The Business of Science®
Page 1© Oxford Instruments 2014
Quantum Technology: Supplying the Picks and Shovels
Dr John Burgoyne
Quantum Control Engineering: Mathematical Solutions for Industry – Open for Business Event 7th August 2014, 12.30-17.00, Isaac Newton Institute, Cambridge
The Business of Science®
Page 2© Oxford Instruments 2014
Why “picks and shovels”?
20 February 2006
…Tools enable discovery
The Business of Science®
Page 3© Oxford Instruments 2014
Behind the metaphor
New ideas+
New tools
Newscience
=
The Business of Science®
Page 4© Oxford Instruments 2014
Why this dialogue is importantV
on H
ippe
l (19
78),
J. M
arke
ting,
Jan
197
8, 3
6
Von
Hip
pel (
1986
), M
gt S
cien
ce, 3
2 7,
791
The Business of Science®
Page 5© Oxford Instruments 2014
A suite of materials, metrology and measurement tools for QT
Plasma deposition and etch
Qbit measurement
Qbit manipulation
Surface analysis - chemical
SEM
MBE & UHV sputtering fabrication
Surface analysis - structural
The Business of Science®
Page 6© Oxford Instruments 2014
Device fabrication
The Business of Science®
Page 7© Oxford Instruments 2014
• Growth
• MBE
• Nanowires/nanotubes• High temperature plasma-
enhanced chemical vapour deposition (PECVD)
• Deposition
• PECVD
• Inductively coupled plasma (ICP) deposition
• Ion beam deposition
• Atomic layer deposition (ALD)
• Etch
• ICP etch
• Reactive ion etch (RIE)
• Ion beam etch
Enabling device fabrication via a suite of advanced techniques and processes
The Business of Science®
Page 8© Oxford Instruments 2014
Capabilities from research to pilot-scale and production – solutions that grow with the technology
Wafer handling
50 mm Wafer size 450 mm
Production – cassette to cassette
Open load
The Business of Science®
Page 9© Oxford Instruments 2014
Multi-tool clusters
Kelvin probe
ALD (thermal & plasma)
Hex handler with integrated Kelvin Probe
PECVDSputter
ICP-CVD #1
ICP-CVD #2
The Business of Science®
Page 10© Oxford Instruments 2014
• Process library of > 6,000 processes developed over 25 years• Accessible to all our customers
• Close collaboration with major Universities and R&D facilities• Caltech, Cornell, LBNL, TU
Eindhoven, IMEC, Southampton University, Cambridge University, …
• Process guarantees for key parameters • Including wafer-to-wafer repeatability
for rate and uniformity
Our process advantage
TEOS based SiO2 deposition Typical GaN etched feature (PR remains intact)
Waveguide etch HB LED substrate etch
SiC metal mask etch High rate SiNx at 8 0ºC
The Business of Science®
Page 11© Oxford Instruments 2014
• Unique capability of ALD for monatomic/ mono-molecular layer control over extremely high aspect ratio features
• Example (top): ALD of Al2O3 on carbon nanotubes (CNT)
• Using TMA and O2 plasma
• O2 plasma just enough to react with TMA but not etch CNT
• No additional functionalisation of CNT necessary
• Example (bottom): 20 nm HfO2 onto 25:1 AR Si trenches
• Conformality ~ 100%
Extreme aspect ratio conformal deposition via Atomic Layer Deposition
Trench corner
HfO2Si
Trench bottom
HfO2
Si
The Business of Science®
Page 12© Oxford Instruments 2014
Deposition UHV multi-chamber tool: Institute for Quantum Computing, University of Waterloo, Canada
The Business of Science®
Page 13© Oxford Instruments 2014
• MBE and UHV sputtering methods on multiple materials within the same device
• Metals, metal oxides, superconductors, topological insulators…
• XPS (X-ray photoelectron spectroscopy) analysis of samples
• Oxford Instruments Omicron ARGUS analyser
• In-process analysis• Enables layer-by-layer
quality control of the MBE and sputtering growth processes
Deposition UHV multi-chamber tool: Institute for Quantum Computing, University of Waterloo, Canada
The Business of Science®
Page 14© Oxford Instruments 2014
Device physics and characterisation
The Business of Science®
Page 15© Oxford Instruments 2014
• QT device physics needs low (ultra-low) temperatures
• The initial, “obvious” advantage: no liquid cryogens• No compromise on performance
• Base temperature <10 mK
• Cooling power up to 400 µW at 100 mK
• Attraction for QT science emerged: greatly enhanced sample space vs. ‘wet’• 240 mm diameter mixing chamber plate
• Open structure for easy experimental access
• Ease of use• Sample in vacuum with only a single room
temperature O-ring seal (no IVC)
• Fully automatic cool-down from room temperature to base
• Remote control through TCP/IP protocol
A key enabler for QT/QIP R&D: the TritonTM
Cryofree® dilution refrigerator platform
The Business of Science®
Page 16© Oxford Instruments 2014
• ULT plus…
• Electrical• Wide bandwidth electronics
• GHz pulse sequences
• Low noise amplification
• Low temperature filtering and amplification
• Low electron temperatures
• Magnetic• Homogeneous fields
• Gradient fields
• 3D Vector fields
• AC fields
• Optical• Low vibration
• HV/UHV
• fs pulse sequences
• Single photon emitters
• Optical windows
• Spectroscopic detectors
• Atomic• UHV
• Gas injection
• Ion/electron beam
• Rapid scan SPM
What else is needed for QIP ‘read/write’ control
The Business of Science®
Page 17© Oxford Instruments 2014
Triton DR: typical experimental services
96 off dc lines
Still plate
100 mK plate
4 K plate
2 off optical fibres10 off UT-85 rigid coaxial cables
10 off S1 flexible coaxial cables
Mixing chamber plate, <10 mK
The Business of Science®
Page 18© Oxford Instruments 2014
Experimental services, heat sinking andavailable cooling powers
“Fully loaded” Triton DR: base temperature < 15 mK
The Business of Science®
Page 19© Oxford Instruments 2014
Triton DR integrated 3-axis superconducting magnets
The Business of Science®
Page 20© Oxford Instruments 2014
Multiple Triton DR systems: Centre for Quantum Devices, Niels Bohr Institute, University of Copenhagen, Denmark
The Business of Science®
Page 21© Oxford Instruments 2014
Multiple Triton DR systems: TU Delft, Netherlands
The Business of Science®
Page 22© Oxford Instruments 2014
Fast throughput: top-loading sample exchange
The Business of Science®
Page 23© Oxford Instruments 2014
• 4 off 18 GHz
• 25 off dc lines
30 mm top-loading sample puck
The Business of Science®
Page 24© Oxford Instruments 2014
OVC break
Sample puck
Magnet
Vacuum lock and gate valve
Drive rods
Fast throughput with larger sample space: bottom-loading sample exchange
The Business of Science®
Page 25© Oxford Instruments 2014
• 14 off 40 GHz
• 50 off dc lines
• < 8 hours cool-down time
70 mm bottom-loading sample puck
The Business of Science®
Page 26© Oxford Instruments 2014
MC plate
Docking station
Sample holder
Coaxes routed from MC plate to docking station
Field centre
Fast throughput with larger sample space: bottom-loading sample exchange
Repeat connect/disconnect cycles
The Business of Science®
Page 27© Oxford Instruments 2014
Sample instrumentation
The Business of Science®
Page 28© Oxford Instruments 2014
New platform for yet greater capacity and capability: TritonXL
Ø 240 mm
706 mm
Ø 430 mm
1003 mm
The Business of Science®
Page 29© Oxford Instruments 2014
TritonXL: sample space and wiring access
Triton• Ø 240 mm• 1 x 50mm + 2 × 40 mm+ 1 x 65 mm LoS ports
TritonXL• Ø 430 mm• 6 x 50 mm + 1 x 100 mm
LoS ports
The Business of Science®
Page 30© Oxford Instruments 2014
• The future• On-board cold electronics
• Filtering, multiplexing, amplifiers, …
• Enhanced measurement• Electron temperature thermometry
• Standardised measurement pucks
• Anticipating close participation in a number of QT Hubs
• For discussion!• What are we not seeing yet in QC/QIP?
• What are we not seeing yet in QT beyond QC/QIP?
And finally…
The Business of Science®
Page 31© Oxford Instruments 2014
Thank you
Top Related