN-505 50024E-M-12-01-0016196 763.315 CABLE FIBER OPTIC Z-DRIVE 50024E-M-12-01-0016197 140.9164.1 BELT TOOTHED 8T 2.5/290 50024E-M-12-01-0016198 140.0923.1 BUSHING 8X10 50024E-M-12-01-0016199 140.4008.1 SPRING COMPR 2.7X24.5X0.2 50024E-M-12-01-0016200 140.9172.1 BELT TOOTHED 10T 2.5/230 50024E-M-12-01-0016201 140.9263.1 BELT Z-TOOTHED 14T 2.5/177.5 50024E-M-12-01-0016202 796.114 FAN ASSEMBLY 2005/2006/2007 50024E-M-12-01-0016204 140.9103.1 BELT TOOTHED 6T 2.5/230 50024E-M-12-01-0016207 140.1232.1 SPRING TENSION HIGH PRES 50024E-M-12-01-0016209 160.0242.1 SCREW SET a 20 St. SOCKET M2X2.5 50024E-M-12-01-0016210 872.244 SPRING TENSION 50024E-M-12-01-0017657 902.354 BUSHING INSULATOR 50024E-M-12-01-0017659 902.407 BUSHING INSULATOR 50024E-M-12-01-0017660 170.0322.1 CIRCLIP 1.5X0.4 DIN 6799 50024E-M-12-01-0017662 902.352 PAD INSULATING 50024E-M-12-01-0017663 903.116 EINLAUFTRICHTER 50024E-M-12-01-0017664 250.0116.0 RUBBER TIP 180X440 MILL 50024E-M-12-01-0017665 866.0901 HEIZPATRONE 50024E-M-12-01-0017997 866.4008 WERKZEUG UNTEN FÜR LAMINIERUNG 50024E-M-12-01-0017999 866.4006 WERKZEUG UNTEN FÜR CHIP-APPLY 50024E-M-12-01-0023886 866.1340 MONITOR HEATER TOP 50024E-M-12-01-0024004 760.0900 PCB INPUT/OUTPUT MH GRIPPER 50024E-M-12-01-0024580 820.0142 LDU MAGAZINE 50024E-M-12-01-0024581 220.0574.1 CABLE FLAT RIBBON 5 POLE 50024E-M-12-01-0024657 660.1050 HOLDER GRIPPER RIGHT 50024E-M-12-01-0024658 660.1051 HOLDER GRIPPER LEFT 50024E-M-12-01-0024659 660.1073 BAR GRIPPER RIGHT 50024E-M-12-01-0024661 660.1074 BAR GRIPPER LEFT 50024E-M-12-01-0024662 170.0096.1 PIN DOWEL OD 5X18 50024E-M-12-01-0024663 140.1210.1 SPRING COMPRESS 8X22X1.25 50024E-M-12-01-0024867 606162-77 FLACHBANDLEITUNG RM 2.5 50024E-M-12-01-0025242 190.1602.1 LIGHT CARRIER FLEX STAR 50024E-M-12-01-0029222 902.536 BONDHEAD SENSOR PCB ASSEMBLY 50024E-M-12-01-0029223 730.807 GELENKPLATTE 50024E-M-12-01-0030119 110.0385.1 FITTING QCK P-IN (TD5 M5) 50024E-M-12-01-0030459 947.056 PCB BPA US-CONTROL 50024E-M-12-01-0030461 947.050 PCD NSD/IMPACT 50024E-M-12-01-0030462 942.050 PCB ACCO 50024E-M-12-01-0031672 738.0934 REWORK LINEAR OPTICAL ENCODER 50024E-M-12-01-0031855 140.6016.1 BEARING BALL LINEAR 50024E-M-12-01-0031856 190.2511.1 LICHTLEITER RELFEKTIV FR8BC 50024

Page 19: 300MM Spare Parts 5-3-122

E-M-12-01-0031857 738.0148 ROLLER ARM ADJUSTAGE 50024E-M-12-01-0031937 736.0902 PCB BACKPLANE 50024E-M-12-01-0031939 735.0900 PCB W COMP HEAT CONTR LOGIC 50024E-M-12-01-0032327 843.130 CLAMPING TOOL 90 GRAD 50024E-M-12-01-0032912 902.514 PIEZO/TRANSDUCER ASSY 50024E-M-12-01-0033137 902.405 RUBBER PAD 50024E-M-12-01-0033139 843.138 CLAMPING TOOL 45° 50024E-M-12-01-0033143 120.0172.1 TUBUS 1X (1-6015 NAVITAR) 100076E-M-12-01-0033301 110.0392.1 BRUSHER GAUGE 50024E-M-12-01-0034081 784.1213 BARCODE-READER (INPUT) 50024E-M-12-01-0034841 738.1034 LIMIT STOP FRONT 50024E-M-12-01-0034842 7.381.086 PLATE SUPPORT 50024E-M-12-01-0034844 738.1282 POSITIONSSTIFT FÜR EINSTELLEHRE 50024E-M-12-01-0035883 110.0343.1 KURZHUBZYLINDER 50024E-M-12-01-0036047 841.132 PEPPER POT 45grd 50024E-M-12-01-0036920 872.141 BALL BEARING ASS 50024E-M-12-01-0037047 738.4045 DH-Platte für Chip Apply VDB.9192 50024E-M-12-01-0037049 738.4046 DH-Platte für LAM VDB.9193 (1 ZentrPin) 50024E-M-12-01-0037390 140.9093.1 BELT TOOTHED 50024E-M-12-01-0037411 10.464 Schwanenhals-Lichtleiter 1Arm Durchm.5,5 11666E-M-12-01-0037956 130.0152.1 COIL VOICE LINEARMOTOR 50024E-M-12-01-0037957 731.0901 LOGIC BOARD 50024E-M-12-01-0041842 627.0025 MOTOR-DRIVE 5-PHASE HIGH TORQU. 50024E-M-12-01-0042096 866.0114 TOOL CONNECTOR COMPLETE 50024E-M-12-01-0042855 931.050 PCB VPIO PROGRAMM I/O 50024E-M-12-01-0042856 934.002 CONVERTER VGA 50024E-M-12-01-0042857 932.050 PCB GRAPHIC BOARD HRG-4 50024E-M-12-01-0042858 631.182 RETROFIT EWIS 1 EWIS 2 50024E-M-12-01-0042860 930.050 PCB COMPUTER-CPU 147-CE 50024E-M-12-01-0043054 631.183 RETROFIT EWIS 1 EWIS 2 50024E-M-12-01-0043055 934.0002 CONVERTER VGA 50024E-M-12-01-0043056 901.416 HARDDISK 50024E-M-12-01-0043585 950.184 KEYBOARD MOUSE 50024E-M-12-01-0045764 730.7118 HEATERBLOCK PRE ASSD 16 MM 50024E-M-12-01-0047047 902.590 TRANSDUCER 100kHz (US-PIEZO) 50024E-M-12-01-0047595 702.109 POWER UNIT APLF 50024E-M-12-01-0049005 730.156 LINEAR ENCODER MSA6701-ML50mm 12555E-M-12-01-0051705 120.0280.1 ADAPTER ANGLE NAVITAR 67XNIRA1-60172 50024E-M-12-01-0051710 730.7140.03 FP&BP SENSOR L/CARRIER ASSY 50024E-M-12-01-0051711 947.209 CABLE 34 POLIG 50024E-M-12-01-0051712 872.135 DIGITAL BONDHEAD DB3 COMPL. 50024E-M-12-01-0051713 784.0900.1 BPCB BOARD VERTEILER 9 POLIG 50024E-M-12-01-0051714 730.7414.06 MOTOR DRIVE PUSH IN ASSY 50024E-M-12-01-0051718 130.0127.1 MAXON DC MOTOR 41.022.022.00-068 50024E-M-12-01-0051719 902.365.01 NUT CAP ADJUSTING 50024E-M-12-01-0051722 210.3098.1-R 15" LCD-MONITOR WN15PT repaired 50702E-M-12-01-0052526 190.3618.1 2 GB HARDDISK (CC-2000-SE) 50024E-M-12-01-0053646 872.163.02 BEARING BALL 50024E-M-12-01-0054681 902.619 PILLE GEKLEBT IMPACT ABSORBER 50024E-M-12-01-0056880 945.054 CHOP150 Z COMPL. 50024E-M-12-01-0060057 730.7213 OVEN BODY,SOLDERED 50024

Page 20: 300MM Spare Parts 5-3-122

E-M-12-01-0072423 110.0637.1 FILTER 0,2µM PTFE POLYCAP 36TF 10248E-M-12-01-0072425 796.139/4 EXPANSION MOTOR FOR DIG ENC. 50024E-M-12-01-0072426 210.3277.1/01 CABLE HOUSING BHD 50024E-M-12-01-0074273 110.0274 DROSSELRÜCKSCHLAGVENTIL M5 5X1 50024E-M-12-01-0076345 130.0101.1 LIFTING MAGNET 40011-25C 24V 50024E-M-12-01-0076346 140.9094.1 BELT TOOTHED 10T 2,5/200 50024E-M-12-01-0076347 140.6006.1 LINEAR BEARING RSR15WVM 7H19 50024E-M-12-01-0076348 110.0054.1 VALVE SOLENOID 3/2 3 BAR DC (65.111) 50024E-M-12-01-0076349 110451 MAXON STIRNRADGETRIEBE 38MM 0,1Nm i=6:1 50024E-M-12-01-0078710 16.41.135 POWER SUPPLY 400W 24,36,12,5 V REPARIERT 50024E-M-12-01-0087803 110.0737.1 FLOWCONTROLER 50024E-M-12-01-0087804 906.0122 VALVE ASSY 50024E-M-12-01-0089644 902.0171R ROCKER FÜR 3088IP REPARIERT 50024E-M-12-01-0090573 905.0164 SENSOR(PUSH OUT) 50024E-M-13-01-0072844 2299000102 KLEMMBLECH 230MM 13181E-M-13-01-0072845 2299000103 KLEMMBLECH 400MM 13181E-M-13-11-0090698 10.01.05.00106 Flachsauggreifer SGON 5x15NBR 10408E-M-13-11-0090699 10.01.05.00071 Ersatzsauggreifer SGO 5x15NBR 10408E-M-17-01-0008354 9116025 SOCKET SCREW M12X200 G.V 50102E-M-17-01-0008357 9823830 REPLAC.TIP EXTR.TOOL/09.99.000 50102E-M-17-01-0008358 3000777 BELLOWS PACKING 50102E-M-17-01-0008359 3000771 BELLOWS PACKING 50102E-M-17-01-0008360 3000756 SPINDLE WIPER 50102E-M-17-01-0008364 9175552 SPIRAL CLAMPING BUSH #3X10 50102E-M-17-01-0008365 9175913 CLAMP BUSH #5X26 50102E-M-17-01-0008367 9186583 SPRING PUNCH 9-2010-26 50102E-M-17-01-0008368 9187244 SPRINGCLIP FOR BORES #52X2 50102E-M-17-01-0008369 9188331 BELLEVILLE WASHER 70X40.5X4.7 50102E-M-17-01-0008371 9220119 BEARING BUSH 12X14X15 1215DU 50102E-M-17-01-0008372 9220120 BEARING BUSH 12X14X20 1220DU 50102E-M-17-01-0008373 9222410 SELFLUB. BEARING PA1-20.20 50102E-M-17-01-0008374 9227435 SELFLUB. BEARING 16X22X20 50102E-M-17-01-0008375 9255430 BREAK SET 7180112/7183330 50102E-M-17-01-0008376 9301824 SEAL 52X68X8 TYPE R 50102E-M-17-01-0008377 9301840 SEAL 100X90X7 TYPE L9020 50102E-M-17-01-0008378 3006373 SINGLE ACT.CYLINDER AV-20-4-S6 50102E-M-17-01-0008379 9425354 DOUBLE ACT.CYLINDER DGS-16-300 50102E-M-17-01-0008385 9430038 VALVE 45A-SC2-DDUD-1BA-LI 50102E-M-17-01-0008386 9600535 AMPLIFIER E3C-JB4P/PNP/14MM 50102E-M-17-01-0008388 9616326 SENDER/RECEIVER E3C-1 50102E-M-17-01-0008389 9631045 SWITCH IFRS 12P1002/PNP NO 50102E-M-17-01-0008391 9631091 CABLE ES12/2MTRL/H.FLEX.90 50102E-M-17-01-0008392 9631097 CABLE VLFS3-050-EBL 3P HF 180 50102E-M-17-01-0008393 9631326 SWITCH XCM-A102/1 MTR. 50102E-M-17-01-0008394 9631341 SWITCH XCM-B5102/2 MTR. 50102E-M-17-01-0008395 9635018 SWITCH IWA12U9001/S12/PNP 50102E-M-17-01-0008396 9650132 RESISTOR/1200 OHM/0.5W/5101.1 50102E-M-17-01-0008397 4552050 INPUTCARD GESINP-3B/24 VPNP 50102E-M-17-01-0008398 4552143 OUTPUTCARD/3-2082/24V/1.5A/16 50102E-M-17-01-0008399 4552183 OUTPUTCARD/085-75/220VAC 50102E-M-17-01-0008400 3000282 BEARING BUSH 50102

Page 21: 300MM Spare Parts 5-3-122

E-M-17-01-0008401 3000567 THRUST WASHER 50102E-M-17-01-0008402 3000568 PIN (SPHERIK) 50102E-M-17-01-0008403 3000569 PIN (DIAMOND SHAPE) 50102E-M-17-01-0008404 3000578 PROTECTING PLATE 50102E-M-17-01-0008405 3001402 CYLINDER 32-80 50102E-M-17-01-0008446 3002439 VACUUM SKIRT 50102E-M-17-01-0008448 3004101 EJECTOR STRIP (SUB) 50102E-M-17-01-0008450 4310565 TENSION SPRING 50102E-M-17-01-0008455 9134253 FITTED SCREW M8X 10F9X 25 12.9 50102E-M-17-01-0008467 9156014 PLAIN WASHER M4 ST G.V 50102E-M-17-01-0008468 9156015 PLAIN WASHER M5 ST G.V 50102E-M-17-01-0008469 9156017 PLAIN WASHER M6 ST G.V 50102E-M-17-01-0008470 9156019 PLAIN WASHER M8 ST G.V 50102E-M-17-01-0008471 9156020 PLAIN WASHER M10 ST G.V 50102E-M-17-01-0008472 9171805 DOWELPIN 2H 6X14 50102E-M-17-01-0008473 9172305 DOWELPIN 6H 6X16 50102E-M-17-01-0008474 9174103 DOWELPIN INSIDE THREAD 8H6X28 50102E-M-17-01-0008475 9175310 CLAMP BUSH 2X20 50102E-M-17-01-0008487 9181010 COMPRESSION SPRING 50102E-M-17-01-0008489 9184608 TENSION SPRING 50102E-M-17-01-0008490 9187003 SPRINGCLIP FOR SHAFT 6X0.7 50102E-M-17-01-0008495 9187013 SPRINGCLIP FOR SHAFT 22X1.2 50102E-M-17-01-0008498 9187216 SPRINGCLIP FOR BORES 26X1.2 50102E-M-17-01-0008500 9193750 QUICK FASTENING 07-10-501-72 50102E-M-17-01-0008501 9210127 GROOVE BALL BEARING 61804ZZ CL 50102E-M-17-01-0008504 9210229 GROOVE BALL BEARING 608-2Z 50102E-M-17-01-0008505 9210242 GROOVE BALL BEARING 6000-2Z CL 50102E-M-17-01-0008512 9210288 GROOVE BALL BEARING 63000-2RSI 50102E-M-17-01-0008514 9210378 GROOVE BALL BEARING W638/5ZZ 50102E-M-17-01-0008515 9213174 ANGULARCONTACT BEARING 3806-2R 50102E-M-17-01-0008516 9220105 BEARING BUSH 5X 7X5-0505 DU 50102E-M-17-01-0008517 9220106 BEARING BUSH 5X 7X8 0508 DU 50102E-M-17-01-0008518 9220109 BEARING BUSH 6X 8X10 0610 DU 50102E-M-17-01-0008519 9220111 BEARING BUSH 8X10X 8 0808 DU 50102E-M-17-01-0008520 9220117 BEARING BUSH 10X12X12 1012DU 50102E-M-17-01-0008521 9220129 BEARING BUSH 16X18X12 1612DU 50102E-M-17-01-0008522 9220201 COLLAR BEARING BUSH 6 8 12X8 50102E-M-17-01-0008523 9220203 COLLAR BEARING BUSH 6 8 12X4 50102E-M-17-01-0008524 9220204 COLLAR BEARING BUSH 8 10 15X7. 50102E-M-17-01-0008525 9220218 COLLAR BEARING BUSH 12 14 20 50102E-M-17-01-0008526 9220506 FACED WASHER 20X36X1.5 WC-18 50102E-M-17-01-0008527 9222401 SELFLUB.BEARING PA1-10.10 50102E-M-17-01-0008528 9222454 SELFLUB.BEARING PA1-12.10 50102E-M-17-01-0008529 9222720 BEARING BUSH PAP 2015P20 50102E-M-17-01-0008530 9222738 BEARING BUSH PAP 4030 P20 50102E-M-17-01-0008531 9235103 BALL BEARING BUSH 0671-220-40 50102E-M-17-01-0008532 9235305 BALL BEARING BUSH 0672-112-40 50102E-M-17-01-0008533 9235312 BALL BEARING BUSH ST.0600-308- 50102E-M-17-01-0008534 9235322 BALL BEARING BUSH ST.0602-308- 50102E-M-17-01-0008535 9301409 SEAL RING LINEAR BEARING 50102E-M-17-01-0008536 9312432 GEARBELT 10T2.5/950 50102

Page 22: 300MM Spare Parts 5-3-122

E-M-17-01-0008537 9312505 GEARBELT 6T5/165 50102E-M-17-01-0008538 9312506 GEARBELT 6T5/420 50102E-M-17-01-0008539 9312508 GEARBELT 6T5/330 50102E-M-17-01-0008540 9312533 GEARBELT 16T5/550 50102E-M-17-01-0008541 9312540 GEARBELT 10T5/575 50102E-M-17-01-0008542 9312543 GEARBELT 10T5/940 50102E-M-17-01-0008544 9312547 GEARBELT 16T5/720 50102E-M-17-01-0008545 9312557 GEARBELT 16T5/815 50102E-M-17-01-0008546 9312560 GEARBELT 16T5/1315 50102E-M-17-01-0008547 9312564 GEARBELT 10T5/295 50102E-M-17-01-0008548 9312567 GEARBELT 10T5/330 50102E-M-17-01-0008549 9312569 GEARBELT 16T5/355 50102E-M-17-01-0008550 9312571 GEARBELT 10T5/400 50102E-M-17-01-0008551 9312592 GEARBELT 16T5/1380 50102E-M-17-01-0008552 9312650 GEARBELT 32T10/M3700/FINITY 14516E-M-17-01-0008553 9312739 GEARBELT 25AT5/390 50102E-M-17-01-0008554 9312748 GEARBELT 43AT5/825 50102E-M-17-01-0008555 9312819 GEARBELT DOUBLE 10T5/590-DL 50102E-M-17-01-0008556 9312928 GEARBELT 8M-640-21 50102E-M-17-01-0008557 9313105 GEARBELT 10T5 1500-M FINITE 50102E-M-17-01-0008558 9313580 DAMPER E10X10 M4 50102E-M-17-01-0008566 9406711 KNEE CONNECTOR LCK-M5-PK3 50102E-M-17-01-0008567 9406715 KNEE CONNECTOR LCK-1/8-PK3 50102E-M-17-01-0008568 9406718 KNEE CONNECTOR LCK-1/4-PK4 50102E-M-17-01-0008569 9406719 KNEE CONNECTOR LCK-1/4-PK6 50102E-M-17-01-0008573 9413607 PRESS.SWITCH 25-22025-220MM 50102E-M-17-01-0008575 9419501 ANGULAR GRIPPER GZ25-35 50102E-M-17-01-0008576 9421711 SINGLE ACT.CAL AVL-20-10-S6 50102E-M-17-01-0008577 9424933 DOUBLE ACT.CALINDER DSN 50102E-M-17-01-0008578 9425398 DOUBLE ACT.CYLINDER DSNU-16 50102E-M-17-01-0008580 9425734 DOUBLE ACT.CYLINDER DSN 20-50 50102E-M-17-01-0008581 9425907 DOUBLE ACT.CYLINDER DSN 25-50 50102E-M-17-01-0008582 9426421 DOUBLE ACT.CYLINDER ADV-32-25 50102E-M-17-01-0008583 9428631 ROTATION CYLINDER DSR 16-180 50102E-M-17-01-0008584 9440228 ROTATION CYLINDER CRB 1BW20- 50102E-M-17-01-0008585 9440230 ROTATION CYLINDER CRB1-BW-30 50102E-M-17-01-0008587 4552051 QUICKSTOP 078-040/24VDC 50102E-M-17-01-0008588 4552058 TEMP.CARD TMP-3/KP 0135 50102E-M-17-01-0008589 4552061 INTERFACE PRINT 081-35/ARA/18 50102E-M-17-01-0008590 4552062 INTERFACE PRINT 081-35/ARA/10 50102E-M-17-01-0008591 4552164 MOTORCARD 10955B/5KP100/3.11 50102E-M-17-01-0008592 4552200 DC-MOTORDRIVE MC403C1/EL7606 50102E-M-17-01-0008593 4552561 MOTOR 50102E-M-17-01-0008594 4552591 MOTOR 50102E-M-17-01-0008595 4552598 MOTOR 50102E-M-17-01-0008597 9627556 H.E.500W/0.375X5.25"/220VAC 50102E-M-17-01-0008598 9631240 SWITCH V-166-1C5/16A/250 50102E-M-17-01-0008599 9631069 SWITCH IFF082635/L1/K828 50102E-M-17-01-0008600 9631087 CABLE VLFS 3-010-EBL/3P/HF 180° 50102E-M-17-01-0008601 9631092 CABLE ES12-5/5MTR/H.FLEX/90 50102E-M-17-01-0008602 9631096 CABLE VLFR3-050-EBL/3P./HF90 50102

Page 23: 300MM Spare Parts 5-3-122

E-M-17-01-0008603 9631307 SWITCH XCMA1032SERDAC2131 50102E-M-17-01-0008604 9631321 SWITCH XCMA5102SERDAC2131 50102E-M-17-01-0008606 9632481 SWITCH FZAM18P1010/PNP/NO 50102E-M-17-01-0008607 9632931 SWITCH AZM160-13YAPS-1986 50102E-M-17-01-0008608 9633820 OPTO COPPLER PL. 60DC/3 50102E-M-17-01-0008720 9640207 DC MOTOR G30.0 PLG 32 50102E-M-17-01-0008721 9640211 MOTOR GR42X25 GPL42-3I 50102E-M-17-01-0008722 9640233 MOTOR G30.0 PLG32 I=36:1 50102E-M-17-01-0008723 9640234 DC-MOTOR PLG32-2 50102E-M-17-01-0008725 9640235 MOTOR G30.1 PLG32 50102E-M-17-01-0008726 9642005 MAGNET D32-13-LDL-M-24V 50102E-M-17-01-0008727 9641056 GEARBOX 100:1 50102E-M-17-01-0008739 3005331 SKIRT 50102E-M-17-01-0008740 3003720 RUBBER WHEEL 50102E-M-17-01-0008741 4011376 PT-100 6X50MM 50102E-M-17-01-0008742 9169021 POP RIVET 50102E-M-17-01-0008746 9218585 FLEXIBLE BEARING BUSH GL 6A 50102E-M-17-01-0008747 9218586 FLEXIBLE COUPLING BUSH GL 10A 50102E-M-17-01-0008748 9220801 SPHERICAL PLAIN BEARING 50102E-M-17-01-0008749 9228009 COLLAR BEARING BUSH 8X 12X 8 50102E-M-17-01-0008750 9302705 WIPER RING AS-12-22-5/8 50102E-M-17-01-0008751 9302737 BRUSH WIPER 12 RSA 8 50102E-M-17-01-0008752 9307729 O-RING 25X2 50102E-M-17-01-0008754 9308533 O-RING 28X2.5-72NBR -872 50102E-M-17-01-0008755 9310506 HARMONIC FLEX. COVER 50102E-M-17-01-0008756 9315342 EXHAUSTER HOSE SUPERFLEX 50102E-M-17-01-0008758 9404601 SEALING WASHER COPPER 50102E-M-17-01-0008759 9404604 SEALING WASHER COPPER M10 50102E-M-17-01-0008760 9411632 SILENCER VYON -1/4" BSP 50102E-M-17-01-0008763 9623020 BATTERY LITH. 0.5AA 3V 50102E-M-17-01-0008764 9631071 SWITCH LI/K828/NC8X8X40MM 50102E-M-17-01-0008765 9632493 LIGHT CONDUCTOR FUE 030A 50102E-M-17-01-0008766 3020116 THREADED END M5X60 50102E-M-17-01-0008768 9192610 KNOB M5 RVS D466 50102E-M-17-01-0008769 3040609 GRIPPER FINGER 50102E-M-17-01-0008771 3003634 LEVER (STEP3) 50102E-M-17-01-0008772 3003654 SHAFT OLD 50102E-M-17-01-0008773 9180161 COMPRESSION SPRING 50102E-M-17-01-0008774 3317555 CENTRING BLOCK OUTSIDE 50102E-M-17-01-0008775 3317562 CENTRING BLOCK INSIDE 50102E-M-17-01-0008776 3317155 CENTRING BLOCK (OUTSIDE) 50102E-M-17-01-0008777 3317162 CENTRING BLOCK (INSIDE) 50102E-M-17-01-0008793 9115501 SOCKET SCREW M 4 X 5 G.V 50102E-M-17-01-0009013 9616321 SENDER/RECEIVER E3C-S10 50102E-M-17-01-0009016 3003576 BÜRSTE 50102E-M-17-01-0009018 9210265 GROOVE BALL BEARING ULZ610X 50102E-M-17-01-0011353 3230112 GUIDE PIN 50102E-M-17-01-0011354 9220541 FACED WASHER PC-3 20/36X1.5 50102E-M-17-01-0011355 9222474 BEARING FIBERGLYDE PA1-20/23X3 50102E-M-17-01-0011356 9220219 COLLAR BEARING BUSH BB1212DU 50102E-M-17-01-0011357 3202239 THERMORESISTANCE PT-100 L=250 50102

Page 24: 300MM Spare Parts 5-3-122

E-M-17-01-0011358 9428201 SEALSET CYLINDER D=25 2813 50102E-M-17-01-0011359 9635510 SWITCH (PROX) 50102E-M-17-01-0011360 9220107 BEARING BUSH 50102E-M-17-01-0011362 9428202 SEALSET CYLINDER D=16 VITON 50102E-M-17-01-0011363 9631077 SWITCH (PROX.)10-30VDC 50102E-M-17-01-0011364 9155003 SPLIT SPIN 2X15 AISI304 50102E-M-17-01-0011365 9217840 BEARING KRV26PP 50102E-M-17-01-0011366 9115230 SOCKET SCREW M2.5X12 A2-70 50102E-M-17-01-0011374 9627631 SWITCH (BIMETAL) R28/ZO28/225 50102E-M-17-01-0011375 9633521 RELAY (SOL.ST) G3PA-210B 10A 50102E-M-17-01-0011378 9601224 FUSE (QUICK ACT.)6.3A F/5X20MM 50102E-M-17-01-0011379 9633160 RELAY CA3-16C-10/24VDC 50102E-M-17-01-0011380 9633120 RELAY CA4-9C-10/24VDC/16A/4KW 50102E-M-17-01-0011381 9633137 RELAY CS4-22Z/24VDC 50102E-M-17-01-0011539 5000188 BREAKING PLATE 25X1.8 50102E-M-17-01-0011540 9217805 CURVE ROLL 50102E-M-17-01-0011551 9217803 CURVE ROLL 50102E-M-17-01-0011555 9415441 VALVE SOL. MZH-5/2-1.5-L-LED 50102E-M-17-01-0011556 9415496 WIRE (TWIN/CON) RD/BK/1M 50102E-M-17-01-0011557 9301803 SEALING DISTRIBUTOR DI-118 50102E-M-17-01-0011558 5002210 TIMING BELT GT-10 KURZ 50102E-M-17-01-0011559 5002211 TIMING BELT GT-10 LANG 50102E-M-17-01-0011562 4928001 FMC/IO BOARD/60IO/PNP/24VDC/ 50102E-M-17-01-0011563 4928015 FMC/IO BOARD/32IO/PNP/24VDC/ 50102E-M-17-01-0011565 9631351 SWITCH (PRECISION) MY-COM-G 50102E-M-17-01-0011567 9602011 CLAMP (FOR FUSEHOLDER) 50102E-M-17-01-0011568 9631013 PROX. SWITCH IFR 05.26.35/S8 50102E-M-17-01-0011570 9631017 PROX. SWITCH IFR 05.26.35/M5X 50102E-M-17-01-0011571 9631018 PROX. SWITCH IFR 05.26.45/M5X 50102E-M-17-01-0011572 9631014 PROX. SWITCH IFR 05.26.45/S8 50102E-M-17-01-0011573 9600509 AMPLIFIER (FIBRE OP.) 50102E-M-17-01-0011574 9632457 OPTIC (FIBRE/THRU-SCAN) 50102E-M-17-01-0011575 9616323 SENDER/RECEIVER (30CM)) 50102E-M-17-01-0011576 9616324 SENDER/RECEIVER (REFLEC.) 50102E-M-17-01-0011577 9632458 OPTIC (LENS/2PCS) 50102E-M-17-01-0011582 9424626 DOUBLE ACTING CYL. DSNU-16-80 50102E-M-17-01-0011585 9632465 PHOTOCELL (FORK) PNP/M14 50102E-M-17-01-0011588 9631070 PROX. SWITCH BIM-PST-AP6X 50102E-M-17-01-0011589 9632456 OPTIC (FIBRE/RELFC.) M3 50102E-M-17-01-0011595 9642006 MAGNET (TURN) D32-ROR-M-24VDC 50102E-M-17-01-0011596 9616322 SENDER/RECEIVER (50CM) 50102E-M-17-01-0011597 9415442 VALVE SOL.JMZH-5/2-1.5-L-LED 50102E-M-17-01-0011598 5007457 TRANSPORT CORD 50102E-M-17-01-0011599 5007460 TRANSPORT CORD 50102E-M-17-01-0011603 9235144 BEARING BUSH LBCR 20-2LS 50102E-M-17-01-0011607 9616319 SENDER/RECEIVER (RELFEC.) 50102E-M-17-01-0011611 9425322 DOUBLE ACTING CYLINDER DSN-16 50102E-M-17-01-0013725 9601217 FUSE QUCI ACT. A F/5X20MM/1919 50102E-M-17-01-0013726 9601227 FUSE QUCK 10A F/5X20MM/19193 50102E-M-17-01-0013727 9601241 FUSE 4A T/5X20MM/19195 50102E-M-17-01-0013728 9601251 FUSE 2A T/5X20MM/19195 50102

Page 25: 300MM Spare Parts 5-3-122

E-M-17-01-0013729 9601270 FUSE 20AF/6.3X32MM/HBC/250V 50102E-M-17-01-0013731 9601292 FUSE 32AT/6.3X32MM/HBC/150V 50102E-M-17-01-0013732 9601211 FUSE 3.15AF 5X20MM 19193 50102E-M-17-01-0018545 9627630 SWITCH (BIMETAL/225) 2600296 50102E-M-17-01-0018546 3226112 GUIDE PIN 5 50102E-M-17-01-0018547 9617640 SHORTING BRIDGE DK-B 50102E-M-17-01-0018550 3602155 CENTRING BLOCK OUTSIDE 50102E-M-17-01-0018551 3602162 CENTRING BLOCK INSIDE 50102E-M-17-01-0019029 9237055 TRACK RAIL + LINEAR WAY 50102E-M-17-01-0019030 9411348 MANOMETER VACUUM 50102E-M-17-01-0019031 9421325 CYL. AVL-16-25-A 50102E-M-17-01-0019032 5413322 STOPPER 50102E-M-17-01-0019033 9425395 CYL. ADVL-16-25-A 50102E-M-17-01-0019034 9426733 CYL. ADV-40-40-A 50102E-M-17-01-0020546 9428116 CYL P210-20-16-385 50102E-M-17-01-0023741 9622028 10" VGA MONITOR T&F 50102E-M-17-01-0023833 4928203 MOTOR DRIVER 50115E-M-17-01-0023834 9616325 SENDER/RECEIVER 50102E-M-17-01-0023835 4928922 I/O BOARD 50102E-M-17-01-0023836 9640538 STEPPER INDEXER PRESS 50102E-M-17-01-0023839 9640507 STEP MOTOR FEEDSTATION OFFLOAD 50102E-M-17-01-0023840 4928927 ISC FOR POCKET TRAY OFFLADER 50102E-M-17-01-0023841 4928928 ISC FOR POCKET TRAY OFFLADER 50102E-M-17-01-0023842 4928931 IFF PRESS 50102E-M-17-01-0023843 4928933 PC CAN BOARD 50102E-M-17-01-0023844 9436116 VALVE VACUUM ARMS 50102E-M-17-01-0023845 9640534 CABLE KIT STEPPER INDEXER OFFL 50102E-M-17-01-0023846 3638155 CENTRING BLOCK OUTSIDE 50102E-M-17-01-0023847 3638162 CENTRING BLOCK INSIDE 50102E-M-17-01-0023849 3002812 WORM 50102E-M-17-01-0023850 9621615 CAL 9900 50102E-M-17-01-0023872 9601290 FUSE 6.3AT 6.3X32MM (TIME-LAG) 50102E-M-17-01-0023875 9601267 1 50102E-M-17-01-0023888 5415844 SHAFT 50102E-M-17-01-0023889 5417856 HOLD PIN 50102E-M-17-01-0024307 9428117 CYLINDER P210/20-16-405 50102E-M-17-01-0024308 9424624 DOUBLE ACTING CYLINDER 50102E-M-17-01-0024678 9612142 ENCPDER GRAY 50102E-M-17-01-0024680 9647525 CPU BOARD SERVICE UNIT 50102E-M-17-01-0024681 9647524 VGA BOARD SERVICE UNIT 50102E-M-17-01-0024731 3003686 STRETCHING PLATE 50102E-M-17-01-0025626 5007128 DC MOTOR GEARBOX 50102E-M-17-01-0025904 9194560 MAGNET SLNICO 4X100 50115E-M-17-01-0026050 4552127A MONITOR MOLDING new: 4552141 50102E-M-17-01-0028143 9642627 LÜFTER 50102E-M-17-01-0029369 9647590 KEYBOARD 50115E-M-17-01-0029865 3000355 CENTRE BLOCK 50102E-M-17-01-0031750 3002771 SHOCK ABSORBER 50102E-M-17-01-0032003 9616346 FIBER CABLE (E32-T22 Omron) 50102E-M-17-01-0032329 9237044 LINEAR BEARING 50102E-M-17-01-0032330 5215469 BALL BEARING LINEAR 50102

Page 26: 300MM Spare Parts 5-3-122

E-M-17-01-0032331 5415808 WHEEL 50102E-M-17-01-0033112 3003829 LINEAR FEEDER 50102E-M-17-01-0033297 9312408 GEARBELT 4T 2,5/145 50102E-M-17-01-0033299 9705515 GREASE LGEP2 50102E-M-17-01-0033833 3002469 BEARING PUSH 50102E-M-17-01-0034607 9314428 SHOCK ABSORBER 50102E-M-17-01-0035340 3000177 VALVE ASSEMBLEY 2 50102E-M-17-01-0035472 3805216B MOTORCABLE (MT806/807) 50102E-M-17-01-0035473 9836703 HEAT PROTECTION GLOVE 50102E-M-17-01-0035474 3020114 SHORTENED ALLEN KEYS (SET) 50102E-M-17-01-0035475 9630416R SERVO DRIVE (F) repaired 50102E-M-17-01-0035477 3000643 DC-MOTOR+GEARBOX 50102E-M-17-01-0035478 4552144 OUTPUTCARD 50102E-M-17-01-0035480 1889000303 SPRING 50102E-M-17-01-0035974 4552164R MOTORCARD (REPARIERT) 50102E-M-17-01-0037388 9179062 SUSPENSION SPRING 50102E-M-17-01-0038720 9315544 EXHAUSTER HOSE GM90 NILF.1000W (METALL) 50102E-M-17-01-0040654 5007424 TRANSPORT CORD 50102E-M-17-01-0042675 5010550 MOTOR WITH GEARBOX 50102E-M-17-01-0050763 5000254 GEARBELT PULLEY 30 T5/40 50102E-M-17-01-0051693 9255310 MINICLAMP BUSH ETP-2028-27 50102E-M-17-01-0053373 9640248 DC MOTOR G30.0/PLG32 50102E-M-17-01-0053436 9252420 CLAMP HUB A045 C101 D06 5/25 MM 50102E-M-17-01-0053437 9252306 TORQUE DISC A0459990099 25MM 50102E-M-17-01-0053438 9252427 CLAMP HUB A045C 101 D 10 10 + 25 mm 50102E-M-17-01-0057022 9414092 SUCTION CUP SEP.TOOL 50102E-M-17-01-0059489 3002584 CENTERNOCK 50102E-M-17-01-0060434 30850 OBERFLÄCHENFÜHLER 125K neu: 139KP 10117E-M-17-01-0060435 1889000197 LOCATION BLOCK 50102E-M-17-01-0060436 1889000119 CENTRE BLOCK 50102E-M-17-01-0062320 3000373 GEARBELT PULLEY 50102E-M-17-01-0062703 9631392 SWITCH 50102E-M-17-01-0065202 3725155 CENTERING BLOCK OUTSIDE 50102E-M-17-01-0065203 3047614 GRIPPER FINGER 50102E-M-17-01-0065204 3686634 LEVER 50102E-M-17-01-0065205 3117654 SHAFT NEW 50102E-M-17-01-0065206 3687609 GRIPPER FINGER 50102E-M-17-01-0067830 9632924 KEY (F.SW+LOCK+1MM)AZM160B1-S 50102E-M-17-01-0072429 3001185 PULLEY Z=12 T=5 50102E-M-17-01-0074523 3002603 GUIDE PELLET DOWN LOAD 50102E-M-17-01-0075533 31740609 GRIPPER FINGER BOC 50102E-M-17-01-0075534 31740614 GRIPPER FINGER (STEP3) 50102E-M-17-01-0075535 3319628 CENTRING PIN 50102E-M-17-01-0075536 3632627 SHAFT 50102E-M-17-01-0075537 31062155 CENTRING BLOCK OUTSIDE 50102E-M-17-01-0075538 31740162 CENTRING BLOCK INSIDE 50102E-M-17-01-0075539 9310412 SEALING SPONS PROFILE 4X4MM 1,4m=Einheit 50102E-M-17-01-0075540 9220432 COLLAR BEARING BUSH/FMB 1612DU 50102E-M-17-01-0075541 9217731 CAM ROLLER/NATR 5 PP 50102E-M-17-01-0075542 9222433 LIN.SLIDE BEARING/PAB3068 PPAS 50102E-M-17-01-0075543 9222430 LIN.SLIDE BEARING/PAB1636 PPAS 50102

Page 27: 300MM Spare Parts 5-3-122

E-M-17-01-0075544 3319317 BEARING 50102E-M-17-01-0075545 9640228-R MOTOR TURN OVER (DC+RED) RS220K+GPL-52 50102E-M-17-01-0075546 4552206 DC-MOT.DR./15A/PNP/110-60/EURO 50102E-M-17-01-0075547 9217830 CAM ROLLER/lr 605 NPPU 50102E-M-17-01-0075548 9302734 BRUSH SEALING 12RSA8 50102E-M-17-01-0075549 9635511 IFRM 05P1501/S35L/NO/PNP 50102E-M-17-01-0075550 9635518 SWITCH(PROX)IFFM08P3501/01S35L/NC 50102E-M-17-01-0076276 3012241 CORD 3X 429 50102E-M-17-01-0076277 3012242 CORD 3X 775 50102E-M-17-01-0076280 9187205 SPRINGCLIP FOR BORES D13X1 50102E-M-17-01-0076282 9187265 SPRINGCLIP FOR BORES D68X1,5 50102E-M-17-01-0076284 9210236 GROOVE BALL BEARING 6002-2Z 50102E-M-17-01-0076285 9210295 GROOVE BALL BEARING 6300-LLU 50102E-M-17-01-0076286 9210303 GROOVE BALL BEARING RV-513-X 50102E-M-17-01-0076288 9220101 BEARING BUSH D4XD5,5X6DU 0406 50102E-M-17-01-0076289 9220104 BEARING BUSH D4XD5,5X10-0410DU 50102E-M-17-01-0076290 9302309 SEAL RING G5X12X2 50102E-M-17-01-0076291 9312103 GEARBELT 10T5 1400 ENDLOS 50102E-M-17-01-0076292 9312596 GEARBELT 10T5/1075 50102E-M-17-01-0076293 9312613 GEARBELT 43AT5/900 50102E-M-17-01-0076294 9312710 GEARBELT 10AT5/1500 50102E-M-17-01-0076295 9312830 GEARBELT DOUBLE 10T5/750-DL 50102E-M-17-01-0078262 6175311 CONVEYER BELT 1795MM 50102E-M-17-01-0081154 3805501E IO CABLE (W-A4B)PICK &PLACE/ CLEANING UN 50102E-M-17-01-0082918 9616574 POWER SUPPLY 24V REPARIERT 50102E-M-17-01-0084948 3004879 CYLINDER 50102E-M-17-01-0084949 9440313 CYLINDER CQ2B12-10D 200024E-M-17-01-0086830 3500375 SHOCK ABSORBER 7MM 50102E-M-17-01-0086891 9635548 SENSOR MOLDTOOL 50102E-M-17-01-0088408 5111301 DC MOTOR WITH GEARBOX 50102E-M-35-01-0024719 8025729 1 50089E-M-35-01-0025373 8025231 STOP 13750E-M-35-01-0025374 1005615 SH SCR 3/16D 1/8L 5/16H 8-32 13750E-M-35-01-0035616 8022902 VERTICAL SLIDE 50045E-M-35-01-0040540 3024813 LINEAR BEARING 50045E-M-35-01-0051091 8024121 SLIDE NEST (NESTCLAMP) 50089E-M-35-01-0051097 1026469 ECHAIN BRACKET SERIES 2 13750E-M-35-01-0052068 1022947 Vacuum Generator 50089E-M-35-01-0052069 9023690 PWASSY. Signal Board 50089E-M-35-01-0052070 1000033 Retaining Ring 50089E-M-35-01-0052071 9024038 Elev. Limit Sensor Assy 50089E-M-35-01-0052072 2023191 Sensor, Photo/Light Dark ON 50089E-M-35-01-0052075 8024874 Loader Catch (single tooth) 50089E-M-35-01-0052076 1016889 Hall effect switch 50089E-M-35-01-0052077 1023239 Linear Bearing 50089E-M-35-01-0052078 1023240 Retaining Ring 50089E-M-35-01-0052079 2023707 Sensor 50089E-M-35-01-0052080 2023708 Amplifier 50089E-M-35-01-0052081 1024724 Timing Belt 50089E-M-35-01-0052082 1010257 Bearing 50089E-M-35-01-0052083 1024579 S3K Bearing 50089

Page 28: 300MM Spare Parts 5-3-122

E-M-35-01-0052084 2011272 Cirkular Limit Switch 50089E-M-35-01-0052085 1000019 Tubing 50089E-M-35-01-0052086 1000148 Tubing-Clear.25 OD 50089E-M-35-01-0052087 1012564 Retaining Ring 50089E-M-35-01-0052088 1013050 Fitting Coupling 50089E-M-35-01-0052089 1008447 Coupling, Shaft 50089E-M-35-01-0052090 1023157 Bearing Needle 50089E-M-35-01-0052091 3023159 Tube,Pick-up 50089E-M-35-01-0052092 8023152 SPREADER 50089E-M-35-01-0052093 1025752 Grommet 50089E-M-35-01-0052096 2022757 Sensor Reflective 50089E-M-35-01-0052097 2023187 Sensor, Photo Reflect 50089E-M-35-01-0052098 2023857 Sensor Photo 50089E-M-35-01-0052099 2024244 Switch Air Cylinder 50089E-M-35-01-0052100 1023597 Cylinder, Air Guided 50089E-M-35-01-0052101 1023661 Spring, Com 50089E-M-35-01-0052103 8023605 Retainer, Clip - LH 50089E-M-35-01-0052104 8024128 Retainer, Clip - RH 50089E-M-35-01-0052106 2024050 Indicator Light 50089E-M-35-01-0052107 2011085 OPTO 22 Module 50089E-M-35-01-0052108 2017872 Input Module Psak 50089E-M-35-01-0052109 2020690 OPTO Module 50089E-M-35-01-0052110 2020691 OPTO Module 50089E-M-35-01-0052111 1007411 Dowel Pin 50089E-M-35-01-0052112 2021367 Pac SCI Driver 50089E-M-35-01-0052113 2023023 Linear Actuator 50089E-M-35-01-0052114 2022828 Stepmotor, Rare Earth M22 50089E-M-35-01-0052116 2022781 Photoelectronic Switch 50089E-M-35-01-0052117 1024133 SPRING COM 50089E-M-35-01-0052118 1024250 ANVIL ASSEMBLY 50089E-M-35-01-0052119 1013750 COUPLING BERG 50089E-M-35-01-0052120 9026107 COLLET UNIT 50089E-M-35-01-0052121 1027119 COUPLING TRANSFER ARM 50089E-M-35-01-0052122 1027281 Coupling 50089E-M-35-01-0052123 2027322 REED SWITCH 50089E-M-35-01-0052124 1027497 SWITCH PRESSURE VACUUM SENSOR 50089E-M-35-01-0052125 8021579 PIVOT MOTOR MOUNT 50089E-M-35-01-0052126 1012165 BEARING OL .251IS.3770D.375W 50089E-M-35-01-0052128 1023601 COUPLING ACTUATOR 50089E-M-35-01-0052129 8023200 HOUSING BEARING 50089E-M-35-01-0052130 8023558 SENSOR FLAG 50089E-M-35-01-0052131 2022756 SENSOR REFLECTIVE 50089E-M-35-01-0052132 1024280 MOTOR GEAR 50089E-M-35-01-0052133 1023599 SENSOR COMTRONIC 50089E-M-35-01-0052134 2026971 PHOTOELECTRIC SENSOR 50089E-M-35-01-0052135 1027196 LENS KIT OMRON P/N E39-F1 50089E-M-35-01-0052137 8025510 SCREW HOLDDOWN 50089E-M-35-01-0052138 8025533 TOOL HOLD DOWN SCREW 50089E-M-35-01-0052139 2023186 SENSOR PHOTO REFLECT DARK ON 50089E-M-35-01-0052141 2027352 SHUTTLE FRONT/BACK SENSOR 50089E-M-35-01-0052142 2025298 AC FAN 2.4 X 2.4 X 1.2 DP 50089

Page 29: 300MM Spare Parts 5-3-122

E-M-35-01-0052143 2024060 CIRCUIT BREAKER 1 AMP 50089E-M-35-01-0052144 9026349 COLLET HOLDER 50089E-M-35-01-0052145 9024257 THETA STEPMOTOR 50089E-M-35-01-0052146 9024813 LINEAR BEARING 50089E-M-35-01-0052147 9026456 ARM ASSY 50089E-M-35-01-0052148 9025406 STEPMOTOR ASSY 50089E-M-35-01-0052151 9023116 CABLE STEP PAC SCI 50089E-M-35-01-0052152 9020014 LINEAR STEPMOTOR 50089E-M-35-01-0052153 9026256 SENSOR ASSY 50089E-M-35-01-0052154 9025732 GRIPPER LAYOUT 50089E-M-35-01-0052156 9023173 STEPMOTOR ASSY 50089E-M-35-01-0052157 9026268 SCREW POST ASSY 50089E-M-35-01-0052158 1023780 TIP PICK-UP 50089E-M-35-01-0052159 3027516 COUPLING OUTPUT TABLE 50089E-M-35-01-0052160 1025926 COLLET GUIDE (GLASS TUBE) 50089E-M-35-01-0052161 1024126 PUSHER 50089E-M-35-01-0052162 9010625 Needle Repair Kit 50089E-M-35-01-0052163 1024784 Collet Shanks 50089E-M-35-01-0052164 1023871 NEEDLE:OSMIUM TIP.014Rx1/2"(for.1024621) 50089E-M-35-01-0052165 9024824 Anvil Assembly-.120x.315 50089E-M-35-01-0052166 9024821 Needle Mt. Assy. 120x.315 50089E-M-35-01-0052167 9024822 Needle Mt. Assy. 180x.400 50089E-M-35-01-0052168 8024009 Collet holder 50089E-M-35-01-0052169 1020386 PNEUMATIC CYLINDER, WAFERLOADER Z 50089E-M-35-01-0052170 1024290 Tip, Pick-up 50089E-M-35-01-0052579 9023721 Sensor Assy 50089E-M-35-01-0052580 8027809 Guide Collet Holder 50089E-M-35-01-0055280 V 9038-ESD SAUGNAPF LEITFÄHIG 10637E-M-35-01-0075641 12E3-075 RUBBER TIP HOLDER(ESEC2007) 13750E-M-35-01-0083735 12E3-008 RUBBER TIP HOLDER 13750E-M-38-01-0072683 84652-MXK FLACHRIEMEN PTG20 PTG1810X10X2 13582E-M-38-01-0072684 99210-MXK ZAHNRIEMEN 10T5/1010 13582E-M-38-01-0072685 84653-MXK FLACHRIEMEN PTG20 1536X10X2 AU 13582E-M-38-01-0072686 92150-MXK ZAHNRIEMEN 10 T5/840 13582E-M-38-01-0072687 82386-ELK RELAIS SILBERKONTAKT RT31L024 13582E-M-38-01-0072688 83201-ELK RELAIS GOLDKONTAKT RT425024 2 13582E-M-38-01-0072689 90864-MLK ZAHNRIEMEN 10 T5/330 13582E-M-38-01-0072690 95163-MLK ZAHNRIEMEN SCHWARZ 10 T5/1100 13582E-M-38-01-0072691 95160-MLK ZAHNRIEMEN SCHWARZ 10 T5/1315 13582E-M-38-01-0072692 99261-MXK ZAHNRIEMEN 10 T5/270 13582E-M-47-01-0046583 A0000000297 SENSOR PROXIMITY E2E-X1C1(OMRON) 11328E-M-47-01-0046584 A0000000298 SENSOR PROXIMITY E2E-X1R5E2 (OMRON) 11328E-M-47-01-0046585 A0000000999 SENSOR PROXIMITY E2E-X1C2(OMRON) 11328E-M-47-01-0047026 A3354519000 PC MAIN I/O PROCESSOR BOARD 10707E-M-47-01-0047028 A0000012405 SCHMERSAL SICHERH.ZUHALTG. AZM170-02zrka 11997E-M-47-01-0047165 A0000011607 SERVO MOTOR T-,B-AXIS 10707E-M-47-01-0047268 A0000000205 PCA IMAGE CARD 11314E-M-47-01-0047269 A0000000252 VALVE 45A-AA1-DFBA-2BK 10707E-M-47-01-0047270 A0000000306 PROX. SWITCH TL-W3MC1 (OMRON) 11328E-M-47-01-0047271 A0000000315 X-AXIS SERVO MOTOR 10707E-M-47-01-0047274 A0000001013 E-AXIS SERVO MOTOR 10707

Page 30: 300MM Spare Parts 5-3-122

E-M-47-01-0047275 A0000001369 300W COMMERCIAL GRD PC POWER SUPPLY 10707E-M-47-01-0047276 A0000001965 ADAPTERKABEL Z-ENCODER 10707E-M-47-01-0047277 A0000002432 PUSHBUTTOM (EMO) 10707E-M-47-01-0047278 A0000003922 SENSOR LIMIT WSK3 10707E-M-47-01-0047279 A0000003935 POWER SUPPLY 24VDC 20A PS4 10707E-M-47-01-0047280 A0000010305 POWER SUPPLY +/-5V PS2 10707E-M-47-01-0047281 A0000010551 C-AXIS SERVO MOTOR 10707E-M-47-01-0047282 A0000010648 C-,E-,X-,Y-AXIS SERVO AMPLIFIER 10707E-M-47-01-0047283 A0000010650 R-,T-,B-AXIS SERVO AMPLIFIER 10707E-M-47-01-0047285 A0000010686 AIR PRESSURE REGULATOR (BIG) 10707E-M-47-01-0047286 A0000010705 CYL.FLAT DOUBLE ACTIN-UP&DOWN 10707E-M-47-01-0047287 A0000010707 SENSOR GUIDES (UP&DOWN) HK 10707E-M-47-01-0047288 A0000011058 POWER SUPPLY 24V 11A PS1 10707E-M-47-01-0047289 A0000011395 VALVE 45A-SA1-DFBJ-1KE 10707E-M-47-01-0047291 A0000011548 Z-AXIS SERVO AMPLIFIER 10707E-M-47-01-0047292 A0000011641 SENSOR OSMIK-003 10707E-M-47-01-0047293 A0000011771 PCA ETHERNET NETWORK ADAPTER 10707E-M-47-01-0047294 A0000012680 R-AXIS ENCODER (BEI) 10707E-M-47-01-0047295 A0000012695 LINEAR ROTARY BEARING(THETA-ASSY) 10707E-M-47-01-0047296 A0000013145 SPINDLE SPRING TOOLING 10707E-M-47-01-0047297 A0000013203 BALL BEARING THETA 10707E-M-47-01-0047299 A3011003010 V-AXIS SERVO MOTOR 10707E-M-47-01-0047300 A3012003012 Y-AXIS STEEL DRIVE BELT 10707E-M-47-01-0047301 A3069810000 Z-AXIS LEAD SCREW KIT 10707E-M-47-01-0047302 A3177525000 SENSOR PCA VACUUM 10707E-M-47-01-0047303 A3354508000 R-AXIS FAP DC MOTOR DRV 10707E-M-47-01-0047304 A3354002007 X-AXIS STEEL BELT 10707E-M-47-01-0047305 A3354013000 Y-AXIS ASSY FIELD REPL.UNIT 11314E-M-47-01-0047306 A3354063000 Y-AXIS MOTOR ASSY 11314E-M-47-01-0047307 A3354068000 Z-AXIS MOTOR ASSY 10707E-M-47-01-0047308 A3354154000 UMLENKROLLE T-,B-AXIS 10707E-M-47-01-0047309 A3354160000 SENSOR ASSY BIB (HIT DETECT) 10707E-M-47-01-0047310 A3354506000 TRAYHANDLER POWERTRACK 10707E-M-47-01-0047311 A3354516000 AXIS SERVO INTERFACECARD 10707E-M-47-01-0047312 A6161224033 MISINSERT FLAG (CSP) 10707E-M-47-01-0047313 A6161223001 ANTI ROTATE SPINDLE (CSP) 10707E-M-47-01-0047314 A6161285001 ANTI ROTATE SPINDLE (TSOP) 10707E-M-47-01-0047315 A0000013839 BELLOW 10707E-M-47-01-0047316 A6161289030 MISINSERT FLAG (TSOP) 10707E-M-47-01-0047317 A9720000464A POWER SUPPLY UUT 10707E-M-47-01-0047318 SI9520655021A FUNCTIONAL DRIVER SENSOR FDS 10707E-M-47-01-0047319 SI9720000379 TESTER CONTROLLER BOARD TCB 10707E-M-47-01-0047320 A0000000202 SHUTTLE, U-AXIS SCHLEPPKETTENHALTER ANFA 10707E-M-47-01-0047321 A0000000213 SHUTTLE,U-AXIS SCHLEPPKETTENHALTER ENDE 10707E-M-47-01-0047322 A0000010447 SENSOR HALL EFFEKT 53603-1-02 10707E-M-47-01-0047323 A0000011115 E-AXIS SCHLEPPKETTENHALTER HOCH 10707E-M-47-01-0047324 A0000011116 E-AXIS SCHLEPPKETTENHALTER NIEDRIG 10707E-M-47-01-0047327 A0000011597 E-AXIS SCHLEPPKETTEN 10707E-M-47-01-0047328 A0000011726 IGUS ENERGY CHAIN 10707E-M-47-01-0048828 A0000000214 U-AXIS FIXED CABLE CARRIER 10707E-M-47-01-0049280 A3354034000 CAMERA ASSY 11314

Page 31: 300MM Spare Parts 5-3-122

E-M-47-01-0049281 A0000010692 Sensor Omron TL-X1R5C2-GE 11314E-M-47-01-0049284 A0000012913 Sensor Amplifier FS V1 11314E-M-47-01-0049735 A8000750000 CONFIGURED HARD DRIVE 100121E-M-47-01-0049736 A0000001370 486DX2,66MHZ,128K CACHE PROC 11314E-M-47-01-0049737 A0000001362 BASIC VGA ADAPTER 11314E-M-47-01-0049838 A3517022000 THETA AXIS ASSY(MOTOR+ENCODER) 100121E-M-47-01-0050115 A3354021000 X-AXIS IDLE ASSY (UMLENKROLLE) 11314E-M-47-01-0052587 A3517301000 MONITOR ASSY 10707E-M-47-01-0052811 A0000000300 SENSOR AMPLIFIER E3X-A11 10707E-M-47-01-0052817 A3354048009 ALIGNMENT PIN PRIMARY 10707E-M-47-01-0052818 A3354048010 ALIGNMENT PIN SECONDARY 10707E-M-47-01-0052819 A3354048021 CASSETTE SPACER 10707E-M-47-01-0052820 A0000000405 AUTO PULSE MODULE POWERSUPPLY 10707E-M-47-01-0053337 A0000000017 Air Pressure Switch 10707E-M-47-01-0053338 A0000000021 Switch PSHBTN Green System Power 10707E-M-47-01-0053339 A0000000022 Pushbtn Sleeve Access 10707E-M-47-01-0053340 A0000000170 V Axis Timing Belt 10707E-M-47-01-0053341 A0000000304 Sensor Lens (E39F1) 10707E-M-47-01-0053342 A0000000314 U-Axis Servo Motor 10707E-M-47-01-0053343 A0000002226 Switch PSHBTN Green Drive Power 10707E-M-47-01-0053345 A0000002234 Led Yellow for Push Button 10707E-M-47-01-0053346 A3517065000 Theta Spindle Subassembly 10707E-M-47-01-0053347 SI9720000136 Driver Sensor Board DSB 10707E-M-47-01-0053385 E32 TC 500 5M SENSOR LICHTWELLENLEITER (OMRON) 11328E-M-47-01-0053609 A3517505001 MTX CABLE BREIT 10707E-M-47-01-0053611 A3517505003 MTX CABLE SCHMAL 10707E-M-47-01-0054938 A3517528000 SYSTEM CONTROL BOARD 10707E-M-47-01-0054939 A3354117000 V-AXIS BALL SCREW ASS. 10707E-M-47-01-0056229 A3032023011 SHOT PIN (FRONT) 10707E-M-47-01-0056230 A3032023038 SHOT PIN (REAR) 10707E-M-47-01-0058523 A0000000112 BALL PLUNGER SLEEVENEST 10707E-M-47-01-0059583 A6425162011 IHS 500 PAWL(BIB ARM TOOLING) 10707E-M-47-01-0059584 A6425163008 IHS 500 PLATE SPRING(BIBARM-TOOLING) 10707E-M-47-01-0063200 A0000016293 DRIVE PULLEY ASSEMBLY 10707E-M-47-01-0069154 A6425572000 PCA INTERFACE BOARD REV.A HSSIO 11314E-M-47-01-0069155 A6425571000 PCA INTERFACE BOARD REV.A HSSIO 11314E-M-47-01-0069864 A0000011404 POWER SUPPLY 320V 25A PS3 11314E-M-47-01-0070756 A6425561000 POWER SUPPLY PROGRAMMABLE UUT 11314E-M-47-01-0073213 FS-T1 SENSORAMPLIFIER FS-T1 NPN 11590E-M-47-01-0073215 2100.3PZ X,Y-AXIS SCHLEPPKETTENH. ANFANG BLU300 11296E-M-47-01-0073216 2100.4PZ X,Y-AXIS SCHLEPPKETTENH. ENDE BLU300 11296E-M-47-01-0073217 250.10.250 X-AXIS SCHLEPPKETTENGLIED 11296E-M-47-01-0073218 250.10.150 Y-AXIS SCHLEPPKETTENGLIED BLU300 11296E-M-47-01-0073219 050.10.1 B,T-AXIS SCHLEPPKETTENH. ANFANG BLU 300 11296E-M-47-01-0073220 050.10.2 B,T-AXIS SCHLEPPKETTENH. ENDE 11296E-M-47-01-0073221 05.10.018 B,T-AXIS SCHLEPPKETTENGLIED 11296E-M-47-01-0073222 05.16.018 U-AXIS SCHLEPPKETTENGLIED 11296E-M-47-01-0073223 05.16.028 SHUTTLE SCHLEPPKETTENGLIED 11296E-M-47-01-0073224 2050.1.PZ IHS500 X-AXIS ANF.SCHLEPPKETTENHALTER 11296E-M-47-01-0073225 2050.2.PZ IHS500 X-AXIS ENDE SCHLEPPKETTENHALTER 11296E-M-47-01-0073226 200.05.100 IHS500 X-AXIS SCHLEPPKETTENGLIED 11296

Page 32: 300MM Spare Parts 5-3-122

E-M-47-01-0075164 HSR20R1SSC1 BLOCK FÜR LINEAR BEARING X-AXIS LONG 12047E-M-47-01-0075498 A0000014789 IHS 500 X-AXIS SERVOAMPLIFIER 14335E-M-47-01-0077919 A0000014730 IHS500 Y-AXIS SERVO MOTOR 11314E-M-47-01-0077920 A3354064000 LEAD SCREW ASSY Z-AXIS 100121E-M-47-01-0077921 A9000805000 THETA AXIS SERVO MOTOR SPR KIT R-AXIS 100121E-M-47-01-0079979 A0000011536 TOUCHPAD/MOUSE SERIAL 11314E-M-47-01-0081980 A0000010706 LINEAR DRUCKLUFT ZYLINDER FO-043-3FM3V 11314E-M-47-01-0083852 A6425570000 HSSIO LOGIC BOARD/PH 11314E-M-47-01-0083853 A6425575000 HSSIO LOGIC BOARD/CE 11314E-M-47-01-0087604 EBSSE-7 EXPANSIONSVENTIL 1/2-C 5/8X7/8" ODF 5FT 15105E-M-86-01-0007534 RM-PP-8/60-30 DRUCKPUMPE 10337E-M-86-01-0007535 AD15EEE DOPPELMEMBRANPUMPE 10337E-M-86-01-0007537 IR02/220VAC STECKRELAIS 10337E-M-86-01-0007538 MSM-200 MULTIFUNKTIONSRELAIS 10337E-M-86-01-0007539 KG0001/KGE2008-FB NÄHERUNGSSCHALTER 10337E-M-86-01-0007540 3SB1001-6BD06 LEUCHTMELDER 100000E-M-86-01-0007541 3SB1000-0AB20 DRUCKTASTER 10337E-M-86-01-0007542 3SB1000-0AF20 DRUCKTASTER 10337E-M-86-01-0007543 3SB1000-0AG20 DRUCKTASTER 10337E-M-86-01-0007544 3SB1000-2AB20 KNEBELTASTER 10337E-M-86-01-0007545 3SB1400-2A LAMPENGASSUNG 10337E-M-86-01-0007546 3SB1400-OB SCHALTELEMENT 10337E-M-86-01-0007547 3SB1400-OC SCHALTELEMENT 100000E-M-86-01-0007549 3VU1300-1MD00 MOTORSCHUTZSCHALTER 10337E-M-86-01-0007550 3VU1300-1MG00 MOTORSCHUTZSCHALTER 10337E-M-86-01-0007552 7PU5720-0AN20 ELEKTRONISCHES WISCHRELAIS 10337E-M-86-01-0007555 GO63-10/DO44-141 MOTOR 10337E-M-86-01-0007560 NR-140-DC9 NIVEAUWÄCHTER 36V-G3/4A-C1 10337E-M-86-01-0007562 KG5002/KGE3008-BP NÄHERUNGSSCHALTER 10337E-M-86-01-0007563 AZ16ZVR SICHERHEITSTÜRSCHALTER 10337E-M-86-01-0007565 3SB1001-6BC06 LEUCHTMELDER 100000E-M-86-01-0007569 6SE3111-5BA40 FREQUENZUMRICHTER MICRO-MASTER 10337E-M-86-01-0007571 D3R1S POTENTIOMETERANTRIEB 4.7K-OHM 10337E-M-86-01-0008348 3TH4244-6BB4 SCHÜTZ 10337E-M-86-01-0008350 MTSU47/PG-F SCHWIMMERSCHALTER 10337E-M-86-01-0025496 40T10/30-2 ZAHNSCHEIBE HEGA 20H7 DELRIN 10337E-M-86-01-0025497 31T10/30-2 ZAHNSCHEIBE HEGA 95087-7-17 10337E-M-86-01-0025498 31T10/30-217H7 ZAHNSCHEIBE HEGA 17H7 DELRIN 10337E-M-86-01-0027152 31T10/30-2 ZAHNSCHEIBE HEGA 17H7 10337E-M-87-01-0011412 15754-7/14 NÄHERUNGSSCHALTER 10305E-M-87-01-0011413 15754-9/19 NÄHERUNGSSCHALTER 10305E-M-87-01-0011414 15754-9/17 MAGNETVENTIL 10305E-M-87-01-0011415 15754-4/10 TEMP. FÜHLER 10305E-M-87-01-0011418 MCRDM2-1-4 TEMP. ANZEIGE 10305E-M-87-01-0011419 15754-2/19 SICHERHEITSSCHALTER 10305E-M-87-01-0011420 F.SM1/SM2 NETZTEIL 10305E-M-87-01-0011421 15757/X SCHRITTMACHERKARTE FÜR X-ACHSE 10305E-M-87-01-0011422 15757/Z SCHRITTMACHERKARTE FÜR Z-ACHSE 10305E-M-87-01-0011424 15754-7/10X MOTOR X-ACHSE 10305E-M-87-01-0011426 15754-6/1K KABEL FÜR LÖTBAD 10305E-M-87-01-0028913 15778-T9 SCHNEIDSTEMPEL 10305

Page 33: 300MM Spare Parts 5-3-122

E-M-87-01-0028914 15778-T8 SCHNEIDPLATTE 10305E-M-87-02-0019046 ZMP52/90MINI SERVO DRIVE CARDS 10305E-M-87-02-0019047 15784-1T24 PROX. SWITCH (MAGAZINLIFT) BES 10305E-M-87-02-0019049 15784-3T3/1 AMPLIFIER FOR LIGHT BARRIERS 10305E-M-87-02-0019050 15784-3T3/2 FIBEROPTIC 10305E-M-87-02-0019051 15784-3T17 MOTOR FOR INDEXER 10305E-M-87-02-0019052 15784-3T24 FRICTIONS WHEELS 10305E-M-87-02-0019053 15784-10T3 SOLENOIDS 10305E-M-87-02-0019054 15784-11T24 WORMSHAFT FOR MAGAZINLIFT 10305E-M-87-02-0019055 15784-11T25 MOTOR FOR MAGAZINLIFT 10305E-M-87-02-0019057 S004T9 MOTOR FOR POSIT. AXIS 10305E-M-87-02-0019058 S004T12 INCREMENT COUNTER 10305E-M-87-02-0019059 S004T6 WORMSHAFT FOR POSIT. AXIS 10305E-M-87-02-0019060 S004T24/25/26 SET LINEAR GUIDE FOR AXIS 10305E-M-87-02-0019062 BEARINGS SET BALL BEARINGS 10305E-M-93-01-0023365 32090 THERMOCOUPLE TYP SG-K 10392E-M-95-01-0081158 107058 BELT TIMING 6T2,5/230 10858E-M-95-01-0081159 107193 SCREEN CLAMP NEOPRINE SPINDLE 12410E-M-95-01-0081160 119666 BELT TIMING 6T5/1355 VZ271 12410E-M-95-01-0081161 122022 TRANSPORT BELT 265,3MM SINGLE 12410E-M-95-01-0081162 134574 SWITCH MOMENTARY(UL SEE TEXT3) 12410E-M-95-01-0081163 134575 LENS, SWITCH WHITE (UL SEE T3) 12410E-M-95-01-0081164 137516 FOIL/SHIM 520MM QF B/CLAMP 12410E-M-95-01-0081165 145099 RISING TABLE BELT 12410E-M-95-01-0081166 145510 BELT TIMING"Y" MOTOR 12410E-M-95-01-0081167 145513 BELT TIMING"Y" TRANSFER 12410E-M-95-01-0081168 145515 BELT TIMING"Y" AXIS 12410E-M-95-01-0081169 145518 X-AXIS TIMING BELT 12410E-M-95-01-0081170 155974 FUSE PLUG UL SEE TEXT 3 12410E-M-95-01-0081171 156039 TIMING BELT CARRIAGE 12410E-M-95-01-0081172 160122 LENS SWITCH BLUE 12410E-M-95-01-0081173 160190 FUSE 20X5 1A UL APPD 12410E-M-95-01-0081174 160237 FUSE 20X5 10A ANTI-SURGE UL AP 12410E-M-95-01-0081175 160241 WHITE LED BULB MIDGET GROOVE 12410E-M-95-01-0081176 160512 SWITCH ASSEMBLY SILVER CONTACT 12410E-M-95-01-0081177 G1217 BELT TIMING 6T5/270 10858E-M-95-01-0081178 112246 PHOTO SENSOR SUNX 12410E-M-95-01-0081179 109239 PHOTO SENSOR SUNX 12410E-M-95-01-0081180 143544 PNOZ X2 SAFETY RELAY 12410E-M-95-01-0081181 153073 DEK TORQUE AMP ASSEMBLY BOM 12410E-M-95-01-0081182 155510 DUAL STEPPER DRIVE CARD ASSY 12410E-M-95-01-0081183 155518 STEPPER MUX SUPP MONITOR PCB A 12410E-M-95-01-0081184 160077 MULTIMOVE CAN I/O CARD 12410E-M-95-01-0081185 160330 2 HANDED SAFETY RELAY 12410E-M-95-01-0081187 160704 CAMERA X SERVO MOTOR 12410E-M-95-01-0081188 160706 CAMERA Y SERVO MOTOR 12410E-M-95-01-0081189 160708 RISING TABLE SERVO MOTOR 12410E-M-95-01-0081191 160998 DRIVE FLOPPY DISK PC ADV6180 12410E-M-95-01-0081192 160999 DRIVE HARD DISK IDE PC ADV6180 12410E-M-95-01-0081193 181009 SINGLE BOARD COMPUTER ADVANTEC 12410E-M-95-01-0081194 181014 BOM PCB ASSY VISIONADAPTOR CAR 12410

Page 34: 300MM Spare Parts 5-3-122

E-M-95-01-0081195 181033 PSU 250W PC ADV6180 12410E-M-95-01-0081922 181161 LIQUID LEVEL SENSOR 12410E-M-95-01-0085887 119993 RING 12410E-M-97-01-0045080 350-0002 PNEUMATIC CONTROLLER 12083E-M-97-01-0045081 220-0045 INKER BASE TSK APM 90 12083E-M-97-01-0045082 120-0625 ARM-SHUTTLE MTNG TSK APM 90 12083E-M-A1-01-0063229 090522 ET/LÜFTER FÜR RB 6D - 6224NU IP54 Papst 15505E-M-A1-01-0064071 090750ET1006 REED-SCHALTER KSR VS 8X40-3 12322E-M-A1-01-0064072 090750ET1045 SCHALTER RTL_BL LEUCHTDRUCKTASTER BLAU 12322E-M-A3-01-0063429 MODBN043 DRESSER BOARD WA800NB50 LDBN-910043-00 10087E-M-A3-01-0074643 15004002 BELT,TIMING 5MMP X 254G X 15MM 16856E-M-A3-01-0074645 16006032 BEARING,LINEAR GUIDE (MOD) 12047E-M-A3-01-0074653 18004002 COUPLER,DISC 16856E-M-A3-01-0074654 18004015 COUPLER,DISC 16856E-M-A3-01-0074655 18004016 COUPLER,DISC 8MM BORE 16856E-M-A3-01-0074656 18004043 COUPLER,BELLOWS .375/.50BORE 16856E-M-A3-01-0074657 18009005 CHAIN,ROLLER,60T,3.75P 16856E-M-A3-01-0074658 47013002 MOTOR,SERVO 200W 16856E-M-A3-01-0074659 47013006 MOTOR,AC SERVO,200W 16856E-M-A3-01-0074660 67010012 PHOTO SENSOR 11328E-M-A3-01-0074661 67010028 SENSOR,PHOTO 11328E-M-A3-01-0074662 67010042 SENSOR,PHOTOELECTRIC 11590E-M-A3-01-0074664 67030003 CONNECTOR,3M 11328E-M-A3-01-0074665 67030005 CONNECTOR,SENSOR 11328E-M-A3-01-0074666 67040001 SENSOR,PROXIMITY 11328E-M-A3-01-0074670 ES-X38 AMPLIFIER 11590E-M-A3-01-0077443 SH22 LICHTTASTER, 50MM, KABEL 3M 12358E-M-A3-01-0077477 MOHLXA81--DZ ROLL SHEET 10087E-M-A3-01-0077478 MOHLXB25-Z BUSH 10087E-M-A3-01-0079625 MSTUF6X4.OLJ JUNRON TUBE UF6X4.0 UNIT:M BLUE JUNRON 10087E-M-A3-01-0079626 MSFDM-6L-1/8 DM TUBE FITTING ELBOW UNION DM-6L-1/8 4X 10087E-M-A3-01-0080949 15004003 BELT,POSI-DRIVE 16856E-M-A3-01-0080950 65008001 SPOCKET,POSI-DRIVE 16856E-M-A3-01-0080951 65008009 SPOCKET,POSI-DRIVE 16856E-M-A3-01-0081458 67040006 SENSOR PROXIMIY E2F-X1R5E1 14537E-M-A3-01-0081534 MOJKZ007 CHECK VALVE 16856E-M-A3-01-0081535 MOJTP004 LED LIGHT 16856E-M-A3-01-0081536 NCBA0016 CARBON BRUSH ASSY DISCO -6361 10087E-M-A3-01-0081537 AP215005 FUSE (GLASS) 16856E-M-A3-01-0081689 50002341-A NEST PLATFORM 8X12 TOOL #14/16 HIGH WARP 16856E-M-A3-01-0081690 91141289 PIN 16856E-M-A3-01-0082081 20001006 DRIVER SERVOP. SGDA-01AS 16856E-M-A3-01-0082082 20001007 DRIVER SERVOP. SGDA-02AS 100W 16856E-M-A3-01-0082085 47010025 2-PHASE STEPP.MOTOR CSK244-ATA 16856E-M-A3-01-0082086 67020006 PS-T2 AMPLIFIER PHOTOELECTRIC 16856E-M-A3-01-0082087 67020007 PS-T1 AMPLIFIER PHOTOELECTRIC 51266E-M-A3-01-0082088 67010007 EX-13B SENSOR FRONT THRU BEAM 16856E-M-A3-01-0082090 53001026 O-RING BELT RIGHT MIDDLE 16856E-M-A3-01-0082091 53001030 O-RING BELT RIGHT REAR 16856E-M-A3-01-0082092 15004020 BELT TIMING MISUMI 16856E-M-A3-01-0082093 15004021 BELT SYNCHRONOUS MISUMI 16856

Page 35: 300MM Spare Parts 5-3-122

E-M-A3-01-0082094 53001029 O-RING BELT RIGHT FRONT 16856E-M-A3-01-0082095 15004019 BELT TIMING MISUMI 16856E-M-A3-01-0082096 18009001 CHAIN ROLLER 6.35MM PITCH CHES 16856E-M-A3-01-0082098 62001012 5470-Y-05 REGULATOR WATER PRES 16856E-M-A3-01-0082271 26004015 FLAG, SENSOR ALUM, 6061-T6 16856E-M-A3-01-0082272 GEDFD640-007 SURFACE SHEET (600) 10087E-M-A3-01-0084432 MSCO0511AN O-RING CO0511A S14 10087E-M-A3-01-0084433 MSCO0533AN O-RING CO0533AS-42 NOK 10087E-M-A3-01-0084434 MOJPH003 FITTING PML6-D 16856E-M-A3-01-0084439 17003023 CYLINDER, RODLESS 16856E-M-A3-01-0084440 67030010 STI-MICROSAFE/ CONTROLLER LIGHT CURTUIN 16856E-M-A3-01-0085389 77004010 WIPER BLADE 16856E-M-A3-01-0085473 56003106 PIN, GRIPPER NEST 16856E-M-A3-01-0086251 CELL-1000 CELL FOR RC-10000 ACD MEGCON 16856E-M-A3-01-0087913 57003215 VACUUM PAD, CONTOUR RECTZ. 7X11XH=7 16856E-M-A3-01-0087955 50003331-A (modifiedNest Platform 11.5x20 TOOL#28 HIGH WARP 16856E-M-A3-01-0087956 50003177-A (modifiedNest Platform 10x20 TOOL#24 HIGH WARPAG 16856E-M-A3-01-0087957 50002256-A (modifiedNest Platform 10x12.5 TOOL#18 HIGH WARPA 16856E-M-A3-01-0088211 66002060 SPACER 0.002" 16856E-M-A3-01-0088212 66002062 SPACER 0.002" 16856E-M-A3-01-0088213 66002063 SPACER 0.002" 16856E-M-A3-01-0088334 67040014 SENSOR, PROXIMITY BES516-3006-G-E4-C-PU- 16856E-M-A3-01-0088335 19004005 CAM FOLLOWER CF 5 FBUU 10386E-M-A3-01-0088336 57001025 PAD, VACCUUM WITH RUBBER TIP 6MM 16856E-M-A3-01-0088809 57003125 RUBBER PAD,FRAME CLAMP 16856E-M-A3-01-0088973 67020015 SENSOR (KONTROLLE LAGER FRAME) 16856E-M-A3-01-0091695 MSC00504AN O-RING CHUCK DISCO-691 16856E-M-A3-01-0091804 EJTM-917004-01 Arm Nest Pos. Sensor (Receiver) EJTM7004 10087E-M-A3-01-0092423 67010022 SENSOR PHOTO FACE SENSING EE-SPY401 16856E-M-A3-01-0092424 18040095-A CABLE,SVM 5 EXTN(ROTARY POWER) 16856E-M-A3-01-0092425 18040096 CABLE,PG 5 EXTN(ROTARY) 16856E-M-A3-01-0092426 18050001-A CABLE,TILT SENSOR(NEST ARM) 16856E-M-A3-01-0092427 18050002-A CABLE,5ST MANIFOLD (VACUUM NES 16856E-M-A5-01-0038958 60195721 SCHRITTMOTORKARTE 10569E-M-A5-01-0041793 28200135 SERVOMOTOR 0,48Nm 4,2A 6000 U/min 85V 10569E-M-A5-01-0042724 24110213 SIGNALGEBER (SMC D-90L) 10569E-M-A5-01-0043123 28280033 LICHTSCHRANKE DURCHLICHT 12358E-M-A5-01-0044810 28400014 CAN-IN/OUT-MODULE 24DI 8DO 0.5A PK 10569E-M-A5-01-0044811 28400022 CAN-BRIDGE 10569E-M-A5-01-0044812 28400013 CAN-SOCKEL (BREIT) 10569E-M-A5-01-0044813 28400011 CAN-SOCKEL (SCHMAL) 10569E-M-A5-01-0044814 60195208 PC BOARD PLATINE MULTIPLEXER 12-BIT ENC. 10569E-M-A5-01-0044826 22140416 ZUGFEDER 10569E-M-A5-01-0044829 22020233 MIKROROLLTISCH HUB=15mm 10569E-M-A5-01-0044832 28280029 Gabellichtschranke (omron EE-SX672A) 11328E-M-A5-01-0044833 28040307 KONDENSATOREN ELEKTROLYT 63V 10000µf 10569E-M-A5-01-0045389 34010071 POLARISATIONSFILTER Matsush. AKA83102 10569E-M-A5-01-0045600 OPB973N51 Gabellichtdist.conn. 0.320" (8.13mm) 10569E-M-A5-01-0045601 OPB854A1 Gabellichtsdist.conn. 0.300" (7.62mm) 10569E-M-A5-01-0045762 E3X-NM41 PHOTOELECT.SWITCH 2m 12/24VDC 10569E-M-A5-01-0046707 22140236 ZUGFEDER 10569

Page 36: 300MM Spare Parts 5-3-122

E-M-A5-01-0046711 60195199 PLATINE 14N001 10569E-M-A5-01-0046712 24060046 MAGNETVENTIL 10569E-M-A5-01-0047483 28200134 AC-SERVOMOTOR MIT BREMSE 10569E-M-A5-01-0048749 60195708 SCHRITTMOTORKARTE 10569E-M-A5-01-0066442 28200061 DC GETRIEBEMOTOR 10569E-M-A5-01-0069270 24110555 FILTEREINLAGE INSERTFILTER DREHTELLER2 10569E-M-A5-01-0072771 EX-11EA SENSOR (UZB2011) 12358E-M-A5-01-0090827 28270036 OPTOELECTRONIC COUPLER 10569E-M-A5-01-0090829 60619716 PRESSURE SPRING 10569E-M-A5-01-0090830 22020131 MICRO GUIDING RAIL 10569E-M-A5-01-0090831 60605255 CONTROL DISK 10569E-M-A5-01-0090832 60620553 SUCTION PIPE 10569E-M-A5-01-0090834 22020310 MICRO GUIDING RAIL 10569E-M-A5-01-0090835 60613415 ZAHNRAD 10569E-M-A5-01-0090839 60618418 SPINTLE NUT RETAINER 10569E-M-A5-01-0090840 28100050 NÄHRUNGSSCHALTER 10569E-M-A5-01-0090841 621349 RULER AXIE EB CENTERING STATIO 10569E-M-A5-01-0090843 24130076 NIPPLE FA TURNTABLE 1 10569E-M-A5-01-0090844 60622308 PRESSURE PIECE 10569E-M-A5-01-0090845 60620384 GUIDE WEEL 10569E-M-A5-01-0090846 24110025 SOUND ABSORBER 10569E-M-A5-01-0090847 622366 ADJUSTING SCREW 10569E-M-A5-01-0090849 60620664 PRESSURE PIN 10569E-M-A5-01-0090850 621348 RULER AXIE EB CENTERING STATIO 10569E-M-A5-01-0090851 28070017 SWITSCH MICRO AC HOLDER GALVO/ 10569E-M-A5-01-0090852 60195656 SMD CARD 70V (SCHRITTMOTOKARTE 10569E-M-A5-01-0090853 60195687 ADAPTER BOARD A 10569E-M-A5-01-0090855 28220207 RESISTANCE THERMOMETER 10569E-M-A5-01-0090859 28400002 DP/CAN-MODULBUS 10569E-M-A5-01-0090860 60623445 SMD MOTOR 10569E-M-A5-01-0090862 24110459 TRANSMITTER SIGNAL D-F9BV 10569E-M-A5-01-0090863 28280031 CONNECTOR 10569E-M-A5-01-0090864 28060362 CABLE 10569E-M-A5-01-0090865 60603202 STEPPER MOTOR WITH CONTROL DIS 10569E-M-A5-01-0090866 28200168 DC-GEAR MOTOR 10569E-M-A5-01-0090869 24010416 COMPACT SLEDGE FH SUCTION &-FO 10569E-M-A5-01-0090870 28070019 SWITCH MICRO AG EXHAUSTING UNI 10569E-M-A5-01-0090871 60619345 FIXING FOR SUCTION FA TURNTABL 10569E-M-A5-01-0090872 28280055 BARRIER LIGHT SENSOR PHOTO NAI 10569E-M-A5-01-0090873 24010465 ZYLINDER 10569E-M-A5-01-0090874 SCHLEIFRING DT GRINDDING RING TRANSMITTER 10569E-M-A5-01-0090875 28290154 SWITCH CURRENT FLOW SAFETY 10569E-M-A5-01-0090876 60401858 BRAKE WHEEL H=13MM 10569E-M-A5-01-0090877 28280012 SWITCH PHOTOELECTRIC AG EXHAUS 10569E-M-A5-01-0090878 60620349 COUPLING 10569E-M-A5-01-0090879 22020422 GUIDE BUSHING 10569E-M-A5-01-0090880 620546 CLAMP 10569E-M-A5-01-0090881 28990481 THERMO SWITCH 10569E-M-A5-01-0090886 28200115 AC-SERVOMOTOR-RESOLVER 10569E-M-A5-01-0090888 28200207 STEPPER MOTOR WITH AMPLIFIER 10569E-M-A5-01-0090890 28250371 4Q-CONTROLLER TBF60/10RM 10569

Page 37: 300MM Spare Parts 5-3-122

E-M-A5-01-0090891 28200182 MEGATORQUE MOTOR 10569E-M-A5-01-0090892 28330110 POWER PACK 10569E-M-A5-01-0090893 28070202 MAIN SWITCH 10569E-M-A5-01-0090894 28200254 LINEAR MOTOR 10569E-M-A5-01-0090895 28990235 THERMOSTAT 10569E-M-A5-01-0090896 29010256 GRAPHIC CARD 10569E-M-A5-01-0090897 28290102 SAFETY SWITCH 10569E-M-A5-01-0090898 29010310 INTERFACE CARD 10569E-M-A5-01-0090900 28160108 VARIOFACE MODUL FLKMS-D37 10569E-M-A5-01-0090901 28160104 VARIOFACE MODUL FLKMS-D15 10569E-M-A5-01-0090902 28160240 VARIOFACE MODUL FLKMS-D9 10569E-M-A5-01-0090908 28050064 TRAFO 10569E-M-A5-01-0090909 24060004 VALVE SOLENOID FH SUCTION 6-FO 10569E-M-A5-01-0090910 283400096 FIBEROPTIC CABLE 10569E-M-A5-01-0090911 601810056 BEARD MB 1004 10569E-M-A5-01-0090912 28290173 PORTITION SWITCH MINIZED 10569E-M-A5-01-0090966 28120149 MAIN CONTACTOR 10569E-M-A5-01-0090967 28290170 MOTOR SAFETY SWITCH 1-1 6A 10569E-M-A5-01-0090968 28340091 LIGHT BARRIER AMPLIFIER 10569E-M-A5-01-0090969 28400018 CAN BUS MODUL 16DI p2X8 10569E-M-A5-01-0090970 28270046 RELAIS RED 10569E-M-A5-01-0090971 28070065 SWITCH EMMERGENCY STOP 10569E-M-A5-01-0090972 28290180 CONTACTING BLOCK 3TX4 422-1A 10569E-M-A5-01-0090973 28120068 RELAIS 10569E-M-A5-01-0090974 60623671 BRAKE MOTOR DC 10569E-M-A5-01-0090975 28120154 CONTACTOR 3TF28 10-OBB4 10569E-M-A5-01-0090976 28120175 RELAIS 10569E-M-A5-01-0090977 28200174 GEAR mOTOR 34/1 30:1 10569E-M-A5-01-0090978 28070204 END SWITCH 10569E-M-A5-01-0090979 28160461 OPT COUPLER PC RACK 10569E-M-A5-01-0090980 28061575 METAL SHELL CONNECTOR 10569E-M-A5-01-0090981 22140522 TENSION SPRING 10569E-M-A5-01-0090982 28080158 VOLTAGE LIMITER TRANS-ZOR 10569E-M-A5-01-0090983 22140244 PRESSURE SPRING 10569E-M-A5-01-0090984 22010015 DEEP GROOVE BALL BEARING 624-2 10569E-M-A5-01-0090985 22140010 SPRING FE TRANSFER ARM 10569E-M-A5-01-0090986 22010008 DEEP GROOVE BALL BEARING 623 10569E-M-A5-01-0090987 22140482 SPRING PRESSURE BF Z PUSHER 10569E-M-A5-01-0090988 22140807 TENSION SPRING WITH ROLLE 10569E-M-A5-01-0090989 22140483 SPRING FA TURNTABLE 1 10569E-M-A5-01-0090990 22010037 DEEP GROOVE BALL BEARING 6000- 10569E-M-A5-01-0090991 22140174 TENSON SPRING 10569E-M-A5-01-0090992 22140411 PRESSURE SPRING 10569E-M-A5-01-0090993 22140223 PRESSURE SPRING Z-PUSHER NEW 10569E-M-A5-01-0090994 22140006 PRESSURE SPRING P&P 10569E-M-A5-01-0090995 22140347 TENSION SPRING P&P 10569E-M-A5-01-0090996 22030076 BALL CAGE TAPE TRANSFER ARM 10569E-M-A5-01-0090997 22010020 DEEP GROOVE BALL BEARING 625-Z 10569E-M-A5-01-0090998 60619331 SWIVEL PLATE LONG 10569E-M-A5-01-0090999 22140772 PRESSURE SPRING SEALING UNIT 10569E-M-A5-01-0091000 22010369 DEEP GROOVE BALL BEARING 61900 10569

Page 38: 300MM Spare Parts 5-3-122

E-M-A5-01-0091001 22140101 SPRING FE TRANSFER ARM TURNTAB 10569E-M-A5-01-0091002 22010254 DEEP GROOVE BALL BEARING 6901R 10569E-M-A5-01-0091003 60619330 SWIVEL PLATE SHORT 10569E-M-A5-01-0091004 22010417 DEEP GROOVE BALL BEARING 618/6 10569E-M-A5-01-0091005 22010033 DEEP GROOVE BALL BEARING 608ZZ 10569E-M-A5-01-0091006 60616410 RING 10569E-M-A5-01-0091007 60619329 SIDE GUIDING SHUTTLE TABLE 10569E-M-A5-01-0091008 22010487 DEEP GROOVE BALL BEARING EEB 3 10569E-M-A5-01-0091009 22010467 DEEP GROOVE BALL BEARING 10569E-M-A5-01-0091010 22010414 DEEP GROOVE BALL BEARING P&P Z 10569E-M-A5-01-0091011 22010120 SLIDE BEARING 10569E-M-A5-01-0091012 22010116 BUSHING SLIDE BEARING FD TRANF 10569E-M-A5-01-0091013 60622807 TRANSPORT PIN 10569E-M-A5-01-0091014 22010029 DEEP GROOVE BALL BEARING 10569E-M-A5-01-0091015 22140145 SPRING FE TRANSFER ARM TAPE 10569E-M-A5-01-0091016 22140580 TENSION SPRING Z-PUSHER 10569E-M-A5-01-0091017 22010118 PLALN BEARING BUSH TRANSFER AR 10569E-M-A5-01-0091018 22010114 BUSHING SLIDE BEARING FH SUTIO 10569E-M-A5-01-0091019 60620667 DISTANSCE PIPE 10569E-M-A5-01-0091020 60618459 SIDE BEARING BUSH 10569E-M-A5-01-0091021 60724647 BOLT 2 10569E-M-A5-01-0091022 6193374 STOP LIMIT 10569E-M-A5-01-0091023 22020423 GULDE BUSHING TAPE TRANSFER AR 10569E-M-A5-01-0091024 619340 ROLLER 10569E-M-A5-01-0091025 60623588 PRESSURE SPRING 10569E-M-A5-01-0091026 22140312 PRESSURE SPRING 10569E-M-A5-01-0091027 22140152 TENSION SPRING 10569E-M-A5-01-0091028 28201001 ELEKTRONIC CONTROL UNIT 10569E-M-A5-01-0091029 28200163 SERVO MOTOR 10569E-M-A5-01-0091112 28280051 LICHTSCHRANKE SUNX EX-14B UZB16025 10569E-M-A5-01-0091321 23020267 RAIL MICRO GUIDLING 10569E-M-A5-01-0091326 28120157 NEED-OVER SWITCH GEAR 10569E-M-A5-01-0091327 24080003 PE-TRANSFORMER PEN-M5 10569E-M-A5-01-0091328 28290179 MOTOR SAFETY SWITCH1.6-2.4A 10569E-M-A5-01-0091329 623026 SWITCH FLAG 10569E-M-A5-01-0091330 60620654 GULDING PIPE 10569E-M-A5-01-0091332 24080023 VACUUM SENSOR 10569E-M-A5-01-0091333 24060189 SOLENOID VALVE 10569E-M-A5-01-0091334 24060029 PRESSURE CONTROL VALVE 10569E-M-A5-01-0091335 60623010 SUCTION PIPE SEAT 10569E-M-A5-01-0091338 24060077 DIVERTER VALVE 10569E-M-A5-01-0091340 60722186 STEPPER MOTOR CARD 10569E-M-A5-01-0091341 28100083 SAFTY SWITCH 10569E-M-A5-01-0091342 60622282 HEATER BLOCK 10569E-M-A5-01-0091343 60620545 GUIDING BLOCK 10569E-M-A5-01-0091344 60620650 SWIVEL ARM 10569E-M-A5-01-0091345 22060196 O-RING 10569E-M-A5-01-0091346 22020424 GUIDE COLUMN 10569E-M-A5-01-0091347 622987 CONTROLLER DISK 10569E-M-A5-01-0091348 60621065 SLIDE COUPLING 10569E-M-A5-01-0091349 22130011 LOCKPIN 10569

Page 39: 300MM Spare Parts 5-3-122

E-M-A5-01-0091350 60622196 ECCENTRIC 10569E-M-A5-01-0091353 60401859 NUT 10569E-M-A5-01-0091354 24060193 ONE-WAY RESTRICTOR 10569E-M-A5-01-0091355 28270029 OPTOKOPPLER 10569E-M-A5-01-0091356 24110200 PLUG WITH CABLE 10569E-M-A5-01-0091357 28290164 SAFETY SWITHCH 10569E-M-A5-01-0091358 241101146 JOINT HEAD 10569E-M-A5-01-0091359 60616537 STOP LIMIT 2 10569E-M-A5-01-0091360 22040004 BELT TOOTHED 10569E-M-A5-01-0091361 60410858 BRAKE WHEEL H=16MM 10569E-M-A5-01-0091362 60619339 SIDE GUIDING 10569E-M-A5-01-0091363 28070106 MICRO SWITCH Z-AXIS SHUTTLE 10569E-M-A5-01-0091364 24110457 TRANSMITTER SIGNAL D-A93 10569E-M-A5-01-0091365 28280054 BARRIER LIGHT CA SLV HANDLING 10569E-M-A5-01-0091367 60622851 CONNECTING BLOCK- TT1 10569E-M-A5-01-0091368 60619271 INTERMIDIATE SHAFT 3 10569E-M-A5-01-0091370 60724643 THRUST PIECE Z-PUSHER NEW 10569E-M-A5-01-0091372 60616415 AXIS D=5H6 X 20.5 10569E-M-A5-01-0091373 619555 SUPPORT INSERT FC TURNTABLE 2 10569E-M-A5-01-0091374 24110103 SHOCK ABSORBER-PRESOTER 10569E-M-A5-01-0091375 620663 PRESSURE BUSHING 10569E-M-A5-01-0091377 60616433 SWIVEL BEARING 10569E-M-A5-01-0091379 28060655 DIODE FITTING PLUG 10569E-M-A5-01-0091380 24110234 SHOCK ABSORBER-P&P X-AXIS 10569E-M-A5-01-0091385 22040309 BELT TOOTHED 10569E-M-A5-01-0091387 22040418 BELT TOOTHED 10569E-M-A5-01-0091402 616398 LOOCKING BOLT 10569E-M-A5-01-0091404 618984 MINIATURE RECIRCULATING 10569E-M-A5-01-0091409 28340097 ULTRA-SMALL PINPOINT LENS 10569E-M-A5-01-0091412 621092 FLANGE FOOT 10569E-M-A5-01-0091414 60621152 JOINT HEAD 2 10569E-M-A5-01-0091421 60724645 BOLT 10569E-M-A5-01-0091423 623005 TOOTHED BELT WHEEL 10569E-M-A5-01-0091432 623700 SENSOR DISK 10569E-M-A5-01-0091434 60724646 BOLT 3 DISK 10569E-M-A5-01-0091437 621016 TOOTHED BELT WHEEL COMPLETE 10569E-M-A5-01-0091439 22060004 O-RING FA SUCTION PIPE (004) 10569E-M-A5-01-0091442 60619369 Z-PUSHER TIP / PRESSURE PIECE 10569E-M-A5-01-0091447 28120119 RELAIS GREEN 10569E-M-A5-01-0091449 24110073 SIGNAL TRANSMITTER d-J79 10569E-M-A5-01-0091459 24110485 SIGNAL TRANSMITTER D-A53 (D-A5 10569E-M-A5-01-0091462 28400004 CAN-SOCKET 10569E-M-A5-01-0091464 28290051 SAFETY SWITCH 2 (C6) 10569E-M-A5-01-0091469 28290191 SAFETY SWITCH 3 (D16) 10569E-M-A5-01-0091473 28290056 SAFETY SWITCH 4 C10) 10569E-M-A5-01-0091476 28290128 SAFETY SWITCH 5 (C2) 10569E-M-A5-01-0091480 28290134 SAFETY SWITCH 6 (C16) 10569E-M-A5-01-0091484 28290144 SAFETY SWITCH 3-POLIG 7(C10) 10569E-M-A5-01-0091493 28280080 FORKER LIGHT BARRIER UZJ840(NA 10569E-M-A5-01-0091496 28160421 CONVERTER PC RACK 10569E-M-A5-01-0091500 28070018 MICRO SWITCH 10569

Page 40: 300MM Spare Parts 5-3-122

E-M-A5-01-0091503 24110405 SENSOR FD TRANSFER ARM TAPE 10569E-M-A5-01-0091506 24110213 TRANSMITTER SIGNAL CA FD D-90L 10569E-M-A5-01-0091514 24110448 SOCKET FC TURNTABLE " 10569E-M-A5-01-0091517 60623226 TROOTHED BELT WHEEL COMPLETE 2 10569E-M-A5-01-0091548 20020159 SHOCK ABSORBER 2 10569E-M-A5-01-0091549 606221949 TOOTHED BELT DISK 10569E-M-A5-01-0091550 22040399 BELT TOOTHED 10569E-M-A5-01-0091551 22040398 BELT TOOTHED 10569E-M-A5-01-0091552 22040151 BELT TOOTHED 10569E-M-A5-01-0091553 22040425 BELT TOOTHED 10569E-M-A5-01-0091554 22040242 BELT TOOTHED 10569E-M-A5-01-0091555 22040404 BELT TOOTHED 10569E-M-A5-01-0091556 22040316 BELT TOOTHED 10569E-M-A5-01-0091561 620662 TOOTHED BELT DISK 2 10569E-M-A5-01-0091562 22040422 BELT TOOTHED 10569E-M-A5-01-0091563 22040406 BELT TOOTHED 10569E-M-A5-01-0091564 22040405 BELT TOOTHED 10569E-M-A5-01-0091565 60618954 TOOTHED BELT WHEEL Z=20 10569E-M-A5-01-0091566 22040043 BELT TOOTHED 10569E-M-A5-01-0091567 22040302 BELT TOOTHED 10569E-M-A5-01-0091568 22040056 BELT TOOTHED 10569E-M-A5-01-0091569 622983 TOOTHED BELT WHEEL 10569E-M-A5-01-0091570 60623000 TOOTHED BELT WHEE COMPLETE 10569E-M-A5-01-0091571 619209 TOOTHED BELT DISK 3 10569E-M-A5-01-0091572 60622765 TOOTHED BELT DISK 4 10569E-M-A5-01-0091575 60408015 TOOTHED BELT DISK Z=36MXL 10569E-M-A5-01-0091576 622982 BELT TOOTHED WHEEL 10569E-M-A5-01-0091577 22040036 BELT TOOTHED TRANSPORT !/TAPE 10569E-M-A5-01-0091578 620660 TOOTHED BELT DISK 5 10569E-M-A5-01-0091579 60408006 TOOTHED BELT DISK 6 10569E-M-A5-01-0091580 627320 Z-SLIDE CPL OUTPUT 10569E-M-A5-01-0091581 28290092 SAFETY SWITCH 10569E-M-A5-01-0091582 620661 TOOTH BELT DISK 10569E-M-A5-01-0091583 619207 TOOTH BELT DISK 10569E-M-A5-01-0091584 606422 FRONT WHEEL 10569E-M-A5-01-0091585 22140549 TENSION SPRING 10569E-M-A5-01-0091586 60195065 LIGHT BARRIER 10569E-M-A5-01-0091587 22060256 O-RING 10569E-M-A5-01-0091588 60623845 SUCTION HOLDER 10569E-M-A5-01-0091589 24130075 VERBINDUNGSMUFFE 10569E-M-A5-01-0091590 60408002 TOOTH BELT DISKE 10569E-M-A5-01-0091591 60408041 TOOTH BELT DISKE 10569E-M-A5-01-0091592 60616925 SUCTIONHOLTER 10569E-M-A5-01-0091593 60619350 ADAPTER (SUCTION PIPE) 10569E-M-A5-01-0091594 60622305R GEARBOX 1:62 DT2 repariert 10569E-M-A5-01-0091600 24060050 SOLENOID VALVE 10569E-M-A5-01-0091601 28130089 VOLTAGE LIMITER 10569E-M-A5-01-0091740 28320110 AXIAL FAN 10569E-M-A5-01-0091741 60620764 OPERATING CONSOLE COMPLETE 10569E-M-A5-01-0091742 28100055 SAFETY SWITCH 10569E-M-A5-01-0091743 24110183 AIR PROCESSING 10569

Page 41: 300MM Spare Parts 5-3-122

E-M-A5-01-0091745 29010191 NETWORK CARD 10569E-M-A5-01-0091746 24070003 MANOMETER 10569E-M-A5-VM-0070336 60623660 SCHWEISSSTEMPEL 32MM 10569E-M-A5-VM-0070337 22140362 ZUGFEDER SCHWEISSEINHEIT TAPE 10569E-M-A5-VM-0070972 22030077 KUGELLAGERKÄFIG SCHWEISSKOPF 10569E-M-A5-VM-0077211 TBF/LED-M BOARD SERVO ADAPTER TBF/LED-M 10569E-M-A5-VM-0077212 EL950501 I/O-INTERFACE EL950501 10569E-M-A5-VM-0077213 28380245 SNT15/2S 19"RACK F. 8TBF60/5 10569E-M-A5-VM-0077214 28250382 4Q-REGLER TBF60/5RM 10569E-M-A5-VM-0077215 EL8012L BOARD SERVO ADAPTER EL8012L 10569E-M-A5-VM-0077216 TBF/BUS-SP BACKPLANE FÜR SERVORACK 10569E-M-A5-VM-0077217 EL8028L BOARD SERVO ADAPTER EL8028L 10569E-M-A5-VM-0077218 28240380 GALIL-ADAPTER PC 10569E-M-A5-VM-0080551 28200103 MOTOR EC 040 070 45EAA200A MAXON 14052E-M-A5-VP-0077830 MOT/0,32/3,1/6000/8SERVOMOTOR 0.32NM 3.1A 6000U 10569E-M-A5-VP-0077834 TBF60/10R SERVO VERSTÄRKER TBF60/10R 10569E-M-A5-VP-0077835 TBF60/5I SERVO VERSTÄRKER TBF60/5I 10569E-M-A5-VP-0077838 TBF60/5RM SERVO VERSTÄRKER TBF60/5RM 10569E-M-A5-VP-0077839 60616552 SCHRITTMOTOR KLEIN Z-ACHSE P&P 10569E-M-A5-VP-0077840 60603302 SCHRITTMOTOR GROSS Z-ACHSE TRA 10569E-M-A5-VP-0078246 ISA-MB1004_ECB PC-ISA/MB1004/ECB-BUS 10569E-M-A5-VP-0078247 BUS-SMD BUSVERBINDER PC-SMD-RACK 10569E-M-A5-VP-0085317 22040020 ZAHNRIEMEN FÜR Z-PUSHER IPL 10569E-M-A5-VP-0086031 22020402 MINIATURFÜHRUNG F.SAUGER DT1 TRE-04 10569E-M-A5-VP-0086032 60623847 SAUGERROHR KPL. 10569E-M-A5-VP-0086033 VRT1055 MIKROROLLTISCH F.SAUGER DT1 TRE-06 12047E-M-A5-VP-0086034 Z-PUSHER-O-M SERVO-Z-PUSHER DT1 OHNE MOTOR 10569E-M-A5-VP-0086036 608Z BEARING NSK 10569E-M-A5-VP-0086043 627-2Z BEARING SKF 10569E-M-A5-VP-0087480 22990206 FEINSEIL (7x19) 10569E-M-B8-01-0020828 L4540560 MIKRO-KONTROLL-KARTE 10675E-M-B8-01-0022474 L795348 NETZGERÄT MIT BOOST FÜR POWER LINE 10675E-M-B8-01-0033110 3040380 ZÜNDBOX 10675E-M-B8-01-0033294 5238440 LAMPENKLEMMUNG 10675E-M-B8-01-0033295 751019 FLOW TUBE FÜR LASER S/N 951112 10675E-M-B8-01-0034624 4081080 YAG-KRISTALL GEKLEMMT 4X140 0,75%STAND 10675E-M-B8-01-0083346 140200013 GLEICHSTROM-STELLANTRIEB 10675E-M-B8-01-0091726 625-746044 CABLE FIBEROPTIK 5M RSM 10569E-M-B8-VP-0074378 L718709 WASSERTEMPERATURSENSOR 10675E-M-B8-VP-0074379 L719302 WASSERFILTER D-PPPB Micro Wynd II Cuno 10060E-M-B8-VP-0074380 L4460330 O-RING SATZ FÜR RSY-LASERKAMMER 10675E-M-B8-VP-0074381 L719310 DESTILLO OHNE HALTER 10675E-M-B8-VP-0074984 794763 MICRO CONTROLLER CARD RSM30D 10675E-M-B8-VP-0074985 L4081990 LASER ROD RSM30D repariert 10675E-M-B8-VP-0074986 719310 DEIONIZING CARTRIDGE 30D 10675E-M-B8-VP-0085059 101102421 SHUTTER/LEIST.MESS. FÜR D30 10675E-M-E7-01-0024762 740314-77 CENTRONICS KABELSTECKER 50-POL 50024E-M-E7-01-0024763 740292-77 CENTRONICS KABELSTECKER 36-POLE-M-E7-01-0024764 606839-77 LOW-VOLTAGE COMPUTER CABLE LIYE-M-E7-01-0024765 606863-77 LOW-VOLTAGE COMPUTER CABLE LIYE-M-E7-01-0024766 607126-77 LOW-VOLTAGE COMPUTER CABLE LIY

Page 42: 300MM Spare Parts 5-3-122

E-M-E7-01-0076903 4-03.030-G SCHWEISSDRAHT GEGLÜHT IN METER 10934E-M-E7-01-0076906 4-03.021 TEFLONBAND 47MM IN METER 10934E-M-E7-01-0087583 TKA15/50-FIM STANDARD-MANTELTHERMOELEMENT D=1MM L= 50024E-M-E8-01-0078924 DA-2400-WP100 DAGE PULLMESSDOSE 12610E-M-E8-01-0090436 1005101 DAGE 4000 MIKROSKOP SMZ800 NIKON 12610E-M-F5-01-0034318 VTDKEM ERSATZMOTOR FÜR GEBLÄSEKOMBINATION VTDK 10287E-M-F8-01-0072681 OP1031 GLASPLATE TSOP HIGHRES PED 5X40X1.2 50145E-M-F8-01-0079520 MC1308 LIGHT CONTROLLER 50145E-M-F8-01-0079522 MIRR-ICOS MIRROR SET 4 PIECES 50145E-M-F8-01-0079523 MC848 CIRCUIT BOARD LED 50145E-M-H4-01-0026341 791380 ENTLÜFTUNGSVENTIL KPL PE2 11038E-M-H4-01-0026342 740012 ERSATZTEILSET 11038E-M-H4-01-0026343 800622 VENTILEINSATZ 4.7 D8X11 11038E-M-J9-01-0074941 2-737 ROUND BELT 2-737 (E-8U) 13120E-M-J9-01-0074942 2-1163 ROUND BELT 2-1163 (E-8U) 13120E-M-J9-01-0074943 2-1222L ROUND BELT 2-1222L(E-8U) 13120E-M-J9-01-0074944 HNB-5E FLAT BELT FOR LOADER 11W 601E 13120E-M-J9-01-0074945 HNB-5E FLAT BELT FOR LOADER 11W 1415E 13120E-M-J9-01-0076526 HNB-5E FLAT BELT FOR UNLOADER 3W 867E 13120E-M-K0-01-0072847 R-88M-U40030VA-S1 MOTOR FÜR Y-CAMERA/SBM310 52027E-M-K8-01-0077606 135478 DC-GETRIEBEMOTOR 48V/A22 GB MTE 50372E-M-K8-01-0077607 128703 Führung/ LINEAR GUIDE 50372E-M-K8-01-0078243 141483 THERMOCOUPLE 0,45M NICR-NI/ROUND 4M/1,5X 50372E-M-K8-01-0078244 101990 VAKUUMFILTER DRYDEN FHT4 50372E-M-K8-01-0083729 110099 SICHERUNGSRING AS5 50372E-M-K8-01-0083731 100896 KUGELLAGER 5/16X5 50372E-M-K8-01-0083732 102592 NUTMUTTER M X 0,5 50372E-M-K8-01-0083733 100137 BALGBEFESTIGUNG 50382E-M-K8-01-0083734 100081 GEWINDEROLLENSPINDEL 21G6 50372E-M-K8-01-0092639 140054 DIGITALE KAMERA MATRIX PRE BOND 50372E-M-K8-01-0092640 139017 COAXIAL ILUMINATION DIFFUSED WHITE 50372E-M-K8-01-0092641 140332 ILUM-LED-ND,CC 880NM 50372E-M-K8-01-0092642 145609 ILLUMINATOR NON DIFF.LED INFRAEED 50372E-M-L5-01-0054971 300-3M-9 BELT 50100E-M-L5-01-0054975 20W-307L CONVERY BELT 50100E-M-L5-01-0054976 PDAS 16-50-7-Y CYLINDER 13120E-M-L5-01-0054977 701011-000162 GENERAL CYLINDER 50100E-M-L5-01-0054978 FJ06 DU BEARING 50100E-M-L5-01-0054979 FT-K2 FIBER SENSOR FT-K2 neu:HPF-T004 13120E-M-L5-01-0054983 EC6-PT1/8 FITTING 50100E-M-L5-01-0054985 EL4-PT1/8 FITTING 50100E-M-L5-01-0054987 EL6-M5 FITTING 50100E-M-L5-01-0054988 ESU-4 FITTING 50100E-M-L5-01-0054989 EUC-4 FITTING 50100E-M-L5-01-0054992 JSC4-01A FITTING 50100E-M-L5-01-0054994 JSC6-01A FITTING 50100E-M-L5-01-0054995 LC-0425-M3 FITTING 50100E-M-L5-01-0054996 LH-0425-M5 FITTING 50100E-M-L5-01-0054997 LP-M5 FITTING 50100E-M-L5-01-0054998 PC6-01M FITTING 50100E-M-L5-01-0055000 PC6-M5M FITTING 50100

Page 43: 300MM Spare Parts 5-3-122

E-M-L5-01-0055001 PY4M FITTING 50100E-M-L5-01-0055002 SL6-M5 SILENCER 50100E-M-L5-01-0055003 FBL-35D-356L, THK SLIDE PACK 50100E-M-L5-01-0055005 AS1201F-M5-04 SPEED CONTROLLER 13120E-M-L5-01-0055009 HTD 159-3M (W=6) TIMING BELT 50100E-M-L5-01-0055010 HTD 255-3M (W=9) TIMING BELT 50100E-M-L5-01-0055011 HTD 300-3M (W=12) TIMING BELT 50100E-M-L5-01-0055012 602012-000105 TIMING BELT 50100E-M-L5-01-0055014 S318 (W=12) TIMING BELT 50100E-M-L5-01-0055017 CH3-0933102-00 MR7300 SPARE PART HEATER ASSY 50100E-M-L5-01-0055018 CH3-0933201-00 HEATER ASSY SPARE PART MR7300 50100E-M-L5-01-0055019 A1238E24B1-HP DC 24 V HEATER ASSY FAN 50100E-M-L5-01-0055022 CH3-0922009-01 SPRING 50100E-M-L5-01-0055023 CH3-092310L-01 SPRING 50100E-M-L5-01-0055024 CH3-0927008-01 SPRING 50100E-M-L5-01-0055025 CH3-0923507-00 RAIL 50100E-M-L5-01-0055026 MH3-0413049-0E URETHANE BLOCK 50100E-M-L5-01-0055027 MH3-0415006-10 SPRING 50100E-M-L5-01-0055028 MH3-0631007-10 ROTATE PLATE 50100E-M-L5-01-0055029 MH3-0632002-10 PIN 50100E-M-L5-01-0055030 MH3-0641007-30 PLATE 50100E-M-L5-01-0055031 MH3-0662045-10 PLATE 50100E-M-L5-01-0055032 MH3-0662046-10 PLATE 50100E-M-L5-01-0055033 MH3-0662047-10 PLATE 50100E-M-L5-01-0055034 MH3-0662048-10 PLATE 50100E-M-L5-01-0055035 MH3-0662049-10 PLATE 50100E-M-L5-01-0055036 MH3-0662050-10 PLATE 50100E-M-L5-01-0055037 MH3-0662051-10 PLATE 50100E-M-L5-01-0055038 MH3-0662052-10 PLATE 50100E-M-L5-01-0055039 MH3-0662053-10 PLATE 50100E-M-L5-01-0055040 MH3-0663011-10 PLATE 50100E-M-L5-01-0055041 MH3-0662043-10 PLATE 50100E-M-L5-01-0055042 MH3-0662044-10 PLATE 50100E-M-L5-01-0055043 MH3-0699008-00 ROD END 50100E-M-L5-01-0055044 MH3-0699010-00 URETHANE BLOCK 50100E-M-L5-01-0055045 MH3-1510011-00 MODULE GUIDE 50100E-M-L5-01-0055046 AFC70(-54'C-+177) GREAS 50100E-M-L5-01-0055047 MG70 (THK) GREAS GUN 50100E-M-L5-01-0055049 70-300240(R.0) AC MOTOR CONTROL BOAR 50100E-M-L5-01-0055050 E3C-DS10 SENSOR 50100E-M-L5-01-0055051 EE-SPX402-W2A SENSOR 50100E-M-L5-01-0055052 EE-SPX302-W2A SENSOR 50100E-M-L5-01-0055053 EE-SPX304-W2A SENSOR 50100E-M-L5-01-0055054 EE-SPX306-W2A SENSOR 50100E-M-L5-01-0055055 EE-SPY301 SENSOR 13120E-M-L5-01-0055057 EE-SPY402 SENSOR 11328E-M-L5-01-0055059 FDH13-FM2 SENSOR 50100E-M-L5-01-0055061 PM-K53B SENSOR 50100E-M-L5-01-0055062 PM-L53B SENSOR 12358E-M-L5-01-0055063 PM2-LH10 SENSOR 50100E-M-L5-01-0055064 SH-31R SENSOR 50100

Page 44: 300MM Spare Parts 5-3-122

E-M-L5-01-0055065 SS-A5 SENSOR AMP 50100E-M-L5-01-0055066 KVME041-R CPU BOARD 27C240 MODULE RAM144 13120E-M-L5-01-0055068 70-400186 (VER.6) MOTOR BOARD(NX03)EPC1441PC8 50100E-M-L5-01-0055070 PCI-GPIB, NI GPIB CARD 50100E-M-L5-01-0055071 TFT LCD 12.1 INCH MONITOR 50100E-M-L5-01-0055080 V6U/DSP-800 MEI MOTION BOARD 50100E-M-L5-01-0055082 PCB ASSY (VER1.2) SERVO INTERFACE BOARD 50100E-M-L5-01-0055084 SGDA04AS, YASKAWASERVO MOTOR DRIVER 50100E-M-L5-01-0055088 FX-11 SENSOR AMP 50100E-M-L5-01-0055090 LWL9C2R 150-B-CS LM GUIDE 13120E-M-L5-01-0055096 LC-0320-M5 FITTING 50100E-M-L5-01-0055097 PY3M FITTING 50100E-M-L5-01-0055098 PL3-M3M FITTING 50100E-M-L5-01-0055099 JSC3-M5M SPEED CONTROLLER 50100E-M-L5-01-0055101 JSC3-M3M SPEED CONTROLLER 50100E-M-L5-01-0055538 CH3-0933205-00 HEATER ASSY MR7300 SPARE SET 50100E-M-L5-01-0055540 CH3-0933203-00 HEATER ASSY MR7300 SPARE SET 50100E-M-L5-01-0055551 99942400 FAN COVER 120X120 HEATER ASSY 50100E-M-L5-01-0061942 SPA-3200SR SERVO MOTOR AMP 200W repaired 50100E-M-L5-01-0061943 SPA-3400S SERVO MOTOR AMP 400W 13120E-M-L5-01-0061944 SPA-3800S SERVO MOTOR AMP 750W 50100E-M-L5-01-0061945 SGM-01A312 SERVO MOTOR 100W 0.87A 200V Yaskawa 50100E-M-L5-01-0061946 SGM-1A312B SERVO MOTOR 100W 0.87A 200V Yaskawa 50100E-M-L5-01-0061947 SGM-02A312 SERVO MOTOR 200W 2A 200V Yaskawa 50100E-M-L5-01-0061948 SGM-4A312B SERVO MOTOR 400W 2,6A 200V Yaskawa 50100E-M-L5-01-0061950 SGM-4A3G16B SERVO MOTOR 400W 2,6A 200V Yaskawa 13120E-M-L5-01-0061953 SGMP-01A312 SERVO MOTOR 100W 0.89A 200V Yaskawa 50100E-M-L5-01-0061954 SGMP-02A312 SERVO MOTOR 200W 2A 200V Yaskawa 50100E-M-L5-01-0061955 51K60A-D AC MOTOR 60W 0.6A 200V Oriental Motor 50100E-M-L5-01-0061957 NX02 I/O MODUL 13120E-M-L5-01-0061958 NX22-R I/O MODUL repaired 13120E-M-L5-01-0061959 501013-000028 MOTIONBOARD DOLSUE2 13120E-M-L5-01-0061960 MH5-0951000-00 SOAKCHAMBER HEATER ASSY 13120E-M-L5-01-0062011 E3C-JC4P SENSOR AMPLIFIER 50100E-M-L5-01-0062012 VRF-N FIBER SENSOR AMPLIFIER 50100E-M-L5-01-0062013 D-F9NV SENSOR (CYLINDER) 50100E-M-L5-01-0062015 NF-DH01 FIBERSENSOR(PH/DEFR. CARRIERC. 50100E-M-L5-01-0062017 ZC153A SENSOR 50100E-M-L5-01-0062019 EE-SPX305-W2A GABELLICHTSCHRANKE 50100E-M-L5-01-0062020 PM-Y44 GABELLICHTSCHRANKE 50100E-M-L5-01-0062021 MH5-1010029 RTD-SENSOR (TEMPERATURSENSOR) 50100E-M-L5-01-0062113 LWL9BCS LINEARLAGER (PICKER) 50100E-M-L5-01-0062114 MH5-1071026 INDEX SPRING 6x28 50100E-M-L5-01-0062115 MH5-1065009 EXTRACTOR SPRING 9x70 50100E-M-L5-01-0062117 60-303 CROSS FLOW FAN (BLOWER WHEEL) 13120E-M-L5-01-0062119 MH5-0632011 PLATE (CARRIERTRANSPORTSCHIENE 50100E-M-L5-01-0062120 MH5-0662049 PLATE (CARRIERTR.) 25x293x6 13120E-M-L5-01-0062121 MH5-0662051 PLATE (CARRIERTR.) 12x317x4 50100E-M-L5-01-0062122 MH5-0662050 PLATE (CARRIERTR.) 25x223x6 50100E-M-L5-01-0062123 MH5-0662048 PLATE (CARRIERTR.) 10x252x6 50100E-M-L5-01-0062124 MH5-0662056 PLATE (CARRIERTR.) 10x238x6 50100

Page 45: 300MM Spare Parts 5-3-122

E-M-L5-01-0062125 MH5-0662053 PLATE (CARRIERTR.) 10x248x6 50100E-M-L5-01-0062129 KD2406PTS1 FAN 24V DC 2,6 (60x60x25mm) 13120E-M-L5-01-0062130 400P5M15W TIMING BELT (Y-ACHSE) 50100E-M-L5-01-0062131 S5M320 TIMING BELT 50100E-M-L5-01-0062132 S3M252 TIMING BELT (Z-ACHSE) 50100E-M-L5-01-0062133 2000P5M15 BELT OPEN (CARRIER-TRANSFER) 50100E-M-L5-01-0062134 450P5M15W TIMING BELT 450L 5M 15W 50100E-M-L5-01-0062135 1010-3M-9 TIMING BELT OPEN 50100E-M-L5-01-0062305 MA2A1141-GRN EIN-TASTER 13120E-M-L5-01-0069204 SENSORFINGER FÜR P FLUG+BOLT+WASHER+SCREW 13120E-M-L5-01-0072897 6005M-A TIMING BELT ROTATOR 50100E-M-L5-01-0073214 MH5-0964001-00 PROPELLER SHAFT, PREHEATER CHAMBER 13120E-M-L5-01-0075848 HTD447-3M(W=9) TIMING BELT 50100E-M-L5-01-0076908 MH5-1920001-00 VERTEILERBLOCK FÜR 3XLN2 VENTILE 13120E-M-L5-01-0078852 3M474(W9) TIMING BELT OPTIBELT 14516E-M-L5-01-0080154 RSR9WVMUU+80LM LM GUIDE 50100E-M-L5-01-0082121 225629ZZ RILLENKUGELLAGER 50100E-M-L5-01-0083347 LMF16UU-S BALL BUSH 13120E-M-L5-01-0083348 MH5-0416002-00 GUIDE SHAFT LOADER/UNLOADER 13120E-M-L5-01-0083349 MH5-06300111 ROTATOR SHAFT 50100E-M-L5-01-0092246 ZTHK-BNF-1605-025 BALL SCREW SHAFT 50100E-M-L5-01-0092247 BF12 SUPPORT UNIT 50100E-M-L5-01-0092248 BK12 SUPPORT UNIT 50100E-M-N0-01-0072843 5290.0009-1 HEIZGEBLÄSE R2D225-AG02-25 13415E-M-N0-01-0076331 91181 DRUCKMESSDOSE TYP 91181 50MBAR 13415E-M-N0-01-0081196 5220.0031-1 RELAIS 4 WECHSLER/24VDC/5A MIT 13415E-M-N0-01-0081197 52200080 RELAISPACKAGE KOMPL. MONTIERT 13415E-M-N0-01-0081198 52200127 SOLID STATE RELAIS TYP 13415E-M-N0-01-0081199 52500150 FREQUENZUMRICHTER MITSUBISHI 13415E-M-N0-01-0081200 52500164 FREQUENZUMRICHTER MITSUBISHI 13415E-M-N0-01-0081201 51100501 MANTELTHERMOELEMENT GF7050 5M 13415E-M-N0-01-0081202 51100518 MANTELTHERMOELEMENT GF7050 8M 13415E-M-N0-01-0081203 51100525 MANTELTHERMOELEMENT 1XNICR-NI 13415E-M-N0-01-0081206 K000022001 FLANSCH HEIZUNG STIRNSEITE 13415E-M-N0-01-0081207 5290.0073.02 EC GASGEBLÄSE 24VDC/2,5A 54W 13415E-M-N0-01-0081208 52900081 LÜFTERMOTOR L9 OHNE LÜFTERRAD 13415E-M-N0-01-0081209 52900078 LÜFTERRAD 225X56R F. LÜFTERMOT 13415E-M-N0-01-0081210 V800025051 ISOLIERDISTANZ LÜFTER 13415E-M-N0-01-0081211 20000002 FLANSCH KOMPL. MONT.FÜR HANNIN 13415E-M-N0-01-0081212 23.120.497.08-D FLANSCH LÜFTER 2 13415E-M-N0-01-0081213 52700049 NÄHERUNGSSCHALTER KAPAZITIV 13415E-M-N0-01-0081214 52700116 ULTRASCHALL NÄHERUNGSSCHALTER 13415E-M-N0-01-0081215 52700021 INDUKTIVER NÄHERUNGSSCHALTER 13415E-M-N0-01-0081216 52700096 NÄHERUNGSSCHALTER INDUKTIV 24V 13415E-M-N0-01-0081217 52700026 NÄHERUNGSSCHALTER INDUKTIV 13415E-M-N0-01-0081218 52700115 WEGAUFNEHMER MIT EINSEITIGER 13415E-M-N0-01-0081219 52100038 DRUCKSCHALTER 0.1-6 BAR 13415E-M-N0-01-0081220 52000067 MOTORREGELKARTE E-MOTION 13415E-M-N0-01-0081221 52000043 MOTOR G42X25 24VDC + GETRIEBE 13415E-M-N0-01-0081222 52000070 MOTOR BÜRSTENLOS BG62X30 24VDC 13415E-M-N0-01-0081223 52000171 MOTOR G30.1/24V + PLG 32.0 I=1 13415

Page 46: 300MM Spare Parts 5-3-122

E-M-N0-01-0081225 52800002 STECKMOTOR NM24 24V 13415E-M-N0-01-0081227 44000044 KF-ZENTRIERRING VITON-EDELSTAH 13415E-M-N0-01-0081229 44000047 KF-ZENTRIERRING VITON-EDELSTAH 13415E-M-N0-01-0081230 44000048 KF-SPANNRING AL-DRUCKGUSS 13415E-M-N0-01-0081231 42050220 O-RING 45X3,5 NBR 70 DIN3771 13415E-M-N0-01-0081232 42050224 O-RING 71,44X3,53 FPM 80 SHORE 13415E-M-N0-01-0081233 42050225 O-RING 83,00X3,00MM FPM 80 13415E-M-N0-01-0081234 42050226 O-RING 258X5 FPM 80 SCHWARZ 13415E-M-N0-01-0081237 42050411 O-RING 220MM X 5MM NBR 70 13415E-M-N0-01-0082611 5200.0441 Papst Lüfter Typ 4484F 24V DC 10716E-M-N1-01-0075282 00352957S03-R PINOLE MIT KUGELRASTERUNG S25 DLM1/6 13416E-M-N1-01-0076330 00319351S03 VERTEILERSCHEIBE 13416E-M-N1-01-0078035 00310422S01 MITNEHMER FÜR BE-ABDECKUNG 13416E-M-N1-01-0081539 00335520S11 ACHSE KSP-A362 13416E-M-N1-01-0081540 00335519S11 ACHSE KSP-A362 FÜR HS50 13416E-M-N1-01-0081541 00344204-03 SERVOVERSTÄRKER TBS200/10X-02 13416E-M-N1-01-0081542 00344205-03 SERVOVERSTÄRKER TBS200/15Y-02 13416E-M-N1-01-0081543 03012564-02 SERVOVERSTÄRKER TBS/3S1 13416E-M-N1-01-0081544 03012565-01 SERVOVERSTÄRKER TDS120A3Z-01 13416E-M-N1-01-0081545 00373105-01 SERVOVERSTÄRKER TDS120/1D-02 13416E-M-N1-01-0081546 00343442-02 INKREMENTALGEBER Y-ACHSE 13416E-M-N1-01-0081547 00343441-02 INKREMENTALGEBER X-ACHSE 13416E-M-N1-01-0081548 00333167S03 X-MOTOREINHEIT 13416E-M-N1-01-0081549 00331076-02 ZAHNRIEMEN SYNCHROFLEX 50ATS5/1205 E9/11 13416E-M-N1-01-0081550 00348264-02 KOPFPLATINE KPL HS60 13416E-M-N1-01-0081551 00335892-01 ANTICRASHPLATINE 13416E-M-N1-01-0081552 00335414-02 X/Y VERTEILER HS50 13416E-M-N1-01-0081553 00329699-05 STEUERPLATINE GURTSCHNEIDER HS 13416E-M-N1-01-0081554 00332557-03 CAN-BUS-KOPPLER 13416E-M-N1-01-0081555 00329698-03 CAN-EIN/AUSGANGSMODUL 13416E-M-N1-01-0081556 00372446-01 KSP-COM352A KOMMUNIKATIONSBAUG 13416E-M-N1-01-0081557 00359582S01 SCHALLDÄMPFER ANTISTATISCH 13416E-M-N1-01-0081559 00341780S04 DREHSTATION DLM1 13416E-M-N1-01-0081560 00367768S01 VENTILSTELLANTRIEB ABWURFKREIS 13416E-M-N1-01-0081561 00368075S01 VENTILSTELLANTRIEB BESTÜCKKREI 13416E-M-N1-01-0081562 03001959S01 Z-ACHSE KPL. DLM2 13416E-M-N1-01-0081565 00347297S01 LICHTSCHRANKE Z-ACHSE OBEN 13416E-M-N1-01-0081570 00321524S05 SENSOR Z-ACHSE UNTEN 13416E-M-N1-01-0081571 00334936S01 ZAHNRIEMEN T2 DLM1 13416E-M-N1-01-0081572 00367793S01 BLASEINHEIT DLM2 13416E-M-N1-01-0081577 03001653S01 BREMSE F. STERN KPL. 13416E-M-N1-01-0081578 00355553-01 ZAHNRIEMEN SYNCHROFLEX 6 AT3/150 13416E-M-N1-01-0081579 00356841-01 ZAHNRIEMEN BRECOFLEX 12T5 2675 13416E-M-N1-01-0081580 00356850-01 ZAHNRIEMEN SYNCHROFLEX 2,5T5/1500 13416E-M-N1-01-0081581 00356851-01 ZAHNRIEMEN SYNCHROFLEX 2,5T5/990 13416E-M-N1-01-0081582 00359310-02 BANDANTRIEB 13416E-M-N1-01-0081589 00370063-01 LICHTSCHRANKE SENDER EINGABEBA 13416E-M-N1-01-0081590 00370067-01 LICHTSCHRANKE SENDER AUSGABEBA 13416E-M-N1-01-0081591 00363113-01 LICHTSCHRANKE SPURB-UMSETZPL.L 13416E-M-N1-01-0081592 00363111-01 LICHTSCHRANKE SPURA-UMSETZPL.L 13416E-M-N1-01-0081594 00363091-02 LS-EMPFÄNGERMODUL BESTÜCKBAND2 13416

Page 47: 300MM Spare Parts 5-3-122

E-M-N1-01-0081595 00364783-01 LASERLICHTSCHRANKE SENDERMODUL 13416E-M-N1-01-0081596 00368273-01 SENSOR LEITERPLATTENKENNUNG BB 13416E-M-N1-01-0081597 00362671-01 ZAHNRIEMEN Y-ACHSE S-27 HM 13416E-M-N1-01-0081598 00334180-02 ZAHNRIEMEN X-ACHSE S-23 F5HM 13416E-M-N1-01-0081599 00334153S04 MOTOR X-ACHSE S23 KPL. 13416E-M-N1-01-0081600 00334154S02 Y-MOTOR S23 13416E-M-N1-01-0081601 00349456-01 ABTASTKOPF DIGITAL X-ACHSE 13416E-M-N1-01-0081602 00349457-01 ABTASTKOPF DIGITAL Y-ACHSE 13416E-M-N1-01-0081603 00364813-01 SERVOVERSTÄRKER TBS200/15Y 13416E-M-N1-01-0081604 00354764-01 UMSETZPLATINE GROSSE ACHSE S27 13416E-M-N1-01-0081605 00354765-01 UMSETZPLATINE PORTAL S25 13416E-M-N1-01-0081606 03003134S01 SCHALLDÄMPFER F. SP HF 13416E-M-N1-01-0081607 00341011S01 Z-ACHSENANTRIEB / DLM1 13416E-M-N1-01-0081610 00368271-01 SENSOR LEITERPLATTENKLEMMUNG 13416E-M-N1-01-0081611 00356840-01 ZAHNRIEMEN BRECOFLEX 12T5/1550 13416E-M-N1-01-0081612 00355487-03 LS-EMPFÄNGERMODUL BESTÜCKBAND 13416E-M-N1-01-0081613 00355489-01 LASERLICHTSCHRANKE SENDERMODUL 13416E-M-N1-01-0081614 00370049-01 LICHTSCHRANKE SENDER AUSGABEBA 13416E-M-N1-01-0081615 00370062-01 LICHTSCHRANKE EMPFÄNGER AUSGAB 13416E-M-N1-01-0081902 00321734-02 SERVOVERSTÄRKER TDS120/1D-02 13416E-M-N1-01-0081903 00354432-02 PORTAL-KOPFVERTEILER KPL.F5-HM 13416E-M-N1-01-0081904 00356817S04 ACHSE KSP-A362 1XAC 13416E-M-N1-01-0085877 00323044S04 PIPETTENMAGAZIN 7/9XX 13416E-M-N1-MA-0065200 MANUAL SIEMENS DEMANUAL SIEMENS DEMATIC 13416E-M-N9-01-0068149 IFR04.26.35L INDUKTIVER NÄHERUNGSSCHALTER 11329E-M-N9-01-0074971 646698 ZAHNRIEMEN 15T5/260 HERMA 14516E-M-O1-01-0069307 1001106 BELT FRONT/REAR TRAY OUTPUT TRANSPORT 50796E-M-O1-01-0073725 1000895 VACUUM PAD 8MM 50796E-M-O1-01-0073726 1000898 VACUUM PAD 13MM 50796E-M-O1-01-0074324 1000342 TRAY REJECT BOARD 11073E-M-O1-01-0079526 OTRGR-004C BOARD GRANITE OTRGR 50796E-M-P9-01-0085425 196-624808 MAGNETSPULE FÜR VENTIL TYP2610 BÜRKERT 11019E-N-50-01-0041888 SL50 ALMATEC-PUMPE 10127E-N-50-01-0047137 70732-06 BARB KYNAR 10-32 X 1/16 100077E-N-53-01-0045466 0613817 SENSOR INDUKTIV 6,5MM (IFRM06P1703/S35L) 11329E-N-53-01-0048212 0613876 RELAIS SOCKEL FINDER 10257E-N-75-01-0003354 FL4-3 MUTTER PFA 1/4" 10545E-N-75-01-0017500 FC6-4FN-1 AUFSCHRAUB. GERADE 3/8" X 1/4"NPT 10545E-N-88-01-0016348 304086-001 SWITCH DOOR INTERLOCK MAGNETIC 10545E-V-01-00-0080095 YLB-006672-1 LINEAR BUSH 11073E-V-01-00-0086211 ITIS08X12-528 INSERT TFBGA60 DDR1 14636E-V-01-01-0012191 YVP-005337-1 VACUUM PAD 11073E-V-01-01-0018578 MMX-92414A-1 INSERT FASTENER 11073E-V-01-01-0019658 YVP-006533-1 VACUUM PAD 11073E-V-01-01-0019659 DCB-EE4574X01-1 ASSY THERMAL FUSE 11073E-V-01-01-0041798 MAX-E1626 INSERT Y454 ASSY 11073E-V-01-01-0042731 YBT-006620 TIMING BELT 11073E-V-01-01-0042732 YBT-007011 TIMING BELT 11073E-V-01-01-0042733 YBT-007009-1 TIMING BELT 11073E-V-01-01-0042734 YBT-007010 TIMING BELT 11073E-V-01-01-0045179 A09198 HC SOCKET TSOP 54P 11073

Page 48: 300MM Spare Parts 5-3-122

E-V-01-01-0061295 NLP-000268-1 TOWER LAMP 140V 10W E11 11073E-V-01-01-0064055 MAX-K7454A INSERT RD288 11073E-V-01-01-0067290 SBLB-019431 FAN ROTATION SENSOR 11073E-V-01-01-0068661 DC900-048-139-00 INSERT 8,2X12,2 11073E-V-01-01-0068662 MAX-H6468A INSERT 10,5X6,4 11073E-V-01-01-0068663 MAX-J3501B INSERT 11,1X10,6 11073E-V-01-01-0069854 122.00167.00 RESISTOR MCT 0603 HF 24 OHMRESISTOR MCT 11073E-V-01-01-0070177 YFN-006680-1 CROSS FLOW FAN 11073E-V-01-01-0070178 YFN-007014 CROSS FLOW FAN 11073E-V-01-01-0071079 MAX-K7614A INSERT TSOP66 Y-CON. 11073E-V-01-01-0071160 MKX-D5859D-1 FAN SHAFT EX 11073E-V-01-01-0071161 MKX-D5659D-1 FAN SHAFT TC 11073E-V-01-01-0071162 YBB-005390-1 BEARING 11073E-V-01-01-0071163 YSB-005396-1 THRUST WASHER 11073E-V-01-01-0071164 MKX-93534B-1 TC DRV BEARING SHAFT 11073E-V-01-01-0071165 MKX-93536A-1 TC BEARING COLLAR 11073E-V-01-01-0071615 YCY-006582-1 AIR CYLINDER 11073E-V-01-01-0071789 YSN-E01978 SPRING 11073E-V-01-01-0074521 DCB-MM7420X01 TEMPERATURE FUSE 11073E-V-01-01-0076737 MEE-J4566A-1 SPRING 11073E-V-01-01-0077418 81-03304 POGO PIN SOCKET BGA84 T11x16 11073E-V-01-01-0077419 81-01407 POGO PIN SOCKET BGA66 T11 ASYM 11073E-V-01-01-0080517 MAX-111236A-1 INSERT TFBGA60 DDR2 10X10,5 11073E-V-01-01-0081517 MAX-117517A INSERT 11073E-V-01-01-0081518 MAX-111238A-1 INSERT DDR2 10x12,5 11073E-V-01-01-0081519 MAX-118245A INSERT 11073E-V-01-01-0081520 MAX-L6833A INSERT 11073E-V-01-01-0081522 DSE-60TF-0211 INSERT 10374E-V-01-01-0083512 YPL-006309 TIMING PULLEY 11073E-V-01-01-0083513 YPL-006308 TIMING PULLEY 11073E-V-01-01-0084527 YAE-007788-1 EJEKTOR CYLINDER 11073E-V-01-01-0084528 DCB-SS7481X01B-1 CABLE ASSEMBLY 11073E-V-01-01-0084529 DCB-SS7469X01B-1 ROBOT CABLE 11073E-V-01-01-0085680 MKX-D5916-B-1 SHAFT TC-B 11073E-V-01-01-0086299 81-00872 POGO PIN SOCKET BGA144 RL17 10909E-V-01-01-0087768 DCB-SS9364X02 P&P KABEL 11073E-V-01-01-0087778 YVP-008680 V-HEAD DICHT PAD 11073E-V-01-01-0087779 MPX-D4884 V-HEAD O-RING 11073E-V-01-01-0087815 111535A INSERT CARRIER 10x10,5 A250053 51951E-V-01-01-0087816 111561A INSERT CARRIER 10x20 A250061 11073E-V-01-01-0087817 DAE-62VP-011 INSERT 10x18 HTT 11073E-V-01-01-0087818 MAX-100672C-1 INSERT BODY UNIVERSAL alt:MAX-100672B 11073E-V-01-01-0089274 111559A INSERT CARRIER A250059 10X12 11073E-V-01-01-0091788 111544A INSERT CARRIER 11,5X20 (DC044) 11073E-V-01-01-0092093 YAB-003314 ABSORBER 11073E-V-09-01-0029874 MOENT061 JOINT 10087E-V-11-01-0073143 4008098 SPANNSTIFT DIAMANTBESCHICHTET 13380E-V-12-01-0016138 100.0281.1 SCREW CAPILLARY 0-80X1/8IN 50024E-V-12-01-0016139 130.0165.1 CLAMP WIRE SOLENOID MAGNET 50024E-V-12-01-0016191 110.0605.1 CUP SUCTION 2MM 50024E-V-12-01-0016192 110.0606.1 CUP SUCTION 4MM 50024

Page 49: 300MM Spare Parts 5-3-122

E-V-12-01-0016193 110.0607.1 CUP SUCTION 6MM 50024E-V-12-01-0016206 140.0661.1 O-RING 50024E-V-12-01-0016208 140.9190.1 BELT K 1TN10 90 50024E-V-12-01-0017016 140.0880.1 SPRING COMPR 3.2X9X0.32 50024E-V-12-01-0017017 140.0757.1 O-RING RUBBER 2X1 50024E-V-12-01-0018392 841.271 DIE EJECTOR NEEDLES 50024E-V-12-01-0021499 866.1246 BRACKET ANGLE CENTRE 50024E-V-12-01-0024583 210.1716.1 LAMP HALOGEN 12V/50W G4 50024E-V-12-01-0025236 593451-99 HALOGENLAMP 12V 50W 35MM 14215E-V-12-01-0028214 210.1823.1 HALOGENLEUCHTE 12V/5W OSRAM 41508 50024E-V-12-01-0029099 140.9118.1 BELT TOOTHED WHEEL 6T 5/1100 50024E-V-12-01-0029100 140.9161.1 BELT TOOTHED 8T 2.5/230 50024E-V-12-01-0029101 140.9162.1 BELT TOOTHED 8T 2.5/230 50024E-V-12-01-0029102 140.4005.1 SPRING COMPR 3.2 X 16 X 0,25 50024E-V-12-01-0029103 140.9113.1 BELT TOOTHED 6T 2.5/290 50024E-V-12-01-0032322 902.406 JAW ALIGNMENT PIN 50024E-V-12-01-0032323 902.405 RUBBER PAD 50024E-V-12-01-0032324 902.395 JEWELS X 2 50024E-V-12-01-0038686 866.0954 THERMOCOUPLE CA IOWER 50024E-V-12-01-0038687 866.0956 THERMOCOUPLE CA IOWER OVERT. 50024E-V-12-01-0038688 866.0953 THERMOCOUPLE CA UPPER 50024E-V-12-01-0038689 866.0955 THERMOCOUPLE CA UPPER OVERT. 50024E-V-12-01-0038691 866.0952 THERMOCOUPLE LAM IOWER OVERT. 50024E-V-12-01-0038692 866.0946 THERMOCOUPLE LAM UPPER 50024E-V-12-01-0038693 866.0944 THERMOCOUPLE LAM UPPER OVERT. 50024E-V-12-01-0038953 910.103 ILLUM CALIBRATION SAMPLE 50024E-V-12-01-0040534 738.1000 CALIBRATION STRIP LOC 50024E-V-12-01-0040537 140.9093.1 BELT TOOTHED SYNCH 6T 50024E-V-12-01-0040538 140.9095.1 BELT TOOTHED 10T 5/1075 50024E-V-12-01-0043919 862.027 BLOCK SLIDING 50024E-V-12-01-0044530 TKA10/10 THERMOCOAX-SENSOR 12471E-V-12-01-0051715 170.0264 KEY PARALLEL 5X5X20 50024E-V-12-01-0051720 902.10381 SCREW CAP PREASSEMBLED 50024E-V-12-01-0072424 902.1564/03 CAPILLARY CLAMPNUT 11503E-V-12-01-0072428 140.0681.1 O-RING (PEPPERPOT-DICHTRING) 50024E-V-12-01-0087164 1002-4506 EFO ELECTRODE 3100 FAHNE EINGEBRANNT 50024E-V-12-01-0089942 906.1228 SPRING V/N 50024E-V-13-01-0070157 4044000011 FEDERSTAHLLEISTE 100MM 13181E-V-13-01-0087801 4044000033R RAKELBLECH 250MM 200um 65grd beids. 13181E-V-13-01-0087962 2242300034 Rakelhalter modular 250mm/65° (EKRA) 13181E-V-17-01-0008086 9412714 DUSTBAG FOR NILSISK EXHAUSTER 50102E-V-17-01-0008355 9306039 FILTER /440X195MM/VILEDON/ZSB 50102E-V-17-01-0008380 9312742 GEARBELT 25AT5/420 50102E-V-17-01-0008382 9312739 GEARBELT 25AT5/390 50102E-V-17-01-0008571 3004357 DUST FILTER 70X250MM VY120 50102E-V-17-01-0008572 9412718 PAPERBAG PV21 50102E-V-17-01-0008737 3000097 PELLET BRUSH ASSY 50102E-V-17-01-0008738 9306040 FILTER /400X395MM /VILEDON 50102E-V-17-01-0008783 9412713 FILTER 50102E-V-17-01-0011541 5002797 FILTER 50102E-V-17-01-0011591 9312416 GEARBELT 4T 2.5/290 SYNCHROFLEX 50102

Page 50: 300MM Spare Parts 5-3-122

E-V-17-01-0011592 9312410 GEARBELT 4T 2.5/180 SYNCHROFLEX 50102E-V-17-01-0012985 3001374 BRUSH HOLDER 50102E-V-17-01-0016949 9312407 GEARBELT 4T2.5/120 SYNCHROFLEX 50102E-V-17-01-0016950 5288504 TRANSPORT CORD SEE DRAWING 50102E-V-17-01-0016951 9312412 GEARBELT 4T 2.5/230 SYNCHROFLEX 50102E-V-17-01-0016952 9312413 GEARBELT 4T2.5/245 SYNCHROFLEX 50102E-V-17-01-0016954 9420501 SINGLE ACTING CYLINDER AV-8-4 50102E-V-17-01-0016955 9631266 SWITCH (MICRO/PIN PLUNGER) 50102E-V-17-01-0016956 9235140 BEARING BUSH LBAS 8-2LS 50102E-V-17-01-0016958 9421710 SINGLE ACTING CYLINDER AVL 50102E-V-17-01-0016959 9631051 PROX. SWITCH SMT-3-PS-SQ-LED24 50102E-V-17-01-0016960 9416037 SWIVEL FLOW C.VALVE GRLZ-M5-PK 50102E-V-17-01-0016961 9418218 SOLENOID COIL MSFG-24 50102E-V-17-01-0016962 9440131 CYLINDER CQ2B-12-5D 50102E-V-17-01-0016965 9418219 SOLENOID COIL MSG-24 50102E-V-17-01-0016966 9425387 DOUBLE ACTING CYLINDER ADV-16 50102E-V-17-01-0016968 9600506 AMPLIFIER 50102E-V-17-01-0016969 9632750 SWITCH VACUUM 50102E-V-17-01-0016970 2900337000 SAFETY PIN 01.3 (L) 50102E-V-17-01-0016974 9312602 GEARBELT 16T5/330 SYNCHROFLEX 50102E-V-17-01-0016978 9415444 VALVE SOL:MZH-5/3 50102E-V-17-01-0016980 9235138 BEARING BUSH LBAS 5-2LS 50102E-V-17-01-0016981 9235142 BEARING BUSH LBCR 12-2LS 50102E-V-17-01-0017669 9414058 SUCTION CUP PFG-6-SI (AS) 50115E-V-17-01-0017670 9616820 CONNECTOR 50102E-V-17-01-0019225 9312606 GEARBELT 25T5/1100 50102E-V-17-01-0019999 9705501 TUBE AL-TEMP QNB 50 GREASE 80G 50102E-V-17-01-0021476 9414054 SUCTION CUP 50102E-V-17-01-0022766 3006666 PELLET TUBE 14MM 50102E-V-17-01-0024248 5212170 FILTER TFM OFFLOAD 50102E-V-17-01-0024303 9187275 RETAINIG RING 50102E-V-17-01-0027714 9834806 BRONZE WIRE HANDBRUSH 6RIJ 50102E-V-17-01-0028710 9602075 FUSE HOLDER 50102E-V-17-01-0029234 9614122 LAMP 50102E-V-17-01-0029235 9612174 SOCLE 50102E-V-17-01-0029237 9614895 HALOGENE LIGHT 50102E-V-17-01-0030345 9310460 O-RING 50102E-V-17-01-0036214 9179043 SUSP. SPRING 10.08.0640 400N 8-19 50102E-V-17-01-0037437 3004866 BRUSH CLEANING UNIT 50102E-V-17-01-0037714 3202167 BRACKET FOR GUIDE ROLL 50102E-V-17-01-0038718 9185310 SPRING FOR LINEAR FEEDER 50102E-V-17-01-0040632 9601665 CIRCUITBREAKER C60N 2x D10A 50102E-V-17-01-0040634 9601660 CIRCUITBREAKER C60N 2x C4A 50102E-V-17-01-0040718 4516325 SUCTION CUP HOLDER (NEW) 50102E-V-17-01-0041853 3202168 TEFLON SEALING (IN HEATER) 50102E-V-17-01-0043218 9309046 TULE 50102E-V-17-01-0043421 3004862 RUBBER SKIRT TOP 50102E-V-17-01-0043422 3004864 RUBBER SKIRT BOTTOM 50102E-V-17-01-0047080 9313103 Gearbelt 10 T5 1400 50102E-V-17-01-0047995 5207274 TRANSPORT CORD 50102E-V-17-01-0049557 9312415 GEARBELT T2,5/285 50102

Page 51: 300MM Spare Parts 5-3-122

E-V-17-01-0066762 3006449 PULLEY 50102E-V-17-01-0075551 9414068 Suction Pad / PBTM-M5-10-SI 50102E-V-17-01-0075552 9413426 EXHAUST FILTER 710-64-753 50102E-V-17-01-0076275 3004887 RUBBER SKIRT SIDE 50102E-V-17-01-0077468 3006668 PELLET TUBE 11,6MM 50102E-V-17-01-0077826 9312411 GEARBELT 4T 2,5/200 50102E-V-17-01-0077827 9312414 GEARBELT 4T 2,5/265 50102E-V-17-01-0077828 9312418 GEARBELT 4T 2,5/330 50102E-V-17-01-0083358 3005252 FIBER CABLE HONEYWELL 50102E-V-17-01-0083360 31434654 SHAFT (STEP3) 50102E-V-17-01-0083363 31722162 CENTRING BLOCK INSIDE 50102E-V-17-01-0083511 3002170 BELT PULLEY Z=10 T=5 8H7 50102E-V-35-01-0018591 1013568 RUBBER TIPS 220 DIAM 50089E-V-35-01-0018592 1024036 COLLET GUIDE (GLASS TUBE) 50089E-V-35-01-0021969 HTR1-220 RUBBER PICK-UP TOOL 13750E-V-35-01-0021970 HTR1-200 RUBBER PICK-UP TOOL 13750E-V-35-01-0021971 R3-67 RUBBER TIPS (5.00 X 10.00) 50045E-V-35-01-0021973 R1-200-400 RUBBER TIPS 50045E-V-35-01-0021974 R1-180-360 RUBBER TIPS 4.57x9.14mm 50045E-V-35-01-0021975 K1-12C-XXX HOLDER 13750E-V-35-01-0021976 K1-12U1-XXX HOLDER 50045E-V-35-01-0021979 12C3-013 HOLDER 50089E-V-35-01-0021981 9024824 NEUE P/N 9027498 13750E-V-35-01-0021982 9024821 NEUE P/N 9027499 13750E-V-35-01-0021983 9020665 ANVIL ASSY W/O HOLES (BASE) 13750E-V-35-01-0021984 8024817 ANVIL INSERT W/O HOLES 13750E-V-35-01-0021985 8019409 NEEDLE MT. ASSY W/O NEEDLES&HO 13750E-V-35-01-0023318 9024822 Needle Mt. Assy. 180x.400 50045E-V-35-01-0023828 9027499 NEEDLE MT ASSY .080X .250 50045E-V-35-01-0023830 9027498 ANVIL ASSY 0.80X.250 50045E-V-35-01-0023831 9027500 NEEDLE MT ASSY .120X365 13750E-V-35-01-0028612 R3-64 RUBBER TIPS 50045E-V-35-01-0028613 R3-65 RUBBER TIPS 50045E-V-35-01-0028614 R1-140-280 RUBBER TIPS 50045E-V-35-01-0028615 R1-160-320 RUBBER TIPS 52713E-V-35-01-0028616 12U3-013 RUBBER TIP HOLDER 50045E-V-35-01-0028617 12U3-075 RUBBER TIP HOLDER 50045E-V-35-01-0031718 R3-62 RUBBER TIPS 50045E-V-35-01-0031719 R1-110-190 RUBBER TIPS 50045E-V-35-01-0031720 E3-12U1-XXX RUBBER TIP HOLDERS 50045E-V-35-01-0047644 R3-13 RUBBER TIP (5,0x5,0mm) 50045E-V-35-01-0047646 R3-16 RUBBER TIP (8,0x8,0mm) 50045E-V-35-01-0047647 12C3-008 RUBBER TIP HOLDER 50045E-V-35-01-0073973 R3-66E GEHÄRTETE RUBBER TIPS 13750E-V-35-01-0073974 R3-65E GEHÄRTETE RUBBER TIPS 13750E-V-35-01-0075352 R3-68E RUBBER TIP 6,00X12,00MM 13750E-V-35-01-0075637 R3-16E GEHÄRTETE RUBBER TIPS 8,00 X 8,00MM 13750E-V-35-01-0075638 R3-69E GEHÄRTETE RUBBER TIPS 7,00X14,00MM 13750E-V-35-01-0075640 R3-70E GEHÄRTETE RUBBER TIPS 8,00X16,00MM 13750E-V-35-01-0086153 R3-14E RUBBER TIP (6,0x6,0mm) GEHÄRTET 13750E-V-47-01-0045422 A6161289015 SUSPEND CYLINDER (NEW TOOLING) 10707

Page 52: 300MM Spare Parts 5-3-122

E-V-47-01-0045423 A3517550145 TRAYSHUTTLE POWERTRACK 10707E-V-47-01-0047024 A6161289006 LIF ADAPTER 10707E-V-47-01-0047025 A0000013540 VACUUM CUP (TSOP) 10707E-V-47-01-0047257 A0000000368 TAPE FOR STEELBELT Y-AXIS 10707E-V-47-01-0047258 A0000000916 E-AXIS TIMING BELT 10707E-V-47-01-0047259 A0000000918 Z-AXIS TIMING BELT 11314E-V-47-01-0047260 A0000000919 R-AXIS TIMING BELT 10707E-V-47-01-0047261 A0000001335 X-AXIS TIMING BELT 10707E-V-47-01-0047262 A0000010185 U-AXIS TIMING BELT 10707E-V-47-01-0047263 A0000010544 C-AXIS TIMING BELT 10707E-V-47-01-0047264 A0000011357 U-AXIS TIMING BELT 6705M25 10707E-V-47-01-0047265 A0000011737 RUBBER TIP 10707E-V-47-01-0047272 A0000000367 POLYURETHAN ABRASION X-AXIS 10707E-V-47-01-0047284 A0000010673 BALL PLUNGERE DN-4 10707E-V-47-01-0047649 A0000000066 ENCODER FLAGED 10707E-V-47-01-0063881 A0429980040 RELAYBOARD LICHTSCHRANKE 13655E-V-47-01-0079226 1029-1020 DICHTRING COUNTERBALANCE CYLINDER 11314E-V-47-01-0091191 102.008.283.2AS VACUUM CUP 8MM 15589E-V-90-01-0064114 50.021.016 DRUCKFEDER D-145-G 13202E-V-90-01-0077069 403.281 GETRIEBEMOTOR 24V 13202E-V-A3-01-0074668 53001028 O-RING 16856E-V-A3-01-0078931 MODDX146 RING(CENTER) 10087E-V-A3-01-0078932 MSCO0033AN O-RING 10087E-V-A3-01-0078933 NAK076B-0000 CARBON BRUSH ASSY , DISCO-695 10087E-V-A3-01-0078934 MOELT044 BELT 10087E-V-A3-01-0078935 MSCO0006AN O-RING 10087E-V-A3-01-0078936 MOELH136 SOLENOID VALVE 10087E-V-A3-01-0078937 MOELZ00151 COUPLING 10087E-V-A3-01-0078938 MSCO0203AN O-RING 10087E-V-A3-01-0078939 MOELH03652 SOLENOID VALVE 10087E-V-A3-01-0078940 MOELH03651 SOLENOID VALVE 10087E-V-A3-01-0078941 MOHAC005 SEAL(680) 10087E-V-A3-01-0078947 MOHEH04251 FILTER ELEMENT 10087E-V-A3-01-0078948 APFLM15 FUSE(GLASS) 10087E-V-A3-01-0078949 MOGCS109--A SEAL WASHER 10087E-V-A3-01-0078950 EAUM--992701 MOTOR UNIT(PP) 10087E-V-A3-01-0078951 MOHLZ034 RUBBER CLAMP 10087E-V-A3-01-0078953 MOELH03851A SOLENOID VALVE 10087E-V-A3-01-0078954 MOHLX010--B BELLOWS(X) 10087E-V-A3-01-0078956 MOHEH057--C FLOW METER WITH A POINT OF CO 10087E-V-A3-01-0078957 MOHLRB09--B COVER (WATER-PROOF) 10087E-V-A3-01-0078958 FBPCB-0173 I/O BOARD ,DISCO-6361 10087E-V-A3-01-0078959 FBPCB-0174 I/O BOARD ,DISCO-6361 10087E-V-A3-01-0080352 57001008 VACUUM CUP, OFFLOAD PICKHEAD 16856E-V-A3-01-0083507 50002342 NEST PLATFORM 10x10,5 TOOL#17 HIGH WARPA 16856E-V-A3-01-0083510 50003050 NEST PLATFORM 10X12 TOOL#20 STANDARD 16856E-V-A3-01-0085319 50003008 NEST PLATFORM 8X12 TOOL#14/16 STANDARD 16856E-V-A3-01-0085320 57001028 VACUUM PAD, SPONGE OD=6 X ID=3 X H=6 16856E-V-A3-01-0092428 50002252 NEST PLATFORM 10X10,5 STANDARD TOOL 17 16856E-V-A3-01-0092638 50002256 NEST PLATFORM 10X12,5 STANDARD TOOL 18 16856E-V-A5-01-0030498 24110303 FLACHSAUGER PFG-5A-SIE 10569

Page 53: 300MM Spare Parts 5-3-122

E-V-A5-VM-0070974 28170102 TASTER BEDIENPANEL 10569E-V-A5-VP-0076472 16DO 0.5 A PK CAN-IN/OUT MODULE 10569E-V-A5-VP-0076473 60626671 GALIL KARTE DMC1020/DMC1030 10569E-V-A5-VP-0076474 28250374 CANBUS MASTER ISA CARD 10569E-V-A5-VP-0076475 60300390 GALIL KARTE DMC1040 10569E-V-B8-01-0010968 L751015A LASERLAMPE NL5023 KFC560003266 10675E-V-B8-01-0019038 L708078 O-RING 6.07 X 1.75 SI 870 BLAU 10675E-V-E8-01-0016442 PR-02 PAPIERROLLE FUER BT-2400 10064E-V-E8-01-0016443 DA-HK-47-04-02 TESTHAKEN 100µ Fußl. ,50µ Durchmesser 10064E-V-E8-01-0073562 DAGE BT SHEAR 062-0SCHERWERKZEUG 75µM BREITE 12610E-V-F5-01-0018005 TKF-FB6 SICHERHEITSFILTERBEUTEL EU5 10287E-V-F5-01-0018006 MKF-EU51 VORFILTERMATTE FÜR FEUCHTE DÄM 10287E-V-F5-01-0018007 MKF-SF18 SCHWEBSTOFFFILTER KL.S 10287E-V-F5-01-0033127 BSTSB004 SILENT BLOCK 10287E-V-F5-01-0033128 VT FLR01 FLACHRIEMEN 650 x 30 mm f. VT E-/ DKC165 10287E-V-F5-01-0089905 STAUBSAUGERDICHT GROßE DICHTUNG 350X660 10287E-V-G6-01-0022885 6045015 SEALINGWIRE CONVEX 10157E-V-G6-01-0022886 6045005 TEFLON&TAPE SINGLE SEAL 10157E-V-J7-01-0062351 1005933 DAM, DUAL DURO ASSY 12271E-V-K8-01-0073561 133033 O-RING 7,66X1,78 SILICON MVQ70 ROT 50372E-V-K8-01-0083730 103080 FALTENBALG V6 905 50372E-V-K8-01-0087363 121394 MINISAUGGUMMI D=3MM NEOPREN M. SCHR. SM 16108E-V-K8-01-0089941 122378 MICRO-FUSE 2,5AF 50372E-V-K8-01-0092139 101941 KUPPLUNGSTEIL 50372E-V-K8-01-0092141 148554 DISPENSE TOOL 05/08 50372E-V-L5-01-0072432 A42MX16PL84X39 FPGA SCHALTKREIS ACTEL 50100E-V-L5-01-0082162 MH5-1012003-01 FAN PULLEY SHAFT 6735-03036-0-00 Musterb 13120E-V-L5-01-0082163 MH5-1012009-10 IDLING PULLEY 13120E-V-L5-01-0088222 S-240MOD100-D-10(664-PIN PIN ARRAY 14636E-V-L5-01-0088223 S-240MOD100-D-10(556-PIN PIN ARRAY 14636E-V-L5-01-0088224 A080-1521 UPPER ELASTOMER 14636E-V-L5-01-0088225 A081-1012 LOWER ELASTOMER 14636E-V-L5-01-0092095 MH5-1012008-10 FAN PULLEY 13120E-V-N0-01-0059374 4207.0101 FILTEREINSATZ FLUORCARBON IMPRÄGNIERT 13415E-V-N0-01-0071753 6300.0096 HOCHLEISTUNGSSCHMIERFETT 13415E-V-N0-01-0091210 6700.0071 WEITHALSFLASCHE PE-LD,750ml rund naturf. 10248E-V-N0-01-0091253 6FIL-HL-01 AUSSENFILTER FÜR O2 ANALYSATOR 13415E-V-N1-01-0059376 00351498-02 Ventilstößel kplt. DLM1-12 /1Pack=6Stück 13416E-V-N1-01-0059377 00351500-02 Ventilstößel kplt. DLM1-6 / 1Pack=6Stück 13416E-V-N1-01-0072014 00322602-04 PIPETTE 904 13416E-V-N1-01-0072015 00345020-02 PIPETTE 913 13416E-V-N1-01-0072016 00321862-03 PIPETTE 915 13416E-V-N1-01-0072017 00321863-03 PIPETTE 917 13416E-V-N1-01-0072018 00325972-02 PIPETTE 920 13416E-V-N1-01-0077070 00346523-02 PIPETTE 933/733 13416E-V-N1-01-0080247 00333652-05 PIPETTE 725/925 VECTRA KERAMIK 13416E-V-P9-01-0085894 S001 HOB_CN031T-184-1-1064 MODULTESTSOCKEL 10909E-V-P9-01-0087179 S002 CN031T-240-1001 DIMM240,PITCH 1.0 PTH PU 10909E-W-47-01-0056854 A3354136000 SHIM KIT (Werkzeug) 11314E-W-47-01-0056855 A0000011786 18 INCH MECHANICS LEVEL (Werkzeug) 11314K-B-J9-01-0049941 EE-SX674 PHOTO MICRO SENSOR 14537

Page 54: 300MM Spare Parts 5-3-122

K-B-J9-02-0087706 EE-SX871A PHOTOMICRO SENSOR 14537K-M-12-01-0019706 190.2383.1 SENSOR INDUCTIVE 50024K-M-12-01-0079714 931.056 PIO40 PART A+B WITH FPU 50024K-M-12-TS-0085113 916.0907 HEATER CARTRIDGE 230VAC/400W 50024K-M-12-TS-0091843 110.1582.1 OGURA TENSIONER 50024K-M-24-01-0060101 FU-77 FIBER SENSOR for WRM 10247K-M-A3-01-0083547 67010009 EX-14A REFLECTIVE PHOTO SENSOR 10683K-M-A3-01-0083556 16008037 I/O BOARD VERTICAL, SBS-8808 51266K-M-A3-01-0083557 16008038 I/O BOARD-90 DEGREE, SBS-8808 51266K-M-A3-01-0083558 49005003 MODULE EJECTORE 51266K-M-A3-01-0083559 70003008 ROTARY TABLE 51266K-M-A3-01-0083591 67070075 SOLENOID VALVE MOKFH020 16856K-M-A3-01-0083593 67070077 BELLOWS (X) MOKFX004 51266K-M-A3-01-0083595 LKFX-020001-0 BELLOWS (L) MOKFX035 16856K-M-A3-01-0086712 64001011 RELAY, 28-O V 10247K-M-A3-01-0086714 67010047 SENSOR, MINIATURE 51266K-M-K8-01-0072963 134778 POWER SUPPLY 200W BATTERY PACK 50372K-M-K8-01-0072969 122796 PCB AS 262-0-02 50372K-M-K8-01-0072972 124325 PCB ADCOS K-100-VIT-12 50372K-M-K8-01-0072974 134720 PCB TFM 060-06-05-99N.90228 50372K-M-K8-01-0072979 127021 KUPPLUNG GS9 6.35/8X30 50372K-M-K8-01-0072985 124654 ZAHNRIEMEN P0T2.5 L=1340 B=10 50372K-M-K8-01-0072987 126325 MAGNET BEARBEITET 50372K-M-K8-01-0072989 129752 LICHTTASTER REFLEX 6-10/100MM 50372K-M-K8-01-0072990 120308 SPANNZANGE TYP SZ-6.35 50372K-M-K8-01-0072991 125050 ZAHNRIEMEN P=T2.5 L=1015 B=10 50372K-M-K8-01-0072993 124270 STEPPERMOTOR 1.8DEG 3.5V 2.3A 50372K-M-K8-01-0072999 124731 BIEGEFEDER 50372K-M-K8-01-0073000 128607 WINKELGELENKSTANGE EXTRA 160-B 50372K-M-K8-01-0073001 124732 BIEGEFEDER 50372K-M-K8-01-0073002 135545 DC-MOTOR M. GETRIEBE MTE 2M 50372K-M-K8-01-0073003 124720 KUPPLUNG SIGERIST HCZ5 50372K-M-K8-01-0073004 135544 SOLENOID DC 24V/100%ED MTE 50372K-M-K8-01-0073012 128738 ZAHNRIEMEN P=T5 L=1380 B=10 50372K-M-K8-01-0073013 128739 ZAHNRIEMEN P=T5 L=750 B=10 50372K-M-K8-01-0073017 127880 /162183 KUPPLUNG D=8 L=20 50372K-M-K8-01-0073019 125081 DC-SERVOMOTOR ENCODER 3-CHANNE 50372K-M-K8-01-0073020 125089 KUPPLUNG 8/8X28 SIGERIST 50372K-M-K8-01-0073026 127988 ZAHNRIEMEN P=T5 L=1665 B=10 50372K-M-K8-01-0073029 130105 PRINT AS 250-0-02 BEST. (>12MM 50372K-M-K8-01-0073036 127350 VENTIL 3/2 VK332-5DO-M5 VAKUUM 50372K-M-K8-01-0073040 127305 PCB AS 345-0-01 REV.C 50372K-M-K8-01-0073044 128984 ZAHNRIEMEN P=2.032 L=146.3 50372K-M-K8-01-0073046 128985 ZAHNRIEMEN P=2.032 L=1202.94 50372K-M-K8-01-0073051 124669 VENTIL 3/2 VK332-5DO-M5 VAKUUM 50372K-M-K8-01-0073052 127868 NÄHERUNGSSCHALTER SMEO-4U-K 50372K-M-K8-01-0073059 121920 ZYLINDER 10X160 DOPPELW. M5 50372K-M-K8-01-0073060 138763 SENSOR E3X-A11/MTE 4M/L=0.08M 50372K-M-K8-01-0073061 138187 LICHTLEITER EINWEG E32-T14L 14537K-M-K8-01-0073063 139546 NÄHERUNGSSCHALTER EH-614A OMRON 10247K-M-K8-01-0073065 139156 NÄHERUNGSSCHALTER D-F9BL 50372

Page 55: 300MM Spare Parts 5-3-122

K-M-K8-01-0073066 125420 VALVE 3/2W NC 24V 0-3.5BAR 50372K-M-K8-01-0073068 137815 ZAHNRIEMEN P=T5 L=1075 B=10 50372K-M-K8-01-0073069 116682 SENSOR EE-SX471 OMRON 50372K-M-K8-01-0073070 132972 SENSOR EE-SX474 OMRON 50372K-M-K8-01-0073071 118435 SENSOR EE-SX470 OMRON 50372K-M-K8-01-0073074 138134 ZAHNRIEMEN 2MR L=1700 B=3 50372K-M-K8-01-0073075 136727 ZAHNRIEMEN P=3M L=447 B=9 50372K-M-K8-01-0073080 126941 PLEXIGLASARM FLIPPER 50372K-M-K8-01-0073083 139471 HEIZPATRONE 60W/36V L=0.3M 50372K-M-K8-01-0073086 115200 DC-MOTOR 32V WITHOUT CABLE 50372K-M-K8-01-0073088 125934 ZAHNRIEMEN P=2.032 L=264.16 50372K-M-K8-01-0073090 120791 ZAHNRIEMEN P=2.032 L=182.88 50372K-M-K8-01-0073091 120792 ZAHNRIEMEN P=2.032 L=213.36 50372K-M-K8-01-0073092 132145 ZAHNRIEMEN P=2.032 L=221.48 50372K-M-K8-01-0073095 129066 NÄHERUNGSSCHALTER NPN NO MTE 50372K-M-K8-01-0073816 124655 ZAHNRIEMEN P-T2.5 L-955 50372K-M-K8-01-0076642 142119 BELT TIMING P=T2.5 L=620 50372K-M-K8-01-0076643 140284 DC MOTOR 50372K-M-K8-01-0076648 141847 COUPLING 50372K-M-K8-01-0076649 141645 AC SERVOMOTOR 12VDC/10000RPM 50372K-M-K8-01-0076653 134332 PCB AS 424-0-01REV.A CONV.SOL. 50372K-M-K8-01-0076654 140287 DC MOTOR 50372K-M-K8-01-0076655 139472 SENSOR REFLECTIVE 50372K-M-K8-01-0076664 141173 BELT, TIMING P=T5 L=225 B=10 50372K-M-K8-01-0076665 142134 BELT, TIMING P=T5 L=992 50372K-M-K8-01-0076666 140116 THERMOCOUPLE L=0,59M 50372K-M-K8-01-0076668 134085 STEPPER MOTOR 0.18DEG.4V/0.95A 50372K-M-K8-01-0076669 140753 PHOTOMICROSENSOR EX13B/MTE 4ML 50372K-M-K8-01-0076670 141068 BELT TIMING 50372K-M-K8-01-0076671 141062 BELT TIMING 50372K-M-K8-01-0076676 122797 PCB AS 261-0-02 REV.C QUAD. ST 50372K-M-K8-01-0076677 137094 PCB AS 261-0-03 REV.A (MLS) 50372K-M-K8-01-0081708 142826 POWER SUPPLY 50W 12-15V TYP ML50.102 50372K-M-K8-01-0085557 143071 CONTACT PIN 50372K-M-K8-01-0085558 143282 COMPRESSION SPRING 50372K-M-K8-01-0085561 145873 BOLT COMPL. 50372K-M-K8-01-0085568 143946 THERMOCOUPLE 50372K-M-K8-01-0085570 142843 PCB MAXON DEC 24/1 50372K-M-K8-01-0087595 145846 BELT TIMING B=3,2 Z=280 50372K-V-K8-01-0073102 128534 FILTEREINSATZ 611032 F.OR-FV20 50372K-V-K8-01-0073103 116656 KOHLEBÜRSTE 3.1X2.3X4.0 Satz a´20Stück 50372K-V-K8-01-0073104 115868 KOHLEBÜRSTE DC-MOTOR JDTH-2250 50372

Page 56: 300MM Spare Parts 5-3-122

Supplier Group Unit Qty.

Avery Dennison Deutschland GmbH BE spares others Pcs. 16DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 8TOWA Europe GmbH EOL / BE spares Pcs. 4TOWA Europe GmbH EOL / BE spares Pcs. 2TOWA Europe GmbH EOL / BE spares Pcs. 2TOWA Europe GmbH EOL / BE spares Pcs. 2TOWA Europe GmbH EOL / BE spares Pcs. 4TOWA Europe GmbH EOL / BE spares Pcs. 3TOWA Europe GmbH EOL / BE spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 1AxFlow (Germany) wet etch spares Pcs. 1ADVANTEST Europe GmbH EOL / BE spares Pcs. 2DISCO HI-TEC EUROPE GmbH BE spares others Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 8ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2Heusinger + Salmon Mangelsdorf assembly spares Pcs. 180DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1Micro-Mechanics AG assembly spares Pcs. 110FICO BV wafer test spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 7Kulicke and Soffa assembly spares Pcs. 2Mühlbauer AG BE spares others Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 98ADVANTEST Europe GmbH wafer test spares Pcs. 9Quasys GmbH assembly spares Pcs. 10Quasys GmbH assembly spares Pcs. 10ADVANTEST Europe GmbH wafer test spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2CURO Holdings Co., Ltd. wafer test spares Pcs. 228ADVANTEST Europe GmbH wafer test spares Pcs. 18FICO BV EOL / BE spares Pcs. 6FICO BV EOL / BE spares Pcs. 7FICO BV EOL / BE spares Pcs. 2

Page 57: 300MM Spare Parts 5-3-122

ADVANTEST Europe GmbH wafer test spares Pcs. 1Towa Intercon Technology Inc. EOL / BE spares Pcs. 2TOWA Europe GmbH EOL / BE spares Pcs. 10Oerlikon Assembly Equipment AG, assembly spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 6YAMAICHI ELECTRONICS wafer test spares Pcs. 20ADVANTEST Europe GmbH wafer test spares Pcs. 20Siemens AG assembly spares Pcs. 42ADVANTEST Europe GmbH wafer test spares Pcs. 5ADVANTEST Europe GmbH wafer test spares Pcs. 5ADVANTEST Europe GmbH wafer test spares Pcs. 6ADVANTEST Europe GmbH wafer test spares Pcs. 30ADVANTEST Europe GmbH wafer test spares Pcs. 25ADVANTEST Europe GmbH wafer test spares Pcs. 5ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 28TOWA Europe GmbH EOL / BE spares Pcs. 3TOWA Europe GmbH EOL / BE spares Pcs. 3TOWA Europe GmbH EOL / BE spares Pcs. 5ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1

Page 58: 300MM Spare Parts 5-3-122

ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 30ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 16PHOENIX CONTACT GmbH & CO BE spares others Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 1378ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1EMS - Electronic Manufacturer assembly spares Pcs. 17ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1N/A assembly spares Pcs. 3EKRA Automatisierungs GmbH assembly spares Pcs. 2EKRA Automatisierungs GmbH assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 6ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2YAMAICHI ELECTRONICS burn in BE spares Pcs. 16YAMAICHI ELECTRONICS burn in BE spares Pcs. 318Hitachi High-Technologies assembly spares Pcs. 1FICO BV EOL / BE spares Pcs. 1FIPA GmbH BE spares others Pcs. 54EKRA Automatisierungs GmbH assembly spares Pcs. 2Siemens AG assembly spares PAK 13Towa Intercon Technology Inc. EOL / BE spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 3TOWA Europe GmbH EOL / BE spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 1Siemens AG assembly spares Pcs. 12ADVANTEST Europe GmbH wafer test spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 9FICO BV EOL / BE spares Pcs. 1Kniel System-Electronic GmbH wafer test spares Pcs. 4ASML Germany GmbH wafer test spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Wälzlagertechnik GmbH BE spares others Pcs. 1SMC Pneumatic GmbH BE spares others Pcs. 1

Page 59: 300MM Spare Parts 5-3-122

Quasys GmbH assembly spares Pcs. 40Quasys GmbH assembly spares Pcs. 55Rommel GmbH assembly spares Pcs. 2Rommel GmbH assembly spares Pcs. 2Rommel GmbH assembly spares Pcs. 2EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 2EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1EKRA Automatisierungs GmbH assembly spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1Tetra Engineering Pte Ltd. EOL / BE spares Pcs. 3Tetra Engineering Pte Ltd. EOL / BE spares Pcs. 2Tetra Engineering Pte Ltd. EOL / BE spares Pcs. 2Tetra Engineering Pte Ltd. EOL / BE spares Pcs. 2Tetra Engineering Pte Ltd. EOL / BE spares Pcs. 2SIEMENS AG assembly spares Pcs. 20NIKAD Elektronics Ltd. burn in BE spares Pcs. 1196NIKAD Elektronics Ltd. burn in BE spares Pcs. 93NIKAD Elektronics Ltd. burn in BE spares Pcs. 2582ADVANTEST Europe GmbH wafer test spares Pcs. 12ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 5ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 12ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 5ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 19

Page 60: 300MM Spare Parts 5-3-122

ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 87ADVANTEST Europe GmbH wafer test spares Pcs. 11ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 35ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 6ADVANTEST Europe GmbH wafer test spares Pcs. 5ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 5ADVANTEST Europe GmbH wafer test spares Pcs. 8ADVANTEST Europe GmbH wafer test spares Pcs. 12ADVANTEST Europe GmbH wafer test spares Pcs. 12ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 5Kulicke and Soffa assembly spares Pcs. 1SEZ Semiconductor Equipment wet etch spares PC 1Global Measurement wet etch spares PC 2Global Measurement wet etch spares PC 1Global Measurement wet etch spares PC 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 5Kulicke and Soffa assembly spares Pcs. 2TOWA Europe GmbH EOL / BE spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 7ADVANTEST Europe GmbH wafer test spares Pcs. 13ADVANTEST Europe GmbH wafer test spares Pcs. 8ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 14

Page 61: 300MM Spare Parts 5-3-122

ADVANTEST Europe GmbH wafer test spares Pcs. 40ADVANTEST Europe GmbH wafer test spares Pcs. 40ADVANTEST Europe GmbH wafer test spares Pcs. 17ADVANTEST Europe GmbH wafer test spares Pcs. 12ADVANTEST Europe GmbH wafer test spares Pcs. 30ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 33ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 12ADVANTEST Europe GmbH wafer test spares Pcs. 8ADVANTEST Europe GmbH wafer test spares Pcs. 12ADVANTEST Europe GmbH wafer test spares Pcs. 11ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 12ADVANTEST Europe GmbH wafer test spares Pcs. 12ADVANTEST Europe GmbH wafer test spares Pcs. 9ADVANTEST Europe GmbH wafer test spares Pcs. 12ADVANTEST Europe GmbH wafer test spares Pcs. 16ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 35ADVANTEST Europe GmbH wafer test spares Pcs. 2RS Components GmbH assembly spares Pcs. 15Mühlbauer AG BE spares others Pcs. 20TOWA Europe GmbH EOL / BE spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 8ADVANTEST Europe GmbH wafer test spares Pcs. 28ADVANTEST Europe GmbH wafer test spares Pcs. 10ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 6

Page 62: 300MM Spare Parts 5-3-122

ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 17ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 8ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 9ROFIN-SINAR Laser GmbH BE spares others Pcs. 1CURO Holdings Co., Ltd. BE spares others Pcs. 9928FICO BV EOL / BE spares Pcs. 2FICO BV EOL / BE spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 4FICO BV EOL / BE spares Pcs. 2FICO BV EOL / BE spares Pcs. 1FICO BV EOL / BE spares Pcs. 2FICO BV EOL / BE spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 4Kulicke and Soffa assembly spares Pcs. 4Kulicke and Soffa assembly spares Pcs. 4Mühlbauer AG BE spares others Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 15ADVANTEST Europe GmbH wafer test spares Pcs. 4APT GmbH wafer test spares Pcs. 39APT GmbH wafer test spares Pcs. 47DISCO HI-TEC EUROPE GmbH EOL / BE spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 15EMS - Electronic Manufacturer assembly spares Pcs. 8SMC Pneumatic GmbH BE spares others Pcs. 1Kulicke and Soffa assembly spares Pcs. 8TOWA Europe GmbH EOL / BE spares Pcs. 3nanotec international GmbH wafer test spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 2FICO BV EOL / BE spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1835Rehm Thermal Systems GmbH assembly spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 8Mühlbauer AG BE spares others Pcs. 3

Page 63: 300MM Spare Parts 5-3-122

FICO BV EOL / BE spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 8DEK Printing Machines GmbH module tester spares Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 2DEK Printing Machines GmbH module tester spares Pcs. 10DEK Printing Machines GmbH module tester spares Pcs. 10DEK Printing Machines GmbH module tester spares Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 4GfU - Gesellschaft für assembly spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 16ADVANTEST Europe GmbH wafer test spares Pcs. 20FICO BV EOL / BE spares Pcs. 2Siemens AG assembly spares Pcs. 6Siemens AG assembly spares Pcs. 6Mirae Corporation wafer test spares Pcs. 2NIKAD Elektronics Ltd. burn in BE spares Pcs. 54EMS - Electronic Manufacturer assembly spares Pcs. 19FICO BV EOL / BE spares Pcs. 18FICO BV EOL / BE spares Pcs. 2DISCO HI-TEC EUROPE GmbH EOL / BE spares Pcs. 1DISCO HI-TEC EUROPE GmbH EOL / BE spares Pcs. 1DISCO HI-TEC EUROPE GmbH EOL / BE spares Pcs. 1Hitachi High-Technologies EOL / BE spares Pcs. 6DEK Printing Machines GmbH module tester spares Pcs. 4DEK Printing Machines GmbH module tester spares Pcs. 2DEK Printing Machines GmbH module tester spares Pcs. 2DAGE Semiconductor GmbH assembly spares Pcs. 1Micro-Mechanics AG assembly spares Pcs. 20ASYS GmbH module tester spares Pcs. 2ASYS GmbH module tester spares Pcs. 1ASYS GmbH module tester spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 2DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 4DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 50Oerlikon Assembly Equipment AG, assembly spares Pcs. 1YAMAICHI ELECTRONICS wafer test spares Pcs. 45YAMAICHI ELECTRONICS wafer test spares Pcs. 44ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1

Page 64: 300MM Spare Parts 5-3-122

FICO BV EOL / BE spares Pcs. 1Tetra Engineering Pte Ltd. EOL / BE spares Pcs. 2DISCO HI-TEC EUROPE GmbH EOL / BE spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 4DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 4EMS - Electronic Manufacturer assembly spares Pcs. 10Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 2Insolution Technologies LTD EOL / BE spares Pcs. 79ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1Micro-Mechanics AG assembly spares Pcs. 80CompuMess Elektronik GmbH burn in BE spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 1Siemens AG assembly spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 1Tetra Engineering Pte Ltd. EOL / BE spares Pcs. 1Isptel, lda wafer test spares Pcs. 6Micromaster Pte. Ltd. wafer test spares Pcs. 18FICO BV EOL / BE spares Pcs. 50CONRAD Electronic GmbH assembly spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 640ADVANTEST Europe GmbH wafer test spares Pcs. 317ADVANTEST Europe GmbH wafer test spares Pcs. 856Micro-Mechanics AG assembly spares Pcs. 4Micro-Mechanics AG assembly spares Pcs. 70Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 4Siemens AG assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Qimonda Portugal S.A. BE spares others Pcs. 14Qimonda Portugal S.A. BE spares others Pcs. 15Qimonda Portugal S.A. BE spares others Pcs. 14Qimonda Portugal S.A. BE spares others Pcs. 46Qimonda Portugal S.A. BE spares others Pcs. 4Qimonda Portugal S.A. BE spares others Pcs. 3Qimonda Portugal S.A. BE spares others Pcs. 1Qimonda Portugal S.A. BE spares others Pcs. 1Qimonda Portugal S.A. BE spares others Pcs. 1ADVANTEST Europe GmbH BE spares others SAT 2ADVANTEST Europe GmbH BE spares others Pcs. 2Kulicke and Soffa assembly spares Pcs. 1

Page 65: 300MM Spare Parts 5-3-122

Kulicke and Soffa assembly spares Pcs. 2ADVANTEST Europe GmbH module tester spares Pcs. 8ADVANTEST Europe GmbH module tester spares Pcs. 7ADVANTEST Europe GmbH module tester spares Pcs. 4ADVANTEST Europe GmbH module tester spares Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 4DEK Printing Machines GmbH module tester spares Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 200Avery Dennison Deutschland GmbH wafer test spares Pcs. 9ADVANTEST Europe GmbH wafer test spares Pcs. 940VACUUBRAND GmbH wet etch spares PC 1VWR International GmbH assembly spares Pcs. 3Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 1HANMI Co., Ltd. EOL / BE spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1ADVANTEST Europe GmbH EOL / BE spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1CURO Holdings Co., Ltd. wafer test spares Pcs. 56APT GmbH wafer test spares Pcs. 32APT GmbH wafer test spares Pcs. 32APT GmbH wafer test spares Pcs. 22Oerlikon Assembly Equipment AG, assembly spares Pcs. 5Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares M 2YAMAICHI ELECTRONICS burn in BE spares Pcs. 40APT GmbH wafer test spares Pcs. 32nanotec international GmbH wafer test spares Pcs. 1Micro-Mechanics AG assembly spares Pcs. 4Micro-Mechanics AG assembly spares Pcs. 40Micro-Mechanics AG assembly spares Pcs. 40Micro-Mechanics AG assembly spares Pcs. 18Micro-Mechanics AG assembly spares Pcs. 80Micro-Mechanics AG assembly spares Pcs. 20Oerlikon Assembly Equipment AG, assembly spares Pcs. 5ADVANTEST Europe GmbH wafer test spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 10APT GmbH wafer test spares Pcs. 88Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1SMC Pneumatic GmbH assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1

Page 66: 300MM Spare Parts 5-3-122

Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2YAMAICHI ELECTRONICS burn in BE spares Pcs. 180DEK Printing Machines GmbH module tester spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 576ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 3DATAPAQ GmbH EOL / BE spares Pcs. 2CURO Holdings Co., Ltd. wafer test spares Pcs. 1981veonis Technologies GmbH wafer test spares Pcs. 128EKRA Automatisierungs GmbH assembly spares Pcs. 2EKRA Automatisierungs GmbH assembly spares Pcs. 10EMS - Electronic Manufacturer assembly spares Pcs. 8nanotec international GmbH wafer test spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 100Kulicke and Soffa assembly spares Pcs. 1CURO Holdings Co., Ltd. wafer test spares Pcs. 514CURO Holdings Co., Ltd. wafer test spares Pcs. 520ADVANTEST Europe GmbH wafer test spares Pcs. 16nanotec international GmbH wafer test spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 3nanotec international GmbH wafer test spares Pcs. 1YAMAICHI ELECTRONICS wafer test spares Pcs. 612NanoFocus AG EOL / BE spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1CURO Holdings Co., Ltd. wafer test spares Pcs. 30Micro-Mechanics AG assembly spares Pcs. 20FICO BV EOL / BE spares Pcs. 1YAMAICHI ELECTRONICS burn in BE spares Pcs. 50Kulicke and Soffa assembly spares Pcs. 1YAMAICHI ELECTRONICS burn in BE spares Pcs. 20Oerlikon Assembly Equipment AG, assembly spares Pcs. 3Oerlikon Assembly Equipment AG, assembly spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1

Page 67: 300MM Spare Parts 5-3-122

Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1SHIN-ETSU HANDOTAI EUROPE LTd assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1Mirae Corporation wafer test spares Pcs. 3Mirae Corporation wafer test spares Pcs. 3FICO BV EOL / BE spares Pcs. 2FICO BV EOL / BE spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 30EKRA Automatisierungs GmbH assembly spares Pcs. 3AxFlow (Germany) wet etch spares PC 1Micro-Mechanics AG assembly spares Pcs. 2Kistner Sicherheitssysteme und wet etch spares PC 4Wälzlagertechnik GmbH wet etch spares PC 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1YAMAICHI ELECTRONICS wafer test spares Pcs. 70YAMAICHI ELECTRONICS wafer test spares Pcs. 70Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1YAMAICHI ELECTRONICS burn in BE spares Pcs. 38USHIO Deutschland GmbH BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Mirae Corporation wafer test spares Pcs. 40Metron Technology Deutschland GmbH EOL / BE spares M 6CURO Holdings Co., Ltd. wafer test spares Pcs. 30CURO Holdings Co., Ltd. wafer test spares Pcs. 25LOTUS Systems GmbH wet etch spares PC 3DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 2Tetra Engineering Pte Ltd. EOL / BE spares Pcs. 40ADVANTEST Europe GmbH wafer test spares Pcs. 4SHINKAWA LTD. assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1APT GmbH wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 1Micromaster Pte. Ltd. wafer test spares Pcs. 9Mirae Corporation wafer test spares Pcs. 1SMC Pneumatic GmbH wet etch spares PC 10

Page 68: 300MM Spare Parts 5-3-122

SMC Pneumatic GmbH wet etch spares PC 10SMC Pneumatic GmbH wet etch spares PC 3Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 2DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 2DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 5DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1DISCO HI-TEC EUROPE GmbH BE spares others Pcs. 4DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 2DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1FICO BV assembly spares Pcs. 5Laurier, Inc. assembly spares Pcs. 1QUASYS GMBH assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 8Laurier, Inc. assembly spares Pcs. 8Laurier, Inc. assembly spares Pcs. 4Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 4Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 12Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1QUASYS GMBH assembly spares Pcs. 1QUASYS GMBH assembly spares Pcs. 1QUASYS GMBH assembly spares Pcs. 1QUASYS GMBH assembly spares Pcs. 1

Page 69: 300MM Spare Parts 5-3-122

QUASYS GMBH assembly spares Pcs. 2QUASYS GMBH assembly spares Pcs. 1QUASYS GMBH assembly spares Pcs. 8QUASYS GMBH assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 4QUASYS GMBH assembly spares Pcs. 4Laurier, Inc. assembly spares Pcs. 1QUASYS GMBH assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1QUASYS GMBH assembly spares Pcs. 1QUASYS GMBH assembly spares Pcs. 4QUASYS GMBH assembly spares Pcs. 1Tec-Sem wet etch spares PC 1DEK Printing Machines GmbH module tester spares Pcs. 1DISCO HI-TEC EUROPE GmbH EOL / BE spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 3TOWA Europe GmbH EOL / BE spares Pcs. 115Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 11Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2DAGE Semiconductor GmbH assembly spares Pcs. 33DAGE Semiconductor GmbH assembly spares Pcs. 8Kulicke and Soffa assembly spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 10ADVANTEST Europe GmbH wafer test spares Pcs. 130Speedline Technologies GmbH assembly spares Pcs. 9Speedline Technologies GmbH assembly spares Pcs. 2Speedline Technologies GmbH assembly spares Pcs. 2Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 2Speedline Technologies GmbH assembly spares Pcs. 1

Page 70: 300MM Spare Parts 5-3-122

Speedline Technologies GmbH assembly spares Pcs. 2Speedline Technologies GmbH assembly spares Pcs. 2Speedline Technologies GmbH assembly spares Pcs. 2Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 2Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 5Speedline Technologies GmbH assembly spares Pcs. 5Speedline Technologies GmbH assembly spares Pcs. 5Speedline Technologies GmbH assembly spares Pcs. 2Speedline Technologies GmbH assembly spares Pcs. 2Speedline Technologies GmbH assembly spares Pcs. 2Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 1Speedline Technologies GmbH assembly spares Pcs. 3Speedline Technologies GmbH assembly spares Pcs. 2ATV Technologie GmbH BE spares others Pcs. 1ATV Technologie GmbH BE spares others Pcs. 1ATV Technologie GmbH BE spares others Pcs. 1ATV Technologie GmbH BE spares others Pcs. 1ATV Technologie GmbH BE spares others Pcs. 1ATV Technologie GmbH EOL / BE spares Pcs. 1ATV Technologie GmbH BE spares others Pcs. 1ATV Technologie GmbH EOL / BE spares Pcs. 1ATV Technologie GmbH EOL / BE spares Pcs. 1ATV Technologie GmbH BE spares others Pcs. 3ATV Technologie GmbH BE spares others Pcs. 1ATV Technologie GmbH BE spares others Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 3Kulicke and Soffa assembly spares Pcs. 5Kulicke and Soffa assembly spares Pcs. 5Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 4Kulicke and Soffa assembly spares Pcs. 3Kulicke and Soffa assembly spares Pcs. 5Kulicke and Soffa assembly spares Pcs. 2

Page 71: 300MM Spare Parts 5-3-122

Microworld wafer test spares Pcs. 6ADVANTEST Europe GmbH wafer test spares Pcs. 7ADVANTEST Europe GmbH BE spares others Pcs. 5ADVANTEST Europe GmbH BE spares others Pcs. 1ADVANTEST Europe GmbH BE spares others Pcs. 2ADVANTEST Europe GmbH BE spares others Pcs. 3ADVANTEST Europe GmbH BE spares others Pcs. 1ADVANTEST Europe GmbH BE spares others Pcs. 1ADVANTEST Europe GmbH BE spares others Pcs. 1ADVANTEST Europe GmbH BE spares others Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH BE spares others Pcs. 2ADVANTEST Europe GmbH BE spares others Pcs. 2ADVANTEST Europe GmbH BE spares others Pcs. 16ADVANTEST Europe GmbH BE spares others Pcs. 1ADVANTEST Europe GmbH BE spares others Pcs. 200ADVANTEST Europe GmbH BE spares others Pcs. 22ADVANTEST Europe GmbH BE spares others Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 6ADVANTEST Europe GmbH BE spares others Pcs. 5ADVANTEST Europe GmbH BE spares others Pcs. 2ADVANTEST Europe GmbH BE spares others Pcs. 2ADVANTEST Europe GmbH BE spares others Pcs. 30ADVANTEST Europe GmbH BE spares others Pcs. 121ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH BE spares others Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 20Siemens Procurement and wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 7ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 5ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 7ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH BE spares others Pcs. 30ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 1YAMAICHI ELECTRONICS wafer test spares Pcs. 32ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH BE spares others Pcs. 2ADVANTEST Europe GmbH BE spares others Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 10ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH BE spares others Pcs. 1

Page 72: 300MM Spare Parts 5-3-122

YAMAICHI ELECTRONICS wafer test spares Pcs. 50ADVANTEST Europe GmbH BE spares others Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 6ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH BE spares others Pcs. 18ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH BE spares others Pcs. 1AEHR TEST SYSTEMS GMBH BE spares others Pcs. 1AEHR TEST SYSTEMS GMBH BE spares others Pcs. 1AEHR TEST SYSTEMS GMBH BE spares others Pcs. 1AEHR TEST SYSTEMS GMBH BE spares others Pcs. 1AEHR TEST SYSTEMS GMBH BE spares others Pcs. 2AEHR TEST SYSTEMS GMBH wafer test spares Pcs. 1AEHR TEST SYSTEMS GMBH BE spares others Pcs. 2AEHR TEST SYSTEMS GMBH BE spares others Pcs. 2AEHR TEST SYSTEMS GMBH BE spares others Pcs. 9DISCO HI-TEC EUROPE GmbH BE spares others Pcs. 2DISCO HI-TEC EUROPE GmbH BE spares others Pcs. 3DISCO HI-TEC EUROPE GMBH BE spares others Pcs. 5DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 3DISCO HI-TEC EUROPE GmbH BE spares others Pcs. 1KEYENCE DEUTSCHLAND GmbH preassambly spares Pcs. 2DISCO HI-TEC EUROPE GmbH BE spares others Pcs. 1DISCO HI-TEC EUROPE GMBH BE spares others Pcs. 1DISCO HI-TEC EUROPE GMBH BE spares others Pcs. 1DISCO HI-TEC EUROPE GMBH BE spares others Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 8DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 1DISCO HI-TEC EUROPE GmbH BE spares others Pcs. 1DISCO HI-TEC EUROPE GmbH BE spares others Pcs. 3DISCO HI-TEC EUROPE GmbH BE spares others Pcs. 2DISCO HI-TEC EUROPE GMBH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 2IPTE Germany GmbH assembly spares Pcs. 1IPTE Germany GmbH BE spares others Pcs. 1cab Produkttechnik GmbH BE spares others Pcs. 5cab Produkttechnik GmbH assembly spares Pcs. 3ISMECA EUROPE SEMICONDUCT BE spares others Pcs. 1IPTE Germany GmbH BE spares others Pcs. 3cab Produkttechnik GmbH BE spares others Pcs. 4Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, BE spares others Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1

Page 73: 300MM Spare Parts 5-3-122

Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 9Oerlikon Assembly Equipment AG, BE spares others Pcs. 2Oerlikon Assembly Equipment AG, BE spares others Pcs. 2Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 10Oerlikon Assembly Equipment AG, assembly spares Pcs. 20Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 16Oerlikon Assembly Equipment AG, assembly spares Pcs. 4Oerlikon Assembly Equipment AG, assembly spares Pcs. 16Oerlikon Assembly Equipment AG, assembly spares Pcs. 3Oerlikon Assembly Equipment AG, assembly spares Pcs. 3Oerlikon Assembly Equipment AG, assembly spares Pcs. 5Oerlikon Assembly Equipment AG, BE spares others Pcs. 9Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 4Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 3Oerlikon Assembly Equipment AG, BE spares others Pcs. 8Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 13Oerlikon Assembly Equipment AG, BE spares others Pcs. 7Oerlikon Assembly Equipment AG, BE spares others Pcs. 7Oerlikon Assembly Equipment AG, BE spares others Pcs. 5Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1

Page 74: 300MM Spare Parts 5-3-122

Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 3Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Siemens Procurement and BE spares others Pcs. 3Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 3Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 5Schölly Fiberoptic GmbH assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 3Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 11Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 2Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 2Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, BE spares others Pcs. 1RSF Elektronik assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 3Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 3Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 2Primelco AG assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 47Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 2

Page 75: 300MM Spare Parts 5-3-122

VWR International GmbH assembly spares Pcs. 2Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 17Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 8Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 4Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1EKRA assembly spares Pcs. 6EKRA assembly spares Pcs. 6J.Schmalz GmbH assembly spares Pcs. 10J.Schmalz GmbH assembly spares Pcs. 14FICO BV BE spares others Pcs. 15FICO BV BE spares others Pcs. 6FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 3FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 6FICO BV BE spares others Pcs. 20FICO BV BE spares others Pcs. 5FICO BV BE spares others Pcs. 6FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 2FICO BV EOL / BE spares Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 3FICO BV EOL / BE spares Pcs. 47FICO BV assembly spares Pcs. 2FICO BV BE spares others Pcs. 8FICO BV assembly spares Pcs. 2FICO BV assembly spares Pcs. 4FICO BV assembly spares Pcs. 2FICO BV BE spares others Pcs. 2FICO BV assembly spares Pcs. 1FICO BV BE spares others Pcs. 6FICO BV BE spares others Pcs. 2FICO BV assembly spares Pcs. 4FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 4

Page 76: 300MM Spare Parts 5-3-122

FICO BV BE spares others Pcs. 5FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 4FICO BV assembly spares Pcs. 1FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 4FICO BV assembly spares Pcs. 4FICO BV BE spares others Pcs. 16FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 3FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 5FICO BV BE spares others Pcs. 2FICO BV assembly spares Pcs. 7FICO BV assembly spares Pcs. 22FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 15FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 6FICO BV BE spares others Pcs. 12FICO BV BE spares others Pcs. 14FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV assembly spares Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 14FICO BV BE spares others Pcs. 20FICO BV BE spares others Pcs. 24FICO BV BE spares others Pcs. 3FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 1

Page 77: 300MM Spare Parts 5-3-122

FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV assembly spares Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV assembly spares Pcs. 1FICO BV assembly spares Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1Dieter Antrack assembly spares Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV assembly spares Pcs. 1FICO BV BE spares others Pcs. 1FICO BV assembly spares Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV assembly spares Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 5FICO BV BE spares others Pcs. 5FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV assembly spares Pcs. 1FICO BV assembly spares Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 5FICO BV assembly spares Pcs. 11FICO BV assembly spares Pcs. 6FICO BV BE spares others Pcs. 1FICO BV EOL / BE spares Pcs. 2

Page 78: 300MM Spare Parts 5-3-122

FICO BV assembly spares Pcs. 2FICO BV BE spares others Pcs. 4FICO BV assembly spares Pcs. 16FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV assembly spares Pcs. 1FICO BV assembly spares Pcs. 1FICO BV assembly spares Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 9FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 6FICO BV assembly spares Pcs. 5FICO BV assembly spares Pcs. 3FICO BV BE spares others Pcs. 103FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 3FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 16FICO BV BE spares others Pcs. 6FICO BV assembly spares Pcs. 9FICO BV wafer test spares Pcs. 4FICO BV BE spares others Pcs. 8FICO BV assembly spares Pcs. 1FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 3FICO BV wafer test spares Pcs. 8FICO BV BE spares others Pcs. 7FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 7FICO BV BE spares others Pcs. 18FICO BV assembly spares Pcs. 61FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 24FICO BV BE spares others Pcs. 5FICO BV assembly spares Pcs. 8FICO BV assembly spares Pcs. 9FICO BV assembly spares Pcs. 14FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 8FICO BV assembly spares Pcs. 4

Page 79: 300MM Spare Parts 5-3-122

FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 1FICO BV assembly spares Pcs. 1FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 33FICO BV BE spares others Pcs. 2FICO BV assembly spares Pcs. 2FICO BV EOL / BE spares Pcs. 65FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 5FICO BV BE spares others Pcs. 4FICO BV EOL / BE spares Pcs. 5FICO BV BE spares others Pcs. 5FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 81FICO BV BE spares others Pcs. 10FICO BV BE spares others Pcs. 12FICO BV BE spares others Pcs. 12FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 8FICO BV EOL / BE spares Pcs. 5FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 5FICO BV EOL / BE spares Pcs. 2FICO BV BE spares others Pcs. 5FICO BV BE spares others Pcs. 4FICO BV EOL / BE spares Pcs. 5FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 5FICO BV BE spares others Pcs. 3FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 6FICO BV BE spares others Pcs. 3FICO BV BE spares others Pcs. 3FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 1FICO BV EOL / BE spares Pcs. 5FICO BV EOL / BE spares Pcs. 5FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 6FICO BV BE spares others Pcs. 1FICO BV assembly spares Pcs. 28FICO BV wafer test spares Pcs. 9FICO BV EOL / BE spares Pcs. 5FICO BV assembly spares Pcs. 17

Page 80: 300MM Spare Parts 5-3-122

FICO BV assembly spares Pcs. 7FICO BV wafer test spares Pcs. 18FICO BV assembly spares Pcs. 5FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 80FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 8FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 8FICO BV EOL / BE spares Pcs. 1FICO BV EOL / BE spares Pcs. 1FICO BV BE spares others Pcs. 1FICO B.V. - gelöscht EOL / BE spares Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV EOL / BE spares Pcs. 2FICO BV EOL / BE spares Pcs. 1FICO BV EOL / BE spares Pcs. 1FICO BV EOL / BE spares Pcs. 1FICO BV BE spares others Pcs. 2FICO BV EOL / BE spares Pcs. 1FICO BV EOL / BE spares Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 3FICO BV assembly spares Pcs. 1FICO BV wafer test spares Pcs. 23FICO BV BE spares others Pcs. 20FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 2FICO BV EOL / BE spares Pcs. 4FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV EOL / BE spares Pcs. 1FICO BV BE spares others Pcs. 4FICO BV EOL / BE spares Pcs. 1FICO B.V. - gelöscht EOL / BE spares Pcs. 3FICO BV assembly spares Pcs. 1FICO BV BE spares others Pcs. 1FICO B.V. - gelöscht EOL / BE spares Pcs. 1FICO BV assembly spares Pcs. 2FICO BV EOL / BE spares Pcs. 3FICO BV assembly spares Pcs. 2FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 4

Page 81: 300MM Spare Parts 5-3-122

FICO BV BE spares others Pcs. 7FICO BV BE spares others Pcs. 1FICO BV assembly spares Pcs. 5FICO BV assembly spares Pcs. 2FICO BV BE spares others Pcs. 2FICO BV assembly spares Pcs. 1FICO BV assembly spares Pcs. 3FICO BV assembly spares Pcs. 1FICO BV assembly spares Pcs. 2FICO BV assembly spares Pcs. 1FICO BV assembly spares Pcs. 1FICO BV assembly spares Pcs. 1FICO BV assembly spares Pcs. 2FICO BV BE spares others Pcs. 3FICO BV BE spares others Pcs. 3FICO BV BE spares others Pcs. 5FICO BV BE spares others Pcs. 2FICO BV EOL / BE spares Pcs. 6FICO BV EOL / BE spares Pcs. 1FICO BV BE spares others Pcs. 3FICO BV wafer test spares Pcs. 3FICO BV assembly spares Pcs. 2FICO BV BE spares others Pcs. 1FICO BV EOL / BE spares Pcs. 1FICO BV BE spares others Pcs. 1FICO BV EOL / BE spares Pcs. 8FICO BV assembly spares Pcs. 2AIRFLOW Lufttechnik GmbH assembly spares Pcs. 2FICO BV assembly spares Pcs. 3FICO BV BE spares others Pcs. 4FICO BV assembly spares Pcs. 3FICO BV assembly spares Pcs. 3FICO BV BE spares others Pcs. 10FICO BV assembly spares Pcs. 4FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 6FICO BV BE spares others Pcs. 4FICO BV assembly spares Pcs. 7FICO BV assembly spares Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 10FICO BV BE spares others Pcs. 4FICO BV assembly spares Pcs. 8FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 6FICO BV BE spares others Pcs. 2FICO BV assembly spares Pcs. 5FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 4

Page 82: 300MM Spare Parts 5-3-122

FICO BV BE spares others Pcs. 4FICO BV assembly spares Pcs. 2FICO BV assembly spares Pcs. 2FICO BV BE spares others Pcs. 4FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 1FICO BV EOL / BE spares Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV assembly spares Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 2FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 2FICO BV assembly spares Pcs. 1FICO BV BE spares others Pcs. 1FICO BV BE spares others Pcs. 1SMC Pneumatic GmbH BE spares others Pcs. 3FICO BV BE spares others Pcs. 1FICO BV assembly spares Pcs. 2FICO BV assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 2QUASYS GMBH assembly spares Pcs. 1QUASYS GMBH assembly spares Pcs. 2QUASYS AG assembly spares Pcs. 1QUASYS AG assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 3QUASYS GMBH assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 4Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 8

Page 83: 300MM Spare Parts 5-3-122

Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 10Laurier, Inc. assembly spares Pcs. 10Laurier, Inc. assembly spares Pcs. 8Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 4Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 6Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 4Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 4Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 8Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 8Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 4Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 6Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1

Page 84: 300MM Spare Parts 5-3-122

Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 15Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 4Laurier, Inc. assembly spares Pcs. 25Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 3Laurier, Inc. assembly spares Pcs. 3Laurier, Inc. assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 11Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 2POLYPLAS HAMELN GmbH assembly spares Pcs. 37Quasys GmbH assembly spares Pcs. 4Quasys GmbH assembly spares Pcs. 3Rommel GmbH assembly spares Pcs. 2Rommel GmbH assembly spares Pcs. 1Rommel GmbH assembly spares Pcs. 2Rommel GmbH assembly spares Pcs. 1Rommel GmbH assembly spares Pcs. 2Rommel GmbH assembly spares Pcs. 2Rommel GmbH assembly spares Pcs. 1Rommel GmbH assembly spares Pcs. 2Rommel GmbH assembly spares Pcs. 2Rommel GmbH assembly spares Pcs. 2OMRON Electronics GmbH BE spares others Pcs. 2OMRON Electronics GmbH BE spares others Pcs. 5OMRON Electronics GmbH BE spares others Pcs. 3Schlumberger Systems GmbH BE spares others Pcs. 18Schmersal GmbH & Co. BE spares others Pcs. 18Schlumberger Systems GmbH BE spares others Pcs. 9MacroSolutions Europe BE spares others Pcs. 4Schlumberger Systems GmbH BE spares others Pcs. 2OMRON Electronics GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 4Schlumberger Systems GmbH BE spares others Pcs. 4

Page 85: 300MM Spare Parts 5-3-122

Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 3Schlumberger Systems GmbH BE spares others Pcs. 4Schlumberger Systems GmbH BE spares others Pcs. 4Schlumberger Systems GmbH BE spares others Pcs. 4Schlumberger Systems GmbH BE spares others Pcs. 4Schlumberger Systems GmbH BE spares others Pcs. 6Schlumberger Systems GmbH BE spares others Pcs. 29Schlumberger Systems GmbH BE spares others Pcs. 12Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 4Schlumberger Systems GmbH BE spares others Pcs. 3Schlumberger Systems GmbH BE spares others Pcs. 4Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 12Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 7Schlumberger Systems GmbH BE spares others Pcs. 7Schlumberger Systems GmbH BE spares others Pcs. 5Schlumberger Systems GmbH BE spares others Pcs. 3Schlumberger Systems GmbH BE spares others Pcs. 3Schlumberger Systems GmbH BE spares others Pcs. 3Schlumberger Systems GmbH BE spares others Pcs. 6Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 5MacroSolutions Europe preassambly spares Pcs. 1MacroSolutions Europe preassambly spares Pcs. 4Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 3Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 3Schlumberger Systems GmbH BE spares others Pcs. 18Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 6Schlumberger Systems GmbH BE spares others Pcs. 14Schlumberger Systems GmbH BE spares others Pcs. 3Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 19Schlumberger Systems GmbH BE spares others Pcs. 5Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 4Schlumberger Systems GmbH BE spares others Pcs. 4MacroSolutions Europe preassambly spares Pcs. 1

Page 86: 300MM Spare Parts 5-3-122

MacroSolutions Europe preassambly spares Pcs. 9MacroSolutions Europe BE spares others Pcs. 12Qimonda Portugal S.A. BE spares others Pcs. 3MacroSolutions Europe BE spares others Pcs. 1MacroSolutions Europe preassambly spares Pcs. 2Qimonda Portugal S.A. BE spares others Pcs. 2MacroSolutions Europe preassambly spares Pcs. 3Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 10Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 5Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 1OMRON Electronics GmbH BE spares others Pcs. 7Schlumberger Systems GmbH BE spares others Pcs. 3Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 7Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 8Schlumberger Systems GmbH BE spares others Pcs. 27Schlumberger Systems GmbH BE spares others Pcs. 20Schlumberger Systems GmbH BE spares others Pcs. 4MacroSolutions Europe BE spares others Pcs. 3MacroSolutions Europe BE spares others Pcs. 5MacroSolutions Europe BE spares others Pcs. 3MacroSolutions Europe BE spares others Pcs. 1KEYENCE DEUTSCHLAND GmbH BE spares others Pcs. 2IGUS GmbH BE spares others Pcs. 2IGUS GmbH BE spares others Pcs. 2IGUS GmbH BE spares others Pcs. 22IGUS GmbH BE spares others Pcs. 12IGUS GmbH BE spares others Pcs. 11IGUS GmbH BE spares others Pcs. 11IGUS GmbH BE spares others Pcs. 23IGUS GmbH BE spares others Pcs. 7IGUS GmbH BE spares others Pcs. 16IGUS GmbH BE spares others Pcs. 2IGUS GmbH BE spares others Pcs. 2IGUS GmbH BE spares others Pcs. 10

Page 87: 300MM Spare Parts 5-3-122

THK GmbH BE spares others Pcs. 13ime GmbH BE spares others Pcs. 5MacroSolutions Europe BE spares others Pcs. 1Qimonda Portugal S.A. BE spares others Pcs. 4Qimonda Portugal S.A. BE spares others Pcs. 4MacroSolutions Europe BE spares others Pcs. 2MacroSolutions Europe preassambly spares Pcs. 4MacroSolutions Europe BE spares others Pcs. 3MacroSolutions Europe BE spares others Pcs. 3ACAL GmbH burn in BE spares Pcs. 8HEGA-APPARATEBAU GMBH BE spares others Pcs. 2HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 1I-Center Dresden BE spares others Pcs. 4HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 2HEGA-APPARATEBAU GMBH BE spares others Pcs. 2HEGA-APPARATEBAU GMBH BE spares others Pcs. 3I-Center Dresden BE spares others Pcs. 10HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 4HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 1I-Center Dresden BE spares others Pcs. 6HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 1HEGA-APPARATEBAU GMBH BE spares others Pcs. 4HEGA-APPARATEBAU GMBH BE spares others Pcs. 2HEGA-APPARATEBAU GMBH BE spares others Pcs. 2HEGA-APPARATEBAU GMBH BE spares others Pcs. 2GERINGER HALBLEITERTECHNI BE spares others Pcs. 3GERINGER HALBLEITERTECHNI BE spares others Pcs. 2GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI EOL / BE spares Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 2GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 2GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 5

Page 88: 300MM Spare Parts 5-3-122

GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 2GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 2GERINGER HALBLEITERTECHNI BE spares others Pcs. 2GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 2GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 1GERINGER HALBLEITERTECHNI BE spares others Pcs. 1INGENIEURBÜRO UVT BE spares others Pcs. 1Wälzlagertechnik GmbH BE spares others Pcs. 2DEK Printing Machines GmbH module tester spares Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 2DEK Printing Machines GmbH module tester spares Pcs. 3DEK Printing Machines GmbH module tester spares Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 8DEK Printing Machines GmbH module tester spares Pcs. 2DEK Printing Machines GmbH module tester spares Pcs. 2DEK Printing Machines GmbH module tester spares Pcs. 2DEK Printing Machines GmbH module tester spares Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1Wälzlagertechnik GmbH BE spares others Pcs. 2DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK PRINTING MACHINES GMB BE spares others Pcs. 1

Page 89: 300MM Spare Parts 5-3-122

DEK PRINTING MACHINES GMB BE spares others Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 1DEK Printing Machines GmbH module tester spares Pcs. 1WENTWORTH Industries GmbH BE spares others Pcs. 1WENTWORTH Industries GmbH BE spares others Pcs. 1WENTWORTH Industries GmbH BE spares others Pcs. 1Breuell & Hilgenfeldt GmbH assembly spares Pcs. 1KOLB Fertigungstechnik GmbH BE spares others Pcs. 2KOLB Fertigungstechnik GmbH BE spares others Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares PAK 1TOWA Europe GmbH EOL / BE spares Pcs. 1THK GmbH BE spares others Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 2TOWA Europe GmbH EOL / BE spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 10TOWA Europe GmbH EOL / BE spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1OMRON Electronics GmbH BE spares others Pcs. 2OMRON Electronics GmbH BE spares others Pcs. 2KEYENCE DEUTSCHLAND GmbH BE spares others Pcs. 1OMRON Electronics GmbH BE spares others Pcs. 2OMRON Electronics GmbH BE spares others Pcs. 2OMRON Electronics GmbH EOL / BE spares Pcs. 2KEYENCE DEUTSCHLAND GmbH BE spares others Pcs. 2Panasonic Electric Works BE spares others Pcs. 2DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 11DISCO HI-TEC EUROPE GmbH assembly spares M 19DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 9TOWA Europe GmbH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1HIB GmbH assembly spares Pcs. 7TOWA EUROPE GMBH EOL / BE spares Pcs. 4TOWA EUROPE GMBH EOL / BE spares Pcs. 2DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 4TOWA EUROPE GMBH EOL / BE spares Pcs. 4TOWA Europe GmbH EOL / BE spares Pcs. 6TOWA Europe GmbH EOL / BE spares Pcs. 6TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1Towa Intercon Technology Inc. BE spares others Pcs. 3TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1

Page 90: 300MM Spare Parts 5-3-122

TOWA EUROPE GMBH EOL / BE spares Pcs. 2TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 2DISCO HI-TEC EUROPE GmbH BE spares others Pcs. 2DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 8DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 14TOWA EUROPE GMBH EOL / BE spares Pcs. 2TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 4TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 19TOWA Europe GmbH EOL / BE spares Pcs. 2TOWA Europe GmbH EOL / BE spares Pcs. 3TOWA Europe GmbH EOL / BE spares Pcs. 3TOWA Europe GmbH EOL / BE spares Pcs. 4TOWA Europe GmbH EOL / BE spares Pcs. 3TOWA Europe GmbH EOL / BE spares Pcs. 7TOWA Europe GmbH EOL / BE spares Pcs. 1IKO Nippon Thompson Europe B.V. EOL / BE spares Pcs. 9TOWA Europe GmbH EOL / BE spares Pcs. 4TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 15DISCO HI-TEC EUROPE GmbH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1TOWA EUROPE GMBH EOL / BE spares Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 8Mühlbauer AG BE spares others Pcs. 8Panasonic Electric Works BE spares others Pcs. 6Mühlbauer AG BE spares others Pcs. 19Mühlbauer AG BE spares others Pcs. 9Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 13Mühlbauer AG BE spares others Pcs. 1OMRON Electronics GmbH BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 13Mühlbauer AG BE spares others Pcs. 17Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 15

Page 91: 300MM Spare Parts 5-3-122

Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 6Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 36Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 262Panasonic Electric Works BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 6Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 8Mühlbauer AG BE spares others Pcs. 5Mühlbauer AG BE spares others Pcs. 5Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 10Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 7Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 6Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3

Page 92: 300MM Spare Parts 5-3-122

Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 5Mühlbauer AG BE spares others Pcs. 7Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 10Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 15Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 25Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 19Mühlbauer AG BE spares others Pcs. 14Mühlbauer AG BE spares others Pcs. 6Mühlbauer AG BE spares others Pcs. 12Mühlbauer AG BE spares others Pcs. 13Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 2

Page 93: 300MM Spare Parts 5-3-122

Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 8Mühlbauer AG BE spares others Pcs. 7Mühlbauer AG BE spares others Pcs. 8Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 5Mühlbauer AG BE spares others Pcs. 8Mühlbauer AG BE spares others Pcs. 12Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 6Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 8Mühlbauer AG BE spares others Pcs. 10Mühlbauer AG BE spares others Pcs. 24Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 8Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 19Mühlbauer AG BE spares others Pcs. 19Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 32Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2

Page 94: 300MM Spare Parts 5-3-122

Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 5Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 7Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 5Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 22Mühlbauer AG BE spares others Pcs. 8Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 4

Page 95: 300MM Spare Parts 5-3-122

Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 5Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 7Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 313Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 5Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 1

Page 96: 300MM Spare Parts 5-3-122

Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 6Mühlbauer AG BE spares others Pcs. 7Mühlbauer AG BE spares others Pcs. 5Mühlbauer AG BE spares others Pcs. 7Mühlbauer AG BE spares others Pcs. 6Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 14Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 4Maxon Motor GmnH BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 7Mühlbauer AG BE spares others Pcs. 7Mühlbauer AG BE spares others Pcs. 6Mühlbauer AG BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 9Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 9Mühlbauer AG BE spares others Pcs. 11THK GmbH BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 2Mühlbauer AG BE spares others Pcs. 8Mühlbauer AG BE spares others Pcs. 2ROFIN-SINAR Laser GmbH BE spares others Pcs. 1ROFIN-SINAR Laser GmbH BE spares others Pcs. 1ROFIN-SINAR Laser GmbH BE spares others Pcs. 1ROFIN-SINAR Laser GmbH BE spares others Pcs. 2ROFIN-SINAR Laser GmbH BE spares others Pcs. 1ROFIN-SINAR Laser GmbH BE spares others Pcs. 1ROFIN-SINAR Laser GmbH BE spares others Pcs. 1Mühlbauer AG BE spares others Pcs. 1ROFIN-SINAR Laser GmbH BE spares others Pcs. 23M Deutschland GmbH BE spares others Pcs. 30ROFIN-SINAR Laser GmbH BE spares others Pcs. 1ROFIN-SINAR Laser GmbH BE spares others Pcs. 1ROFIN-SINAR Laser GmbH BE spares others Pcs. 3ROFIN-SINAR Laser GmbH BE spares others Pcs. 1ROFIN-SINAR Laser GmbH BE spares others Pcs. 1ROFIN-SINAR Laser GmbH BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2

BE spares others Pcs. 3BE spares others Pcs. 12BE spares others Pcs. 11BE spares others Pcs. 12

Page 97: 300MM Spare Parts 5-3-122

RGS Technik GmbH BE spares others M 9RGS Technik GmbH assembly spares M 7OERLIKON ASSEMBLY EQUIPME BE spares others Pcs. 3DAGE SEMICONDUCTOR GMBH assembly spares Pcs. 1DAGE Semiconductor GmbH assembly spares Pcs. 1Fuchs Umwelttechnik EOL / BE spares Pcs. 1ICOS Vision Systems nv EOL / BE spares Pcs. 3ICOS Vision Systems nv BE spares others Pcs. 1ICOS Vision Systems nv EOL / BE spares Pcs. 4ICOS Vision Systems nv BE spares others Pcs. 1PROMINENT DOSIERTECHNIK BE spares others Pcs. 2PROMINENT DOSIERTECHNIK BE spares others Pcs. 2PROMINENT DOSIERTECHNIK BE spares others Pcs. 2nanotec international GmbH wafer test spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 10nanotec international GmbH wafer test spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 2SIKAMA INTERNATIONAL INC. BE spares others Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 7Kulicke and Soffa assembly spares Pcs. 13Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 4Kulicke and Soffa assembly spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 4nanotec international GmbH wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1

Page 98: 300MM Spare Parts 5-3-122

Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 4nanotec international GmbH wafer test spares Pcs. 7Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 4Mirae Corporation wafer test spares Pcs. 8Mirae Corporation wafer test spares Pcs. 8Mirae Corporation wafer test spares Pcs. 64Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 20Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 4Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 8Mirae Corporation wafer test spares Pcs. 8Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 3nanotec international GmbH wafer test spares Pcs. 3OMRON Electronics GmbH BE spares others Pcs. 4Mirae Corporation wafer test spares Pcs. 4Mirae Corporation wafer test spares Pcs. 1Panasonic Electric Works BE spares others Pcs. 5Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1

Page 99: 300MM Spare Parts 5-3-122

Mirae Corporation wafer test spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 7Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 3Mirae Corporation wafer test spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 4Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 3Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 2Mirae Corporation wafer test spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1

Page 100: 300MM Spare Parts 5-3-122

Mirae Corporation wafer test spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 3Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 1nanotec international GmbH wafer test spares SAT 2Mirae Corporation wafer test spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 3nanotec international GmbH wafer test spares Pcs. 1Dieter Antrack wafer test spares Pcs. 4Mirae Corporation wafer test spares Pcs. 4Mirae Corporation wafer test spares Pcs. 6nanotec international GmbH wafer test spares Pcs. 3nanotec international GmbH wafer test spares Pcs. 4Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Mirae Corporation wafer test spares Pcs. 1Rehm Thermal Systems GmbH assembly spares Pcs. 5Rehm Thermal Systems GmbH assembly spares Pcs. 1Rehm Thermal Systems GmbH assembly spares Pcs. 1Rehm Thermal Systems GmbH BE spares others Pcs. 1Rehm Thermal Systems GmbH BE spares others Pcs. 2Rehm Thermal Systems GmbH BE spares others Pcs. 2Rehm Thermal Systems GmbH BE spares others Pcs. 2REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH assembly spares Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 6REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1Rehm Thermal Systems GmbH assembly spares Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1Rehm Thermal Systems GmbH BE spares others Pcs. 1

Page 101: 300MM Spare Parts 5-3-122

REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1Rehm Thermal Systems GmbH BE spares others Pcs. 1Rehm Thermal Systems GmbH assembly spares Pcs. 5REHM THERMAL SYSTEMS GMBH assembly spares Pcs. 1REHM THERMAL SYSTEMS GMBH assembly spares Pcs. 1Rehm Thermal Systems GmbH BE spares others Pcs. 1REHM THERMAL SYSTEMS GMBH BE spares others Pcs. 1Distrelec Schuricht GmbH BE spares others Pcs. 2Siemens AG assembly spares Pcs. 5Siemens AG assembly spares Pcs. 6Siemens AG assembly spares Pcs. 2Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 2Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 2Siemens AG assembly spares Pcs. 2Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 2Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 2Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 2Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 5Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 2Siemens AG assembly spares Pcs. 2Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 3Siemens AG assembly spares Pcs. 2

Page 102: 300MM Spare Parts 5-3-122

Siemens AG assembly spares Pcs. 2Siemens AG assembly spares Pcs. 2Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 5Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 2Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 1Siemens AG assembly spares Pcs. 2SIEMENS AG assembly spares Pcs. 1BAUMER GmbH assembly spares Pcs. 5Dieter Antrack BE spares others Pcs. 10RVSI Electronics BE spares others Pcs. 1RVSI Electronics BE spares others Pcs. 6RVSI Electronics BE spares others Pcs. 4ADVANTEST Europe GmbH BE spares others Pcs. 1RVSI ELECTRONICS BE spares others Pcs. 1Bürkert GmbH & Co. KG BE spares others Pcs. 1ALMATEC Maschinenbau GmbH wet etch spares PC 2Tyne Property Developments Ltd. wet etch spares PC 43BAUMER GmbH wet etch spares PC 3Finder-Relais GmbH wet etch spares PC 7Metron Technology Deutschland GmbH wet etch spares PC 3Metron Technology Deutschland GmbH wet etch spares PC 9Metron Technology Deutschland GmbH wet etch spares PC 2ADVANTEST Europe GmbH wafer test spares Pcs. 3APT GmbH wafer test spares Pcs. 104ADVANTEST Europe GmbH wafer test spares Pcs. 10ADVANTEST Europe GmbH wafer test spares Pcs. 1636ADVANTEST Europe GmbH wafer test spares Pcs. 60ADVANTEST Europe GmbH wafer test spares Pcs. 7ADVANTEST Europe GmbH wafer test spares Pcs. 2705ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 66

Page 103: 300MM Spare Parts 5-3-122

ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 64ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 195ADVANTEST Europe GmbH wafer test spares Pcs. 956ADVANTEST Europe GmbH wafer test spares Pcs. 2418ADVANTEST Europe GmbH wafer test spares Pcs. 166ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 9ADVANTEST Europe GmbH wafer test spares Pcs. 1086ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 5ADVANTEST Europe GmbH wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 2ADVANTEST Europe GmbH wafer test spares Pcs. 6ADVANTEST Europe GmbH wafer test spares Pcs. 26ADVANTEST Europe GmbH wafer test spares Pcs. 3ADVANTEST Europe GmbH wafer test spares Pcs. 7ADVANTEST Europe GmbH wafer test spares Pcs. 32ADVANTEST Europe GmbH wafer test spares Pcs. 75ADVANTEST Europe GmbH wafer test spares Pcs. 38ADVANTEST Europe GmbH wafer test spares Pcs. 1155ADVANTEST Europe GmbH wafer test spares Pcs. 1196ADVANTEST Europe GmbH wafer test spares Pcs. 616ADVANTEST Europe GmbH wafer test spares Pcs. 1214ADVANTEST Europe GmbH wafer test spares Pcs. 478HTT - High Tech Trade GmbH wafer test spares Pcs. 2078ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 12ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 1YAMAICHI ELECTRONICS wafer test spares Pcs. 4ADVANTEST Europe GmbH wafer test spares Pcs. 1ADVANTEST Europe GmbH wafer test spares Pcs. 30ADVANTEST Europe GmbH wafer test spares Pcs. 30CURO Holdings Co., Ltd. wafer test spares Pcs. 8452ADVANTEST Europe GmbH wafer test spares Pcs. 1444ADVANTEST Europe GmbH wafer test spares Pcs. 768ADVANTEST Europe GmbH wafer test spares Pcs. 268ADVANTEST Europe GmbH wafer test spares Pcs. 5485ADVANTEST Europe GmbH wafer test spares Pcs. 2610ADVANTEST Europe GmbH wafer test spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 3IPTE Germany GmbH assembly spares Pcs. 40Oerlikon Assembly Equipment AG, assembly spares Pcs. 75Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 8Oerlikon Assembly Equipment AG, assembly spares Pcs. 19

Page 104: 300MM Spare Parts 5-3-122

Oerlikon Assembly Equipment AG, assembly spares Pcs. 13Oerlikon Assembly Equipment AG, assembly spares Pcs. 8Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 57Oerlikon Assembly Equipment AG, assembly spares Pcs. 12Oerlikon Assembly Equipment AG, assembly spares Pcs. 18Oerlikon Assembly Equipment AG, assembly spares Pcs. 6Oerlikon Assembly Equipment AG, assembly spares Pcs. 3DEG DEUTSCHE ELEKTRO-GRUPPE assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 3Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 10Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 2Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Thermocoax GmbH assembly spares Pcs. 3Oerlikon Assembly Equipment AG, assembly spares Pcs. 9Oerlikon Assembly Equipment AG, assembly spares Pcs. 4MECHANISCHE WERKSTATT FLEISCHER assembly spares Pcs. 11Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 3Oerlikon Assembly Equipment AG, assembly spares Pcs. 6EKRA assembly spares Pcs. 4EKRA assembly spares Pcs. 38EKRA assembly spares Pcs. 3FICO BV assembly spares Pcs. 12FICO BV assembly spares Pcs. 2FICO BV wafer test spares Pcs. 1FICO BV wafer test spares Pcs. 2FICO BV assembly spares Pcs. 6FICO BV assembly spares Pcs. 49FICO BV assembly spares Pcs. 4FICO BV assembly spares Pcs. 2FICO BV wafer test spares Pcs. 2FICO BV assembly spares Pcs. 2FICO BV wafer test spares Pcs. 4

Page 105: 300MM Spare Parts 5-3-122

FICO BV wafer test spares Pcs. 6FICO BV assembly spares Pcs. 4FICO BV wafer test spares Pcs. 19FICO BV EOL / BE spares Pcs. 4FICO BV wafer test spares Pcs. 5FICO BV wafer test spares Pcs. 2FICO BV wafer test spares Pcs. 2FICO BV EOL / BE spares Pcs. 5FICO BV wafer test spares Pcs. 40FICO BV wafer test spares Pcs. 16FICO BV wafer test spares Pcs. 2FICO BV EOL / BE spares Pcs. 6FICO BV EOL / BE spares Pcs. 8FICO BV wafer test spares Pcs. 10FICO BV EOL / BE spares Pcs. 9FICO BV EOL / BE spares Pcs. 2FICO BV wafer test spares Pcs. 2FICO BV wafer test spares Pcs. 2FICO BV EOL / BE spares Pcs. 7FICO BV wafer test spares Pcs. 7FICO BV wafer test spares Pcs. 2FICO BV wafer test spares Pcs. 9FICO BV wafer test spares Pcs. 9FICO B.V. - gelöscht EOL / BE spares Pcs. 10FICO BV wafer test spares Pcs. 1FICO BV EOL / BE spares Pcs. 1FICO BV EOL / BE spares Pcs. 3FICO BV EOL / BE spares Pcs. 18FICO BV assembly spares Pcs. 1FICO BV EOL / BE spares Pcs. 13FICO BV wafer test spares Pcs. 2FICO BV assembly spares Pcs. 7FICO BV assembly spares Pcs. 7FICO BV assembly spares Pcs. 9FICO BV wafer test spares Pcs. 3FICO BV wafer test spares Pcs. 1FICO BV assembly spares Pcs. 6FICO BV wafer test spares Pcs. 6FICO BV assembly spares Pcs. 3FICO BV wafer test spares Pcs. 2FICO BV assembly spares Pcs. 2FICO BV wafer test spares Pcs. 1FICO BV wafer test spares Pcs. 2FICO BV EOL / BE spares Pcs. 18FICO BV assembly spares Pcs. 1FICO BV wafer test spares Pcs. 9FICO BV assembly spares Pcs. 4FICO BV assembly spares Pcs. 6FICO BV wafer test spares Pcs. 2FICO BV EOL / BE spares Pcs. 3FICO BV wafer test spares Pcs. 1

Page 106: 300MM Spare Parts 5-3-122

FICO BV assembly spares Pcs. 7FICO BV wafer test spares Pcs. 52FICO BV wafer test spares Pcs. 2FICO BV assembly spares Pcs. 6FICO BV assembly spares Pcs. 1FICO BV EOL / BE spares Pcs. 2FICO BV wafer test spares Pcs. 3FICO BV wafer test spares Pcs. 2FICO BV assembly spares Pcs. 4FICO BV wafer test spares Pcs. 20FICO BV wafer test spares Pcs. 4FICO BV wafer test spares Pcs. 2Laurier, Inc. assembly spares Pcs. 1Laurier, Inc. assembly spares Pcs. 5QUASYS GMBH assembly spares Pcs. 6QUASYS GMBH assembly spares Pcs. 24QUASYS AG assembly spares Pcs. 33QUASYS AG assembly spares Pcs. 22QUASYS AG assembly spares Pcs. 80QUASYS GMBH assembly spares Pcs. 3QUASYS AG assembly spares Pcs. 2Laurier, Inc. assembly spares Pcs. 3QUASYS GMBH assembly spares Pcs. 2QUASYS GMBH assembly spares Pcs. 2QUASYS GMBH assembly spares Pcs. 1QUASYS GMBH assembly spares Pcs. 1QUASYS GMBH assembly spares Pcs. 1QUASYS AG assembly spares Pcs. 1QUASYS AG assembly spares Pcs. 1QUASYS AG assembly spares Pcs. 1QUASYS GMBH assembly spares Pcs. 1QUASYS AG assembly spares Pcs. 60QUASYS AG assembly spares Pcs. 84QUASYS AG assembly spares Pcs. 20Micro-Mechanics AG assembly spares Pcs. 40QUASYS AG assembly spares Pcs. 3QUASYS AG assembly spares Pcs. 7QUASYS AG assembly spares Pcs. 86QUASYS AG assembly spares Pcs. 19QUASYS AG assembly spares Pcs. 1QUASYS AG assembly spares Pcs. 80QUASYS AG assembly spares Pcs. 100QUASYS AG assembly spares Pcs. 1Quasys GmbH assembly spares Pcs. 58Quasys GmbH assembly spares Pcs. 60Quasys GmbH assembly spares Pcs. 71Quasys GmbH assembly spares Pcs. 96Quasys GmbH assembly spares Pcs. 30Quasys GmbH assembly spares Pcs. 20Quasys GmbH assembly spares Pcs. 35Schlumberger Systems GmbH BE spares others Pcs. 5

Page 107: 300MM Spare Parts 5-3-122

Schlumberger Systems GmbH BE spares others Pcs. 3Schlumberger Systems GmbH BE spares others Pcs. 4Schlumberger Systems GmbH BE spares others Pcs. 65Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 3MacroSolutions Europe preassambly spares Pcs. 4Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 4Schlumberger Systems GmbH BE spares others Pcs. 5Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 3Schlumberger Systems GmbH BE spares others Pcs. 80Schlumberger Systems GmbH BE spares others Pcs. 1Schlumberger Systems GmbH BE spares others Pcs. 2Schlumberger Systems GmbH BE spares others Pcs. 1Scientific Technologies GmbH BE spares others Pcs. 2MacroSolutions Europe preassambly spares Pcs. 8FIPA GmbH BE spares others Pcs. 97ASYS GmbH assembly spares Pcs. 5ASYS GmbH assembly spares Pcs. 3TOWA Europe GmbH EOL / BE spares Pcs. 2DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 4DISCO HI-TEC EUROPE GmbH preassambly spares Pcs. 8DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 2DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 4DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 2DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 7DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 4DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 2DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1DISCO HI-TEC EUROPE GmbH assembly spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 31TOWA Europe GmbH EOL / BE spares Pcs. 3TOWA Europe GmbH EOL / BE spares Pcs. 4TOWA Europe GmbH EOL / BE spares Pcs. 3TOWA Europe GmbH EOL / BE spares Pcs. 18TOWA Europe GmbH EOL / BE spares Pcs. 2TOWA Europe GmbH EOL / BE spares Pcs. 3Mühlbauer AG BE spares others Pcs. 20

Page 108: 300MM Spare Parts 5-3-122

Mühlbauer AG BE spares others Pcs. 4Mühlbauer AG BE spares others Pcs. 15Mühlbauer AG BE spares others Pcs. 6Mühlbauer AG BE spares others Pcs. 3Mühlbauer AG BE spares others Pcs. 4ROFIN-SINAR Laser GmbH BE spares others Pcs. 3ROFIN-SINAR Laser GmbH BE spares others Pcs. 88DAGE Electronic Europa assembly spares Pcs. 7DAGE Electronic Europa assembly spares Pcs. 10DAGE Semiconductor GmbH assembly spares Pcs. 21Fuchs Umwelttechnik EOL / BE spares Pcs. 2Fuchs Umwelttechnik EOL / BE spares Pcs. 7Fuchs Umwelttechnik EOL / BE spares Pcs. 1Fuchs Umwelttechnik EOL / BE spares Pcs. 8Fuchs Umwelttechnik EOL / BE spares Pcs. 3Fuchs Umwelttechnik EOL / BE spares Pcs. 1AVL Aloé Verpackungslösungen module tester spares M 9AVL Aloé Verpackungslösungen module tester spares M 4Speedline Technologies GmbH assembly spares Pcs. 6Kulicke and Soffa assembly spares Pcs. 10Kulicke and Soffa assembly spares Pcs. 1Sommer Automatic GmbH & Co.KG assembly spares Pcs. 54Kulicke and Soffa assembly spares Pcs. 24Kulicke and Soffa assembly spares Pcs. 3Kulicke and Soffa assembly spares Pcs. 4Mirae Corporation wafer test spares Pcs. 4nanotec international GmbH wafer test spares Pcs. 1nanotec international GmbH wafer test spares Pcs. 2APT GmbH wafer test spares Pcs. 2APT GmbH wafer test spares Pcs. 3APT GmbH wafer test spares Pcs. 2APT GmbH wafer test spares Pcs. 2nanotec international GmbH wafer test spares Pcs. 2Rehm Thermal Systems GmbH assembly spares Pcs. 8Rehm Thermal Systems GmbH assembly spares Pcs. 2VWR International GmbH assembly spares Pcs. 6Rehm Thermal Systems GmbH assembly spares Pcs. 1Siemens AG assembly spares Pcs. 19Siemens AG assembly spares Pcs. 16Siemens AG assembly spares Pcs. 17Siemens AG assembly spares Pcs. 118Siemens AG assembly spares Pcs. 106Siemens AG assembly spares Pcs. 102Siemens AG assembly spares Pcs. 54Siemens AG assembly spares Pcs. 30Siemens AG assembly spares Pcs. 16YAMAICHI ELECTRONICS wafer test spares Pcs. 84YAMAICHI ELECTRONICS wafer test spares Pcs. 72MacroSolutions Europe preassambly spares Pcs. 2MacroSolutions Europe preassambly spares Pcs. 3HIB GmbH BE spares others Pcs. 2

Page 109: 300MM Spare Parts 5-3-122

HIB GmbH BE spares others Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Oerlikon Assembly Equipment AG, assembly spares Pcs. 4Oerlikon Assembly Equipment AG, assembly spares Pcs. 1Farnell GmbH BE spares others Pcs. 1RS Components GmbH BE spares others Pcs. 3Towa Intercon Technology Inc. assembly spares Pcs. 1Towa Intercon Technology Inc. BE spares others Pcs. 1Towa Intercon Technology Inc. BE spares others Pcs. 1Towa Intercon Technology Inc. assembly spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 1Towa Intercon Technology Inc. assembly spares Pcs. 1TOWA Europe GmbH EOL / BE spares Pcs. 1Farnell GmbH BE spares others Pcs. 2Towa Intercon Technology Inc. assembly spares Pcs. 5Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 7Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 3Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1HIB GmbH BE spares others Pcs. 1Farnell GmbH assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1

Page 110: 300MM Spare Parts 5-3-122

Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 2Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 5Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 1Kulicke and Soffa assembly spares Pcs. 5Kulicke and Soffa assembly spares SAT 1Kulicke and Soffa assembly spares Pcs. 4

Page 111: 300MM Spare Parts 5-3-122

Material # Supplier P/N Description

6000205 1647790 CABLE FLAG FARADAY BIAS6000241 AF159 TEMPERATURE CONTROLLER FÜR T1086000335 CWUA0S0S1 Microgard Minichem DPR/L6000366 245584-R (C) RETAIN. RING UNTERT. FESTSt. GROOV.ÜBERA6000737 553-21311-RW MATCHING NTWK,ICP_HT6000767 APRPP-2-PPUUU-L450Schwimmer Magnetschalter PP6001578 173454 MAGNETVENTIL CPA10-M1H-5/3-GS6002068 253782-R Gripper Rob2 repariert6002402 NOW-SC-23-21-22 SMARTCAP CLOSURE UNIVERSAL6002691 0411700 Spannfutter f. Eurostar Power Basic6002800 0021-18829 PLUG, NF3 CHANNEL, 300SE6002885 2009502-001 Inserts pumping liner6002886 815019-641 Wafer Lift Pins6003135 0021-15538 CLAMP,PEEK, 300MM, WALKING BEAM, CLEAN6003274 4022.486.87001 Standart DOE15 Holder 5 Slot6003275 4022.486.87041 Dipole40xDOE19 Holder 16 Slot6003276 4022.486.86191 cQuad20 DOE02 Holder 5 Slot6003293 4022.436.43051 ASML POWERSUPPLY PRIM. SWITCHER24V KNIEL6003550 7200-016711 ASSY-LAMP-HALOGEN6003551 9400-016393 LAMP XENON 9010T - Nanometrics6003593 4022.481.66871 ASML ACC WATERPUMP6003709 815012-210 O-Ring VITON, BROWN, 11.484 ID X .139W6003754 815003-197 Retainer Gas Kit 1/4 VCR6003755 201727 O-Ring 277 V756003756 701783 O-Ring - Chamber LID6003757 2013556-00 Zahnriemen6003760 7003-100-0012 GLAS BURETTE6003763 1000-116-0200 BLOCK BOTTOM GLASS CELL6003764 1000-117-0200 BLOCK TOP GLAS CELL6003980 4022.471.63637 Generic Power Amplifier PPCA6003981 4022.436.87251 Prim.Switch 5V 12A+/-15V2A 8TE6003982 4022.471.61433 AT IM REMA2 RP PCA6003983 4022.471.61421 AT IM REMA1 RP PCA6003985 4022.471.59692 AT LIMMS safety B-spec6004360 M0240-01530-815G O-Ring Quickconnect 15,3 x 2,4 mm6004421 SERV.436.45451 BXP SHUTTER ASSY6004564 Futur 20T-C9 Doppelmembranpumpe f. C9 vorbereitet6004961 SERV.502.27654 CCM.Remote Control Box6004962 SERV.502.27877 CCM EL POS.Sensor in Bracket Assy6004963 SERV.470.0554 Turret ROT Sensor Assy6004964 SERV.480.92251 Elevator Timing Belt Zahnriemen6004965 SERV.456.20541 Window Holder Subassy f. Entrance window6004966 SERV.472.3784 WS SS to LOS Stage Fibre cable assy6005063 11301397230000 Vacuum Distributor 3300 / INS 30006005280 HCX001D6V Drucktransducer6005322 FF06-1/2AAM Feinfilter kompl. bis 80°C6005425 RM60 HDC-Tip

Page 112: 300MM Spare Parts 5-3-122

6005472 4022.455.76223 UNICOM / DOMA Plate aus FOT360-016005522 GIIS-303mm-R RETAIN. RING UNTERT. GIIS-303mm-R6005604 1010-3406 Drive Motor, Low Profile Track6005697 KL6501 PC-MINI-TASTATUR Keysonic ACK-5956005774 3060-00275 BRG# SS 6001 V V polyrex EM6007229 1144684 10ZL1500M10X23. RUBYCON ELKO RADIAL6007300 767360 6.3ZL1500M10X20. RUBYCON ELKO RADIAL6007353 FSM-V-AH3-R0010-H4CKD Durchflusssensor -0,1- +1l/min Luft+6007354 4022.456.01861 GRADIENT FILTER 800 SPECIAL6007615 696812 Dichtungssatz Membranpumpe MD46007691 GIIS-303mm-L kodiert RETAIN. RING UNTERT. GIIS 303mm-L kodier6007720 HPQ-D11 Photoelectronic sensor 12-24VDC6007848 60-6.3U-P UNION 1/4Zoll6007849 60-9.5x7.5U-P UNION 3/8Zoll6007900 60-12.7U-P UNION 1/2Zoll6007902 60-9.5x7.5UE-P UNION ELBOW 3/8Zoll6007903 60-12.7UE-P UNION ELBOW 1/2Zoll6007904 60-6.3UT-P UNION TEE 1/4Zoll6007905 60-9.5x7.5UT-P UNION TEE 3/8Zoll6007906 60-12.7UT-P UNION TEE 1/2Zoll6007907 60-6.3N NUT 1/4Zoll6007908 60-9.5N NUT 3/8Zoll6007910 60-6.3PG-H PLUG 1/4Zoll6007912 60-9.5x7.5PG-H PLUG 3/8Zoll6007914 60-12.7PG-H PLUG 1/2Zoll6007915 ST230-6.3x4.3 CAP 1/4Zoll6007916 ST230-9.5x7.5 CAP 3/8Zoll6007917 ST230-12.7 CAP 1/2Zoll6008934 70-0025 Keramikdüse6008940 913-00346-00 Nova Handler, Air Cylinder, Ebara, 32x876008941 913-00347-00 Nova Handler, Air Cylinder, Ebara, 32x716008983 1085928 SWS300-24 # LAMBDA # PSU, SW MODE 24V 306009043 33-27-19 Acrylic Plate6009048 5114525 Bonding Plate, D180, T7 w/o hole6009201 ATS100-150-U-20P Dealy Stage (no Cu ) rep.6009232 11 020 615 119 000 Chuck complete 8Zoll / 12Zoll6009235 BRI4715 IO650 Two Serial Port Controller6009236 S26113-E354-V10 SiemensNixdorf Netzteil 145W6009263 TC-500u-50g Jandel Probe Head 500µ 50g 1.00mm6009264 TC-150u-100g Jandel Probe Head 150µ 100g 1.00mm6009266 SBC-411E/411 486DX5-133 Half-Size CPU Card6009267 9507 DE/RS-11-112 507 DE/RS-11-112 Genmark Robot Input Int6009269 92-005721 CPU Card; SBC TP6306009300 MPL-502-V Very Low Vacuum Switch6009342 SERV.630.51191 ACC MK4 Controller Batterie6009447 7200-013036 Assy, Readhead R6009448 7200-012690 Assy, Readhead R6009449 7200-012691 Readhead, Encoder, Cable6009500 7200-018159 Assy, Reference Chip, 3Pt Adj.6009574 0343-204 Mitnehmer6009575 0344-006 Kupplungskreuz

Page 113: 300MM Spare Parts 5-3-122

6009581 2-322052-00 Run Capacitor 45 UFD6009582 2-322051-00 Start Capacitor 145-175UFD6009583 2-680189-00 Kabel Kompressor6009584 2-335069-00 N2 ein/aus Schalter6009617 2-333037-00 Relais 1 für 1XLC6009791 SERV.483.35261 WS LS WSAT reader Sensor6010372 SERV.470.54381 SCSI Harddisk 36GB SW4.16600053 S3812R028B06 Sievers UV Lamp & Tube replacement6600054 S3812R030B06 UV Quartz and O-ring replacement kit6600055 S3812R029B06 Aquafine Lamp Replacement6600056 S4416M117Y06 Philic DI Water 0.02um 10Zoll6600057 IEXSLD2SF ASSEMBLY-PURIFIER 20IN SILICA 1/2IN F6600065 UP-RW1245P1 Panasonic UPS Battery LL for ASML Powerw6600075 AGC-2-1/2-R Catrigde Fuse6600076 AGC-1/2-R Catrigde Fuse6600140 SERV.502.28386 PREAMPLIFIER UNIT TC3X6600161 SERV.437.10233 ALIGNMENT LASER CONTROLLER RF PPCA BOARD6600167 0010-02789R ASSY,VALVE THROT EXH,3.00ID NW80 W/STE6600311 KR110R00B Spares Rebuilt Kit Trebor 1106600324 2304914-00-R Inset thermostat LSO1172-01/ 3.1kW 230V6600347 M60000411 RSR 12ZM-70LM6600349 51524 FÜHRUNG SCHMAL F.HOCHDRUCKPUMPE6600350 52537-35 FÜHRUNG BREIT F.HOCHDRUCKPUMPE6600557 0418699 PVDF.KOLBENSTANGE.D12 L309,56600710 AN6230-45 O-Ring 209.15x3.536600720 Räder TMP Turbo Räder TMP Turbo6600722 1047-23643-D-01 Pipe water S6600725 1044-60342D-01 MG CAP M256600726 1055-11112D-1 Stag ESC3006600727 1043-07934M Angle Gear Assy6600728 1013-24416M Chimmy Shutter6600729 1011-76512M Hatch Jig Assy6600730 1071-3986C Cable conect W2 2/5 TMP6600731 1056-03189D-1 Plate, Stay D3006600732 Transport Jig Mainfra Transport Jig Mainfraim6600733 N33062055 Gasket6600734 1012-15824M Wire pape assy6600735 Cable Assy MAG7 Cable Assy MAG76600737 1047-23627-D-02 Pipe water L6600738 Anelva Blank Robot Anelva Blank Robot MAG76600739 1201JCPSLA Cable with sensor Anelva6600740 1047-23643-D-001 Pipe Insulator S6600741 Roots Adjustment Roots Poadloader Adjust Assy6600742 Roots Adjustment1 Robot Adjust MAG7+Roots6600743 Roots Adjustment2 Robot Adjust MAG7+Roots6600744 1056-33240D Insulator D224T156600746 1055-25789D-01 Quartzring6600771 B27-158171 ISO 100 Trapped O-Ring with center green6600772 1061-62665M O-Ring 291.65x3,53 Viton6600817 2313783-00 gerade Steckvershraubung KJF04-M56600818 2314379-00 KJL 04-99 Winkelsteckverbinduung

Page 114: 300MM Spare Parts 5-3-122

6600839 VM10004N00 VM1000 Ventil mechanisch betätigt6600945 SERV.437.10232 AL Controller Board w/o Beam Switch6601023 15-270165-00 ESC,300MM,IXT Q300 AL, HEX, PINK NO POSTE-3-21-V3-0078779 9794 PUMP STRAINERE-3-53-01-0092617 M61000730 ZAHNRIEHMENTRANSPORTEINHEIT, B15mm L2,8mE-3-55-CP-0086605 815016-769 C-SEAL 1.125 TALON BLOCK 2 PORTE-3-55-CP-0086607 815018-012 FILTER GAS INLINE M1/2 VCRE-3-55-CP-0087608 2011688-001 PLUG PLENUM OUTERE-3-55-CP-0087609 2011689-001 PLUG PLENUM INNERE-3-55-CP-0087610 2008437-101 INSERT THREADED 0,50MME-3-55-CP-0087615 2011760-001 PLUG MANIFOLD GASE-3-55-CP-0087616 2008437-103 INSERT TREADED 1.50E-3-55-CP-0087617 815019-516 SCREW BUTTON HEAD M3X6E-3-55-V3-0071755 SERV.438.42615 LAMP LEVELSENSOR SINGLESTAGE MachineE-3-55-V3-0076458 SERV.470.29921 UPS CONTROL UNITE-3-55-V3-0076763 9428.999.80910 CREASE ISOFLEX NBU-15E-3-55-V3-0076764 9428.999.80510 ASML OPTICAL CLEAN FLUID 100mlE-3-55-V3-0083787 SERV.502.27023 OFF-AXIS RED LASERE-3-55-V3-0085889 9428.999.81580 WS CLEANING TOOL (STONE)E-3-55-V3-0085890 9428.999.81590 WS SPONGE SHEET 9*9 DRYE-3-57-00-0071114 89715 ENTNAHMEKOPF 3/4" CHEMIE 3/8" BELÜFTUNGE-3-57-01-0086956 A10TTZ A10TTZ CODE 9 T10TATE-3-57-01-0086957 425299 3/2-Wegeventil (Versorgungswagen)E-3-57-01-0089980 004789354 3/2 WEG-MAGNETVENTIL - A10E-3-60-01-0075506 55-0995 CABLE ASSY,PROBE HEAD R3E-3-61-L3-0086259 189192 RotoFlow RF-2500 RFO EDELSTAHL-GEW 9/16E-3-61-L3-0086260 189193 RotoFlow RF-2500 RFO EDELSTAHL-GEW 9/16E-3-61-V3-0080807 074811 MEMBRANE F.VAKUUMPUMPE PU1037-035-3E-3-65-V3-0074820 001-7326 NITROGEN FILTER 001-7326 BLUE 2 MICRONE-3-65-V3-0085573 300-0716 PLASTIC BUSHING (ROBOT GRIPPER)E-3-65-V3-0085574 001-8107 PLASTIC BUSHING (PIN SPIRAL)E-3-78-ZZ-0087566 W2501VK01 Photo 250 3 Way ValueE-3-96-01-0087766 E19010120-R BUSHING VIISTA 80 REV:C repairedE-3-A6-01-0085424 532221604439 MDCD CARDE-3-G1-L3-0072060 PTI-7351 ASSEMBLY PISTON CYLINDER 100CFE-3-G1-V3-0063549 NA-07 Liner Disposal PlugsE-3-H7-01-0077434 0707-SH0.500-300 SHIM 300MM. 500µ PETER WOLTERS GEM.E-3-H7-01-0077435 0707-SH0.200-300 SHIM 300MM. 200µ PETER WOLTERS GEM.E-3-H7-01-0077436 0707-SH0.100-300 SHIM 300MM. 100µ PETER WOLTERS GEM.E-3-H7-01-0089872 6783-04004-1-01 BACKINGFILM-SPEITELE-3-H7-11-0072774 245584 RETAIN. RING UNTERTEIL FESTSt. GROOVEDE-3-H7-11-0079727 234577-R RETAIN.RING FESTST. 340X261X42,1 ÜBERARE-3-J4-01-0055184 013501-064-25 PCB CONTROL 30-3\KE-3-K2-V3-0071674 JS-36-0083B-012 BACK-UP RINGE-3-Q1-01-0083482 NOW-SP5BDAEB-23-21SMARTPROBE CONN.10L UNIVERSALE-3-Q1-01-0083484 NOW-SP8BDAEB-23-21SMARTPROBE CONN. 1.5L GA.UNIV.E-C-51-01-0089703 170365-1 Crimpbuchse AMP AWG26-22 verzinnt loseE-C-H7-01-0078130 MN0012T FÜHRUNGSROLLEE-C-H7-01-0091797 235502 3/2-MEMBRANVENTILE-C-H7-11-0073778 MNA0143A SLURRYPUMPE ROTOR 206939E-I-10-01-0044232 100001419 BELLOWS ASSEMBLY KIT KF45

Page 115: 300MM Spare Parts 5-3-122

E-I-10-01-0063755 ERK8477 RUNDKABEL GESCHIRMT 3X0.5MM²E-I-10-01-0063756 ERK8476 RUNDKABEL GESCHIRMT 5X0.14MM²E-I-96-01-0074988 E19011290 LIFT PIN MOTOR 2224U024SRE-I-96-01-0077423 275816 REPL GAUGE FOR MINI CONVECTRONE-I-96-01-0087063 E42000213 BEARING,BALL,ANGULAR,1/4 BOREX5/8 OD,SSE-K-36-01-0075166 L8029 MERCURY XENON LAMP 100WE-L-78-ZZ-0029801 W2501SP19 AIR VENT VALVEE-M-L5-01-0062127 6802ZZ BEARINGE-M-L5-01-0062128 6800ZZ BEARINGE-N-50-01-0041888 SL50 ALMATEC-PUMPEE-N-50-01-0047137 70732-06 BARB KYNAR 10-32 X 1/16E-N-53-01-0045466 0613817 SENSOR INDUKTIV 6,5MM (IFRM06P1703/S35L)E-N-53-01-0048212 0613876 RELAIS SOCKEL FINDERE-N-75-01-0003354 FL4-3 MUTTER PFA 1/4"E-N-75-01-0017500 FC6-4FN-1 AUFSCHRAUB. GERADE 3/8" X 1/4"NPTE-N-88-01-0016348 304086-001 SWITCH DOOR INTERLOCK MAGNETICE-O-55-01-0059777 42465 MONITORKABEL SVGA HQ 1,5m ST-STE-P-59-02-0007445 71270-01 FAN MUFFIN 50-60HZ 115VE-S-N4-01-0080861 002-3754-01 ASSY,PCB,THETA DRIVERE-T-J3-00-0062770 61161 HERMOS RS232-KABEL GW-PC 3ME-V-10-01-0005312 1706380 NOZZLE RETAINER Y72E-V-10-01-0022805 1614670 HF-KOAX-BNC-HT STECKER 6MM/75OE-V-14-01-0016509 206655 O-RING 389 V75E-V-14-01-0016544 212002 KF16 O-RING/CARRIERE-V-60-01-0052709 217212 L-STYLUS 0.1-0.2 BLACKE-V-B3-01-0012600 THERMAL FILM HIGH GRADE TYPE 10.1CM X 14 ME-V-B3-01-0030236 UPC1010 VIDEO PRINTER PAPIER SONYE-V-P7-11-0083533 MCVM-F44 Valve Check /Rückschl.ventil SpiderE-V-P8-01-0080813 SPC.789.9603 Safety Inlet Filter cpl.E-V-Q9-01-0090809 840-0573-E2 LAMP COVER COMMON 6 /12E-V-Q9-01-0090810 840-0481-E7 HAET RING LOWER UNIVERSAL 125"E-V-Q9-01-0090811 840-0567-E4 HOLDER TC TOP 900/1100-300E-V-Q9-01-0090812 840-0569-E2 HOLDER PIN SUPPORT SHORTE-V-Q9-01-0090814 840-0565-E2 SCREW TOP PLATE CHAMBER UNIVEE-V-Q9-01-0090815 840-0535-E3 SUSCEPTOR 12" NO SHAFTE-V-Q9-01-0090816 840-0207-E1 TC HOLDERE-V-Q9-01-0090817 930-1990-E2 THERMOCOUPLE CUSTOMIZED KITE-V-Q9-01-0090818 840-0508-E6 TOP PLATE 300MME-V-Q9-01-0090819 403-0002 RGA FILAMENTE-V-Q9-01-0090820 312-0042 HEATING-LAMP HALOGEN 240V 2000WE-V-Q9-01-0091303 840-0536-E5 SUPPORT 12, SUSCEPTORE-V-Q9-01-0092245 840-0001-E4 SCAN GLAS,900-300K-3-04-01-0068286 0021-15538 CLAMP,PEEK, 300MM, WALKING BEAM, CLEANEK-3-04-01-0075062 0240-15904FANG KENSINGTON TRACK ROBOT,EG/EGA END-EFFECK-3-H7-01-0046146 227319 PLANETENGETRIEBE MIT MOTOR 40W, i=33K-F-57-00-0066888 A25ETT Druckluft- Membranpumpe A25ETTK-K-Q7-01-0089755 1005019100 P-891.03LVPZT TRANS.CAB LEMO1K-V-77-ZZ-0090381 R1F020 FILTER PROFILE II,10",2µW-A-84-01-0091760 356-0612 Anzeigelampe, LED, BA9s, 24V, weißW-H-AA-01-0069856 H224.1 TYGON-SCHLAUCH 1/8 X 1/16

Page 116: 300MM Spare Parts 5-3-122

Supplier

10201 Karl Bock GmbH & co. E&V Implantation NONC12905 AxFlow (Germany) E&V Nassätzen NONC10820 Entegris GmbH E&V Litho CONS11672 ROTTER Reinstraumservice GmbH E&V CMP CONS15593 Logitex Instruments GmbH E&V Verascher NONC11317 KSR-Kübler E&V CMP NONC10255 Festo AG & Co. E&V CMP NONC10749 SPEA E&V CMP NONC52216 ATMI Packaging Inc. E&V Litho CONS15563 IKA-Werke GmbH & Co. KG E&V CMP NONC53284 PSI Repair Services, Inc. E&V CVD NONC14791 Aviza Technology GmbH E&V CVD CONS14791 Aviza Technology GmbH E&V CVD CONS11672 ROTTER Reinstraumservice GmbH E&V CMP CONS50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC52142 NANOmetrics, Inc. E&V Metrologie CONS52142 NANOmetrics, Inc. E&V Metrologie CONS10181 Bernd Richter E&V Litho NONC14791 Aviza Technology GmbH E&V CVD CONS14791 Aviza Technology GmbH E&V CVD CONS14791 Aviza Technology GmbH E&V CVD CONS14791 Aviza Technology GmbH E&V CVD CONS50051 SEZ Semiconductor Equipment E&V Nassätzen CONS51895 Global Measurement E&V Nassätzen CONS51895 Global Measurement E&V Nassätzen NONC51895 Global Measurement E&V Nassätzen NONC50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC10318 Greene Tweed & Co. GmbH E&V CMP CONS50107 ASML Germany GmbH E&V Litho NONC10127 ALMATEC Maschinenbau GmbH E&V CMP NONC50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC13650 Vistec Semiconductor E&V Metrologie NONC12315 SensorTechnics GmbH E&V Metrologie NONC10563 Hertel GmbH Dresden E&V CMP CONS13116 NanoTOOLS GmbH E&V Metrologie CONS

Kreditor-Nr.

Warengruppen-bezeichnung

Material-art

Page 117: 300MM Spare Parts 5-3-122

50107 ASML Germany GmbH E&V Litho NONC11672 ROTTER Reinstraumservice GmbH E&V CMP CONS11878 Brooks Automation Inc. E&V Implantation NONC15681 Mercateo AG E&V Auto/TranspSyst. NONC10858 Wälzlagertechnik GmbH E&V CMP CONS10247 Farnell GmbH E&V Öfen NONC10247 Farnell GmbH E&V Öfen NONC16665 BIBUS GmbH E&V CMP NONC50107 ASML Germany GmbH E&V Litho CONS10839 VACUUBRAND GmbH E&V Nassätzen CONS11672 ROTTER Reinstraumservice GmbH E&V CMP CONS50926 ECO PHYSICS AG E&V CMP NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC51291 Contamination Control E&V Litho NONC14460 DIVA Sprühtechnik GmbH E&V CMP CONS50696 Nova Measuring Instruments Ltd. E&V CMP NONC50696 Nova Measuring Instruments Ltd. E&V CMP NONC10247 Farnell GmbH E&V CMP NONC52781 Canon Anelva Corporation E&V PVD NONC52781 Canon Anelva Corporation E&V PVD NONC12072 Aerotech GmbH E&V Metrologie CONS13650 Vistec Semiconductor E&V Metrologie NONC12512 Genmark Automation GmbH E&V Metrologie NONC15355 Siemens AG E&V Metrologie NONC13695 Euris GmbH E&V Metrologie CONS13695 Euris GmbH E&V Metrologie CONS12512 Genmark Automation GmbH E&V Metrologie NONC52171 LOGOSOL, INC. E&V Metrologie NONC

Eigen, Anlagenumbau E&V Metrologie NONC10247 Farnell GmbH E&V Metrologie NONC10247 Farnell GmbH E&V Litho CONS52142 NANOmetrics, Inc. E&V Metrologie NONC52142 NANOmetrics, Inc. E&V Metrologie NONC52142 NANOmetrics, Inc. E&V Metrologie NONC52142 NANOmetrics, Inc. E&V Metrologie NONC10519 LUTZ-Pumpen GmbH & Co.KG E&V CMP NONC10519 LUTZ-Pumpen GmbH & Co.KG E&V CMP NONC

Page 118: 300MM Spare Parts 5-3-122

13320 Ferrotec GmbH E&V PVD NONC13320 Ferrotec GmbH E&V PVD NONC13320 Ferrotec GmbH E&V PVD NONC13320 Ferrotec GmbH E&V PVD NONC13320 Ferrotec GmbH E&V PVD NONC50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC13566 Entegris GmbH E&V Litho CONS13566 Entegris GmbH E&V Litho CONS13566 Entegris GmbH E&V Litho CONS13566 Entegris GmbH E&V Litho CONS13566 Entegris GmbH E&V Litho CONS11316 SCHUKAT Electronic E&V Litho CONS10247 Farnell GmbH E&V CMP NONC10247 Farnell GmbH E&V CMP NONC50107 ASML Germany GmbH E&V Litho NONC50107 ASML Germany GmbH E&V Litho NONC10557 MKS Instruments Deutschland GmbH E&V CVD NONC12905 AxFlow (Germany) E&V Nassätzen CONS10990 Kistner Sicherheitssysteme und E&V Nassätzen NONC10858 Wälzlagertechnik GmbH E&V Nassätzen NONC13700 Haskel Hochdrucksysteme E&V CMP NONC13700 Haskel Hochdrucksysteme E&V CMP NONC14820 LOTUS Systems GmbH E&V Nassätzen NONC52781 Canon Anelva Corporation E&V PVD NONC52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD CONS52781 Canon Anelva Corporation E&V PVD NONC52791 Canon Anelva Corporation E&V PVD NONC52791 Canon Anelva Corporation E&V PVD NONC52781 Canon Anelva Corporation E&V PVD NONC52781 Canon Anelva Corporation E&V PVD NONC52781 Canon Anelva Corporation E&V PVD NONC52781 Canon Anelva Corporation E&V PVD NONC

200024 SMC Pneumatic GmbH E&V Nassätzen NONC200024 SMC Pneumatic GmbH E&V Nassätzen NONC

Page 119: 300MM Spare Parts 5-3-122

200024 SMC Pneumatic GmbH E&V Nassätzen NONC50107 ASML Germany GmbH E&V Litho NONC50113 Novellus Systems Inc E&V PVD NONC50025 Fusion Europe Ltd. E&V Litho 3CON50531 Tec-Sem E&V Nassätzen NONC14791 Aviza Technology GmbH E&V CVD 3CON14791 Aviza Technology GmbH E&V CVD 3CON14791 Aviza Technology GmbH E&V CVD 3CON14791 Aviza Technology GmbH E&V CVD 3CON14791 Aviza Technology GmbH E&V CVD 3CON14791 Aviza Technology GmbH E&V CVD 3CON14791 Aviza Technology GmbH E&V CVD 3CON14791 Aviza Technology GmbH E&V CVD 3CON50107 ASML Germany GmbH E&V Litho 3CON50107 ASML Germany GmbH E&V Litho 3CON50656 ASML B.V. E&V Litho 3CON50107 ASML Germany GmbH E&V Litho 3CON50107 ASML Germany GmbH E&V Litho 3CON50107 ASML Germany GmbH E&V Litho 3CON50107 ASML Germany GmbH E&V Litho 3CON10666 Honeywell Electronic Materials E&V CMP 3NON10182 Kunststoff-und Prozeßtechnik Seidel E&V CMP 3NON10182 Kunststoff-und Prozeßtechnik Seidel E&V CMP 3NON10182 Kunststoff-und Prozeßtechnik Seidel E&V CMP NONC

Eigen, Anlagenumbau E&V Metrologie 3NON14925 Gems Sensors GmbH E&V Litho 3NON14925 Gems Sensors GmbH E&V Litho 3NON10451 KNF Neuberger GmbH E&V Litho 3CON11619 Brooks Automation Inc. E&V Litho 3CON11619 Brooks Automation Inc. E&V FEE andere 3CON11619 Brooks Automation Inc. E&V FEE andere 3CON10820 Entegris GmbH E&V Litho 3CON51702 IBS Ion Beam Services E&V Implantation 3NON12200 Chemische Werke Kluthe GmbH E&V Metrologie 3NON12125 Contamination Control E&V Litho 3NON12125 Contamination Control E&V Litho 3CON50352 OSM Technology E&V CMP 3CON50352 OSM Technology E&V CMP 3CON50352 OSM Technology E&V CMP 3CON11672 ROTTER Reinstraumservice GmbH E&V CMP NONC11672 ROTTER Reinstraumservice GmbH E&V CMP 3CON11672 ROTTER Reinstraumservice GmbH E&V CMP 3CON11878 Brooks Automation Inc. E&V FEE andere 3NON11759 CRYSTEC E&V Litho 3CON14790 ATMI Packaging Inc. E&V Litho 3CON14790 ATMI Packaging Inc. E&V Litho 3CON10247 Farnell GmbH E&V CMP NONC14770 Watson-Marlow GmbH E&V CMP NONC13566 Entegris GmbH E&V CMP NONC14770 Watson-Marlow GmbH E&V CMP NONC10557 MKS Instruments Deutschland GmbH E&V Implantation CONS

Page 120: 300MM Spare Parts 5-3-122

14467 Leoni Elocab GmbH E&V Implantation NONC14215 DEG DEUTSCHE ELEKTRO-GRUPPE E&V Implantation NONC11466 Dr. Fritz Faulhaber GmbH & Co. KG E&V Implantation NONC10059 Brooks Technology Gmbh E&V Implantation CONS10858 Wälzlagertechnik GmbH E&V Implantation NONC10328 Hamamatsu E&V Metrologie NONC10820 Entegris GmbH E&V Litho NONC10858 Wälzlagertechnik GmbH E&V FEE andere NONC10858 Wälzlagertechnik GmbH E&V FEE andere NONC10127 ALMATEC Maschinenbau GmbH E&V Nassätzen NONC

100077 Tyne Property Developments Ltd. E&V Nassätzen NONC11329 BAUMER GmbH E&V Nassätzen NONC10257 Finder-Relais GmbH E&V Nassätzen NONC10545 Metron Technology Deutschland GmbH E&V Nassätzen NONC10545 Metron Technology Deutschland GmbH E&V Nassätzen NONC10545 Metron Technology Deutschland GmbH E&V Nassätzen NONC11390 Bechtle GmbH & Co. KG E&V Öfen NONC

100376 Infineon Technologies Dresden E&V PVD NONC11619 BROOKS AUTOMATION INC. E&V CVD NONC11390 Bechtle GmbH & Co. KG E&V Auto/TranspSyst. NONC

100376 Infineon Technologies Dresden E&V Implantation CONS10751 SPOERLE ELECTRONIC E&V Implantation NONC10218 Aviza Technology Ltd. E&V PVD CONS10218 Aviza Technology Ltd. E&V PVD CONS

100076 Siemens Procurement and E&V Metrologie CONS10420 AMCAD & Rauch GmbH E&V Metrologie CONS10420 AMCAD & Rauch GmbH E&V Metrologie CONS10901 WSM E&V CMP CONS50926 ECO PHYSICS AG E&V CMP CONS51727 Frontier Semiconductor E&V Metrologie 3CON51727 Frontier Semiconductor E&V Metrologie 3CON51727 Frontier Semiconductor E&V Metrologie 3CON51727 Frontier Semiconductor E&V Metrologie 3CON51727 Frontier Semiconductor E&V Metrologie 3CON51727 Frontier Semiconductor E&V Metrologie 3CON51727 Frontier Semiconductor E&V Metrologie 3CON51727 Frontier Semiconductor E&V Metrologie 3CON51727 Frontier Semiconductor E&V Metrologie 3CON51727 Frontier Semiconductor E&V Metrologie 3CON51727 Frontier Semiconductor E&V Metrologie 3CON51727 Frontier Semiconductor E&V Metrologie CONS51727 Frontier Semiconductor E&V Metrologie CONS11672 ROTTER Reinstraumservice GmbH E&V CMP CONS11672 ROTTER Reinstraumservice GmbH E&V CMP CONS14052 Maxon Motor GmnH E&V CMP NONC10127 ALMATEC Maschinenbau GmbH E&V CMP CONS51456 Negevtech Ltd. E&V Metrologie 3NON10615 PALL GmbH Microelectronics E&V FEE andere NONC10683 RS Components GmbH E&V Litho NONC10681 Carl Roth GmbH & Co.KG E&V FEE andere NONC

Page 121: 300MM Spare Parts 5-3-122

Group Unit Qty.

implant spares PC 1.00wet etch spares PC 1.00

litho spares PC 2.00cmp spares PC 11.00

asher spares PC 2.00cmp spares PC 1.00cmp spares PC 1.00cmp spares PC 2.00litho spares PC 18.00cmp spares PC 2.00cvd spares PC 18.00cvd spares PC 3.00cvd spares PC 1.00cmp spares PC 22.00litho spares PC 1.00litho spares PC 1.00litho spares PC 2.00litho spares PC 1.00

metrology spares PC 4.00metrology spares PC 4.00

litho spares PC 1.00cvd spares PC 1.00cvd spares PC 1.00cvd spares PC 1.00cvd spares PC 1.00

wet etch spares PC 1.00wet etch spares PC 2.00wet etch spares PC 1.00wet etch spares PC 1.00

litho spares PC 2.00litho spares PC 2.00litho spares PC 1.00litho spares PC 1.00litho spares PC 2.00cmp spares PC 4.00litho spares PC 1.00cmp spares PC 1.00litho spares PC 1.00litho spares PC 1.00litho spares PC 1.00litho spares PC 1.00litho spares PC 3.00litho spares PC 1.00

metrology spares PC 4.00metrology spares PC 1.00

cmp spares PC 1.00metrology spares PC 20.00

Page 122: 300MM Spare Parts 5-3-122

litho spares PC 2.00cmp spares PC 21.00

implant spares PC 1.00automat./tranp. spares PC 5.00

cmp spares PC 2.00furnace spares PC 12.00furnace spares PC 40.00

cmp spares PC 1.00litho spares PC 1.00

wet etch spares PC 1.00cmp spares PC 5.00cmp spares PC 2.00litho spares PC 4.00litho spares PC 4.00litho spares PC 2.00litho spares PC 4.00litho spares PC 2.00litho spares PC 4.00litho spares PC 4.00litho spares PC 2.00litho spares PC 4.00litho spares PC 4.00litho spares PC 4.00litho spares PC 4.00litho spares PC 2.00litho spares PC 4.00litho spares PC 4.00litho spares PC 2.00cmp spares PC 11.00cmp spares PC 1.00cmp spares PC 1.00cmp spares PC 1.00pvd spares PC 4.00pvd spares PC 11.00

metrology spares PC 1.00metrology spares PC 3.00metrology spares PC 1.00metrology spares PC 2.00metrology spares PC 1.00metrology spares PC 2.00metrology spares PC 1.00metrology spares PC 1.00metrology spares PC 1.00metrology spares PC 3.00

litho spares PC 2.00metrology spares PC 1.00metrology spares PC 1.00metrology spares PC 1.00metrology spares PC 1.00

cmp spares PC 4.00cmp spares PC 2.00

Page 123: 300MM Spare Parts 5-3-122

pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 1.00litho spares PC 1.00litho spares PC 1.00litho spares PC 1.00litho spares PC 1.00litho spares PC 1.00litho spares PC 1.00litho spares PC 1.00litho spares PC 4.00cmp spares PC 8.00cmp spares PC 8.00litho spares PC 1.00litho spares PC 1.00cvd spares PC 2.00

wet etch spares PC 1.00wet etch spares PC 4.00wet etch spares PC 2.00

cmp spares PC 2.00cmp spares PC 1.00

wet etch spares PC 3.00pvd spares PC 8.00pvd spares PC 12.00pvd spares PC 3.00pvd spares PC 34.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 2.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 6.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 3.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 1.00pvd spares PC 3.00pvd spares PC 1.00

wet etch spares PC 10.00wet etch spares PC 10.00

Page 124: 300MM Spare Parts 5-3-122

wet etch spares PC 3.00litho spares PC 1.00pvd spares PC 1.00litho spares PC 2.00

wet etch spares PC 1.00cvd spares PC 30.00cvd spares PC 1.00cvd spares PC 4.00cvd spares PC 4.00cvd spares PC 10.00cvd spares PC 2.00cvd spares PC 10.00cvd spares PC 10.00litho spares PC 2.00litho spares PC 1.00litho spares PC 4.00litho spares PC 1.00litho spares PC 1.00litho spares PC 1.00litho spares PC 3.00cmp spares PC 1.00cmp spares PC 2.00cmp spares PC 1.00cmp spares PC 1.00

metrology spares PC 1.00litho spares PC 1.00litho spares PC 1.00litho spares PC 2.00litho spares PC 2.00

FE spares others PC 8.00FE spares others PC 8.00

litho spares PC 2.00implant spares PC 1.00

metrology spares PC 1.00litho spares PC 2.00litho spares PAK 33.00cmp spares PC 10.00cmp spares PC 5.00cmp spares PC 10.00cmp spares PC 5.00cmp spares PC 6.00cmp spares PC 3.00

FE spares others PC 1.00litho spares PC 2.00litho spares PC 24.00litho spares PC 7.00cmp spares PC 100.00cmp spares PC 8.00cmp spares PC 1.00cmp spares PC 2.00

implant spares PC 1.00

Page 125: 300MM Spare Parts 5-3-122

implant spares PC 33.00implant spares PC 165.00implant spares PC 3.00implant spares PC 2.00implant spares PC 8.00

metrology spares PC 3.00litho spares PC 2.00

FE spares others PC 2.00FE spares others PC 10.00wet etch spares PC 2.00wet etch spares PC 43.00wet etch spares PC 3.00wet etch spares PC 7.00wet etch spares PC 3.00wet etch spares PC 9.00wet etch spares PC 2.00furnace spares PC 1.00

pvd spares PC 3.00cvd spares PC 2.00

automat./tranp. spares PC 10.00implant spares PC 18.00implant spares PC 2.00

pvd spares PC 2.00pvd spares PC 5.00

metrology spares PC 1.00metrology spares PC 53.00metrology spares PC 18.00

cmp spares PC 10.00cmp spares PC 3.00

metrology spares PC 5.00metrology spares PC 1.00metrology spares PC 1.00metrology spares PC 1.00metrology spares PC 4.00metrology spares PC 1.00metrology spares PC 1.00metrology spares PC 1.00metrology spares PC 1.00metrology spares PC 2.00metrology spares PC 22.00metrology spares PC 1.00metrology spares PC 1.00

cmp spares PC 3.00cmp spares PC 15.00cmp spares PC 1.00cmp spares PC 1.00

metrology spares PC 1.00FE spares others PC 3.00

litho spares PC 1.00FE spares others M 18.00

Page 126: 300MM Spare Parts 5-3-122

Frontend Parts - Baratron

No. Part # Material text Qty. Supplier

16427 625A13TBE BARATRON-1000TORR 1 MKS

16512 628B13TBE1B BARATRON-1000 VCR-15-SUB-D 1 MKS

16292 628B13TBE1B BARATRON-1000 VCR-15-SUB-D 1 MKS

16287 628B13TBE1B BARATRON-1000 VCR-15-SUB-D 1 MKS

Page 127: 300MM Spare Parts 5-3-122

Serial # Repair by Stock

ja 863119 mks 001-005-01

ja 209341G10 Baratron-Regal

ja G210090G10 MKS300 001-005-01

ja G30841 MKS300 001-005-01

Photo available

Page 128: 300MM Spare Parts 5-3-122

Material # Supplier P/N Beschreibung

100494 17000999 Druckminderer V 786 DN15 Druck 0,5-10100495 17.000.616 Druckminderer V 91 PP/FPM DN 25100500 198.825.000 Durchfluß-Monitor Signet 3-5090100503 KG-210 Grenztaster100504 701470/009865/043240 Ers.Platte,Feder,Kappe DN15100505 701472/043042/009867 Ers.Platte,Feder,Kappe DN25100506 701474/009869/043244 Ers.Platte,Feder,Kappe DN40100507 701475/009870/043245 Ers.Platte,Feder,Kappe DN50100508 701476/009871/043246 Ers.Platte,Feder,Kappe DN65100509 701477/009872/043247 Ers.Platte,Feder,Kappe DN80100510 701478/009873/043248 Ers.Platte,Feder,Kappe DN100100512 701727/075199/701700 RErsatzt. Platte, Feder, Kappe100516 167.346.007 PP Kugelhahn 346 D63 2" PN10 DN50100520 167.360.443 Kugelrückschlagventil PP/EPDM D25 DN20100521 167.360.444 Kugelrückschlagventil PP/EPDM D32 DN25100523 161.360.403 Kugelrückschlagventil PVC/EPDM D25 DN20100543 9722-45-96.05 Strahlsauger KT 13-3100544 9722-45-96.06 Strahlsauger KT 13-5100545 9722-45-96.01 Strahlsauger KT 53-1100548 EX-VNM 111 FEMA-Druckschalter VNM 111100554 175.360.671 Rückschlagventil PVDF/FPM D16 DN10100556 175.360.673 Rückschlagventil PVDF/FPM D25 DN20100606 167.346.042 Kugelhahn PP/EPDM d20 DN15 m. Schweißst.100608 167.346.004 PP Kugelhahn 346 D32 DN25 1" PN10100610 167.346.045 Kugelhahn PP/EPDM D40 DN32100611 167.346.006 PP Kugelhahn 346 D50 DN40 1 1/2"100615 167.360.442 Kugelrückschlagventil PP/EPDM D20 DN15100616 167.346.005 PP Kugelhahn 346 D40 DN32 1 1/4" PN10100617 167.367.007 Absperrklappe PP/EPDM d110DN100100621 167.370.114 Kugelhahn PP/EPDM d110DN100100622 167.346.003 PP Kugelhahn 346 D25 DN20 3/4" PN10100626 167.370.113 Kugelhahn PP/EPDM d90DN80100627 199.026.325 Membranventil pneum. PVDFHP/PTFE D20DN15100632 167.360.446 Kugelrückschlagventil PP/EPDM D50 DN40100706 167.315.018 PP-Membranventil Typ 315 D=25 DN20 PN10100707 727.510.156 PP Verschraubung DA 20100708 727.510.157 PP Verschraubung DA 25100709 727.510.158 PP Verschraubung DA 32100711 727.510.160 PP Verschraubung DA 50100712 727.510.161 PP Verschraubung DA 63100795 350.66 Kugelhahn 350.66, MS vernick.100796 350.88 Kugelhahn 350.88, MS vernick. R 1 1/2100803 14-102 DN50 PN10 Absperrklappe GG25 M.P.W.P. 10bar100806 Schwingarm 506 PP/ Schwingarm m.Deckelabdich.f.R-klap.DN80100807 506 DN 100 Schwingarm mit Deckelabdicht.f.R-klDN100100808 506 PP/EPDM DN125 Schwingarm m. Deckelabdich. f. R-klappe100809 506 DN 150 Schwingarm mit Deckelabdicht.f.R-klDN150

Page 129: 300MM Spare Parts 5-3-122

100810 ABN-66662TR-065 Astroeallkugelhahn DN 65,PN 40 Edelstahl100811 DN 65/PN 40 Dicht.satz f. Astroealkugelh. ABN-66662T100812 FA 1-6066TP Kompakt-Flansch-Kugelhahn DN 15 PN 10,100814 636506 Dichtungssatz DN 40 f. Kugelh.100815 636707 Dichtungssatz DN 40 f. Kugelh.100816 DN 65 für R 66 T Dichtungssatz DN 65 f. Kugelh. R 66 T100817 DN 80 für R 66 T Dichtungssatz für Kugelhahn100818 FA 1 + 2 -6066TP Dichtungssatz DN 15 f. Kmp. Kugelh. FA 1100819 DN 100 für FA 1 Dichtungssatz für Kmp.Kugelhahn100821 167 360 407 Kugelrückschlagvent. 360 DN 65 m. Schwei100847 480.010.1000 Kugelhahn Typ Capro 480100851 A0101-00 0 Durchg.vent. 5.0100.00 1/2AG/I100852 A0100-31 1 Durchg.vent. 5.0100.31, 1/2 DN100853 5A0100-21 Durchg.vent. 5.0100.21, D 20 D100854 A0100-32 1 Durchg.vent. 5.0100.32, 1/2 DN100856 BR 332 N DN20, R 1 1/4"INadelventil100857 S0 5.7121-6 Nadelventil S0 5.7121-6100858 S0 5.7121-8 Nadelventil S0 5.7121-8100861 2-16-00258-000 ET Strömungskörper Teil 3, Europildichtu100862 RK 66 A DN 15 Disco-Rückschlagventil RK 66A DN 15100863 RK 66 A DN 25 Disco-Rückschlagventil RK 66A, DN 25100865 RK 66 A DN 50 Disco-Rückschlagventil RK 66 A, DN 50100866 RK 66A DN 65 Disco-Rückschlagventil100867 RK 66 A DN 80 Disco-Rückschlagventil100868 RK 66 A DN100 PN16 Disco-Rückschlagventil RK 66 A DN100100869 RK66A DN 100 S Disco-Rückschlagventil RK 66 A100870 RK 86A Disco-Rückschlagventil100871 RK 86A-150/10-16 Disco-Rückschlagventil RK 66 A100876 600 80M14 Ersatzmembr. EPDM f.Vent.677 DN 65-80100877 600 100M14 0104 Ersatzmembran EPDM f. Ventil 677 DN 100100879 677/25/D 7514-0-0104 Membranvent.677 PP/EPDM handgesteu.DN25100882 DN 32-40 Membrane f. Vent. 677 EPDM DN 32-40100888 675/50/D 1814-0-0104 Metallmembranvent.675 handgest. DN 50100893 667/15/D 7514-2-1165-01Membranvent.667 PP m.Öffn.fed. DN 15100897 695 50P14 Steuermembran f. Vent. 667 DN 50100899 690/20/D 0114-1-0104 Memranvent.690PVC/ m.Schließfed.DN 20100904 690/80/D 0514-1-0104 Memranvent.690PP/ m.Schließfed. DN 80 HP100907 690/80/D 0514-1-0104F Memranvent. 690 m. Schließfed.+Fl. DN 80100909 690/15/D 0514-0101 Memranvent.690PP/ m.Schließfed.DN 15 HP100910 690/20/D 7514-1-0104 Memranvent.690PP/ m.Schließfed.DN 20 HP100914 690/50/D 7514-1-0104 Memranvent.690PP/ m.Schließfed100919 690 100 M14 Ersatzmembran EPDM f. Ventil 690 DN 100100920 69525P14 Steuermembran f. Vent. 690 DN 15-20-25100921 695 40 P14 Steuermembran f. Vent. 690 DN 32-40100923 690-80-P14 Steuermembran f. Vent. 690 DN 65-80100924 69080P14 Steuermembran f. Vent. 690 DN 100100925 690/20/D 202014-0-0104 Memranvent.690PVDF/ m.Schließfed.DN20 HP100927 M230L115 Membran f.Vent.SISTO-16 GG25, DN 150/200100929 14-102, PN 10, DN 65 Absperrklappen 14-102, PN 10, DN 65100931 14-102 PN10 DN100 Absperrklappe GG25 M.P.W.P. 10bar100936 14-103, PN 10, DN 65 Absperrklappen 14-103. PN 10

Page 130: 300MM Spare Parts 5-3-122

100937 14-103, PN 10, DN80 Absperrklappen 14-103, PN 10, DN 80100940 14-104, PN 10, DN 65 Absperrklappen 14-104, PN 10, DN 65100941 14-104, PN 10, DN 80 Absperrklappen 14-104, PN 10, DN 80100942 14-104, PN 10, DN 100 Absperrklappen 14-104, PN 10, DN 100100975 90199 Filtertaschenmitnehmer f.Siloa100978 K21R 71K6 Abreinigungsmotor f. Siloabluftfilter100980 RFE 35 400.112/60 + Augen-/ Nadellager m. Innenring100983 DN 250 Stopfdichtpackung für Absperrschieber100984 119 610.0037 Spindel f. Absperrschieber DN 250100985 994 M10 10 Spindelmutter f.Absperrschieber DN 250100986 FYTB 30 TF Lager f.Zellenrad. DN 250 5l100987 008 006.0063 Stopfdichtung Zellenradschleuse DN250/5L100989 104 630.0116 Dichtleisten f. Zellenradschleuse100990 SI411 Kettenrad m. Nabe Z=14 f.Zellenradschl.100991 SI410 Kettenrad m. Nabe Z=28 f.Zellenradschl.100992 942N 2,5x32 Rollenkette 5/8x3/8 1,5m f.Zellenradschl100994 RFE 35 Lagereinheit RFE 35 f.Fördersc101009 76 Doppeltopfmanschette 100mm ER510 Nr.4666101011 153 Doppelmembran 240mm Neoprene ER510 4666101012 169 Ventilsitz DN65 Vulkollan f.ER510 Nr4666101013 172 Ventilkugel 80mm Vulkollan ER510 Nr.4666101014 105 10308002 Überströmventil für ER510 Nr.4666 R1"101015 310022.261 Ersatzschläuche Neopren f. JZ 23101028 17.002.307 Druckhalteventil V 86, PP/PTFE, DN 15101036 RA D 130 mm für DF 4/7 Mischflügel für Rührwerk DF 4/7101037 SI310 Kugellager und Dichtungen f. SGM 075/21101041 SI312 Kugellager und Dichtung f. SGM 1,5/76101043 DR 250 m Rührorgan f. Normmischer FM 1.101044 SI313 Kugellager/Dicht.f.Normmisch.FGM 2,2/87101046 SI314 Kugellager/Dicht.f.Normmisch.FGM 3,0/87101048 SI315 Kugellager und Dichtungen f. SGM 055/76101052 7MA-2010-2FA31 Meßzusätze SIPAN 2 EL101055 D 06 F, MS R 3/4" A Druckminderer mit Mano101056 111.10.100 (9032681) Manometer 111, 0-1 bar 100 mm, G 1/2"101057 MPW 103 GL Plattenfedermanometer 0-10 bar101058 MREB 100, 0-10 bar G1/2"Rohrfedermanometer101062 PVC-Klemmkörper m. EPVC-Klemmkörper m. Elektrodenspitzen101096 400319 01101672 Sitz KVS 100 z. Stellv. 241DN101097 303098 1090-6292 Kegel met.l.KVS200101099 400276 0110-1518 Sitz KVS 200 Stellv. 241 DN125101100 303549 1090-8249 Kegel met.l.KVS200 Stellvent. 241 DN125101102 407926 Kegelstange 243 DN 150101103 400394 01102013 Sitz zum Stellventil 243 DN150101104 586 217 Kegel oben KVS=190 zum Stellven.243DN150101105 906315 1180-8425 Balg vollständig PN 10 (Ventil 3510)101111 FR42B 0,5-6bar Filterdruckminderer FR42B 0,5-6bar101112 FR62B 0,5- 6bar R1" Filterdruckminderer FR62B 0,5- 6bar R1"101113 637.55C Filterdruckminderer 0,5-10 bar R 1 1/2"101115 71220010 Wartg.-satz zu aut.Flüs.Ent-/Belüft.1.10101118 7145023T Wartg.-satz zu aut.Flüs.Ent-/B101119 C34-S 0,5-10bar 3/4" Filterdruckminderer C34-S 0,5-10bar 3/4"

Page 131: 300MM Spare Parts 5-3-122

101120 Z/030462 Schrägsitz-Rückschlagv. ASV DN101121 120103 Schrägsitz-Rückschlagv. ASV DN101124 RV 280, 1 1/2" Rückflussverhinderer101125 FR43B 0,5-10bar 1/2" Filterdruckminderer FR43B 0,5-10bar 1/2"101126 FR62-B Filterdruckminderer FR62B 0,5- 6bar 1/2"101130 YY20040H0 Steril-Probenahmeven. ESP/HALO101133 805/25/7 22 14-1-54 Durchflußmesser PP 40-540 m3/h DN 25101134 805/50/7 21 14-5-72 Durchflußmesser 805 PP,0,4-4,0 m³/h DN50101135 805/50/7 21 14-5-73 Durchflußmes. 805 PP, 0,6-6,4 m3/h DN 50101136 805/65/7 21 14-5-77 Durchflußmes. 805 PP, 1-11 m3/h DN 65101137 807/32/7 21 14-5-61 Durchflußmes. 807 PP, 40-540 l/h DN 32101138 807/32/7 21 14-5-62 Durchflußmesser Typ 807: 200-22500l/h DN101139 807/50/7 21 14-5-72 Durchflußmes. 807 PP, 0,6-6,4 m3/h DN 50101140 807/65/7 21 14-5-77 Durchflußmes. 807 PP,1500-18000l/h DN 65101141 17.002.190 Durchflußmes. M23/PVDF,100-1000 l/h DN25101142 17.002.191 Durchflußmes. M23/PVDF,200-2000 l/h DN40101145 17.000.688 Durchflußmes. M23/TR/PVC,8000-60000 l/h101147 805/20/7 21 14-5-46 Durchflußmes. 805, 15-160 l/h DN 20101148 805/32/7 22 14-5-62 Durchflußmes. 805, 100-1500 l/h DN 32101149 805/32/7 21 14-5-63 Durchflußmesser 805 200-2300 l/h DN 32101152 807/32/7 21 14-5-63 Durchflußmes. 807, 25-900 l/h DN 32 ???101153 807/50/7 21 14-5-73 Durchflußmes. 807, 0,6-6 m3/h DN 50101154 807/50/7 21 14-1-73 Durchflußmesser 1-10 m3/h DN 50101155 807/65/7 21 14-1-77 Durchflußmes. 807 PVC, 2-20 m3/h DN 65101157 822/50/7 21 14-5-73 Durchflußmes. 822, 1,1-11 m3/h DN 50101158 825/25/7 21 14-1-53 Durchflußmes. m. Son.ska. 1,8-20 m3/h101159 835/25/7 22 4-20-54 Durchflußmes. 835, 2-26 m3/h DN 25101160 835/50/7 21 14-5-72 Durchflußmes. 20-200 m3/h m. Son.skala101162 845/65/D 0514-5-44 Durchflußmes. 845, 5-32 m3/h DN 65101163 845/65/D 0514-5-40 Durchflußmes. 845, 2-25 m3/h DN 65101164 857/15/7 21 14-5-22 Durchflußmes. 857, 16-160 l/h DN 15 PP101165 857/15/7 22 14-1-22 Durchflußmes. 857, 16-160 l/h DN 15 PVC101169 807/50/7 21 14-5-71 Durchflußmes. 807, 400-4000 l/h DN 50 PP101171 815/20/7 21 14-1-47 Durchflußmesser 815 DN 20101358 H07V-U 1x2,5 qmm sw Aderleitung schwarz101359 H07V-U 1x2,5 qmm bl Aderleitung blau101360 H07V-U 1x4 qmm sw Aderleitung schwarz101363 H07V-U 1x2,5 qmm gr/gb Aderleitung grüngelb101364 H07V-U 1x4 qmm gr/gb Aderleitung grüngelb101365 H07V-U 1x6 qmm gr/gb Aderleitung grüngelb101369 H05V-K 1x0,75 qmm rot Verdr.Leit. rot101370 H05V-K 1x0,75 qmm bl Verdr.Leit. blau101372 H05V-K 1x0,75 qmm br Verdr.Leit. braun101373 H05V-K 1x1 qmm sw Verdr.Leit. schwarz101374 H05V-K 1x1 qmm wß Verdr.Leit. weiß101378 H05V-K 1x1 qmm viol Verdr.Leit. violett101379 H05V-K 1x1 qmm br Verdr.Leit. braun101380 H07V-K 1x1,5 qmm sw Aderleitung schwarz101382 H07V-K 1x1,5 qmm bl Aderleitung blau101383 H07V-K 1x1,5 qmm ora Aderleitung orange101384 H07V-K 1x1,5 qmm br Aderleitung braun

Page 132: 300MM Spare Parts 5-3-122

101387 H07V-K 1x4 qmm sw Aderleitung schwarz101388 H07V-K 1x4 qmm bl Aderleitung blau101390 H07V-K 1x6 qmm bl Aderleitung blau101392 H07V-K 1x10 qmm bl Aderleitung blau101393 H07V-K 1x16 qmm sw Aderleitung schwarz101394 H07V-K 1x16 qmm bl Aderleitung blau101395 H07V-K 1X1,5 qmm gr/gb Aderleitung grüngelb101396 H07V-K 1x2,5 qmm gr/gb Aderleitung grüngelb101398 H07V-K 1x6 qmm gr/gb Aderleitung grüngelb101399 H07V-K 1x10 qmm gr/gb Aderleitung grüngelb101404 H05V-K1x0,75 qmm ultraVerdr.Leit. ultramarinblau101405 H05V-K 1x1 qmm ultramarVerdr.Leit. ultramarinblau101406 H05V-K 1x1 qmm ora Verdr.Leit. orange101419 EDS 35 Dämmerungsschalter EDS 35101420 EDS 98 Dämmerungsschalter EDS 98101540 1418-060 SCHUKO-Stecker m. PVC-Mantel grau, bruch101541 1176-110 Schuko Kupplung weiß101542 1679-060 SCHUKO-Kupplung m. Tülle grau101548 13A CEE-Stecker 16A m. Kabelnickelschutz101549 TA 32 5-pol. CEE-Steckdose TA 32 Aufputz101550 16A CEE-Kupplung 32A 5-pol. mit Kabelnickels101551 14A CEE-Stecker 32A m. Kabelnickelschutz101553 SD7 leer 5-pol gr Abzweigdosen Aufputz 75x75x37mm grau 332101554 D 9045 5-pol 6x1,5 Abzweigkasten für 4mm101555 K 9105 5-pol Abzweigkasten f. 10mm101567 37/0 Erdungsbandschellen 1/8-3/8"/6 qmm verni101568 37/4 Erdungsbandschellen 3/8-4"/16 qmm vernic101575 J-Y(ST)Y-LG 10x2x0,6 Installationsleitung 10x20x0,6101701 SV3093 Abdeckungen seitl., zu SV 3418101702 SV3401 NH-Reitersicherungslasttrenner Gr 00101703 SV3408 Berührungsschutzblendrahmen101704 SV3410 NH-Reitersicherungslasttrenner Gr 1101705 SV3429 Stirn- und Fußplatten zu SV 3428/SV 3430101706 SV3435 Stirn- und Fußplatten zu SV 3434/SV 3436101708 SV3522 Berührungsschutzabdeckung101716 TELXVAC21 TEL XVAC21: Einspeiseel.u.Deckel101717 TELXVAC01 TEL XVAC01 Befestigungssockel101718 TELXVAC36 TEL XVAC36 blaue Kappe101719 TELXVAC33 TEL XVAC33 grüne Kappe101720 TELXVAC35 TEL XVAC35 orange Kappe101721 TELXVAC34 TEL XVAC34 rote Kappe101733 TELXVAC12 TEL XVAC12 Befehlsgeräte101736 TELXVAC02 TEL XVAC02 Rohr 100mm101771 11031 Schuko-Steckdose Einbau 16A/230V bl101772 Typ 1 5-pol CEE-Steckdose TA 16A Aufputz101773 Typ 1461 5-pol 16A CEE-Anbausteckdose 16A101774 Typ 1461 5-pol 32A CEE-Anbausteckdose 32A101775 92422B CEE-Steckdosenkombination101777 J-Y(ST)Y-LG 20x2x0,6 Insatallationsleitung 20x2x0,6101819 SV 3408000 Blendrahmen101820 SV3531 Reitersicherungselement E33

Page 133: 300MM Spare Parts 5-3-122

101821 VT03068-00 Trafo f. Polylux 230V 400 VA101911 L33K Nebelöler G 1/2101913 AB1NDZ3EH4 Pall Posidyne Filter N66 2L 0,04101915 46979-00 Lampe f. Silica Analyz. 5000101918 698102 Nuclepore RO-Vorfilter101919 PTG 12/36 PG 13,5 Temperaturfühler PTG 12/36 PG 13,5102025 LTGTA RK-50-277/5,6 PMODULKABEL WAK, 5m f. UV-Anlage, 36099102026 161.305.339 Siebrohr 0,5mm PVC-U 20DN15102027 22416202 Blitzleuchte rot 230 V102028 22416203 Blitzleuchte gelb 230V102029 22416205 Blitzleuchte blau 230V102030 22416204 Blitzleuchte grün 230V102062 UVC9004, 14396 UV-Anlage Strahlerüberwachung Kontrollpl102072 ET G/4A 1601 PP ET F. DOSIERPUMPE G/4A 1601 PP102142 011520 ET für Testomat Spiegel102143 011280 ET für Testomat Schwenkring102245 TelXVAC03 Tel XVAC03 Rohr 400mm102283 161.305.688 Siebrohr d=90mm, DN 80, 3" Loch 0,8mm102288 131067127 Seilzugnotschalter f. Kammerfi102291 FI430004 4/3-Wegeventil f.Hydraulikeinheit Presse102297 131067243 Rückschlagventilpatrone f. Hydraulik der102301 477735 Kettenrad f. Plattenverschiebung Presse102302 317358 Endschalter Plattenverschiebun102305 465076 Anfahrklinke Plattenverschiebun102306 SI 412 Rollenkette, Steckglieder, Außennietgli.102307 SP520-A4-0224 SP520-A4-0224 910102329 6FL3001-5AK01 Kabelsatz f. Compaß102596 GHG5317506 EX-Stecker 16A 5pol.102597 GHG5434306 EX-Anbausteckdose 16A 3pol.102598 GHG5314506 EX-Anbausteckdose 16A 5pol.102603 SP 16A 5-pol PG16 CEE-Aufputz Wandsteckdose 110NI102614 6FL3004-5AK02 Kabelsatz f. Compaß102615 6FL3004-5AK03 Kabelsatz f. Compaß102725 131064479 Tuchhaltestift (Kammerfil.pres.) Fig.021102729 528094 Nutringmanschette f. Kammerfilterpresse102730 528335 Abstreifer f. Kammerfilterpresse102732 727 910 364 Reduktion PP 27.91.03 75-63 zu Typ 360102745 17.000.659 Druckbegrenz.ventil V886 DN40 0,5-10bar102748 175.315.050 Membranventil 315 D40 DN32102749 251384 Gleitringdichtung m. 1Satz Flachdichtung102750 161.346.002 Kugelhahn D20 DN15 m. Klebemuffe (ISO/MM102751 30937 KMF-1-24-5-LED Kabel mit Steckdose102798 677/15/D 202014-0 Membranventil 677 DN15 m. Verschraubung102807 131171543 Runddichtring 65 x 3,5 B NBR70102817 469908 / 479568 Distanzring / Deckscheibe102819 528211 Nutring f. Hydraulikzylinder102820 131060150 Runddichtring f. Hydraulikzylinder102822 131060378 Runddichtring f. Hydraulikzylinder102823 428329 Kolbenführungsband f. Kammerfilterpresse102824 422370 Manometer-Dichtung f. Kammerfilterpresse102825 460398 Gummimetallpuffer f. Plattenverschiebev.

Page 134: 300MM Spare Parts 5-3-122

102826 271238 Anlaufscheibe f. Plattenverschiebevorr.102827 470894 Zugfeder f. Plattenverschiebevorrichtung102828 271222 Lagerbuchse f. Plattenverschiebevorrich.102829 477082 Hohlachse f. Plattenverschiebevorricht.102874 0450 C9.0 031738X Schieberventil102876 55010321 07/-/46, 20 Durchflußmesser 25DN 20 PVC102877 271397 Anlaufscheibe102882 273050211 Überwurfmutter PP zu Typ RVIM D110 DN100102894 GewindePG7 IP68 IPON-Kabelverschraubung 6,5-3mm lichtgra102897 GewindePG13,5 IP68 IPON-Kabelverschraubung 12-6 lichtgrau I102898 GewindePG16 IP68 IPON-Kabelverschraubung 14-9 lichtgrau102899 Gewinde PG21 IP68 IPON-Kabelverschraubung 18-13 lichtgrau102900 GewindePG29 IP68 IPON-Kabelverschraubung 25-18, lichtgrau102901 GewindePG9 Isolierstoff-Verschlußschrauben102902 GewindePG11 Isolierstoff-Verschlußschrauben102903 GewindePG13,5 Isolierstoff-Verschlußschrauben102904 GewindePG16 Isolierstoff-Verschlußschrauben102905 GewindePG21 Isolierstoff-Verschlußschrauben102908 GewindePG11 DIN46320 Isolierstoff-Gegenmuttern grau102912 GewindePG29 DIN46320 Isolierstoff-Gegenmuttern grau102914 GewindePG9 DIN3535 Außenschlußgewinde-Dichtringe102915 GewindePG11 DIN3535 Außenschlußgewinde-Dichtringe102918 GewindePG21 DIN3535 Außenschlußgewinde-Dichtringe102921 145661 Typ A DN20/2Gummi-Kompensator102923 180 x 44 DN50 Montagerohr102948 E-Cu 2x0,75 8mm gr Doppel-Aderendhülsen grau 51392102950 E-Cu 2x1,5 8mm sw Doppel-Aderendhülsen schwarz 51396102951 E-Cu 2x2,5 8mm bl Doppel-Aderendhülsen blau 51398102952 HIS 3/64 sw Schrumpfschlauch 1,2-0,6 mm schwarz 300-102953 HIS 1/16 sw Schrumpfschlauch 0,8-1,6mm schwarz 300-3102955 HIS 1/8 sw Schrumpfschlauch 1,6-3,2mm schwarz 300-3102958 HIS 3/8 sw Schrumpfschlauch 9,5-4,7mm schwarz 300-3102959 HIS 1/2 sw Schrumpfschlauch 12,7-6,4mm schwarz 300-103042 MRE 100x6 bar/üST/MUPRohrfeder-Manometer für Reinstwasser103074 W276.3/4 Handnotleuchte 11145000276103075 WH f.W276.3/4 Wandhalterung f. Handnotleuchte W276.3/4103078 DN 50 100.103 Schlauch-Quetschventil DN 50103179 90013 Easicult-Combi (Kontaminationsteste)103395 5x 0,75-1,5 Leuchten-/Geräteklemme 5x 0,75-1,5103398 5x 1,0-2,5 Leuchten-/Geräteklemme 5x 1,0-2,5103400 8x 1,0-2,5 Leuchten-/Geräteklemme 8x 1,0-2,5103609 GHG41188253R1300 Ex-Not-Aus-Schlagschalter, 2 Öffner103610 GHG1149240V-1701 Universalbarriere Ex (ia)103702 74210901/91 Wasserfilter für KUMA 3000103713 6121745 Pasteur-Pipetten 1,9ml, 155mm lang103716 6125704 Tip-Rack 0,1-20µl 10x96 Tips103865 PENV-PS/0-S-L-GH Auswerteeinheit 152704-N507, 10bar103986 00135146 Flachdichtungen 52/70 x 0.3 Nr. 400.2103987 00135143 Flachdichtungen 20.5/24 x 0.3 Nr. 400.3103988 00198252 Gleitringdichtung NU 028 S0-1A Nr. 433104013 90382 Sechskantschrauben M8x25

Page 135: 300MM Spare Parts 5-3-122

104057 UT12-12T-12FN1 STECKVERB. T-FORM (TCM104070 UT8-12-8-FN-1 STECKVERB. T-FORM 3/4"x 3/4"x 1/2"104122 909505 Filterpatrone f. Verdichter KDT 2.140104282 40300009 Luftbeschickungsarmatur104722 807/25/7 21 14-1-54 Durchflußmesser 807/DN25 100-1000l/h104732 199.036.253 + 198.800.73Absperrklappe 036 DN80 + Antrieb PA40104743 199.036.256 + 198.800.73Absperrklappe 036 DN150 + Antrieb PA60104783 71702447 Anschlußdichtung PCTFE AD18 ID7 7x18x2104842 5.00453e+007 Diagrammrollen Endkontrolle B 108104960 18525 Stecker Spannungsversorgung FB-SD-WD9105135 198.150.562 INSTALLATIONSFITTING105307 IAS-30-A12-N-K-PTFE Induktiver Annäherungsschalter m. 5m Kab105715 89702 Dichtung Perfluorelastomer105781 5.A0100.00 G/1/4"-DN4PP Eckventil,Anschlußtyp: Innengewinde DN4/105782 5.A0200.00 G/1/4"-DN4PP Eckventil,Anschlußtyp: Innengewinde DN4/105787 RK86A-32/6-40 Feder für DISCO-Rückschlagventil 32/6-40105788 RK66A-65/10-40 Feder für DISCO-Rückschlagventil 65/10-4105789 RK86A-80/10-40 Feder für DISCO-Rückschlagventil 80/10-4105791 RK86A-100/6-40 Feder für DISCO-Rückschlagventil 100/6-4105792 RK86A-150/10-40 Feder für DISCO-Rückschlagventil 150/10-105793 RK86A-200/10-40 Feder für DISCO-Rückschlagventil 200/10-105794 PC1 G1" - DN15 Fußventil mit Überwurfmutter und Schlauc105795 PP1 G 1 1/2" - DN25 Fußventil mit Überwurfmutter und Schlauc105796 8422-0076 Dichtung f. Schmutzfänger 2N-100 DN 100105797 8422-0048 Dichtung f. Schmutzfänger 2N-50 DN50105798 8422-0056 Dichtung f. Schmutzfänger 2N-65 DN65105799 8422-0019 Dichtung f. Schmutzfänger 2N-200 DN20105800 8422-0065 Dichtung f. Schmutzfänger 2N80 DN 80105801 CPV14-RZP Reserveplatte für Ventilinsel CPV14-M1H-105832 MREB100x10bar/KE-E1/KDRohrfeder-Kontaktmanometer 0-10°C 24V DC105833 TH2005 Testindikator 0,5l, f. Testomat 2000105837 180RSP-SET Dichtungssatz f. Druckrohr SP8Z3M40-S2-1105838 180RFP-SET Dichtungssatz f. Druckrohr RO8Z4M40-V2-3105839 V91 Ent- und Belüfter, IR-Stumpfschweiß-105840 1.12 G3/4x1/2 Ent- und Belüfter Anschluß G3/4" / G1/2"105841 1.12 G1x3/4 Ent- und Belüfter Anschluß G1"/ 3/4" A/1105842 PC1 G1 - DN15 Dosierventil beidseitig mit Überwurfmutt105843 PC1 G1 1 1/2" - DN25 Dosierventil beidseitig mit Überwurfmutt105844 PC1 G 3/4" - DN10 Dosierventil beidseitig mit Überwurfmutt105849 M5970-35123-32R gestanzte Flachdichtung Gylon blau106142 SS-4F-K4-60 Filter 60µ106262 26240 Handnotleuchte Joblux106313 F120-PP5 Filterelement f. APIC-Vorfilter FMC-8-4F106562 EB8FW2 ITEM4903124 Antrieb f. Absperrklappe Z011-K1 DN125/107240 IL522 IL 522 E: 0-5A A: 4-20mA Umformer Redur600873 HT4790-5 FOAMEX ULTRA SOLV WIPER600874 HT5790S-5 FOAMEX MIRA WIPE6000126 WGFZ16D01 WAFERGARD F-16 0,05µm6000140 FLF6001V002PV N2-FILTER SUSS 0,2 µm6000153 60-135033-00-R Valve Monovat, series 0216000307 MEWHH00162 SOLENOID VALVE SV2 VXD2130-03-5DZ-QTUV

Page 136: 300MM Spare Parts 5-3-122

6000311 DM626-070 Chuck Board (Lower)6000417 KVCR256F ADAPTER KF25-1/4" VCR FEMAL6000453 ZB012 GRUNDPLATTE SERVERBOARD6000538 D35510 Rührantrieb 105 W6000539 D73629 RÜHRERWELLE PTFE D60 9,5x5506000542 CDJ2B10-30-B AIR CYLINDER6000751 6200ZZ BEARING6000805 60-000173-00GT seal assy NW 16 (KF16)6000806 60-00039-00GT seal assy NW 40 (KF40)6000807 60-00019-00GT seal assy NW 25 (KF25)6000813 922D3-SC639 O-Ring Chemraz 39,69x3,53 mm 80A6000860 RC001 RISERCARD DDR2 UBU6000924 WK004 SCHLAUCH 6MM WE (VPE)6000925 WK005 SCHLAUCH 6MM SW (VPE)6000926 WK006 WINKELSTÜCK 6MM6000927 WK007 T-STÜCK 6MM6000928 WK009 SCHNELLKUPPLUNG TROPFSICHER6000947 WK018 WINKELEINSCHRAUBER 6MM6001020 100R62RS Bearing Ball 3/8" bore ml x7/8"ODx.281276001031 138-30130-000 C-SEAL, K1S, 2 PORT, SS, W/RETAINER (MIC6001035 138-30137-000 C-SEAL, MFC, SS, W/RETAINER (MICROSEAL)6001167 47013012 MOTOR,SERVO AC6001352 9415146 VALVE (VAKUUM ) 4.331.106.21 VST6001369 91048-01 VAT 65.0 PENDULUM PLATE6001415 00015246 DICHTUNGSSATZ F.VENTIL TYP2610 BÜRKERT6001472 BH5-3739-000 DRIVER UNIT, MOTOR6001481 63510312 MOTOR VNT34-45 M4Q 045-EF01-52 F. KONDE6001531 KLO DILM115-RAC120Leist.-Schütz 55kW 2395776001879 VQ110U-5MO-Q ELEKTROMAGNETVENTIL VQ110U-5MO-Q6001970 MXP16-20 ZYLINDER SMC MIT DICHTUNGEN6002141 34306 MAGNETVENTIL MYH-5/3E-2,3-L-LED6002142 A3SJ-90A1-24EG SCHALTER MIT LED6002642 M-3ALU-4 L-STECKVERSCHRAUBUNG6002682 A2AX00001 Impact 2 Filter 0.02µm6002912 17004065 CYLINDER,GUIDED MXS12-306002925 NI-4-VCR-2-GR-.5M VCR DICHTSCHEIBE NICKEL MIT HALTERUNG6002976 18400XX2 PHOTO SENSOR EE-SX6746002977 PD00.8013 REINIGUNGSNADELN SET FÜR METALLDÜSEN6003136 Keilriemenband für A Keilriemenband für ATC976B6003137 Keilriemenband für A Keilriemenband für ATC1784B6003270 LWL5C1R40BHS2 PROFILSCHIENENFÜHRUNG6003609 3565 Dichtring O-M56003765 110.0274-N Drossel-Vent. Mal.47 Id.-Nr. 548486003846 CT039-003993-1 ADI UPS BATTERY ACT126004376 1609109100 Filter WMFB010-093/4-Big6004377 O-1669 O-Ring NBR 140x56004693 PL-1002 Absorbent Decreaser Pen6004694 PL-1003 Gold-24K - Gold pen6004695 PL-1006 Nickel pen6005036 0901585 Dichtring an Revisionsklappe6005038 981.3,5R Silikonrundschnur 3,5 mm

Page 137: 300MM Spare Parts 5-3-122

6005561 4100.0016 Abschottvorhang 1 Satz6005600 3CSA-SL Pinzette 110mm 3CSA-SL6005605 1840 Messgaspumpe6005685 HT003 Grundplatte ATX6005808 17003033 Zylinder pneumatic CY2B15H-425-XB136006141 1494Z6 Key D4GS-NK26006259 SK3397485-R Display repairable6006280 SK3396093-R Pump repairable6006300 D-F9N Sensor SMC6006301 YBB-006652-1 Kugellager NTN 7202 B 02-116006460 9413531 Sensor, Druck- AP-31P6006551 T0008x16M6542 Testtrayrahmen M65426006986 EE-SX670A Photo Sensor OMRON6006989 PZ-51L Beam Sensor OMRON6007000 VX-5-1A3 Micro Switch OMRON6007001 E5CN-Q2TC Heater Controlle OMRON6007006 CJPS16-KRJ0142-20 Air Cylinder6007009 CJ1B4-5SU4 Air Cylinder SMC6007010 CQ2B6-KRC1175-3S Air Cylinder6007012 M50L Vacuum Ejector PIAB6007013 MLD50 Vacuum Ejector PIAB6007014 M100L Vacuum Ejector PIAB6007016 M50L Vacuum Pump PIAB6007063 D4GS-N2T Safety Door Switch OMRON6007064 E3T-SL22 Sensor OMRON6007092 FXTWS-SD8-45-RB12L Air Cylinder NOK6007098 SFM-110-03-S-D Konnektorleiste 2x10polig6007099 SFM-115-03-S-D Konnektorleiste 2x15polig6007133 188077 Kurzhubzylinder ADVC-10-10-A-P-A6007180 BIA_CCLB02 Platine Image-und Joysticksteuerung6007184 EX-22A Photo Sensor SUNX6007188 DP2-20 Vacuum Sensor SUNX6007190 FD-AFM2 Fiber Sensor SUNX6007193 21K6GN-C Induction Motor ORIENTAL6007194 2RK6GNCWME-SB50 Break Motor ORIENTAL6007232 FD-G4 Fiber Sensor SUNX6007234 BMR206-412 Break Motor ORIENTAL6007326 2GN50K Getriebe f. Tray Elevator Motor ORIENTAL6007327 2LF25N-4 Getriebe f. Tray Elevator Motor ORIENTAL6007328 SB50W Bremspaket f. Tray Elev. Motor ORIENTAL6008072 RC003 Riser Card DDR3 SODIMM 240/2046008075 WL13243 Lötspitze für AD-2245, spitz, D=0,3mm6008091 PD80.1002 Dosier-Griffel 5ccm für EB/PD/CD/SD-026008271 PMC8-8FN-1 Straight Adapter, MNPT, Panel Mount,6008373 VD90.0001 Kartusche 5ccm;Polypropylen,standard, A06008374 VD90.0017 Kartuschenstopfen 5ccm;blau,glatte Wand,6008392 MY2N1 Universalrelais FICO6008397 92427.00000 DC Motor + Gear Assy 8842702010/116008528 HT004 Grundplatte X7DWN+6008567 Osram64602 Ersatzlampen für chromatischen Sensor6008570 RC004 Riser Card DDR3 SODIMM 204/204

Page 138: 300MM Spare Parts 5-3-122

6008572 LWL5C1R40BSH2-HDOFührungsschiene V-Head M65416008573 RC005 Riser Card DDR3 2406008802 5101166 NP448-096-096-002F-T1-16009058 RC006 Reverse Riser Card DDR3 SODIMM 204-2046009707 K26042-7075UP O-Ring KF406009775 10513 Piranisensor6009857 ZB022 Kabelbaumführung VT30506010217 THK SR20V2SSM 640 Linearlager6010420 SFM-105-03-S-D Konnektorleiste 2x5polig6010512 6001 2Z (ZZ) GROOVE BALL BEARING 6001 2Z (ZZ)6600758 M132 Flex Pusher Tip6600759 M143 Flex Pusher Tip6601101 16T5/620 GEARBELT 16T5/620E-3-05-01-0077299 578-323 28V 40mA FILAMENT LAMPSE-3-05-01-0089429 A221.1 ROTILABOR KUGELSCHLIFF MANSCHETTEE-3-09-01-0078294 MEENN005 PRESSURE SWITCH ZSE1-01-15LE-3-09-01-0079964 MXS-AS20 HUBBEGRENZER FÜR EMXS20-150E-3-09-01-0079965 MXS-AT20 HUBBEGRENZER FÜR EMXS20-150E-3-09-01-0089631 0675-5M-15 HTD ZAHNRIEMEN 135ZÄHNE RPP5-675-15E-3-10-01-0091153 36S0086 Air Cylinder CQ2B32-10DC-XB13E-3-21-V3-0079205 477967 O-RING SILICONE 2-214E-3-34-01-0088100 660-099798-R001 PWR SPLY,15 ABD 24VD(MG2-1F-3FE)E-3-41-01-0068145 60-051224-00 TURBO PUMPE TAH 260E-3-41-01-0078703 27-131136-00 GAUGE 2 3/4 (Leybold) 12092E-3-41-01-0078884 02-142321-00 SWITCH ROTARY 6 G/MINE-3-41-01-0078885 02-142322-00 SWITCH ROTARY 9 G/MINE-3-41-01-0079904 15-054583-00 CLIP RETAINER MOER HOLDERE-3-41-11-0082600 16-140766-00-B Slot shieldE-3-41-11-0082601 17-140881-00-B Bottom back shieldE-3-41-11-0082602 17-140885-00-B Bottom frontshieldE-3-48-01-0048176 CARRIER-HALTER CARRIER-HALTER PP-NATUR/VAE-3-49-TR-0071287 29900956 SCHALTFAHNE+VA SCHRAUBEN SF443E-3-49-TR-0071288 30000531 ULTRASCHALL SENSOR UNDK30P3712E-3-49-TR-0071290 50009015 PROFIBUS-DP MASTER PC104CIF104E-3-49-TR-0071292 50000547 REFLEX LICHTSCHRANKEWL250-P430E-3-49-TR-0071293 50000548 REFLEKTOR PL30E-3-49-TR-0071294 29900952 GABELLICHTSCHRANKE GS04M/P-30/E-3-49-TR-0071295 29900953 ENDSCHALTER BEMSTEIN IBB-U1ZAHE-3-49-TR-0071296 29900954 DRUCKLEISTE/STEUERGERÄT ELP025E-3-49-TR-0071297 29900955 HEBELSYSTEM KOMPLETT M KETTEE-3-49-TR-0072116 30001638 ANSCHLUSSLEITUNG DOL-1204-G05ME-3-50-01-0084574 213T0036-01 FINGER ASSY TFE.030 6-FINGERE-3-50-IA-0086745 18481 O-RING EPDM FÜR PUMPANSCHLÜSSEE-3-50-IA-0086746 24208 VIB ELIM,KURZ (5/8X7)E-3-50-IA-0086747 27885 VIB ELIM,LANG (5/8X22 FACE X SWAG)E-3-50-IA-0086748 20802 BYPASS VENTILE-3-50-IA-0086749 6443 DICHTUNGEN TRI CLAMP EPDME-3-50-IA-0086754 27392 FLOWSWITCHE-3-50-IA-0086755 17215 MANOMETERE-3-50-IA-0086756 10486 DICHTUNG RESERVOIR EPDME-3-50-IA-0087168 RBAP50-3 REBUILD KIT

Page 139: 300MM Spare Parts 5-3-122

E-3-53-01-0073114 H65982700 NUTMUTTER ZM06E-3-53-01-0077121 382-3474 Stecklampe T5.5K 24V AC/DC wß LEDE-3-53-01-0087978 412-576 Bussmann Sicherung 5A f. PCT PowerboardE-3-55-01-0072625 HSR10R2UUM+440LMLINEARFÜHRUNG RVP312 Y-ACHSEE-3-55-01-0075144 XL-037 ZAHNRIEMEN 0.2" ZA X 0.375 BE-3-55-01-0075145 XL-050 ZAHNRIEMEN 0.2" ZA X 0.5 BE-3-65-01-0074815 820-0230 E10 CABLE (BROOKS-PRI)E-3-65-V3-0074816 64604 HALOGENSTIFTLAMPE GY6.35 50W 12VOLTE-3-75-01-0079285 4002-4568-02 G3 A300 RIGHT SIDE HANDLEE-3-75-01-0079286 9700-9391-01 BREATHER FILTER KITE-3-75-01-0079292 9700-9390-01 COMMON PARTS G3 A300E-3-78-11-0061990 Y5000430 O-RING 2-146 KALREZE-3-78-ZZ-0083380 ABUZOLKM1 FilterE-3-78-ZZ-0083381 AHUZOCEM1 FilterE-3-96-01-0070052 2542369 O-RINGE-3-96-01-0070056 2740268900 O-RING,VITON,7-1/2 IDE-3-96-01-0070070 E35000242 O RINGE-3-96-01-0070072 E35000265 O RINGE-3-96-01-0070076 E35000301 O RINGE-3-96-01-0070083 E35000477 O-RINGE-3-96-01-0071090 12046-PA44-0003 VAT PLATTENVENTIL 12046 PA44-0003E-3-96-01-0076818 E47000247 SCREW CAP SOCKET HEAD HEXE-3-96-01-0076819 P12957015 SCREW FH PHILIPS 6-32X5/8 V8E-3-96-01-0076820 E47000291 SCREW VACUUM SHCS 8-32 X 3/8"E-3-96-01-0076821 E47000167 SCREW VACUUM SHCS 6-32 X 5/16"E-3-96-01-0076823 E47000276 SCREW VENT SHCS 8-32X1/2E-3-96-01-0076824 E47000208 SCREW VENT 6-32X3/8E-3-96-01-0076825 E47000550 SCREW VENT SOCKET HEAD CAP 5/16-18X1"E-3-96-01-0087748 E34000789 DOUBLE END SHUTOFF BULKHEAD COUPLERE-3-96-01-0087827 2548166 Einschraubw.90°1/16NPT-1/4R NY-400-2-2E-3-96-01-0088157 129900002 Nickel-Dichtungen für SA- FlaschenanschlE-3-E7-01-0073212 OPB700AL REFLECTIVE OBJECT SENSORE-3-E7-01-0088437 1006001-1 SCHWEISSBAND TEFLON FÜR FERMANT80E-3-K2-01-0063706 JS-35-00652 SUPPER RING (BOTTOM OF HEATER)E-3-K2-01-0063707 JS-35-00434B-001 SUPPER RING (TOP OF HEATER)E-3-K2-01-0063709 JS-35-00434B-002 SUPER RING (TOP OF HEATER)E-3-K2-01-0063710 JS-35-00441A-001 SUPER RING (PROCESS EXHAUST)E-3-K2-01-0063711 JS-35-00658A SUPER RING (RAPID COOLING)E-3-K2-01-0063712 5T*25W*200L SUPER RING (RAPID COOLING)E-3-K2-01-0063714 HPX-T1 FIBER SENSOR AMP.E-3-K2-01-0063715 HPF-S146 FIBER SENSORE-3-K2-01-0063716 C100DR01-M*JACEDCTEMP.CONTROLLERE-3-K2-01-0063717 JS-33-00063 MANTLE HEATERE-3-K2-01-0063718 D-Y59AL-232 SENSOR FOR B/EE-3-K2-01-0063728 TOXI1000 O2 DETECTORE-3-P9-01-0091181 ZB002 NETZANSCHLUSSLEITG M 3M SCHUTZKON.E-3-P9-01-0091183 ATX-24/20 ADAPTERKABELE-3-P9-01-0091698 ZB005 FÜHRUNGSSCHIENE (SCHUBFACH)E-E-SS-01-0088975 EE-SPZ402 SENSOR AMPLIFIER neu: EE-SP3 111EE-E-SS-01-0089911 SEE-EESPZ302-1 SENSOR AMPLIFIERE-I-10-01-0041704 CQ2A40-20DC-XB9 AIR CYLINDER CQ2A40-20DC-XB9

Page 140: 300MM Spare Parts 5-3-122

E-I-96-01-0075303 31132-KASO-0002 SOFT START VALVE DN40KFE-K-06-01-0029961 3414NG PAPST AXIALLÜFTER 24V DC, 2,4W 92x92mmE-K-36-01-0041521 HLX 64250 OSRAM XENOPHOT 6V/20WE-L-78-ZZ-0029798 W2501VC01 PHOTO-250 3-way valve controllerE-M-01-01-0061103 SYJ3220-5MOZ-M3-S DRUCKLUFTVENTIL SMCE-M-01-01-0062402 EE-SPY412 SENSORE-M-01-01-0066114 UZB1601 (EX-14A) LICHTSCHRANKEE-M-01-01-0070219 CDQSB20-70DC AIR CYLINDERE-M-01-01-0075681 AAA-MSD023A109-2 DIGITAL AC SERVO MOTOR DRIVER PANASONICE-M-01-01-0076093 E3C-S20W SENSORE-M-01-01-0085435 ZZZ-SW31230 B6223 PROP.VALVE HSV2,HSV4 f.T5585E-M-01-01-0091981 YCY-006580-1 AIRCYLINDER CDQSB16-15DM-XC36E-M-02-01-0012874 108-44910-00 SOLENOID VALVE 4-WAY 24V 50HZE-M-02-01-0012911 116-44010-00R POWER SUPPLY RAX5-300K+5V/300AE-M-02-01-0086552 VI-261-EU DC/DC Junior Converter 300V in / 12V 200E-M-09-01-0019246 SBEE-SX670 PHOTO INTERRUPTOR OMRONE-M-09-01-0019248 EE-SY671 PHOTO INTERRUPTOR RS: 219-2404E-M-09-01-0079971 MXU10-25 AIR SLIDE TABLE MOJBL035E-M-09-02-0019287 SBEE-SX671 PHOTO INTERRUPTER OMRON, siehe EE-SX671E-M-11-01-0083736 2006463 TRANSPORTRIEMEN EIN/AUSLAUFBAND SÄGE 9x1E-M-11-01-0091980 173212 SME 10-SL-LED-24 NÄHERUNGSSCHALTERE-M-12-01-0034069 535397-99 MINIATURFESTINDUKTIVITÄT 47 YHE-M-12-01-0072427 130.0200.1 TRACKSENSORMOTOR AUTOLINEE-M-17-01-0008384 9425702 DOUBLE ACT.CYLINDER ADV-20-10-S6E-M-17-01-0008579 9440369 DOUBLE ACT.CYLINDER CD85N16-50C-BE-M-17-01-0008586 9440342 SINGLE ACTING CYLINDER CQ2B-12-5SE-M-17-01-0011566 9614001 LAMP OSRAM L 10W/827 L=470mmE-M-17-01-0023837 9640548 LINEAR INDEXER POCKET TRAY OFFE-M-17-01-0045760 9420902 SINGLE ACTING CYLINDER AV-12-4E-M-17-01-0078145 9420314 SINGLE ACTING CYLINDER EGZ-6-5 15033E-M-39-01-0030269 302.850.991290 Flachsauger 8mm PFG-8A-NBR (Convum)E-M-39-01-0051533 302.850.991990 linear wayE-M-47-01-0046649 A0000001353 VACUUMFILTER 15889 (FESTO)E-M-47-01-0046651 A0000011915 SENSOR FASEROPTISCH FU-32 (KEYENCE)E-M-A1-01-0064091 090750ET1050 GLEITRINGDICHTUNG GRUNDFOSPUMPE CHI12E-M-A1-01-0067826 090750ET1031 Schwimmerventil für WasserfüllautomatikE-M-A3-01-0074647 17003027 CYL. RODLESS 6MM X 2"E-M-A3-01-0074651 17004046 CYLINDER,GUIDED MXH6-10E-M-A3-01-0077168 27006030 ELBOW,1/4" MALE NPTx5/16TUBE 369 PL-5-4E-M-A3-01-0081459 67040013 SENSOR PROXIMITY EH-308 KeyenceE-M-A3-01-0081538 AQFHF16EX-N LAMP T26 18WE-M-A3-01-0081691 GRADE E5 WP SK-PE-8/6-N-50 PE-SCHLAUCH 8MME-M-A3-01-0081692 27004022 CONNECTOR 0.25MM NPTX0.3125T 68-PL-5-4E-M-A3-01-0082099 67030004 EE-1002 CONNECTOR SENSORE-M-A5-01-0046201 E5CK-AA1-500 TEMPERATURREGLER (E5CK OMRON) 240V ACE-M-A5-VP-0077831 28200135/0,6-R SERVOMOTOR 0.60NM 4.7A 6000U, REPARIERTE-M-D5-VM-0077922 VVQ1000-J1-5_B-X1 VACUUM EJECTOR (VALVE)E-M-E7-01-0024767 607134-77 LOW-VOLTAGE COMPUTER CABLE LIYE-M-E7-01-0034070 813060-99 EFDSYN-SOLDAPULT SS 350 ANTISTATIKE-M-E7-01-0034071 817570-99 SOLDASIP ENTLÖTLITZE SW 0,6/20E-M-E7-01-0090378 HT00.0009 FLUX PEN BLEIFREI

Page 141: 300MM Spare Parts 5-3-122

E-M-J7-01-0061309 P1406 MINIATURLAMPE 14VE-M-L5-01-0054969 D-H7A1L SENSORE-M-L5-01-0055056 EE-SPY401 SENSORE-M-L5-01-0055058 EE-SX674A SENSORE-M-L5-01-0055083 SGMP-04A312, YASK SERVO MOTORE-M-L5-01-0055093 SYJ3120-5LOZ-M3-S SOLENOIDE VALVEE-M-L5-01-0055095 SYJ312-5LOZ-M3 SOLENOIDE VALVEE-M-L5-01-0061956 5IK90A-DF AC MOTOR 90W 1A 200V Oriental MotorE-M-L5-01-0062014 E3T-ST12 SENSOR (ELEV.UP POS. PALETTEC.E-M-L5-01-0075852 225-3M(W=9) TIMING BELT 602012-000184E-M-L5-01-0079121 101-8052 FAN,COVER DP201A 230V 0,125A 120x120X38E-M-L5-01-0092138 61800-ZZ BEARING (IDLING PULLEY,DOPPELT)E-M-M2-01-0053513 SMTC-102 SOLDER HEADE-M-M2-01-0053514 SMTC-101 SOLDER HEADE-M-M2-01-0053515 STTC-025 SOLDER HEADE-M-M2-01-0053516 STTC-140 SOLDER HEADE-M-M2-01-0053517 STDC-102 SOLDER HEADE-M-M2-01-0053518 TATC-501 SOLDER HEADE-M-M2-01-0059874 STTC837 LÖTSPITZEE-M-M2-01-0059875 STTC538 LÖTSPITZEE-M-M2-01-0059878 MX-DCF1 FILTERE-M-M2-01-0066396 SMTC-0138 LÖTSPITZEE-M-M2-01-0066397 TATC-602 LÖTPINZETTEE-M-M2-01-0079193 SMTC 501 LÖTSPRITZE SMDE-M-M6-01-0068273 ZP25CN VACUUM CUPE-M-N9-01-0068147 10.06.02.00049 VAKUUMSCHALTER VS-V-D-PNPE-M-P9-01-0081258 34053 kABEL AUTOVIEW UNIVERSAL 1,8ME-M-P9-01-0081260 25285 KABEL AUTOVIEW UNIVERSAL 2,4ME-M-P9-01-0081261 34055 KABEL AUTOVIEW UNIVERSAL 4.5ME-M-P9-01-0081523 20130 CYBEX LINKKABELE-M-P9-01-0082217 980366-14 ATX VERLÄNGERUNG 20POLIGE-M-P9-01-0083501 ATX-20 ATX VERLÄNGERUNG 20POL 2500MME-M-P9-01-0085132 000143 MAGNETVENTIL TYP 2610 2/2 WEGE G1/4 230VE-M-P9-01-0085165 ATX-24 ATX VERLÄNGERUNG 24POL 2500MME-M-P9-01-0085166 ATX-8 ATX VERLÄNGERUNG 8 POL 2500MME-M-P9-01-0092470 ATX24-60 ATX-STROMKABEL 24POLIG 60CME-M-P9-01-0092471 ATX8-60 ATX-STROMKABEL 8-POLIG 60CME-M-P9-01-0092472 ATX4-60 ATX-STROMKABEL 4-POLIG 60CME-M-P9-01-0092473 ZB009 MINI-DIN-KABEL PS2 6POLIG.STECKERE-M-P9-01-0092474 ZB010 SSVGA KABEL 750OHM 15 POLIG GESCHIRMTE-N-15-01-0017441 33G208 GLÜHLAMPE 24V/80MA M.SOCKEL BA9SE-N-53-01-0026896 0612434 LAMPE 24V/2W SOCKEL BA9SE-N-75-01-0003251 202-57 VENTIL MEMBRANV. PNEUM. 1/2"E-N-75-01-0003286 FC6-6FN-1 AUFSCHRAUB. GERADE 3/8" X 3/8"NPTE-N-75-01-0003388 FUT6 AUFSCHR. T-FORM GALTEK 3/8"E-N-75-01-0003392 421-66 GUN KIT SPRAYE-O-55-01-0056963 48980 MONITORKABEL Sun 15pol. HD-4 BNC (2m)E-O-55-01-0067285 AKSUN2 SUN-Monitorkabel (13W3 - 4BNC)E-P-37-01-0071593 AQW-200/300 WINDOW QUARTZE-P-37-01-0071595 ASR/6,02-200/300 ORING CHEMRAZ 6,02 X 2,62E-P-37-01-0071598 APR-200/300 PTFE RING 2MM, DIAMETER 12MM

Page 142: 300MM Spare Parts 5-3-122

E-P-37-01-0073781 CAS/EL/CHAMBER-B KABEL 9POLSUBD/F/M TRIGKONTR HERCMOD/CHE-P-37-01-0073783 CAS/EL/CHAMBER-C KABEL 9POLSUBD/F/M TRIGKONTR HERCMOD/CHE-P-37-01-0073784 CAS/EL/CHAMBER-D KABEL 9POLSUBD/F/M TRIGKONTR HERCMOD/CHE-P-37-01-0073995 CAS/EL/CHAMBER-A KABEL 9POLSUBD/F/M TRIGKONTR HERCMOD/CHE-V-01-01-0025234 YBT-006669-1 TIMING BELTE-V-01-01-0064473 UZB2012 LICHTSCHRANKE neu:EX-11EBE-V-01-01-0068312 6300C3LLUA KUGELLAGER 6300C3LLUAE-V-01-01-0070293 303-2139 STRAHLDURCHGANGS-SENSOR RSE-V-01-01-0073727 LWLC7C2R90BHS2 LINEARLAGER PITCH CONVERSIONE-V-01-01-0073728 LWLC9C1R60BH LINEARLAGER W-HEADE-V-01-01-0073729 LWL5C1R40HD0 LINEARLAGER V-HEADE-V-01-01-0073730 MF74ZZ BUNLAGER PITCH CONVERSIONE-V-01-01-0073731 LWL7C4R180BH LINEARLAGER PITCH CONVERSIONE-V-01-01-0080356 CDJPB6-10D AIR CYLINDERE-V-01-01-0081137 YBT-007723 FAN BELT 5M 462 POLYFLEX PURE-V-01-01-0081521 DS-600812B INSERTE-V-01-01-0092137 YAE-007630 EJEKTOR ZSE3-0X-23X110E-V-11-01-0075155 61802 Rillenkugellager 61802 SKFE-V-11-01-0086372 2006255 ZAHNFLACHRIEMEN 6T2,5/200 80 ZÄHNEE-V-17-01-0014723 LP-199 LEAD AWAY PATCHESE-V-17-01-0016947 PFG-8A-SI SUCTION CUP (Convum 370520)E-V-17-01-0016964 9424608 DOUBLE ACTING CYL. DSNU-10-25 PAE-V-17-01-0077825 9312409 GEARBELT 4T 2,5/160E-V-23-01-0087845 50013530 SCHÜTZ DIL00AM 230V 50/60HZ 16AE-V-47-01-0054908 P3200118 SCHALLDÄMPFER VACUUM MODUL (SMC) IHS 500E-V-47-01-0054909 ZX1-FE VACUUM FILTER (SMC) IHS 500E-V-47-01-0067329 A33540200001 X-AXIS LAGER UMLENKROLLEE-V-55-01-0040288 03034200 ENTSORGUNGSSYSTEM GB1033 K1 NILFISKE-V-77-ZZ-0033708 PFA2GFT12EH1 PFA-MEGAPLASTGEHÄUSE 20"E-V-77-ZZ-0034596 R1F007 FILTERELEMENTE-V-86-01-0007556 T-10-500 ZAHNRIEMEN SYNCHROFLEXE-V-86-01-0007557 V25-T10DL-6610 ZAHNRIEMEN BRECOE-V-86-01-0007558 V16-T10-4220 ZAHNRIEMEN BRECOE-V-86-01-0007559 V16-T10-1970 ZAHNRIEMEN BRECOE-V-86-01-0011264 200386 FILTERBEUTEL PP GR. IIE-V-92-01-0023331 L7406 LAMP 21V 150WE-V-A5-VM-0072430 PFG-5-SI SUCTION CUPE-V-B1-01-0037730 2005056 ZAHNRIEMEN 6-T2,5/177,5E-V-B1-ZZ-0013505 S-CS-W4A CAP SLEEVEE-V-B1-ZZ-0016786 2004796-00 MALE ELBOW S-MEW2-N2BE-V-C1-01-0048794 XBOR180W/45C Xenon Lampe 180WE-V-E1-ZZ-0024298 531110016 PP-FILTERKERZE 30µME-V-E1-ZZ-0024415 53111.0014 FILTERKERZE 10" 5µME-V-E2-ZZ-0015076 PO-200-P01A-40L SNAP-RING FILTERBEUTELE-V-E7-01-0016307 64640 LAMP 150W 24V HLX XENOPHOTE-V-E7-01-0016592 64619 OSRAM LAMP 14.5V 90WE-V-E7-01-0019215 0221005200 PINZETTE 110mm 3 CBSE-V-E7-01-0019219 0221032500 PINZETTE 52A SAE-V-E7-01-0019221 0221051600 PINZETTE AA SAE-V-E7-01-0023956 0221001900 PINZETTE 2A SA SLE-V-E7-01-0024770 530174-76 ERSATZGLASFASERPINSEL

Page 143: 300MM Spare Parts 5-3-122

E-V-E7-01-0066683 35a SA-T PINZETTE 120MM 35a SA-T mit Teflon -OHME-V-E7-01-0066684 GG SA PINZETTE 135MM SPITZ, OHM GG SAE-V-E7-01-0066685 SS SA PINZETTE 140MM SPITZ, OHM SS SAE-V-E7-01-0069760 5-193-ESD PINZETTE KUNSTSTOFF 6MM LEITFÄHIGE-V-E7-01-0073327 2 ASA-SL-T PINZETTE 2 ASA-SL-TE-V-E7-01-0089205 1200-002 LÖTSPITZE JBC PA-1200E-V-E7-01-0089963 SY382614 TIEFENFILTERKERZE 10µM TFK-NXNT-10-10NE-V-E7-01-0089964 SY407460 TIEFENFILTERKERZE 10µM TFK-NXNT-10-20NE-V-G3-01-0021939 PFG-6A VACUUM CAP NBR/PAD DIA 6MME-V-G3-01-0021940 PFG-10 VACUUM CAP NBR/PAD DIA 10MME-V-G6-01-0022887 6040060 LIDGASKET 4X8 MME-V-G6-01-0023896 6040064 DECKELGUMMI VM 201E-V-G8-01-0023612 07568 VAKUUMFILTERE-V-G8-01-0023613 07094 SAUGER DURCHMESSER 3.5MME-V-H1-01-0073399 98443-R1 ERSATZT.KIT/VERRIEGELUNGSKUGELE-V-H1-IS-0075453 99205-R1 TEIL RILLENKUGELLAGERE-V-H8-LL-0029489 9958869 (P/N 9957759HALOGENLAMPE JCR 21V 150W(P/N 9957759)E-V-I9-01-0036208 22200102 TRANSMISSINS-TARGET 6 MIKROMETER WOFLRAE-V-I9-01-0036209 41507337 O-RING VITON 8 X 2E-V-I9-01-0036210 41507245 O-RING VITON 14 X 2 (2 EA MINIMUM)E-V-I9-01-0036211 41507061 O-RING SIMRIT 19 X 1,8E-V-I9-01-0036212 41000132 HIGH SPEED FUSE GENERATOR 10AE-V-L5-01-0070915 170-862 MELDELAMPE AMPEL 24V 5W BA 15S OSRAME-V-L5-01-0072760 265-7816 MULTICHIP-LED T1 3/4 ROTE-V-L5-01-0072761 265-7822 MULTICHIP-LED T1 3/4 GRÜNE-V-L5-01-0072762 265-7838 MULTICHIP-LED T1 3/4 GELBE-V-L5-01-0076909 VXG2330-02-5TZ ELEKTROMAGNETVENTIL LN2 1/4 INCHK-3-41-PV-0063009 22-123073-00 LATCH, DRAW K5-2856-52K-V-77-ZZ-0049679 ACS0723EC O-RING G2-GEH..FEP/VITONK-V-77-ZZ-0049687 R1F003 PROFILE IIK-V-77-ZZ-0049689 R1F050 PROFILE IIK-V-E3-01-0078150 932C0-SC513 CHEMRAZ SC513 KF FLANSCH KF25W-A-70-01-0000622 SS-6M0-9 WINKELVERSCHRAUBUNG 6MMX6MMW-A-70-01-0000631 SS-8M0-6-6M GER.RED.VERSCHR.8MM X 6MMW-A-70-01-0006838 SS-10M5-8M Stützhülse SS 8mm ID * 10mm ODW-A-70-01-0006843 SS-8M2-1 ÜBERWURFMUTTER 8MMW-A-70-01-0006845 SS-2M4-1 Klemmring hinten SS 2mmW-A-70-01-0006859 SS-4-HC-1-2 EinschrauberTülle SS1/8NPT A*1/4ID SchlaW-A-70-01-0006870 SS-4-HC-7-2 AufschrauberTülle SS1/8NPT I*1/4ID SchlaW-A-70-01-0006872 SS-2M3-1 Klemmring vorn SS 2mmW-A-70-01-0006874 SS-4M3-1 Klemmring vorn SS 4mmW-A-70-01-0006884 SS-6M0-R-8M REDUZIERSTUTZEN 6X8 MM ROHRW-A-72-01-0002743 B2751055UB FETT FU90W-A-72-01-0002750 BP217488-X Schlauch Well- Edelstahl DN16 X 500W-A-72-01-0002751 BP217490-X WELLSCHLAUCH Edelstahl DN16 X 1000W-A-72-01-0002768 BP213277-T ZENTRIERRING KPL DN 50 ISO-KFW-A-73-01-0002824 1072859 SICHTLAGERKÄSTEN GELB 230X150X130mm MK4W-A-73-01-0002825 1072846 SICHTLAGERKÄSTEN GRÜN 230X150X130mm MK4W-A-80-01-0012108 002238 Schlauch PL 9 11,6 OD 9,0 IDW-A-80-01-0012109 002237 Schlauch PL 6 8,4 OD 6,0 IDW-A-80-01-0012118 13365 Schlauch PU 2 BLAU 3,2 OD 2,2 ID

Page 144: 300MM Spare Parts 5-3-122

W-A-80-01-0015397 15275 Schlauch PU 1/4"OD 9/64"ID schwarzW-A-80-01-0062334 34303 MAGNETVENTIL MIT LED MYH-5/2-2,3-L-LEDW-A-80-01-0086777 152704 PE-WANDLER PENV-PS/O-S-L-GHW-A-83-01-0011948 35F210 KLEMMPRÜFSPITZE ROTW-A-83-01-0012005 86F4551 VERBINDUNGSLEIT. BLAU 1.0 MW-A-84-01-0006131 518-056 ZINN-BLEI-LOT M.FLUSSM. 0,56MMW-A-84-01-0006132 517-918 ZINN-BlEI-LOT M.FLUSSM. 1.22MMW-A-84-01-0006134 424-068 KROKODILKLEMMEN 4mm isoliert rotW-A-84-01-0085307 570-688 Philips-Lampe PL-S 9W 4-pol.W-A-B4-01-0088159 AR2500-02BG DRUCKREGLERW-A-G6-01-0088341 H51117 MITNEHMERSCHRAUBE F.SCHWEISSZANGE 60CMW-A-G6-01-0088342 H51118 ACHSE F: SCHWEISSZANGE 60CM Rische & HerW-A-G6-01-0088343 H51119 LAGERSCHEIBE F. SCHWEISSZANGE 60CMW-C-AA-01-0071060 436532 ALUMINEUMBÖRDELKAPPENW-H-70-01-0014200 SS-4M0-6-4 GERADE RED.VERSCHRAUB.4MMX1/4"W-H-70-01-0017191 SS-6-MTA-7-4RG ROHRSTUTZEN 6MM X G1/42 IW-H-70-01-0021189 SS-810-1-8-OR Einschrauber SS 1/2NPT OR A*1/2 SchneidrW-H-72-01-0023693 BPSPEZ01 ÜBERGANGSSTÜCK DN25KF/DN40CF KA3525W-H-80-01-0043220 152589 Schlauch PU 12,0 OD 8,0 ID grauW-H-80-01-0089529 15871 CN-M3-PK2 STECKNIPPELVERSCHRAUBUNGW-H-83-01-0016773 91F172 Schrumpfschlauch 9,0-3,0 MMW-H-83-01-0016774 91F166 Schlauch schrumpf 3,2-1,6MMW-H-83-01-0016775 91F178 Schlauch schrumpf 25,4-12,7MMW-H-83-01-0019946 91F174 Wärmeschrumpfschlauch V12 N7-6,4MM Typ DW-H-83-01-0019949 55F4122 D-SUB-STECKER15POL.KUPPLUNGW-H-83-01-0019950 55F4132 D-SUB-BUCHSE 15POL.KUPPLUNGW-H-83-01-0019952 55F4134 D-SUB-BUCHSE 25POL.KUPPLUNGW-H-83-01-0041574 88F305 GERÄTEANSCHL.LEITUNG 1,5m KALTGER.KUPPL.W-H-84-01-0014207 359-992 BANDKABEL FARBIG 37ADRIGW-H-84-01-0014209 359-964 BANDKABEL FARBIG 25ADRIGW-H-84-01-0014213 359-920 BANDKABEL FARBIG 14 ADRIGW-H-84-01-0043204 408-9445 ISOLIERBAND,GLASFAS.,155° 25MMW-H-AA-BE-0084430 V9018-B VACUUM CUP 3/16" BLACK BUNAW-H-AA-BE-0084431 V9025-B VACUUM CUP 1/4 " BLACK BUNAW-H-AA-BE-0084868 V8901-ESD PEN-VAC (VAKUUMPINZETTE)W-H-AA-SU-0051160 6720-6003-5-00c Dokumentenhalter A5 ESDW-H-B4-01-0047010 KJT04-06 T-STÜCK M.REDUKT.von 6mm auf 2x4mm (SMC)W-H-B4-01-0089526 ARJ1020F-M5-04 MINIATURDRUCKMINDERERW-H-B4-IM-0075400 CDQ2B32-10DC-XB13 ZYLINDER, PNEUMATIK SMCW-H-C6-01-0014088 SJ354D FLEXIBLER DRUCKVERSCHL 25MMW-H-D9-01-0051968 72559 Schlauch PU 3,2 OD 1,6 ID blauW-H-D9-01-0051969 71248 Schlauch PU 3,2 OD 1,6 IDW-H-D9-01-0077837 C70747 Klammer für Tubing NORPRENE. 31 IDW-H-E5-01-0015974 FU-48 REFLEXLICHTTASTER FU-48W-H-F7-01-0054201 HS-3 SCHLAUCHVERBINDER ID 3MMW-H-G4-01-0087163 ISO250VR ISO250 O-RINGW-H-I4-01-0089493 6770-04005-1-01(B) FOUP-Steckkarte High-kW-H-I4-ET-0057082 6723-0002-1-00 Scratcher MxP + ESC (ETCH)W-H-I4-ET-0057083 6723-0002-2-00 Scratcher MxP + Oxide ESC (ETCH)W-L-H6-01-0029259 EI33EP0-SD (alt:EI30EP0-VAKUUMPINZETTENSPITZE GERADEW-L-H6-01-0029271 QDC1/4T-CTSSD14T VAKUUM-SCHNELLVERSCHLUß INKL. SCHLAUCH

Page 145: 300MM Spare Parts 5-3-122

W-L-H6-01-0029314 EI30EP30-SD VAKUUMPINZ.SPITZE 30`ABGEWINKTW-N-71-01-0019985 270008025 SECHSKANTSCHR. DIN933 M8X25W-N-A2-01-0016320 218005012 ZYL.SCHR.INBUS DIN912 M5X12W-N-A2-01-0017261 250a8-411 SICH.RING A/WELLE DIN471 8x0.8W-N-A2-01-0024804 970249012 UNVERLIERBARKEITSSCHEIBE F.M6W-N-A2-01-0024808 971208028 KUGEL 3,0MMW-N-A2-01-0024809 971208029 KUGEL 4,0MMW-N-A2-01-0032017 330025008 SENKK.SCHR.SCHL.DIN963 M2,5X8W-N-E4-01-0016295 ISKS8-32X1/2 ZYL.SCHR.INBUS DIN912 UNC 8-32X1/2"W-N-E4-01-0019509 ISKS8-32X7/8 ZYL.SCHR.INBUS DIN912 UNC 8-32X7/8"W-N-E4-01-0019512 ISKS3/8-16X1,5 ZYL.SCHR.INBUS DIN912 UNC 3/8-16X1,5"W-N-E4-01-0024326 SKIS4-40X3/8 SENKK.SCHR.INBUS DIN7991 UNC 4-40X3/8"W-N-E4-01-0024341 SKIS10-32X1 SENKK.SCHR.INBUS DIN7991 UNF 10-32X1"W-N-E4-01-0024918 FKSKS6-32X3/4 FLACHR.K.SCHR.KREUZ.SCHL.6-32X3/4"W-N-E4-01-0029347 ISKS10-32X1/2 ZYL.SCHR.INBUS DIN912 UNF 10-32X1/2"W-N-E4-01-0040223 GST8-32X3/8 GEWINDEST.INB./ZAPFEN DIN915 8-32X3/8"

Page 146: 300MM Spare Parts 5-3-122

Supplier Group

10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares11118 Georg Fischer GmbH Wasser Ver/Entsorgun facility spares

Umlag von IFD an QD Wasser Ver/Entsorgun facility sparesUmlag von IFD an QD Wasser Ver/Entsorgun facility spares

10326 Hager & Elsässer Wasser Ver/Entsorgun facility sparesUmlag von IFD an QD Wasser Ver/Entsorgun facility spares

10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10794 Thyssen Schulte GmbH Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares11118 Georg Fischer GmbH Heiz/Klimatechnik facility spares11118 Georg Fischer GmbH Heiz/Klimatechnik facility spares11118 Georg Fischer GmbH Heiz/Klimatechnik facility spares11118 Georg Fischer GmbH Heiz/Klimatechnik facility spares

Umlag von IFD an QD Heiz/Klimatechnik facility sparesUmlag von IFD an QD Heiz/Klimatechnik facility spares

10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares

N/A N/A Wasser Ver/Entsorgun facility sparesN/A N/A Wasser Ver/Entsorgun facility sparesN/A N/A Wasser Ver/Entsorgun facility sparesN/A N/A Wasser Ver/Entsorgun facility spares

Kreditor-Nr.

Warengruppen-bezeichnung

Page 147: 300MM Spare Parts 5-3-122

10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares

N/A N/A Wasser Ver/Entsorgun facility sparesN/A N/A Wasser Ver/Entsorgun facility sparesN/A N/A Wasser Ver/Entsorgun facility sparesN/A N/A Wasser Ver/Entsorgun facility sparesN/A N/A Wasser Ver/Entsorgun facility sparesN/A N/A Wasser Ver/Entsorgun facility spares

10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares

N/A N/A Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10465 KSB Service GmbH Schwedt Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares13240 Tyco Valves & Control Distribution Wasser Ver/Entsorgun facility spares

Page 148: 300MM Spare Parts 5-3-122

10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares12390 GNA Stulz GmbH Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares13151 Josef Emmerich Pumpenfabrik Gm Wasser Ver/Entsorgun facility spares13151 Josef Emmerich Pumpenfabrik Gm Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares13151 Josef Emmerich Pumpenfabrik Gm Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares14391 SIEMENS AG Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares

Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares

Page 149: 300MM Spare Parts 5-3-122

10145 ASV-STÜBBE GMBH & CO. KG Wasser Ver/Entsorgun facility spares11118 GEORG FISCHER GMBH Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10303 GEMÜ Gebr. Müller Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares

Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares13937 Sonepar Deutschland Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares13937 Sonepar Deutschland Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares13937 Sonepar Deutschland Stark/Schw.stromtech facility spares13937 Sonepar Deutschland Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares

Page 150: 300MM Spare Parts 5-3-122

14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares13937 Sonepar Deutschland Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares13937 Sonepar Deutschland Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares13937 Sonepar Deutschland Stark/Schw.stromtech facility spares13937 Sonepar Deutschland Stark/Schw.stromtech facility spares13937 Sonepar Deutschland Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares13937 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares13937 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares13937 Sonepar Deutschland Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares

Page 151: 300MM Spare Parts 5-3-122

14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares

Wasser Ver/Entsorgun facility spares10092 Dr. A. Kuntze GmbH Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares11118 Georg Fischer GmbH Wasser Ver/Entsorgun facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares10867 WEDECO AG Wasser Ver/Entsorgun facility spares11038 ProMinent Dosiertechnik GmbH Wasser Ver/Entsorgun facility spares10298 Gebrüder Heyl Wasser Ver/Entsorgun facility spares10298 Gebrüder Heyl Wasser Ver/Entsorgun facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares11118 Georg Fischer GmbH Wasser Ver/Entsorgun facility spares11053 Andritz Separation GmbH Wasser Ver/Entsorgun facility spares11053 Andritz Separation GmbH Wasser Ver/Entsorgun facility spares11053 Andritz Separation GmbH Wasser Ver/Entsorgun facility spares11053 Andritz Separation GmbH Wasser Ver/Entsorgun facility spares11053 Andritz Separation GmbH Wasser Ver/Entsorgun facility spares11053 Andritz Separation GmbH Wasser Ver/Entsorgun facility spares11053 Andritz Separation GmbH Wasser Ver/Entsorgun facility spares13151 Josef Emmerich Pumpenfabrik Gm Wasser Ver/Entsorgun facility spares

Stark/Schw.stromtech facility spares11680 CEAG GmbH Stark/Schw.stromtech facility spares11680 CEAG GmbH Stark/Schw.stromtech facility spares11680 CEAG GmbH Stark/Schw.stromtech facility spares

100000 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares

100048 Landis & Staefa GmbH Stark/Schw.stromtech facility spares11053 Andritz Separation GmbH Wasser Ver/Entsorgun facility spares11053 Andritz Separation GmbH Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares

Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares

Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares

Page 152: 300MM Spare Parts 5-3-122

10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares11091 Bürkert GmbH & Co. KG Wasser Ver/Entsorgun facility spares

Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10794 Thyssen Schulte GmbH Heiz/Klimatechnik facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares11671 Stenflex Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares13937 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares10348 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares12835 Otto Nordwald KG Heiz/Klimatechnik facility spares

100000 I-Center Dresden Stark/Schw.stromtech facility spares100000 I-Center Dresden Stark/Schw.stromtech facility spares100000 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares10726 GE Inspection Technologies Wasser Ver/Entsorgun facility spares10248 VWR International GmbH Wasser Ver/Entsorgun facility spares10248 VWR International GmbH Wasser Ver/Entsorgun facility spares11598 Pepperl + Fuchs GmbH E&V GenPurp Invest facility spares

N/A N/A Wasser Ver/Entsorgun facility sparesN/A N/A Wasser Ver/Entsorgun facility sparesN/A N/A Wasser Ver/Entsorgun facility spares

Wasser Ver/Entsorgun facility spares

Page 153: 300MM Spare Parts 5-3-122

10545 Metron Technology Deutschland E&V GenPurp Invest facility spares10209 BASF SE E&V GenPurp Invest facility spares11306 Gebr. Becker GmbH & Co. Wasser Ver/Entsorgun facility spares13151 Josef Emmerich Pumpenfabrik Gm Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares11076 Nippon Sanso E&V GenPurp Invest facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares11118 Georg Fischer GmbH Heiz/Klimatechnik facility spares12184 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares10666 Honeywell Electronic Materials E&V GenPurp Invest facility spares11315 EM-Technik GmbH Wasser Ver/Entsorgun facility spares11315 EM-Technik GmbH Wasser Ver/Entsorgun facility spares10309 GESTRA AG Wasser Ver/Entsorgun facility spares10309 GESTRA AG Wasser Ver/Entsorgun facility spares10309 GESTRA AG Wasser Ver/Entsorgun facility spares10309 GESTRA AG Wasser Ver/Entsorgun facility spares10309 GESTRA AG Wasser Ver/Entsorgun facility spares10309 GESTRA AG Wasser Ver/Entsorgun facility spares11038 ProMinent Dosiertechnik GmbH Wasser Ver/Entsorgun facility spares11038 ProMinent Dosiertechnik GmbH Wasser Ver/Entsorgun facility spares11290 SAMSON AG Wasser Ver/Entsorgun facility spares11290 SAMSON AG Wasser Ver/Entsorgun facility spares11290 SAMSON AG Wasser Ver/Entsorgun facility spares11290 SAMSON AG Wasser Ver/Entsorgun facility spares11290 SAMSON AG Wasser Ver/Entsorgun facility spares10255 Festo AG & Co. Wasser Ver/Entsorgun facility spares10344 Heinz Gehrmann GmbH Wasser Ver/Entsorgun facility spares10298 Gebrüder Heyl Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares11038 ProMinent Dosiertechnik GmbH Wasser Ver/Entsorgun facility spares11038 ProMinent Dosiertechnik GmbH Wasser Ver/Entsorgun facility spares11038 ProMinent Dosiertechnik GmbH Wasser Ver/Entsorgun facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares10160 B.E.S.T. Fluidsysteme GmbH Wasser Ver/Entsorgun facility spares14215 DEG DEUTSCHE ELEKTRO-GRUPPE Stark/Schw.stromtech facility spares10326 Hager & Elsässer Wasser Ver/Entsorgun facility spares11181 EBRO Armaturen Wasser Ver/Entsorgun facility spares11931 Redur Meßwandler GmbH Stark/Schw.stromtech facility spares13695 Euris GmbH E&V Implantation common parts13695 Euris GmbH E&V Implantation common parts10820 Entegris GmbH E&V FEE andere common parts10615 PALL GmbH Microelectronics E&V FEE andere common parts10504 Oerlikon Leybold Vacuum E&V PVD common parts

200024 SMC Pneumatic GmbH common parts

Page 154: 300MM Spare Parts 5-3-122

10683 RS Components GmbH common parts10838 VACOM GmbH common parts11390 Bechtle GmbH & Co. KG Ersatz ModulTester common parts10592 NOVODIRECT GmbH common parts10592 NOVODIRECT GmbH common parts

200024 SMC Pneumatic GmbH common parts10858 Wälzlagertechnik GmbH E&V GenPurp Invest common parts10318 Greene Tweed & Co. GmbH common parts10318 Greene Tweed & Co. GmbH common parts10318 Greene Tweed & Co. GmbH common parts10318 Greene Tweed & Co. GmbH common parts11390 Bechtle GmbH & Co. KG Ersatz ModulTester common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts10858 Wälzlagertechnik GmbH common parts52137 Celerity Fluid Systems Ireland, Ltd E&V Öfen common parts52137 Celerity Fluid Systems Ireland, Ltd E&V Öfen common parts13990 Yaskawa Engineering Europe Gmb Ersatzteile für End common parts50102 FICO BV Ersatzteile für End common parts10841 VAT Deutschland GmbH common parts11019 Bürkert GmbH & Co. KG common parts50101 CANON EUROPA NV common parts10850 VÖTSCH Industrietechnik GmbH Ersatz ModulTester common parts14215 DEG DEUTSCHE ELEKTRO-GRUPPE E&V CVD common parts

200024 SMC Pneumatic GmbH common parts200024 SMC Pneumatic GmbH common parts10255 Festo AG & Co. common parts14537 HIB GmbH Ersatzteile für End common parts

200024 SMC Pneumatic GmbH common parts10820 Entegris GmbH E&V GenPurp Invest common parts

200024 SMC Pneumatic GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH E&V Öfen common parts14537 HIB GmbH Ersatzteile für End common parts12601 Martin GmbH common parts15064 EVAPCO Europe GmbH common parts15064 EVAPCO Europe GmbH common parts10858 Wälzlagertechnik GmbH Ersatz Wafer Test Eq common parts10255 Festo AG & Co. E&V BEE andere common parts16745 Kuhnke Automation Ersatzteile Montage common parts13875 Deutsche Leasing AG E&V Litho common parts12535 Wolftechnik Filtersysteme GmbH E&V BEE andere common parts10856 VTE Industrietechnik GmbH E&V BEE andere common parts52666 Hunter Products Inc. Ersatz ModulTester common parts52666 Hunter Products Inc. Ersatz ModulTester common parts52666 Hunter Products Inc. Ersatz ModulTester common parts12322 KOLB Fertigungstechnik GmbH Ersatz ModulTester common parts11986 Sächsische Schlauch-und DichtungsErsatz ModulTester common parts

Page 155: 300MM Spare Parts 5-3-122

13415 Rehm Thermal Systems GmbH Ersatzteile für End common parts16860 DPV Elektronik-Service GmbH E&V BEE andere common parts14786 ZIROX - Sensoren und Ersatzteile für End common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts

200024 SMC Pneumatic GmbH Ersatzteile für End common parts14537 HIB GmbH Ersatzteile für End common parts10670 Rittal GmbH&Co.KG Ersatz Wafer Test Eq common parts10670 Rittal GmbH&Co.KG Ersatz Wafer Test Eq common parts

200024 SMC Pneumatic GmbH Ersatzteile für End common parts10858 Wälzlagertechnik GmbH Ersatzteile für End common parts11590 KEYENCE DEUTSCHLAND GmbH Tooling Pressen common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts10683 RS Components GmbH common parts14537 HIB GmbH common parts14537 HIB GmbH common parts14537 HIB GmbH common parts50376 HANMI Co., Ltd. common parts10683 RS Components GmbH common parts50376 HANMI Co., Ltd. common parts10683 RS Components GmbH common parts10683 RS Components GmbH common parts10683 RS Components GmbH common parts10683 RS Components GmbH common parts14537 HIB GmbH Ersatz Wafer Test Eq common parts14537 HIB GmbH Ersatz Wafer Test Eq common parts14537 HIB GmbH common parts17134 Samtec Europe GmbH Ersatz Wafer Test Eq common parts17134 Samtec Europe GmbH Ersatz Wafer Test Eq common parts10255 Festo AG & Co. Ersatz ModulTester common parts12605 Phoenix / x-ray Systems + Service Ersatzteile für End common parts10683 RS Components GmbH common parts10683 RS Components GmbH common parts14537 HIB GmbH common parts12400 Oriental Motor (Europa) GmbH Ersatzteile für End common parts12400 Oriental Motor (Europa) GmbH Ersatzteile für End common parts14537 HIB GmbH common parts12400 Oriental Motor (Europa) GmbH Ersatzteile für End common parts12400 Oriental Motor (Europa) GmbH Ersatzteile für End common parts12400 Oriental Motor (Europa) GmbH Ersatzteile für End common parts12400 Oriental Motor (Europa) GmbH Ersatzteile für End common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts10869 Weidinger GmbH E&V BEE andere common parts12601 Martin GmbH Ersatz ModulTester common parts13566 Entegris GmbH common parts12601 Martin GmbH Ersatz ModulTester common parts12601 Martin GmbH Ersatz ModulTester common parts14537 HIB GmbH Ersatz Wafer Test Eq common parts15515 Alcatel-Lucent Deutschland AG Ersatzteile Montage common parts11309 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts10608 Osram GmbH common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts

Page 156: 300MM Spare Parts 5-3-122

10858 Wälzlagertechnik GmbH Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts10909 YAMAICHI ELECTRONICS Ersatz ModulTester common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts10837 VOX-TEC E&V CVD common parts14181 Diener electronic GmbH + Co.KG Ersatzteile für End common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts10858 Wälzlagertechnik GmbH Ersatz Wafer Test Eq common parts17134 Samtec Europe GmbH Ersatz Wafer Test Eq common parts10683 RS Components GmbH Ersatz ModulTester common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts50102 FICO BV common parts10683 RS Components GmbH E&V GenPurp Invest common parts10681 Carl Roth GmbH & Co.KG common parts

200024 SMC Pneumatic GmbH common parts200024 SMC Pneumatic GmbH common parts200024 SMC Pneumatic GmbH common parts14516 Dieter Antrack Ersatzt. Vormontage common parts

200024 SMC Pneumatic GmbH common parts50025 Fusion Europe Ltd. E&V FEE andere common parts12308 POWER SERVICE ELECTRONICS GME&V Plasma/Trocken common parts10624 Pfeiffer Vacuum GmbH E&V FEE andere common parts10504 Oerlikon Leybold Vacuum E&V CVD common parts14925 Gems Sensors GmbH E&V CVD common parts14925 Gems Sensors GmbH E&V CVD common parts13635 Kyocera Fineceramics GmbH E&V CVD common parts14230 Fischer und Tobias GbR E&V CVD common parts14230 Fischer und Tobias GbR E&V CVD common parts14230 Fischer und Tobias GbR E&V CVD common parts10727 SEMAX Prozess Technik GmbH E&V FEE andere common parts13935 SCHMID TECHNOLOGY SYSTEMS E&V FEE andere common parts13935 SCHMID TECHNOLOGY SYSTEMS E&V FEE andere common parts13935 Schmid Technology Systems GmbHE&V Auto/TranspSyst. common parts13935 SCHMID TECHNOLOGY SYSTEMS E&V FEE andere common parts13935 SCHMID TECHNOLOGY SYSTEMS E&V FEE andere common parts13935 SCHMID TECHNOLOGY SYSTEMS E&V Auto/TranspSyst. common parts13935 SCHMID TECHNOLOGY SYSTEMS E&V FEE andere common parts13935 SCHMID TECHNOLOGY SYSTEMS E&V FEE andere common parts13935 SCHMID TECHNOLOGY SYSTEMS E&V FEE andere common parts13935 SCHMID TECHNOLOGY SYSTEMS E&V FEE andere common parts50050 Semitool Europe Ltd. E&V BEE andere common parts14965 Lydall Gerhardi GmbH & Co. KG E&V FEE andere common parts14965 Lydall Gerhardi GmbH & Co. KG E&V FEE andere common parts14965 Lydall Gerhardi GmbH & Co. KG E&V FEE andere common parts14965 Lydall Gerhardi GmbH & Co. KG E&V FEE andere common parts14965 Lydall Gerhardi GmbH & Co. KG E&V FEE andere common parts14965 Lydall Gerhardi GmbH & Co. KG E&V FEE andere common parts14965 Lydall Gerhardi GmbH & Co. KG E&V FEE andere common parts14965 Lydall Gerhardi GmbH & Co. KG E&V FEE andere common parts10374 HTT - High Tech Trade GmbH E&V FEE andere common parts

Page 157: 300MM Spare Parts 5-3-122

50531 Tec-Sem E&V FEE andere common parts10683 RS Components GmbH E&V GenPurp Invest common parts10683 RS Components GmbH E&V GenPurp Invest common parts12047 THK GmbH E&V Öfen common parts

N/A Ing.Büro/Techn. Handel E&V Öfen common partsN/A Ing.Büro/Techn. Handel E&V Öfen common parts

10476 ZygoLOT GmbH E&V Litho common parts10608 Osram GmbH E&V Litho common parts10545 Metron Technology Deutschland E&V FEE andere common parts10545 Metron Technology Deutschland E&V Auto/TranspSyst. common parts10545 Metron Technology Deutschland E&V FEE andere common parts10820 Entegris GmbH E&V Litho common parts10820 Entegris GmbH E&V Litho common parts10820 Entegris GmbH E&V FEE andere common parts12377 Parker Hannifin GmbH & Co. KG E&V FEE andere common parts12377 Parker Hannifin GmbH & Co. KG E&V FEE andere common parts12377 Parker Hannifin GmbH & Co. KG E&V FEE andere common parts12377 Parker Hannifin GmbH & Co. KG E&V FEE andere common parts12377 Parker Hannifin GmbH & Co. KG E&V FEE andere common parts12377 Parker Hannifin GmbH & Co. KG E&V FEE andere common parts10504 Oerlikon Leybold Vacuum E&V FEE andere common parts10838 VACOM GmbH common parts10838 VACOM GmbH common parts10838 VACOM GmbH common parts10838 VACOM GmbH common parts10838 VACOM GmbH common parts10838 VACOM GmbH common parts10838 VACOM GmbH common parts14160 Hydraulik-Pneumatik Haupt common parts10160 B.E.S.T. Fluidsysteme GmbH E&V FEE andere common parts15170 Rotarex (Deutschland) GmbH E&V Implantation common parts13970 4Source electronics AG common parts15280 Joisten & Kettenbaum GmbH & Co.E&V BEE andere common parts11759 CRYSTEC E&V FEE andere common parts11759 CRYSTEC E&V FEE andere common parts11759 CRYSTEC E&V FEE andere common parts11759 CRYSTEC E&V FEE andere common parts11759 CRYSTEC E&V FEE andere common parts11759 CRYSTEC E&V FEE andere common parts11759 CRYSTEC E&V FEE andere common parts11759 CRYSTEC E&V FEE andere common parts11759 CRYSTEC E&V FEE andere common parts11759 CRYSTEC E&V FEE andere common parts11759 CRYSTEC E&V FEE andere common parts11759 CRYSTEC E&V FEE andere common parts11390 Bechtle GmbH & Co. KG Ersatz ModulTester common parts11390 Bechtle GmbH & Co. KG Ersatz ModulTester common parts11390 Bechtle GmbH & Co. KG Ersatz ModulTester common parts14537 HIB GmbH common parts11073 ADVANTEST Europe GmbH common parts

200024 SMC Pneumatic GmbH common parts

Page 158: 300MM Spare Parts 5-3-122

10841 VAT Deutschland GmbH common parts10683 RS Components GmbH E&V GenPurp Invest common parts14215 DEG DEUTSCHE ELEKTRO-GRUPPE common parts10820 Entegris GmbH common parts

200024 SMC Pneumatic GmbH common parts14537 HIB GmbH Ersatz Wafer Test Eq common parts12358 Panasonic Electric Works common parts

200024 SMC Pneumatic GmbH common parts14650 ghv Vertriebs GmbH Ersatz Wafer Test Eq common parts11328 OMRON Electronics GmbH Ersatz Wafer Test Eq common parts11073 ADVANTEST Europe GmbH common parts11073 ADVANTEST Europe GmbH common parts11074 AEHR TEST SYSTEMS GMBH common parts15593 Logitex Instruments GmbH common parts15466 HY-LINE COMPUTER COMPONENTS common parts14537 HIB GmbH common parts10683 RS Components GmbH common parts

200024 SMC Pneumatic GmbH common parts14537 HIB GmbH common parts13380 IPTE Germany GmbH Ersatz ModulTester common parts10255 Festo AG & Co. common parts10052 CONRAD Electronic GmbH common parts50024 Oerlikon Assembly Equipment AG, Ersatzteile Montage common parts50102 FICO BV common parts50102 FICO BV common parts50102 FICO BV common parts14215 DEG DEUTSCHE ELEKTRO-GRUPPE Ersatzteile Montage common parts12160 Parker Hannifin GmbH & Co. KG common parts10255 Festo AG & Co. common parts10255 Festo AG & Co. common parts12780 Convum GmbH Ersatzteile für End common parts10386 IKO Nippon Thompson Europe B.V.E&V BEE andere common parts10255 Festo AG & Co. common parts11590 KEYENCE DEUTSCHLAND GmbH Infrastruktur andere common parts12322 KOLB Fertigungstechnik GmbH Ersatzteile Montage common parts12322 KOLB Fertigungstechnik GmbH Ersatzteile Montage common parts

200024 SMC Pneumatic GmbH common parts200024 SMC Pneumatic GmbH common parts14010 HPS Handels GmbH Infrastruktur andere common parts11590 KEYENCE DEUTSCHLAND GmbH Ersatzteile Montage common parts14215 DEG DEUTSCHE ELEKTRO-GRUPPE Ersatzteile Montage common parts14010 HPS Handels GmbH common parts14010 HPS Handels GmbH common parts14537 HIB GmbH Ersatzteile für End common parts11328 OMRON Electronics GmbH Ersatz Wafer Test Eq common parts12160 Parker Hannifin GmbH & Co. KG common parts

200024 SMC Pneumatic GmbH common partsErsatzteile Montage common parts

10052 CONRAD Electronic GmbH common parts10052 CONRAD Electronic GmbH E&V GenPurp Invest common parts12601 Martin GmbH common parts

Page 159: 300MM Spare Parts 5-3-122

10716 Distrelec Schuricht GmbH common parts200024 SMC Pneumatic GmbH common parts11328 OMRON Electronics GmbH Ersatz Wafer Test Eq common parts14537 HIB GmbH Ersatz Wafer Test Eq common parts13990 Yaskawa Engineering Europe Gmb E&V BEE andere common parts

200024 SMC Pneumatic GmbH common parts200024 SMC Pneumatic GmbH common parts12400 Oriental Motor (Europa) GmbH Ersatz Wafer Test Eq common parts14537 HIB GmbH common parts10858 Wälzlagertechnik GmbH common parts10683 RS Components GmbH common parts10858 Wälzlagertechnik GmbH common parts13060 OK International GmbH E&V BEE andere common parts13060 OK International GmbH E&V BEE andere common parts13060 OK International GmbH common parts13060 OK International GmbH common parts13060 OK International GmbH E&V BEE andere common parts13060 OK International GmbH common parts13060 OK International GmbH E&V BEE andere common parts13060 OK International GmbH common parts13060 OK International GmbH E&V BEE andere common parts13060 OK International GmbH E&V BEE andere common parts13060 OK International GmbH common parts13060 OK International GmbH E&V BEE andere common parts

200024 SMC Pneumatic GmbH common parts10907 XENON Automatisierungstechnik Ersatzteile Montage common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11019 Bürkert GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts11390 Bechtle GmbH & Co. KG Ersatz Wafer Test Eq common parts10020 Bürklin OHG E&V GenPurp Invest common parts10716 Distrelec Schuricht GmbH E&V GenPurp Invest common parts13566 Entegris GmbH common parts10545 Metron Technology Deutschland GmbH common parts10545 Metron Technology Deutschland GmbH common parts13566 Entegris GmbH common parts10247 Farnell GmbH E&V GenPurp Invest common parts11478 Reichelt Elektronik E&V GenPurp Invest common parts12016 Plasmetrex GmbH E&V Plasma/Trocken common parts12016 Plasmetrex GmbH E&V Plasma/Trocken common parts12016 Plasmetrex GmbH E&V Plasma/Trocken common parts

Page 160: 300MM Spare Parts 5-3-122

12016 Plasmetrex GmbH E&V FEE andere common parts12016 Plasmetrex GmbH E&V FEE andere common parts12016 Plasmetrex GmbH E&V FEE andere common parts12016 Plasmetrex GmbH E&V FEE andere common parts11073 ADVANTEST Europe GmbH common parts12358 Panasonic Electric Works common parts10858 Wälzlagertechnik GmbH E&V FEE andere common parts10683 RS Components GmbH E&V GenPurp Invest common parts10858 Wälzlagertechnik GmbH E&V FEE andere common parts10858 Wälzlagertechnik GmbH E&V FEE andere common parts10858 Wälzlagertechnik GmbH E&V FEE andere common parts10858 Wälzlagertechnik GmbH E&V FEE andere common parts10858 Wälzlagertechnik GmbH E&V FEE andere common parts

200024 SMC Pneumatic GmbH common parts14516 Dieter Antrack common parts10374 HTT - High Tech Trade GmbH E&V BEE andere common parts11073 ADVANTEST Europe GmbH common parts10683 RS Components GmbH E&V BEE andere common parts14516 Dieter Antrack E&V BEE andere common parts14375 Siemens Procurement and Ersatzteile für End common parts50102 FICO BV common parts10255 Festo AG & Co. common parts14516 Dieter Antrack E&V BEE andere common parts14215 DEG DEUTSCHE ELEKTRO-GRUPPE Ersatzteile Montage common parts

200024 SMC Pneumatic GmbH common parts200024 SMC Pneumatic GmbH common parts12392 inha GmbH E&V BEE andere common parts10583 Nilfisk-CFM E&V Öfen common parts10615 PALL GmbH Microelectronics common parts10615 PALL GmbH Microelectronics common parts10337 HEGA-APPARATEBAU GMBH E&V BEE andere common parts10337 HEGA-APPARATEBAU GMBH E&V BEE andere common parts10337 HEGA-APPARATEBAU GMBH E&V BEE andere common parts10337 HEGA-APPARATEBAU GMBH E&V BEE andere common parts10971 enViro-cell Umwelttechnik GmbH Ersatzteile für End common parts

100000 I-Center Dresden common parts51016 Parker Hannifin GmbH & Co. KG common parts10858 Wälzlagertechnik GmbH E&V FEE andere common parts50051 SEZ Semiconductor Equipment E&V Litho common parts50051 SEZ Semiconductor Equipment E&V Litho common parts

100000 I-Center Dresden common parts10706 Dr.-Ing. Max Schlötter common parts10706 Dr.-Ing. Max Schlötter common parts11066 Hayward Industrial Products GmbH common parts

100000 I-Center Dresden common parts14215 DEG DEUTSCHE ELEKTRO-GRUPPE common parts12915 BETRIEBSEINRICHTUNGEN RAI E&V BEE andere common parts12915 Betriebseinrichtungen Rainer Kache common parts10003 Börsig GmbH common parts10003 Börsig GmbH common parts10683 RS Components GmbH E&V GenPurp Invest common parts

Page 161: 300MM Spare Parts 5-3-122

10003 Börsig GmbH common parts12915 BETRIEBSEINRICHTUNGEN RAI E&V BEE andere common parts12915 BETRIEBSEINRICHTUNGEN RAI E&V BEE andere common parts12915 Betriebseinrichtungen Rainer Kache common parts10003 Börsig GmbH common parts10869 Weidinger GmbH E&V BEE andere common parts10774 SYSTRONIC E&V BEE andere common parts10774 SYSTRONIC E&V BEE andere common parts14010 HPS HANDELS GMBH common parts14010 HPS HANDELS GMBH E&V BEE andere common parts10157 AVL Aloé Verpackungslösungen E&V BEE andere common parts10157 AVL Aloé Verpackungslösungen E&V BEE andere common parts10678 ROOD Technology GmbH common parts15448 Wilhelm Fischer Spezialmaschinen-E&V BEE andere common parts10841 VAT Deutschland GmbH common parts10841 VAT Deutschland GmbH common parts10833 USHIO Deutschland GmbH common parts10251 Feinfocus GmbH E&V BEE andere common parts10251 Feinfocus GmbH E&V BEE andere common parts10251 Feinfocus GmbH E&V BEE andere common parts10251 Feinfocus GmbH E&V BEE andere common parts10251 Feinfocus GmbH E&V BEE andere common parts10683 RS Components GmbH common parts10683 RS Components GmbH common parts10683 RS Components GmbH common parts10683 RS Components GmbH common parts

200024 SMC Pneumatic GmbH common parts16531 Ing. Büro Zimmermann GmbH E&V CVD common parts10615 PALL GmbH Microelectronics common parts10615 PALL GmbH Microelectronics common parts10615 PALL GmbH Microelectronics common parts10318 Greene Tweed & Co. GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH common parts

200028 Pfeiffer Vacuum Vertriebs GmbH common parts10838 VACOM GmbH common parts10838 VACOM GmbH common parts

200028 Pfeiffer Vacuum Vertriebs GmbH common parts10425 KAISER + KRAFT GMBH common parts10425 KAISER + KRAFT GMBH common parts10255 Festo AG & Co. common parts10255 Festo AG & Co. common parts10255 Festo AG & Co. common parts

Page 162: 300MM Spare Parts 5-3-122

10255 Festo AG & Co. common parts10255 Festo AG & Co. common parts10255 Festo AG & Co. common parts10020 Bürklin OHG E&V GenPurp Invest common parts10020 Bürklin OHG E&V GenPurp Invest common parts10683 RS Components GmbH E&V GenPurp Invest common parts10683 RS Components GmbH E&V GenPurp Invest common parts10683 RS Components GmbH E&V GenPurp Invest common parts14215 DEG DEUTSCHE ELEKTRO-GRUPPE E&V FEE andere common parts

200024 SMC Pneumatic GmbH common parts10157 AVL Aloé Verpackungslösungen common parts10157 AVL Aloé Verpackungslösungen common parts10157 AVL Aloé Verpackungslösungen common parts10248 VWR International GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH common parts10160 B.E.S.T. Fluidsysteme GmbH common parts10838 VACOM GmbH common parts10255 Festo AG & Co. common parts10255 Festo AG & Co. common parts10020 Bürklin OHG E&V GenPurp Invest common parts10020 Bürklin OHG E&V GenPurp Invest common parts10020 Bürklin OHG E&V GenPurp Invest common parts10020 Bürklin OHG E&V GenPurp Invest common parts10020 Bürklin OHG E&V GenPurp Invest common parts10020 Bürklin OHG E&V GenPurp Invest common parts10020 Bürklin OHG E&V GenPurp Invest common parts10020 Bürklin OHG E&V GenPurp Invest common parts10683 RS Components GmbH E&V GenPurp Invest common parts10683 RS Components GmbH E&V GenPurp Invest common parts10683 RS Components GmbH E&V GenPurp Invest common parts10683 RS Components GmbH E&V GenPurp Invest common parts11470 WYATT TECHNOLOGY common parts14010 HPS Handels GmbH common parts12915 Betriebseinrichtungen Rainer Kache common parts11672 ROTTER Reinstraumservice GmbH common parts

200024 SMC Pneumatic GmbH common parts200024 SMC Pneumatic GmbH common parts200024 SMC Pneumatic GmbH common parts10455 Koch + Schröder GmbH common parts10592 NOVODIRECT GmbH common parts10592 NOVODIRECT GmbH common parts10592 NOVODIRECT GmbH common parts11590 KEYENCE DEUTSCHLAND GmbH common parts11021 Xaver Bertsch GmbH common parts10838 VACOM GmbH common parts11672 ROTTER Reinstraumservice GmbH common parts11672 ROTTER Reinstraumservice GmbH common parts11672 ROTTER Reinstraumservice GmbH common parts52231 RECIF TECHNOLOGIES S.A.S common parts11356 Estion GmbH & Co KG common parts

Page 163: 300MM Spare Parts 5-3-122

50046 RECIF S. A. common parts10904 Adolf Würth GmbH & Co. KG common parts10889 WEWO common parts10889 WEWO common parts

N/A N/A common partsN/A N/A common partsN/A N/A common parts

10889 WEWO common parts10622 Peter Schröder GmbH common parts11454 Peter Schröder GmbH common parts10889 WEWO common parts11454 Peter Schröder GmbH common parts11454 Peter Schröder GmbH common parts10560 Absaugtechnik-Neubert common parts11454 Peter Schröder GmbH common parts11454 Peter Schröder GmbH common parts

Page 164: 300MM Spare Parts 5-3-122

Unit Qty.

Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 1.00Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 3.00Pcs. 1.00Pcs. 4.00Pcs. 4.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 4.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 4.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 4.00Pcs. 1.00Pcs. 4.00Pcs. 4.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00

Page 165: 300MM Spare Parts 5-3-122

Pcs. 1.00Pcs. 6.00Pcs. 6.00SET 1.00SET 2.00SET 2.00SET 1.00SET 1.00SET 1.00Pcs. 1.00Pcs. 1.00Pcs. 4.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 2.00Pcs. 4.00Pcs. 3.00Pcs. 1.00Pcs. 4.00Pcs. 2.00Pcs. 4.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 4.00Pcs. 7.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 7.00Pcs. 1.00

Page 166: 300MM Spare Parts 5-3-122

Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00SET 1.00Pcs. 3.00Pcs. 1.00Pcs. 1.00Pcs. 2.00SET 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 6.00Pcs. 2.00Pcs. 8.00Pcs. 1.00Pcs. 1.00SET 2.00SET 1.00Pcs. 1.00SET 1.00SET 2.00SET 1.00Pcs. 2.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00

Page 167: 300MM Spare Parts 5-3-122

Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 3.00Pcs. 1.00Pcs. 1.00Pcs. 3.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00M 100.00M 67.00M 43.00M 89.00M 95.00M 100.00M 44.00M 25.00M 36.00M 100.00M 100.00M 100.00M 100.00M 3.00M 65.00M 100.00M 90.00

Page 168: 300MM Spare Parts 5-3-122

M 60.00M 63.00M 50.00M 94.00M 86.00M 93.00M 90.00M 100.00M 100.00M 73.00M 54.00M 50.00M 50.00

Pcs. 2.00Pcs. 2.00Pcs. 5.00Pcs. 11.00Pcs. 7.00Pcs. 1.00Pcs. 6.00Pcs. 7.00Pcs. 2.00Pcs. 3.00Pcs. 1.00Pcs. 1.00Pcs. 9.00Pcs. 11.00M 140.00

Pcs. 2.00Pcs. 1.00Pcs. 5.00Pcs. 2.00Pcs. 4.00Pcs. 2.00Pcs. 9.00Pcs. 1.00Pcs. 1.00Pcs. 3.00Pcs. 2.00Pcs. 3.00Pcs. 3.00Pcs. 1.00Pcs. 5.00Pcs. 4.00Pcs. 2.00Pcs. 3.00Pcs. 4.00Pcs. 1.00M 2.00

Pcs. 1.00Pcs. 7.00

Page 169: 300MM Spare Parts 5-3-122

Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 3.00Pcs. 6.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00SET 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 8.00Pcs. 4.00Pcs. 5.00Pcs. 7.00Pcs. 1.00Pcs. 3.00Pcs. 1.00Pcs. 600.00Pcs. 3.00Pcs. 3.00Pcs. 4.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 8.00Pcs. 1.00Pcs. 7.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00M 1.00

Pcs. 2.00Pcs. 2.00

Page 170: 300MM Spare Parts 5-3-122

Pcs. 8.00Pcs. 1.00Pcs. 4.00Pcs. 4.00Pcs. 12.00Pcs. 1.00Pcs. 4.00Pcs. 5.00Pcs. 100.00Pcs. 31.00Pcs. 19.00Pcs. 10.00Pcs. 20.00Pcs. 25.00Pcs. 69.00Pcs. 5.00Pcs. 25.00Pcs. 97.00Pcs. 3.00Pcs. 115.00Pcs. 99.00Pcs. 99.00Pcs. 2.00Pcs. 3.00Pcs. 1.00Pcs. 390.00Pcs. 450.00Pcs. 415.00M 1.00M 22.00M 6.00M 2.00M 2.00

Pcs. 2.00Pcs. 4.00Pcs. 2.00Pcs. 1.00PAK 6.00Pcs. 63.00Pcs. 179.00Pcs. 50.00Pcs. 1.00Pcs. 2.00Pcs. 4.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 36.00Pcs. 14.00Pcs. 6.00Pcs. 4.00

Page 171: 300MM Spare Parts 5-3-122

Pcs. 5.00Pcs. 9.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 60.00PAK 1.00Pcs. 3.00Pcs. 1.00Pcs. 5.00Pcs. 4.00Pcs. 5.00Pcs. 5.00Pcs. 2.00Pcs. 2.00Pcs. 4.00Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 5.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 2.00Pcs. 1.00Pcs. 32.00Pcs. 1.00Pcs. 2.00Pcs. 45.00Pcs. 16.00Pcs. 2.00Pcs. 2.00Pcs. 3.00Pcs. 1.00

Page 172: 300MM Spare Parts 5-3-122

Pcs. 1.00Pcs. 1.00Pcs. 59.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 3.00Pcs. 20.00Pcs. 12.00Pcs. 14.00Pcs. 1.00Pcs. 534.00M 125.00M 144.00

Pcs. 284.00Pcs. 183.00Pcs. 23.00Pcs. 6.00Pcs. 5.00Pcs. 8.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 4.00Pcs. 13.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 5.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 20.00Pcs. 146.00Pcs. 2.00Pcs. 10.00Pcs. 4.00SET 1.00Pcs. 4.00Pcs. 2.00Pcs. 2.00Pcs. 18.00Pcs. 20.00Pcs. 2.00Pcs. 3.00Pcs. 2.00Pcs. 4.00Pcs. 4.00Pcs. 4.00Pcs. 3.00M 114.00

Page 173: 300MM Spare Parts 5-3-122

Pcs. 4.00Pcs. 12.00Pcs. 1.00Pcs. 87.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 4.00Pcs. 3.00Pcs. 4.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 26.00Pcs. 10.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 137.00Pcs. 3.00Pcs. 1.00Pcs. 5.00Pcs. 60.00Pcs. 60.00Pcs. 3.00Pcs. 1.00Pcs. 33.00Pcs. 3.00Pcs. 73.00

Page 174: 300MM Spare Parts 5-3-122

Pcs. 8.00Pcs. 600.00Pcs. 13.00Pcs. 73.00Pcs. 1.00Pcs. 2.00Pcs. 44.00Pcs. 1.00Pcs. 50.00Pcs. 4.00Pcs. 256.00Pcs. 17.00Pcs. 1.00Pcs. 10.00Pcs. 10.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 4.00Pcs. 7.00Pcs. 10.00Pcs. 5.00Pcs. 5.00Pcs. 3.00Pcs. 15.00Pcs. 2.00Pcs. 1.00Pcs. 4.00Pcs. 4.00Pcs. 3.00Pcs. 2.00Pcs. 2.00Pcs. 4.00Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00

Page 175: 300MM Spare Parts 5-3-122

Pcs. 2.00Pcs. 2.00Pcs. 8.00Pcs. 2.00M 6.00M 12.00

Pcs. 1.00Pcs. 5.00Pcs. 10.00Pcs. 1.00Pcs. 2.00Pcs. 10.00Pcs. 1.00Pcs. 1.00Pcs. 3.00Pcs. 2.00Pcs. 34.00Pcs. 3.00Pcs. 2.00Pcs. 2.00Pcs. 1.00Pcs. 12.00Pcs. 57.00Pcs. 188.00Pcs. 50.00Pcs. 20.00Pcs. 100.00Pcs. 18.00Pcs. 5.00Pcs. 5.00Pcs. 45.00Pcs. 23.00ROL 2.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 2.00Pcs. 4.00Pcs. 6.00Pcs. 6.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 2.00Pcs. 53.00Pcs. 132.00Pcs. 2.00Pcs. 2.00Pcs. 6.00

Page 176: 300MM Spare Parts 5-3-122

Pcs. 2.00Pcs. 2.00Pcs. 16.00Pcs. 1.00Pcs. 24.00Pcs. 26.00Pcs. 15.00Pcs. 2.00Pcs. 1.00Pcs. 3.00Pcs. 3.00Pcs. 1.00Pcs. 2.00Pcs. 6.00Pcs. 20.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 3.00Pcs. 2.00Pcs. 3.00Pcs. 9.00Pcs. 3.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 5.00Pcs. 1.00Pcs. 3.00Pcs. 3.00Pcs. 100.00Pcs. 1.00Pcs. 43.00Pcs. 2.00Pcs. 2.00Pcs. 1.00Pcs. 2.00Pcs. 4.00Pcs. 10.00Pcs. 2.00Pcs. 1.00M 40.00

Pcs. 2.00Pcs. 2.00Pcs. 1.00Pcs. 2.00Pcs. 1.00Pcs. 11.00Pcs. 1.00Pcs. 4.00Pcs. 7.00

Page 177: 300MM Spare Parts 5-3-122

Pcs. 8.00Pcs. 1.00Pcs. 6.00Pcs. 1.00Pcs. 1.00Pcs. 70.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 1.00Pcs. 2.00Pcs. 7.00Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 5.00Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 4.00Pcs. 2.00Pcs. 2.00Pcs. 3.00Pcs. 1.00Pcs. 5.00Pcs. 11.00Pcs. 59.00Pcs. 10.00Pcs. 41.00Pcs. 50.00Pcs. 1.00Pcs. 3.00Pcs. 9.00Pcs. 48.00Pcs. 62.00Pcs. 61.00Pcs. 130.00Pcs. 64.00Pcs. 9.00Pcs. 7.00Pcs. 2.00Pcs. 2.00Pcs. 1.00Pcs. 1.00Pcs. 4.00Pcs. 2.00Pcs. 6.00Pcs. 13.00Pcs. 13.00

Page 178: 300MM Spare Parts 5-3-122

Pcs. 2.00Pcs. 2.00Pcs. 2.00Pcs. 3.00Pcs. 15.00Pcs. 2.00Pcs. 7.00Pcs. 2.00Pcs. 5.00Pcs. 4.00Pcs. 38.00Pcs. 100.00Pcs. 6.00Pcs. 2.00Pcs. 2.00Pcs. 6,839.00Pcs. 6.00Pcs. 5.00Pcs. 3.00Pcs. 35.00Pcs. 145.00Pcs. 1.00Pcs. 11.00Pcs. 2.00Pcs. 22.00Pcs. 64.00Pcs. 5.00Pcs. 2.00Pcs. 2.00Pcs. 13.00Pcs. 5.00Pcs. 2.00Pcs. 3.00Pcs. 3.00Pcs. 17.00Pcs. 5.00Pcs. 81.00Pcs. 1.00Pcs. 10.00Pcs. 16.00Pcs. 2.00Pcs. 18.00Pcs. 26.00Pcs. 34.00Pcs. 8.00Pcs. 19.00Pcs. 8.00Pcs. 1.00Pcs. 1.00Pcs. 5.00Pcs. 5.00

Page 179: 300MM Spare Parts 5-3-122

Pcs. 4.00Pcs. 4.00Pcs. 7.00Pcs. 12.00Pcs. 5.00Pcs. 2.00Pcs. 4.00Pcs. 8.00Pcs. 461.00Pcs. 470.00M 10.00M 10.00

Pcs. 12.00Pcs. 10.00Pcs. 5.00Pcs. 57.00Pcs. 8.00Pcs. 2.00Pcs. 4.00Pcs. 10.00Pcs. 9.00Pcs. 10.00Pcs. 8.00Pcs. 3.00Pcs. 3.00Pcs. 3.00Pcs. 1.00Pcs. 18.00Pcs. 4.00Pcs. 1.00Pcs. 3.00Pcs. 16.00Pcs. 4.00Pcs. 20.00Pcs. 46.00Pcs. 27.00Pcs. 45.00Pcs. 13.00Pcs. 20.00Pcs. 47.00Pcs. 83.00Pcs. 4.00Pcs. 3.00Pcs. 2.00Pcs. 4.00Pcs. 57.00Pcs. 1.00Pcs. 2.00M 26.00M 100.00M 48.00

Page 180: 300MM Spare Parts 5-3-122

M 29.00Pcs. 3.00Pcs. 19.00Pcs. 30.00Pcs. 41.00Pcs. 11.00Pcs. 1.00Pcs. 3.00Pcs. 5.00Pcs. 1.00Pcs. 17.00Pcs. 17.00Pcs. 14.00Pcs. 200.00Pcs. 10.00Pcs. 1.00Pcs. 4.00Pcs. 2.00M 18.00

Pcs. 20.00M 10.00M 8.00M 6.00M 8.00

Pcs. 17.00Pcs. 5.00Pcs. 12.00Pcs. 2.00M 30.00M 11.00M 28.00

Pcs. 1.00Pcs. 70.00Pcs. 48.00Pcs. 25.00Pcs. 10.00Pcs. 3.00Pcs. 4.00Pcs. 2.00M 5.00M 155.00M 204.00

Pcs. 77.00Pcs. 2.00Pcs. 15.00Pcs. 7.00Pcs. 200.00Pcs. 26.00Pcs. 11.00Pcs. 7.00Pcs. 6.00

Page 181: 300MM Spare Parts 5-3-122

Pcs. 7.00Pcs. 82.00Pcs. 80.00Pcs. 11,224.00Pcs. 90.00Pcs. 83.00Pcs. 27.00Pcs. 98.00Pcs. 50.00Pcs. 98.00Pcs. 100.00Pcs. 52.00Pcs. 100.00Pcs. 86.00Pcs. 100.00Pcs. 66.00

Page 182: 300MM Spare Parts 5-3-122

Spare Parts to be repaires/refurbished

Internal # Picture Status

#0001 Rofin-Sinar 4540640 defective n/a

#0011 Aviza W65610300 defective n/a

#0012 Almatec Futur 50E Slurry

#0014 Aviza 2838842-01 defective n/a

#0015 W65610300 defective n/a

#0016 I/O MODUL NX02 defective n/a

#0018 SVMISO100 16041 yes

#0024 SCP M52015400 defective n/a

OEM / Tool Type

Description/Specification

SupplierPartn.

PossibleContamination

MIKRO-KONTROLL-CARD Vers. V7

SERVOREGLER DMC30515P

16063-1; 16063-2

Air- Membranpump Futur 50 E

to be refurbished

INSTL ELEC TCU Refurb

15459-1; 15459-2; 15459-3

Aviza / Atlas Copco

SERVOREGLER DMC30515P

15192-1; 15192-2

Mirae / nanotec

14322-1; 14322-2; 14322-3

BOC Edwards

SCHIEBERVENTIL MANUELL ISO100 REGEN.

to be refurbished

SERVOMOTOR W/BRAKE AHD70-C4-44S-F10-R.

Page 183: 300MM Spare Parts 5-3-122

#0025 SCP M52015400 defective n/a

#0026 AMAT defective n/a

#0027 AMAT 0190-36511 defective n/a

#0028 Cymer S106659RP2 yes

#0031 ASM / Maxon 2996243-01 defective n/a

#0034 AMAT defective n/a

#0035 AMAT 0190-77526 defective n/a

#0036 Ebara n/a

#0042 SEZ / Axflow 2304914-00 defective n/a

SERVOMOTOR W/BRAKE AHD70-C4-44S-F10-R.SERVOMOTOR, PC SWEEP/WAFER EXCHANGE 200V 100W 0,318Nm

SGMAH-01 AAF42 / 0190-77526

COVER DRIVER LOWER SIDE

AIR FILTER FLOURIDE (EXCHANGE)

to be refurbished

RETRO MOTOR BOAT ROTAC Servo Motor Yaskawa SGM0188B4CL 100W 200V 0,318Nm

OWO248-2 / 1080-01243

SERVOMOTOR, PC SWEEP/WAFER EXCHANGE

RETAIN. RING UNTERT. GIIS 303mm-L kodier

GIIS-303mm-L kodiert

to be refurbished

Inset thermostat LSO1172-01/ 3.1kW 230V ; Lauda SEZ/TH/2

E16
Dietzek: HF- kontaminiert -> doppelt eingeschweißt
Page 184: 300MM Spare Parts 5-3-122

#0045 Brooks 67944 defective n/a

#0046 ASML defective n/a

#0047 KVME041-R defective n/a

#0050 unknown 38500085 defective n/a

#0051 DOLSUE2 defective n/a

#0052 I/O-MODUL NX12-R defective n/a

#0053 Almatec Futur 50E defective possible

#0054 Almatec Futur 50E defective possible

#0055 defective n/a

RADIALVENTILATOR-EC R3G400-AD03-01 incl. Controller (not defect) EBM CHW050-AA01-70

PSU250V 25A 24V 4A 21TE 6H

SERV.476.01572

Mirae / nanotec (OEM Hana)

CPU BOARD 27C240 MODULE RAM144

Data Track PI Tracker 200 Mod. 222 Relays Red 10-28V

Mirae / nanotec

MOTIONBOARD DOLSUE2

Mirae / Nanotec

Air- Membranpump Futur 50 E

Air- Membranpump Futur 50 E

Mirae / Nanotec

AMP SERVO MOTOR

SPA-2400S (SPA-3400S)

Page 185: 300MM Spare Parts 5-3-122

#0059 defective n/a

#0062 ASM 2374110-01 possible

#0063 SMC defective n/a

#0065 Mattson 17000824RW defective n/a

#0066 Mattson 17000824 defective n/a

#0067 SEZ 2015800-00 defective yes

#0068 3792 defective n/a

#0069 defective n/a

#0072 defective n/a

TEL / Kyosan Electric

DC Power Box, HV-PS4 2550210-21 Rev. A3 AEC233497

ES3D80-000148-14

INJECT GAS DIV RING LPC FR M

to be refurbished

RGLTR ELECTRO-PNEU 15PSI 3/8MNPT 1-5VDC

3800-00021 / ITV2011-31N3N4-X95

Robot,Rorze R713 Dual Arm, RWK

Robot,Rorze R713 Dual Arm, RWK

CHUCK 300/300/300 STANDARD

Advanced Energy

GENERATOR 3KW, 13.56MHZ TYP AE RF 10/25

529-00471-RW

Advanced Energy

GENERATOR 3KW, 13.56MHZ TYP AE RF 10/25

529-00471-RW

Advanced Energy

GENERATOR 3KW, 13.56MHZ TYP AE RF 10/25

529-00471-RW

Page 186: 300MM Spare Parts 5-3-122

#0073 defective n/a

#0074 Novellus defective n/a

#0077 Cymer F2

#0086 yes

#0087 TEL yes

#0088 defective n/a

#0090 defective n/a

#0096 defective yes

#0098 AMAT 0010-01286 possible

Advanced Energy

GENERATOR 3KW, 13.56MHZ TYP AE RF 10/25

529-00471-RW

GEN,APEX 10kW,13.56MHz,HF

27-257658-00

F2-Trap XLA165 MATCHING NTWK,ICP_HT

S122744-IFD300

to be refurbished

TEL /Mitsubishi

TMP BODY FT 3301W-W1N1

ES3D80-000531-11

to be refurbished

TMP BODY FT 3301W

ES3D80-000531-11

to be refurbished

Advanced Energy

GENERATOR 3KW, 13.56MHZ TYP AE RF 10/25

529-00471-RW

Advanced Energy

GENERATOR 3KW, 13.56MHZ TYP AE RF 10/25

529-00471-RW

Leybold / Novellus

TMP 2000L TURBO PUMP LEYBOLD

27-251604-00

MCA E-CHUCK, 8"-refurb / 8" SNNF MCA E-CHUCK, NI PLATED

to be refurbished

Page 187: 300MM Spare Parts 5-3-122

#0099 703-1782-02 used n/a

#0103 ASM 2856972-14 defective n/a

#0116 AMAT 0040-51066

#0118 AMAT 0040-51148

#0121 AMAT 0040-43883 possible

#0122 AMAT 0041-05536 possible

#0123 AMAT 0041-05535 possible

#0124 AMAT 0040-49285 possible

#0126 Parvex n/a

Brooks /Falcon

USV (Akku on request) / UPS Plus FALCON PRO 220V 1KV : SG1K-2T 970-01236-11

ASSY DPC 230VAC RS232 4DIG.I

SGD, lower shower head, 300mm EMAX

to be refurbished

SGD, upper shower head, 300mm EMAX

to be refurbished

DGDP, 4+4+1, smooth 120RA, 300mm EMAX

to be refurbished

liner chamber, Y2O3 oxalic, 300mm EMAX

to be refurbished

liner cathode, direct-cooled, baffle, Y2O3, 300mm EMAX

to be refurbished

liner cathode, direct-cooled, baffle, 300mm EMAX

to be refurbishedMotor

PARVEX RX320ZR1214-Z 24V 2170 U/min (ASM Stocker Z-Achse)

RX320ZR1214-Z

to be refurbished

Page 188: 300MM Spare Parts 5-3-122

#0127 Electro craft E243 n/a

#0128 ASM 2809818 used n/a

#0133 Varian E15002602 defective n/a

#0134 702665-001 defective n/a

#0135 Varian E60000108 defective n/a

#0136 Varian E60000108 defective n/a

#0137 Varian E60000280 defective n/a

#0138 ASM 28310 defective n/a

#0139 ASML 2541130-21 defective n/a

Motor Electro Craft E243 24V ( GB4 Z-Achse)

to be refurbished

Assy BTC Part Nr. 2809818(ASM Boat Trasfer Controller)

PCB ASSY,MULTI-FARADAY CUP AMPLIFIER

Aviza / CAL Controls

TEMP.CNTLR,WIT

SERVO, AMP, 5A, CONT Model # 503

SERVO, AMP, 5A, CONT Model # 503SERVO AMP,BRUSH OR BRUSHLESS,5A,18-56VDC Model # 800-1446

BEARING CLAMP RING UES25S-5A Haltec 531348 1021

PWBA I/O INTERFACE ISOLATED

Page 189: 300MM Spare Parts 5-3-122

#0140 Hokuyo PBS-03JN defective n/a

#0144 Muratec Board defective n/a

#0154 ASML defective n/a

#0156 n/a

#0157 Mitsubishi defective n/a

#0158 ASML defective n/a

#0159 Hermos defective n/a

#0160 Parvex defective n/a

#0161 MCG IB23000-E1 defective n/a

Scanning Infrared LED Obstacle Detection Sensor

MCL-SR3-RLY-103

Clamp/free-clamp Func 2W 4022480 62031

SERV.486.3031

Spectra-Physics Lasers Inc

Spectra-Physics, Laser T275

0129-9535-23S

to be refurbished

Mitsubishi FR-E520-3.7K-NA vfd inverter

FR-E520-3.7K

PADC 65/13 POWER SUPPLY

4022.471.6177 / 6001-0100-3103

Transponder-readet type TLG -R5232

TLG-S1-1000-S0-00EB

DC-Servo Motor, IGR Parvex

RX320ZR1214-Z

NEMA Frame Brushless Servo Motor/Encoders

Page 190: 300MM Spare Parts 5-3-122

#0162 Varian defective n/a

#0164 Omron defective n/a

#0165 Panasonic defective n/a

#0168 TEL defective n/a

#0170 Varian /TDI E19013481 defective n/a

#0172 Trek defective n/a

#0181 Siemens defective n/a

#0182 Siemens defective n/a

#0183 Siemens defective n/a

Motor, Encoder, Brake Assy, Modif. with Kamo Ball Reducer Type BRN23-15G-6,35 Ration 1:15

E12013110 / ID23001-E1

SERVO MOTOR 750WATT INCR 200V KEY CE SHIELD

R88MU75030VA-S1

Electro-Magnetic Brake Motor / Three Phase Induction 40W 220V

M9MA40GB4Y

CONTROLLER AIC-7-12-T1

CS014-000777-1

Analyzer Corrector Magnet Power Supply, Transistor Devices(TDI)

Electrostatic Chuck Power Supply Trek Mod. 684-1-L-CE (19-137359-00)

CT2987-400475-11

SIMATIC S5, Digital Input Module, 32DI, 24VDC (DIGITALEINGABE 420 POTENTIALGEBUNDEN KOMPAKTBAUFORM U 32 EINGAENGE DC 24V)

6ES5420-4UA13

S5 INPUT MODULE ANALOG 16POINT 465

6ES5465-4UA12

S5 INPUT MODULE DIGITAL 32POINT

6ES5420-4UA

Page 191: 300MM Spare Parts 5-3-122

#0190 ASML defective n/a

#0193 defective n/a

#0198 Veeco 840-000-980 3939 used n/a

#0199 Veeco 3937 used n/a

#0200 Veeco 160-004-900 3933 used n/a

#0201 Veeco 3942 used n/a

#0202 Veeco 3953 used n/a

#0203 Veeco 3946 used n/a

#0204 Veeco 3952 used n/a

WS TYPE3+4 XB Couple Unit Frame

SERV.631.15482

Novellus / Sörensen-Elgar

Power Supply DSC80-13EM1M52B 115->80V / 13A 1KW , M-COIL

27-137905-00

Nanoscope Controller fr. Dimension 9000M 15µm Kopf + Meßkopf AFMVX330

Robot I/O Box Dimension

03-840-001-817W

Chuck 300mm Low Contact Dimension 300

Air Table Controller Dimension 3000 with digital controller DC2000 / DC2000 precision valve controller

Nano Scope Stage Box jr. for Dimension 9000/9300Equipment PC for Dimension 9000/9300 (Windows NT) Floppy + ZIP LW w/o HD

RM4102010610045F

UPS Sinergy for Dimension 9000/9300

Page 192: 300MM Spare Parts 5-3-122

#0205 Veeco 840-006-605 3949 used n/a

#0206 Veeco 3950 used n/a

#0207 Veeco 3951 used n/a

#0208 ASML 3911; 3910 defective n/a

#0209 ASML 3912; 3913 defective n/a

#0213 LAM used n/a

#0215 VAT used possible

#0216 VAT used possible

#0222 Gastech used n/a

A/C Power Controller for Dimension 9000/9300Stage Controller for Dimension 9000/9300 Model 840-005-0028VX330

840-005-0028VX330

User Interface Ctrl. for Dimension 9000/9300

840-000-817 Rev. C

PSDC 59V/22A

4022.471.7411

PAAC 325/14 AT-C Power Supply SVG

4022.471.6849

Node Bd Anafaze CONT,TEMP,W/OT,16CH

778-900046-001

Foto vorh. Kundenliste LAM Parts

VAT Pendulum gate valve, 100mm65040-PA52-AMC1/0010 65040-PA52-

AMC1/0010

Foto vorh. Kundenliste Vakuumzubehör neu

VAT Pendulum gate valve 100mm65040-PA52-AMC1/0094 65040-PA52-

AMC1/0094

Foto vorh. Kundenliste Vakuumzubehör neu

Gastech 24-0274 Rev G Auswerteinheit (Board) + Gastech 57-7045-01 Amplifier (Sensorverstärker schwarz)

4x 24-0274 (rev.G) + 4x 57-7045-01

Page 193: 300MM Spare Parts 5-3-122

#0224 Artesyn used n/a

#0249 Varian used possible

#0250 VAT N-6288-265 used possible

#0252 DIO-24 used n/a

#0258 Asyst used possible

#0263 ASML used n/a

#0264 Cymer S138030 3969 unused n/a

#0268 Novellus 3907 used n/a

#0269 Veeco 3967 used n/a

Netzteil NSF40-7608K

NSF40-7608K

safety isolation valve of forelines of vacuum pumpsModel No.: VPI401205060

781-861-7200 VPI401205060

safety isolation valve of forelines of vacuum pumpsModel Nr.:N-6288-265Fabrication No. 01034-KE41-0001/0074 A-617533

National Instruments

10X DAQCard-DIO_24

FOUP Loadport with Hermos FOUP-ID-Reader300FL, S3, 25 Wafermanufacured 10.Jan 2001 9750-2000-

00

ASML UPS Battterieunit inkl. Akkus

SERV.470.29872

SPARE, STABILIZATION ASSY, 193nm w/EIS, 4KHz

ASSY MOD CONT P166 24V, tool computer

02-103970-00

Y-Motor for Tool AFM Vx330 / Veeco

03-840-000277W

Page 194: 300MM Spare Parts 5-3-122

#0271 Aerobar 5285C 3954 used possible

#0272 Aerobar 5024 3956 used n/a

#0273 AMAT ITU-Arm for ITU-Arm 3935 used possible

#0274 Banner PVA375N6 used n/a

#0275 Patlite STPB-T used n/a

#0281 As, B, Ph

#0284 Axcelis 1912090 non

#0287 non

#0288 non

Aerobar Ionizer Model 5285C

Controller Model 5024 for Ionizer Bar 5285C

Light Certain Banner PVA375N6 E & R

Light Tower Patlite

Pfeiffer Vacuum

Turbopump TPH2101 UPC DN250 ISO-K, 3P (Oktober 2003)

PM P03 038 B

to be refurbished

Vacuum Cassette Bellows

to be refurbished

MGE UPS Systems

UPS Pulsar EX30 Rack 3P, 3x120V, 15A, 2100W, 3KVA, US- Norm

5103128600 NT:A2

to be refurbished

MGE UPS Systems

UPS Pulsar EX30 Rack 3P, 3x120V, 15A, 2100W, 3KVA, US- Norm

5103128600 NT:A2

to be refurbished

Page 195: 300MM Spare Parts 5-3-122

#0289 non

#0292 DSCN4027 unused non

#0293 unused non

#0294 ? 3961 used possible

#0295 Swagelok 316LV - P 3965 used possible

#0296 Swagelok SS Poppet Chec 3964 used possible

#0297 Swagelok 3966 used possible

#0298 Veeco 840-002-433 used n/a

#0299 MKS possible

MGE UPS Systems

UPS Pulsar EX30 Rack 3P, 3x120V, 15A, 2100W, 3KVA, US- Norm

5103128600 NT:A2

to be refurbished

Novellus Systems

Special bit (a kind of Phillips) for ceramic screws within Altus (MOER- Assy)

72-251019-00

Novellus Systems/ Solmics (South Korea)

AlN- PEC and Concept 3 Speed Injector set (complete, 36 pieces)

15-127251-00/-01

Pfeiffer Vacuum

Reducer DN180/130 ISO-K H:50mmWELDMENT 90 DEGREE 1/2" ELBOW Fittings L 349 000070066 Cajon

SS-8C-VCR-1/3

VALVE,DIAP,MANUAL ACTU, 1/4 TURN (RED) Nupro

6LV-DAN33P-RD

Granite Block ?

Baratron VAT VLV

263-21247-00 RevA

to be refurbished

Page 196: 300MM Spare Parts 5-3-122

#0300 LAM used n/a

#0301 LAMBDA H40471 used non

#0302 used non

#0303 used non

#0306 non

#0310 Samson DSC4017/8 n/a

#0311 Novellus DSC4019 / 20 n/a

#0312 AMAT 0010-11440 used n/a

#0314 AMAT 0010-39207 used n/a

Node Bd Anafaze CONT,TEMP,W/OT,16CH 778-900046-

323

Alpha 400W power supply

GENGE&THOMA AG

Wegpotentiometer / Wegaufnehmer(Linear motion transducers)HP15-12 Hub: 12mm

Art. 15-012.12

Spectra-Physics

Laserdiode pak for ComPlus

P/N 0129-9535-235

Applied Materials / Anorad

z-stage ASM, Z 12mm with piezo motor (Nanomotion, HR-8-1-V, S/N: 44835 and encoder (Heidenhain)used in CD-SEM "Verity"

AMAT: 0190-A0362Anorad: 834-90104144-VC

to be refurbished

kN-actuator SAM 23 El 15 230V; 25W; h:30mm : v: 13,5mm/min

7017-080-15813

to be refurbished

Coil, EM, D Coil, HCM

30-259812-00

to be refurbished

HV- Module 5KV 300mm CESC

HIGH EFFICIENCY RF MATCH, ETCH, SUPER-E

Page 197: 300MM Spare Parts 5-3-122

#0315 AMAT 0010-25108 unused n/a

#0316 AMAT 0040-48648 unused n/a

#0317 AMAT 0010-02433 unused n/a

#0318 unknown used n/a

#0319 AMAT 3860-01504 unused n/a

#0320 AMAT 0190-15548 unused n/a

#0321 AMAT 0010-25419 unused n/a

#0322 AMAT 0190-02641 unused n/a

#0323 0190-02703 used n/a

Assy, AP Mainframe FIB

Assy, AP Mainframe FIB

ASSY,FCW VALVE,300MM CENTURA

AMAT / Ziehl-Abegg

115 V Radial Van for Mini_EnvironmentZiehl-Abegg

TBG TEFLON 1/2OD X .062WALL PFA350

Hose Assy, extendedGen Supp/Ret eMAx 300

Hose Assy, Pos 2&4 ENI 13,56 MHz RF Gen

Hose Assy, 3FTSup/RetPigtail, eMax 300mm Gen

AMAT / Kollmorgen

Mag DriveSAGNET DRIVE ASSY 01

Page 198: 300MM Spare Parts 5-3-122

#0324 AMAT 0680-00631 unused n/a

#0325 Hoist 85 Lbs used n/a

#0328 AMAT 0190-17434 used n/a

#0329 AMAT 0190-25401 used n/a

#0330 AMAT 0190-17029 unused n/a

#0333 MKS 0190-76185 used n/a

#0334 AMAT 0040-13730 unused n/a

#0335 AMAT / THK 3760-01102 unused n/a

#0336 AMAT 0040-70291 unused n/a

CB Mag Therm,3P 600VAC600A, TRIP Unit , LT Series

AMAT / Bosch-Rexroth

0021-15813 Rev. 02

VALVE GATE 200 THROTTLING (STANDARD) TPV

VALVE GATE 200 THROTTLING (MIRRORED) TPV

POWER SUPPLY DC +2KV +5KV 25W, 24VDC. ES

VALVE, TWO STAGE INLINE, NW40

ASSY,REV 3 BELLOWS/YOKE NCR SLIT VALVESLIDE LINEAR LM GUIDE BALL-SCR 150MM W/B KR3306A+150L0-000X(T)

ASSEMBLY, SWLL BELLOWS

Page 199: 300MM Spare Parts 5-3-122

#0337 AMAT 0200-04101 unused n/a

#0338 AMAT 0040-87358 unused n/a

#0339 AMAT DSCN4029 used n/a

#0340 VAT used n/a

#0341 VAT used n/a

#0342 AMAT 0010-14862 used n/a

#0343 AMAT 0010-14862 used n/a

#0344 AMAT 0040-76767 unused n/a

#0345 AMAT 0021-13790 unused n/a

LIFT PIN, ALUMINA, ENABLER

BELLOWS SV DOOR W/BALL BEARING (Screws see #0347)

3 Phasen Radiallüfter für Mini_EnvironmentZiehl-Abegg

16546-PA21-AAE1# 200mm, 8” gate valv

16546-PA21-AAE1A-312149

16546-PA21-AAQ1# 200mm, 8” gate valv

16546-PA21-AAQ1A-314251

ASSEMBLY, THROTTLE VALVE, 300MM DUAL FLA

ASSEMBLY, THROTTLE VALVE, 300MM DUAL FLA

BELLOWS ASSEMBLY SLIT VALVE DOOR DPS2

GUIDE, LIFT PIN, ESC, 300MM DPS2

Page 200: 300MM Spare Parts 5-3-122

#0346 AMAT 0200-06622 unused n/a

#0347 AMAT w/o unused n/a

#0351 MKS 3030-13945 used non

#0352 MKS 3030-13945 defective non

#0353 AMAT 0090-03857 used non

#0354 Hensel unused non

#0355 AMAT 0190-01965 defective non

#0356 VAT defective non

#0357 AMAT 0190-25190 unused non

GUIDE, LIFT PIN, ESC, 300MM DPS2Screws for :

Asset #0338BELLOWS SV DOOR W/BALL BEARING

CNTRL PRESS HE DUAL-ZONE 100TORR 50SCCM

CNTRL PRESS HE DUAL-ZONE 100TORR 50SCCM

ASSY FILTER BOX, 300MM HART JDA3

Hensel Kabelabzweigkasten K 9508

527A-0470629

DC POWER SUPPLY, 300MM CHAMBERAntrieb für:Pendelschieber Reihe 650mit 15 V Sensor Power / PFO / RS232

65046-PHCG-ANJ1

RF MATCH 2MHZ/5000W 60 MHZ/5000W HART3

Page 201: 300MM Spare Parts 5-3-122

#0371 Seiko Seiki SCU-H301C DSC06643 defective non

#0391 AMAT 0190-11517 unused non

#0392 AMAT 1040-00094 unused non

#0428 not available unused non

#0449 Brooks Brooks used non

#0450 PRI Robot track non

#0465 MKS 0920-00062 defective non

#0466 MKS defective non

#0467 AMAT 0190-14415 unused non

Turbomolecular Pump Control Unit SCU-H301C #33302

Magnetventil für HX SMC

SETRA M327 Micro Display

Granville Philipps (AMAT)

275 Mini Convectron; 275801- EU; 1000 Torr

FIXLOAD 25 (mounted on frame for training purpose)

LTRA030-SBI

to be refurbished

RF GEN PLASMA 5KW 2MHZ ENI B-5002

RF GEN PLASMA 5KW 2MHZ ENI B-5002

0920-00062W

PRESSURE DISPLAY, 300MM FI

Page 202: 300MM Spare Parts 5-3-122

#0468 AMAT 0190-03373 used non

#0487 ENI 0920-00062 used non

#0488 ENI 0920-00062 used non

#0489 ENI 0920-00062 used non

#0490 ENI 0920-00062 used non

#0495 n/a yes

#0569 AMAT 0190-15384 unused non

#0570 AMAT 0190-15384 unused non

#0577 133SR used possible

DIP CDN494-B DEVICENET DIO/AIO COMBO 3U

RF GEN PLASMA 5KW 2MHZ ENI B-5002

RF GEN PLASMA 5KW 2MHZ ENI B-5002

RF GEN PLASMA 5KW 2MHZ ENI B-5002

RF GEN PLASMA 5KW 2MHZ ENI B-5002

Granville Phillips275 Mini Convectron

Granville Phillips275 Mini Convectron

to be refurbished

Card Motion Delta Tau sinking 32 DI/ 16 DO Compact UBUS

Card Motion Delta Tau sinking 32 DI/ 16 DO Compact UBUS

Swagelok/ Whitey

Purge Valves (upper & lower)

Page 203: 300MM Spare Parts 5-3-122

#0578 used non

#0579 used non

#0582 used non

#0608 Ricoh w/o used non

#0616 used non

#0618 used non

#0620 Yokogawa used non

#0621 Brooks used non

#0622 Lenze used n/a

Best Power610.

Uninterruptable Power Systems In: 120v / 25amps.Out100/110/127vAC 50/60Hz 2,1kW.

:B61103000UH

Load port controller/ amplifier

(A)METEK Process Instruments

Dycor CG1100oygen analyzer

Edelstahlplatte 1.4301 (block stainless steel) ca. 1,25m x 1,00m x (5pcs 10mm) / (2pcs 5mm)

Dawn VME Products

Input-/ Output- signal converter / down part

11-1007626 &109576-01 1; 168800-006

Dawn VME Products

Input-/ Output- signal converter / upper part

11-1007626 &109576-01 1; 168800-006

Servo actuator

SD1050A62-3SN*1CFE-Robot

with controller Rob. 6-002-0916-SP. Contr.: ESC218B-ZT3A-CM

ABM107B-S-CE-S2-ASML

Servo-Motor Sync. Self cool. 320VDC 1.5 - 5.3A 4040rpm 1,5nm with brake 24V 2Nm

MCS06F41-9RMP1-B11N-ST5800N-ROSU

E201
Dietze Klaus: 4241
Page 204: 300MM Spare Parts 5-3-122

#0623 repaired n/a

#0624 Osram / TEL DSCN4111 unused non

#0630 0066925-000 used non

#0631 defective non

#0633 used non

#0634 used non

#0635 0064212-000 defective non

#0636 0064212-000 defective non

#0677 w/o refurbished As, B, P, InI

Kobold / Suss Micro

BRUSHLESS SERVOMOTOR KSY 466.40 R6 /XF/W/S115/S--1 400V 2,8A 4000rpm 3,15Nm Id#3308880002

KSY 466.40 R6

LAMP LP2505T / T250 OSRAM HBO 250W/HS

CT2980-190221-11

KLA-Tencor / defect inspection

CRTA Assembly ESCAPE

KLA-Tencor / defect inspection

Chiller for KLA 91xx (water tank has a leak)Vendor: TermotekTyp: P310-14819-3100..230 V, 50/60 Hz, 7,5/16Avintage: 2006Gas: R134a6l/min, 5 bar

KLA-Tencor / Sheet resistance measurement

lamp house with power supply for RS-100Model: 20Lite Mite SeriesOutput: 150 WVendor: Stocker & Yale Inc.

29-0375 (Tencor)

KLA-Tencor / defect inspection

spare parts kit for KLA2365 user interface / image computer

1 Set: 14x 900-070686x 910-070616x 910-07031

KLA-Tencor / defect inspection

complete user interface KLA2365

KLA-Tencor / defect inspection

user interface was rebuilt as data storage with 11 300 GB SCSI hard disks;w/o CRTA Assembly, you can find this part listed internal invent# 630

Varian, VIISta 810, 810HP

Shipping Container Assy Soucre V810

E202
Dietze Klaus: 4262
Page 205: 300MM Spare Parts 5-3-122

#0710 E11088200 refurbished As, B, P, InI

#0712 E11107750 refurbished As, B, P

#0770 Axcelis 1912090 refurbished As, B, P

#0771 Axcelis, HE3 1906850 refurbished As, B, P

#0779 Axcelis, HE3 17077200 refurbished As, B, P

#0780 Axcelis, HE3 17077200 refurbished As, B, P

#0791 Axcelis, HC3 17D8810 refurbished As, B, P

#0792 Axcelis, HC3 17D8900 refurbished As, B, P

#0794 Axcelis, HC3 11038850 refurbished As, B, P

Varian, VIISta 810, 810HP

PFG Cage with Closed Loop Faraday Cup

Varian, VIISta 80, 80HP

Cage Assy, Dual Plasma Flood Gun

Vacuum Cassette Bellows

Bellows ld/unld Manipulator 19S0091

Shiping Container

Shiping Container

Insulator Triple Surface Disk Faraday Assy

Adapter Triple Surface Disk Faraday Assy

Triple Surface Disk Faraday Assy

Page 206: 300MM Spare Parts 5-3-122

#0797 Axcelis, HC3 110028500 refurbished As, B, P

#0798 Axcelis, HC3 19S0357 refurbished As, B, P

#0799 Axcelis, HC3 19S0357 refurbished As, B, P

#0800 Axcelis, HC3 1908980 refurbished As, B, P

#0806 Axcelis, HC3 19S0357 refurbished As, B, P

#0808 Axcelis, HC3 110020220 refurbished As, B, P

#0809 Axcelis, HC3 110020220 refurbished As, B, P

#0810 Axcelis, HC3 11A8863 refurbished As, B, P

#0812 Axcelis, HC3 w/o refurbished As, B, P

Assy V3 Aperture (170021150, 170021160, 170021170 und 17C9383) w/o Gyro Bellow HC3

Gyro Bellow Assy w Shipping Bracket

Gyro Bellow Assy w/o Shipping Bracket

Bellows Res Housing to Chamber Housing HE3 with Shipping Bracket

Gyro Bellow Assy with Shipping Bracket

Assy Source Liner HC3

Assy Source Liner HC3

300mm Guide Assy

Leak Check Container (200x260x380, HWD)

Page 207: 300MM Spare Parts 5-3-122

#0816 10034160 used non

#0817 Axcelis, HE3 11A7399 refurbished As, B, P

#0973 Panasonic 4263 used n/a

#0974 Panasonic 4264 used n/a

#0975 Panasonic 4265 used n/a

#0976 Panasonic 4265 used n/a

#0977 Lenze 4266 used n/a

#0978 Atlas- Copco 4267 used n/a

#0979 Atlas- Copco 4268 used n/a

Axcelis HC3, HE3

Setup Fixture 5° Wafer Holder

18 inch Resonator Assy

Motor 220V 60Hz 0,29A Brake Torque 19N.cm 4P 40W Cont. 3Phase

M9MA40GB4Y

Motor 220V 60Hz 0,24A Brake Torque 10N.cm 4P 25W Cont. 3Phase with M6GA75B

M8MA25GB4Y

Motor 220V 60Hz 0,65A Brake Torque 39N.cm 4P 90W Cont. 3Phase with M9GC200B

M9MC90GB4Y

Motor 220V 60Hz 0,65A Brake Torque 39N.cm 4P 90W Cont. 3Phase with M9GC20B

M9MC90GB4YSevo Motor

AC 325V 16A 1,8kW 4000rpm 4,2Nm with brake 24V0,5A 2,5Nm

MDSKSBA056-33

Servo- Motor AC C.Stall Torque 2,2Nm 4,3A 6000rpm 260V 23A with brake 24V,5Nm, 0D2001TR 9032010509 ; Gear Shift GYSIN GPL090-1HB/3.5-1 17415-005-UA

AHR92E4-44S

Servo- Motor AC C.Stall Torque 1,2Nm 2,3A 8000rpm 350V 15A with brake 24V, 2Nm, C 2001TR 9032010497 ; Gear Shift

AHD70C4-448

C230
treptee: Ohne Elektronik und Antirebsmotor
Page 208: 300MM Spare Parts 5-3-122

Quantity

1

1

1

2

1

1

1

1

Page 209: 300MM Spare Parts 5-3-122

1

1

1

1

1

1

1

4

1

Page 210: 300MM Spare Parts 5-3-122

1

1

1

1

1

4

1

1

1

Page 211: 300MM Spare Parts 5-3-122

1

1

1

1

1

1

1

1

1

Page 212: 300MM Spare Parts 5-3-122

1

1

1

1

1

2

1

1

1

Page 213: 300MM Spare Parts 5-3-122

5

1

5

5

3

2

2

1

5

H49
Dietze: 1 verkauft 02.03.09 TU A_001034 1 am 19.04.10 an das Magazin gegeben
H51
Dietzek: insgesamt 10 im SAP- Bestand
H52
Dietzek: insgesamt 9 im SAP-Bestand….
Page 214: 300MM Spare Parts 5-3-122

1

1

1

2

1

1

1

1

1

Page 215: 300MM Spare Parts 5-3-122

1

1

1

1

1

1

11

2

2

Page 216: 300MM Spare Parts 5-3-122

1

1

1

1

1

2

1

1

1

Page 217: 300MM Spare Parts 5-3-122

1

1

1

1

1

1

1

1

1

Page 218: 300MM Spare Parts 5-3-122

1

1

1

1

1

4

1

1

4

Page 219: 300MM Spare Parts 5-3-122

1

2

2

10

2

2

1

1

1

Page 220: 300MM Spare Parts 5-3-122

1

1

1

1

1

1

1

1

1

Page 221: 300MM Spare Parts 5-3-122

1

1

1

1

1

1

3

1

1

Page 222: 300MM Spare Parts 5-3-122

1

2

3

1

1

1

1

1

2

Page 223: 300MM Spare Parts 5-3-122

1

1

4

2

2

1

1

1

2

Page 224: 300MM Spare Parts 5-3-122

1

1

1

1

1

1

1

1

1

Page 225: 300MM Spare Parts 5-3-122

6

23

1

1

1

1

1

1

3

Page 226: 300MM Spare Parts 5-3-122

32

100

1

1

1

1

1

3

1

Page 227: 300MM Spare Parts 5-3-122

1

1

2

1

1

1

1

1

1

Page 228: 300MM Spare Parts 5-3-122

1

1

1

1

1

4

1

1

2

Page 229: 300MM Spare Parts 5-3-122

1

1

1

7

1

1

1

1

1

H196
Dietze Klaus: 5+2
Page 230: 300MM Spare Parts 5-3-122

1

13

1

1

1

1

1

1

1

H203
Dietzek: + 1 im ETL unter 6008410
Page 231: 300MM Spare Parts 5-3-122

1

1

1

5

1

1

1

1

1

Page 232: 300MM Spare Parts 5-3-122

1

1

1

1

1

1

1

1

1

Page 233: 300MM Spare Parts 5-3-122

1

1

2

1

3

2

2

1

1

Page 234: 300MM Spare Parts 5-3-122

Material # 1 Materialtext

Sum: New value:6006048 Filter Holder 3DG Assy6000563 AIR SENSORS ASSY6006049 CCBPH5 Board Assy+ATP

K-3-Q7-01-0092002 HD 40GB & 80GB KIT + SWK-3-Q7-01-0092004 VIDEO CABLE - IPB-BK-3-Q7-01-0092005 VIDEO CABLE - CSB2K-3-Q7-01-0092008 DOOR SWITCH E79-30AK-K-Q7-01-0089755 P-891.03LVPZT TRANS.CAB LEMO1K-K-Q7-01-0089756 P-892.03SENSOR EXT.CABLE SGS1K-K-Q7-01-0089764 VACUUM SENSOR (NTIC-1027)K-K-Q7-01-0089769 CSB4 ASSY & BRACKETK-K-Q7-01-0089772 CCD SENSOR ON HOLDER V3K-K-Q7-01-0090028 USER INTERFACE HOLDER (MONITOR,KEYBOARD)

6000332 XYZ 4M CONTROLLER ASSY6000620 CLB4 ASSY & BRACKET NEW P.D.6001455 DISTILLED WATER 5L6006061 Blower Ametek 1193836006258 Laser P.S. Long Umbilica6008574 VIBRATION ISOLATION SYS. (MASTER1)6008575 VIBRATION ISOLATION SYS. (SLAVE)6008577 VIBRATION ISOLATION SYS. (MASTER3)6008578 VIBRATION ISOLATION DUAL SYSTEM6008733 TOUCH LETCHEE E4-10-102-106008734 SCSI 150GB 10K 80PIN FUJITS Vers 2.460776009442 Lock door Solenoied

K-3-Q7-01-0091995 5A BLDC BLOWER DRIVER 48132-01K-3-Q7-01-0091998 SWITCHER ASSY 0SU52060K-3-Q7-01-0092000 EXT TAPE DAT INCLUDE CASEK-3-Q7-01-0092006 BLOWER ASSYK-3-Q7-01-0092009 GREY EPOXY GLUE DP190K-K-Q7-01-0089748 INTERLOCK SYSTEM ASSY+ ATPK-K-Q7-01-0089749 PINS SYSTEM ASSYK-K-Q7-01-0089752 DUAL PS 400W 610W SINGLE MODULK-K-Q7-01-0089759 VIDEO INTERFACE 2 BOARD ASSYK-K-Q7-01-0089761 SING.NODE PCI W/MPC7410 500MHZK-K-Q7-01-0089762 DUAL NODE PCI W/MPC7410 500MHZK-K-Q7-01-0089765 LIGHT DETECTOR BOARD ASSY VER4K-K-Q7-01-0089771 CSB4 A/F ASSY AND BRACKETK-K-Q7-01-0089773 IPB PLUS ASSIK-K-Q7-01-0090245 SFM CONTROLLER ONLY TIGER 7K-K-Q7-01-0090246 LIFTING UNIT WITH MOTORK-K-Q7-01-0092337 VACUUM VALVES & SENSORS

6005346 IMAGER CONN. PANEL ASSY ICP +ATP6009441 CW ASSY INCLUDE LASER CUBE

K-3-Q7-01-0091989 PARKER O-RING 2-005K-3-Q7-01-0091992 DEIONIZER CARTRIDGE FILTER MEC4K-K-Q7-01-0089760 IMAGER CONTROLLER PHASE4

Page 235: 300MM Spare Parts 5-3-122

K-K-Q7-01-0090053 LASER & LASER HEAD BENCHK-V-Q7-01-0089776 FLASH LAMP CFR400

Page 236: 300MM Spare Parts 5-3-122

Material # Unit

$255,000.001012341510 KK 18 pcs.1001483000 KK 3 pcs.1013325010 KK 2 pcs.1004434000 KK 2 pcs.1005120200 KK 2 pcs.1005121210 KK 2 pcs.8711000600 KK 2 pcs.1005019100 KK 2 pcs.1005020100 KK 2 pcs.1005101000 KK 2 pcs.1013329000 KK 2 pcs.1013332000 KK 2 pcs.1001650020 KK 2 pcs.1013213020 KK 1 pcs.1013324030 KK 1 pcs.1009910908 KK 1 pcs.1003221800 KK 1 pcs.1003300702 KK 1 pcs.1001492020 KK 1 pcs.1001494010 KK 1 pcs.1001495000 KK 1 pcs.1051494000 KK 1 pcs.1002400016 KK 1 pcs.1004400430 KK 1 pcs.1015120200 KK 1 pcs.1003221700 KK 1 pcs.1003230010 KK 1 pcs.1004427010 KK 1 pcs.1007708000 KK 1 pcs.9619000500 KK 1 pcs.1001202010 KK 1 pcs.1001240010 KK 1 pcs.1004400011 KK 1 pcs.1013303000 KK 1 pcs.1004421000 KK 1 pcs.1004422000 KK 1 pcs.1013312000 KK 1 pcs.1013331000 KK 1 pcs.1014430020 KK 1 pcs.1001317000 KK 1 pcs.1011290000 KK 1 pcs.1005010010 KK 1 pcs.1011219010 KK 0 pcs.1051495000 KK 0 pcs.1002400093 KK 0 pcs.1002400850 KK 0 pcs.1013320030 KK 0 pcs.

Qty. on Stock

Page 237: 300MM Spare Parts 5-3-122

1011390000 KK 0 pcs.1003333000 KK 0 pcs.

Page 238: 300MM Spare Parts 5-3-122

Material # Supplier P/N Description

Sum:

95000561 Target Cu 300mm IAT, C0002-W330 Target Cu monoblc, Umicor95000960 Target Tungsten MD300mm C0002-W337 MD300mm Tungsten, Nikko95001263 Target Tungsten MD300mm C0002-W349 MD300 Tungsten, Nikko A66509-C0002-W349-95001362 Target 300mm 9006-94094B , Eval. Nikko NMP / New Memory Platform-Target95001364 Target 300mm 9006-94094B , Eval.Umicor NMP / New Memory Platform-Target95001365 Target 300mm 9006-81740B , Eval. Nikko NMP / New Memory Platform-Target95001366 Target 300mm 9001-15016B , Eval.Umicor NMP / New Memory Platform-Target95001484 Target Ti Endura Falcon C0002-W352 Endura Falcon/Extensa , diff.geb. Nikko95001432 Target Anelva Evaluierung Target Anelva Evaluierung, alle95001442 Target 300mm 9001-15016B , Evalui. Nikko Target NMP / Anelva size 440 x 5 mm

Page 239: 300MM Spare Parts 5-3-122

Supplier Stock

Umicore Materials pcs. 1Nikko Metals Europe GmbH pcs. 1Nikko Metals Europe GmbH pcs. 1Nikko Metals Europe GmbH pcs. 3Umicore Materials AG pcs. 2Nikko Metals Europe GmbH pcs. 1Umicore Materials AG pcs. 2Nikko Metals Europe GmbH pcs. 1Nikko Metals Europe GmbH pcs. 1Nikko Metals Europe GmbH pcs. 1

Mengen-einheit

Page 240: 300MM Spare Parts 5-3-122

Pads & Brushes & Cond.

Material # Supplier P/N

6002535 60-0200-0490-36007482 10275767-MUSTER6008930 10011184-MUSTER6009703 AM02PSL8060D76600150 AM02PSL8040D7-PM-MUSTER6600151 AM02PSL1720D7-PM-MUSTER6600176 AM02PSL1760D7-PM-MUSTERE-3-63-GD-0073414 60-0200-1326-8E-3-D2-CO-0091657 10074143E-3-D2-GR-0083233 10082960

Page 241: 300MM Spare Parts 5-3-122

Description Supplier Stock

3M Conditioner Adhesive Pad 3 IN 3M Deutschland GmbH PC 118KINIK NAD3-SPD09-AC,106mm x 6,35 mm Rohm and Haas Europe Trading ApS PC 3DiaGrid, AD3BG-150840,108mmx6.35mm Rohm and Haas Europe Trading ApS PC 1AM02PSL8060D7 JSR Micro N.V. PC 3AM02PSL8040D7-PM JSR Micro N.V. PC 1AM02PSL1720D7-PM JSR Micro N.V. PC 1AM02PSL1760D7-PM JSR Micro N.V. PC 13M S51 CONDITIONER 3" WOLTERS 3M Deutschland GmbH PC 5DIAGRID ED3CG-181060,108MMX6.35MM Rohm and Haas Europe Trading ApS PC 10DiaGrid ED3BG-150830, 108x6,35mm, coated Rohm and Haas Europe Trading A PC 8

Mengen-einheit

Page 242: 300MM Spare Parts 5-3-122

Obsolete Spare Parts Regensburg

SAP Material No Description BereichFURR04 2-Jan A2U00033149 THERMOELEMENT OXID VERTIKAL 1 DE02 20-11-4 A2U00057462 Flow Switch Sensor 2 DE07 10/11/2001 A2U00076666 KEE-Scheibe für Pedestal Oxid 2 DE08 61-11-1 A2U00005143 OUTPUT MODULE 8 D

WETE01 16-18-1 A2U00013312 FREQUENZUMRICHTER NF3 NEU 3 NE05 8/7/2001 A2U00013481 STROMVERSORGUNGSBAUGRUPPE 1 N

IMPE05 61-18-1 A2U00007412 ARC CHAMBER**vorsicht** 6 IE02 26-13-6 A2U00057203 Lug Beamgate Assy 10 IE02 15-11-3 A2U00007425 FILAMENT INSULATOR INSERT 50 IE07 6/6/2006 A2U00009212 SCREW SEAL 5/16-16X13/8 20 IE09 22-17-1 A2U00087072 Screw 10 I

LITE07 4/16/2001 A2U00006738 AIR OPERATED VALVE SUCKBACK UNIT 2 FE01 12/14/2001 A2U00007205 SHUTTER UNIT I1 1 FE09 67-01-1 A2U00083454 SMC Valve Prozessventil 4 FE08 40-09-6 A2U00006426 INTERF.3 IEEE-V24 1 F

CVDE03 38-06-3 A2U00058941 Robot Blade 6"+8" 1 AE01 3/19/2001 A2U00051364 MFC 1179A 23C R1BV 1 AE02 23-21-7 A2U00072057 O-Ring 3 AE03 19-17-3 A2U00048298 STEC MFC Adapter 1 AE06 48-20-1 A2U00068576 Blocker Plate 1 AE06 18-18-1 A2U00032247 Ceramic Ring 1 AE03 39-16-1 A2U00032251 Mixer 1 A

PVDE08 56-11-1 A2U00040024 Platen Assy MKIII 3 AE06 65-20-1 A2U00073738 Baffle Plate LowK 1 AE09 23-12-1 A2U00079732 Gasket LowK 5 AE05 18-09-1 A2U00010862 MASSFLOW CTRL. CARD 8 AE10 43-13-5 A2U00073769 PDS Flow Sensor 1 AE05 60-17-1 A2U00010906 THERMOGUARD 1 AE02 24-13-1 A2U00071531 Spring Orifice Toroidal Modified WJ999 28 A

CMPE08 3/16/2001 A2U00045114 RETAININGRING FEST. PEAK 3 CE03 44-17-1 A2U00043159 Fine Adjustment Assy 1 CE06 19-13-1 A2U00043136 Ring 1 CE08 18-19-7 A2U00046091 LC ARM MINI LOW PRS. 1000 2 C

StorageType

StorageBin

Pieces available

Page 243: 300MM Spare Parts 5-3-122

E05 20-03-6 A2U00040987 Load,PLGR-Dämpfer 8 CE08 42-13-1 A2U00044575 PLATE COUPLING DOJEN (EIP-P0040) 2 CE08 24-05-1 A2U00046100 SHAFT CARRIER DRIVE 2 CE05 26-05-6 A2U00057094 ANALOG INPUT 0-50 MV 2 C

ETCE04 11/5/2003 A2U00012317 ASSY CPU 8 TE04 19-01-1 A2U00012355 GAS RING COVER 2 TE08 43-03-1 A2U00041773 O-RING Chemraz 10 TE04 6/3/2001 A2U00012346 RING,FILLER,LOWER CHAMBER XXX Focus 1 TE04 8/7/2004 A2U00011595 S-RAM BOARD 3 TE05 14-13-1 A2U00041951 Keramikring 1 TE06 42-01-1 A2U00015321 CARRIER CLAMP 3 TE03 50-03-6 A2U00043309 DC Bias Pin 22 TE06 25-07-1 A2U00012310 CONTROLLER PCB 3 TE03 25-03-4 A2U00012479 ASSY PCB (NEUE VERSION) ISO MODUL 2 TE02 42-07-1 A2U00012583 ASSY,RF SW BOX 1 TE02 19-01-3 A2U00044784 Filter Body Teflon 5 TE09 57-03-3 A2U00012561 PLUNGER,1/4 TURN 28 TE09 27-03-4 A2U00011876 TEFLON FITTING 2 TE06 54-11-3 A2U00012790 PACER LOW TEMP 8 TE04 12/1/2001 A2U00011716 SA SI BOARD 6 TE03 33-05-7 A2U00012860 SCR UNTB CAP 10 TE05 63-09-1 A2U00012562 CLAMP RETAINER 1/4 50 T

WTE30 2/1/2007 A2U00014696 FILTERSATZ MKF FA 4 4 PE02 29-05-1 A2U00014690 KRYPTON-BOGENLAMPE 4 P

VakuumE07 6/19/2001 A2U00004772 MINI UHV SCHIEBER ISO KF50 VAT 1 V

Page 244: 300MM Spare Parts 5-3-122

Typgruppe Normbezeichnung

BTI 33005-132BTI 9043618BTI KEINEBTU 9760131

STEAG 611252STEAG 611645

VA F5392001VISION E17206910VA H5114001EATON 17097770EATON 1914600

DNS 2-39-42451CANI12 BG4-2020-000ACS200 LVC23USO3-X2LEITZ 301-305.126

AMEPI 9780167WCENT SPC2 2000SCWCENT 3700-02737WCENT 0620-02869AMTC5 0020-32036WCENT 0200-09999WCENT 0020-31425

PLANA 155664C01PLANA 155694PLANA 703165MSDWJ 970011-000PLANA A45279MSDWJ 973210-001MSDWJ 995753-001

WOLTER 237450DIS85 MAENR002DIS85 MOJAH153-ATELCMP RK210020

Page 245: 300MM Spare Parts 5-3-122

TELCMP CZ140045TELCMP 372-15501-1TELCMP 372-72361TELCMP TN100028

LAMRB 810-017034-LAMRB 716-330068-LAMA 734-061978-LAMTA 716-031453-LAMRB 810-017033-LAMA 716-440054-AMTPM 0020-31463LAMA 716-038612-LAMRB 605-016005-LAMRB 810-017048-LAMRP 853-017163-LAMTA 775-009929-LAMRP 715-011781-TYL80 3-N1756G-1LAMA 715-018915-LAMRB 810-017035-LAMA 728-097297-LAMRP 715-028305-

ROFIN 600008ROFIN 751015A

LAM 01034-KE14

Page 246: 300MM Spare Parts 5-3-122

Plnt Material MTyp New Machine type Material Description3072 K000001852 ERSA HCIGSDE GSD-200E2 Electrode Consumables - 1181633072 K000001856 ERSA HCIGSDE Disk Faraday Assy (GSD200)3072 K000001858 ERSA HCIGSDE 2000 Hour System Consumables - H E3072 K000001864 ERSA HEIGSDH ASSY, BERNAS SOURCE3072 K000001875 ERSA HEIGSDH Bernas Source Consumables3072 K000001876 ERSA HEIGSDH Bernas Source Minor PM Spares3072 K000001878 ERSA HEIGSDH Charge Exchange Major PM Spares3072 K000001879 ERSA HEIGSDH Charge Exchange Minor PM Spares3072 K000001880 ERSA HEIGSDH DI Water PM Kit3072 K000001881 ERSA HEIGSDH Facilities Consumable Spares3072 K000001882 ERSA HEIGSDH Faraday PM Kit3072 K000001883 ERSA HEIGSDH Implant Chamber/Disc Drive PM Kit3072 K000001884 ERSA HEIGSDH Tilt and Scan PM Kit3072 K000001886 ERSA HEIGSDH Charge Exchange Cups w/Cover3072 K000001887 ERSA HEIGSDH Injector Spares3072 K000001888 ERSA HEIGSDH Source Housing Spares3072 K000001908 ERSA HEIGSDH BRACKET, COLLECTOR CUP, L.H.3072 K000001910 ERSA HEIGSDH SCREW,SHOULDER,8-32 X 5/16 SST 18-8 OR3072 K000001911 ERSA HEIGSDH LOCKWASHER,INTERNAL TOOTH,SS,#83072 K000001913 ERSA HEIGSDH SCREW, SHC 4-40 X 1/4 SST 18-83072 K000001914 ERSA HEIGSDH SCREW, CAPTIVE 6-323072 K000001917 ERSA HEIGSDH STRAP, FLEXIBLE, (-)3072 K000001918 ERSA HEIGSDH STRAP, FLEXIBLE, (+)3072 K000001929 ERSA HEIGSDH WASHER,TEFLON,CGA 3303072 K000001934 ERSA HEIGSDH Beam Dump-333072 K000001941 ERSA HEIGSDH SLEEVE, ELECTRON SUPP3072 K000001949 ERSA HEIGSDH SHUTTLE DRIVE BELT3072 K000001976 ERSA HCIV200 VARIABLE GAP ACCEL TUBE ASSEMBLY3072 K000001978 ERSA HCIV200 BEAMGATE CHAMBER ASSY, 80KV (EINZEL LENS3072 K000001982 ERSA HCIV200 Spare Plasma Flood Gun Assembly3072 K000001984 ERSA HCIV200 200MM Wafer Handler General PM Kit3072 K000001987 ERSA HCIV200 Analyzer Chamber Major PM Kit3072 K000001988 ERSA HCIV200 Analyzer Chamber Minor PM Kit3072 K000001989 ERSA HCIV200 Beam Gate Chamber General PM Kit3072 K000001993 ERSA HCIV200 Coated Magnetic Faraday General PM Kit3072 K000001995 ERSA HCIV200 DI Water General PM Kit3072 K000001996 ERSA HCIV200 End Station Particle Filter General PM K3072 K000001998 ERSA HCIV200 Extraction Electrode Minor PM Kit3072 K000002000 ERSA HCIV200 Extraction Manipulator Minor PM Kit3072 K000002001 ERSA HCIV200 Graphite Magnetic Faraday General PM Kit3072 K000002003 ERSA HCIV200 Grounded Beam Gate Minor PM Kit3072 K000002005 ERSA HCIV200 Impregnated Beam Gate Minor PM Kit3072 K000002006 ERSA HCIV200 Impregnated Extraction Electrode Major P3072 K000002007 ERSA HCIV200 Load Lock Valve General PM Kit3072 K000002009 ERSA HCIV200 Magnetic Faraday General PM Kit3072 K000002010 ERSA HCIV200 Mass Slit Chamber General PM Kit3072 K000002011 ERSA HCIV200 Plasma Flood Gun Major PM Kit3072 K000002012 ERSA HCIV200 Plasma Flood Gun Minor PM Kit3072 K000002018 ERSA HCIV200 Wafer Transport General PM Kit3072 K000002028 ERSA HCIV200 O-RING,VITON,11/16 ID

Page 247: 300MM Spare Parts 5-3-122

3072 K000002060 ERSA HCIV200 LEAD,FILAMENT,LEFT,BERNAS,ARC,SOURCE3072 K000002066 ERSA HCIV200 UPPER INSULATOR PLATE3072 K000002067 ERSA HCIV200 LOWER INSULATOR PLATE3072 K000002068 ERSA HCIV200 UPPER CLAMP ROD3072 K000002069 ERSA HCIV200 LOWER CLAMP ROD3072 K000002072 ERSA HCIV200 FARADAY BASE INSULATOR3072 K000002073 ERSA HCIV200 FARADAY ALUMINIUM LINER3072 K000002074 ERSA HCIV200 RESISTOR ASSEMBLY3072 K000002076 ERSA HCIV200 INSULATOR,PLASMA FLOOD GUN3072 K000002077 ERSA HCIV200 INSULATOR,#2,PLASMA FLOOD GUN3072 K000002086 ERSA HCIV200 FITTING,KNUCKLE,TUBING,CLAMP3072 K000002088 ERSA HCIV200 STRAP GRAPHITE3072 K000002090 ERSA HCIV200 SHEILD GAUSS3072 K000002101 ERSA HCIV200 O-RING3072 K000002116 ERSA HCIV200 GRAPHITE APPERTURE3072 K000002119 ERSA HCIV200 APERTURE,GROUND,#2 LENS3072 K000002120 ERSA HCIV200 APERTURE,GROUND,2ND,#1 LENS3072 K000002123 ERSA HCIV200 STANDOFF,INSULATOR3072 K000002139 ERSA MCINV82 Anode ( Feed Thru )3072 K000002142 ERSA MCINV82 Spring Compression3072 K000002173 ERSA MCINV82 Washer Flat3072 K000002175 ERSA MCINV82 Lock Washer3072 K000002176 ERSA MCINV82 Srew, 6-32 x 5/83072 K000002180 ERSA MCINV82 Srew3072 K000002185 ERSA MCINV82 Cathode Wire Ins. Tube3072 K000002200 ERSA MCINV82 Srew, 6-32 x 3/16", Vented3072 K000002204 ERSA MCINV82 Nut Hex, 8-323072 K000002215 ERSA MCINV82 Ring Retaining3072 K000002230 ERSA MCINV82 SCREW 1/4-20 X 5/8" SC/H/CA3072 K000002231 ERSA MCINV82 O-Ring, Buna, 2-4523072 K000003200 ERSA HCIGSDE GSD-HE (VHE) Electrode Cons3072 K000003261 ERSA MCINV82 Washer3072 K000003262 ERSA MCINV82 Nut3072 K000003322 ERSA HEIGSDH Analyzer Chamber PM kit3072 K000005735 ERSA MCINV82 O-Ring, Buna =>Viton, 2-4513072 K000005737 ERSA MCINV82 O-Ring, Viton, 2-4523072 K000005986 ERSA HCIGSDE Tungsten in place of Moly in the sys sou3072 K000006751 ERSA HCIGSDE Tool Kit, E/S3072 K000006755 ERSA HEIGSDH Source Falange3072 K000006766 ERSA HCIGSDE Source Liner3072 K000007248 ERSA MCINV82 LVPS 60W 85-264VAC Single 12V Switch NRT3072 K000007270 ERSA MCINV82 IC,MCT6, OPTOISOLATOR,DUAL3072 K000007271 ERSA MCINV82 TUBE,ION GAUGE3072 K000007384 ERSA HEIGSDH Suppression Assy, Electron3072 K000007873 ERSA HEIGSDH O-RING, BROWN VITON, 2-0133072 K000007874 ERSA HEIGSDH APERTURE,SST3072 K000007876 ERSA HCIV200 FEEDTHRU,FILAMENT,COOLED,BERNAS ARC SRC3072 K000008223 ERSA HCIV200 INSULATOR,FARADAY3072 K000008224 ERSA HCIV200 INSULATOR,SCREW

Page 248: 300MM Spare Parts 5-3-122

Industry Std Desc. StorageBin Desc Mat Grp Module Supplier1 Name11071570 L06-10-04 S&C: Implant M11199240 L06-09-01 S&C: Implant M11047560 L06-11-04 S&C: Implant M1E11093610 LEXTERNAL S&C: Implant M1 1100341 Varian Semiconductor EquipmentE11093680 L06-01-01 S&C: Implant M1E11111950 L02-27 S&C: Implant M1E11111970 LBOXES 12 S&C: Implant M1E11111960 LBOXES 12 S&C: Implant M16194400 L07-02-02 S&C: Implant M14313600 L06-02-04 S&C: Implant M1E11105100 LBOXES 13 S&C: Implant M14402600GEN L02-01-02 S&C: Implant M1 1100341 Varian Semiconductor EquipmentE11286900GEN L01-01-04 S&C: Implant M1 1100341 Varian Semiconductor Equipment4206911 L07-02-01 S&C: Implant M1E11093670 L07-01-04 S&C: Implant M1E11093700 LBOXES 13 S&C: Implant M1E17204070 LBOXES 12 S&C: Implant M1P1201542 L01-22 S&C: Implant M1 1100341 Varian Semiconductor EquipmentP1572106 L01-24 S&C: Implant M1 1100341 Varian Semiconductor EquipmentP1201519 L03-07 S&C: Implant M14288200 L04-02 S&C: Implant M1 1100341 Varian Semiconductor Equipment4174900 L01-25 S&C: Implant M1E17195790 L01-05 S&C: Implant M11115000 L01-21 S&C: Implant M1 1100341 Varian Semiconductor Equipment4525500 LM5CABINET S&C: Implant M14383300 L02-23 S&C: Implant M1 1100341 Varian Semiconductor Equipment5031519 L03-24 S&C: Implant M1E11059620 LEXTERNAL S&C: Implant M1 1100341 Varian Semiconductor EquipmentE11044262 LEXTERNAL S&C: Implant M1 1100341 Varian Semiconductor EquipmentE11043780 LBOXES 12 S&C: Implant M1 1100341 Varian Semiconductor Equipment113346002GEN L03-09 S&C: Implant M1E11030920MJR L06-02-01 S&C: Implant M1E11030920MNR LEXTERNAL S&C: Implant M1E11044262GEN L07-01-02 S&C: Implant M1E11043682GEN L07-01-01 S&C: Implant M1E11036321GEN LBOXES 13 S&C: Implant M1 1100341 Varian Semiconductor EquipmentE11030161GEN LBOXES 13 S&C: Implant M1 1100341 Varian Semiconductor EquipmentE11041923MNR LBOXES 13 S&C: Implant M1E11041913MNR L03-08 S&C: Implant M1E11043681GEN L07-01-01 S&C: Implant M1E11057373MNR LBOXES 13 S&C: Implant M1E11057371MNR LBOXES 13 S&C: Implant M1E11041924MJR LBOXES 13 S&C: Implant M1E11027980GEN L03-12 S&C: Implant M1E11043680GEN L07-01-01 S&C: Implant M1E11035080GEN LBOXES 12 S&C: Implant M1E11043780MJR LBOXES 13 S&C: Implant M1E11043780MNR L01-08 S&C: Implant M1E11029000GEN LBOXES 12 S&C: Implant M12542209 L04-03 S&C: Implant M1 1100341 Varian Semiconductor Equipment

Page 249: 300MM Spare Parts 5-3-122

E17093250 L04-16 S&C: Implant M1E17043340 L03-15 S&C: Implant M1E17043330 L03-16 S&C: Implant M1E17043290 L03-14 S&C: Implant M1E17043300 L03-21 S&C: Implant M1E17176140 LBOXES 13 S&C: Implant M1 1100341 Varian Semiconductor EquipmentE17185840 LBOXES 13 S&C: Implant M1 1100341 Varian Semiconductor EquipmentE11092110 L03-20 S&C: Implant M1 1100341 Varian Semiconductor EquipmentE17042140 LBOXES 12 S&C: Implant M1E17042160 LBOXES 12 S&C: Implant M1E34000543 L01-16 S&C: Implant M1 1100341 Varian Semiconductor EquipmentE17070270 L02-21 S&C: Implant M1E17077190 LBOXES 12 S&C: Implant M1E35000003 L02-05 S&C: Implant M1 1100341 Varian Semiconductor EquipmentE17134870 LBOXES 13 S&C: Implant M1E17127850 LBOXES 13 S&C: Implant M1E17135200 LBOXES 13 S&C: Implant M1 1100341 Varian Semiconductor EquipmentE17136730 LBOXES 13 S&C: Implant M1 1100341 Varian Semiconductor Equipment1214140 LBOXES 03 S&C: Implant M117033140 L06-18 S&C: Implant M14400007 L05-14 S&C: Implant M14400041 L05-22 S&C: Implant M14400061 L06-09 S&C: Implant M14400743 L06-14 S&C: Implant M117147310 L06-03 S&C: Implant M13/1/6970 L06-20 S&C: Implant M15053-0002-0082 L07-02 S&C: Implant M16692-0155-0001 LBOXES 04 S&C: Implant M14500249 L04-25 S&C: Implant M13500003 L04-21 S&C: Implant M11091380 LBOXES 12 S&C: Implant M14400034 L07-09 S&C: Implant M14400232 L06-24 S&C: Implant M14195600GEN L07-02-02 S&C: Implant M13500094 LBOXES 02 S&C: Implant M13500009 LBOXES 02 S&C: Implant M11153454520100 LEXTERNAL S&C: Implant M19004939 L06-08-01 S&C: Implant M111026870 L06-12-01 S&C: Implant M111/1/4291 L06-08-04 S&C: Implant M12100357 LBOXES 04 S&C: Implant M13120-0033-0001 L05-04 S&C: Implant M11/2/7631 LBOXES 01 S&C: Implant M1E11102990 LBOXES 13 S&C: Implant M1P1200513 L03-04 S&C: Implant M14046900 L02-22 S&C: Implant M1E17094410 LBOXES 13 S&C: Implant M14299400 L02-18 S&C: Implant M14299500 L02-11 S&C: Implant M1

Page 250: 300MM Spare Parts 5-3-122

Created on Total stock Qty BUn CC Area12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 2 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 4 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 2 PC Implant12/30/2005 2 PC Implant12/30/2005 2 PC Implant12/30/2005 3 PC Implant12/30/2005 20 PC Implant12/30/2005 20 PC Implant12/30/2005 10 PC Implant12/30/2005 5 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 10 PC Implant12/30/2005 2 PC Implant12/30/2005 1 PC Implant12/30/2005 2 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 2 PC Implant12/30/2005 2 PC Implant12/30/2005 2 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 4 PC Implant12/30/2005 2 PC Implant12/30/2005 4 PC Implant12/30/2005 4 PC Implant12/30/2005 4 PC Implant12/30/2005 2 PC Implant12/30/2005 1 PC Implant12/30/2005 2 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 2 PC Implant12/30/2005 1 PC Implant12/30/2005 9 PC Implant

Page 251: 300MM Spare Parts 5-3-122

12/30/2005 1 PC Implant12/30/2005 2 PC Implant12/30/2005 2 PC Implant12/30/2005 2 PC Implant12/30/2005 2 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 2 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 4 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 5 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 2 PC Implant12/30/2005 2 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 1 PC Implant12/30/2005 21 PC Implant12/30/2005 1 PC Implant12/30/2005 5 PC Implant12/30/2005 1 PC Implant12/31/2005 2 PC Implant1/9/2006 1 PC Implant1/9/2006 1 PC Implant1/15/2006 1 PC Implant1/26/2006 10 PC Implant1/26/2006 4 PC Implant1/26/2006 2 PC Implant2/15/2006 1 PC Implant2/15/2006 1 PC Implant2/16/2006 1 PC Implant3/31/2006 1 EA Implant4/14/2006 3 EA Implant4/14/2006 2 EA Implant5/3/2006 2 EA Implant7/25/2006 1 EA Implant7/25/2006 2 EA Implant7/25/2006 4 EA Implant8/30/2006 6 EA Implant8/30/2006 6 EA Implant