Post on 02-Jan-2016
Laser slotting of silicon for inkjet printer heads
Chin-Ting Lin
Institute of Mechanical EngineeringDate 2011/05/30﹕
Paper Survey
Tuan Anh Maia, Delphine Perrottet*a, Max Wikia and Bernold RicherzhagenaaSynova SA, Ch. de la Dent-d’Oche, CH-1024 Ecublens, Switzerland
2
Outline
Introduction
Conventional manufacturing procsses
Water-jet-guided laser
Damage-free laser slotting
Conclusion
Introduction
Figure 1: Basic principle of a inkjet-printer head.
Thermal Bubble Jet Technology
Conventional Manufacturing Procsses
Sandblasting Narrow slots below 150 microns.
Etching Slow and expensive Require masks.
Water-jet-guided Laser
Figure 2: Basic principle of the water-jet-guided laser technology
Damage-free Laser Slotting
Figure 3: Slot end (broken after cutting)
Nd:YAG laserWavelength 532 nmCutting speed: 1.2 mm/sNozzle:100um
675u
m
Figure 5: Chip backside, free of chipping
Damage-free Laser Slotting
Nd:YAG laserWavelength 532 nmCutting speed: 1.2 mm/sNozzle:30um
Damage-free Laser Slotting
Figure 4: Race track
Nd:YAG laserWavelength 532 nmCutting speed: 1.2 mm/sNozzle:30um
Figure 6: Slot exit side
Damage-free Laser Slotting
Nd:YAG laserWavelength 532 nmCutting speed: 5 mm/sNozzle:30um
Conclusion
The water-jet-guided laser technology has proved its capabilities of matching the requirements of silicon slotting for inkjet-printer heads. After a short phase of parameter optimization, the required quality and speed were not only reached but also surpassed. The produced slots are free of any length or depth limitations and the quality remains constant over time.
Thanks For Your Attention!!!