http://www.mathesontrigas.com/edge/ Semiconductor Products Catalog V 4.0/SpecRev4.2.1
Table of Contents
High Pressure Gases:Chemical Name –
Page Halocarbon Denomination Formula17 Ammonia NH3
18 Argon Ar19 Arsine AsH3
20 Boron Trichloride BCl321 Boron Trifluoride BF3
22 Carbon Dioxide CO2
23 Carbon Monoxide CO24 Chlorine Cl225 Deuterium D2
26 Dichlorosilane SiH2Cl227 Disilane Si2H6
28 Germane GeH4
29 Halocarbon 14 CF4
30 Halocarbon 23 CHF3
31 Halocarbon 32 CH2F2
32 Halocarbon 41 CH3F33 Halocarbon 116 C2F6
34 Halocarbon 218 C3F8
35 Halocarbon c318 C4F8
36 Halocarbon 1216 C3F6
37 Halocarbon 4110 C5F8
38 Helium He39 Hydrogen H2
40 Hydrogen Bromide HBr41 Hydrogen Chloride HCl42 Hydrogen Fluoride HF43 Krypton Kr44 Methane CH4
45 Methyl Silane SiH3CH3
46 Neon Ne47 Nitric Oxide NO48 Nitrogen N2
49 Nitrogen Trifluoride NF3
50 Nitrous Oxide N2O51 Oxygen O2
52 Phosphine PH3
53 Propylene C3H6
54 Silane SiH4
55 Silcore Si3H8
56 Silicon Tetrachloride SiCl457 Silicon Tetrafluoride SiF4
58 Sulfur Hexafluoride SF6
59 Trichlorosilane SiHCl360 Tungsten Hexafluoride WF6
61 Xenon Xe
Page SDS62 Arsine63 11Boron Trifluoride64 Germanium Tetrafluoride65 Phosphine66 Silicon Tetrafluoride
Page Gas Mixtures67 General Information68 Arsine in N2, H2, He69 Diborane in N2, H2, He70 Phosphine in N2, H2, He71 Silane in N2, H2, He
Page Purification Equipment72-76 Nanochem Purifiers
All information reported in this catalog is intended forreference use only. This publication is intended to provideaccurate information in regard to the subject matter coveredand has been obtained or developed from sources believed tobe reliable such as the coefficients and equations reported byC.L. Yaws and S.N. Naphad in Appendix 5 of Matheson GasData Book, 7th Edition, 2001. Of necessity the information isabbreviated and other information, training and/or education isrequired of the user of this information. Accordingly,Matheson Tri-Gas, Inc. makes no warrantees, guarantees orrepresentations of any kind or nature with respect to theinformation published herein, either express or implied, andwhether arising by law or otherwise, including but not limitedto any implied warranty of merchantability or fitness for anyparticular purpose, and shall not be responsible for any errors,omissions, or damages arising out of use of this information.Matheson shall in no event be liable for any personal injuries,property or other damages of any nature whatsoever, whetherspecial, indirect, consequential or compensatory, directly orindirectly resulting from the publication, use of, or relianceupon the information.
Cylinder dimensions, contents and related data are reported asnominal.
Units: Reported as follows:ppm(*): parts per millionppb(*): parts per billionppt(*): parts per trillion(*)=w: by weight(*)=v: by volume(*)=a: atomic
Purity for all Semiconductor gases is reported as % by Volume, unless otherwise specified.
Please inquire about Pure Gases not reported in the following listings.
Page2-16 Introduction
IntroductionCorporate Overview
2
An Industry Pioneer
Over 80 Years of Experience
In 1927 Matheson Gas Products becamethe first company to offer a reliablesource of high quality scientific gasesand equipment. From the start,Mathesonasserted itsleadership byunderstandingspecialty gasapplicationsand providingproductsspeciallydesigned for these applications. Someof Matheson's more notableaccomplishments include the
Matheson Tri-Gas' Semi-Gas® brand of products has the largestinstalled base of gas handling equipment worldwide. Combinedwith its NANOCHEM® specialty gas purification technology, systemsengineering and comprehensive site management services,Matheson Tri-Gas offers a total integrated solution to itssemiconductor customers.
Matheson Tri-Gas' LabGas Systems® brand of products offers theanalytical laboratory environment a completely integrated solutionfor the proper control and distribution of gas from the "source" tothe "point-of-use."
Tri-CareTM, comprehensive medical gas management programoffered by Matheson Tri-Gas, encompasses all facets of bulk andcylinder gases, cylinder asset management, total quality assuranceand cylinder distribution and safety for the health care industry.
the world’s first commercially produced silane,an accomplishment that earned the industry’sprestigious "SEMMY" Award.
In 1999 Matheson Gas Products merged withTri-Gas, Inc., to form Matheson Tri-Gas. Thismerger combined the analytical andsemiconductor strengths of Matheson GasProducts with the liquid/bulk and industrialcylinder and equipment capabilities of Tri-Gas.As a member of the Tokyo based TaiyoNippon Sanso Corporation (TNSC), MathesonTri-Gas is part of the world’s largest supplierof gases and gas handling equipment.
development of the lecture bottle, nowused by virtually every major college anduniversity in the world, and the supply ofultra pure gases that served as standardsfor the first gas chromatographs.
Matheson's gases also helped forge themost important tool of our era, theintegrated circuit. From the early days ofthe transistor, Matheson was thereproviding the arsine and phosphinewhich made production possible. Astransistors gave way to complexsemiconductor chips, Matheson provided
Total Integrated Solutions
Today, Matheson Tri-Gas remainsan industry leader by deliveringtotal integrated gas solutions.Beyond specialty gases, MathesonTri-Gas offers a broad line ofindustry-proven technologies forthe delivery and purification ofprocess and specialty gases. Weprovide everything from on site airseparation plants to portablecylinders and all the servicesrequired to support these productsand customer applications.Matheson Tri-Gas is positioned toprovide technically superior and innovative products and servicestailored specifically to meet the needs of the semiconductor, analyticaland industrial markets.
Matheson Tri-Gas has continued to developunique products designed to meet themarket needs of our semiconductor,analytical and industrial customers:
IntroductionCorporate Overview
3
Worldwide Capabilities
Matheson Tri-Gas and TNSCprovide a network ofmanufacturing, customer serviceand distribution facilities thatstand ready to ensure a reliablesupply of specialty gases and gashandling equipment. With sitesworldwide, Matheson Tri-Gasproducts can be found in everymajor integrated circuit plant andR&D facilities in North America,Europe and Asia.
The Science of Specialty Gases
Specialty gases play a critical role in analytical and processapplications. With so much at stake, Matheson Tri-Gas offersexcellence in five distinct areas to deliver the highest qualityproduct.
• Raw Materials Selection
As the world’s first specialty gas company, Matheson Tri-Gas hasthe expertise required to select the appropriate raw materials forthe intended product. Acceptance criteria are based on theimpact to the process and product. Non-compliant rawmaterials are rejected. In addition, Matheson Tri-Gas' suppliersare audited on a regular basis and required to meet certificationrequirements.
• Manufacturing
Once the quality requirements of the raw materials are satisfied,Matheson Tri-Gas uses the latest manufacturing, purification andfiltration techniques to produce gases that meet the needs ofthe semiconductor and analytical industries. Matheson Tri-Gashas developed dedicated purification procedures forsemiconductor grade gases that are designed to producerequired purity levels.
Each process is optimized for the specific gas to be purified andcombines high quality filtration with low temperature distillationand gas phase partitioning.
• Mixtures
Volumetric, gravimetric and partial pressure methods are usedfor precise mixing of component gases. In addition, highlyaccurate pressure gauges and specially designed and preciselycalibrated scales are used to ensure proper composition. Finally,mixtures are made homogenous by specialized rolling sequencesdesigned by Matheson Tri-Gas engineers to ensure completeblending.
• Packaging
The handling and treatment of cylinders is key to MathesonTri-Gas' success in specialty gas. Cylinders are prepared using aproprietary treatment designed to remove any moisture,atmospheric and particle contamination. Valves are chosenbased on the specific application. Compatibility of materials,level of purity required and cost impact are included in thedecision making process.
• Analysis
Prior to shipping, Matheson Tri-Gas certifies the quality of all ofits specialty gases to ensure that all of the products meet thecustomer’s specifications. Each sampling program has beendesigned to provide sound statistical evidence of product purity.The analytical methods employed are consistent with the bestavailable techniques as defined by Semi Standards and currentindustry practices.
Matheson Tri-Gas has specialty gas production facilities locatedthroughout the US:
IntroductionCorporate Overview
4
QualityWith the increased cost of "poor quality" in industry today, qualityand consistency become paramount. Matheson Tri-Gas provides afull line of specialty gases and equipment to meet the specificationfor each impurity analyzed. To ensure product consistency andintegrity, all of Matheson Tri-Gas production processes, materialsand analytical tools are managed using statistical control methods.In addition, Matheson Tri-Gas measures its quality system againstISO 9000 series standards.
Research & DevelopmentAt Matheson Tri-Gas, service does not end at the customer’sreceiving dock. Assisting in process and product development isan essential part of the Matheson Tri-Gas offering. By beta-sitetesting new products prior to introduction, Matheson Tri-Gasmaintains a leadership position in providing a global offering offield proven specialty gas and equipment solutions. In addition, astaff of scientists and engineers continually interacts withcustomers to improve material specifications and suggest processimprovements. This results in Matheson Tri-Gas customersachieving the greatest benefit from Matheson Tri-Gas capabilities.
The Matheson Tri-Gas charter is to develop the highest puritymaterials with accurate specifications for metallic and particulateimpurities and the specialized gas handling equipment to ensurepurity. Focusing on developing advancements in new materialsand analytical and production techniques, Matheson Tri-Gasdelivers statically proven process control, state-of-the-art packagingand the ultimate in analytical procedures and equipment.
Matheson Tri-Gas research has led to the continual introduction ofnew products such as:
• ULTIMATM Gases: 99.9999+% purity and guaranteedlow metals content.
• SDS® Safe Delivery Source, a unique approach to thedelivery of arsine, phosphine and enriched borontrifluoride for ion implantation.
• Novel purification media for 33 new gases.
Committed to quality manufacturing and purification processes,Matheson Tri-Gas is dedicated to delivering customer satisfactionby offering total innovative solutions for high purity gases and gashandling requirements.
Advanced Technology Center, Longmont, CO. Matheson Tri-Gas’state-of-the-art primary research and development facility.
Matheson Tri-Gas' Quality Policy
• Quality is meeting the customer’s requirements andexpectations.
• Build quality into every product and service, rather thaninspect it in.
• Continuous improvement requires the participation of allemployees.
• Quality and fitness for purpose are the true measures ofvalue.
The Matheson Tri-Gas family of SDS® Cylinders.
IntroductionCorporate Overview
5
Furthermore, Matheson Tri-Gas isdedicated to enhancing its customers’success by understanding processrequirements and providing value addedsolutions. In addition to the supply ofprocess gases, Matheson Tri-Gas standsready to assist in every phase of specialtygas selection and delivery including:
• Process Piping and DistributionDesign
• Applications Engineering
• Turn-Key Installations
• On-Site Services
• Global Distribution and Sales
These capabilities enable Matheson Tri-Gasto deliver truly comprehensive solutions toimprove overall equipment efficiency andprocess yields.
From the beginning, Matheson Tri-Gas’objective has been to help customers stayabreast of rapid advances in technology bydeveloping custom-tailored products thatmeet the dynamic needs of the industrial,analytical and semiconductor industries.Dedicating resources in new productdevelopment, production, delivery,technical support, and customer service,Matheson Tri-Gas stands ready to deliverthe highest value in the supply of specialtygas solutions worldwide.
Product LineThe semiconductor and analyticalindustries depend on the reliable supply ofhigh-purity process gases and gas handlingequipment to maintain efficientproduction and high yields. In response tothis need, Matheson Tri-Gas offersinnovative application-specific solutions.
Utilizing extensive experience in thespecialty gas business, Matheson Tri-Gashas the processes employed in themanufacturing and the purification ofspecialty gases to produce products whichprovide the most value to its customers.The state-of-the art facility in Gloucester,Massachusetts in just one example. Thisautomated filling operation produces highpurity process gases in a carefullycontrolled environment designed tominimize impurities.
To further ensure purity, Matheson Tri-Gasspecifically designed the ULTRA-LINE®
family of cylinders to maintain theintegrity of the gas. A specific treatmentis applied to the cylinder’s interior wallsthat reduces particulates and othercontaminants. ULTRA-LINE®‚ cylindershave been proven to enhance productstability and extended shelf life.
With the ability to provide customizedmixes and container configurationstailored to meet specific productapplications, Matheson Tri-Gas offers acomprehensive line of specialty gases tothe semiconductor and analyticalindustries.
Matheson Tri-Gas also offers the mostextensive line of gas handling equipmentin the specialty gas industry. Products aredesigned and manufactured at theEquipment Technology Center inMontgomeryville, PA. This 85,000 sq. ft.facility features 4000 sq.ft. of Class 10Protocol clean room space and 30,000sq.ft. of manufacturing space.
Automated Filling Operation,Gloucester, MA. A computer integrated
manufacturing (CIM) environmentdesigned to reduce metal contaminants
and particulates to an absoluteminimum.
Clean room product assembly atEquipment Technology Center,
Montgomeryville, PA.
IntroductionSafety Information
6
Prior to Purchasing Any Compressed Gas:Familiarize all personnel handling any compressed gases with theprocedures recommended in the Material Safety Data Sheet(MSDS), as well as the latest edition of Matheson publicationsGuide to Safe Handling of Compressed Gases, Effects of Exposure toToxic Gases, and Compressed Gas Association's CGA P-1-1991titled "Safe Handling of Compressed Gases in Containers.”
Provide proper instruction and training for all personnel handlingcompressed gases.
Identify and set up a safe and secure area for cylinder inventory.It should be well isolated from working areas and well ventilated.
Isolate a separate area for storing cylinders to be returned toMatheson. Inspect this area routinely to confirm that there are noproblem cylinders that must be attended to between routine pickup periods.
Minimize potential problems associated with hazardous gases byordering the smallest quantity required.
When the Gas Cylinders Arrive at Your Company:Inspect each incoming cylinder to ensure that it is free of leaksand contains the correct product.
Review the current Material Safety Data Sheet (MSDS) providedwith the product.
Store cylinders in an upright position.
Move cylinders in a safe manner using an approved cylinderhand truck with straps and chains.
Secure all cylinders properly while in use and during storage.
Valve plugs and caps are safety devices which need to be safelystored after removing so they can be replaced when the cylinderis ready to be returned to Matheson.
Monitor all cylinder storage areas and locations where cylindersare in use for leaking gases. Use gas detection apparatus designedfor the particular requirement.
Be thoroughly familiar with all emergency procedures andequipment necessary to deal with leaking cylinders and controlequipment. (Fire extinguishers, breathing apparatus, etc.)
Use control equipment recommended for the gas product. (Seethe equipment recommendation listing after each gas and mixtureproduct in the catalog)
• Cylinders containing flammable gases and mixturesshould be properly grounded.
• Control equipment for oxidizing gases and mixturesmust be free of any non-oxidant compatible lubricant,i.e., petroleum-based oils and greases.
• Use proper check valves and purge venting with allhydroscopic corrosive gases.
When Cylinders Are Empty, or Partially Full and No LongerNeeded:Whenever the pressure of the compressed gas in a cylinder isreduced to the minimum required working pressure, close thecylinder valve before detaching from the apparatus and relievepressure in all connecting lines and control equipment in a safemanner.
Replace valve outlet plugs or caps and cylinder valve protectioncaps.
Disconnect cylinders from securing clamps.
Move cylinders to the proper storage location using an approvedcylinder hand truck with straps and chains.
When cylinders are no longer needed they should be returned toMatheson as soon as possible, classified, marked, and labeled asoriginally shipped.
If a Problem Should Occur:Unfortunately, accidents do sometimes occur. When an accidenthappens, will you be prepared? By following a few simpleguidelines it is our sincere hope that you will be better prepared todeal with any emergency situations involving compressed gases.
Pre-Emergency PlanningBe prepared. Dealing with compressed gas emergencies beginswith planning. An emergency response plan should be developedfor the facility. As a minimum, the plan should include:
• Emergency telephone numbers• Emergency response organizational charts• Emergency procedures• Listing of key personnel• Training schedules and documentation• Hazardous materials lists (including storage locations,
quantities, etc.)• Emergency response equipment lists• Facility maps• Evacuation routes
In addition to the above, be sure that local emergency services (firedepartment, emergency medical services, police and hazardousmaterials response teams) are aware of the hazardous materials atyour facility, their location and their hazards.
Response GuidelinesThe following guidelines are based on the four general compressedgas hazard categories: inert, flammable, corrosive and toxic, andshould be used in preparing your specific emergency responseprocedures.
These guidelines should be used to assist you in making decisionsand they are not intended to serve as a substitute for your ownknowledge or judgment. They provide only the most basicinformation and may not be adequate or applicable in allsituations.
You are advised to consult local fire codes and federal and stateenvironmental regulations OSHA, SARA, RCRA . . . etc.
FireConsult the most current version of the MSDS for the product.The MSDS contains information and procedures to follow if a fireshould occur. Some of these procedures can include the following:
• Let burn unless leak can be stopped immediately• Small Fires: Dry chemical or CO2 extinguishers• Large Fires: Water spray, fog or foam extinguishers• Move container from fire area if you can do it without risk• Stay away from ends of tanks
IntroductionSafety Information
7
In the Event of an Incident• Sound an alarm• Evacuate personnel• Shut down equipment• Determine nature of incident---leak, fire, spill, etc.• Determine what gases are involved and type of
containers• Activate your emergency response plan
Emergency Action• Will vary depending on nature of incident and types of
materials involved• If types of materials involved are known---MSDS's
should be consulted to determine the potential hazards.Example: flammable, poison, oxidizer . . . etc.
• Keep unnecessary people away; isolate hazard area anddeny entry
• Stay upwind; keep out of low areas• Wear positive pressure breathing apparatus and full
protective clothing• Evacuate area endangered by gas• Also, in case of water pollution, call local authorities
24-Hour Emergency AssistanceIf you should have an emergency involving any Mathesonproduct, we can be reached through CHEMTREC, the ChemicalTransportation Emergency Center in Washington, DC, at1-800-424-9300.If you are located in Canada, call (613) 996-6666. CANUTECoperates 24 hours per day, seven days per week to provideemergency response information and get expert help on theway.When you call CHEMTREC, be sure to have the followinginformation ready:
• Name of caller and call-back number• Nature and location of the problem• Shipper or manufacturer• Container type• Placard/Label applied• Accessibility• Weather conditions• Local population information• Topographic features• Availability of water
• Cool containers that are exposed to flames with water from theside until well after fire is out
• For massive fire in cargo area, use unmanned hose holder ormonitor nozzles
• If this is impossible, withdraw from area and let fire burn• Withdraw immediately in case of rising sound from venting safety
device or discoloration of tank may be ignited by heat, sparks andflames
• Flammable vapor may spread away from spill• Container may explode in heat of fire• There may exist a risk of vapor explosion and poison hazard
indoors, outdoors, or in sewers• Some of these materials may burn but do not ignite readily• May ignite combustibles (wood, paper, oil, etc.)• Mixture with fuels may explode
Health HazardsConsult the most current version of the MSDS for Hazard identificationand Toxicity information. Some of the Hazard identifications can includethe following:
• May be fatal if inhaled, swallowed or absorbed through skin• Contact may cause burns to skin and eyes• Contact with liquid may cause frostbite• Runoff from fire control or dilution water may cause pollution• Vapors may cause dizziness or suffocation• Fire may produce irritating or poisonous gases
Spill or LeakConsult the most current version of the MSDS for accidental releasemeasures, disposal considerations and ecological information.Accidental release measures can include the following:
• Stop leak if you can do it without risk• No flares, smoking or flames in hazard area• Do not touch spilled materials• Use water spray to reduce vapors• Isolate area until gas has dispersed• Keep combustibles (wood, paper, oil, etc.) away from spilled
material
First AidConsult the most current version of the MSDS sheet for First Aidmeasures, which can include the following:
• Move victim to fresh air, call emergency medical care• If not breathing, give artificial respiration• If breathing is difficult, give oxygen• Remove and isolate contaminated clothing and shoes• In case of contact with material, immediately flush skin or eyes
with running water for at least 15 minutes• Keep victim quiet and maintain normal body temperature• Effects may be delayed, keep victim under observation
IntroductionCylinder Information
8
The gases and mixtures described in this catalog are shipped incarefully constructed cylinders that meet or exceed U.S.Department of Transportation or Transport Canada specifications.
Many small laboratory size cylinders of hazardous liquefied gasesare filled below the U.S. D.O.T. approved capacity to provide anextra margin of safety if the cylinders are exposed to hightemperatures. (Nevertheless, cylinders should never be exposedto temperatures higher than 125 degrees F. / 51.7 degrees C.)
All cylinders are identified by gas name (by stencil or label) andtagged for ready identification and basic hazardous warninginformation. All gases are supplied with valves havingCompressed Gas Association (CGA) approved outlet connections.
The Matheson Cylinder Specification Selection Guide on the nextpage lists the nominal dimensions and tare weights of allcylinders presently in use. The cylinder drawings reported laterindicate the relative size of the cylinders to each other.
Product(s) must not be used without first consulting the MaterialSafety Data Sheet(s). The purchaser and/or user is responsible toinstruct its employees, agents and representatives to strictlycomply with all applicable federal, state and local statutes,regulations and orders regarding the safe handling, transportationand use of the products. In consideration of the hazardous natureof a product(s) the purchaser and/or user are responsible towarn, protect, and train, as appropriate, all employees, customers,and other persons who may be exposed to those hazards.Matheson provides all relevant Material Safety Data Sheet(s) andadditional Material Safety Data Sheets are available upon request.The purchaser and/or user is aware that OSHA regulations mayrequire the purchaser and/or user to develop and implement awritten chemical hazard communications program for employees,customers and/or others with respect to the product(s). It is thepurchaser and/or user responsibility to ensure that all employees,customers, and other persons who might become exposed to theproduct(s) receive and refer to copies of the Material Safety DataSheet(s).
Return of CylindersBefore being offered for transportation, cylinders must have allvalve openings tightly closed. If outlet caps or plugs have beenprovided, these must be securely tightened to the cylinder valveoutlet. All transport caps must be in place and securely tightened.
All cylinders must be marked, labeled and shipped to conformwith all applicable parts of the 49th Chapter of the Code ofFederal Regulations (49CFR) which are the rules and regulationsof the United States Department of Transportation.
WarningOnly cylinders belonging to or having been filled by Mathesonwill be accepted at Matheson Plants. Matheson reserves theright to refuse complete shipments containing cylinders ownedby others. If there are any questions on Matheson cylinderidentification, please contact Matheson for assistance.
Federal law prohibits the improper discarding of a cylinder or thecylinder contents. All returnable cylinders should be returnedprepaid to your nearest Matheson facility. If returned collect,freight charges will be deducted from any credit due.
D.O.T. regulations do not permit our or any vendor ownedcylinders to be refilled without the owner's permission.
Do not allow foreign substances to enter the cylinder or cylindervalve. Specific protection devices are included in this catalog. Iffurther information is needed, contact Matheson.
If contamination takes place, please call Matheson for instructionson how to label and return the cylinder. Cylinders should bereturned with some positive pressure, with the valves tightlyclosed and the transport caps and outlet caps or plugs in place, toprevent contamination and damage to the valve.
Refilling Customer Owned CylindersMatheson will refill customer owned cylinders subject toD.O.T./T.C. regulations and our own safety requirements.Matheson will not be responsible for lost cylinders if properarrangements have not been made before shipping your cylindersto us.
Cylinder Comparison Chart
Nominal InternalMatheson Dimensions Volume Material of Air AirTri-Gas (inches) (liters) Construction Products Liquide BOC Praxair Scott Solkatronic
QK 10x55 49 C A 49 300 UCT K 49
QA 9x51 43.8 C B 44 200 K A 44
QX 8x48 29.5 A B(AL) 30AL 150A AS AL 29
GA 9x26 17.1 C C 16 80 Q B 16
GX 7x33 15.7 A C(AL) 22AL 16A AQ BL --
UA 6x19 7.3 C D-1 7 30 G C 7
UX 7x16 5.9 A D-1(AL) 7AL 30A AG CL --
JA 4x13 2.3 C D 3 12 F D 3
IntroductionCylinder Information
9
Semiconductor Gases Cylinder Chart
***Material of ConstructionC = Carbon Steel S = Stainless Steel B = Brass H = HastelloyA = Aluminum ASB = Aluminum Silicon Bronze N= Nickel NLC = Nickel-Lined Carbon Steel
Nominal Dimensions* Material ofInternal Volume Diameter x Height Construction*** Tare Weight** Water Capacity
Cylinder cubic ft. liters in cm Cylinder Valve lbs kg lbs kg
QI ULTRA-LINE® II 15.5 439 24 x 83 61 x 211 C ASB/S 1217 552 968 439
XE ULTRA-LINE® 7.47 211.7 24 x 45 61 x 114 S S 243 110 465.6 211.7
QK ULTRA-LINE® 1.73 49 10 x 55/56.5/60 25 x 140/144/153 C S 138 63 108 49
QZ ULTRA-LINE® 1.7 47.5 10 x 54/55.5/59 25 x 137/141/150 A S 92.1 41.8 104 47.5
QY ULTRA-LINE® 1.6 46.4 10 x 52/53.5/57 25 x 132/136/145 A S/B 89.6 40.7 102 46.4
QA ULTRA-LINE® 1.55 43.8 9 x 51/52.5/56 23 x 130/134/143 C B 115 52 96.4 43.8
QB ULTRA-LINE® II 1.55 43.8 9 x 51/52.5/56 23 x 130/134/143 C S/H 115 52 96.4 43.8
QF ULTRA-LINE® 1.55 43.8 9 x 51/52.5/56 23 x 130/134/143 C S/H 115 52 96.4 43.8
QN ULTRA-LINE® 1.55 43.8 9 x 51/52.5/56 23 x 130/134/143 NLC S/H 115 52 96.4 43.8
QL ULTRA-LINE® 1.45 41 9 x 45/46.5/50 23 x 114/118/127 S S 42 19 90 41
QE ULTRA-LINE® 1.35 38.4 12 x 30/31.5/35 30 x 76/80/89 S S 75 34 84.5 38.4
QH ULTRA-LINE® 1.04 29.5 8 x 48/49.5/53 20 x 122/126/135 A S 48 22 65 29.5
QX ULTRA-LINE® 1.04 29.5 8 x 48/49.5/53 20 x 122/126/135 A B 48 22 65 29.5
GC ULTRA-LINE® 0.85 24 9 x 30/31.5 23 x 76/80 NLC N 82 37.3 53 24
QM ULTRA-LINE® 0.665 18.8 7 x 45/50.5 18 x 114/128 N N 88 39 41.5 18.8
GA ULTRA-LINE® 0.6 17.1 9 x 26/27.5/31 23 x 66/70/79 C B 44 20 37.7 17.1
GB ULTRA-LINE® II 0.6 17.1 9 x 26/27.5/31 23 x 66/70/79 C S/H 44 20 37.7 17.1
GF ULTRA-LINE® 0.6 17.1 9 x 26/27.5/31 23 x 66/70/79 C S/H 44 20 37.7 17.1
GH ULTRA-LINE® 0.28 8 7 x 27/28.5 18 x 69/73 N N 48 21 17.6 8
UA ULTRA-LINE® 0.26 7.3 6 x 19/20.5/24 15 x 51/55/64 C B 20 9 16.1 7.3
UD ULTRA-LINE® II 0.26 7.3 6 x 19/20.5/24 15 x 51/55/64 C S/H 20 9 16.1 7.3
UF ULTRA-LINE® 0.26 7.3 6 x 19/20.5/24 15 x 51/55/64 C S/H 20 9 16.1 7.3
UH ULTRA-LINE® 0.21 5.9 7 x 16/17.5/21 18 x 41/45/54 A S 15.1 7 13 5.9
JD ULTRA-LINE® 0.15 4.2 4 x 27/28.5 10 x 29/33 N N 14 6 9.3 4.2
JA ULTRA-LINE® 0.08 2.3 4 x 13/14.5/18 10 x 33/37/46 C B 6.6 3 5 2.3
JB ULTRA-LINE® II 0.08 2.3 4 x 13/14.5/18 10 x 33/37/46 C S 6.6 3 5 2.3
JF ULTRA-LINE® 0.08 2.3 4 x 13/14.5/18 10 x 33/37/46 C S 6.6 3 5 2.3
JY ULTRA-LINE® 0.08 2.2 4 x 13/14.5/18 10 x 33/37/46 C S 6.6 3 4.9 2.2
WA ULTRA-LINE® II 0.04 1.1 3.5 x 12/13.5 9 x 30/34 N N 8 3.7 2.7 1.2
WB ULTRA-LINE® II 0.02 0.55 2 x 14/15.5 5 x 36/40 N N 5 2.1 0.9 0.4
SA ULTRA-LINE® 0.016 0.44 2 x 12/13.5/17 5 x 30/34/43 C B 2.2 1 1 0.4
SF ULTRA-LINE® 0.016 0.44 2 x 12/13.5/17 5 x 30/34/43 C S 2.2 1 1 0.4
WY ULTRA-LINE® 0.1 0.4 2 x 12/13.5/17 5 x 30/34/43 C S 2.2 1 1 0.4
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheel**Excluding cap and cylinder valve
IntroductionCylinder Information
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Cylinder Diagrams
IntroductionCylinder Information
11
Cylinder Diagrams (continued)
IntroductionCylinder Information
12
The drawings of valve outlets and connections shown on theseintroductory pages are those now in use by Matheson Tri-Gas and incommon use by the compressed gas industry. Whenever possible,valve outlets standardized by the Compressed Gas Association andaccepted by the American National Standards Institute are used.
CGAValve Outlet& Conn. No.
Gas CGA/DISS
Ammonia 660/720
Argon 580/718
Arsine 350/632
Boron Trichloride 660/634
Boron Trifluoride 330/642
Carbon Dioxide 320/716
Carbon Monoxide 350/724
Chlorine 660/728
Deuterium 350/724
Dichlorosilane 678/636
Disilane 350/632
Germane 350/632
Halocarbon 14 (Tetrafluoromethane) 320/716
Halocarbon 23 (Fluoroform) 660/716
Halocarbon 32 (Difluoromethane) 350/724
Halocarbon 41 (Methyl Fluoride) 350/724
Halocarbon 4110 (Octafluorocyclopentene) 660/716
Halocarbon 116 (Hexafluoroethane) 660/716
Halocarbon 218 (Perfluoropropane) 660/716
Halocarbon c-318 (Octafluorocyclobutane) 660/716
Halocarbon 1216 (Hexafluoropropylene) 660/716
Helium 580/718
Hydrogen 350/724
Hydrogen Bromide 330/634
Hydrogen Chloride 330/634
Hydrogen Fluoride 660/638
Krypton 580/718
Methane 350/724
Methylsilane 350/632
Neon 580/718
Nitric Oxide 660/728
Nitrogen 580/718
Nitrogen Trifluoride 670/640
Nitrous Oxide 326/712
Oxygen 540/714
Phosphine 350/632
Silane 350/632
Silcore (Trisilane) 350/632
Silicon Tetrafluoride 330/642
Sulfur Hexafluoride 590/716
Tungsten Hexafluoride 670/638
Xenon 580/718
CGAValve Outlet& Conn. No.
Gas CGA/DISS
IntroductionCylinder Information
13
All drawings are arranged in numerical order according to the valveconnection number. The accurate diameter of the valve outlet isgiven below each drawing along with the thread designation. Forease of measurement and identification, approximate fractionaldimensions may be found on each drawing.The left handed portion of each drawing marked "OUTLET"represents the cylinder valve, while the right hand portion marked"CONNECTION" represents the mating connection normally foundin regulators, control valves, and manifolds.
Cylinder Connections Drawings
IntroductionCylinder Information
14
Gas and Gas Mixture Shipping ClassificationsIn December 1990 the Department of Transportation issued newregulations governing the transportation of hazardous materials.The DOT definitions of the three divisions for gases are as follows:
Division 2.1 (Flammable gas).For the purpose of this subchapter, a "flammable gas" (Division 2.1)means any material which is a gas at 20°C (68°F) or less at 101.3kPa (14.7 psi) which:
(1) Is ignitable at 101.3 kPa (14.7 psi) when in a mixture of13 percent or less by volume with air; or
(2) Has a flammable range at 101.3 kPa (14.7 psi) with air of atleast 12 percent regardless of the lower limit.
Division 2.2 (Non-flammable, non-poisonous compressed gas—including compressed gas, liquefied gas, pressurized cryogenicgas and compressed gas in solution).For the purpose of this subchapter, a non-flammable, non-poisonous compressed gas" (Division 2.2) means any material (ormixture) which:
(1) Exerts in the packaging an absolute pressure of 280 kPa(41 psia) at 20°C (68°F) and
(2) Does not meet the definition of Division 2.1 or 2.3.
Division 2.3 (Gas poisonous by inhalation).For the purpose of this subchapter, ‘a gas poisonous by inhalation"(Division 2.3) means a material which is a gas at 20°C (68°F) or lessand a pressure of 101.3 kPa (14.7 psi) (a material which has aboiling point of 20°C (68°F) or less at 101.3 kPa (14.7 psi) andwhich:
(1) Is known to be so toxic to humans as to pose a hazard tohealth during transportation, or
(2) In the absence of adequate data on human toxicity, ispresumed to be toxic to humans because when tested onlaboratory animals it has an LC5O value not more than 5000ml/m3. Division 2.3 is divided into four groups known ashazard zones, which are:
• Hazard Zone A: gases and mixtures with anLC50 ≤ 200 ppmExamples: Arsine, Phosgene
• Hazard Zone B: gases and mixtures with anLC50 ≤ 1000 ppm > 200 ppmExamples: Methyl Bromide, Dichlorosilane
• Hazard Zone C: gases and mixtures with anLC50 ≤ 3000 ppm >1000 ppmExamples: Methyl Mercaptan, Carbonyl Sulfide
• Hazard Zone D: gases and mixtures with anLC50 ≤ 5000 ppm >3000 ppmExamples: Carbon Monoxide, Hydrogen Chloride
The LC50 of a gas mixture can be calculated from the followingformula providing the LC50(s) of the toxic component(s) are known:
LC50 ofGas Mixturein ppm
Further information regarding Division 2.3 classification is shownin 49 CFR 173.116 and 173.133 and the Compressed GasAssociation Pamphlet "Tentative Standard for the Classification ofToxic Gas Mixtures", P-20T-1991.
Also in December 1990, the International Organization forStandardization (ISO) published Standard 10156, "Gases and GasMixtures - Determination of Fire Potential and Oxidizing Abilityfor the Selection of Cylinder Valve Outlets." The methodsdescribed differentiate the diluent effects of different backgroundgases. For example:
The maximum concentration of hydrogen in nitrogenwhich produces a nonflammable mixture is 5.7%, if heliumwere the background gas the value would be 4.45%.
The application of these methods to gas mixtures which containminor components which are both toxic and flammable mixedwith a nonflammable background or diluent gas may yield asmany as 6 different shipping descriptions. For this reason itbecomes unwieldy to show the classifications in association withthe product descriptions.
1 x 106
ppm of Toxic #1 + ppm of Toxic #2 + . . .ppm LC50 of Toxic #1 ppm LC50 of Toxic 2
=
IntroductionCylinder Information
15
Standard 630 & 710 SeriesDiameter-Index Dimensions for Electronic Gases
DIAMETERS IN mmGAS NAME CONN.# *A *BB *CC *MM *NNArsine, Diborane, Disilane, Germane, Hydrogen, 632 .418-.422 .649-.653 .796-.800 .646-.642 .793-.789Selenide, Phosphine, Silane, Trimethyl SilaneHydrogen Chloride, Boron Trichloride, Hydrogen Bromide 634 .418-.422 .663-.667 .782-.786 .660-.656 .779-.775Dichlorosilane, Trichlorosilane, Silicon Tetrachloride 636 .418-.422 .667-.681 .768-.772 .674-.670 .765-.761Tungsten Hexafluoride, Hydrogen Fluoride 638 .418-.422 .691-.695 .754-.758 .688-.684 .751-.747Nitrogen Trifluoride 640 .418-.422 .705-.709 .740-.744 .702-.698 .737-.733Boron Trifluoride, Silicon Tetrafluoride, 642 .418-.422 .719-.723 .726-.730 .716-.712 .723-.719Phosphorus Pentafluoride, Arsenic Pentafluoride,Germanium TetrafluorideNitrous Oxide 712 .418-.422 .649-.653 .883-.887 .646-.642 .880-.876Oxygen 714 .418-.422 .663-.667 .869-.873 .660-.656 .866-.862Carbon Dioxide, Sulfur Hexafluoride, 716 .418-.422 .677-.681 .855-.859 .674-.670 .852-.848Halocarbons 11, 12, 13, 14, 23, 115, 116,Perfluoropropane, Pentafluoroethane,Octafluorocyclobutane and perfluoro-2-ButeneInerts, Nitrogen. Neon, Helium, 718 .418-.422 .691-.695 .841-.845 .688-.684 .838-.834Argon, Xenon, KryptonAmmonia 720 .418-.422 .705-.709 .827-.831 .702-.698 .824-.820Hydrogen Sulfide 722 .418-.422 .719-.723 .813-.817 .716-.712 .816-.806Hydrogen, Carbon Monoxide, Deuterium, Ethane, 724 .418-.422 .733-.737 .799-.803 .730-.726 .796-.792Ethylene, Methane, Methyl Fluoride, H32Diethylzinc, Dimethylzinc, Triethylaluminum, Diethyltelluride 726 .418-.422 .747-.751 .785-.789 .744-.740 .782-.778Chlorine, Fluorine, Nitric Oxide, Chlorine Trifluoride 728 .418-.422 .761-.765 .761-.765 .758-.754 .758-.754
*Body diameters A, BB, and CC as well as nipple diameters A, MM, and NN should be concentricwithin .002 Full Indicator Movement (FIM). These are critical dimensions for safetythat must be adhered to on final product whether plated or not.
IntroductionCylinder Information
16
Restrictive Flow OrificesThe Restrictive Flow Orifice (RFO) is for use in conjunction withhigh purity compressed gas applications in both thesemiconductor and allied chemical industries.
Restrictive Flow Orifices are used to limit the potential danger ofan uncontrolled flow from a compressed gas cylinder. Unchecked,the instantaneous flow from a 44 liter compressed gas cylinderfilled to 2,000 psig can be as much as 20,000 liters per minute. Byinserting an RFO into the outlet of the CGA connection the flowrate would be reduced by a factor of 100 to approximately 200liters per minute.
The Restrictive Flow Orifice is designed to thread into the outletof most CGA connections that have external male threads. Thiswould include the family of DISS face seal connections (CGA 630and 710) that are used in high purity semiconductor applications.
The RFO has no moving parts. It is about 3/8" long and isgenerally constructed of 316LSS. The orifice opening usuallyvaries from 0.006" to 0.060". It is possible to have orifices that areas small as 0.004" and as large as 0.150" depending upon theapplication.
A KEL-F gasket is provided as part of the assembly to help createa seal between the restrictor and the valve body. Refer to Figure 1.
The flow rate through an orifice is a function of the followingvariables:
• Pressure• Temperature• Specific Gravity• Orifice Opening
Correlations assist in predicting the flow of a particular gas ormixture through an RFO. This is done by first determining theflow through the same RFO at the required pressure with areference gas and then adjusting the specific gravity accordingly.
The pertinent equation is presented below.
Flow = The Flow Rate of N2 1at the Same Pressure Specific Gravity
Typical nitrogen flows for different orifice signs at differentpressures can be found in Table I.
By using this table, a reference flow rate for nitrogen can bedetermined and then the reference equation can be used with thisvalue.
For a mixture a "weighted" or "averaged" specific gravity can beused by multiplying the volume or mole fraction of eachcomponent by its specific gravity and then summing.
In addition to providing safety features that have been mandatedby various local and state codes, the restrictive flow orifice alsoresults in a lower flow rate, which is desirable in manysemiconductor applications. While the RFO was not designed tobe a modulator or control valve, it will as its name implies,substantially reduce the flow rate under a specific set of pressureand temperature conditions for a given gas.
More detailed information on restrictive flow orifices is availablefrom your local Matheson Sales Engineer.
Figure 1: Restrictive Flow Orifice
TABLE I Orifice Flow Rate at Varying Pressures
Orifice Pressure-PSIGSize 0 500 1000 2000
0.006 in. 0 slpm 7 slpm 15 slpm 29 slpm0.010 in. 0 slpm l8 slpm 36 slpm 73 slpm0.040 in. 0 slpm 245 slpm 485 slpm —
References
For Phase Break, all data are obtained without correcting for non-ideal gas conditions, and as such are estimates
For RFO flows, all data are corrected for individual gas densities
For Vapor Pressure, all data are calculated using the coefficients and equation reported by C.L. Yaws and S.N. Naphad,Appendix 5 of Matheson Gas Data Book, 7th Edition, 2001
http://www.mathesontrigas.com/edge/ 17 Semiconductor Products Catalog V 4.0/SpecRev 4.32
Ammonia NH3
Grade Semicon 5N ULSI 5N5 ULTIMA 6N4Purity, % 99.999 99.9995 99.99994
Oxygen ≤0.5 ppmv (+Ar): ≤100 ppbv
Nitrogen ≤5 ppmv ≤1.5 ppmv
Carbon Dioxide ≤0.4 ppmv ≤100 ppbv
Carbon Monoxide ≤2 ppmv ≤0.1 ppmv ≤50 ppbv
Hydrogen ≤100 ppbv
Methane ≤2 ppmv ≤0.1 ppmv ≤50 ppbv
Water (+O2): 5 ppmv ≤2.0 ppmv ≤200 ppbv*
*Water is measured by sampling the liquid phase, as this method has been found to produce more repeatable data. Using a typicalPartition Coefficient of 100, the reported value of 200 ppbv corresponds to 2 ppbv in the vapor phase of a full cylinder.• A lot analysis is provided for each order – Individual analysis is provided for ULTIMA grade and available upon request for other grades.• Pneumatic valves, JIS connections available upon request
Internal Volume Liters 49.0 43.8 439
Cylinder Sizes >> QK QB/QF QI
Contentkg 25.0 22.73 227.3
lbs 55.0 50.0 500
Change Point** lbs 0.74 0.67 6.67
CYLINDER
**Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).
DOT Shipping Name Ammonia, Anhydrous UN Number UN 1005 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN# 1C980Liquefied Gas
DOT Label NON-FLAMMABLE GAS Harmonized # 2814.10.0000
SHIP
Cylinder Pressure 113.9 psig
@NTP 9.0 atm
Specific Volume 1.41 m3/kg
@NTP 22.6 ft3/lb
CAS No 7664-41-7
CGA/DISS/JIS 660/720/W22-14R
Molecular Weight 17.03 g/mol
TLV 25 ppm
LFL-UFL in Air 16 - 25 %
TECHNICAL DATA
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QK ULTRA-LINE® 25x140/144/153 10x55/56.5/60 CS SS
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QI ULTRA-LINE® 61x211 24x83 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelASB: Aluminum Silicon Bronze CS: Carbon Steel SS: Stainless Steel
VaporTemp, °C 0.0 15.5 21.0 32.2 43.3
PressurePress, psig 47.6 92.8 113.9 165.7 232.0
Temp, °F 32 60 70 90 110
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 6634 12665 26134 58298 100514
Flow, scf/h 14.0 26.8 55.4 123.5 213.0
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
http://www.mathesontrigas.com/edge/ 18 Semiconductor Products Catalog V 4.0/SpecRev4.22
Argon Ar
Grade Semicon 5N ULSI 6NPurity, % 99.999 99.9999
Oxygen ≤1.0 ppmv ≤300 ppbv
Nitrogen ≤700 ppbv
Carbon Dioxide ≤0.5 ppmv ≤100 ppbv
Carbon Monoxide ≤0.5 ppmv ≤100 ppbv
Methane ≤0.5 ppmv ≤100 ppbv
Water ≤3.0 ppmv ≤500 ppbv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8 2.3
Cylinder Sizes >> QF/QA JF/JA/JB
ContentLiters 7,930 340
ft3 280 12
Cylinder Pressure*psig 2,490 2,000
atm 176.1 141.6
* @ NTP
CYLINDER
DOT Shipping Name Argon, Compressed UN Number UN 1006 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN# EAR99 Compressed
DOT Label NON-FLAMMABLE GAS Harmonized # 2804.21.0000 Gas
SHIP
Specific Volume 0.604 m3/kg
@NTP 9.68 ft3/lb
CAS No 7440-37-1
CGA/DISS/JIS 580/718/22-14R
Atomic Weight 39.95 g/molTECHNICAL DATA
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
JF ULTRA-LINE® 10x33/37/46 4x13/14.5/18 CS SS
JA ULTRA-LINE® 10x33/37/46 4x13/14.5/18 CS Brass
JB ULTRA-LINE II® 10x33/37/46 4x13/14.5/18 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
Critical Temperature -122.4°C -188.4°F
Critical Pressure 50 atm 711.5 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
http://www.mathesontrigas.com/edge/ 19 Semiconductor Products Catalog V 4.0/SpecRev4.31
Arsine AsH3
Grade ULSI 5N5 ULSI 6N ULTIMA 6N5 ULTIMA II 6N5Purity, % 99.9995 99.9999 99.99995 99.99995
Water ≤2.0 ppmv ≤350 ppbv ≤100 ppbv ≤100 ppbvNitrogen ≤2.0 ppmv ≤250 ppbv ≤50 ppbv ≤50 ppbvOxygen ≤1.0 ppmv ≤40 ppbv ≤20 ppbv ≤20 ppbv
Carbon Dioxide ≤0.5 ppmv ≤40 ppbv ≤10 ppbv ≤10 ppbvCarbon Monoxide ≤0.1 ppmv ≤10 ppbv ≤10 ppbv ≤10 ppbv
Methane ≤0.5 ppmvC1 - C2 ≤500 ppbv ≤100 ppbv ≤50 ppbvC3 - C5 ≤50 ppbvArgon ≤50 ppbv ≤20 ppbv
Germane ≤50 ppbv ≤50 ppbv ≤10 ppbvHydrogen Sulfide ≤50 ppbv ≤50 ppbv ≤50 ppbv
Silane ≤50 ppbv ≤10 ppbvPhosphine ≤25 ppbv
Carbonyl Sulfide ≤25 ppbvNitrous Oxide ≤20 ppbv
• All cylinders are individually analyzed
Internal Volume Liters 43.8 47.5 29.5Cylinder Sizes >> QF QZ QH*
Contentkg 25 29/18.2* 12.7*lbs 55 60/40* 28*
Change Point** lbs 5.1 5.5 3.4
CYLINDER
* Fills available for ULTIMA Grade only**Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).
DOT Shipping Name Arsine UN Number UN 2188 Shipped asDOT Classification 2.3 (2.1) Poison Gas ECCN # 3C004
DOT LabelPOISON GAS / INHALATION
Harmonized # 2850.00.0000Liquefied Gas
HAZARD, FLAMMABLE GAS
SHIP
Cylinder Pressure 204.6 psig@NTP 15.4 atm
Specific Volume 0.31 m3/kg@NTP 5.0 ft3/lb
CAS No 7784-42-1CGA/DISS/JIS 350/632/W22-14L
Molecular Weight 77.95 g/molTLV 0.05 ppmv
LFL in Air 4.5%
TECHNICAL DATA
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder ValveQF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SSQZ ULTRA-LINE II® 25x137/141/149 10x54/55.5/59 Aluminum SSQH ULTRA-LINE® 20x122/126/135 8x48/49.5/53 Aluminum SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valveoutlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
VaporTemp, °C 0.0 15.5 21.0 32.2 43.3
PressurePress, psig 116.2 178.2 204.6 265.1 336.7Temp, °F 32 60 70 90 110
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040Flow, sccm 5326 10168 20981 46805 80698Flow, scf/h 11.3 21.5 44.5 99.2 171.0
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Hall Mobility > 120,000 (cm2/Vs) > 160,000 (cm2/Vs) > 180,000 (cm2/Vs)Carrier Concentration < 5x1014 (cm-3) < 1x1014 (cm-3) < 5x1013 (cm-3)
• Performace data above is typical for 10um GaAs/GaAs with growth conditions of V/III ratio: 150 and temperature of 650C. 77K measurements• Pneumatic valves and DIN and JIS connections are available upon request.
http://www.mathesontrigas.com/edge/ 20 Semiconductor Products Catalog V 4.0/SpecRev4.32
Boron Trichloride BCl3
Grade Semicon 4N5 ULSI 5N Gigabit 5N5Purity, % 99.995 99.999 99.9995 Metals, ppbw
Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10
Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20
Carbon Dioxide ≤5 ppmv ≤2.0 ppmv ≤0.5 ppmv Ca ≤10 K ≤20
Carbon Monoxide ≤3 ppmv ≤0.5 ppmv ≤0.3 ppmv Cu ≤10 Cd ≤0.5
Methane ≤1 ppmv ≤0.5 ppmv ≤0.5 ppmv Fe ≤30 Ba ≤10
Chlorine ≤1 ppmv ≤1 ppmv ≤0.1 ppmv Li ≤10 Sb ≤10
Phosgene ≤0.1 ppmv As ≤20 Pb ≤10
Hydrogen Chloride ≤1.0 ppmv Mg ≤10 Mn ≤10
Silicon Tetrachloride ≤2.0 ppmv Si ≤10 Zn ≤10
• A lot analysis is provided for each order – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.
Internal Volume Liters 43.8 2.3
Cylinder Sizes >> QF JF
Contentkg 50 45 31.8 18.2 2.3
lbs 110 100 70 40 5
Change Point* lbs 0.66 0.03
CYLINDER
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).
Cylinder Pressure 4.4 psig
@NTP 1.34 atm
Specific Volume 0.21 m3/kg
@NTP 3.3 ft3/lb
CAS No 10294-34-5
CGA/DISS/JIS 660/634/W22-14R
Molecular Weight 117.17 g/mol
TLV 1 ppm
TECHNICAL DATA
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
JF ULTRA-LINE® 10x33/37/46 4x13/14.5/18 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
VaporTemp, °C 0.0 15.5 21.0 32.2 43.3
PressurePress, psig -5.6 1.7 4.4 13.9 25.1
Temp, °F 32 60 70 90 110
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 412 787 1623 3621 6243
Flow, scf/h 0.9 1.7 3.4 7.7 13
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
DOT Shipping Name Boron Trichloride UN Number UN 1741 Shipped as
DOT Classification2.3 Poison Gas, Hazard
ECCN # EAR99Zone C
Liquefied Gas
DOT LabelPOISON GAS / INHALATION
Harmonized # 2812.10.5050HAZARD, CORROSIVE GAS
SHIP
http://www.mathesontrigas.com/edge/ 21 Semiconductor Products Catalog V 4.0/SpecRev4.32
Boron Trifluoride BF3
Grade ULSI 4N5 11B EnrichedPurity, % 99.995 99.9
Oxygen ≤25 ppmv
Oxygen + Nitrogen + Argon ≤10 ppmv
Nitrogen ≤25 ppmv
Carbon Dioxide ≤10 ppmv ≤25 ppmv
Argon ≤25 ppmv
Sulfur Dioxide ≤10 ppmv ≤25 ppmv
Hydrogen Fluoride ≤25 ppmv
Isotopic Purity, 11B >99.7%
• A lot analysis is provided for each order – Individual analysis is also available upon request.• Pneumatic valves and JIS connections available upon request
Internal Volume Liters 2.3 0.44
Cylinder Sizes >> JB/JF SF/SA
Contentg 400 180 35
lbs 0.88 0.39 0.077
Cylinder Pressure*psig 700 400 400
atm 50.2 29.1 29.1
* @ NTP
CYLINDER
DOT Shipping Name Boron Trifluoride, Compressed UN Number UN 1008 Shipped as
DOT Classification2.3, Poison Gas Hazard Zone B
ECCN # EAR99 Compressed(Gas Poisonous by Inhalation)GasDOT Label POISON GAS / INHALATION HAZARD Harmonized # 2812-90-0000
SHIP
Specific Volume 0.35 m3/kg
@NTP 5.6 ft3/lb
CAS No 7637-07-02
CGA/DISS/JIS 330/642/W22-14L
Molecular Weight 67.81 g/mol
TLV 1 ppmTECHNICAL DATA
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 10640 20313 41916 93505 161215
Flow, scf/h 22.5 43.0 88.8 198.1 341.6
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
JB ULTRA-LINE II® 10x33/37/46 4x13/14.5/18 CS SS
JF ULTRA-LINE® 10x33/37/46 4x13/14.5/18 CS SS
SF ULTRA-LINE® 5x30/34/43 2x12/13.5/17 CS SS
SA ULTRA-LINE® 5x30/34/43 2x12/13.5/17 CS Brass
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 22 Semiconductor Products Catalog V 4.0/SpecRev 4.21
Carbon Dioxide CO2
Grade ULSI 5NPurity, % 99.999
Oxygen ≤1 ppmv
Nitrogen ≤1 ppmv
Carbon Monoxide ≤0.2 ppmv
Total Hydrocarbons (CH4) ≤4 ppmv
Water ≤2 ppmv
Hydrogen ≤1 ppmv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.• A FLET (Full Length Educator Tube) is available upon request.
Internal Volume Liters 43.8 17.1
Cylinder Sizes >> QF/QA/QB GF/GA
Contentlbs 60 24
kg 27.2 10.9
Change Point* lbs 19.56 7.64
CYLINDER
DOT Shipping Name Carbon Dioxide UN Number UN 1013 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN # 1C980 Liquefied
DOT Label NON-FLAMMABLE GAS Harmonized # 2811.21.0000 Gas
SHIP
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
GF ULTRA-LINE® 23x66/70/79 9x26/27.5/31 CS SS
GA ULTRA-LINE® 23x66/70/79 9x26/27.5/31 CS Brass
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
Critical Temperature 31°C 87.9°F
Critical Pressure 72.85 atm 1,071 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in thecylinder when the liquid phase has completely evaporated and only gaseous product is left (estimate based onideal gas behavior).
Cylinder Pressure 830 psig
@NTP 59.4 atm
Specific Volume 0.54 m3/kg
@NTP 8.74 ft3/lb
CAS No 124-38-9
CGA/DISS/JIS 320/716/W22-14R
Molecular Weight 44.01 g/mol
TECHNICAL DATA
http://www.mathesontrigas.com/edge/ 23 Semiconductor Products Catalog V 4.0/SpecRev 4.31
Carbon Monoxide CO
Grade ULSI 3N5 ULSI PLUS 4N5Purity, % 99.95 99.995 Metals, ppbw
Oxygen ≤100 ppmv ≤6 ppmv Al ≤1 Mn ≤1
Nitrogen ≤250 ppmv ≤10 ppmv Cd ≤1 Ni ≤1
Carbon Dioxide ≤50 ppmv ≤15 ppmv Ca ≤1 Mg ≤1
Total Hydrocarbons ≤3 ppmv Cr ≤1 K ≤2
Methane ≤3 ppmv Cu ≤1 Na ≤5
Water ≤3 ppmv ≤1 ppmv Fe ≤5 Zn ≤1
Iron Pentacarbonyl ≤1 ppmv ≤0.5 ppmv Pb ≤1
Hydrogen ≤1 ppmv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• For gas phase impurities, a metal analysis is performed periodically.• Pneumatic valves and JIS connections are available upon request.NOTE: Aluminum cylinders with brass valves are the recommended package for CO.
Internal Volume Liters 46.4 43.8 29.5
Cylinder Sizes >> QY QB QH/QX
Contentm3 6.9 4.96 3.3
ft3 244 175 118
Cylinder Pressure* psig 2,216 1,650 1,650
* @ NTP
CYLINDER
DOT Shipping Name Carbon Monoxide, compressed UN Number UN 1016 Shipped as
DOT Classification2.3 Poison Gas Hazard Zone D
ECCN # 1C980 Compressed(Gas Poisonous by Inhalation)GasDOT Label INHALATION HAZARD FLAMMABLE GAS Harmonized # 2811.29.0000
SHIP
Specific Volume 0.86 m3/kg
@NTP 13.8 ft3/lb
CAS No 630-08-0
CGA/DISS/JIS 350/724/W22-14L
Molecular Weight 28.01 g/molTECHNICAL DATA Critical Temperature -140.2°C -220.4°F
Critical Pressure 35.7 atm 507.5 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QY ULTRA-LINE® 25x132/136/145 10x52/53.5/57 Aluminum SS/Brass
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
QH/QX ULTRA-LINE ® 20x122/126/135 8x48/49.5/53 Aluminum SS/Brass
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 24 Semiconductor Products Catalog V 4.0/SpecRev 4.31
Chlorine Cl2
Grade Semicon 4N ULSI 5N ULSI PLUS 5NPurity, % 99.99 99.999 99.999 Metals, ppbw
Oxygen ≤50 ppmv ≤1.0 ppmv ≤1.0 ppmv Ca ≤10 Ni ≤300
Nitrogen ≤50 ppmv ≤2.0 ppmv ≤2.0 ppmv Cd ≤10 K ≤100
Carbon Dioxide ≤30 ppmv ≤4.0 ppmv ≤4.0 ppmv Cr ≤100 Na ≤50
Carbon Monoxide ≤5 ppmv ≤0.5 ppmv ≤0.5 ppmv Cu ≤100 Zn ≤20
Methane ≤1 ppmv ≤0.1 ppmv ≤0.1 ppmv Fe ≤200
Water ≤2.0 ppmv Total Metals: ≤1,000
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.
Internal Volume Liters 439 43.8
Cylinder Sizes >> QI QF/QB
Contentkg 499.4 50 45.4 31.8
lbs 1,100 110 100 70
Change Point* lbs 20.4 2.04
CYLINDER
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).
DOT Shipping Name Chlorine UN Number UN 1017 Shipped as
DOT Classification2.3 Poison Gas, Hazard Zone B
ECCN # EAR99 Liquefied (Gas Poisonous by Inhalation)GasDOT Label INHALATION HAZARD, CORROSIVE GAS Harmonized # 2801.10.0000
SHIP
Cylinder Pressure 85.3 psig
@NTP 7.0 atm
Specific Volume 0.34 m3/kg
@NTP 5.4 ft3/lb
CAS No 7782-50-5
CGA/DISS/JIS 660/728/W26-14R
Molecular Weight 70.91 g/mol
TLV 0.5 ppm
TECHNICAL DATA
VaporTemp, °C 0.0 15.5 21.0 32.2 43.3
PressurePress, psig 38.9 72.1 85.3 122.4 166.0
Temp, °F 32 60 70 90 110
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 2519 4810 9925 22141 38174
Flow, scf/h 5.3 10.2 21.0 46.9 80.9
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QI ULTRA-LINE® 61x211 24x83 CS SS
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 25 Semiconductor Products Catalog V 4.0/SpecRev 4.32
Deuterium D2
Grade Semicon 4N5 ULSI 5NPurity, % 99.995 99.999
Enrichment, % 99.5 99.8Oxygen ≤ 1.0 ppmv ≤1.0 ppmv
Nitrogen ≤5.0 ppmv ≤1.0 ppmv
Carbon Dioxide ≤2.0 ppmv ≤1.0 ppmv
Carbon Monoxide ≤1.0 ppmv ≤1.0 ppmv
THC ≤ 1.0 ppmv ≤1.0 ppmv
Water + D2O ≤5.0 ppmv ≤1.0 ppmv
Hydrogen* ≤150 ppmv ≤100 ppmv
Hydrogen Deuteride* ≤5,000 ppmv ≤3,000 ppmv
*Not included in over-all purity analysis• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8
Cylinder Sizes >> QA/QF
ContentLiters 6,000
ft3 212
Cylinder Pressure**psig 2,200
atm 155.7
** @ NTP
CYLINDER
DOT Shipping Name Deuterium Compressed UN Number UN 1957 Shipped as
DOT Classification 2.1 (Flammable Gas) ECCN # 0C004 Compressed
DOT Label FLAMMABLE GAS Harmonized # 2845.90.0000 Gas
SHIP
Specific Volume 5.99 m3/kg
@NTP 95.9 ft3/lb
CAS No 7782-39-0
CGA/DISS/JIS 350/724/W22-14L
Molecular Weight 4.03 g/molTECHNICAL DATA Critical Temperature -234.8°C -390.6°F
Critical Pressure 16.9 atm 241.3 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 26 Semiconductor Products Catalog V 4.0/SpecRev 4.31
Dichlorosilane SiH2Cl2Grade Semicon 2N ULSI Plus 3N
Purity, % 99.0(w) 99.9(w)**Oxygen + Argon ≤1.0 ppmv
Nitrogen ≤1.0 ppmv
Carbon Dioxide ≤1.0 ppmv
Carbon Monoxide ≤1.0 ppmv
Methane ≤1.0 ppmv
Hydrocarbons (C2-C4) ≤1.0 ppmv
Hydrogen Chloride ≤500 ppmw
Monochlorosilane ≤0.3% w ≤250 ppmw
Other Chlorosilanes ≤1% w
Trichlorosilane ≤500 ppmw
Silicon Tetrachloride ≤200 ppmw
Resistivity, N-type, ohm-cm > 200 > 400
Individual Metals – Al* ≤1.0 ppbw ≤50 ppta
As* ≤0.2 ppbw ≤50 ppta
B* ≤0.1 ppbw ≤300 ppta
P* ≤0.3 ppbw ≤300 ppta
C* ≤1,000 ppbw ≤300 ppba
Fe* ≤50 ppbw ≤2 ppbw
Ga* ≤10 ppta Mn ≤0.2 ppbw
Sb* ≤10 ppta Mo ≤0.2 ppbw
Additional Metals:In* ≤10 ppta Ni ≤0.2 ppbw
Cr ≤0.2 ppbw Na ≤0.2 ppbw
Cu ≤0.2 ppbw Zn ≤0.2 ppbw
O* ≤200 ppba*Total deposited metals**Total Purity excluding HCl
• A lot analysis is provided for each order.• Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 41 43.8
Cylinder Sizes >> QL QF
Contentkg 40.9 43.1
lbs 90 93
Change Point*** lbs 0.6 0.7
CYLINDER
***Recommended Cylinder Change Point at NTP, based on Phase Break, or theamount of product left in the cylinder when the liquid phase has completelyevaporated and only gaseous product is left (estimate based on ideal gas behavior).
UN Number UN 2189
DOT Shipping Name Dichlorosilane
DOT Classification 2.3 (Poison Gas)
DOT Label POISON GAS, FLAMMABLE GAS
ECCN # EAR99
Harmonized # 2827.39.9050
SHIP
Cylinder Pressure 8.6 psig
@NTP 1.7 atm
Specific Volume 0.24 m3/kg
@NTP 3.83 ft3/lb
CAS No 4109-96-0
CGA/DISS/JIS 678/636/W22-14L
Molecular Weight 101.01 g/mol
TECHNICAL DATA
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
VaporTemp, °C 0.0 15.5 21.0 32.2 43.3
PressurePress, psig -4.1 4.3 8.6 18.1 30.8
Temp, °F 32 60 70 90 110
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 553 1056 2178 4860 8379
Flow, scf/h 1.2 2.2 4.6 10 18
http://www.mathesontrigas.com/edge/ 27 Semiconductor Products Catalog V 4.0/SpecRev 4.31
Disilane Si2H6
Grade Semicon 3N ULSI 4N8Purity, % 99.9 99.998
Oxygen + Argon ≤1 ppmv
Nitrogen ≤2 ppmv
Carbon Dioxide ≤1 ppmv ≤1 ppmv
Methane ≤1 ppmv ≤1 ppmv
Water ≤1 ppmv ≤1 ppmv
Air ≤5 ppmv
Chlorosilanes ≤0.2 ppmv
Higher Silanes* ≤50 ppmv
Siloxanes ≤5 ppmv
Silane ≤1000 ppmv ≤1000 ppmv*
Resistivity, N-type >1000 ohm-cm
*Not included in over-all purity analysis.• A lot analysis is provided for each order – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.
Internal Volume Liters 43.8 17.1 7.3
Cylinder Sizes >> QF GF UF
Contentkg 5 3 2
lbs 11 6.6 4.4
Change Point** lbs 0.9 0.3 0.1
CYLINDER
**Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).
DOT Shipping Name Compressed Gas Flammable, NOS (Disilane) UN Number UN 1954
DOT Classification 2.1 (Flammable Gas) ECCN # EAR99
DOT Label FLAMMABLE GAS Shipped as Liquefied Gas
SHIP
Cylinder Pressure 33 psig
@NTP 3.35 atm
Specific Volume 0.35 m3/kg
@NTP 5.6 ft3/lb
CAS No 1590-87-0
CGA/DISS/JIS 350/632/W22-14L
Molecular Weight 62.22 g/mol
TECHNICAL DATA
Critical Temperature 159°C 317.9°F
Critical Pressure 52.3 atm 744 psia
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 1412 2696 5564 12411 21399
Flow, scf/h 3.0 5.7 12 26 45
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
GF ULTRA-LINE® 23x66/70/79 9x26/27.5/31 CS SS
UF ULTRA-LINE® 15x51/55/64 6x19/20.5/24 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 28 Semiconductor Products Catalog V 4.0/SpecRev 4.31
Germane GeH4
Grade Semicon 5NPurity, % 99.999
Oxygen+ Argon ≤0.5 ppmv
Nitrogen ≤2.0 ppmv
Carbon Dioxide ≤2.0 ppmv
Carbon Monoxide ≤1.0 ppmv
Methane ≤1.0 ppmv
Water ≤1.0 ppmv
Chlorogermanes ≤5.0 ppmv
Digermane* ≤20.0 ppmv
Germoxanes ≤5.0 ppmv
Hydrogen* ≤50.0 ppmv
Trigermane ≤1.0 ppmv
*Not included in over-all purity analysis.• A lot analysis is provided for each order – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.
Internal Volume Liters 29.5 17.1 7.3
Cylinder Sizes >> QH GF UF
Contentkg 1 0.5 0.1
lbs 2.2 1.1 0.22
Cylinder Pressure**psig 160 118 45
atm 12.3 9.3 5.3** @ NTP
CYLINDER
DOT Shipping Name Germane UN Number UN 2192 Shipped as
DOT Classification 2.3 (Toxic Gas) ECCN # EAR99 Compressed
DOT Label TOXIC GAS, FLAMMABLE GAS Harmonized # 2851.00.0000 Gas
SHIP
Critical Temperature 94.7°C 34.8°F
Critical Pressure 56.6 atm 805.3 psia
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 4257 8127 16769 37408 64497
Flow, scf/h 9.0 17.2 35.5 79.3 136.7
Specific Volume 0.32 m3/kg
@NTP 5.1 ft3/lb
CAS No 7782-65-2
CGA/DISS/JIS 350/632/W22-14L
Molecular Weight 76.62 g/molTECHNICAL DATA
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QH ULTRA-LINE® 20x122/126/135 8x48/49.5/53 Aluminum SS
GF ULTRA-LINE® 23x66/70/79 9x26/27.5/31 CS SS
UF ULTRA-LINE® 15x51/55/64 6x19/20.5/24 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
http://www.mathesontrigas.com/edge/ 29 Semiconductor Products Catalog V 4.0/SpecRev4.21
Halocarbon 14 (Tetrafluoromethane) CF4
Grade Semicon 3N5 ULSI 5NPurity, % 99.95 99.999
Oxygen ≤100 ppmv
Nitrogen ≤400 ppmv
Carbon Dioxide ≤10 ppmv (+CO) ≤1 ppmv
Carbon Monoxide ≤20 ppmv
Other Halocarbons ≤2.0 ppmv
Water ≤10 ppmv ≤2.0 ppmv
Air ≤5.0 ppmv
Sulfur Hexafluoride ≤1.0 ppmv
Acidity as HF ≤1.0 ppmv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8
Cylinder Sizes >> QF/QA/QB
Contentlbs 70
kg 31.82
CYLINDER
DOT Shipping NameCompressed Gas NOS
UN Number UN 1982 Shipped as(Tetrafluoromethane)
DOT Classification 2.2 (Non-Flammable Gas) ECCN # EAR99 Compressed
DOT Label NON-FLAMMABLE GAS Harmonized # 2903.30.2010 Gas
SHIP
Cylinder Pressure 2,000 psig
@NTP 141.6 atm
Specific Volume 0.27 m3/kg
@NTP 4.4 ft3/lb
CAS No 75-73-0
CGA/DISS/JIS 320/716/W22-14L
Molecular Weight 88.00 g/mol
TECHNICAL DATA
Critical Temperature -45.6°C -50.2°F
Critical Pressure 38.1 atm 542.3 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 30 Semiconductor Products Catalog V 4.0/SpecRev 4.21
Halocarbon 23 (Trifluoromethane) CHF3
Grade Semicon 4N5 ULSI 5NPurity, % 99.995 99.999
Oxygen + Nitrogen ≤50 ppmv
Oxygen + Nitrogen + Carbon Monoxide ≤20 ppmv
Carbon Dioxide ≤10 ppmv
Water ≤20 ppmv ≤5 ppmv
Other Organics ≤10 ppmv
Acidity as HCl ≤0.1 ppmw ≤0.1 ppmw
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8
Cylinder Sizes >> QF/QA/QB
Contentlbs 70
kg 31.82
Change Point* lbs 28.2
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount ofproduct left in the cylinder when the liquid phase has completely evaporated and onlygaseous product is left (estimate based on ideal gas behavior).
CYLINDER
DOT Shipping Name Trifluoromethane UN Number UN 1984 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN # EAR99 Liquefied
DOT Label NON-FLAMMABLE GAS Harmonized # 2903.30.2010 Gas
SHIP
Cylinder Pressure 635 psig
@NTP 45.7 atm
Specific Volume 0.343 m3/kg
@NTP 5.5 ft3/lb
CAS No 75-46-7
CGA/DISS/JIS 660/716/W22-14L
Molecular Weight 70 g/mol
TECHNICAL DATA
VaporTemp, °C 0.0 15.5 21.0 32.2 43.3
PressurePress, psig 347 529 635 802 1040
Temp, °F 32 60 70 90 110
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 31 Semiconductor Products Catalog V 4.0/SpecRev4.4
Halocarbon 32 (Difluoromethane) CH2F2
• A lot analysis is provided for each order – Individual analysis is also available upon request.• Other Organics = H12, H22, H23, H134a
Internal Volume Liters 43.8 17.1 7.3
Cylinder Sizes >> QF GF UF
Contentlbs 64 25 11
kg 29.1 11.35 5
Change Point* lbs 4.3 1.7 0.7
CYLINDER
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).
Cylinder Pressure 207 psig
@NTP 15.6 atm
Specific Volume 0.45 m3/kg
@NTP 7.2 ft3/lb
CAS No 75-10-5
CGA/DISS/JIS 350/724/W22-14L
Molecular Weight 52 g/mol
TECHNICAL DATA
VaporTemp, °C 0.0 15.5 21.0 32.2 43.3
PressurePress, psig 102 172 207 279 372
Temp, °F 32 60 70 90 110
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
GF ULTRA-LINE® 23x66/70/79 9x26/27.5/31 CS SS
UF ULTRA-LINE® 15x51/55/64 6x19/20.5/24 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
DOT Shipping Name Difluoromethane Shipped as
DOT Classification 2.1 (Flammable Gas)Liquefied
DOT Label FLAMMABLE GAS GasUN Number UN 3252
SHIP
Grade ULSI 4N ULTIMA 4N8Purity, % 99.99 99.998
Nitrogen ≤40 ppmv ≤5 ppmv
Oxygen ≤10 ppmv ≤2 ppmv
Carbon Dioxide ≤15 ppmv ≤1 ppmv
Methane ≤2 ppmv ≤1 ppmv
Water ≤5 ppmv ≤1 ppmv
Carbon Tetrafluoride ≤5 ppmv ≤1 ppmv
Other Organics ≤100 ppmv ≤10 ppmv
Carbon Monoxide ≤1 ppmv
Acidity as HF ≤0.1 ppmw
http://www.mathesontrigas.com/edge/ 32 Semiconductor Products Catalog V 4.0/SpecRev 4.32
Halocarbon 41 (Methyl Fluoride) CH3F
Grade Semicon 4N ULSI 4N5Purity, % 99.99 99.995
Oxygen ≤20 ppmv < 5 ppmv
Nitrogen ≤70 ppmv < 20 ppmv
Carbon Dioxide < 10 ppmv
Carbon Monoxide < 10 ppmv
Methane < 5 ppmv
Water ≤10 ppmv < 2 ppmv
Acidity as HF Please Inquire
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8 17.1 7.3
Cylinder Sizes >> QF GF UF
Contentlbs 18 7 3
kg 8.2 3.2 1.4
Change Point* lbs 8.4 3.3 1.4
CYLINDER
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).
DOT Shipping Name Methyl Fluoride UN Number UN 2810 Shipped as
DOT Classification 2.1 (Flammable Gas) ECCN # EAR99 Liquefied
DOT Label FLAMMABLE GAS Harmonized # 2903.30.2050 Gas
SHIP
Cylinder Pressure 538 psig
@NTP 38.85 atm
Specific Volume 0.71 m3/kg
@NTP 11.36 ft3/lb
CAS No 593-53-3
CGA/DISS/JIS 350/724/W22-14L
Molecular Weight 34 g/mol
TECHNICAL DATA
VaporTemp, °C 0.0 15.5 21.0 32.2 43.3
PressurePress, psig 259 398 538 606 790
Temp, °F 32 60 70 90 110
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
GF ULTRA-LINE® 23x66/70/79 9x26/27.5/31 CS SS
UF ULTRA-LINE® 15x51/55/64 6x19/20.5/24 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 33 Semiconductor Products Catalog V 4.0/SpecRev4.21
Halocarbon 116 (Hexafluoroethane) C2F6
Grade ULSI 5N ULSI Plus 5NPurity, % 99.999 99.999
Oxygen ≤2.0 ppmv
Oxygen + Nitrogen + Carbon Dioxide + Carbon Monoxide ≤25 ppmv
Nitrogen ≤8.0 ppmv
Carbon Dioxide ≤0.5 ppmv
Carbon Monoxide ≤0.5 ppmv
Water ≤5 ppmv ≤1.5 ppmv
Other organics ≤0.5 ppmv
Acidity as HCl ≤0.1 ppmw ≤0.1 ppmw
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8
Cylinder Sizes >> QF/QA/QB
Contentlbs 95
kg 43.18
Change Point* lbs 19.1
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount ofproduct left in the cylinder when the liquid phase has completely evaporated and onlygaseous product is left (estimate based on ideal gas behavior).
CYLINDER
DOT Shipping Name Hexafluoroethane Compressed UN Number UN 2193 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN # EAR99 Liquefied
DOT Label NON-FLAMMABLE GAS Harmonized # 2903.30.2010 Gas
SHIP
Cylinder Pressure 430 psig
@NTP 31.3 atm
Specific Volume 0.174 m3/kg
@NTP 2.8 ft3/lb
CAS No 76-16-4
CGA/DISS/JIS 660/716/W22-14L
Molecular Weight 138.01 g/mol
TECHNICAL DATA
Critical Temperature 19.7°C 67.5°F
Critical Pressure 30.37 atm 431 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 34 Semiconductor Products Catalog V 4.0/SpecRev4.21
Halocarbon 218 (Perfluoropropane) C3F8
Grade ULSI 3N8Purity, % 99.98
Oxygen ≤50 ppmv
Nitrogen ≤145 ppmv
Carbon Dioxide ≤11 ppmv
Carbon Monoxide ≤5 ppmv
Water ≤6 ppmw
Other Fluorocarbons* ≤400 ppmv
Acidity as HF ≤0.1 ppmw
*Other Fluorocarbons defined as the sum of HFC227, HFC236 and HFC245, not included in purity spec• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8
Cylinder Sizes >> QA/QF
Contentlbs 100
kg 45.45
Change Point* lbs 7.7
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount ofproduct left in the cylinder when the liquid phase has completely evaporated and onlygaseous product is left (estimate based on ideal gas behavior).
CYLINDER
DOT Shipping Name Perfluoropropane UN Number UN 2424 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN # EAR99 Liquefied
DOT Label NON-FLAMMABLE GAS Harmonized # 2903.30.2010 Gas
SHIP
Cylinder Pressure 100 psig
@NTP 8.1 atm
Specific Volume 0.13 m3/kg
@NTP 2.02 ft3/lb
CAS No 76-19-7
CGA/DISS/JIS 660/716/W22-14L
Molecular Weight 188.02 g/mol
TECHNICAL DATA
Critical Temperature 71.9°C 161.4°F
Critical Pressure 27.3 atm 389 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 35 Semiconductor Products Catalog V 4.0/SpecRev4.31
Halocarbon c318 (Octafluorocyclobutane) C4F8
GradeSemicon 3N
ULSI 5NZyron 8020®
Purity, % 99.9 99.999Oxygen ≤1 ppmv
Water ≤10 ppmv ≤3 ppmv
Air ≤300 ppmv ≤3 ppmv
Other Organics ≤1,000 ppmv ≤10 ppmv
Acidity as HCl ≤0.1 ppmv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.• Zyron® is a Registered Mark of E.I. DuPont.
Internal Volume Liters 43.8
Cylinder Sizes >> QA/QF
Contentlbs 110 95
kg 50 43.2
Change Point* lbs 2.5
CYLINDER
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in thecylinder when the liquid phase has completely evaporated and only gaseous product is left (estimate based onideal gas behavior).
DOT Shipping Name Octafluorocyclobutane UN Number UN 1976 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN # EAR99 Liquefied
DOT Label NON-FLAMMABLE GAS Gas
SHIP
Cylinder Pressure 25 psig
@NTP 2.8 atm
Specific Volume 0.12 m3/kg
@NTP 1.85 ft3/lb
CAS No 115-25-3
CGA/DISS/JIS 660/716/W22-14L
Molecular Weight 200.03 g/mol
TECHNICAL DATA
Critical Temperature 115.2°C 239.5°F
Critical Pressure 28.4 atm 403 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 36 Semiconductor Products Catalog V 4.0/SpecRev4.21
Halocarbon 1216 (Hexafluoropropylene) C3F6
Grade Chamber Clean 2N8Purity, % 99.8
Water ≤20 ppmw
Other Fluorocarbons ≤2000 ppmv
Acidity as HF ≤5 ppmw
• A lot analysis is provided for each order – Individual analysis is also available upon request.• Pneumatic valves and JIS connections available upon request.
Internal Volume Liters 43.8
Cylinder Sizes >> QF
Contentkg 45.4
lbs 100
Change Point* lbs 1.87
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount ofproduct left in the cylinder when the liquid phase has completely evaporated and onlygaseous product is left (estimate based on ideal gas behavior).
CYLINDER
DOT Shipping Name Hexafluoropropylene, compressed Shipped as
DOT Classification 2.2 (Non-Flammable Gas)Liquefied
DOT Label NON-FLAMMABLE GAS GasUN Number UN 1858
SHIP
Cylinder Pressure 85 psig
@NTP 7.0 atm
Specific Volume 0.161 m3/kg
@NTP 2.58 ft3/lb
CAS No 116-15-4
CGA/DISS/JIS 660/716/22-14R
Synonyms FC1216
Molecular Weight 150.02
TECHNICAL DATA
Critical Temperature 94°C 201°F
Critical Pressure 29.6 atm 94.7 psia
Vapor Pressure @ 25°C 6.7 atm 94.7 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 37 Semiconductor Products Catalog V 4.0/SpecRev4.3
Halocarbon 4110 (Octafluorocyclopentene) C5F8
Grade ULSI 4NPurity, % 99.99
Oxygen ≤20 ppmv
Nitrogen ≤100 ppmv
Water ≤10 ppmw
Hexafluorocyclobutene ≤50 ppmw
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8 7.3
Cylinder Sizes >> QB UF
Contentkg 10 3
lbs 22 6.6
Cylinder Pressure*psig 11.9 11.9
atm 1.87 1.87
* @ NTP
CYLINDER
DOT Classification 6.1 Shipped as
DOT Label NON-FLAMMABLE GAS Liquefied
UN Number UN 2810 Gas
SHIP
Specific Volume 0.709 m3/kg
@NTP 11.36 ft3/lb
CAS No 559-40-0
CGA/DISS/JIS 660/716/W22-14R
Molecular Weight 212.04 g/molTECHNICAL DATA Boiling Point @NP 27°C 80.6°F
Critical Temperature 159.9°C 319.8°F
Critical Pressure 25.2 atm 358 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
UF ULTRA-LINE® 15x51/55/64 6x19/20.5/24 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 38 Semiconductor Products Catalog V 4.0/SpecRev 4.21
Helium He
Grade Semicon 5N ULSI 6NPurity, % 99.999 99.9999
Oxygen ≤2.0 ppmv ≤50 ppbv
Nitrogen ≤3.0 ppmv ≤400 ppbv
Carbon Dioxide ≤1.0 ppmv ≤100 ppbv
Carbon Monoxide ≤1.0 ppmv ≤50 ppbv
Methane ≤1.0 ppmv ≤100 ppbv
Water ≤3.0 ppmv ≤200 ppbv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8 5.9
Cylinder Sizes >> QF/QA/QB UA/UF
ContentLiters 6,910 880
ft3 244 31
Cylinder Pressure*psig 2,490 2,000
atm 176.1 141.6
* @ NTP
CYLINDER
DOT Shipping Name Helium, Compressed UN Number UN 1046 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN # 1C980 Compressed
DOT Label NON-FLAMMABLE GAS Harmonized # 2804.29.0010 Gas
SHIP
Critical Temperature -268.0°C -450.3°F
Critical Pressure 229 atm 18.5 psia
Specific Volume 6.06 m3/kg
@NTP 97.1 ft3/lb
CAS No 7440-59-7
CGA/DISS/JIS 580/718/W22-14L
Atomic Weight 4.00 g/molTECHNICAL DATA
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
UA ULTRA-LINE® 15x51/55/64 6x19/20.5/24 CS Brass
UF ULTRA-LINE® 15x51/55/64 6x19/20.5/24 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 39 Semiconductor Products Catalog V 4.0/SpecRev 4.21
Hydrogen H2
Grade Semicon 5N ULSI 6NPurity, % 99.999 99.9999
Oxygen ≤2.0 ppmv ≤50 ppbv
Nitrogen ≤5.0 ppmv ≤200 ppbv
Carbon Dioxide ≤1.0 ppmv ≤20 ppbv
Carbon Monoxide ≤1.0 ppmv ≤20 ppbv
Methane ≤0.5 ppmv ≤10 ppbv
Water ≤3.0 ppmv ≤500 ppbv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8
Cylinder Sizes >> QF/QA
ContentLiters 6,030
ft3 213
Cylinder Pressure*psig 2,200
atm 155.7
* @ NTP
CYLINDER
DOT Shipping Name Hydrogen Compressed UN Number UN 1049 Shipped as
DOT Classification 2.1 (Flammable Gas) ECCN # 1C980 Compressed
DOT Label FLAMMABLE GAS Harmonized # 2804.10.0000 Gas
SHIP
Specific Volume 12.0 m3/kg
@NTP 192 ft3/lb
CAS No 133-74-0
CGA/DISS/JIS 350/724/W22-14L
LFL/UFL (air) 4/74%
Molecular Weight 2.02 g/molTECHNICAL DATA
Critical Temperature -239.9°C -399.8°F
Critical Pressure 13.2 atm 188.1 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS Brass
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 40 Semiconductor Products Catalog V 4.0/SpecRev 4.51
Hydrogen Bromide HBr
Grade ULSI 5N Gigabit 5N5Purity, % 99.999 99.9995 Metals, ppbw
Oxygen ≤1.0 ppmv ≤1.0 ppmv Al ≤5 Mg ≤1
Nitrogen ≤3.0 ppmv ≤1.0 ppmv Ca ≤5 Na ≤5
Carbon Dioxide ≤3.0 ppmv ≤1.0 ppmv Cr ≤5 Ni ≤10
Carbon Monoxide ≤0.5 ppmv ≤0.5 ppmv Cu ≤1 Pb ≤1
Methane ≤1.5 ppmv ≤1.0 ppmv Fe ≤10 Zn ≤1
Water ≤1.0 ppmv ≤1.0 ppmv Mn ≤1 Co ≤1
Hydrogen Chloride ≤50 ppmv
Hydrogen ≤50 ppmv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.
Internal Volume Liters 43.8
Cylinder Sizes >> QN
Contentkg 54.55
lbs 130
Change Point* lbs 9.0
CYLINDER
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount ofproduct left in the cylinder when the liquid phase has completely evaporated and only gaseousproduct is left (estimate based on ideal gas behavior).
DOT Shipping Name Hydrogen Bromide, Anhydrous UN Number UN 1048 Shipped as
DOT Classification2.3 Poison Gas Hazard Zone C
ECCN # EAR99(Gas Poisonous by Inhalation) Liquefied
DOT LabelPOISON GAS INHALATION HAZARD
Harmonized # 2811.19.0000Gas
CORROSIVE GAS
SHIP
Cylinder Pressure 320 psig
@NTP 23.5 atm
Specific Volume 0.3 m3/kg
@NTP 4.8 ft3/lb
CAS No 10035-10-6
CGA/DISS/JIS 330/634/W22-14L
Molecular Weight 80.91
TLV 3 ppm
TECHNICAL DATA
VaporTemp, °C 0.0 15.5 21.0 32.2 43.3
PressurePress, psig 173 269 320 405 517
Temp, °F 32 60 70 90 110
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 7950 15177 31317 69862 120451
Flow, scf/h 17 32 66 148 255
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QN ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS/Ni-lined Hst
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel Hst: Hastelloy
http://www.mathesontrigas.com/edge/ 41 Semiconductor Products Catalog V 4.0/SpecRev 4.32
Hydrogen Chloride HCl
Grade Semicon 4N5 ULSI 5N ULSI PLUS 5NPurity, % 99.995 99.999 99.999 Metals, ppbw
Oxygen ≤4.0 ppmv ≤1.0 ppmv ≤1.0 ppmv Cd ≤5 Mg ≤50
Nitrogen ≤10.0 ppmv ≤1.5 ppmv ≤1.5 ppmv Cr ≤400 Na ≤50
Carbon Dioxide ≤10.0 ppmv ≤2.0 ppmv ≤2.0 ppmv Cu ≤100 Ni ≤100
Carbon Monoxide ≤1.0 ppmv ≤1.0 ppmv Fe ≤500 Pb ≤50
Methane ≤2.0 ppmv ≤0.1 ppmv ≤0.1 ppmv Zn ≤50
Water ≤10.0 ppmv ≤1.0 ppmv ≤1.0 ppmv Total Metals: ≤1,000
Iron (Fe) ≤0.5 ppmw
• A lot analysis is provided for each order – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.
Internal Volume Liters 439 49 43.8
Cylinder Sizes >> QI QK QB/QF
Contentkg 272.7 29.55 25.0
lbs 600 65 55
Change Point* lbs 67.8 7.6 6.8
CYLINDER
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).
DOT Shipping Name Hydrogen Chloride, Anhydrous UN Number UN 1050 Shipped as
DOT Classification2.3 Poison Gas Hazard Zone C
ECCN # EAR99(Gas Poisonous by Inhalation) Liquefied
DOT LabelPOISON GAS INHALATION HAZARD
Harmonized # 2806.10.0000Gas
CORROSIVE GAS
SHIP
Cylinder Pressure 613 psig
@NTP 44.1 atm
Specific Volume 0.662 m3/kg
@NTP 10.6 ft3/lb
CAS No 7647-01-0
CGA/DISS/JIS 330/634/W26-14R
Molecular Weight 36.46 g/mol
TLV 5 ppm
TECHNICAL DATA
VaporTemp, °C 0.0 15.5 21.0 32.2 43.3
PressurePress, psig 360 540 613 799 1020
Temp, °F 32 60 70 90 110
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 22157 42300 87285 194713 335713
Flow, scf/h 47 90 185 413 711
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QI ULTRA-LINE® 61x211 24x83 CS Hst/SS
QK ULTRA-LINE® 25x140/144/153 10x55/56.5/60 CS Hst
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS Hst
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Hst
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel ASB: Aluminum Silicon Bronze Hst: Hastalloy
http://www.mathesontrigas.com/edge/ 42 Semiconductor Products Catalog V 4.0/SpecRev 4.32
Hydrogen Fluoride HF
Grade Semicon 4N5Purity, % 99.995*
Sulfuric acid ≤25 ppmv
Sulfur Dioxide ≤15 ppmv
Hexafluorosilicilic Acid ≤15 ppmv
* Inert gases may be found in considerable concentration, as it is used topackage the product as sold: please inquire if this represents a concern
• A lot analysis is provided for each order. • Pneumatic valves available upon request.
Internal Volume Liters 43.8 17.1 7.3
Cylinder Sizes >> QF GF UF
Contentkg 22.7 11.36 1.82
lbs 50 25 4
Change Point* lbs 0.1 0.035 0.015
CYLINDER
*Recommended Cylinder Change Point @NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).).
DOT Shipping Name Hydrogen Fluoride, Anhydrous UN Number UN 1052 Shipped as
DOT Classification8 Poison Gas Hazard Zone C
ECCN # 1C350(Gas Poisonous by Inhalation) Liquefied
DOT LabelPOISON GAS INHALATION HAZARD
Harmonized # 2811.11.0000Gas
POISON CORROSIVE
SHIP
Cylinder Pressure 0.7 psig
@NTP 1.07 atm
Specific Volume 1.20 m3/kg
@NTP 19.3 ft3/lb
CAS No 7664-39-3
CGA/DISS 660/638
Molecular Weight 20.01
TLV 3 ppm
TECHNICAL DATA
VaporTemp, °C 0.0 15.5 21.0 32.2 43.3
PressurePress, psig -7.7 -2.0 0.7 7.9 17.5
Temp, °F 32 60 70 90 110
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 729 1391 2871 6405 11043
Flow, scf/h 2 3 6 14 23
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
GF ULTRA-LINE® 23x66/70/79 9x26/27.5/31 CS SS
UF ULTRA-LINE® 15x51/55/64 6x19/20.5/24 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 43 Semiconductor Products Catalog V 4.0/SpecRev 4.21
Krypton Kr
Grade Semicon 4N8Purity, % 99.998
Oxygen ≤2.0 ppmv
Nitrogen ≤10.0 ppmv
Carbon Dioxide ≤1.0 ppmv
Carbon Monoxide ≤1.0 ppmv
Methane ≤1.0 ppmv
THC ≤0.1 ppmv
Water ≤4.0 ppmv
Argon ≤1.0 ppmv
Xenon ≤10.0 ppmv
Helium ≤1.0 ppmv
Hydrogen ≤1.0 ppmv
• A lot analysis is provided for each order. – Individual analysis is also availableupon request.
• Pneumatic valves and JIS connections are available upon request
Internal Volume Liters 43.8
Cylinder Sizes >> QF/QA/QB
ContentLiters 5,000
ft3 177
Cylinder Pressure*psig 1,335
atm 94.9
* @ NTP
CYLINDER
DOT Shipping Name Krypton, Compressed UN Number UN 1056 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN # EAR99 Compressed
DOT Label NON-FLAMMABLE GAS Harmonized # 2804.29.0050 Gas
SHIP
Specific Volume 0.287 m3/kg
@NTP 4.6 ft3/lb
CAS No 7439-90-9
CGA/DISS/JIS 580/718/22-14R
Atomic Weight 83.80 g/molTECHNICAL DATA Critical Temperature -63.8°C -82.8°F
Critical Pressure 56.1 atm 798 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 44 Semiconductor Products Catalog V 4.0/SpecRev 4.21
Methane CH4
Grade Semicon 4N ULSI 5NPurity, % 99.99 99.999
Oxygen ≤10 ppmv ≤1 ppmv
Nitrogen ≤60 ppmv ≤4 ppmv
Carbon Dioxide ≤3 ppmv ≤2 ppmv
Carbon Monoxide ≤1 ppmv ≤1 ppmv
Water ≤3 ppmv ≤1 ppmv
Ethane ≤20 ppmv ≤3 ppmv
Ethylene ≤1 ppmv ≤1 ppmv
Hydrogen ≤1 ppmv ≤1 ppmv
Propane ≤1 ppmv ≤1 ppmv
Propylene ≤1 ppmv ≤1 ppmv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8 17.1
Cylinder Sizes >> QF/QA/QB GF/GA
ContentLiters 8,100 2,830
ft3 286 100
Cylinder Pressure*psig 2,265 2,000
atm 160.3 141.6
* @ NTP
CYLINDER
DOT Shipping Name Methane, Compressed UN Number UN 1971 Shipped as
DOT Classification 2.1 (Flammable Gas) ECCN # 1C983 Compressed
DOT Label FLAMMABLE GAS Harmonized # 2901.10.6000 Gas
SHIP
Critical Temperature -116.6°C -182.5°F
Critical Pressure 49 atm 667.7 psia
Specific Volume 1.48 m3/kg
@NTP 23.7 ft3/lb
CAS No 74-82-0
CGA/DISS/JIS 350/724
Molecular Weight 16.04 g/molTECHNICAL DATA
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
GF ULTRA-LINE® 23x66/70/79 9x26/27.5/31 CS SS
GA ULTRA-LINE® 23x66/70/79 9x26/27.5/31 CS Brass
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 45 Semiconductor Products Catalog V 4.0/SpecRev 4.32
Methyl Silane SiH3CH3
Grade Semicon 3N8Purity, % 99.98
Oxygen+ Argon ≤10 ppmv
Carbon Dioxide ≤2 ppmv
Methane ≤10 ppmv
Silane ≤50 ppmv
Other Methylsilanes* ≤50 ppmv
Chlorosilanes ≤50 ppmv
*Not included in over-all purity analysis.• A lot analysis is provided for each order – Individual analysis is also availableupon request.
• Pneumatic valves, JIS connections available upon request
Internal Volume Liters 7.3 2.3 0.44
Cylinder Sizes >> UF JF SF
Contentkg 1.45 0.7 0.1
lbs 3.2 1.54 0.22
Chnage Point* lbs 0.47 0.15 0.03
CYLINDER
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).
Cylinder Pressure 193 psig
@NTP 14.5 atm
Specific Volume 0.523 m3/kg
@NTP 8.37 ft3/lb
CAS No 992-94-9
CGA/DISS/JIS 350/632
Molecular Weight 46.14 g/mol
TECHNICAL DATA
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
UF ULTRA-LINE® 15x51/55/64 6x19/20.5/24 CS SS
JF ULTRA-LINE® 10x33/37/46 4x13/14.5/18 CS SS
SF ULTRA-LINE® 5x30/34/43 2x12/13.5/17 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
Critical Temperature 79.3°C 174.7°F
Vapor Pressure @20°C 14.5 atm 193 psig
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 7091 13537 27934 62315 107440
Flow, scf/h 15 29 59 132 228
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
DOT Shipping Name Compressed Gas Flammable, NOS (Methylsilane) Shipped as
DOT Classification 2.1 (Flammable Gas)Liquefied
DOT Label LIQUEFIED GAS FLAMMABLE GasUN Number UN 3161
SHIP
http://www.mathesontrigas.com/edge/ 46 Semiconductor Products Catalog V 4.0/SpecRev 4.21
Neon Ne
Grade ULSI 5N5Purity, % 99.9995
Oxygen ≤0.5 ppmv
Nitrogen ≤1.0 ppmv
Carbon Dioxide ≤0.1 ppmv
Carbon Monoxide ≤0.1 ppmv
Methane (THC) ≤0.1 ppmv
Water ≤1.0 ppmv
Argon ≤1.0 ppmv
• A lot analysis is provided for each order. – Individual analysis is also availableupon request.
• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8
Cylinder Sizes >> QF/QA/QB
ContentLiters 5,000
ft3 177
Cylinder Pressure*psig 1,900
atm 134.6
* @ NTP
CYLINDER
Critical Temperature -228.7°C -379.7°F
Critical Pressure 27 atm 385 psia
Specific Volume 1.21 m3/kg
@NTP 19.4 ft3/lb
CAS No 7440-01-9
CGA/DISS/JIS 580/718/22-14R
Atomic Weight 20.18 g/molTECHNICAL DATA
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
DOT Shipping Name Neon, Compressed Shipped as
DOT Classification 2.2 (Non-Flammable Gas)Compressed
DOT Label NON-FLAMMABLE GAS GasUN Number UN 1065
SHIP
http://www.mathesontrigas.com/edge/ 47 Semiconductor Products Catalog V 4.0/SpecRev 4.31
Nitric Oxide NO
Grade Semicon 2N5 ULSI 4NPurity, % 99.5 99.99
Oxygen ≤1 ppmv
Nitrogen ≤3,000 ppmv ≤30 ppmv
Carbon Dioxide ≤1,000 ppmv ≤1 ppmv
THC (CH4) ≤1 ppmv
Water ≤20 ppmv ≤1 ppmv
Hydrogen ≤1 ppmv
Nitrous Oxide ≤1,000 ppmv ≤30 ppmv
Nitrogen Dioxide ≤30 ppmv
• A lot analysis is provided for each order – Individual analysis is also available upon request.• For ULSI PLUS Grade, a Metals analysis is provided upon request.
Internal Volume Liters 47.5 43.8
Cylinder Sizes >> QZ QF
Contentm3 1 1.58
ft3 35 56
Cylinder Pressure*atm 20.4 36.2
psig 275 500
* @ NTP
CYLINDER
DOT Shipping Name Nitric Oxide Compressed UN Number UN 1660 Shipped as
DOT Classification2.3 Hazard Zone A
ECCN # EAR99(Gas Poisonous by Inhalation) Compressed
DOT LabelINHALATION HAZARD, OXIDIZER
Harmonized # 2811.29.0000Gas
CORROSIVE GAS
SHIP
Boiling Point @NTP -89.5°C
Triple Point -90.8°C
Specific Volume 0.8 m3/kg
@NTP 12.8 ft3/lb
CAS No 10102-43-9
CGA/DISS/JIS 660/728/W22-14R
Molecular Weight 30.01 g/mol
TLV 25 ppmv
TECHNICAL DATA
Critical Temperature -93°C -135.4°F
Critical Pressure 66 atm 940.6 psia
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO Data Size, inches 0.010 0.014 0.020 0.030 0.040
@ 500 psig Flow, sccm 20121 38413 79265 176823 304867
Flow, scf/h 43 81 168 375 646
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QZ ULTRA-LINE II® 25x137/141/149 10x54/55.5/59 Aluminum SS
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 48 Semiconductor Products Catalog V 4.0/SpecRev 4.21
Nitrogen N2
Grade Semicon 5N ULSI 6NPurity, % 99.999 99.9999
Oxygen ≤3.0 ppmv ≤200 ppbv
Carbon Dioxide ≤1.0 ppmv ≤100 ppbv
Carbon Monoxide ≤1.0 ppmv ≤200 ppbv
Methane ≤1.0 ppmv ≤100 ppbv
Water ≤3.0 ppmv ≤500 ppbv• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 49.0 43.8 2.3
Cylinder Sizes >> QK QF/QA/QB JF/JB
ContentLiters 8,500 7,220 310
ft3 300 255 11
Cylinder Pressure*psig 2,640 2,490 2,000
atm 186.6 176.1 141.6
* @ NTP
CYLINDER
DOT Shipping Name Nitrogen Compressed UN Number UN 1066 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN # EAR99 Compressed
DOT Label NON-FLAMMABLE GAS Gas
SHIP
Critical Temperature -122.4°C -188.4°F
Critical Pressure 50 atm 711.5 psia
Specific Volume 0.86 m3/kg
@NTP 13.8 ft3/lb
CAS No 7727-37-9
CGA/DISS/JIS 580/718/W22-14R
Molecular Weight 28.01 g/molTECHNICAL DATA
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QK ULTRA-LINE® 25x140/144/153 10x55/56.5/60 CS SS
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS Brass
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
JF ULTRA-LINE® 10x33/37/46 4x13/14.5/18 CS SS
JB ULTRA-LINE II® 10x33/37/46 4x13/14.5/18 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 49 Semiconductor Products Catalog V 4.0/SpecRev 4.31
Nitrogen Trifluoride NF3
Grade Semicon 2N7 ULSI 4N ULSI 4N5Purity, % 99.7 99.99 99.995
Oxygen ≤10 ppmv ≤5 ppmv
Oxygen and Argon ≤700 ppmv
Nitrogen ≤700 ppmv ≤10 ppmv ≤5 ppmv
Carbon Dioxide ≤25 ppmv ≤10 ppmv ≤3 ppmv
Carbon Monoxide ≤25 ppmv ≤0.5 ppmv
Water ≤1 ppmv ≤1 ppmv ≤1 ppmv
Carbon Tetrafluoride ≤1500 ppmv ≤40 ppmv ≤25 ppmv
Nitrous Oxide ≤50 ppmv ≤10 ppmv ≤2 ppmv
Acidity as HF ≤1 ppmv ≤5 ppmv ≤1 ppmv
Sulfur Hexafluoride ≤50 ppmv ≤1 ppmv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.
Internal Volume Liters 43.8 49
Cylinder Sizes >> QF QK
Contentkg 20 22.7
lbs 44 50
CYLINDER
DOT Shipping Name Nitrogen Trifluoride UN Number UN 2451 Shipped as
DOT Classification 2.2 (Non-Flammable Gas, Oxidizer) ECCN # EAR99Compressed
DOT LabelNON-FLAMMABLE GAS AND
Harmonized # 2826.19.0000 GasOXIDIZER
SHIP
Cylinder Pressure 1,450 psig
@NTP 102.97 atm
Specific Volume 0.34 m3/kg
@NTP 5.4 ft3/lb
CAS No 7783-54-2
CGA/DISS/JIS 670/640/W22-14L
Molecular Weight 71.00 g/mol
TLV 10 ppm
TECHNICAL DATA
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 36903 70450 145374 324296 559131
Flow, scf/h 78 149 308 687 1185
Critical Temperature -39.3°C -38.7°F
Critical Pressure 44.7 atm 657.2 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QK ULTRA-LINE® 25x140/144/153 10x55/56.5/60 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 50 Semiconductor Products Catalog V 4.0/SpecRev 4.21
Nitrous Oxide N2O
Grade Semicon 4N5 ULSI 5NPurity, % 99.995 99.999
Oxygen ≤2 ppmv ≤2.0 ppmv
Nitrogen ≤7 ppmv ≤2.0 ppmv
Carbon Dioxide ≤2 ppmv ≤2.0 ppmv
Carbon Monoxide ≤0.1 ppmv
Methane ≤1 ppmv ≤0.1 ppmv
Water ≤2.0 ppmv
Ammonia ≤0.5 ppmv
Nitric Oxide and Nitrogen Dioxide ≤0.5 ppmv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8
Cylinder Sizes >> QF/QA/QB
Contentkg 27.3 or 27
lbs 60
Cylinder Pressure @STPpsig 745
atm 53.4
Change Point* lbs 16.6
CYLINDER
DOT Shipping Name Nitrous Oxide UN Number UN 1070 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN # EAR99 Liquefied
DOT Label NON-FLAMMABLE GAS OXIDIZER Harmonized # 2811.29.0000 Gas
SHIP
Specific Volume 0.543 m3/kg
@NTP 8.7 ft3/lb
CAS No 10024-97-2
CGA/DISS/JIS 326/712/W22-14R
Molecular Weight 44.01 g/molTECHNICAL DATA Critical Temperature 36.4°C 97.6°F
Critical Pressure 73.9 atm 1,052.2 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount ofproduct left in the cylinder when the liquid phase has completely evaporated and onlygaseous product is left (estimate based on ideal gas behavior).
http://www.mathesontrigas.com/edge/ 51 Semiconductor Products Catalog V 4.0/SpecRev 4.31
Oxygen O2
Grade Semi ULSI 5N Gigabit 6NPurity, % 99.995 99.999 99.9999
Nitrogen ≤25.0 ppmv ≤5.0 ppmv ≤0.5 ppmv
Carbon Dioxide ≤0.5 ppmv ≤0.1 ppmv ≤0.1 ppmv
Carbon Monoxide ≤0.5 ppmv ≤0.1 ppmv ≤0.1 ppmv
THC (as Methane) ≤0.5 ppmv ≤0.1 ppmv ≤0.1 ppmv
Water ≤2.0 ppmv ≤0.5 ppmv ≤0.5 ppmv
Argon ≤3.0 ppmv ≤3.0 ppmv ≤0.5 ppmv
Hydrogen ≤0.1 ppmv ≤0.1 ppmv
Nitrous Oxide ≤1.0 ppmv ≤0.1 ppmv
Krypton ≤1.0 ppmv ≤1.0 ppmv ≤0.1 ppmv
Neon ≤0.1 ppmv ≤0.1 ppmv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8
Cylinder Sizes >> QF/QA
ContentLiters 6,910
ft3 244
Cylinder Pressure*psig 2,200
atm 155.7
* @ NTP
CYLINDER
DOT Shipping Name Oxygen Compressed UN Number UN 1072 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN # EAR99 Compressed
DOT Label NON-FLAMMABLE GAS Harmonized # 2804.40.0000 Gas
SHIP
Specific Volume 0.754 m3/kg
@NTP 12.08 ft3/lb
CAS No 7782-44-7
CGA/DISS/JIS 540*/714/W22-14R
Molecular Weight 31.99 g/molTECHNICAL DATA
Critical Temperature -119°C -180°F
Critical Pressure 49.7 atm 707 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9X51/52.5/56 CS SS
QA ULTRA-LINE II® 23x130/134/143 9X51/52.5/56 CS Brass
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
*Brass Valve
http://www.mathesontrigas.com/edge/ 52 Semiconductor Products Catalog V 4.0/SpecRev 4.31
Phosphine PH3
Grade ULSI 5N7 ULTIMA 6NPurity, % 99.9997 99.9999
Oxygen ≤0.1 ppmv ≤100 ppbv
Nitrogen ≤1.0 ppmv ≤100 ppbv
Carbon Dioxide ≤0.1 ppmv ≤100 ppbv
Carbon Monoxide ≤0.1 ppmv ≤50 ppbv
Methane ≤0.1 ppmv ≤100 ppbv
Water ≤1.0 ppmv ≤100 ppbv
Argon ≤100 ppbv
Arsine ≤50 ppbv
Germane ≤50 ppbv
Hydrogen Sulfide ≤50 ppbv
Silane ≤50 ppbv• All cylinders are individually analyzed• Pneumatic valves, DIN and JIS connections are available upon request.
Internal Volume Liters 43.8 47.5
Cylinder Sizes >> QN QZ
Contentkg 18.2 18.2
lbs 40 40
Change Point* lbs 6.1 6.7
CYLINDER
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in thecylinder when the liquid phase has completely evaporated and only gaseous product is left (estimate based onideal gas behavior).
DOT Shipping Name Phosphine UN Number UN 2199 Shipped as
DOT Classification 2.3 (2.1) Poison Gas ECCN # 3C004Liquefied
DOT LabelPOISON GAS AND
Harmonized # 2848.00.9000 GasFLAMMABLE GAS
SHIP
Cylinder Pressure 594 psig
@NTP 42.8 atm
Specific Volume 0.712 m3/kg
@NTP 11.4 ft3/lb
CAS No 7803-51-2
CGA/DISS/JIS 350/632/W22-14L
Molecular Weight 33.99 g/mol
TLV 0.3 ppmv
Autoignition Temp < 85°C
TECHNICAL DATA
VaporTemp, °C 0.0 15.5 21.0 32.2 43.3
PressurePress, psig 310 449 594 641 799
Temp, °F 32 60 70 90 110
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 22393 42751 88216 196789 339291
Flow, scf/h 47 91 187 417 719
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QN ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS/Ni-lined SS
QZ ULTRA-LINE II® 25x137/141/149 10x54/55.5/59 Aluminum SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 53 Semiconductor Products Catalog V 4.0/SpecRev4.21
Propylene C3H6
Grade ULSI 4N Semicon 3N7Purity, % 99.99 99.97
Oxygen ≤1 ppmv ≤2 ppmv
Nitrogen ≤5 ppmv ≤10 ppmv
Carbon Dioxide ≤1 ppmv ≤1 ppmv
Water ≤2 ppmv ≤3 ppmv
Other Hydrocarbons ≤90 ppmv ≤260 ppmv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.
Internal Volume Liters 43.8
Cylinder Sizes >> QF/QA
Contentlbs 35
kg 15.9
Change Point* lbs 2.2
CYLINDER
DOT Shipping Name Propylene UN Number UN 1077 Shipped as
DOT Classification 2.1 (Flammable Gas) ECCN # NPR-EAR99 Liquefied
DOT Label FLAMMABLE GAS Harmonized # 2901-22-0000 Gas
SHIP
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount ofproduct left in the cylinder when the liquid phase has completely evaporated and onlygaseous product is left (estimate based on ideal gas behavior).
Critical Temperature 91.8°C 197.2°F
Critical Pressure 45.6 atm 648.6 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Cylinder Pressure 136.6 psig
@NTP 10.6 atm
Specific Volume 0.587 m3/kg
@NTP 9.4 ft3/lb
CAS No 115-07-1
CGA/DISS/JIS 510*/724/22-14L
Molecular Weight 42.08 g/mol*Brass Valve
TECHNICAL DATA
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 54 Semiconductor Products Catalog V 4.0/SpecRev 4.31
Silane SiH4
Grade ULSI 6N* ULSI Plus 6N*Purity, % 99.9999 99.9999
Oxygen + Argon ≤0.06 ppmv ≤0.06 ppmv MetalsNitrogen ≤0.5 ppmv ≤0.5 ppmv C ≤0.1 ppma
Carbon Dioxide ≤0.05 ppmv ≤0.05 ppmv Fe ≤0.4 ppba
Carbon Monoxide ≤0.08 ppmv ≤0.08 ppmv Cr ≤0.01 ppba
Hydrogen ≤20.0 ppmv ≤20.0 ppmv Ni ≤0.2 ppba
Water ≤0.5 ppmv ≤0.5 ppmv Cu ≤0.02 ppba
Helium ≤1.0 ppmv ≤1.0 ppmv Zn ≤0.03 ppba
Methane ≤0.04 ppmv ≤0.04 ppmv P ≤20 ppta
THC (Sum of C2 – C4) ≤0.1 ppmv ≤0.1 ppmv B ≤20 ppta
Total Chlorosilanes ≤0.1 ppmv ≤0.1 ppmv Al ≤5 ppta
Disilane ≤0.5 ppmv ≤0.5 ppmv As ≤5 ppta
Disiloxane ≤0.05 ppmv ≤0.05 ppmv Ga ≤5 ppta
Resistivity, N-type (ohm-cm) >10,000 >10,000 Sb ≤5 ppta
In ≤5 ppta
Total Oxygenated≤0.2 ppma
Compounds:
* Excluding Hydrogen• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.
Internal Volume Liters 43.8 43.8 43.8 29.5
Cylinder Sizes >> QB/QF QB/QF QF QH
Contentkg 12 10 5 5
lbs 26.4 22 11 11
CYLINDER
Cylinder Pressure 275 -1,250 psig
@NTP 20.4 – 85.4 atm
Specific Volume 0.755 m3/kg
@NTP 12.1 ft3/lb
CAS No 7803-62-5
CGA/DISS/JIS 350/632/W22-14L
Molecular Weight 32.12
TLV 0.5 ppm
TECHNICAL DATA
Size, mm 0.254 0.3556 0.508 0.762 1.016RFO Data
Size, inches 0.010 0.014 0.020 0.030 0.040@
Flow, sccm 47585 90844 187455 418169 7209811,250 psig
Flow, scf/h 101 192 397 886 1528
Critical Temperature -3.4°C 25.8°F
Critical Pressure 49.38 atm 702.5 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
DOT Shipping Name Silane UN Number UN 2203 Shipped as
DOT Classification 2.1 (Flammable Gas) ECCN # EAR99 Compressed
DOT Label FLAMMABLE GAS Harmonized # 2850.00.0000 Gas
SHIP
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QH ULTRA-LINE ® 20x122/126/135 8x48/49.5/53 Aluminum SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ topof the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 55 Semiconductor Products Catalog V 4.0/SpecRev 4.3
Silcore® Si3H8
“Silcore“ is a registered Trademark of ASM International, N.V.
Grade Semicon 4NPurity, % 99.99*
Argon + Oxygen + Nitrogen ≤3 ppmv
Carbon Dioxide ≤2 ppmv
Methane ≤2 ppmv
Silane ≤1,000 ppmv
Siloxanes ≤5 ppmv
*Excluding other SilanesDisilane and Higher Silanes reported in Certificate of Analysis.
Internal Volume Liters 5.9
Cylinder Sizes >> UH
Contentkg 3
lbs 6.6CYLINDER
Please
specify
Ar, H2 or He
as "pad" gas
DOT Shipping Name Pyrophoric liquid, inorganic, n.o.s. UN Number UN 3194Shipped as
(Trisilane)
DOT Classification 4.2 (Spontaneously Combustible)ECCN # EAR99
Liquefied
DOT Label SPONTANEOUSLY COMBUSTIBLE Gas
SHIP
TSCA WARNING: This material is supplied under a "Low Volume Exemption" of the Toxic Substances Control Act. As such, its use isrestricted to the formation of silicon and silicon compounds and use as a synthesis reagent.
Cylinder Pressure 5 psig (H2 or He)
@NTP 1.4 atm
Specific Volume 1.38 cc/g
@NTP 0.022 ft3/lb
CAS No 7783-26-8
CGA/DISS/JIS 350/632/W22-14L
Molecular Weight 92.33 g/mol
TECHNICAL DATA
Boiling Point @STP 52.9°C 127.2°F
Synonyms Trisilane
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
UH ULTRA-LINE® 18x41/45/54 7x16/17.5/21 Aluminum SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelSS: Stainless Steel
http://www.mathesontrigas.com/edge/ 56 Semiconductor Products Catalog V 4.0/SpecRev 4.31
Silicon Tetrachloride SiCl4
Grade ULSI 3N4Purity, % 99.94(w) Metals
Other Chlorosilanes ≤600 ppmw Al ≤25 ppbw
Resistivity (ohm-cm) >100 B ≤0.2 ppba
C ≤1.0 ppmw
Cr ≤50 ppbw
Cu ≤50 ppbw
Fe ≤50 ppbw
Ni ≤50 ppbw
P + As ≤1.0 ppba
Zn ≤50 ppbw
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.
Internal Volume Liters 211.7
Cylinder Sizes >> XE
Contentkg 272.7
lbs 600
Valve Connection 1/2” FPT
CYLINDER
DOT Shipping Name Silicon Tetrachloride UN Number UN 1818 Shipped as
DOT Classification 8 (Corrosive Material) ECCN # EAR99 Liquefied
DOT Label CORROSIVE Harmonized # 2827.39.0000 Gas
SHIP
Cylinder Pressure 3.8 psia
@NTP 0.27 atm
Specific Volume 0.142 m3/kg
@NTP 2.28 ft3/lb
CAS No 1026-04-7
Molecular Weight 169.89 g/molTECHNICAL DATA
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 68 130 268 598 1031
Flow, scf/h 0.1 0.3 0.6 1.3 2.2
Critical Temperature 233.8°C 452.9°F
Critical Pressure 36.6 atm 521 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
XE ULTRA-LINE® 61x114/118/127 24x45/46.5/50 SS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelSS: Stainless Steel
http://www.mathesontrigas.com/edge/ 57 Semiconductor Products Catalog V 4.0/SpecRev4.31
Silicon Tetrafluoride SiF4
Grade Semicon 4N ULSI 4NPurity, % 99.99 99.99
Oxygen ≤20 ppmv
Oxygen + Argon ≤1.0 ppmv
Nitrogen ≤80 ppmv ≤3.0 ppmv
Carbon Dioxide ≤1.0 ppmv
Carbon Monoxide ≤0.5 ppmv
Methane ≤10 ppmv
Hydrogen Fluoride ≤50 ppmv
Arsenic ≤0.5 ppmv
Boron ≤0.5 ppmv
Phosphorus ≤0.5 ppmv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.
Internal Volume Liters 43.8
Cylinder Sizes >> QB
Contentkg 22.7
lbs 50
CYLINDER
DOT Shipping Name Silicon Tetrafluoride UN Number UN 1859 Shipped as
DOT Classification 2.3 (Poison Gas) ECCN # EAR99 Compressed
DOT Label POISON GAS CORROSIVE Harmonized # 2826.19.0080 Gas
SHIP
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 21163 40402 83369 185976 320648
Flow, scf/h 45 86 177 394 679
Critical Temperature -14.2°C 6.4°F
Critical Pressure 37.9 atm 539 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Cylinder Pressure 1,000 psig
@NTP 71.3 atm
Specific Volume 0.23 m3/kg
@NTP 3.7 ft3/lb
CAS No 7783-61-1
CGA/DISS/JIS 330/642/W22-14L
Molecular Weight 104.08 g/mol
TECHNICAL DATA
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 58 Semiconductor Products Catalog V 4.0/SpecRev 4.31
Sulfur Hexafluoride SF6
Grade Instrument 4N ULSI 5NPurity, % 99.99 99.999
Air ≤50 ppmv ≤5 ppmv
Carbon Tetrafluoride ≤80 ppmv ≤5 ppmv
Water ≤3 ppmv
• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.
Internal Volume Liters 43.8 43.8 43.8 29.5 29.5
Cylinder Sizes >> QA/QB QB QF QX QH
Contentkg 45.45 22.73 31.8 22.73 22.7/31.8
lbs 100 50 70 50 50/70
Phase Break* lbs 20.0 20.0 20.0 13.5 13.5
CYLINDER
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).
DOT Shipping Name Sulfur Hexafluoride UN Number UN 1080 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN # EAR99 Liquefied
DOT Label NON-FLAMMABLE GAS Harmonized # 2826.19.0000 Gas
SHIP
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 5738 10955 22606 50428 86945
Flow, scf/h 12 23 48 107 184
Critical Temperature 45.5°C 114°F
Critical Pressure 38.3 atm 545.3 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Cylinder Pressure 320 psig
@NTP 23.5 atm
Specific Volume 0.16 m3/kg
@NTP 2.5 ft3/lb
CAS No 2551-62-4
CGA/DISS/JIS 590/716/W22-14R
Molecular Weight 146.1 g/mol
TLV 1,000 ppm
TECHNICAL DATA
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QX ULTRA-LINE® 20x122/126/135 8x48/49.5/53 Aluminum Brass
QH ULTRA-LINE® 20x122/126/135 8x48/49.5/53 Aluminum SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 59 Semiconductor Products Catalog V 4.0/SpecRev 4.32
Trichlorosilane SiHCl3
Grade ULSI 3N5Purity, % 99.95(w)
Other Chlorosilanes ≤500 ppmw Metals
Resistivity (N-type), ohm-cm >200 B ≤0.1 ppba
C ≤5,000 ppba
Fe* ≤50 ppbw
P + As ≤0.8 ppba
*Liquid phase sampling• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.
Internal Volume Liters 211.7
Cylinder Sizes >> XE
Contentkg 250
lbs 550
Valve connection: 1/2” FPT
CYLINDER
Cylinder Pressure 10.4 psig
@NTP 1.76 atm
Specific Volume 0.18 m3/kg
@NTP 2.85 ft3/lb
CAS No 10025-78-2
Molecular Weight 135.45 g/molTECHNICAL DATA
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 506 965 1992 4444 7661
Flow, scf/h 1.1 2.0 4.2 9.4 16
Critical Temperature 234°C 453°F
Critical Pressure 38.2 atm 543.7 psia
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
XE ULTRA-LINE® 61x114/118/127 24x45/46.5/50 SS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelSS: Stainless Steel
DOT Shipping Name Trichlorosilane UN Number UN 1295 Shipped as
DOT Classification 4.3 (Dangerous when wet) ECCN # EAR99Liquefied
DOT LabelDANGEROUS WHEN WET,
Harmonized # 2827.39.0000 GasFLAMMABLE LIQUID
SHIP
http://www.mathesontrigas.com/edge/ 60 Semiconductor Products Catalog V 4.0/SpecRev 4.31
Tungsten Hexafluoride WF6
Grade Semicon 3N8/6N ULSI Plus 4N8/6N5 Gigabit 5N5/7NVapor Phase Purity, % 99.98 99.998 99.9995
Oxygen + Argon ≤10 ppmv ≤1.0 ppmv ≤0.5 ppmv
Nitrogen ≤20 ppmv ≤1.0 ppmv ≤0.5 ppmv
Carbon Dioxide ≤10 ppmv ≤1.0 ppmv ≤0.5 ppmv
Carbon Monoxide ≤10 ppmv ≤1.0 ppmv ≤0.5 ppmv
Carbon Tetrafluoride ≤10 ppmv ≤1.0 ppmv ≤0.5 ppmv
Hydrogen Fluoride ≤100 ppmv ≤10 ppmv ≤1.0 ppmv
Sulfur Hexafluoride ≤10 ppmv ≤0.5 ppmv ≤0.5 ppmv
Silicon Tetrafluoride ≤10 ppmv ≤0.5 ppmv ≤0.5 ppmv
Liquid Phase Purity, %(w) 99.9999 99.99995 99.99999Total Metals: ≤1,000 ppbw ≤500 ppbw ≤100 ppbw
Individual Metals - Cr ≤10 ppbw ≤5 ppbw
Fe ≤10 ppbw ≤5 ppbw
K ≤10 ppbw ≤5 ppbw
Na ≤10 ppbw ≤5 ppbw
Th ≤0.1 ppbw ≤0.08 ppbw
U ≤0.05 ppbw ≤0.05 ppbw
• A lot analysis is provided for metals, sampled in the liquid phase • Individual cylinder analysis is provided for gas impurities.• Pneumatic valves are available for a Nickel DISS 638 connection – Stainless Steel is not available• WF6 supplied in Nickel /Nickel-lined cylinders and Nickel valves to maintain the guaranteed purity.
Internal Volume Liters 24.0 18.8 8.0 4.2
Cylinder Sizes >> GC QM GH JD
Contentkg 59 50 20 10
lbs 130 110 44 22
Change Point* lbs 0.6 0.7 0.3 0.1
CYLINDER
*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquidphase has completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).
DOT Shipping Name Tungsten Hexafluoride UN Number UN 2196 Shipped as
DOT Classification 2.3 (Poison Gas) ECCN # EAR99 Liquefied
DOT Label POISON GAS CORROSIVE Harmonized # 2826.19.0080 Gas
SHIP
Cylinder Pressure 2.6 psig
@NTP 1.2 atm
Specific Volume 0.081 m3/kg
@NTP 1.3 ft3/lb
CAS No 7783-82-6
CGA/DISS/JIS 670/638/J22-14R
Molecular Weight 297.84 g/mol
TECHNICAL DATA
VaporTemp, °C 0.0 15.5 21.0 32.2 43.3
PressurePress, psig -8.0 0.0 2.6 15.6 31.7
Temp, °F 32 60 70 90 110
Size, mm 0.254 0.3556 0.508 0.762 1.016
RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040
Flow, sccm 234 447 922 2057 3547
Flow, scf/h 0.5 0.9 2.0 4.4 7.5
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
http://www.mathesontrigas.com/edge/ 61 Semiconductor Products Catalog V 4.0/SpecRev 4.21
Xenon Xe
Grade Semicon 5NPurity, % 99.999
Oxygen ≤1.0 ppmv
Nitrogen ≤3.0 ppmv
Carbon Dioxide ≤0.1 ppmv
Carbon Monoxide ≤0.1 ppmv
Methane ≤0.1 ppmv
Water ≤2.0 ppmv
Argon ≤1.0 ppmv
Krypton ≤2.0 ppmv
Helium ≤1.0 ppmv
Hydrogen ≤1.0 ppmv
• A lot analysis is provided for each order. – Individual analysis is also availableupon request.
• Pneumatic valves and JIS connections are available upon request
Internal Volume Liters 43.8 7.3 2.3
Cylinder Sizes >> QF/QA/QB UF JF
ContentLiters 5,000 500 250
ft3 177 17.5 8.83
Cylinder Pressure*psig varies
atm varies* Maximum Cylinder Pressure @ NTP
CYLINDER
DOT Shipping Name Xenon, Compressed UN Number UN 2036 Shipped as
DOT Classification 2.2 (Non-Flammable Gas) ECCN # EAR99 Compressed
DOT Label NON-FLAMMABLE GAS Harmonized # 2804.29.0050 Gas
SHIP
Critical Temperature 16.6°C 61.9°F
Critical Pressure 59.5 atm 847 psia
Specific Volume 0.183 m3/kg
@NTP 2.93 ft3/lb
CAS No 7440-63-3
CGA/DISS/JIS 580/718/22-14R
Atomic Weight 131.30 g/molTECHNICAL DATA
NTP = 21°C or 70°F and 101.3 kPa or 1 atm
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
UF ULTRA-LINE® 15x51/55/64 6x19/20.5/24 CS SS
JF ULTRA-LINE® 10x33/37/46 4x13/14.5/18 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 62 Semiconductor Products Catalog V 4.0/SpecRev4.3
Arsine SDS2 – SDS3 SDS AsH3
SDS Type SDS 2 SDS 3Gas Purity 5N5 5N5
Purity, % 99.9995 99.9995Oxygen <1.0 ppmv ≤1.0 ppmv
Nitrogen <2.0 ppmv ≤2.0 ppmv
Carbon Dioxide <0.5 ppmv ≤0.5 ppmv
Carbon Monoxide <0.1 ppmv ≤0.1 ppmv
Methane <0.5 ppmv ≤0.5 ppmv
Water <2.0 ppmv ≤2.0 ppmv
Shelf Life 2 years 5 years
• A lot analysis is provided upon request. Specifications are based on source gas.• Fill pressure is 650 +/- 50 torr – Maximum 700 torr at 70°F (21°C) • SDS2 refers to Carbon adsorbent • SDS3 refers to HD-MCTM (High Density Monolithic Carbon)• Cylinder connection: 1/2” VCR
A
B
C
D
Deliverable Quantity in grams
Cylinder Size WY JY UY JY UY
Cylinder Volume, liters 0.44 2.2 6.6 2.5 7.6
Final Cylinder Pressure, torr SDS2 SDS2 SDS2 SDS3 SDS3
5 112 559 1677 835 2505
10 105 526 1578 775 2325
20 96 480 1440 655 1965
50 78 392 1176 455 1335
100 61 303 909 310 930
Specifications @ 20 Torr 88 440 1320
Specifications @ 5 Torr 835 2505
DELIVER
ABLE QUANTITY
Cylinder Specifications
SDS 2: DOT 3AA2015
SDS 3: DOT SP13220
Carbon Steel Cylinder
Stainless Steel Diaphragm Valve
CYLINDER
JY WY UY
Size mm inches mm inches mm inches
A 451.4 17.77 400.1 15.7 574 22.6
B 374.1 14.73 342.9 13.5 499.4 19.7
C 344.7 13.57 298.5 11.7 462.3 18.2
D 108.0 4.25 50.5 2.0 160.0 6.3
http://www.mathesontrigas.com/edge/ 63 Semiconductor Products Catalog V 4.0/SpecRev4.3
(11B)Boron Trifluoride SDS2 – SDS3 SDS 11BF3
SDS Type SDS 2 SDS 3Gas Purity 3N 3N
Purity, % 99.9 99.9Isotopic Enrichment 11B, %w 99.7 99.7
Oxygen <25 ppmv ≤25 ppmv
Nitrogen <25 ppmv ≤25 ppmv
Argon <25 ppmv ≤25 ppmv
Carbon Dioxide <25 ppmv ≤25 ppmv
Sulfur Dioxide <25 ppmv ≤25 ppmv
Hydrogen Fluoride <25 ppmv ≤25 ppmv
Shelf Life 2 years 5 years
• A lot analysis is provided upon request. Specifications are based on source gas.• Fill pressure is 650 +/- 50 torr – Maximum 700 torr at 70°F (21°C) • SDS2 refers to Carbon adsorbent • SDS3 refers to HD-MCTM (High Density Monolithic Carbon)• Cylinder connection: 1/4” VCR
A
B
C
D
Deliverable Quantity in grams
Cylinder Size WY JY UY JY UY
Cylinder Volume, liters 0.44 2.2 6.6 2.5 7.6
Final Cylinder Pressure, torr SDS2 SDS2 SDS2 SDS3 SDS3
5 31 154 462 330 990
10 29 147 441 320 960
20 27 137 411 295 885
50 24 121 363 230 690
100 21 103 309 180 540
Specifications @ 20 Torr 26 130 390
Specifications @ 5 Torr 330 990
DELIVER
ABLE QUANTITY
CYLINDER
JY WY UY
Size mm inches mm inches mm inches
A 451.4 17.77 400.1 15.7 574 22.6
B 374.1 14.73 342.9 13.5 499.4 19.7
C 344.7 13.57 298.5 11.7 462.3 18.2
D 108.0 4.25 50.5 2.0 160.0 6.3
Cylinder Specifications
SDS 2: DOT 3AA2015
SDS 3: DOT SP13220
Carbon Steel Cylinder
Stainless Steel Diaphragm Valve
http://www.mathesontrigas.com/edge/ 64 Semiconductor Products Catalog V 4.0/SpecRev4.3
Germanium Tetrafluoride SDS2 SDS GeF4
SDS Type SDS 2Gas Purity 3N
Purity, % 99.9Oxygen <25 ppmv
Nitrogen <25 ppmv
Carbon Dioxide <25 ppmv
Sulfur Dioxide <25 ppmv
Argon <25 ppmv
Hydrogen Fluoride <25 ppmv
Shelf Life 2 years
• A lot analysis is provided upon request. Specifications are based on source gas.• Fill pressure is 650 +/- 50 torr – Maximum 700 torr at 70°F (21°C) • SDS2 refers to Carbon adsorbent • Cylinder connection: 1/4” VCR
A
B
C
D
Deliverable Quantity
in grams
Cylinder Size WY JY
Cylinder Volume, liters 0.44 2.2
Final Cylinder Pressure, torr SDS2 SDS2
5 160 802
10 147 733
20 130 652
50 105 526
100 82 411
Specifications @ 20 Torr 120 620
DELIVER
ABLE QUANTITY
Cylinder Specifications
DOT 3AA2015
Carbon Steel Cylinder
Stainless Steel Diaphragm Valve
CYLINDER
JY WY
Size mm inches mm inches
A 451.4 17.77 400.1 15.7
B 374.1 14.73 342.9 13.5
C 344.7 13.57 298.5 11.7
D 108.0 4.25 50.5 2.0
http://www.mathesontrigas.com/edge/ 65 Semiconductor Products Catalog V 4.0/SpecRev4.3
Phosphine SDS2 – SDS3 SDS PH3
SDS Type SDS 2 SDS 3Gas Purity 5N6 5N7
Purity, % 99.9996 99.9997Oxygen <1.0 ppmv ≤1.0 ppmv
Nitrogen <2.0 ppmv ≤2.0 ppmv
Carbon Dioxide <0.1 ppmv ≤0.1 ppmv
Carbon Monoxide <0.1 ppmv ≤0.1 ppmv
Methane <0.5 ppmv ≤0.5 ppmv
Water <2.0 ppmv ≤2.0 ppmv
Shelf Life 2 years 5 years
• A lot analysis is provided upon request. Specifications are based on source gas.• Fill pressure is 650 +/- 50 torr – Maximum 700 torr at 70°F (21°C) • SDS2 refers to Carbon adsorbent • SDS3 refers to HD-MCTM (High Density Monolithic Carbon)• Cylinder connection: 1/2” VCR
A
B
C
D
CYLINDER
JY WY UY
Size mm inches mm inches mm inches
A 451.4 17.77 400.1 15.7 574 22.6
B 374.1 14.73 342.9 13.5 499.4 19.7
C 344.7 13.57 298.5 11.7 462.3 18.2
D 108.0 4.25 50.5 2.0 160.0 6.3
Deliverable Quantity in grams
Cylinder Size WY JY UY JY UY
Cylinder Volume, liters 0.44 2.2 6.6 2.5 7.6
Final Cylinder Pressure, torr SDS2 SDS2 SDS2 SDS3 SDS3
5 40 198 594 385 1155
10 38 190 570 365 1095
20 35 177 531 330 990
50 30 151 453 245 735
100 25 123 369 185 555
Specifications @ 20 Torr 30 170 520
Specifications @ 5 Torr 385 1155
DELIVER
ABLE QUANTITY
Cylinder Specifications
SDS 2: DOT 3AA2015
SDS 3: DOT SP13220
Carbon Steel Cylinder
Stainless Steel Diaphragm Valve
http://www.mathesontrigas.com/edge/ 66 Semiconductor Products Catalog V 4.0/SpecRev4.3
Silicon Tetrafluoride SDS2 SDS SiF4
SDS Type SDS 2Gas Purity 4N
Purity, % 99.99Oxygen <20 ppmv
Nitrogen <80 ppmv
Shelf Life 2 years
• A lot analysis is provided upon request. Specifications are based on source gas.• Fill pressure is 650 +/- 50 torr – Maximum 700 torr at 70°F (21°C) • SDS2 refers to Carbon adsorbent • Cylinder connection: 1/4” VCR
A
B
C
D
Deliverable Quantity
in grams
Cylinder Size WY JY
Cylinder Volume, liters 0.44 2.2
Final Cylinder Pressure, torr SDS2 SDS2
5 50 250
10 49 246
20 47 237
50 42 212
100 36 179
Specifications @ 20 Torr 42 230
DELIVER
ABLE QUANTITY
Cylinder Specifications
DOT 3AA2015
Carbon Steel Cylinder
Stainless Steel Diaphragm Valve
CYLINDER
JY WY
Size mm inches mm inches
A 451.4 17.77 400.1 15.7
B 374.1 14.73 342.9 13.5
C 344.7 13.57 298.5 11.7
D 108.0 4.25 50.5 2.0
http://www.mathesontrigas.com/edge/ 67 Semiconductor Products Catalog V 4.0/SpecRev4.3
Semiconductor Gas Mixtures GeneralInformation
All Semiconductor gas mixtures are provided as “Certified” or “Certified Plus” grade, with thefollowing specifications:
• Blend Technique: Gravimetric• Certification: Certificate of Analysis• NIST Traceability: Weight, Traceable Lab Standards or Titrimetrics• Concentration is reported as Mole %, namely Moles of minor component(AsH3, B2H6, PH3, SiH4) over total Moles (x 100).
Blend Tolerance:
Matheson Tri-Gas has developed the technology and manufacturing capability to support theproduction of a wide variety of gaseous mixtures.
Please inquire about mixtures not reported in the following listings.
While the mixtures reported in the following pages are supplied standard with CGAconnections, and supported by analytical certification via a batch analysis methodology,additional specifications are available upon request as follows:
• DISS valve connections• Pneumatic valve connections• Individual cylinder analysis (analytical certification of minor componentconcentration)
Please also note the following:• Cylinder content for Mixtures is reported as nominal only.• Each cylinder is provided with a certificate of analysis complete with NISTtraceability, shelf-lives, and certified concentrations.
Concentration Range (Minor Component) Tolerance10% to 50% +/- 5%
50 ppm to < 10% +/- 10% Certified Grade
1 ppm to < 50 ppm +/- 20%
5% to 50% +/- 2%
500 ppm to < 5% +/- 5% Certified Plus Grade
1 ppm to < 500 ppm +/- 10%
http://www.mathesontrigas.com/edge/ 68 Semiconductor Products Catalog V 4.0/SpecRev4.3
Gas Mixtures: Arsine in N2, H2, HeAsH3
Mixes
Component AsH3 N2 H2 HeGrade 5N5 5N 5N 5N
Purity, % 99.9995 99.999 99.999 99.999Oxygen ≤1.0 ppmv ≤3.0 ppmv ≤2.0 ppmv ≤2.0 ppmv
Nitrogen ≤2.0 ppmv ≤5.0 ppmv ≤3.0 ppmv
Carbon Dioxide ≤0.5 ppmv ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv
Carbon Monoxide ≤0.1 ppmv ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv
Methane ≤0.5 ppmv ≤1.0 ppmv ≤0.5 ppmv ≤1.0 ppmv
Water ≤2.0 ppmv ≤3.0 ppmv ≤3.0 ppmv ≤3.0 ppmv
• All mixes are manufactured to “Certified” or “Certified Plus” grades – custom grades are available upon request• Pneumatic valves, DIN and JIS connections are available upon request• STP = 21°C or 70°F and 101.3 KPa or 1 atm• Pure gas Technical and Ship data above are reported for reference only
CAS No. 7784-42-1 7727-37-9 1333-74-0 7440-59-7
UN Number UN 2188 UN 1066 UN 1049 UN 1046
DOT Shipping Name ArsineNitrogen, Hydrogen, Helium,
compressed compressed compressed
DOT Classification2.3 (2.1) 2.2 2.1 2.2
Poison Gas Non-Flammable Gas Flammable Gas Non-Flammable Gas
DOT LabelPOISON NON-FLAMMABLE FLAMMABLE NON-FLAMMABLE
GAS GAS GAS GAS
Specific Volume @STP0.31 m3/Kg 0.86 m3/Kg 12.0 m3/Kg 6.04 m3/Kg
5.0 ft3/lb 13.9 ft3/lb 191.3 ft3/lb 96.2 ft3/lb
Molecular Weight 77.95 g/mol 28.01 g/mol 2.02 g/mol 4.0 g/mol
CGA/DISS/JIS 350/632/W22-14L
TECHNICAL - SH
IP
AsH3 43.8 7.3 Cylinder internal volume, liters
Concentration QF/QB UF/UB Cylinder Size
Range (c) N2, H2, He N2, H2, He Balance Gas
50 ppm ≤ c < 5% 208 35
5% ≤ c <10% 115 19 Content, cf (minimum, nominal)*
10% ≤ 15% 76 13
CYLINDER
Note on cylindersizes: Unless otherwisespecified, cylinders willbe provided as follows:
All mixes >1%: QF/UF
All mixes <1%: QB/UB
*please inquire for exact cylinder content
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS
QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS
UF ULTRA-LINE® 15x51/55/64 6x19/20.5/24 CS SS
UB ULTRA-LINEII® 15x51/55/64 6x19/20.5/24 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
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*H2 and Higher Boranes excluded
B2H6
MixesGas Mixtures: Diborane in N2, H2, He
http://www.mathesontrigas.com/edge/ 69 Semiconductor Products Catalog V 4.0/SpecRev4.31
Component B2H6* N2 H2 HeGrade 4N 5N 5N 5N
Purity, % 99.99 99.999 99.999 99.999Oxygen ≤1 ppmv ≤3.0 ppmv ≤2.0 ppmv ≤2.0 ppmv
Nitrogen ≤10 ppmv ≤5.0 ppmv ≤3.0 ppmv
Carbon Dioxide ≤5 ppmv ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv
Carbon Monoxide ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv
Methane ≤5 ppmv ≤1.0 ppmv ≤0.5 ppmv ≤1.0 ppmv
Water ≤3.0 ppmv ≤3.0 ppmv ≤3.0 ppmv
Hydrogen ≤500 ppmv
Boron Trifluoride ≤50 ppmv
B5H9 ≤10 ppmv
B4H10 ≤180 ppmv
B5H11 ≤10 ppmv
• All mixes are manufactured to “Certified” grade – custom grades are available upon request• Pneumatic valves, DIN and JIS connections are available upon request• STP = 21°C or 70°F and 101.3 KPa or 1 atm• Pure gas Technical and Ship data above are reported for reference only
CAS No 19287-45-7 7727-37-9 1333-74-0 7440-59-7
UN Number UN 1911 UN 1066 UN 1049 UN 1046
DOT Shipping NameDiborane, Nitrogen, Hydrogen, Helium,
compressed compressed compressed compressed
DOT Classification2.3 Toxic, 2.2 2.1 2.2
Flammable Gas Non-Flammable Gas Flammable Gas Non-Flammable Gas
INHALATION NON-FLAMMABLE FLAMMABLE NON-FLAMMABLE
DOT Label HAZARD GAS GAS GAS
FLAMMABLE GAS
Specific Volume @STP0.87 m3/Kg 0.86 m3/Kg 12.0 m3/Kg 6.04 m3/Kg
5.0 ft3/lb 13.9 ft3/lb 191.3 ft3/lb 96.2 ft3/lb
Molecular Weight 27.68 g/mol 28.01 g/mol 2.02 g/mol 4.0 g/mol
CGA/DISS/JIS 350/632/W22-14L
TECHNICAL - SH
IP
B2H6 43.8 7.3 Cylinder internal volume, liters
Concentration QB/QF UB/UF Cylinder Size
Range (c) N2, H2, He N2, H2, He Balance Gas
50 ppm ≤ c < 5% 208 35
5% ≤ c <10% 117 20 Content, cf (minimum, nominal)*
10% ≤ 15% 78 13
CYLINDER
Note on cylindersizes: Unless otherwisespecified, cylinders willbe provided as follows:
All mixes >1%: QF/UF
All mixes <1%: QB/UB
*please inquire for exact cylinder content
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*H2 and Higher Boranes excluded
Gas Mixtures: Phosphine in N2, H2, HePH3
Mixes
Component PH3 N2 H2 HeGrade 5N7 5N 5N 5N
Purity, % 99.9997 99.999 99.999 99.999Oxygen ≤0.1 ppmv ≤3.0 ppmv ≤2.0 ppmv ≤2.0 ppmv
Nitrogen ≤1.0 ppmv ≤5.0 ppmv ≤3.0 ppmv
Carbon Dioxide ≤0.1 ppmv ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv
Carbon Monoxide ≤0.1 ppmv ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv
Methane ≤0.1 ppmv ≤1.0 ppmv ≤0.5 ppmv ≤1.0 ppmv
Water ≤1.0 ppmv ≤3.0 ppmv ≤3.0 ppmv ≤3.0 ppmv
• All mixes are manufactured to “Certified” grade – custom grades are available upon request• Pneumatic valves, DIN and JIS connections are available upon request• STP = 21°C or 70°F and 101.3 KPa or 1 atm• Pure gas Technical and Ship data above are reported for reference only
CAS No. 7803-51-2 7727-37-9 1333-74-0 7440-59-7
UN Number UN 2199 UN 1066 UN 1049 UN 1046
DOT Shipping Name PhosphineNitrogen, Hydrogen, Helium,
compressed compressed compressed
DOT Classification2.3 (2.1) 2.2 2.1 2.2
Poison Gas Non-Flammable Gas Flammable Gas Non-Flammable Gas
DOT LabelPOISON NON-FLAMMABLE FLAMMABLE NON-FLAMMABLE
GAS GAS GAS GAS
Specific Volume @STP0.71 m3/Kg 0.86 m3/Kg 12.0 m3/Kg 6.04 m3/Kg
11.4 ft3/lb 13.9 ft3/lb 191.3 ft3/lb 96.2 ft3/lb
Molecular Weight 34 g/mol 28.01 g/mol 2.02 g/mol 4.0 g/mol
CGA/DISS/JIS 350/632/W22-14L
TECHNICAL - SH
IP
PH3 43.8 7.3 Cylinder internal volume, liters
Concentration QF/QB UF/UB Cylinder Size
Range (c) N2, H2, He N2, H2, He Balance Gas
50 ppm ≤ c < 15% 208 35 Content, cf (minimum, nominal)*CYLINDER Note on cylinder
sizes: Unless otherwisespecified, cylinders willbe provided as follows:
All mixes >1%: QF/UF
All mixes <1%: QB/UB*please inquire for exact cylinder content
Nominal Diameter (OD)xHeight* Material of Construction
Cylinder Treatment cm Inches Cylinder Valve
QF ULTRA-LINE® 9x51/52.5/56 23x130/134/143 CS SS
QB ULTRA-LINE II® 9x51/52.5/56 23x130/134/143 CS SS
UF ULTRA-LINE® 6x19/20.5/24 15x51/55/64 CS SS
UB ULTRA-LINEII® 6x19/20.5/24 15x51/55/64 CS SS
*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel
http://www.mathesontrigas.com/edge/ 70 Semiconductor Products Catalog V 4.0/SpecRev4.3
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Gas Mixtures: Silane in N2, H2, HeSiH4
Mixes
http://www.mathesontrigas.com/edge/ 71 Semiconductor Products Catalog V 4.0/SpecRev4.3
Component SiH4 N2 H2 HeGrade 4N8 5N 5N 5N
Purity, % 99.998 99.999 99.999 99.999Oxygen ≤5 ppmv ≤3.0 ppmv ≤2.0 ppmv ≤2.0 ppmv
Nitrogen ≤5 ppmv ≤5.0 ppmv ≤3.0 ppmv
Argon ≤40 ppmv
Carbon Dioxide ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv
Carbon Monoxide ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv
Methane ≤1.0 ppmv ≤0.5 ppmv ≤1.0 ppmv
Carbon Dioxide + Carbon Monoxide ≤10 ppmv
Water ≤3 ppmv ≤3.0 ppmv ≤3.0 ppmv ≤3.0 ppmv
Hydrogen ≤5,000 ppmv
Chlorosilanes ≤10 ppmv
Resistivity, N-type (ohm-cm) >5,000
• All mixes are manufactured to “Certified” grade – custom grades are available upon request• Pneumatic valves, DIN and JIS connections are available upon request• STP = 21°C or 70°F and 101.3 KPa or 1 atm • Pure gas Technical and Ship data above are reported for reference only
CAS No. 7803-62-5 7727-37-9 1333-74-0 7440-59-7
UN Number UN 2203 UN 1066 UN 1049 UN 1046
DOT Shipping Name SilaneNitrogen, Hydrogen, Helium,
compressed compressed compressed
DOT Classification2.1 Flammable 2.2 2.1 2.2
Gas Non-Flammable Gas Flammable Gas Non-Flammable Gas
DOT LabelFLAMMABLE NON-FLAMMABLE FLAMMABLE NON-FLAMMABLE
GAS GAS GAS GAS
Specific Volume @STP0.755 m3/Kg 0.86 m3/Kg 12.0 m3/Kg 6.04 m3/Kg
12.1 ft3/lb 13.9 ft3/lb 191.3 ft3/lb 96.2 ft3/lb
Molecular Weight 32.13 g/mol 28.01 g/mol 2.02 g/mol 4.0 g/mol
CGA/DISS/JIS 350/632/W22-14L
TECHNICAL - SH
IP
SiH4 43.8 7.3 Cylinder internal volume, liters
Concentration QB/QF UB/UF Cylinder Size
Range (c) N2, H2, He N2, H2, He Balance Gas
50 ppm ≤ c < 15% 208 35
15% ≤ c <50% 167 28Content, cf (minimum, nominal)*
CYLINDER
Note on cylindersizes: Unless otherwisespecified, cylinders willbe provided as follows:
All mixes >1%: QF/UF
All mixes <1%: QB/UB
*please inquire for exact cylinder content
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Since 1985, Matheson Tri-Gas, Inc., NANOCHEM®
purifiers have provided unprecedented purificationsolutions to the electronic industry. NANOCHEM®
purifiers were the first point-of-use purifiers to deliverup to nine 9’s purity gas to the semiconductorindustry. Today, NANOCHEM® purifiers offercomprehensive solutions for the source, point-of-use,bulk and proximate purification requirements ofspecialty gas users.
NANOCHEM® purifiers combine gas-specificpurification media and ultra-high purity hardware inone system to eliminate impurities caused by:
• Upstream leaks• Improper cylinder change-outs• Increasing impurity concentration during gascylinder depletion
• Gas system component contamination• Virtual leaks from component / piping"dead pockets" and soft seats
NANOCHEM® purifiers offer the highest lifetimesand the best efficiencies for impurity removal.NANOCHEM® purifiers are available for:
• Silicon-source gases• Nitride gases• Etchants • Purge gases • Carrier gases
Oxygen, moisture and other contaminants areremoved to < 0.1 ppb (parts per billion) and arelimited only by the detection limits of even state-of-the-art analytical instrumentation.
Compact and easy to use, NANOCHEM® purifiers canbe installed within the gas cabinet or at the processtool. Most purifiers require no heating or coolingand are capable of handling a broad range of flowsand pressures.
Matheson Tri-Gas, Inc., has one of the mostextensive, in-house evaluation laboratories in theindustry to assess the quality of gas systemcomponents. The benefit is that componentsselected for NANOCHEM® purification products areof the highest quality available. "Live gas" testingis done to ensure purifiers meet or exceedperformance specifications in the specific processgas for which they are marketed.
Purification Performance Benefits
NANOCHEM® purifiers offer a number of benefits,such as reduced equipment downtime andprotection against fluctuations in gas supply qualityand upstream system upsets. Typical performancebenefits for the semiconductor / compoundsemiconductor industry are:
• Increased carrier concentration, increasedmobility
• Faster crystal growth rates • Improved uniformity of surfacemorphology
• Fewer defects in epi layers and substrates • Longer equipment life & reducedcomponent corrosion
NANOCHEM® Purifiers – a Brand You can Trust
72
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NANOCHEM® purification media have long been theindustry standards for purifying inert gases, such asnitrogen, argon, and sulfur hexafluoride, as well as reactivegases, such as hydrogen, hydrocarbons, and hydride gases(including ammonia, silane, arsine and phosphine).Applications include biotech, chemical processing,
aerospace, analytical, petroleum refining, andsemiconductor / compound semiconductor processes,including low temperature SiGe Epi, SiN and GaN MOCVDprocesses. Over ten (10) different purification media areavailable to purify about 35 different gases.
Gas Specific Purification
NANOCHEM® Media -- Gases Purified & Specifications
GASES CHEMICAL PURIFICATION PURIFICATION MEDIUM IMPURITIES END POINT PURIFIED FORMULA MEDIUM DESCRIPTION REMOVED EFFICIENCY DETECTIONInerts
Nitrogen N2
Argon Ar Helium He Xenon Xe
Krypton Kr Neon Ne
Flammables - Partial List
Methane CH4
Ethane C2H6
Cyclopropane C3H6
Propane C3H8
Butane C4H10
Hydrogen H2
Deuterium D2
Please contact customer service for other flammables, that can be purified.
Halocarbons - Partial ListCarbon Tetrafluoride CF4
Hexafluoroethane C2F6
Perfluoropropane C3F8
Please contact customer service for other halocarbons, that can be purified.
< 100 ppt, LDL
< 1 ppb< 100 ppt, LDL
< 100 ppt, LDL
< 100 ppt, LDL
< 1 ppb< 100 ppt, LDL
< 1 ppb< 100 ppt, LDL
< 1 ppb< 100 ppt, LDL
< 100 ppt, LDL
< 1 ppb< 100 ppt, LDL
< 1 ppb< 100 ppt, LDL
OMX-Plus™
HCX™
In2Go™
OMX-Plus™
OMX™
OMX-Plus™
HCX™
OMX-Plus™
OMX™
OMX™
Reactive agents on a polymeric supportw/ inorganic agent for NMHC removal
High surface area inorganic medium
Reactive agents on an inorganic support
Reactive agents on a polymeric supportw/inorganic agent for NMHC removal
Reactive agents on a polymeric support
Reactive agents on a polymeric supportw/inorganic agent for NMHC removal
High surface area inorganic medium
Reactive agents on a polymeric supportw/inorganic agent for NMHC removal
Reactive agents on a polymeric support
Reactive agents on a polymeric support
H2O, O2, CO2, THC except CH4
Halocarbons except CF4
CO at Low FlowHydrocarbons
except CH4
Halocarbons except CF4
H2O, O2, CO, CO2
THC except CH4
Halocarbons
H2O, O2, CO2, THC except CH4
Halocarbons except CF4
CO at Low FlowH2O, O2, CO2
CO at Low FlowH2O, O2, CO2,
THC except CH4
Halocarbons except CF4
CO at Low FlowHydrocarbons
except CH4,Halocarbons except CF4
H2O, O2, CO2, THC except CH4 &Other Halocarbons
CO at Low FlowH2O, O2, CO2
COH2O, O2, CO2
DC only
Not available
DC only
DC only
DC only
DC only
Not available
DC only
DC only
DC only
ppb = Part per billionppt = Part per trillionTHC = Total HydrocarbonsLDL = Lower Limit of Detection by state-of-the-art analytical instrumentation.Please contact customer service for other gases not included in this list
{{{
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NANOCHEM® Media -- Gases Purified & Specifications (continued)
GASES CHEMICAL PURIFICATION PURIFICATION MEDIUM IMPURITIES END POINT PURIFIED FORMULA MEDIUM DESCRIPTION REMOVED EFFICIENCY DETECTIONHydrides
Ammonia NH3
Silane SiH4
Arsine AsH3
Phosphine PH3
Hydride/Inert Mixes (N2, Ar, He, Xe, Kr, Ne, & H2)1-10% Arsine AsH3
1-10% Germane GeH4
1-10% Phosphine PH3
CorrosivesBoron Trichloride BCl3
Chlorine Cl2
Silicon Tetrachloride SiCl4
Trichlorosilane SiHCl3
Dichlorosilane SiH2Cl2
Hydrogen Bromide HBr Hydrogen Chloride HCl
OthersCarbon Monoxide CO
Nitric Oxide NO
Carbon Dioxide CO2
Nitrous Oxide N2O
Oxygen O2
Dimethyl Ether (CH3)2OSulfur Hexafluoride SF6
ppb = Part per billionppt = Part per trillionTHC = Total HydrocarbonsLDL = Lower Limit of Detection by state-of-the-art analytical instrumentation.Please contact customer service for other gases not included in this list
H2O, O2, CO2 < 1 ppb
H2O < 100 ppb, LDL Volatile Metals-Fe, Mo, Cr, Ti, Ni, Mn
H2O < 100 ppb, LDLVolatile Metals-Fe, Mo, Cr, Ti, Ni, Mn
H2O < 10 ppbHydrocarbons < 100 ppt, LDL
except CH4
Halocarbons except CF4
H2O < 10 ppbH2O, O2, CO2 < 100 ppt, LDL
H2O, O2 < 10 ppb, LDL
Reactive agents on a polymeric support
High purity high surface area inorganicmedium
High purity high surface area inorganicmedium
High surface area inorganic mediumHigh surface area inorganic medium
High surface area inorganic mediumReactive agents on a polymeric supportReactive agents on a polymeric support
OMX™
Metal-X™
Metal-X™
OPX™HCX™
OPXOMX™OMS™
Not available
Not available
Not available
Not available Not available
Not availableDC onlyDC only
{
< 45 ppb, LDL< 11 ppb, LDL< 50 ppb, LDL< 1 ppb, LDL< 3 ppb, LDL
< 40 ppb, LDL< 100 ppt, LDL
< 100 ppb, LDL< 100 ppt, LDL
In2Go™
OMA™
OMX™ASX-II™PHX™
Reactive agents on an inorganic support
Reactive agents on a polymeric support
Reactive agents on a polymeric supportHigh surface are inorganic medium
Reactive agents on an inorganic support
H2OCO2
O2
GeH4
SiH4
TEOSH2O, O2, CO2 in inert
gas, LDLH2O in ammonia, LDL
H2O, O2, CO2, CO
DC only
DC only
DC only Not availableNot available
< 75 ppb H2O in AsH3, LDL< 33 ppb H2O in PH3, LDL
{
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1. Purge gas purification ensures thatcylinder changes do not contaminatethe process lines and that the purestpurge gas is used.
2. Source gas purification of corrosivegases ensures that cylinder moisturedoes not corrode the purge manifold,distribution or process lines.
3. Proximate gas purification allowseconomical purification with a singlesource purifier for multi-toolapplications.
4. Point-of-connection gas purificationensures process gas consistency forlarger flow applications.
5. Point-of-use gas purificationeliminates virtually all variables ofcontamination including gas junglevariables. Typical location would bedirectly before the chamber or massflow controller.
6. Bulk gas purification offerseconomical purification to a centralarea or entire facility.
7. Replacement purifiers forreplacement of other brand purifiers,previously installed.
Purification Applications - Where to Use Purification
* Drop-In Replacement with identical dimensions
76
A-Series• For 100% arsine & phosphine service• For use in ASM & Matheson Tri-GasSideCar™ custom purification cabinet
• Up to 20 slpm (1.2 NM3/hr) in AsH3/PH3
service • Up to 60 psig (0.4 MPa) in AsH3/PH3
service• Up to 150 slpm (9 NM3/hr) in inert gasservice
• Up to 500 psig (3.5 MPa) in inert gasservice
• Millipore Drop-In Replacement Design
White Knight Series™• Aeronex Drop-In Replacement Design• Up to 1000 slpm (60 NM3/hr)• Up to 500 psig (3.5 MPa) • Optional poppet valves• Optional inlet & outlet valves
BULK PurificationP-Series• Up to 400 slpm (24 NM3/hr)• Up to 150 psig (1.1 MPa) with end-point• Up to 350 psig (2.5 MPa) withoutend-point
• Optional bypass manifold • Optional vented CE enclosure
Megashield™ (MS-Series)• Up to 1000-1500 slpm (60-90 NM3/hr)• Up to 150 psig (1.1 MPa) with end-point• Up to 350 psig (2.5 MPa) without end-point
• Optional bypass manifold
HIGH PRESSURE Purification (Source)HP-Series• For installation after cylinder CGAconnection
• Reduce manifold corrosion with corrosivegases
• Up to 2,850 psig (19.7 MPa)• Flow rates up to 50 slpm (3 NM3/hr)• Built-in 1-Valve Bypass – HP Series
NOTE: 0.003 µ filter with 9-log retention standard on mostpurifier models.Optional on L-60, P-16000, P-32000, MS-Series.
Purifier Models
POINT-OF-USE PurificationMiniSentry™• Up to 1 slpm (0.06 NM3/hr)• 3000 psig (20.8 MPa) rating• Diffusion barrier limits exposure toatmosphere during installation
PuriFilter®
• Up to 3 slpm (0.18 NM3/hr)• 1000 psig (7 MPa) rating• Poppet valves limit exposure to atmosphereduring installation
Bloc® Purifier• Up to 20 slpm (1.2 NM3/hr)• 150 psig (1.1 MPa) rating• Doc acts as stand-alone particulate filter• Enables future installation of purifier• All-metal C, W, Z Seals• Poppet valves limit exposure to atmosphereduring installation
PROXIMATE Purification (Larger Flow than POU)
L-Series, J-Series• Up to 150 slpm (9 NM3/hr) • Inlet / outlet valves• Optional 3-valve Bypass• End-point detection at no extra charge• 150 psig (1.1 MPa) with end-point • 500 psig (3.5 MPa) without end-point • J-Series with Fujikin valves
C-Series, CL-Series, H-Series• Ultra-clean construction• C-Series with exhausted enclosure forflammable gas service
• Built-in 1-valve bypass• Up to 50 slpm (3 NM3/hr) with H-Series• Up to 150 slpm (9 NM3/hr) withC-Series• Endpoint detection at no extra charge• 150 psig (1.1 MPa) with end-point • 500 psig (3.5 MPa) without end-point
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