Sensors – an integral part of the digital transformation
Sensing is life.
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Autonomous/
Assisted drivingSmart Home & Building
Human-Machine
Interface
Infrastructure
Automation
Industry 4.0
Environmental
Sustainability
Personal Health
Augmented Reality
200mm Waferfab
Requirements for an Adaptable
Material Tracking Solution
Günter Leditzky
14 November 2018
Requirements for an
Adaptable Material Tracking Solution
in a 200mm Wafer Fab
Introduction to ams AG
Current situation - 200mm Fab
Material Tracking and Manufacturing
Efficiency
Requirements
Summary
Best-in-class solutions, strong growth, global scaleams at-a-glance
Our business
• Focused on high performance sensor solutions
• Sensor solutions, sensor ICs/sensor interfaces, related algorithms and software
• Small, low-power, highest sensitivity, multi-sensor integration
• Best-in-class solutions for leading OEMs
Our end markets
• Consumer & Communications (C&C) – H1 2018 73% of revenues
• Automotive, Industrial, Medical (AIM) – H1 2018 27% of revenues
By the numbers
• More than 1,200 engineers
• Around 10,000 employees worldwide
• 22 design centers, 3 manufacturing locations
• More than 35 years of design and manufacturing know-how
• Over 8,000 customers
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Global network
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Headquarters
Design centers
Manufacturing/Test
Sales/customer
support locations
• 22 design centers
Austria, Belgium, China, Germany (4), Italy (2), India, Japan, Netherlands, Portugal, Spain,
Switzerland (3), UK (2), USA (3)
• 1 application center in Singapore
• 14 sales offices + 25+ channel partners
• Manufacturing: Austria, Singapore
• High volume test center: Philippines
Scalable manufacturing strategyDifferentiating capability in-house and outsourcing of standard processes
In-house wafer manufacturing, Austria
• 200mm, 190+k wafers p.a.
• CMOS/specialty analog down to 180nm
• High volume optical filter deposition line
In-house optical production and packaging, future VCSEL manufacturing in Singapore
• Technology leader in high-end optical packaging
• WLO and optical filter production, optical packaging
• Completing major investment cycle in 2018 for high volume optical/3D sensing products
• Internal VCSEL manufacturing line investment:
Highly differentiated products, on track for mass production availability 2019
Technology partnerships for scalability and flexibility
• High volume wafer production: TSMC and UMC
• Standard and semi-custom packaging: Hana, Amkor and ASE
• Partnerships with key equipment suppliers
In-house test, Austria / Philippines
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Manufacturing footprint
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Ang Mo Kio, Singapore
• 7,000+ employees
• 30,000 m2
• Wafer level optics,
packaging
Woodlands, Singapore
• 800+ employees
• 10,000 m2
• Wafer level optics
Tampines, Singapore
• 100+ employees
• 15,000 m2
• Optical filter, VCSEL,
wafer test
Graz, Austria
• 450+ employees
• 7,500 m2
• ASIC, TSV, optical
filter, test
Calamba, Philippines
• 600+ employees
• 7,500 m2
• Test, sensor
calibration
Financial results 3Q 2018USDm
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690.3
1,158.1
305.5
479.6
0
250
500
750
1,000
1,250
9M 2017 9M 2018 Q3 2017 Q3 2018
Total revenues
+57.0%
+67.8%
544.4601.7
0
200
400
600
800
Jun 30 2018 Sep 30 2018
Total backlog
Total revenues by market H1 2018
Automotive,
Industrial,
MedicalConsumer &
Communications73%
27%
Europe (EMEA)
Asia/Pacific
Americas
Total revenues by region
31%19%
7%
7%
62%74%
0%
20%
40%
60%
80%
100%
9M 2017 9M 2018
ams AG, 200mm SMIF Fab in Austria
Wafer manufacturing / lot tracking
Confidential © ams AG
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Material Tracking System (MTS)
• 100% traceability of lots
• 100% location monitoring
• 100% process flow control
LOT localization on racks
LOT identification on equipment
IR system is outdated
need for replacement
Installed IRID net based on IR communication
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Iterative re-entrant flows with ca. 500 single steps
typical implant
mask step
typical metal
mask step
average
25 iterations
(= mask steps)
Process flows on the shop floor
How to operate the line?
Throughput increase: + 10%
Fab delivery performance : 95%
Improved cycle time: - 20%
Cycle Time Delivery
performance
Output
Goals change depending on the
business situation.
What are the goals?
Current situation
Wafer manufacturing in a mature 200mm line
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Maximize output
Limited capex spending
Technology focus on
• Specialties
• Integration of value adding modules on top of CMOS platforms
Many different products in various technologies
It is so special…
very complicated…
The Work of Sisyphus
Nowadays
his name is
Tim Woods
In the
antiquity his
name was
Sisyphus
T Transportation
I Inventory
M Motion
W Waiting
O Over Production
O Over Processing
D Defects
S Skills Underutilized
MTS and the 8 types of WASTE
T Transportation
I Inventory
M Motion
W Waiting
O Over Production
O Over Processing
D Defects
S Skills Underutilized
Material Tracking
and Logistics
high impact on
productivity and cost
Florian Riegler, in cooperation with FH Joanneum Graz
Masterthesis
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- Analysis of existing MTS implementation
Lot identification on load-port
Lot localization
System integration
- Collection of requirements for future solution in the 200mm wafer fab
Review of business cases – standard workflows and exception handling
Information flow and User Interface
Integration into MES system architecture
Interviews with stakeholders (fab logistics, operators, automation, engineering)
Crosscheck with TIM WOODS
- Benefit analysis and prioritization of requirements
Learnings
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There is no best solution for retrofitting the Material Tracking System (MTS).
The inclusion of operators and supervisors expertise is extremely beneficial (mandatory).
Due to limited space on/above the shop-floor
- WIP storage must be flexible.
- automation of transportation has a potential in certain areas (but not everywhere).
• Operators are (and stay) the most important persons on the shop floor.
• MTS is the tool for the operators to run the production.
• The MTS concept should support automated transportation whenever required.
Operator User Interface and precise lot localization on the shop floor are key criteria for enabling high productivity.
(in conjunction with manual lot transportation)
Operator UI
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Excursion handling consumes more time then typically assumed.
/ it happens that excursions – workarounds – become the standard practice /
Operator must be informed and need to have immediate access to
• what is the next station for the lot (“where next”)
• was the operation correctly performed:
was lot placed correctly on load port and does the MES system (automation) recognize the lot.
if not: warning and instruction for operator.
• Lot status: ready, HOLD and reason, etc..
ideally, this information is available on the lot (SMIF pod).
Ergonomics:
• Operator UI must be easily readable.
• Operator must have both hands free to work.
(“chaotic” storage system)
MTS must support a flexible storage system
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1. Lots should be placed based on logistics needs
2. Varying process mix causes bottlenecks to change dynamically.
Operating scenario may change due to business requirements.
Optimum waiting WIP for equipment (especially bottlenecks) is changing.
3. Temporary space required for maintenance should not impact logistics.
a priori no fixed storage positions in the shop floor.
dynamic storage assignment (potentially supported by automated lot dispatching system).
storage position must be tracked for all active lots – productive, non-productive, R&D.
Racks should be moveable easily no wiring enables fast adaptations of shop floor to logistics needs.
Summary
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100% lot identification on the equipment load port and
full integration of the material tracking system with MES/lot dispatching and automation solution are mandatory.
Business cases, manufacturing requirements are changing
the MTS backbone and hardware should last for 15 more years to come.
Position fine lot localization on the whole shop-floor will enable to support the productivity improvements by extending
dispatch rules to storage areas.
We should not expect a 100% solution from the beginning but the flexibility to adjust the MTS to growing production
needs.
When handling lots the operator is the first person to see abnormal behavior. The MTS User Interface should support the
operator on the shop floor to make the right decision in time.
Don’t allow Sisyphus to enter the shop floor
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www.ams.com
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