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http://www.mathesontrigas.com/edge/ Semiconductor Products Catalog V 4.0/SpecRev4.2.1

Table of Contents

High Pressure Gases:Chemical Name –

Page Halocarbon Denomination Formula17 Ammonia NH3

18 Argon Ar19 Arsine AsH3

20 Boron Trichloride BCl321 Boron Trifluoride BF3

22 Carbon Dioxide CO2

23 Carbon Monoxide CO24 Chlorine Cl225 Deuterium D2

26 Dichlorosilane SiH2Cl227 Disilane Si2H6

28 Germane GeH4

29 Halocarbon 14 CF4

30 Halocarbon 23 CHF3

31 Halocarbon 32 CH2F2

32 Halocarbon 41 CH3F33 Halocarbon 116 C2F6

34 Halocarbon 218 C3F8

35 Halocarbon c318 C4F8



38 Helium He39 Hydrogen H2

40 Hydrogen Bromide HBr41 Hydrogen Chloride HCl42 Hydrogen Fluoride HF43 Krypton Kr44 Methane CH4

45 Methyl Silane SiH3CH3

46 Neon Ne47 Nitric Oxide NO48 Nitrogen N2

49 Nitrogen Trifluoride NF3

50 Nitrous Oxide N2O51 Oxygen O2

52 Phosphine PH3

53 Propylene C3H6

54 Silane SiH4

55 Silcore Si3H8

56 Silicon Tetrachloride SiCl457 Silicon Tetrafluoride SiF4

58 Sulfur Hexafluoride SF6

59 Trichlorosilane SiHCl360 Tungsten Hexafluoride WF6

61 Xenon Xe

Page SDS62 Arsine63 11Boron Trifluoride64 Germanium Tetrafluoride65 Phosphine66 Silicon Tetrafluoride

Page Gas Mixtures67 General Information68 Arsine in N2, H2, He69 Diborane in N2, H2, He70 Phosphine in N2, H2, He71 Silane in N2, H2, He

Page Purification Equipment72-76 Nanochem Purifiers

All information reported in this catalog is intended forreference use only. This publication is intended to provideaccurate information in regard to the subject matter coveredand has been obtained or developed from sources believed tobe reliable such as the coefficients and equations reported byC.L. Yaws and S.N. Naphad in Appendix 5 of Matheson GasData Book, 7th Edition, 2001. Of necessity the information isabbreviated and other information, training and/or education isrequired of the user of this information. Accordingly,Matheson Tri-Gas, Inc. makes no warrantees, guarantees orrepresentations of any kind or nature with respect to theinformation published herein, either express or implied, andwhether arising by law or otherwise, including but not limitedto any implied warranty of merchantability or fitness for anyparticular purpose, and shall not be responsible for any errors,omissions, or damages arising out of use of this information.Matheson shall in no event be liable for any personal injuries,property or other damages of any nature whatsoever, whetherspecial, indirect, consequential or compensatory, directly orindirectly resulting from the publication, use of, or relianceupon the information.

Cylinder dimensions, contents and related data are reported asnominal.

Units: Reported as follows:ppm(*): parts per millionppb(*): parts per billionppt(*): parts per trillion(*)=w: by weight(*)=v: by volume(*)=a: atomic

Purity for all Semiconductor gases is reported as % by Volume, unless otherwise specified.

Please inquire about Pure Gases not reported in the following listings.

Page2-16 Introduction

IntroductionCorporate Overview

2

An Industry Pioneer

Over 80 Years of Experience

In 1927 Matheson Gas Products becamethe first company to offer a reliablesource of high quality scientific gasesand equipment. From the start,Mathesonasserted itsleadership byunderstandingspecialty gasapplicationsand providingproductsspeciallydesigned for these applications. Someof Matheson's more notableaccomplishments include the

Matheson Tri-Gas' Semi-Gas® brand of products has the largestinstalled base of gas handling equipment worldwide. Combinedwith its NANOCHEM® specialty gas purification technology, systemsengineering and comprehensive site management services,Matheson Tri-Gas offers a total integrated solution to itssemiconductor customers.

Matheson Tri-Gas' LabGas Systems® brand of products offers theanalytical laboratory environment a completely integrated solutionfor the proper control and distribution of gas from the "source" tothe "point-of-use."

Tri-CareTM, comprehensive medical gas management programoffered by Matheson Tri-Gas, encompasses all facets of bulk andcylinder gases, cylinder asset management, total quality assuranceand cylinder distribution and safety for the health care industry.

the world’s first commercially produced silane,an accomplishment that earned the industry’sprestigious "SEMMY" Award.

In 1999 Matheson Gas Products merged withTri-Gas, Inc., to form Matheson Tri-Gas. Thismerger combined the analytical andsemiconductor strengths of Matheson GasProducts with the liquid/bulk and industrialcylinder and equipment capabilities of Tri-Gas.As a member of the Tokyo based TaiyoNippon Sanso Corporation (TNSC), MathesonTri-Gas is part of the world’s largest supplierof gases and gas handling equipment.

development of the lecture bottle, nowused by virtually every major college anduniversity in the world, and the supply ofultra pure gases that served as standardsfor the first gas chromatographs.

Matheson's gases also helped forge themost important tool of our era, theintegrated circuit. From the early days ofthe transistor, Matheson was thereproviding the arsine and phosphinewhich made production possible. Astransistors gave way to complexsemiconductor chips, Matheson provided

Total Integrated Solutions

Today, Matheson Tri-Gas remainsan industry leader by deliveringtotal integrated gas solutions.Beyond specialty gases, MathesonTri-Gas offers a broad line ofindustry-proven technologies forthe delivery and purification ofprocess and specialty gases. Weprovide everything from on site airseparation plants to portablecylinders and all the servicesrequired to support these productsand customer applications.Matheson Tri-Gas is positioned toprovide technically superior and innovative products and servicestailored specifically to meet the needs of the semiconductor, analyticaland industrial markets.

Matheson Tri-Gas has continued to developunique products designed to meet themarket needs of our semiconductor,analytical and industrial customers:


3

Worldwide Capabilities

Matheson Tri-Gas and TNSCprovide a network ofmanufacturing, customer serviceand distribution facilities thatstand ready to ensure a reliablesupply of specialty gases and gashandling equipment. With sitesworldwide, Matheson Tri-Gasproducts can be found in everymajor integrated circuit plant andR&D facilities in North America,Europe and Asia.

The Science of Specialty Gases

Specialty gases play a critical role in analytical and processapplications. With so much at stake, Matheson Tri-Gas offersexcellence in five distinct areas to deliver the highest qualityproduct.

• Raw Materials Selection

As the world’s first specialty gas company, Matheson Tri-Gas hasthe expertise required to select the appropriate raw materials forthe intended product. Acceptance criteria are based on theimpact to the process and product. Non-compliant rawmaterials are rejected. In addition, Matheson Tri-Gas' suppliersare audited on a regular basis and required to meet certificationrequirements.

• Manufacturing

Once the quality requirements of the raw materials are satisfied,Matheson Tri-Gas uses the latest manufacturing, purification andfiltration techniques to produce gases that meet the needs ofthe semiconductor and analytical industries. Matheson Tri-Gashas developed dedicated purification procedures forsemiconductor grade gases that are designed to producerequired purity levels.

Each process is optimized for the specific gas to be purified andcombines high quality filtration with low temperature distillationand gas phase partitioning.

• Mixtures

Volumetric, gravimetric and partial pressure methods are usedfor precise mixing of component gases. In addition, highlyaccurate pressure gauges and specially designed and preciselycalibrated scales are used to ensure proper composition. Finally,mixtures are made homogenous by specialized rolling sequencesdesigned by Matheson Tri-Gas engineers to ensure completeblending.

• Packaging

The handling and treatment of cylinders is key to MathesonTri-Gas' success in specialty gas. Cylinders are prepared using aproprietary treatment designed to remove any moisture,atmospheric and particle contamination. Valves are chosenbased on the specific application. Compatibility of materials,level of purity required and cost impact are included in thedecision making process.

• Analysis

Prior to shipping, Matheson Tri-Gas certifies the quality of all ofits specialty gases to ensure that all of the products meet thecustomer’s specifications. Each sampling program has beendesigned to provide sound statistical evidence of product purity.The analytical methods employed are consistent with the bestavailable techniques as defined by Semi Standards and currentindustry practices.

Matheson Tri-Gas has specialty gas production facilities locatedthroughout the US:


4

QualityWith the increased cost of "poor quality" in industry today, qualityand consistency become paramount. Matheson Tri-Gas provides afull line of specialty gases and equipment to meet the specificationfor each impurity analyzed. To ensure product consistency andintegrity, all of Matheson Tri-Gas production processes, materialsand analytical tools are managed using statistical control methods.In addition, Matheson Tri-Gas measures its quality system againstISO 9000 series standards.

Research & DevelopmentAt Matheson Tri-Gas, service does not end at the customer’sreceiving dock. Assisting in process and product development isan essential part of the Matheson Tri-Gas offering. By beta-sitetesting new products prior to introduction, Matheson Tri-Gasmaintains a leadership position in providing a global offering offield proven specialty gas and equipment solutions. In addition, astaff of scientists and engineers continually interacts withcustomers to improve material specifications and suggest processimprovements. This results in Matheson Tri-Gas customersachieving the greatest benefit from Matheson Tri-Gas capabilities.

The Matheson Tri-Gas charter is to develop the highest puritymaterials with accurate specifications for metallic and particulateimpurities and the specialized gas handling equipment to ensurepurity. Focusing on developing advancements in new materialsand analytical and production techniques, Matheson Tri-Gasdelivers statically proven process control, state-of-the-art packagingand the ultimate in analytical procedures and equipment.

Matheson Tri-Gas research has led to the continual introduction ofnew products such as:

• ULTIMATM Gases: 99.9999+% purity and guaranteedlow metals content.

• SDS® Safe Delivery Source, a unique approach to thedelivery of arsine, phosphine and enriched borontrifluoride for ion implantation.

• Novel purification media for 33 new gases.

Committed to quality manufacturing and purification processes,Matheson Tri-Gas is dedicated to delivering customer satisfactionby offering total innovative solutions for high purity gases and gashandling requirements.

Advanced Technology Center, Longmont, CO. Matheson Tri-Gas’state-of-the-art primary research and development facility.

Matheson Tri-Gas' Quality Policy

• Quality is meeting the customer’s requirements andexpectations.

• Build quality into every product and service, rather thaninspect it in.

• Continuous improvement requires the participation of allemployees.

• Quality and fitness for purpose are the true measures ofvalue.

The Matheson Tri-Gas family of SDS® Cylinders.


5

Furthermore, Matheson Tri-Gas isdedicated to enhancing its customers’success by understanding processrequirements and providing value addedsolutions. In addition to the supply ofprocess gases, Matheson Tri-Gas standsready to assist in every phase of specialtygas selection and delivery including:

• Process Piping and DistributionDesign

• Applications Engineering

• Turn-Key Installations

• On-Site Services

• Global Distribution and Sales

These capabilities enable Matheson Tri-Gasto deliver truly comprehensive solutions toimprove overall equipment efficiency andprocess yields.

From the beginning, Matheson Tri-Gas’objective has been to help customers stayabreast of rapid advances in technology bydeveloping custom-tailored products thatmeet the dynamic needs of the industrial,analytical and semiconductor industries.Dedicating resources in new productdevelopment, production, delivery,technical support, and customer service,Matheson Tri-Gas stands ready to deliverthe highest value in the supply of specialtygas solutions worldwide.

Product LineThe semiconductor and analyticalindustries depend on the reliable supply ofhigh-purity process gases and gas handlingequipment to maintain efficientproduction and high yields. In response tothis need, Matheson Tri-Gas offersinnovative application-specific solutions.

Utilizing extensive experience in thespecialty gas business, Matheson Tri-Gashas the processes employed in themanufacturing and the purification ofspecialty gases to produce products whichprovide the most value to its customers.The state-of-the art facility in Gloucester,Massachusetts in just one example. Thisautomated filling operation produces highpurity process gases in a carefullycontrolled environment designed tominimize impurities.

To further ensure purity, Matheson Tri-Gasspecifically designed the ULTRA-LINE®

family of cylinders to maintain theintegrity of the gas. A specific treatmentis applied to the cylinder’s interior wallsthat reduces particulates and othercontaminants. ULTRA-LINE®‚ cylindershave been proven to enhance productstability and extended shelf life.

With the ability to provide customizedmixes and container configurationstailored to meet specific productapplications, Matheson Tri-Gas offers acomprehensive line of specialty gases tothe semiconductor and analyticalindustries.

Matheson Tri-Gas also offers the mostextensive line of gas handling equipmentin the specialty gas industry. Products aredesigned and manufactured at theEquipment Technology Center inMontgomeryville, PA. This 85,000 sq. ft.facility features 4000 sq.ft. of Class 10Protocol clean room space and 30,000sq.ft. of manufacturing space.

Automated Filling Operation,Gloucester, MA. A computer integrated

manufacturing (CIM) environmentdesigned to reduce metal contaminants

and particulates to an absoluteminimum.

Clean room product assembly atEquipment Technology Center,

Montgomeryville, PA.

IntroductionSafety Information

6

Prior to Purchasing Any Compressed Gas:Familiarize all personnel handling any compressed gases with theprocedures recommended in the Material Safety Data Sheet(MSDS), as well as the latest edition of Matheson publicationsGuide to Safe Handling of Compressed Gases, Effects of Exposure toToxic Gases, and Compressed Gas Association's CGA P-1-1991titled "Safe Handling of Compressed Gases in Containers.”

Provide proper instruction and training for all personnel handlingcompressed gases.

Identify and set up a safe and secure area for cylinder inventory.It should be well isolated from working areas and well ventilated.

Isolate a separate area for storing cylinders to be returned toMatheson. Inspect this area routinely to confirm that there are noproblem cylinders that must be attended to between routine pickup periods.

Minimize potential problems associated with hazardous gases byordering the smallest quantity required.

When the Gas Cylinders Arrive at Your Company:Inspect each incoming cylinder to ensure that it is free of leaksand contains the correct product.

Review the current Material Safety Data Sheet (MSDS) providedwith the product.

Store cylinders in an upright position.

Move cylinders in a safe manner using an approved cylinderhand truck with straps and chains.

Secure all cylinders properly while in use and during storage.

Valve plugs and caps are safety devices which need to be safelystored after removing so they can be replaced when the cylinderis ready to be returned to Matheson.

Monitor all cylinder storage areas and locations where cylindersare in use for leaking gases. Use gas detection apparatus designedfor the particular requirement.

Be thoroughly familiar with all emergency procedures andequipment necessary to deal with leaking cylinders and controlequipment. (Fire extinguishers, breathing apparatus, etc.)

Use control equipment recommended for the gas product. (Seethe equipment recommendation listing after each gas and mixtureproduct in the catalog)

• Cylinders containing flammable gases and mixturesshould be properly grounded.

• Control equipment for oxidizing gases and mixturesmust be free of any non-oxidant compatible lubricant,i.e., petroleum-based oils and greases.

• Use proper check valves and purge venting with allhydroscopic corrosive gases.

When Cylinders Are Empty, or Partially Full and No LongerNeeded:Whenever the pressure of the compressed gas in a cylinder isreduced to the minimum required working pressure, close thecylinder valve before detaching from the apparatus and relievepressure in all connecting lines and control equipment in a safemanner.

Replace valve outlet plugs or caps and cylinder valve protectioncaps.

Disconnect cylinders from securing clamps.

Move cylinders to the proper storage location using an approvedcylinder hand truck with straps and chains.

When cylinders are no longer needed they should be returned toMatheson as soon as possible, classified, marked, and labeled asoriginally shipped.

If a Problem Should Occur:Unfortunately, accidents do sometimes occur. When an accidenthappens, will you be prepared? By following a few simpleguidelines it is our sincere hope that you will be better prepared todeal with any emergency situations involving compressed gases.

Pre-Emergency PlanningBe prepared. Dealing with compressed gas emergencies beginswith planning. An emergency response plan should be developedfor the facility. As a minimum, the plan should include:

• Emergency telephone numbers• Emergency response organizational charts• Emergency procedures• Listing of key personnel• Training schedules and documentation• Hazardous materials lists (including storage locations,

quantities, etc.)• Emergency response equipment lists• Facility maps• Evacuation routes

In addition to the above, be sure that local emergency services (firedepartment, emergency medical services, police and hazardousmaterials response teams) are aware of the hazardous materials atyour facility, their location and their hazards.

Response GuidelinesThe following guidelines are based on the four general compressedgas hazard categories: inert, flammable, corrosive and toxic, andshould be used in preparing your specific emergency responseprocedures.

These guidelines should be used to assist you in making decisionsand they are not intended to serve as a substitute for your ownknowledge or judgment. They provide only the most basicinformation and may not be adequate or applicable in allsituations.

You are advised to consult local fire codes and federal and stateenvironmental regulations OSHA, SARA, RCRA . . . etc.

FireConsult the most current version of the MSDS for the product.The MSDS contains information and procedures to follow if a fireshould occur. Some of these procedures can include the following:

• Let burn unless leak can be stopped immediately• Small Fires: Dry chemical or CO2 extinguishers• Large Fires: Water spray, fog or foam extinguishers• Move container from fire area if you can do it without risk• Stay away from ends of tanks

IntroductionSafety Information

7

In the Event of an Incident• Sound an alarm• Evacuate personnel• Shut down equipment• Determine nature of incident---leak, fire, spill, etc.• Determine what gases are involved and type of

containers• Activate your emergency response plan

Emergency Action• Will vary depending on nature of incident and types of

materials involved• If types of materials involved are known---MSDS's

should be consulted to determine the potential hazards.Example: flammable, poison, oxidizer . . . etc.

• Keep unnecessary people away; isolate hazard area anddeny entry

• Stay upwind; keep out of low areas• Wear positive pressure breathing apparatus and full

protective clothing• Evacuate area endangered by gas• Also, in case of water pollution, call local authorities

24-Hour Emergency AssistanceIf you should have an emergency involving any Mathesonproduct, we can be reached through CHEMTREC, the ChemicalTransportation Emergency Center in Washington, DC, at1-800-424-9300.If you are located in Canada, call (613) 996-6666. CANUTECoperates 24 hours per day, seven days per week to provideemergency response information and get expert help on theway.When you call CHEMTREC, be sure to have the followinginformation ready:

• Name of caller and call-back number• Nature and location of the problem• Shipper or manufacturer• Container type• Placard/Label applied• Accessibility• Weather conditions• Local population information• Topographic features• Availability of water

• Cool containers that are exposed to flames with water from theside until well after fire is out

• For massive fire in cargo area, use unmanned hose holder ormonitor nozzles

• If this is impossible, withdraw from area and let fire burn• Withdraw immediately in case of rising sound from venting safety

device or discoloration of tank may be ignited by heat, sparks andflames

• Flammable vapor may spread away from spill• Container may explode in heat of fire• There may exist a risk of vapor explosion and poison hazard

indoors, outdoors, or in sewers• Some of these materials may burn but do not ignite readily• May ignite combustibles (wood, paper, oil, etc.)• Mixture with fuels may explode

Health HazardsConsult the most current version of the MSDS for Hazard identificationand Toxicity information. Some of the Hazard identifications can includethe following:

• May be fatal if inhaled, swallowed or absorbed through skin• Contact may cause burns to skin and eyes• Contact with liquid may cause frostbite• Runoff from fire control or dilution water may cause pollution• Vapors may cause dizziness or suffocation• Fire may produce irritating or poisonous gases

Spill or LeakConsult the most current version of the MSDS for accidental releasemeasures, disposal considerations and ecological information.Accidental release measures can include the following:

• Stop leak if you can do it without risk• No flares, smoking or flames in hazard area• Do not touch spilled materials• Use water spray to reduce vapors• Isolate area until gas has dispersed• Keep combustibles (wood, paper, oil, etc.) away from spilled

material

First AidConsult the most current version of the MSDS sheet for First Aidmeasures, which can include the following:

• Move victim to fresh air, call emergency medical care• If not breathing, give artificial respiration• If breathing is difficult, give oxygen• Remove and isolate contaminated clothing and shoes• In case of contact with material, immediately flush skin or eyes

with running water for at least 15 minutes• Keep victim quiet and maintain normal body temperature• Effects may be delayed, keep victim under observation

IntroductionCylinder Information

8

The gases and mixtures described in this catalog are shipped incarefully constructed cylinders that meet or exceed U.S.Department of Transportation or Transport Canada specifications.

Many small laboratory size cylinders of hazardous liquefied gasesare filled below the U.S. D.O.T. approved capacity to provide anextra margin of safety if the cylinders are exposed to hightemperatures. (Nevertheless, cylinders should never be exposedto temperatures higher than 125 degrees F. / 51.7 degrees C.)

All cylinders are identified by gas name (by stencil or label) andtagged for ready identification and basic hazardous warninginformation. All gases are supplied with valves havingCompressed Gas Association (CGA) approved outlet connections.

The Matheson Cylinder Specification Selection Guide on the nextpage lists the nominal dimensions and tare weights of allcylinders presently in use. The cylinder drawings reported laterindicate the relative size of the cylinders to each other.

Product(s) must not be used without first consulting the MaterialSafety Data Sheet(s). The purchaser and/or user is responsible toinstruct its employees, agents and representatives to strictlycomply with all applicable federal, state and local statutes,regulations and orders regarding the safe handling, transportationand use of the products. In consideration of the hazardous natureof a product(s) the purchaser and/or user are responsible towarn, protect, and train, as appropriate, all employees, customers,and other persons who may be exposed to those hazards.Matheson provides all relevant Material Safety Data Sheet(s) andadditional Material Safety Data Sheets are available upon request.The purchaser and/or user is aware that OSHA regulations mayrequire the purchaser and/or user to develop and implement awritten chemical hazard communications program for employees,customers and/or others with respect to the product(s). It is thepurchaser and/or user responsibility to ensure that all employees,customers, and other persons who might become exposed to theproduct(s) receive and refer to copies of the Material Safety DataSheet(s).

Return of CylindersBefore being offered for transportation, cylinders must have allvalve openings tightly closed. If outlet caps or plugs have beenprovided, these must be securely tightened to the cylinder valveoutlet. All transport caps must be in place and securely tightened.

All cylinders must be marked, labeled and shipped to conformwith all applicable parts of the 49th Chapter of the Code ofFederal Regulations (49CFR) which are the rules and regulationsof the United States Department of Transportation.

WarningOnly cylinders belonging to or having been filled by Mathesonwill be accepted at Matheson Plants. Matheson reserves theright to refuse complete shipments containing cylinders ownedby others. If there are any questions on Matheson cylinderidentification, please contact Matheson for assistance.

Federal law prohibits the improper discarding of a cylinder or thecylinder contents. All returnable cylinders should be returnedprepaid to your nearest Matheson facility. If returned collect,freight charges will be deducted from any credit due.

D.O.T. regulations do not permit our or any vendor ownedcylinders to be refilled without the owner's permission.

Do not allow foreign substances to enter the cylinder or cylindervalve. Specific protection devices are included in this catalog. Iffurther information is needed, contact Matheson.

If contamination takes place, please call Matheson for instructionson how to label and return the cylinder. Cylinders should bereturned with some positive pressure, with the valves tightlyclosed and the transport caps and outlet caps or plugs in place, toprevent contamination and damage to the valve.

Refilling Customer Owned CylindersMatheson will refill customer owned cylinders subject toD.O.T./T.C. regulations and our own safety requirements.Matheson will not be responsible for lost cylinders if properarrangements have not been made before shipping your cylindersto us.

Cylinder Comparison Chart

Nominal InternalMatheson Dimensions Volume Material of Air AirTri-Gas (inches) (liters) Construction Products Liquide BOC Praxair Scott Solkatronic

QK 10x55 49 C A 49 300 UCT K 49

QA 9x51 43.8 C B 44 200 K A 44

QX 8x48 29.5 A B(AL) 30AL 150A AS AL 29

GA 9x26 17.1 C C 16 80 Q B 16

GX 7x33 15.7 A C(AL) 22AL 16A AQ BL --

UA 6x19 7.3 C D-1 7 30 G C 7

UX 7x16 5.9 A D-1(AL) 7AL 30A AG CL --

JA 4x13 2.3 C D 3 12 F D 3


9

Semiconductor Gases Cylinder Chart

***Material of ConstructionC = Carbon Steel S = Stainless Steel B = Brass H = HastelloyA = Aluminum ASB = Aluminum Silicon Bronze N= Nickel NLC = Nickel-Lined Carbon Steel

Nominal Dimensions* Material ofInternal Volume Diameter x Height Construction*** Tare Weight** Water Capacity

Cylinder cubic ft. liters in cm Cylinder Valve lbs kg lbs kg

QI ULTRA-LINE® II 15.5 439 24 x 83 61 x 211 C ASB/S 1217 552 968 439

XE ULTRA-LINE® 7.47 211.7 24 x 45 61 x 114 S S 243 110 465.6 211.7

QK ULTRA-LINE® 1.73 49 10 x 55/56.5/60 25 x 140/144/153 C S 138 63 108 49

QZ ULTRA-LINE® 1.7 47.5 10 x 54/55.5/59 25 x 137/141/150 A S 92.1 41.8 104 47.5

QY ULTRA-LINE® 1.6 46.4 10 x 52/53.5/57 25 x 132/136/145 A S/B 89.6 40.7 102 46.4

QA ULTRA-LINE® 1.55 43.8 9 x 51/52.5/56 23 x 130/134/143 C B 115 52 96.4 43.8

QB ULTRA-LINE® II 1.55 43.8 9 x 51/52.5/56 23 x 130/134/143 C S/H 115 52 96.4 43.8

QF ULTRA-LINE® 1.55 43.8 9 x 51/52.5/56 23 x 130/134/143 C S/H 115 52 96.4 43.8

QN ULTRA-LINE® 1.55 43.8 9 x 51/52.5/56 23 x 130/134/143 NLC S/H 115 52 96.4 43.8

QL ULTRA-LINE® 1.45 41 9 x 45/46.5/50 23 x 114/118/127 S S 42 19 90 41

QE ULTRA-LINE® 1.35 38.4 12 x 30/31.5/35 30 x 76/80/89 S S 75 34 84.5 38.4

QH ULTRA-LINE® 1.04 29.5 8 x 48/49.5/53 20 x 122/126/135 A S 48 22 65 29.5

QX ULTRA-LINE® 1.04 29.5 8 x 48/49.5/53 20 x 122/126/135 A B 48 22 65 29.5

GC ULTRA-LINE® 0.85 24 9 x 30/31.5 23 x 76/80 NLC N 82 37.3 53 24

QM ULTRA-LINE® 0.665 18.8 7 x 45/50.5 18 x 114/128 N N 88 39 41.5 18.8

GA ULTRA-LINE® 0.6 17.1 9 x 26/27.5/31 23 x 66/70/79 C B 44 20 37.7 17.1

GB ULTRA-LINE® II 0.6 17.1 9 x 26/27.5/31 23 x 66/70/79 C S/H 44 20 37.7 17.1

GF ULTRA-LINE® 0.6 17.1 9 x 26/27.5/31 23 x 66/70/79 C S/H 44 20 37.7 17.1

GH ULTRA-LINE® 0.28 8 7 x 27/28.5 18 x 69/73 N N 48 21 17.6 8

UA ULTRA-LINE® 0.26 7.3 6 x 19/20.5/24 15 x 51/55/64 C B 20 9 16.1 7.3

UD ULTRA-LINE® II 0.26 7.3 6 x 19/20.5/24 15 x 51/55/64 C S/H 20 9 16.1 7.3

UF ULTRA-LINE® 0.26 7.3 6 x 19/20.5/24 15 x 51/55/64 C S/H 20 9 16.1 7.3

UH ULTRA-LINE® 0.21 5.9 7 x 16/17.5/21 18 x 41/45/54 A S 15.1 7 13 5.9

JD ULTRA-LINE® 0.15 4.2 4 x 27/28.5 10 x 29/33 N N 14 6 9.3 4.2

JA ULTRA-LINE® 0.08 2.3 4 x 13/14.5/18 10 x 33/37/46 C B 6.6 3 5 2.3

JB ULTRA-LINE® II 0.08 2.3 4 x 13/14.5/18 10 x 33/37/46 C S 6.6 3 5 2.3

JF ULTRA-LINE® 0.08 2.3 4 x 13/14.5/18 10 x 33/37/46 C S 6.6 3 5 2.3

JY ULTRA-LINE® 0.08 2.2 4 x 13/14.5/18 10 x 33/37/46 C S 6.6 3 4.9 2.2

WA ULTRA-LINE® II 0.04 1.1 3.5 x 12/13.5 9 x 30/34 N N 8 3.7 2.7 1.2

WB ULTRA-LINE® II 0.02 0.55 2 x 14/15.5 5 x 36/40 N N 5 2.1 0.9 0.4

SA ULTRA-LINE® 0.016 0.44 2 x 12/13.5/17 5 x 30/34/43 C B 2.2 1 1 0.4

SF ULTRA-LINE® 0.016 0.44 2 x 12/13.5/17 5 x 30/34/43 C S 2.2 1 1 0.4

WY ULTRA-LINE® 0.1 0.4 2 x 12/13.5/17 5 x 30/34/43 C S 2.2 1 1 0.4

*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheel**Excluding cap and cylinder valve


10

Cylinder Diagrams


11

Cylinder Diagrams (continued)


12

The drawings of valve outlets and connections shown on theseintroductory pages are those now in use by Matheson Tri-Gas and incommon use by the compressed gas industry. Whenever possible,valve outlets standardized by the Compressed Gas Association andaccepted by the American National Standards Institute are used.

CGAValve Outlet& Conn. No.

Gas CGA/DISS

Ammonia 660/720

Argon 580/718

Arsine 350/632

Boron Trichloride 660/634

Boron Trifluoride 330/642

Carbon Dioxide 320/716

Carbon Monoxide 350/724

Chlorine 660/728

Deuterium 350/724

Dichlorosilane 678/636

Disilane 350/632

Germane 350/632

Halocarbon 14 (Tetrafluoromethane) 320/716

Halocarbon 23 (Fluoroform) 660/716

Halocarbon 32 (Difluoromethane) 350/724

Halocarbon 41 (Methyl Fluoride) 350/724

Halocarbon 4110 (Octafluorocyclopentene) 660/716

Halocarbon 116 (Hexafluoroethane) 660/716

Halocarbon 218 (Perfluoropropane) 660/716

Halocarbon c-318 (Octafluorocyclobutane) 660/716

Halocarbon 1216 (Hexafluoropropylene) 660/716

Helium 580/718

Hydrogen 350/724

Hydrogen Bromide 330/634

Hydrogen Chloride 330/634

Hydrogen Fluoride 660/638

Krypton 580/718

Methane 350/724

Methylsilane 350/632

Neon 580/718

Nitric Oxide 660/728

Nitrogen 580/718

Nitrogen Trifluoride 670/640

Nitrous Oxide 326/712

Oxygen 540/714

Phosphine 350/632

Silane 350/632

Silcore (Trisilane) 350/632

Silicon Tetrafluoride 330/642

Sulfur Hexafluoride 590/716

Tungsten Hexafluoride 670/638

Xenon 580/718

CGAValve Outlet& Conn. No.

Gas CGA/DISS


13

All drawings are arranged in numerical order according to the valveconnection number. The accurate diameter of the valve outlet isgiven below each drawing along with the thread designation. Forease of measurement and identification, approximate fractionaldimensions may be found on each drawing.The left handed portion of each drawing marked "OUTLET"represents the cylinder valve, while the right hand portion marked"CONNECTION" represents the mating connection normally foundin regulators, control valves, and manifolds.

Cylinder Connections Drawings


14

Gas and Gas Mixture Shipping ClassificationsIn December 1990 the Department of Transportation issued newregulations governing the transportation of hazardous materials.The DOT definitions of the three divisions for gases are as follows:

Division 2.1 (Flammable gas).For the purpose of this subchapter, a "flammable gas" (Division 2.1)means any material which is a gas at 20°C (68°F) or less at 101.3kPa (14.7 psi) which:

(1) Is ignitable at 101.3 kPa (14.7 psi) when in a mixture of13 percent or less by volume with air; or

(2) Has a flammable range at 101.3 kPa (14.7 psi) with air of atleast 12 percent regardless of the lower limit.

Division 2.2 (Non-flammable, non-poisonous compressed gas—including compressed gas, liquefied gas, pressurized cryogenicgas and compressed gas in solution).For the purpose of this subchapter, a non-flammable, non-poisonous compressed gas" (Division 2.2) means any material (ormixture) which:

(1) Exerts in the packaging an absolute pressure of 280 kPa(41 psia) at 20°C (68°F) and

(2) Does not meet the definition of Division 2.1 or 2.3.

Division 2.3 (Gas poisonous by inhalation).For the purpose of this subchapter, ‘a gas poisonous by inhalation"(Division 2.3) means a material which is a gas at 20°C (68°F) or lessand a pressure of 101.3 kPa (14.7 psi) (a material which has aboiling point of 20°C (68°F) or less at 101.3 kPa (14.7 psi) andwhich:

(1) Is known to be so toxic to humans as to pose a hazard tohealth during transportation, or

(2) In the absence of adequate data on human toxicity, ispresumed to be toxic to humans because when tested onlaboratory animals it has an LC5O value not more than 5000ml/m3. Division 2.3 is divided into four groups known ashazard zones, which are:

• Hazard Zone A: gases and mixtures with anLC50 ≤ 200 ppmExamples: Arsine, Phosgene

• Hazard Zone B: gases and mixtures with anLC50 ≤ 1000 ppm > 200 ppmExamples: Methyl Bromide, Dichlorosilane

• Hazard Zone C: gases and mixtures with anLC50 ≤ 3000 ppm >1000 ppmExamples: Methyl Mercaptan, Carbonyl Sulfide

• Hazard Zone D: gases and mixtures with anLC50 ≤ 5000 ppm >3000 ppmExamples: Carbon Monoxide, Hydrogen Chloride

The LC50 of a gas mixture can be calculated from the followingformula providing the LC50(s) of the toxic component(s) are known:

LC50 ofGas Mixturein ppm

Further information regarding Division 2.3 classification is shownin 49 CFR 173.116 and 173.133 and the Compressed GasAssociation Pamphlet "Tentative Standard for the Classification ofToxic Gas Mixtures", P-20T-1991.

Also in December 1990, the International Organization forStandardization (ISO) published Standard 10156, "Gases and GasMixtures - Determination of Fire Potential and Oxidizing Abilityfor the Selection of Cylinder Valve Outlets." The methodsdescribed differentiate the diluent effects of different backgroundgases. For example:

The maximum concentration of hydrogen in nitrogenwhich produces a nonflammable mixture is 5.7%, if heliumwere the background gas the value would be 4.45%.

The application of these methods to gas mixtures which containminor components which are both toxic and flammable mixedwith a nonflammable background or diluent gas may yield asmany as 6 different shipping descriptions. For this reason itbecomes unwieldy to show the classifications in association withthe product descriptions.

1 x 106

ppm of Toxic #1 + ppm of Toxic #2 + . . .ppm LC50 of Toxic #1 ppm LC50 of Toxic 2

=


15

Standard 630 & 710 SeriesDiameter-Index Dimensions for Electronic Gases

DIAMETERS IN mmGAS NAME CONN.# *A *BB *CC *MM *NNArsine, Diborane, Disilane, Germane, Hydrogen, 632 .418-.422 .649-.653 .796-.800 .646-.642 .793-.789Selenide, Phosphine, Silane, Trimethyl SilaneHydrogen Chloride, Boron Trichloride, Hydrogen Bromide 634 .418-.422 .663-.667 .782-.786 .660-.656 .779-.775Dichlorosilane, Trichlorosilane, Silicon Tetrachloride 636 .418-.422 .667-.681 .768-.772 .674-.670 .765-.761Tungsten Hexafluoride, Hydrogen Fluoride 638 .418-.422 .691-.695 .754-.758 .688-.684 .751-.747Nitrogen Trifluoride 640 .418-.422 .705-.709 .740-.744 .702-.698 .737-.733Boron Trifluoride, Silicon Tetrafluoride, 642 .418-.422 .719-.723 .726-.730 .716-.712 .723-.719Phosphorus Pentafluoride, Arsenic Pentafluoride,Germanium TetrafluorideNitrous Oxide 712 .418-.422 .649-.653 .883-.887 .646-.642 .880-.876Oxygen 714 .418-.422 .663-.667 .869-.873 .660-.656 .866-.862Carbon Dioxide, Sulfur Hexafluoride, 716 .418-.422 .677-.681 .855-.859 .674-.670 .852-.848Halocarbons 11, 12, 13, 14, 23, 115, 116,Perfluoropropane, Pentafluoroethane,Octafluorocyclobutane and perfluoro-2-ButeneInerts, Nitrogen. Neon, Helium, 718 .418-.422 .691-.695 .841-.845 .688-.684 .838-.834Argon, Xenon, KryptonAmmonia 720 .418-.422 .705-.709 .827-.831 .702-.698 .824-.820Hydrogen Sulfide 722 .418-.422 .719-.723 .813-.817 .716-.712 .816-.806Hydrogen, Carbon Monoxide, Deuterium, Ethane, 724 .418-.422 .733-.737 .799-.803 .730-.726 .796-.792Ethylene, Methane, Methyl Fluoride, H32Diethylzinc, Dimethylzinc, Triethylaluminum, Diethyltelluride 726 .418-.422 .747-.751 .785-.789 .744-.740 .782-.778Chlorine, Fluorine, Nitric Oxide, Chlorine Trifluoride 728 .418-.422 .761-.765 .761-.765 .758-.754 .758-.754

*Body diameters A, BB, and CC as well as nipple diameters A, MM, and NN should be concentricwithin .002 Full Indicator Movement (FIM). These are critical dimensions for safetythat must be adhered to on final product whether plated or not.


16

Restrictive Flow OrificesThe Restrictive Flow Orifice (RFO) is for use in conjunction withhigh purity compressed gas applications in both thesemiconductor and allied chemical industries.

Restrictive Flow Orifices are used to limit the potential danger ofan uncontrolled flow from a compressed gas cylinder. Unchecked,the instantaneous flow from a 44 liter compressed gas cylinderfilled to 2,000 psig can be as much as 20,000 liters per minute. Byinserting an RFO into the outlet of the CGA connection the flowrate would be reduced by a factor of 100 to approximately 200liters per minute.

The Restrictive Flow Orifice is designed to thread into the outletof most CGA connections that have external male threads. Thiswould include the family of DISS face seal connections (CGA 630and 710) that are used in high purity semiconductor applications.

The RFO has no moving parts. It is about 3/8" long and isgenerally constructed of 316LSS. The orifice opening usuallyvaries from 0.006" to 0.060". It is possible to have orifices that areas small as 0.004" and as large as 0.150" depending upon theapplication.

A KEL-F gasket is provided as part of the assembly to help createa seal between the restrictor and the valve body. Refer to Figure 1.

The flow rate through an orifice is a function of the followingvariables:

• Pressure• Temperature• Specific Gravity• Orifice Opening

Correlations assist in predicting the flow of a particular gas ormixture through an RFO. This is done by first determining theflow through the same RFO at the required pressure with areference gas and then adjusting the specific gravity accordingly.

The pertinent equation is presented below.

Flow = The Flow Rate of N2 1at the Same Pressure Specific Gravity

Typical nitrogen flows for different orifice signs at differentpressures can be found in Table I.

By using this table, a reference flow rate for nitrogen can bedetermined and then the reference equation can be used with thisvalue.

For a mixture a "weighted" or "averaged" specific gravity can beused by multiplying the volume or mole fraction of eachcomponent by its specific gravity and then summing.

In addition to providing safety features that have been mandatedby various local and state codes, the restrictive flow orifice alsoresults in a lower flow rate, which is desirable in manysemiconductor applications. While the RFO was not designed tobe a modulator or control valve, it will as its name implies,substantially reduce the flow rate under a specific set of pressureand temperature conditions for a given gas.

More detailed information on restrictive flow orifices is availablefrom your local Matheson Sales Engineer.

Figure 1: Restrictive Flow Orifice

TABLE I Orifice Flow Rate at Varying Pressures

Orifice Pressure-PSIGSize 0 500 1000 2000

0.006 in. 0 slpm 7 slpm 15 slpm 29 slpm0.010 in. 0 slpm l8 slpm 36 slpm 73 slpm0.040 in. 0 slpm 245 slpm 485 slpm —

References

For Phase Break, all data are obtained without correcting for non-ideal gas conditions, and as such are estimates

For RFO flows, all data are corrected for individual gas densities

For Vapor Pressure, all data are calculated using the coefficients and equation reported by C.L. Yaws and S.N. Naphad,Appendix 5 of Matheson Gas Data Book, 7th Edition, 2001

http://www.mathesontrigas.com/edge/ 17 Semiconductor Products Catalog V 4.0/SpecRev 4.32

Ammonia NH3

Grade Semicon 5N ULSI 5N5 ULTIMA 6N4Purity, % 99.999 99.9995 99.99994

Oxygen ≤0.5 ppmv (+Ar): ≤100 ppbv

Nitrogen ≤5 ppmv ≤1.5 ppmv

Carbon Dioxide ≤0.4 ppmv ≤100 ppbv

Carbon Monoxide ≤2 ppmv ≤0.1 ppmv ≤50 ppbv

Hydrogen ≤100 ppbv

Methane ≤2 ppmv ≤0.1 ppmv ≤50 ppbv

Water (+O2): 5 ppmv ≤2.0 ppmv ≤200 ppbv*

*Water is measured by sampling the liquid phase, as this method has been found to produce more repeatable data. Using a typicalPartition Coefficient of 100, the reported value of 200 ppbv corresponds to 2 ppbv in the vapor phase of a full cylinder.• A lot analysis is provided for each order – Individual analysis is provided for ULTIMA grade and available upon request for other grades.• Pneumatic valves, JIS connections available upon request

Internal Volume Liters 49.0 43.8 439

Cylinder Sizes >> QK QB/QF QI

Contentkg 25.0 22.73 227.3

lbs 55.0 50.0 500

Change Point** lbs 0.74 0.67 6.67

CYLINDER

**Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).

DOT Shipping Name Ammonia, Anhydrous UN Number UN 1005 Shipped as

DOT Classification 2.2 (Non-Flammable Gas) ECCN# 1C980Liquefied Gas

DOT Label NON-FLAMMABLE GAS Harmonized # 2814.10.0000

SHIP

Cylinder Pressure 113.9 psig

@NTP 9.0 atm

Specific Volume 1.41 m3/kg

@NTP 22.6 ft3/lb

CAS No 7664-41-7

CGA/DISS/JIS 660/720/W22-14R

Molecular Weight 17.03 g/mol

TLV 25 ppm

LFL-UFL in Air 16 - 25 %

TECHNICAL DATA

Nominal Diameter (OD)xHeight* Material of Construction

Cylinder Treatment cm Inches Cylinder Valve

QK ULTRA-LINE® 25x140/144/153 10x55/56.5/60 CS SS

QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS SS

QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SS

QI ULTRA-LINE® 61x211 24x83 CS SS

*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelASB: Aluminum Silicon Bronze CS: Carbon Steel SS: Stainless Steel

VaporTemp, °C 0.0 15.5 21.0 32.2 43.3

PressurePress, psig 47.6 92.8 113.9 165.7 232.0

Temp, °F 32 60 70 90 110

Size, mm 0.254 0.3556 0.508 0.762 1.016

RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040

Flow, sccm 6634 12665 26134 58298 100514

Flow, scf/h 14.0 26.8 55.4 123.5 213.0

NTP = 21°C or 70°F and 101.3 kPa or 1 atm

http://www.mathesontrigas.com/edge/ 18 Semiconductor Products Catalog V 4.0/SpecRev4.22

Argon Ar

Grade Semicon 5N ULSI 6NPurity, % 99.999 99.9999

Oxygen ≤1.0 ppmv ≤300 ppbv

Nitrogen ≤700 ppbv


Carbon Monoxide ≤0.5 ppmv ≤100 ppbv

Methane ≤0.5 ppmv ≤100 ppbv

Water ≤3.0 ppmv ≤500 ppbv

• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.

Internal Volume Liters 43.8 2.3

Cylinder Sizes >> QF/QA JF/JA/JB

ContentLiters 7,930 340

ft3 280 12

Cylinder Pressure*psig 2,490 2,000

atm 176.1 141.6

* @ NTP

CYLINDER

DOT Shipping Name Argon, Compressed UN Number UN 1006 Shipped as

DOT Classification 2.2 (Non-Flammable Gas) ECCN# EAR99 Compressed

DOT Label NON-FLAMMABLE GAS Harmonized # 2804.21.0000 Gas

SHIP


@NTP 9.68 ft3/lb

CAS No 7440-37-1

CGA/DISS/JIS 580/718/22-14R

Atomic Weight 39.95 g/molTECHNICAL DATA




QA ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Brass

JF ULTRA-LINE® 10x33/37/46 4x13/14.5/18 CS SS

JA ULTRA-LINE® 10x33/37/46 4x13/14.5/18 CS Brass

JB ULTRA-LINE II® 10x33/37/46 4x13/14.5/18 CS SS

*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel

Critical Temperature -122.4°C -188.4°F

Critical Pressure 50 atm 711.5 psia



Arsine AsH3

Grade ULSI 5N5 ULSI 6N ULTIMA 6N5 ULTIMA II 6N5Purity, % 99.9995 99.9999 99.99995 99.99995

Water ≤2.0 ppmv ≤350 ppbv ≤100 ppbv ≤100 ppbvNitrogen ≤2.0 ppmv ≤250 ppbv ≤50 ppbv ≤50 ppbvOxygen ≤1.0 ppmv ≤40 ppbv ≤20 ppbv ≤20 ppbv

Carbon Dioxide ≤0.5 ppmv ≤40 ppbv ≤10 ppbv ≤10 ppbvCarbon Monoxide ≤0.1 ppmv ≤10 ppbv ≤10 ppbv ≤10 ppbv

Methane ≤0.5 ppmvC1 - C2 ≤500 ppbv ≤100 ppbv ≤50 ppbvC3 - C5 ≤50 ppbvArgon ≤50 ppbv ≤20 ppbv

Germane ≤50 ppbv ≤50 ppbv ≤10 ppbvHydrogen Sulfide ≤50 ppbv ≤50 ppbv ≤50 ppbv

Silane ≤50 ppbv ≤10 ppbvPhosphine ≤25 ppbv

Carbonyl Sulfide ≤25 ppbvNitrous Oxide ≤20 ppbv

• All cylinders are individually analyzed

Internal Volume Liters 43.8 47.5 29.5Cylinder Sizes >> QF QZ QH*

Contentkg 25 29/18.2* 12.7*lbs 55 60/40* 28*


CYLINDER

* Fills available for ULTIMA Grade only**Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).

DOT Shipping Name Arsine UN Number UN 2188 Shipped asDOT Classification 2.3 (2.1) Poison Gas ECCN # 3C004

DOT LabelPOISON GAS / INHALATION

Harmonized # 2850.00.0000Liquefied Gas

HAZARD, FLAMMABLE GAS

SHIP

Cylinder Pressure 204.6 psig@NTP 15.4 atm

Specific Volume 0.31 m3/kg@NTP 5.0 ft3/lb

CAS No 7784-42-1CGA/DISS/JIS 350/632/W22-14L

Molecular Weight 77.95 g/molTLV 0.05 ppmv

LFL in Air 4.5%

TECHNICAL DATA


Cylinder Treatment cm Inches Cylinder ValveQF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS SSQZ ULTRA-LINE II® 25x137/141/149 10x54/55.5/59 Aluminum SSQH ULTRA-LINE® 20x122/126/135 8x48/49.5/53 Aluminum SS

*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valveoutlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel

VaporTemp, °C 0.0 15.5 21.0 32.2 43.3

PressurePress, psig 116.2 178.2 204.6 265.1 336.7Temp, °F 32 60 70 90 110

Size, mm 0.254 0.3556 0.508 0.762 1.016

RFO DataSize, inches 0.010 0.014 0.020 0.030 0.040Flow, sccm 5326 10168 20981 46805 80698Flow, scf/h 11.3 21.5 44.5 99.2 171.0


Hall Mobility > 120,000 (cm2/Vs) > 160,000 (cm2/Vs) > 180,000 (cm2/Vs)Carrier Concentration < 5x1014 (cm-3) < 1x1014 (cm-3) < 5x1013 (cm-3)

• Performace data above is typical for 10um GaAs/GaAs with growth conditions of V/III ratio: 150 and temperature of 650C. 77K measurements• Pneumatic valves and DIN and JIS connections are available upon request.


Boron Trichloride BCl3

Grade Semicon 4N5 ULSI 5N Gigabit 5N5Purity, % 99.995 99.999 99.9995 Metals, ppbw

Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10

Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20

Carbon Dioxide ≤5 ppmv ≤2.0 ppmv ≤0.5 ppmv Ca ≤10 K ≤20

Carbon Monoxide ≤3 ppmv ≤0.5 ppmv ≤0.3 ppmv Cu ≤10 Cd ≤0.5

Methane ≤1 ppmv ≤0.5 ppmv ≤0.5 ppmv Fe ≤30 Ba ≤10

Chlorine ≤1 ppmv ≤1 ppmv ≤0.1 ppmv Li ≤10 Sb ≤10

Phosgene ≤0.1 ppmv As ≤20 Pb ≤10

Hydrogen Chloride ≤1.0 ppmv Mg ≤10 Mn ≤10

Silicon Tetrachloride ≤2.0 ppmv Si ≤10 Zn ≤10

• A lot analysis is provided for each order – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.


Cylinder Sizes >> QF JF

Contentkg 50 45 31.8 18.2 2.3

lbs 110 100 70 40 5

Change Point* lbs 0.66 0.03

CYLINDER

*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).


@NTP 1.34 atm


@NTP 3.3 ft3/lb

CAS No 10294-34-5



TLV 1 ppm

TECHNICAL DATA






VaporTemp, °C 0.0 15.5 21.0 32.2 43.3

PressurePress, psig -5.6 1.7 4.4 13.9 25.1

Temp, °F 32 60 70 90 110

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 412 787 1623 3621 6243

Flow, scf/h 0.9 1.7 3.4 7.7 13


DOT Shipping Name Boron Trichloride UN Number UN 1741 Shipped as

DOT Classification2.3 Poison Gas, Hazard

ECCN # EAR99Zone C

Liquefied Gas

DOT LabelPOISON GAS / INHALATION

Harmonized # 2812.10.5050HAZARD, CORROSIVE GAS

SHIP


Boron Trifluoride BF3

Grade ULSI 4N5 11B EnrichedPurity, % 99.995 99.9

Oxygen ≤25 ppmv

Oxygen + Nitrogen + Argon ≤10 ppmv

Nitrogen ≤25 ppmv

Carbon Dioxide ≤10 ppmv ≤25 ppmv

Argon ≤25 ppmv

Sulfur Dioxide ≤10 ppmv ≤25 ppmv

Hydrogen Fluoride ≤25 ppmv

Isotopic Purity, 11B >99.7%

• A lot analysis is provided for each order – Individual analysis is also available upon request.• Pneumatic valves and JIS connections available upon request


Cylinder Sizes >> JB/JF SF/SA

Contentg 400 180 35

lbs 0.88 0.39 0.077

Cylinder Pressure*psig 700 400 400

atm 50.2 29.1 29.1

* @ NTP

CYLINDER

DOT Shipping Name Boron Trifluoride, Compressed UN Number UN 1008 Shipped as

DOT Classification2.3, Poison Gas Hazard Zone B

ECCN # EAR99 Compressed(Gas Poisonous by Inhalation)GasDOT Label POISON GAS / INHALATION HAZARD Harmonized # 2812-90-0000

SHIP


@NTP 5.6 ft3/lb

CAS No 7637-07-02

CGA/DISS/JIS 330/642/W22-14L


TLV 1 ppmTECHNICAL DATA

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 10640 20313 41916 93505 161215

Flow, scf/h 22.5 43.0 88.8 198.1 341.6






SF ULTRA-LINE® 5x30/34/43 2x12/13.5/17 CS SS

SA ULTRA-LINE® 5x30/34/43 2x12/13.5/17 CS Brass



Carbon Dioxide CO2

Grade ULSI 5NPurity, % 99.999

Oxygen ≤1 ppmv

Nitrogen ≤1 ppmv

Carbon Monoxide ≤0.2 ppmv

Total Hydrocarbons (CH4) ≤4 ppmv

Water ≤2 ppmv

Hydrogen ≤1 ppmv

• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.• A FLET (Full Length Educator Tube) is available upon request.


Cylinder Sizes >> QF/QA/QB GF/GA

Contentlbs 60 24

kg 27.2 10.9


CYLINDER

DOT Shipping Name Carbon Dioxide UN Number UN 1013 Shipped as

DOT Classification 2.2 (Non-Flammable Gas) ECCN # 1C980 Liquefied


SHIP






GF ULTRA-LINE® 23x66/70/79 9x26/27.5/31 CS SS

GA ULTRA-LINE® 23x66/70/79 9x26/27.5/31 CS Brass


Critical Temperature 31°C 87.9°F

Critical Pressure 72.85 atm 1,071 psia


*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in thecylinder when the liquid phase has completely evaporated and only gaseous product is left (estimate based onideal gas behavior).

Cylinder Pressure 830 psig

@NTP 59.4 atm


@NTP 8.74 ft3/lb

CAS No 124-38-9



TECHNICAL DATA


Carbon Monoxide CO

Grade ULSI 3N5 ULSI PLUS 4N5Purity, % 99.95 99.995 Metals, ppbw

Oxygen ≤100 ppmv ≤6 ppmv Al ≤1 Mn ≤1

Nitrogen ≤250 ppmv ≤10 ppmv Cd ≤1 Ni ≤1

Carbon Dioxide ≤50 ppmv ≤15 ppmv Ca ≤1 Mg ≤1

Total Hydrocarbons ≤3 ppmv Cr ≤1 K ≤2

Methane ≤3 ppmv Cu ≤1 Na ≤5

Water ≤3 ppmv ≤1 ppmv Fe ≤5 Zn ≤1

Iron Pentacarbonyl ≤1 ppmv ≤0.5 ppmv Pb ≤1

Hydrogen ≤1 ppmv

• A lot analysis is provided for each order. – Individual analysis is also available upon request.• For gas phase impurities, a metal analysis is performed periodically.• Pneumatic valves and JIS connections are available upon request.NOTE: Aluminum cylinders with brass valves are the recommended package for CO.

Internal Volume Liters 46.4 43.8 29.5

Cylinder Sizes >> QY QB QH/QX

Contentm3 6.9 4.96 3.3

ft3 244 175 118

Cylinder Pressure* psig 2,216 1,650 1,650

* @ NTP

CYLINDER

DOT Shipping Name Carbon Monoxide, compressed UN Number UN 1016 Shipped as

DOT Classification2.3 Poison Gas Hazard Zone D

ECCN # 1C980 Compressed(Gas Poisonous by Inhalation)GasDOT Label INHALATION HAZARD FLAMMABLE GAS Harmonized # 2811.29.0000

SHIP


@NTP 13.8 ft3/lb

CAS No 630-08-0


Molecular Weight 28.01 g/molTECHNICAL DATA Critical Temperature -140.2°C -220.4°F

Critical Pressure 35.7 atm 507.5 psia




QY ULTRA-LINE® 25x132/136/145 10x52/53.5/57 Aluminum SS/Brass


QH/QX ULTRA-LINE ® 20x122/126/135 8x48/49.5/53 Aluminum SS/Brass



Chlorine Cl2

Grade Semicon 4N ULSI 5N ULSI PLUS 5NPurity, % 99.99 99.999 99.999 Metals, ppbw

Oxygen ≤50 ppmv ≤1.0 ppmv ≤1.0 ppmv Ca ≤10 Ni ≤300

Nitrogen ≤50 ppmv ≤2.0 ppmv ≤2.0 ppmv Cd ≤10 K ≤100

Carbon Dioxide ≤30 ppmv ≤4.0 ppmv ≤4.0 ppmv Cr ≤100 Na ≤50

Carbon Monoxide ≤5 ppmv ≤0.5 ppmv ≤0.5 ppmv Cu ≤100 Zn ≤20

Methane ≤1 ppmv ≤0.1 ppmv ≤0.1 ppmv Fe ≤200

Water ≤2.0 ppmv Total Metals: ≤1,000

• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.

Internal Volume Liters 439 43.8

Cylinder Sizes >> QI QF/QB

Contentkg 499.4 50 45.4 31.8

lbs 1,100 110 100 70


CYLINDER


DOT Shipping Name Chlorine UN Number UN 1017 Shipped as

DOT Classification2.3 Poison Gas, Hazard Zone B

ECCN # EAR99 Liquefied (Gas Poisonous by Inhalation)GasDOT Label INHALATION HAZARD, CORROSIVE GAS Harmonized # 2801.10.0000

SHIP


@NTP 7.0 atm


@NTP 5.4 ft3/lb

CAS No 7782-50-5



TLV 0.5 ppm

TECHNICAL DATA

VaporTemp, °C 0.0 15.5 21.0 32.2 43.3

PressurePress, psig 38.9 72.1 85.3 122.4 166.0

Temp, °F 32 60 70 90 110

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 2519 4810 9925 22141 38174

Flow, scf/h 5.3 10.2 21.0 46.9 80.9




QI ULTRA-LINE® 61x211 24x83 CS SS





Deuterium D2

Grade Semicon 4N5 ULSI 5NPurity, % 99.995 99.999

Enrichment, % 99.5 99.8Oxygen ≤ 1.0 ppmv ≤1.0 ppmv

Nitrogen ≤5.0 ppmv ≤1.0 ppmv

Carbon Dioxide ≤2.0 ppmv ≤1.0 ppmv

Carbon Monoxide ≤1.0 ppmv ≤1.0 ppmv

THC ≤ 1.0 ppmv ≤1.0 ppmv

Water + D2O ≤5.0 ppmv ≤1.0 ppmv

Hydrogen* ≤150 ppmv ≤100 ppmv

Hydrogen Deuteride* ≤5,000 ppmv ≤3,000 ppmv

*Not included in over-all purity analysis• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.

Internal Volume Liters 43.8

Cylinder Sizes >> QA/QF

ContentLiters 6,000

ft3 212

Cylinder Pressure**psig 2,200

atm 155.7

** @ NTP

CYLINDER

DOT Shipping Name Deuterium Compressed UN Number UN 1957 Shipped as

DOT Classification 2.1 (Flammable Gas) ECCN # 0C004 Compressed

DOT Label FLAMMABLE GAS Harmonized # 2845.90.0000 Gas

SHIP


@NTP 95.9 ft3/lb

CAS No 7782-39-0


Molecular Weight 4.03 g/molTECHNICAL DATA Critical Temperature -234.8°C -390.6°F









Dichlorosilane SiH2Cl2Grade Semicon 2N ULSI Plus 3N

Purity, % 99.0(w) 99.9(w)**Oxygen + Argon ≤1.0 ppmv

Nitrogen ≤1.0 ppmv

Carbon Dioxide ≤1.0 ppmv


Methane ≤1.0 ppmv

Hydrocarbons (C2-C4) ≤1.0 ppmv

Hydrogen Chloride ≤500 ppmw

Monochlorosilane ≤0.3% w ≤250 ppmw

Other Chlorosilanes ≤1% w

Trichlorosilane ≤500 ppmw

Silicon Tetrachloride ≤200 ppmw

Resistivity, N-type, ohm-cm > 200 > 400

Individual Metals – Al* ≤1.0 ppbw ≤50 ppta

As* ≤0.2 ppbw ≤50 ppta

B* ≤0.1 ppbw ≤300 ppta

P* ≤0.3 ppbw ≤300 ppta

C* ≤1,000 ppbw ≤300 ppba

Fe* ≤50 ppbw ≤2 ppbw

Ga* ≤10 ppta Mn ≤0.2 ppbw

Sb* ≤10 ppta Mo ≤0.2 ppbw

Additional Metals:In* ≤10 ppta Ni ≤0.2 ppbw

Cr ≤0.2 ppbw Na ≤0.2 ppbw

Cu ≤0.2 ppbw Zn ≤0.2 ppbw

O* ≤200 ppba*Total deposited metals**Total Purity excluding HCl

• A lot analysis is provided for each order.• Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.

Internal Volume Liters 41 43.8

Cylinder Sizes >> QL QF

Contentkg 40.9 43.1

lbs 90 93

Change Point*** lbs 0.6 0.7

CYLINDER

***Recommended Cylinder Change Point at NTP, based on Phase Break, or theamount of product left in the cylinder when the liquid phase has completelyevaporated and only gaseous product is left (estimate based on ideal gas behavior).

UN Number UN 2189

DOT Shipping Name Dichlorosilane

DOT Classification 2.3 (Poison Gas)

DOT Label POISON GAS, FLAMMABLE GAS

ECCN # EAR99

Harmonized # 2827.39.9050

SHIP


@NTP 1.7 atm


@NTP 3.83 ft3/lb

CAS No 4109-96-0



TECHNICAL DATA


VaporTemp, °C 0.0 15.5 21.0 32.2 43.3


Temp, °F 32 60 70 90 110

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 553 1056 2178 4860 8379

Flow, scf/h 1.2 2.2 4.6 10 18


Disilane Si2H6

Grade Semicon 3N ULSI 4N8Purity, % 99.9 99.998

Oxygen + Argon ≤1 ppmv

Nitrogen ≤2 ppmv


Methane ≤1 ppmv ≤1 ppmv

Water ≤1 ppmv ≤1 ppmv

Air ≤5 ppmv

Chlorosilanes ≤0.2 ppmv

Higher Silanes* ≤50 ppmv

Siloxanes ≤5 ppmv

Silane ≤1000 ppmv ≤1000 ppmv*

Resistivity, N-type >1000 ohm-cm

*Not included in over-all purity analysis.• A lot analysis is provided for each order – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.


Cylinder Sizes >> QF GF UF

Contentkg 5 3 2

lbs 11 6.6 4.4


CYLINDER

**Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).

DOT Shipping Name Compressed Gas Flammable, NOS (Disilane) UN Number UN 1954

DOT Classification 2.1 (Flammable Gas) ECCN # EAR99

DOT Label FLAMMABLE GAS Shipped as Liquefied Gas

SHIP


@NTP 3.35 atm


@NTP 5.6 ft3/lb

CAS No 1590-87-0



TECHNICAL DATA

Critical Temperature 159°C 317.9°F

Critical Pressure 52.3 atm 744 psia

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 1412 2696 5564 12411 21399

Flow, scf/h 3.0 5.7 12 26 45






UF ULTRA-LINE® 15x51/55/64 6x19/20.5/24 CS SS



Germane GeH4

Grade Semicon 5NPurity, % 99.999

Oxygen+ Argon ≤0.5 ppmv




Methane ≤1.0 ppmv

Water ≤1.0 ppmv

Chlorogermanes ≤5.0 ppmv

Digermane* ≤20.0 ppmv

Germoxanes ≤5.0 ppmv

Hydrogen* ≤50.0 ppmv

Trigermane ≤1.0 ppmv

*Not included in over-all purity analysis.• A lot analysis is provided for each order – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.


Cylinder Sizes >> QH GF UF

Contentkg 1 0.5 0.1

lbs 2.2 1.1 0.22

Cylinder Pressure**psig 160 118 45

atm 12.3 9.3 5.3** @ NTP

CYLINDER

DOT Shipping Name Germane UN Number UN 2192 Shipped as

DOT Classification 2.3 (Toxic Gas) ECCN # EAR99 Compressed

DOT Label TOXIC GAS, FLAMMABLE GAS Harmonized # 2851.00.0000 Gas

SHIP

Critical Temperature 94.7°C 34.8°F


Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 4257 8127 16769 37408 64497

Flow, scf/h 9.0 17.2 35.5 79.3 136.7


@NTP 5.1 ft3/lb

CAS No 7782-65-2


Molecular Weight 76.62 g/molTECHNICAL DATA



QH ULTRA-LINE® 20x122/126/135 8x48/49.5/53 Aluminum SS






Halocarbon 14 (Tetrafluoromethane) CF4


Oxygen ≤100 ppmv

Nitrogen ≤400 ppmv

Carbon Dioxide ≤10 ppmv (+CO) ≤1 ppmv

Carbon Monoxide ≤20 ppmv

Other Halocarbons ≤2.0 ppmv

Water ≤10 ppmv ≤2.0 ppmv

Air ≤5.0 ppmv

Sulfur Hexafluoride ≤1.0 ppmv

Acidity as HF ≤1.0 ppmv



Cylinder Sizes >> QF/QA/QB

Contentlbs 70

kg 31.82

CYLINDER

DOT Shipping NameCompressed Gas NOS

UN Number UN 1982 Shipped as(Tetrafluoromethane)

DOT Classification 2.2 (Non-Flammable Gas) ECCN # EAR99 Compressed


SHIP

Cylinder Pressure 2,000 psig

@NTP 141.6 atm


@NTP 4.4 ft3/lb

CAS No 75-73-0



TECHNICAL DATA











Halocarbon 23 (Trifluoromethane) CHF3


Oxygen + Nitrogen ≤50 ppmv

Oxygen + Nitrogen + Carbon Monoxide ≤20 ppmv

Carbon Dioxide ≤10 ppmv


Other Organics ≤10 ppmv

Acidity as HCl ≤0.1 ppmw ≤0.1 ppmw




Contentlbs 70

kg 31.82

Change Point* lbs 28.2

*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount ofproduct left in the cylinder when the liquid phase has completely evaporated and onlygaseous product is left (estimate based on ideal gas behavior).

CYLINDER

DOT Shipping Name Trifluoromethane UN Number UN 1984 Shipped as

DOT Classification 2.2 (Non-Flammable Gas) ECCN # EAR99 Liquefied


SHIP


@NTP 45.7 atm


@NTP 5.5 ft3/lb

CAS No 75-46-7


Molecular Weight 70 g/mol

TECHNICAL DATA

VaporTemp, °C 0.0 15.5 21.0 32.2 43.3

PressurePress, psig 347 529 635 802 1040

Temp, °F 32 60 70 90 110









Halocarbon 32 (Difluoromethane) CH2F2

• A lot analysis is provided for each order – Individual analysis is also available upon request.• Other Organics = H12, H22, H23, H134a



Contentlbs 64 25 11

kg 29.1 11.35 5

Change Point* lbs 4.3 1.7 0.7

CYLINDER



@NTP 15.6 atm


@NTP 7.2 ft3/lb

CAS No 75-10-5



TECHNICAL DATA

VaporTemp, °C 0.0 15.5 21.0 32.2 43.3


Temp, °F 32 60 70 90 110








DOT Shipping Name Difluoromethane Shipped as

DOT Classification 2.1 (Flammable Gas)Liquefied

DOT Label FLAMMABLE GAS GasUN Number UN 3252

SHIP

Grade ULSI 4N ULTIMA 4N8Purity, % 99.99 99.998

Nitrogen ≤40 ppmv ≤5 ppmv

Oxygen ≤10 ppmv ≤2 ppmv


Methane ≤2 ppmv ≤1 ppmv


Carbon Tetrafluoride ≤5 ppmv ≤1 ppmv

Other Organics ≤100 ppmv ≤10 ppmv


Acidity as HF ≤0.1 ppmw


Halocarbon 41 (Methyl Fluoride) CH3F

Grade Semicon 4N ULSI 4N5Purity, % 99.99 99.995

Oxygen ≤20 ppmv < 5 ppmv

Nitrogen ≤70 ppmv < 20 ppmv

Carbon Dioxide < 10 ppmv

Carbon Monoxide < 10 ppmv

Methane < 5 ppmv

Water ≤10 ppmv < 2 ppmv

Acidity as HF Please Inquire




Contentlbs 18 7 3

kg 8.2 3.2 1.4


CYLINDER


DOT Shipping Name Methyl Fluoride UN Number UN 2810 Shipped as

DOT Classification 2.1 (Flammable Gas) ECCN # EAR99 Liquefied


SHIP


@NTP 38.85 atm


@NTP 11.36 ft3/lb

CAS No 593-53-3



TECHNICAL DATA

VaporTemp, °C 0.0 15.5 21.0 32.2 43.3


Temp, °F 32 60 70 90 110









Halocarbon 116 (Hexafluoroethane) C2F6

Grade ULSI 5N ULSI Plus 5NPurity, % 99.999 99.999

Oxygen ≤2.0 ppmv

Oxygen + Nitrogen + Carbon Dioxide + Carbon Monoxide ≤25 ppmv




Water ≤5 ppmv ≤1.5 ppmv

Other organics ≤0.5 ppmv

Acidity as HCl ≤0.1 ppmw ≤0.1 ppmw




Contentlbs 95

kg 43.18



CYLINDER

DOT Shipping Name Hexafluoroethane Compressed UN Number UN 2193 Shipped as



SHIP


@NTP 31.3 atm


@NTP 2.8 ft3/lb

CAS No 76-16-4



TECHNICAL DATA











Halocarbon 218 (Perfluoropropane) C3F8

Grade ULSI 3N8Purity, % 99.98

Oxygen ≤50 ppmv




Water ≤6 ppmw

Other Fluorocarbons* ≤400 ppmv

Acidity as HF ≤0.1 ppmw

*Other Fluorocarbons defined as the sum of HFC227, HFC236 and HFC245, not included in purity spec• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.



Contentlbs 100

kg 45.45



CYLINDER

DOT Shipping Name Perfluoropropane UN Number UN 2424 Shipped as



SHIP


@NTP 8.1 atm


@NTP 2.02 ft3/lb

CAS No 76-19-7



TECHNICAL DATA










Halocarbon c318 (Octafluorocyclobutane) C4F8

GradeSemicon 3N

ULSI 5NZyron 8020®

Purity, % 99.9 99.999Oxygen ≤1 ppmv


Air ≤300 ppmv ≤3 ppmv

Other Organics ≤1,000 ppmv ≤10 ppmv

Acidity as HCl ≤0.1 ppmv

• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.• Zyron® is a Registered Mark of E.I. DuPont.



Contentlbs 110 95

kg 50 43.2


CYLINDER


DOT Shipping Name Octafluorocyclobutane UN Number UN 1976 Shipped as


DOT Label NON-FLAMMABLE GAS Gas

SHIP


@NTP 2.8 atm


@NTP 1.85 ft3/lb

CAS No 115-25-3



TECHNICAL DATA










Halocarbon 1216 (Hexafluoropropylene) C3F6

Grade Chamber Clean 2N8Purity, % 99.8

Water ≤20 ppmw

Other Fluorocarbons ≤2000 ppmv

Acidity as HF ≤5 ppmw

• A lot analysis is provided for each order – Individual analysis is also available upon request.• Pneumatic valves and JIS connections available upon request.


Cylinder Sizes >> QF

Contentkg 45.4

lbs 100



CYLINDER

DOT Shipping Name Hexafluoropropylene, compressed Shipped as

DOT Classification 2.2 (Non-Flammable Gas)Liquefied

DOT Label NON-FLAMMABLE GAS GasUN Number UN 1858

SHIP


@NTP 7.0 atm


@NTP 2.58 ft3/lb

CAS No 116-15-4


Synonyms FC1216

Molecular Weight 150.02

TECHNICAL DATA

Critical Temperature 94°C 201°F


Vapor Pressure @ 25°C 6.7 atm 94.7 psia







Halocarbon 4110 (Octafluorocyclopentene) C5F8

Grade ULSI 4NPurity, % 99.99

Oxygen ≤20 ppmv


Water ≤10 ppmw

Hexafluorocyclobutene ≤50 ppmw



Cylinder Sizes >> QB UF

Contentkg 10 3

lbs 22 6.6

Cylinder Pressure*psig 11.9 11.9

atm 1.87 1.87

* @ NTP

CYLINDER

DOT Classification 6.1 Shipped as

DOT Label NON-FLAMMABLE GAS Liquefied

UN Number UN 2810 Gas

SHIP


@NTP 11.36 ft3/lb

CAS No 559-40-0


Molecular Weight 212.04 g/molTECHNICAL DATA Boiling Point @NP 27°C 80.6°F










Helium He



Nitrogen ≤3.0 ppmv ≤400 ppbv







Cylinder Sizes >> QF/QA/QB UA/UF

ContentLiters 6,910 880

ft3 244 31


atm 176.1 141.6

* @ NTP

CYLINDER

DOT Shipping Name Helium, Compressed UN Number UN 1046 Shipped as

DOT Classification 2.2 (Non-Flammable Gas) ECCN # 1C980 Compressed


SHIP




@NTP 97.1 ft3/lb

CAS No 7440-59-7









UA ULTRA-LINE® 15x51/55/64 6x19/20.5/24 CS Brass




Hydrogen H2










Cylinder Sizes >> QF/QA

ContentLiters 6,030

ft3 213

Cylinder Pressure*psig 2,200

atm 155.7

* @ NTP

CYLINDER

DOT Shipping Name Hydrogen Compressed UN Number UN 1049 Shipped as



SHIP


@NTP 192 ft3/lb

CAS No 133-74-0


LFL/UFL (air) 4/74%








QA ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS Brass



Hydrogen Bromide HBr

Grade ULSI 5N Gigabit 5N5Purity, % 99.999 99.9995 Metals, ppbw

Oxygen ≤1.0 ppmv ≤1.0 ppmv Al ≤5 Mg ≤1

Nitrogen ≤3.0 ppmv ≤1.0 ppmv Ca ≤5 Na ≤5

Carbon Dioxide ≤3.0 ppmv ≤1.0 ppmv Cr ≤5 Ni ≤10

Carbon Monoxide ≤0.5 ppmv ≤0.5 ppmv Cu ≤1 Pb ≤1

Methane ≤1.5 ppmv ≤1.0 ppmv Fe ≤10 Zn ≤1

Water ≤1.0 ppmv ≤1.0 ppmv Mn ≤1 Co ≤1

Hydrogen Chloride ≤50 ppmv

Hydrogen ≤50 ppmv



Cylinder Sizes >> QN

Contentkg 54.55

lbs 130


CYLINDER

*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount ofproduct left in the cylinder when the liquid phase has completely evaporated and only gaseousproduct is left (estimate based on ideal gas behavior).

DOT Shipping Name Hydrogen Bromide, Anhydrous UN Number UN 1048 Shipped as

DOT Classification2.3 Poison Gas Hazard Zone C

ECCN # EAR99(Gas Poisonous by Inhalation) Liquefied

DOT LabelPOISON GAS INHALATION HAZARD

Harmonized # 2811.19.0000Gas

CORROSIVE GAS

SHIP


@NTP 23.5 atm


@NTP 4.8 ft3/lb

CAS No 10035-10-6



TLV 3 ppm

TECHNICAL DATA

VaporTemp, °C 0.0 15.5 21.0 32.2 43.3


Temp, °F 32 60 70 90 110

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 7950 15177 31317 69862 120451

Flow, scf/h 17 32 66 148 255




QN ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS/Ni-lined Hst

*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel Hst: Hastelloy


Hydrogen Chloride HCl

Grade Semicon 4N5 ULSI 5N ULSI PLUS 5NPurity, % 99.995 99.999 99.999 Metals, ppbw

Oxygen ≤4.0 ppmv ≤1.0 ppmv ≤1.0 ppmv Cd ≤5 Mg ≤50

Nitrogen ≤10.0 ppmv ≤1.5 ppmv ≤1.5 ppmv Cr ≤400 Na ≤50

Carbon Dioxide ≤10.0 ppmv ≤2.0 ppmv ≤2.0 ppmv Cu ≤100 Ni ≤100

Carbon Monoxide ≤1.0 ppmv ≤1.0 ppmv Fe ≤500 Pb ≤50

Methane ≤2.0 ppmv ≤0.1 ppmv ≤0.1 ppmv Zn ≤50

Water ≤10.0 ppmv ≤1.0 ppmv ≤1.0 ppmv Total Metals: ≤1,000

Iron (Fe) ≤0.5 ppmw

• A lot analysis is provided for each order – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.

Internal Volume Liters 439 49 43.8

Cylinder Sizes >> QI QK QB/QF

Contentkg 272.7 29.55 25.0

lbs 600 65 55


CYLINDER


DOT Shipping Name Hydrogen Chloride, Anhydrous UN Number UN 1050 Shipped as

DOT Classification2.3 Poison Gas Hazard Zone C

ECCN # EAR99(Gas Poisonous by Inhalation) Liquefied



CORROSIVE GAS

SHIP


@NTP 44.1 atm


@NTP 10.6 ft3/lb

CAS No 7647-01-0



TLV 5 ppm

TECHNICAL DATA

VaporTemp, °C 0.0 15.5 21.0 32.2 43.3


Temp, °F 32 60 70 90 110

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 22157 42300 87285 194713 335713

Flow, scf/h 47 90 185 413 711




QI ULTRA-LINE® 61x211 24x83 CS Hst/SS

QK ULTRA-LINE® 25x140/144/153 10x55/56.5/60 CS Hst

QB ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS Hst

QF ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS Hst

*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel ASB: Aluminum Silicon Bronze Hst: Hastalloy


Hydrogen Fluoride HF

Grade Semicon 4N5Purity, % 99.995*

Sulfuric acid ≤25 ppmv

Sulfur Dioxide ≤15 ppmv

Hexafluorosilicilic Acid ≤15 ppmv

* Inert gases may be found in considerable concentration, as it is used topackage the product as sold: please inquire if this represents a concern

• A lot analysis is provided for each order. • Pneumatic valves available upon request.



Contentkg 22.7 11.36 1.82

lbs 50 25 4


CYLINDER

*Recommended Cylinder Change Point @NTP, based on Phase Break, or the amount of product left in the cylinder when the liquid phasehas completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).).

DOT Shipping Name Hydrogen Fluoride, Anhydrous UN Number UN 1052 Shipped as

DOT Classification8 Poison Gas Hazard Zone C

ECCN # 1C350(Gas Poisonous by Inhalation) Liquefied



POISON CORROSIVE

SHIP


@NTP 1.07 atm


@NTP 19.3 ft3/lb

CAS No 7664-39-3

CGA/DISS 660/638


TLV 3 ppm

TECHNICAL DATA

VaporTemp, °C 0.0 15.5 21.0 32.2 43.3

PressurePress, psig -7.7 -2.0 0.7 7.9 17.5

Temp, °F 32 60 70 90 110

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 729 1391 2871 6405 11043

Flow, scf/h 2 3 6 14 23









Krypton Kr

Grade Semicon 4N8Purity, % 99.998

Oxygen ≤2.0 ppmv




Methane ≤1.0 ppmv

THC ≤0.1 ppmv

Water ≤4.0 ppmv

Argon ≤1.0 ppmv

Xenon ≤10.0 ppmv

Helium ≤1.0 ppmv

Hydrogen ≤1.0 ppmv

• A lot analysis is provided for each order. – Individual analysis is also availableupon request.

• Pneumatic valves and JIS connections are available upon request



ContentLiters 5,000

ft3 177


atm 94.9

* @ NTP

CYLINDER

DOT Shipping Name Krypton, Compressed UN Number UN 1056 Shipped as



SHIP


@NTP 4.6 ft3/lb

CAS No 7439-90-9


Atomic Weight 83.80 g/molTECHNICAL DATA Critical Temperature -63.8°C -82.8°F










Methane CH4





Carbon Monoxide ≤1 ppmv ≤1 ppmv


Ethane ≤20 ppmv ≤3 ppmv

Ethylene ≤1 ppmv ≤1 ppmv

Hydrogen ≤1 ppmv ≤1 ppmv

Propane ≤1 ppmv ≤1 ppmv

Propylene ≤1 ppmv ≤1 ppmv



Cylinder Sizes >> QF/QA/QB GF/GA

ContentLiters 8,100 2,830

ft3 286 100


atm 160.3 141.6

* @ NTP

CYLINDER

DOT Shipping Name Methane, Compressed UN Number UN 1971 Shipped as



SHIP




@NTP 23.7 ft3/lb

CAS No 74-82-0

CGA/DISS/JIS 350/724









GA ULTRA-LINE® 23x66/70/79 9x26/27.5/31 CS Brass



Methyl Silane SiH3CH3

Grade Semicon 3N8Purity, % 99.98

Oxygen+ Argon ≤10 ppmv


Methane ≤10 ppmv

Silane ≤50 ppmv

Other Methylsilanes* ≤50 ppmv

Chlorosilanes ≤50 ppmv

*Not included in over-all purity analysis.• A lot analysis is provided for each order – Individual analysis is also availableupon request.

• Pneumatic valves, JIS connections available upon request


Cylinder Sizes >> UF JF SF

Contentkg 1.45 0.7 0.1

lbs 3.2 1.54 0.22

Chnage Point* lbs 0.47 0.15 0.03

CYLINDER



@NTP 14.5 atm


@NTP 8.37 ft3/lb

CAS No 992-94-9

CGA/DISS/JIS 350/632


TECHNICAL DATA





SF ULTRA-LINE® 5x30/34/43 2x12/13.5/17 CS SS



Vapor Pressure @20°C 14.5 atm 193 psig

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 7091 13537 27934 62315 107440

Flow, scf/h 15 29 59 132 228


DOT Shipping Name Compressed Gas Flammable, NOS (Methylsilane) Shipped as

DOT Classification 2.1 (Flammable Gas)Liquefied

DOT Label LIQUEFIED GAS FLAMMABLE GasUN Number UN 3161

SHIP


Neon Ne

Grade ULSI 5N5Purity, % 99.9995

Oxygen ≤0.5 ppmv




Methane (THC) ≤0.1 ppmv

Water ≤1.0 ppmv

Argon ≤1.0 ppmv


• Pneumatic valves and JIS connections are available upon request.



ContentLiters 5,000

ft3 177


atm 134.6

* @ NTP

CYLINDER


Critical Pressure 27 atm 385 psia


@NTP 19.4 ft3/lb

CAS No 7440-01-9










DOT Shipping Name Neon, Compressed Shipped as

DOT Classification 2.2 (Non-Flammable Gas)Compressed

DOT Label NON-FLAMMABLE GAS GasUN Number UN 1065

SHIP


Nitric Oxide NO


Oxygen ≤1 ppmv

Nitrogen ≤3,000 ppmv ≤30 ppmv

Carbon Dioxide ≤1,000 ppmv ≤1 ppmv

THC (CH4) ≤1 ppmv


Hydrogen ≤1 ppmv

Nitrous Oxide ≤1,000 ppmv ≤30 ppmv

Nitrogen Dioxide ≤30 ppmv

• A lot analysis is provided for each order – Individual analysis is also available upon request.• For ULSI PLUS Grade, a Metals analysis is provided upon request.


Cylinder Sizes >> QZ QF

Contentm3 1 1.58

ft3 35 56

Cylinder Pressure*atm 20.4 36.2

psig 275 500

* @ NTP

CYLINDER

DOT Shipping Name Nitric Oxide Compressed UN Number UN 1660 Shipped as

DOT Classification2.3 Hazard Zone A

ECCN # EAR99(Gas Poisonous by Inhalation) Compressed

DOT LabelINHALATION HAZARD, OXIDIZER


CORROSIVE GAS

SHIP

Boiling Point @NTP -89.5°C

Triple Point -90.8°C


@NTP 12.8 ft3/lb

CAS No 10102-43-9



TLV 25 ppmv

TECHNICAL DATA

Critical Temperature -93°C -135.4°F


Size, mm 0.254 0.3556 0.508 0.762 1.016

RFO Data Size, inches 0.010 0.014 0.020 0.030 0.040

@ 500 psig Flow, sccm 20121 38413 79265 176823 304867

Flow, scf/h 43 81 168 375 646




QZ ULTRA-LINE II® 25x137/141/149 10x54/55.5/59 Aluminum SS




Nitrogen N2






Water ≤3.0 ppmv ≤500 ppbv• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves and JIS connections are available upon request.


Cylinder Sizes >> QK QF/QA/QB JF/JB

ContentLiters 8,500 7,220 310

ft3 300 255 11

Cylinder Pressure*psig 2,640 2,490 2,000

atm 186.6 176.1 141.6

* @ NTP

CYLINDER

DOT Shipping Name Nitrogen Compressed UN Number UN 1066 Shipped as


DOT Label NON-FLAMMABLE GAS Gas

SHIP




@NTP 13.8 ft3/lb

CAS No 7727-37-9








QA ULTRA-LINE II® 23x130/134/143 9x51/52.5/56 CS Brass






Nitrogen Trifluoride NF3

Grade Semicon 2N7 ULSI 4N ULSI 4N5Purity, % 99.7 99.99 99.995


Oxygen and Argon ≤700 ppmv

Nitrogen ≤700 ppmv ≤10 ppmv ≤5 ppmv

Carbon Dioxide ≤25 ppmv ≤10 ppmv ≤3 ppmv

Carbon Monoxide ≤25 ppmv ≤0.5 ppmv

Water ≤1 ppmv ≤1 ppmv ≤1 ppmv

Carbon Tetrafluoride ≤1500 ppmv ≤40 ppmv ≤25 ppmv

Nitrous Oxide ≤50 ppmv ≤10 ppmv ≤2 ppmv

Acidity as HF ≤1 ppmv ≤5 ppmv ≤1 ppmv

Sulfur Hexafluoride ≤50 ppmv ≤1 ppmv


Internal Volume Liters 43.8 49

Cylinder Sizes >> QF QK

Contentkg 20 22.7

lbs 44 50

CYLINDER

DOT Shipping Name Nitrogen Trifluoride UN Number UN 2451 Shipped as

DOT Classification 2.2 (Non-Flammable Gas, Oxidizer) ECCN # EAR99Compressed

DOT LabelNON-FLAMMABLE GAS AND

Harmonized # 2826.19.0000 GasOXIDIZER

SHIP


@NTP 102.97 atm


@NTP 5.4 ft3/lb

CAS No 7783-54-2



TLV 10 ppm

TECHNICAL DATA

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 36903 70450 145374 324296 559131

Flow, scf/h 78 149 308 687 1185










Nitrous Oxide N2O


Oxygen ≤2 ppmv ≤2.0 ppmv


Carbon Dioxide ≤2 ppmv ≤2.0 ppmv


Methane ≤1 ppmv ≤0.1 ppmv

Water ≤2.0 ppmv

Ammonia ≤0.5 ppmv

Nitric Oxide and Nitrogen Dioxide ≤0.5 ppmv




Contentkg 27.3 or 27

lbs 60

Cylinder Pressure @STPpsig 745

atm 53.4


CYLINDER

DOT Shipping Name Nitrous Oxide UN Number UN 1070 Shipped as


DOT Label NON-FLAMMABLE GAS OXIDIZER Harmonized # 2811.29.0000 Gas

SHIP


@NTP 8.7 ft3/lb

CAS No 10024-97-2


Molecular Weight 44.01 g/molTECHNICAL DATA Critical Temperature 36.4°C 97.6°F

Critical Pressure 73.9 atm 1,052.2 psia










Oxygen O2

Grade Semi ULSI 5N Gigabit 6NPurity, % 99.995 99.999 99.9999

Nitrogen ≤25.0 ppmv ≤5.0 ppmv ≤0.5 ppmv

Carbon Dioxide ≤0.5 ppmv ≤0.1 ppmv ≤0.1 ppmv

Carbon Monoxide ≤0.5 ppmv ≤0.1 ppmv ≤0.1 ppmv

THC (as Methane) ≤0.5 ppmv ≤0.1 ppmv ≤0.1 ppmv

Water ≤2.0 ppmv ≤0.5 ppmv ≤0.5 ppmv

Argon ≤3.0 ppmv ≤3.0 ppmv ≤0.5 ppmv

Hydrogen ≤0.1 ppmv ≤0.1 ppmv

Nitrous Oxide ≤1.0 ppmv ≤0.1 ppmv

Krypton ≤1.0 ppmv ≤1.0 ppmv ≤0.1 ppmv

Neon ≤0.1 ppmv ≤0.1 ppmv




ContentLiters 6,910

ft3 244


atm 155.7

* @ NTP

CYLINDER

DOT Shipping Name Oxygen Compressed UN Number UN 1072 Shipped as



SHIP


@NTP 12.08 ft3/lb

CAS No 7782-44-7

CGA/DISS/JIS 540*/714/W22-14R


Critical Temperature -119°C -180°F





QF ULTRA-LINE® 23x130/134/143 9X51/52.5/56 CS SS

QA ULTRA-LINE II® 23x130/134/143 9X51/52.5/56 CS Brass


*Brass Valve


Phosphine PH3

Grade ULSI 5N7 ULTIMA 6NPurity, % 99.9997 99.9999







Argon ≤100 ppbv

Arsine ≤50 ppbv

Germane ≤50 ppbv

Hydrogen Sulfide ≤50 ppbv

Silane ≤50 ppbv• All cylinders are individually analyzed• Pneumatic valves, DIN and JIS connections are available upon request.


Cylinder Sizes >> QN QZ

Contentkg 18.2 18.2

lbs 40 40


CYLINDER


DOT Shipping Name Phosphine UN Number UN 2199 Shipped as

DOT Classification 2.3 (2.1) Poison Gas ECCN # 3C004Liquefied

DOT LabelPOISON GAS AND

Harmonized # 2848.00.9000 GasFLAMMABLE GAS

SHIP


@NTP 42.8 atm


@NTP 11.4 ft3/lb

CAS No 7803-51-2



TLV 0.3 ppmv

Autoignition Temp < 85°C

TECHNICAL DATA

VaporTemp, °C 0.0 15.5 21.0 32.2 43.3


Temp, °F 32 60 70 90 110

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 22393 42751 88216 196789 339291

Flow, scf/h 47 91 187 417 719




QN ULTRA-LINE® 23x130/134/143 9x51/52.5/56 CS/Ni-lined SS

QZ ULTRA-LINE II® 25x137/141/149 10x54/55.5/59 Aluminum SS



Propylene C3H6

Grade ULSI 4N Semicon 3N7Purity, % 99.99 99.97





Other Hydrocarbons ≤90 ppmv ≤260 ppmv




Contentlbs 35

kg 15.9


CYLINDER

DOT Shipping Name Propylene UN Number UN 1077 Shipped as

DOT Classification 2.1 (Flammable Gas) ECCN # NPR-EAR99 Liquefied

DOT Label FLAMMABLE GAS Harmonized # 2901-22-0000 Gas

SHIP






@NTP 10.6 atm


@NTP 9.4 ft3/lb

CAS No 115-07-1

CGA/DISS/JIS 510*/724/22-14L

Molecular Weight 42.08 g/mol*Brass Valve

TECHNICAL DATA







Silane SiH4

Grade ULSI 6N* ULSI Plus 6N*Purity, % 99.9999 99.9999

Oxygen + Argon ≤0.06 ppmv ≤0.06 ppmv MetalsNitrogen ≤0.5 ppmv ≤0.5 ppmv C ≤0.1 ppma

Carbon Dioxide ≤0.05 ppmv ≤0.05 ppmv Fe ≤0.4 ppba

Carbon Monoxide ≤0.08 ppmv ≤0.08 ppmv Cr ≤0.01 ppba

Hydrogen ≤20.0 ppmv ≤20.0 ppmv Ni ≤0.2 ppba

Water ≤0.5 ppmv ≤0.5 ppmv Cu ≤0.02 ppba

Helium ≤1.0 ppmv ≤1.0 ppmv Zn ≤0.03 ppba

Methane ≤0.04 ppmv ≤0.04 ppmv P ≤20 ppta

THC (Sum of C2 – C4) ≤0.1 ppmv ≤0.1 ppmv B ≤20 ppta

Total Chlorosilanes ≤0.1 ppmv ≤0.1 ppmv Al ≤5 ppta

Disilane ≤0.5 ppmv ≤0.5 ppmv As ≤5 ppta

Disiloxane ≤0.05 ppmv ≤0.05 ppmv Ga ≤5 ppta

Resistivity, N-type (ohm-cm) >10,000 >10,000 Sb ≤5 ppta

In ≤5 ppta

Total Oxygenated≤0.2 ppma

Compounds:

* Excluding Hydrogen• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.

Internal Volume Liters 43.8 43.8 43.8 29.5

Cylinder Sizes >> QB/QF QB/QF QF QH

Contentkg 12 10 5 5

lbs 26.4 22 11 11

CYLINDER

Cylinder Pressure 275 -1,250 psig

@NTP 20.4 – 85.4 atm


@NTP 12.1 ft3/lb

CAS No 7803-62-5



TLV 0.5 ppm

TECHNICAL DATA

Size, mm 0.254 0.3556 0.508 0.762 1.016RFO Data

Size, inches 0.010 0.014 0.020 0.030 0.040@

Flow, sccm 47585 90844 187455 418169 7209811,250 psig

Flow, scf/h 101 192 397 886 1528

Critical Temperature -3.4°C 25.8°F



DOT Shipping Name Silane UN Number UN 2203 Shipped as

DOT Classification 2.1 (Flammable Gas) ECCN # EAR99 Compressed


SHIP





QH ULTRA-LINE ® 20x122/126/135 8x48/49.5/53 Aluminum SS

*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ topof the handwheelCS: Carbon Steel SS: Stainless Steel


Silcore® Si3H8

“Silcore“ is a registered Trademark of ASM International, N.V.

Grade Semicon 4NPurity, % 99.99*

Argon + Oxygen + Nitrogen ≤3 ppmv


Methane ≤2 ppmv

Silane ≤1,000 ppmv

Siloxanes ≤5 ppmv

*Excluding other SilanesDisilane and Higher Silanes reported in Certificate of Analysis.


Cylinder Sizes >> UH

Contentkg 3

lbs 6.6CYLINDER

Please

specify

Ar, H2 or He

as "pad" gas

DOT Shipping Name Pyrophoric liquid, inorganic, n.o.s. UN Number UN 3194Shipped as

(Trisilane)

DOT Classification 4.2 (Spontaneously Combustible)ECCN # EAR99

Liquefied

DOT Label SPONTANEOUSLY COMBUSTIBLE Gas

SHIP

TSCA WARNING: This material is supplied under a "Low Volume Exemption" of the Toxic Substances Control Act. As such, its use isrestricted to the formation of silicon and silicon compounds and use as a synthesis reagent.

Cylinder Pressure 5 psig (H2 or He)

@NTP 1.4 atm

Specific Volume 1.38 cc/g

@NTP 0.022 ft3/lb

CAS No 7783-26-8



TECHNICAL DATA

Boiling Point @STP 52.9°C 127.2°F

Synonyms Trisilane




UH ULTRA-LINE® 18x41/45/54 7x16/17.5/21 Aluminum SS

*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/ center of the valve outlet/ top of the handwheelSS: Stainless Steel


Silicon Tetrachloride SiCl4

Grade ULSI 3N4Purity, % 99.94(w) Metals

Other Chlorosilanes ≤600 ppmw Al ≤25 ppbw

Resistivity (ohm-cm) >100 B ≤0.2 ppba

C ≤1.0 ppmw

Cr ≤50 ppbw

Cu ≤50 ppbw

Fe ≤50 ppbw

Ni ≤50 ppbw

P + As ≤1.0 ppba

Zn ≤50 ppbw



Cylinder Sizes >> XE

Contentkg 272.7

lbs 600

Valve Connection 1/2” FPT

CYLINDER

DOT Shipping Name Silicon Tetrachloride UN Number UN 1818 Shipped as

DOT Classification 8 (Corrosive Material) ECCN # EAR99 Liquefied

DOT Label CORROSIVE Harmonized # 2827.39.0000 Gas

SHIP

Cylinder Pressure 3.8 psia

@NTP 0.27 atm


@NTP 2.28 ft3/lb

CAS No 1026-04-7


Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 68 130 268 598 1031

Flow, scf/h 0.1 0.3 0.6 1.3 2.2






XE ULTRA-LINE® 61x114/118/127 24x45/46.5/50 SS SS



Silicon Tetrafluoride SiF4


Oxygen ≤20 ppmv

Oxygen + Argon ≤1.0 ppmv




Methane ≤10 ppmv

Hydrogen Fluoride ≤50 ppmv

Arsenic ≤0.5 ppmv

Boron ≤0.5 ppmv

Phosphorus ≤0.5 ppmv



Cylinder Sizes >> QB

Contentkg 22.7

lbs 50

CYLINDER

DOT Shipping Name Silicon Tetrafluoride UN Number UN 1859 Shipped as

DOT Classification 2.3 (Poison Gas) ECCN # EAR99 Compressed

DOT Label POISON GAS CORROSIVE Harmonized # 2826.19.0080 Gas

SHIP

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 21163 40402 83369 185976 320648

Flow, scf/h 45 86 177 394 679

Critical Temperature -14.2°C 6.4°F




@NTP 71.3 atm


@NTP 3.7 ft3/lb

CAS No 7783-61-1



TECHNICAL DATA






Sulfur Hexafluoride SF6

Grade Instrument 4N ULSI 5NPurity, % 99.99 99.999

Air ≤50 ppmv ≤5 ppmv

Carbon Tetrafluoride ≤80 ppmv ≤5 ppmv

Water ≤3 ppmv


Internal Volume Liters 43.8 43.8 43.8 29.5 29.5

Cylinder Sizes >> QA/QB QB QF QX QH

Contentkg 45.45 22.73 31.8 22.73 22.7/31.8

lbs 100 50 70 50 50/70

Phase Break* lbs 20.0 20.0 20.0 13.5 13.5

CYLINDER


DOT Shipping Name Sulfur Hexafluoride UN Number UN 1080 Shipped as



SHIP

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 5738 10955 22606 50428 86945

Flow, scf/h 12 23 48 107 184

Critical Temperature 45.5°C 114°F




@NTP 23.5 atm


@NTP 2.5 ft3/lb

CAS No 2551-62-4



TLV 1,000 ppm

TECHNICAL DATA






QX ULTRA-LINE® 20x122/126/135 8x48/49.5/53 Aluminum Brass

QH ULTRA-LINE® 20x122/126/135 8x48/49.5/53 Aluminum SS



Trichlorosilane SiHCl3

Grade ULSI 3N5Purity, % 99.95(w)

Other Chlorosilanes ≤500 ppmw Metals

Resistivity (N-type), ohm-cm >200 B ≤0.1 ppba

C ≤5,000 ppba

Fe* ≤50 ppbw

P + As ≤0.8 ppba

*Liquid phase sampling• A lot analysis is provided for each order. – Individual analysis is also available upon request.• Pneumatic valves, JIS connections available upon request.


Cylinder Sizes >> XE

Contentkg 250

lbs 550

Valve connection: 1/2” FPT

CYLINDER


@NTP 1.76 atm


@NTP 2.85 ft3/lb

CAS No 10025-78-2


Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 506 965 1992 4444 7661

Flow, scf/h 1.1 2.0 4.2 9.4 16

Critical Temperature 234°C 453°F





XE ULTRA-LINE® 61x114/118/127 24x45/46.5/50 SS SS


DOT Shipping Name Trichlorosilane UN Number UN 1295 Shipped as

DOT Classification 4.3 (Dangerous when wet) ECCN # EAR99Liquefied

DOT LabelDANGEROUS WHEN WET,

Harmonized # 2827.39.0000 GasFLAMMABLE LIQUID

SHIP


Tungsten Hexafluoride WF6

Grade Semicon 3N8/6N ULSI Plus 4N8/6N5 Gigabit 5N5/7NVapor Phase Purity, % 99.98 99.998 99.9995

Oxygen + Argon ≤10 ppmv ≤1.0 ppmv ≤0.5 ppmv

Nitrogen ≤20 ppmv ≤1.0 ppmv ≤0.5 ppmv

Carbon Dioxide ≤10 ppmv ≤1.0 ppmv ≤0.5 ppmv

Carbon Monoxide ≤10 ppmv ≤1.0 ppmv ≤0.5 ppmv

Carbon Tetrafluoride ≤10 ppmv ≤1.0 ppmv ≤0.5 ppmv

Hydrogen Fluoride ≤100 ppmv ≤10 ppmv ≤1.0 ppmv

Sulfur Hexafluoride ≤10 ppmv ≤0.5 ppmv ≤0.5 ppmv

Silicon Tetrafluoride ≤10 ppmv ≤0.5 ppmv ≤0.5 ppmv

Liquid Phase Purity, %(w) 99.9999 99.99995 99.99999Total Metals: ≤1,000 ppbw ≤500 ppbw ≤100 ppbw

Individual Metals - Cr ≤10 ppbw ≤5 ppbw

Fe ≤10 ppbw ≤5 ppbw

K ≤10 ppbw ≤5 ppbw

Na ≤10 ppbw ≤5 ppbw

Th ≤0.1 ppbw ≤0.08 ppbw

U ≤0.05 ppbw ≤0.05 ppbw

• A lot analysis is provided for metals, sampled in the liquid phase • Individual cylinder analysis is provided for gas impurities.• Pneumatic valves are available for a Nickel DISS 638 connection – Stainless Steel is not available• WF6 supplied in Nickel /Nickel-lined cylinders and Nickel valves to maintain the guaranteed purity.

Internal Volume Liters 24.0 18.8 8.0 4.2

Cylinder Sizes >> GC QM GH JD

Contentkg 59 50 20 10

lbs 130 110 44 22

Change Point* lbs 0.6 0.7 0.3 0.1

CYLINDER

*Recommended Cylinder Change Point at NTP, based on Phase Break, or the amount of product left in the cylinder when the liquidphase has completely evaporated and only gaseous product is left (estimate based on ideal gas behavior).

DOT Shipping Name Tungsten Hexafluoride UN Number UN 2196 Shipped as

DOT Classification 2.3 (Poison Gas) ECCN # EAR99 Liquefied

DOT Label POISON GAS CORROSIVE Harmonized # 2826.19.0080 Gas

SHIP


@NTP 1.2 atm


@NTP 1.3 ft3/lb

CAS No 7783-82-6

CGA/DISS/JIS 670/638/J22-14R


TECHNICAL DATA

VaporTemp, °C 0.0 15.5 21.0 32.2 43.3


Temp, °F 32 60 70 90 110

Size, mm 0.254 0.3556 0.508 0.762 1.016


Flow, sccm 234 447 922 2057 3547

Flow, scf/h 0.5 0.9 2.0 4.4 7.5



Xenon Xe

Grade Semicon 5NPurity, % 99.999

Oxygen ≤1.0 ppmv




Methane ≤0.1 ppmv

Water ≤2.0 ppmv

Argon ≤1.0 ppmv

Krypton ≤2.0 ppmv

Helium ≤1.0 ppmv

Hydrogen ≤1.0 ppmv


• Pneumatic valves and JIS connections are available upon request


Cylinder Sizes >> QF/QA/QB UF JF

ContentLiters 5,000 500 250

ft3 177 17.5 8.83

Cylinder Pressure*psig varies

atm varies* Maximum Cylinder Pressure @ NTP

CYLINDER

DOT Shipping Name Xenon, Compressed UN Number UN 2036 Shipped as



SHIP




@NTP 2.93 ft3/lb

CAS No 7440-63-3











*Height is reported as the distance from the bottom of the cylinder to the cylinder neck/center of the valve outlet/ top of the handwheelCS: Carbon Steel SS: Stainless Steel


Arsine SDS2 – SDS3 SDS AsH3

SDS Type SDS 2 SDS 3Gas Purity 5N5 5N5

Purity, % 99.9995 99.9995Oxygen <1.0 ppmv ≤1.0 ppmv

Nitrogen <2.0 ppmv ≤2.0 ppmv

Carbon Dioxide <0.5 ppmv ≤0.5 ppmv

Carbon Monoxide <0.1 ppmv ≤0.1 ppmv

Methane <0.5 ppmv ≤0.5 ppmv

Water <2.0 ppmv ≤2.0 ppmv

Shelf Life 2 years 5 years

• A lot analysis is provided upon request. Specifications are based on source gas.• Fill pressure is 650 +/- 50 torr – Maximum 700 torr at 70°F (21°C) • SDS2 refers to Carbon adsorbent • SDS3 refers to HD-MCTM (High Density Monolithic Carbon)• Cylinder connection: 1/2” VCR

A

B

C

D

Deliverable Quantity in grams

Cylinder Size WY JY UY JY UY

Cylinder Volume, liters 0.44 2.2 6.6 2.5 7.6

Final Cylinder Pressure, torr SDS2 SDS2 SDS2 SDS3 SDS3

5 112 559 1677 835 2505

10 105 526 1578 775 2325

20 96 480 1440 655 1965

50 78 392 1176 455 1335

100 61 303 909 310 930

Specifications @ 20 Torr 88 440 1320

Specifications @ 5 Torr 835 2505

DELIVER

ABLE QUANTITY

Cylinder Specifications

SDS 2: DOT 3AA2015

SDS 3: DOT SP13220

Carbon Steel Cylinder

Stainless Steel Diaphragm Valve

CYLINDER

JY WY UY

Size mm inches mm inches mm inches

A 451.4 17.77 400.1 15.7 574 22.6

B 374.1 14.73 342.9 13.5 499.4 19.7

C 344.7 13.57 298.5 11.7 462.3 18.2

D 108.0 4.25 50.5 2.0 160.0 6.3


(11B)Boron Trifluoride SDS2 – SDS3 SDS 11BF3

SDS Type SDS 2 SDS 3Gas Purity 3N 3N

Purity, % 99.9 99.9Isotopic Enrichment 11B, %w 99.7 99.7

Oxygen <25 ppmv ≤25 ppmv

Nitrogen <25 ppmv ≤25 ppmv

Argon <25 ppmv ≤25 ppmv

Carbon Dioxide <25 ppmv ≤25 ppmv

Sulfur Dioxide <25 ppmv ≤25 ppmv

Hydrogen Fluoride <25 ppmv ≤25 ppmv



A

B

C

D





5 31 154 462 330 990

10 29 147 441 320 960

20 27 137 411 295 885

50 24 121 363 230 690

100 21 103 309 180 540



DELIVER

ABLE QUANTITY

CYLINDER

JY WY UY


A 451.4 17.77 400.1 15.7 574 22.6

B 374.1 14.73 342.9 13.5 499.4 19.7

C 344.7 13.57 298.5 11.7 462.3 18.2

D 108.0 4.25 50.5 2.0 160.0 6.3


SDS 2: DOT 3AA2015

SDS 3: DOT SP13220




Germanium Tetrafluoride SDS2 SDS GeF4

SDS Type SDS 2Gas Purity 3N

Purity, % 99.9Oxygen <25 ppmv

Nitrogen <25 ppmv

Carbon Dioxide <25 ppmv

Sulfur Dioxide <25 ppmv

Argon <25 ppmv

Hydrogen Fluoride <25 ppmv

Shelf Life 2 years

• A lot analysis is provided upon request. Specifications are based on source gas.• Fill pressure is 650 +/- 50 torr – Maximum 700 torr at 70°F (21°C) • SDS2 refers to Carbon adsorbent • Cylinder connection: 1/4” VCR

A

B

C

D

Deliverable Quantity

in grams

Cylinder Size WY JY

Cylinder Volume, liters 0.44 2.2

Final Cylinder Pressure, torr SDS2 SDS2

5 160 802

10 147 733

20 130 652

50 105 526

100 82 411


DELIVER

ABLE QUANTITY


DOT 3AA2015



CYLINDER

JY WY

Size mm inches mm inches

A 451.4 17.77 400.1 15.7

B 374.1 14.73 342.9 13.5

C 344.7 13.57 298.5 11.7

D 108.0 4.25 50.5 2.0


Phosphine SDS2 – SDS3 SDS PH3

SDS Type SDS 2 SDS 3Gas Purity 5N6 5N7

Purity, % 99.9996 99.9997Oxygen <1.0 ppmv ≤1.0 ppmv

Nitrogen <2.0 ppmv ≤2.0 ppmv

Carbon Dioxide <0.1 ppmv ≤0.1 ppmv

Carbon Monoxide <0.1 ppmv ≤0.1 ppmv

Methane <0.5 ppmv ≤0.5 ppmv

Water <2.0 ppmv ≤2.0 ppmv



A

B

C

D

CYLINDER

JY WY UY


A 451.4 17.77 400.1 15.7 574 22.6

B 374.1 14.73 342.9 13.5 499.4 19.7

C 344.7 13.57 298.5 11.7 462.3 18.2

D 108.0 4.25 50.5 2.0 160.0 6.3





5 40 198 594 385 1155

10 38 190 570 365 1095

20 35 177 531 330 990

50 30 151 453 245 735

100 25 123 369 185 555



DELIVER

ABLE QUANTITY


SDS 2: DOT 3AA2015

SDS 3: DOT SP13220




Silicon Tetrafluoride SDS2 SDS SiF4

SDS Type SDS 2Gas Purity 4N

Purity, % 99.99Oxygen <20 ppmv

Nitrogen <80 ppmv

Shelf Life 2 years

• A lot analysis is provided upon request. Specifications are based on source gas.• Fill pressure is 650 +/- 50 torr – Maximum 700 torr at 70°F (21°C) • SDS2 refers to Carbon adsorbent • Cylinder connection: 1/4” VCR

A

B

C

D

Deliverable Quantity

in grams

Cylinder Size WY JY

Cylinder Volume, liters 0.44 2.2

Final Cylinder Pressure, torr SDS2 SDS2

5 50 250

10 49 246

20 47 237

50 42 212

100 36 179


DELIVER

ABLE QUANTITY


DOT 3AA2015



CYLINDER

JY WY

Size mm inches mm inches

A 451.4 17.77 400.1 15.7

B 374.1 14.73 342.9 13.5

C 344.7 13.57 298.5 11.7

D 108.0 4.25 50.5 2.0


Semiconductor Gas Mixtures GeneralInformation

All Semiconductor gas mixtures are provided as “Certified” or “Certified Plus” grade, with thefollowing specifications:

• Blend Technique: Gravimetric• Certification: Certificate of Analysis• NIST Traceability: Weight, Traceable Lab Standards or Titrimetrics• Concentration is reported as Mole %, namely Moles of minor component(AsH3, B2H6, PH3, SiH4) over total Moles (x 100).

Blend Tolerance:

Matheson Tri-Gas has developed the technology and manufacturing capability to support theproduction of a wide variety of gaseous mixtures.

Please inquire about mixtures not reported in the following listings.

While the mixtures reported in the following pages are supplied standard with CGAconnections, and supported by analytical certification via a batch analysis methodology,additional specifications are available upon request as follows:

• DISS valve connections• Pneumatic valve connections• Individual cylinder analysis (analytical certification of minor componentconcentration)

Please also note the following:• Cylinder content for Mixtures is reported as nominal only.• Each cylinder is provided with a certificate of analysis complete with NISTtraceability, shelf-lives, and certified concentrations.

Concentration Range (Minor Component) Tolerance10% to 50% +/- 5%

50 ppm to < 10% +/- 10% Certified Grade

1 ppm to < 50 ppm +/- 20%

5% to 50% +/- 2%

500 ppm to < 5% +/- 5% Certified Plus Grade

1 ppm to < 500 ppm +/- 10%


Gas Mixtures: Arsine in N2, H2, HeAsH3

Mixes

Component AsH3 N2 H2 HeGrade 5N5 5N 5N 5N

Purity, % 99.9995 99.999 99.999 99.999Oxygen ≤1.0 ppmv ≤3.0 ppmv ≤2.0 ppmv ≤2.0 ppmv


Carbon Dioxide ≤0.5 ppmv ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv

Carbon Monoxide ≤0.1 ppmv ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv

Methane ≤0.5 ppmv ≤1.0 ppmv ≤0.5 ppmv ≤1.0 ppmv

Water ≤2.0 ppmv ≤3.0 ppmv ≤3.0 ppmv ≤3.0 ppmv

• All mixes are manufactured to “Certified” or “Certified Plus” grades – custom grades are available upon request• Pneumatic valves, DIN and JIS connections are available upon request• STP = 21°C or 70°F and 101.3 KPa or 1 atm• Pure gas Technical and Ship data above are reported for reference only

CAS No. 7784-42-1 7727-37-9 1333-74-0 7440-59-7

UN Number UN 2188 UN 1066 UN 1049 UN 1046

DOT Shipping Name ArsineNitrogen, Hydrogen, Helium,

compressed compressed compressed

DOT Classification2.3 (2.1) 2.2 2.1 2.2

Poison Gas Non-Flammable Gas Flammable Gas Non-Flammable Gas

DOT LabelPOISON NON-FLAMMABLE FLAMMABLE NON-FLAMMABLE

GAS GAS GAS GAS

Specific Volume @STP0.31 m3/Kg 0.86 m3/Kg 12.0 m3/Kg 6.04 m3/Kg

5.0 ft3/lb 13.9 ft3/lb 191.3 ft3/lb 96.2 ft3/lb

Molecular Weight 77.95 g/mol 28.01 g/mol 2.02 g/mol 4.0 g/mol


TECHNICAL - SH

IP

AsH3 43.8 7.3 Cylinder internal volume, liters

Concentration QF/QB UF/UB Cylinder Size

Range (c) N2, H2, He N2, H2, He Balance Gas

50 ppm ≤ c < 5% 208 35

5% ≤ c <10% 115 19 Content, cf (minimum, nominal)*

10% ≤ 15% 76 13

CYLINDER

Note on cylindersizes: Unless otherwisespecified, cylinders willbe provided as follows:

All mixes >1%: QF/UF

All mixes <1%: QB/UB

*please inquire for exact cylinder content






UB ULTRA-LINEII® 15x51/55/64 6x19/20.5/24 CS SS


�

�

�

�

*H2 and Higher Boranes excluded

B2H6

MixesGas Mixtures: Diborane in N2, H2, He


Component B2H6* N2 H2 HeGrade 4N 5N 5N 5N

Purity, % 99.99 99.999 99.999 99.999Oxygen ≤1 ppmv ≤3.0 ppmv ≤2.0 ppmv ≤2.0 ppmv


Carbon Dioxide ≤5 ppmv ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv


Methane ≤5 ppmv ≤1.0 ppmv ≤0.5 ppmv ≤1.0 ppmv

Water ≤3.0 ppmv ≤3.0 ppmv ≤3.0 ppmv

Hydrogen ≤500 ppmv

Boron Trifluoride ≤50 ppmv

B5H9 ≤10 ppmv

B4H10 ≤180 ppmv

B5H11 ≤10 ppmv

• All mixes are manufactured to “Certified” grade – custom grades are available upon request• Pneumatic valves, DIN and JIS connections are available upon request• STP = 21°C or 70°F and 101.3 KPa or 1 atm• Pure gas Technical and Ship data above are reported for reference only

CAS No 19287-45-7 7727-37-9 1333-74-0 7440-59-7


DOT Shipping NameDiborane, Nitrogen, Hydrogen, Helium,

compressed compressed compressed compressed

DOT Classification2.3 Toxic, 2.2 2.1 2.2

Flammable Gas Non-Flammable Gas Flammable Gas Non-Flammable Gas

INHALATION NON-FLAMMABLE FLAMMABLE NON-FLAMMABLE

DOT Label HAZARD GAS GAS GAS

FLAMMABLE GAS





TECHNICAL - SH

IP

B2H6 43.8 7.3 Cylinder internal volume, liters

Concentration QB/QF UB/UF Cylinder Size


50 ppm ≤ c < 5% 208 35

5% ≤ c <10% 117 20 Content, cf (minimum, nominal)*

10% ≤ 15% 78 13

CYLINDER





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*H2 and Higher Boranes excluded

Gas Mixtures: Phosphine in N2, H2, HePH3

Mixes

Component PH3 N2 H2 HeGrade 5N7 5N 5N 5N

Purity, % 99.9997 99.999 99.999 99.999Oxygen ≤0.1 ppmv ≤3.0 ppmv ≤2.0 ppmv ≤2.0 ppmv


Carbon Dioxide ≤0.1 ppmv ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv

Carbon Monoxide ≤0.1 ppmv ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv

Methane ≤0.1 ppmv ≤1.0 ppmv ≤0.5 ppmv ≤1.0 ppmv

Water ≤1.0 ppmv ≤3.0 ppmv ≤3.0 ppmv ≤3.0 ppmv

• All mixes are manufactured to “Certified” grade – custom grades are available upon request• Pneumatic valves, DIN and JIS connections are available upon request• STP = 21°C or 70°F and 101.3 KPa or 1 atm• Pure gas Technical and Ship data above are reported for reference only

CAS No. 7803-51-2 7727-37-9 1333-74-0 7440-59-7


DOT Shipping Name PhosphineNitrogen, Hydrogen, Helium,


DOT Classification2.3 (2.1) 2.2 2.1 2.2

Poison Gas Non-Flammable Gas Flammable Gas Non-Flammable Gas

DOT LabelPOISON NON-FLAMMABLE FLAMMABLE NON-FLAMMABLE

GAS GAS GAS GAS



Molecular Weight 34 g/mol 28.01 g/mol 2.02 g/mol 4.0 g/mol


TECHNICAL - SH

IP

PH3 43.8 7.3 Cylinder internal volume, liters

Concentration QF/QB UF/UB Cylinder Size


50 ppm ≤ c < 15% 208 35 Content, cf (minimum, nominal)*CYLINDER Note on cylinder

sizes: Unless otherwisespecified, cylinders willbe provided as follows:


All mixes <1%: QB/UB*please inquire for exact cylinder content



QF ULTRA-LINE® 9x51/52.5/56 23x130/134/143 CS SS

QB ULTRA-LINE II® 9x51/52.5/56 23x130/134/143 CS SS

UF ULTRA-LINE® 6x19/20.5/24 15x51/55/64 CS SS

UB ULTRA-LINEII® 6x19/20.5/24 15x51/55/64 CS SS



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Gas Mixtures: Silane in N2, H2, HeSiH4

Mixes


Component SiH4 N2 H2 HeGrade 4N8 5N 5N 5N

Purity, % 99.998 99.999 99.999 99.999Oxygen ≤5 ppmv ≤3.0 ppmv ≤2.0 ppmv ≤2.0 ppmv


Argon ≤40 ppmv

Carbon Dioxide ≤1.0 ppmv ≤1.0 ppmv ≤1.0 ppmv


Methane ≤1.0 ppmv ≤0.5 ppmv ≤1.0 ppmv

Carbon Dioxide + Carbon Monoxide ≤10 ppmv

Water ≤3 ppmv ≤3.0 ppmv ≤3.0 ppmv ≤3.0 ppmv

Hydrogen ≤5,000 ppmv

Chlorosilanes ≤10 ppmv

Resistivity, N-type (ohm-cm) >5,000

• All mixes are manufactured to “Certified” grade – custom grades are available upon request• Pneumatic valves, DIN and JIS connections are available upon request• STP = 21°C or 70°F and 101.3 KPa or 1 atm • Pure gas Technical and Ship data above are reported for reference only

CAS No. 7803-62-5 7727-37-9 1333-74-0 7440-59-7


DOT Shipping Name SilaneNitrogen, Hydrogen, Helium,


DOT Classification2.1 Flammable 2.2 2.1 2.2

Gas Non-Flammable Gas Flammable Gas Non-Flammable Gas

DOT LabelFLAMMABLE NON-FLAMMABLE FLAMMABLE NON-FLAMMABLE

GAS GAS GAS GAS





TECHNICAL - SH

IP

SiH4 43.8 7.3 Cylinder internal volume, liters

Concentration QB/QF UB/UF Cylinder Size


50 ppm ≤ c < 15% 208 35

15% ≤ c <50% 167 28Content, cf (minimum, nominal)*

CYLINDER





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Since 1985, Matheson Tri-Gas, Inc., NANOCHEM®

purifiers have provided unprecedented purificationsolutions to the electronic industry. NANOCHEM®

purifiers were the first point-of-use purifiers to deliverup to nine 9’s purity gas to the semiconductorindustry. Today, NANOCHEM® purifiers offercomprehensive solutions for the source, point-of-use,bulk and proximate purification requirements ofspecialty gas users.

NANOCHEM® purifiers combine gas-specificpurification media and ultra-high purity hardware inone system to eliminate impurities caused by:

• Upstream leaks• Improper cylinder change-outs• Increasing impurity concentration during gascylinder depletion

• Gas system component contamination• Virtual leaks from component / piping"dead pockets" and soft seats

NANOCHEM® purifiers offer the highest lifetimesand the best efficiencies for impurity removal.NANOCHEM® purifiers are available for:

• Silicon-source gases• Nitride gases• Etchants • Purge gases • Carrier gases

Oxygen, moisture and other contaminants areremoved to < 0.1 ppb (parts per billion) and arelimited only by the detection limits of even state-of-the-art analytical instrumentation.

Compact and easy to use, NANOCHEM® purifiers canbe installed within the gas cabinet or at the processtool. Most purifiers require no heating or coolingand are capable of handling a broad range of flowsand pressures.

Matheson Tri-Gas, Inc., has one of the mostextensive, in-house evaluation laboratories in theindustry to assess the quality of gas systemcomponents. The benefit is that componentsselected for NANOCHEM® purification products areof the highest quality available. "Live gas" testingis done to ensure purifiers meet or exceedperformance specifications in the specific processgas for which they are marketed.

Purification Performance Benefits

NANOCHEM® purifiers offer a number of benefits,such as reduced equipment downtime andprotection against fluctuations in gas supply qualityand upstream system upsets. Typical performancebenefits for the semiconductor / compoundsemiconductor industry are:

• Increased carrier concentration, increasedmobility

• Faster crystal growth rates • Improved uniformity of surfacemorphology

• Fewer defects in epi layers and substrates • Longer equipment life & reducedcomponent corrosion

NANOCHEM® Purifiers – a Brand You can Trust

72

73

NANOCHEM® purification media have long been theindustry standards for purifying inert gases, such asnitrogen, argon, and sulfur hexafluoride, as well as reactivegases, such as hydrogen, hydrocarbons, and hydride gases(including ammonia, silane, arsine and phosphine).Applications include biotech, chemical processing,

aerospace, analytical, petroleum refining, andsemiconductor / compound semiconductor processes,including low temperature SiGe Epi, SiN and GaN MOCVDprocesses. Over ten (10) different purification media areavailable to purify about 35 different gases.

Gas Specific Purification

NANOCHEM® Media -- Gases Purified & Specifications

GASES CHEMICAL PURIFICATION PURIFICATION MEDIUM IMPURITIES END POINT PURIFIED FORMULA MEDIUM DESCRIPTION REMOVED EFFICIENCY DETECTIONInerts

Nitrogen N2

Argon Ar Helium He Xenon Xe

Krypton Kr Neon Ne

Flammables - Partial List

Methane CH4

Ethane C2H6

Cyclopropane C3H6

Propane C3H8

Butane C4H10

Hydrogen H2

Deuterium D2

Please contact customer service for other flammables, that can be purified.

Halocarbons - Partial ListCarbon Tetrafluoride CF4

Hexafluoroethane C2F6

Perfluoropropane C3F8

Please contact customer service for other halocarbons, that can be purified.

< 100 ppt, LDL

< 1 ppb< 100 ppt, LDL

< 100 ppt, LDL

< 100 ppt, LDL




< 100 ppt, LDL



OMX-Plus™

HCX™

In2Go™

OMX-Plus™

OMX™

OMX-Plus™

HCX™

OMX-Plus™

OMX™

OMX™

Reactive agents on a polymeric supportw/ inorganic agent for NMHC removal

High surface area inorganic medium

Reactive agents on an inorganic support

Reactive agents on a polymeric supportw/inorganic agent for NMHC removal

Reactive agents on a polymeric support


High surface area inorganic medium




H2O, O2, CO2, THC except CH4

Halocarbons except CF4

CO at Low FlowHydrocarbons

except CH4


H2O, O2, CO, CO2

THC except CH4

Halocarbons

H2O, O2, CO2, THC except CH4


CO at Low FlowH2O, O2, CO2

CO at Low FlowH2O, O2, CO2,

THC except CH4


CO at Low FlowHydrocarbons

except CH4,Halocarbons except CF4

H2O, O2, CO2, THC except CH4 &Other Halocarbons

CO at Low FlowH2O, O2, CO2

COH2O, O2, CO2

DC only

Not available

DC only

DC only

DC only

DC only

Not available

DC only

DC only

DC only

ppb = Part per billionppt = Part per trillionTHC = Total HydrocarbonsLDL = Lower Limit of Detection by state-of-the-art analytical instrumentation.Please contact customer service for other gases not included in this list

{{{

74

NANOCHEM® Media -- Gases Purified & Specifications (continued)

GASES CHEMICAL PURIFICATION PURIFICATION MEDIUM IMPURITIES END POINT PURIFIED FORMULA MEDIUM DESCRIPTION REMOVED EFFICIENCY DETECTIONHydrides

Ammonia NH3

Silane SiH4

Arsine AsH3

Phosphine PH3

Hydride/Inert Mixes (N2, Ar, He, Xe, Kr, Ne, & H2)1-10% Arsine AsH3

1-10% Germane GeH4

1-10% Phosphine PH3

CorrosivesBoron Trichloride BCl3

Chlorine Cl2

Silicon Tetrachloride SiCl4

Trichlorosilane SiHCl3

Dichlorosilane SiH2Cl2

Hydrogen Bromide HBr Hydrogen Chloride HCl

OthersCarbon Monoxide CO

Nitric Oxide NO

Carbon Dioxide CO2

Nitrous Oxide N2O

Oxygen O2

Dimethyl Ether (CH3)2OSulfur Hexafluoride SF6

ppb = Part per billionppt = Part per trillionTHC = Total HydrocarbonsLDL = Lower Limit of Detection by state-of-the-art analytical instrumentation.Please contact customer service for other gases not included in this list

H2O, O2, CO2 < 1 ppb

H2O < 100 ppb, LDL Volatile Metals-Fe, Mo, Cr, Ti, Ni, Mn

H2O < 100 ppb, LDLVolatile Metals-Fe, Mo, Cr, Ti, Ni, Mn

H2O < 10 ppbHydrocarbons < 100 ppt, LDL

except CH4


H2O < 10 ppbH2O, O2, CO2 < 100 ppt, LDL

H2O, O2 < 10 ppb, LDL


High purity high surface area inorganicmedium

High purity high surface area inorganicmedium

High surface area inorganic mediumHigh surface area inorganic medium

High surface area inorganic mediumReactive agents on a polymeric supportReactive agents on a polymeric support

OMX™

Metal-X™

Metal-X™

OPX™HCX™

OPXOMX™OMS™

Not available

Not available

Not available

Not available Not available

Not availableDC onlyDC only

{

< 45 ppb, LDL< 11 ppb, LDL< 50 ppb, LDL< 1 ppb, LDL< 3 ppb, LDL

< 40 ppb, LDL< 100 ppt, LDL

< 100 ppb, LDL< 100 ppt, LDL

In2Go™

OMA™

OMX™ASX-II™PHX™



Reactive agents on a polymeric supportHigh surface are inorganic medium


H2OCO2

O2

GeH4

SiH4

TEOSH2O, O2, CO2 in inert

gas, LDLH2O in ammonia, LDL

H2O, O2, CO2, CO

DC only

DC only

DC only Not availableNot available

< 75 ppb H2O in AsH3, LDL< 33 ppb H2O in PH3, LDL

{

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1. Purge gas purification ensures thatcylinder changes do not contaminatethe process lines and that the purestpurge gas is used.

2. Source gas purification of corrosivegases ensures that cylinder moisturedoes not corrode the purge manifold,distribution or process lines.

3. Proximate gas purification allowseconomical purification with a singlesource purifier for multi-toolapplications.

4. Point-of-connection gas purificationensures process gas consistency forlarger flow applications.

5. Point-of-use gas purificationeliminates virtually all variables ofcontamination including gas junglevariables. Typical location would bedirectly before the chamber or massflow controller.

6. Bulk gas purification offerseconomical purification to a centralarea or entire facility.

7. Replacement purifiers forreplacement of other brand purifiers,previously installed.

Purification Applications - Where to Use Purification

* Drop-In Replacement with identical dimensions

76

A-Series• For 100% arsine & phosphine service• For use in ASM & Matheson Tri-GasSideCar™ custom purification cabinet

• Up to 20 slpm (1.2 NM3/hr) in AsH3/PH3

service • Up to 60 psig (0.4 MPa) in AsH3/PH3

service• Up to 150 slpm (9 NM3/hr) in inert gasservice

• Up to 500 psig (3.5 MPa) in inert gasservice

• Millipore Drop-In Replacement Design

White Knight Series™• Aeronex Drop-In Replacement Design• Up to 1000 slpm (60 NM3/hr)• Up to 500 psig (3.5 MPa) • Optional poppet valves• Optional inlet & outlet valves

BULK PurificationP-Series• Up to 400 slpm (24 NM3/hr)• Up to 150 psig (1.1 MPa) with end-point• Up to 350 psig (2.5 MPa) withoutend-point

• Optional bypass manifold • Optional vented CE enclosure

Megashield™ (MS-Series)• Up to 1000-1500 slpm (60-90 NM3/hr)• Up to 150 psig (1.1 MPa) with end-point• Up to 350 psig (2.5 MPa) without end-point

• Optional bypass manifold

HIGH PRESSURE Purification (Source)HP-Series• For installation after cylinder CGAconnection

• Reduce manifold corrosion with corrosivegases

• Up to 2,850 psig (19.7 MPa)• Flow rates up to 50 slpm (3 NM3/hr)• Built-in 1-Valve Bypass – HP Series

NOTE: 0.003 µ filter with 9-log retention standard on mostpurifier models.Optional on L-60, P-16000, P-32000, MS-Series.

Purifier Models

POINT-OF-USE PurificationMiniSentry™• Up to 1 slpm (0.06 NM3/hr)• 3000 psig (20.8 MPa) rating• Diffusion barrier limits exposure toatmosphere during installation

PuriFilter®

• Up to 3 slpm (0.18 NM3/hr)• 1000 psig (7 MPa) rating• Poppet valves limit exposure to atmosphereduring installation

Bloc® Purifier• Up to 20 slpm (1.2 NM3/hr)• 150 psig (1.1 MPa) rating• Doc acts as stand-alone particulate filter• Enables future installation of purifier• All-metal C, W, Z Seals• Poppet valves limit exposure to atmosphereduring installation

PROXIMATE Purification (Larger Flow than POU)

L-Series, J-Series• Up to 150 slpm (9 NM3/hr) • Inlet / outlet valves• Optional 3-valve Bypass• End-point detection at no extra charge• 150 psig (1.1 MPa) with end-point • 500 psig (3.5 MPa) without end-point • J-Series with Fujikin valves

C-Series, CL-Series, H-Series• Ultra-clean construction• C-Series with exhausted enclosure forflammable gas service

• Built-in 1-valve bypass• Up to 50 slpm (3 NM3/hr) with H-Series• Up to 150 slpm (9 NM3/hr) withC-Series• Endpoint detection at no extra charge• 150 psig (1.1 MPa) with end-point • 500 psig (3.5 MPa) without end-point

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