Sensors – an integral part of the digital transformation

Sensing is life.

© ams AG

Page 1

Autonomous/

Assisted drivingSmart Home & Building

Human-Machine

Interface

Infrastructure

Automation

Industry 4.0

Environmental

Sustainability

Personal Health

Augmented Reality

200mm Waferfab

Requirements for an Adaptable

Material Tracking Solution

Günter Leditzky

14 November 2018

Requirements for an

Adaptable Material Tracking Solution

in a 200mm Wafer Fab

Introduction to ams AG

Current situation - 200mm Fab

Material Tracking and Manufacturing

Efficiency

Requirements

Summary

Best-in-class solutions, strong growth, global scaleams at-a-glance

Our business

• Focused on high performance sensor solutions

• Sensor solutions, sensor ICs/sensor interfaces, related algorithms and software

• Small, low-power, highest sensitivity, multi-sensor integration

• Best-in-class solutions for leading OEMs

Our end markets

• Consumer & Communications (C&C) – H1 2018 73% of revenues

• Automotive, Industrial, Medical (AIM) – H1 2018 27% of revenues

By the numbers

• More than 1,200 engineers

• Around 10,000 employees worldwide

• 22 design centers, 3 manufacturing locations

• More than 35 years of design and manufacturing know-how

• Over 8,000 customers

© ams AG

Page 4

Global network

© ams AG

Page 5

Headquarters

Design centers

Manufacturing/Test

Sales/customer

support locations

• 22 design centers

Austria, Belgium, China, Germany (4), Italy (2), India, Japan, Netherlands, Portugal, Spain,

Switzerland (3), UK (2), USA (3)

• 1 application center in Singapore

• 14 sales offices + 25+ channel partners

• Manufacturing: Austria, Singapore

• High volume test center: Philippines

Scalable manufacturing strategyDifferentiating capability in-house and outsourcing of standard processes

In-house wafer manufacturing, Austria

• 200mm, 190+k wafers p.a.

• CMOS/specialty analog down to 180nm

• High volume optical filter deposition line

In-house optical production and packaging, future VCSEL manufacturing in Singapore

• Technology leader in high-end optical packaging

• WLO and optical filter production, optical packaging

• Completing major investment cycle in 2018 for high volume optical/3D sensing products

• Internal VCSEL manufacturing line investment:

Highly differentiated products, on track for mass production availability 2019

Technology partnerships for scalability and flexibility

• High volume wafer production: TSMC and UMC

• Standard and semi-custom packaging: Hana, Amkor and ASE

• Partnerships with key equipment suppliers

In-house test, Austria / Philippines

© ams AG

Page 6

Manufacturing footprint

© ams AG

Page 7

Ang Mo Kio, Singapore

• 7,000+ employees

• 30,000 m2

• Wafer level optics,

packaging

Woodlands, Singapore

• 800+ employees

• 10,000 m2

• Wafer level optics

Tampines, Singapore

• 100+ employees

• 15,000 m2

• Optical filter, VCSEL,

wafer test

Graz, Austria

• 450+ employees

• 7,500 m2

• ASIC, TSV, optical

filter, test

Calamba, Philippines

• 600+ employees

• 7,500 m2

• Test, sensor

calibration

Financial results 3Q 2018USDm

© ams AG

Page 8

690.3

1,158.1

305.5

479.6

0

250

500

750

1,000

1,250

9M 2017 9M 2018 Q3 2017 Q3 2018

Total revenues

+57.0%

+67.8%

544.4601.7

0

200

400

600

800

Jun 30 2018 Sep 30 2018

Total backlog

Total revenues by market H1 2018

Automotive,

Industrial,

MedicalConsumer &

Communications73%

27%

Europe (EMEA)

Asia/Pacific

Americas

Total revenues by region

31%19%

7%

7%

62%74%

0%

20%

40%

60%

80%

100%

9M 2017 9M 2018

ams AG, 200mm SMIF Fab in Austria

Wafer manufacturing / lot tracking

Confidential © ams AG

Page 9

Material Tracking System (MTS)

• 100% traceability of lots

• 100% location monitoring

• 100% process flow control

LOT localization on racks

LOT identification on equipment

IR system is outdated

need for replacement

Installed IRID net based on IR communication

Confidential © ams AG

Page 11

Iterative re-entrant flows with ca. 500 single steps

typical implant

mask step

typical metal

mask step

average

25 iterations

(= mask steps)

Process flows on the shop floor

How to operate the line?

Throughput increase: + 10%

Fab delivery performance : 95%

Improved cycle time: - 20%

Cycle Time Delivery

performance

Output

Goals change depending on the

business situation.

What are the goals?

Current situation

Wafer manufacturing in a mature 200mm line

Confidential © ams AG

Page 13

Maximize output

Limited capex spending

Technology focus on

• Specialties

• Integration of value adding modules on top of CMOS platforms

Many different products in various technologies

It is so special…

very complicated…

The Work of Sisyphus

Nowadays

his name is

Tim Woods

In the

antiquity his

name was

Sisyphus

T Transportation

I Inventory

M Motion

W Waiting

O Over Production

O Over Processing

D Defects

S Skills Underutilized

MTS and the 8 types of WASTE

T Transportation

I Inventory

M Motion

W Waiting

O Over Production

O Over Processing

D Defects

S Skills Underutilized

Material Tracking

and Logistics

high impact on

productivity and cost

Florian Riegler, in cooperation with FH Joanneum Graz

Masterthesis

Confidential © ams AG

Page 16

- Analysis of existing MTS implementation

Lot identification on load-port

Lot localization

System integration

- Collection of requirements for future solution in the 200mm wafer fab

Review of business cases – standard workflows and exception handling

Information flow and User Interface

Integration into MES system architecture

Interviews with stakeholders (fab logistics, operators, automation, engineering)

Crosscheck with TIM WOODS

- Benefit analysis and prioritization of requirements

Learnings

Confidential © ams AG

Page 17

There is no best solution for retrofitting the Material Tracking System (MTS).

The inclusion of operators and supervisors expertise is extremely beneficial (mandatory).

Due to limited space on/above the shop-floor

- WIP storage must be flexible.

- automation of transportation has a potential in certain areas (but not everywhere).

• Operators are (and stay) the most important persons on the shop floor.

• MTS is the tool for the operators to run the production.

• The MTS concept should support automated transportation whenever required.

Operator User Interface and precise lot localization on the shop floor are key criteria for enabling high productivity.

(in conjunction with manual lot transportation)

Operator UI

Confidential © ams AG

Page 18

Excursion handling consumes more time then typically assumed.

/ it happens that excursions – workarounds – become the standard practice /

Operator must be informed and need to have immediate access to

• what is the next station for the lot (“where next”)

• was the operation correctly performed:

was lot placed correctly on load port and does the MES system (automation) recognize the lot.

if not: warning and instruction for operator.

• Lot status: ready, HOLD and reason, etc..

ideally, this information is available on the lot (SMIF pod).

Ergonomics:

• Operator UI must be easily readable.

• Operator must have both hands free to work.

(“chaotic” storage system)

MTS must support a flexible storage system

Confidential © ams AG

Page 19

1. Lots should be placed based on logistics needs

2. Varying process mix causes bottlenecks to change dynamically.

Operating scenario may change due to business requirements.

Optimum waiting WIP for equipment (especially bottlenecks) is changing.

3. Temporary space required for maintenance should not impact logistics.

a priori no fixed storage positions in the shop floor.

dynamic storage assignment (potentially supported by automated lot dispatching system).

storage position must be tracked for all active lots – productive, non-productive, R&D.

Racks should be moveable easily no wiring enables fast adaptations of shop floor to logistics needs.

Summary

Confidential © ams AG

Page 20

100% lot identification on the equipment load port and

full integration of the material tracking system with MES/lot dispatching and automation solution are mandatory.

Business cases, manufacturing requirements are changing

the MTS backbone and hardware should last for 15 more years to come.

Position fine lot localization on the whole shop-floor will enable to support the productivity improvements by extending

dispatch rules to storage areas.

We should not expect a 100% solution from the beginning but the flexibility to adjust the MTS to growing production

needs.

When handling lots the operator is the first person to see abnormal behavior. The MTS User Interface should support the

operator on the shop floor to make the right decision in time.

Don’t allow Sisyphus to enter the shop floor

Thank you!Please visit our website

www.ams.com

Follow us on social media: