Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Overview of Nano Manufacturing Technology and Nano Manufacturing-Related R&D Activities in Korea
27 April 2003DaeGab Gweon, KAIST, Korea
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Contents
Overview of Nano Manufacturing
• Importance of Nano Manufacturing• Characteristic features of Nano Manufacturing• Configuration of Nano Manufacturing System
Nanotechnology research activities in Korea
• Nanotechnology research activities in Korea• Nanotechnology research activities in KAIST
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Nanotechnology development step
Categories of Nanotechnology development Categories of Nanotechnology development
Basic researchBasic research
Technical innovationTechnical innovation
CommercializationCommercialization
Fundamental research related to nano-scale phenomena
Technical innovation using basic research results
Commercialization of innovative technology
Using Nano Manufacturing TechnologyImportance of each categoryImportance of each category
100%
Importance
Emerging period(1990’s)
Growth period(2000’s)
Maturity period(2010’s)
Commercialization
Technology innovation
Basic research
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
100nm 10nm
Application fields of Nano Manufacturing
100um 1um
Micro structure (300nm)
Nano chip (10nm)
Micro optics (80 )MEMS (200 )
Micro chip (1 )Micro parts (100 )Semiconductor (60nm)
CNT component (10nm)
Optical Pickup (200 )
Slider(100 )
Optical communication(2 )
VCSEL module(10 )
CNT TR (10nm)
Probe type pickup(100nm)
Circuit component
(1 )
Gold particle(20nm)
Plant cell (20 )
Sperm (10 )
Yeast (2 )
Animal Cell (100 ) Flagellate (1 )
Chromosome (500nm)
Virus (20nm)
Ribosome (100nm)
DNA (2nm)
Nano Bio Sensor (10nm)
Nuclear transfer(100 )
BT
IT/NT
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Importance from technical viewpoint
Manufacturing speed
Manufacturing accuracy
several um
several 100um
Several Hz
Limit of Manual Manufacturing
AutomatedNano manufacturing
is necessary
Technology innovation results
to be manufactured
Technology innovation results
to be manufactured
Miniatu
rizati
on
Increa
sing d
eman
d
Low accuracySmall volume production
High accuracyMass production
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Importance from industrial viewpoint
Commercializationof innovation results
Nano ManufacturingSystem
High precision mass production
High precision handling
High pr
ecisio
n mas
s prod
uctio
n
Technical innovationin IT/NT/BT
Speed up of technical innovation
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Key Technologies in Nano Manufacturing System
Key technologies in Nano Manufacturing System
are Nano measurement, Nano manipulation, Nano processingto produce nm-to-um scale functional components in IT, NT, BT fields
Nano Manufacturing
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Nano Manufacturing Processes are coupled !
Processing
Measurement Manipu
lation
Most Nano Manufacturing tasks need multiple
processes
Single-process system : Nano Manufacturing system in which only one key process is carried outMulti-process system : Nano Manufacturing system in which 2~3 key processes are carried out together
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Manufacturing time reduced in multi-process system
processingmeasurementmanipulation
Workpiecesetting
100%
Manufacturingtime
Single-process system Multi-process system
Single-process system : Processing?Measurement?Change of processing condition?Processing : long process timeMulti-process system : Processing+Measurement+Manipulation can be processed simultaneously : short process time
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Configuration of Nano Manufacturing SystemMeasurement system
Manipulation system
Processing system
Control System
Nano Interface
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Illustrative details for each key technology
• PZT actuator• Voice Coil Motor• Linear Motor• Multi- DOF nano manipulation
system• Flexure hinge mechanism• Nano precision guide mechanism• Nano precision displacement
sensor• Flexure motion mechanism• Beam deflecting actuator• Inchworm mechanism
• E-beam lithography• Ion-beam lithography• Imprinting• Thin film deposition• Nano dispenser• Wafer repairing tool• CNT handling tool• Optical tweezers• Optical scissors• DNA/protein handling tool• Nano welding tool• MEMS device driven nano
component capturer• Material removal processing• Scanning probe processing• Optical probe processing
• Confocal scanning microscope• Near field scanning optical
microscope• X-ray microscope• Atomic force microscope• Scanning tunneling microscope• Scanning electron microscope• Transmission electron
microscope• Vision based hybrid measuring
system
Measurement Processing Manipulation
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Characteristic features from industrial viewpoint
Strong technical impact
• Expansion of IT/NT/BT infra-structures
• Contribution to IT/NT innovation
• Contribution to BT innovation
Highly profitable industry
Large market volumeEmerging technology/market
Nano actuator industry
Nano sensor industry
Nano production industry
Optical communication assembly industry
High precision instrument industry
Bio manipulation industryNano manipulation
industry
Nano measurement industry
CNT market
Cell manipulationmarket Data storage market
Optical communication market
MEMS componentmarket
LCD market
Optical component market
Semiconductor market
DNA manipulation
market
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Characteristic features from technical viewpoint
Hybrid positioning system
Long range(cm) High resolution(nm)positioning (10 -7 uncertainty)
Hybrid measurement system
Long range (cm3) High resolution(nm3)measurement (10 -7 uncertainty)
Real-time, high precision, inner structure inspection/manipulation
Real-time transparent inner structure inspection
Complex multidisciplinary technology integration
Multidisciplinary technology
UHV, high performance anti-temperature/humidity/vibration design
Robustness against the disturbance(temperature,humidity,pressure
variation)
High technology
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Characteristic features from technical viewpoint
Mechanical Engineering
Physics Computer Engineering
Biology
Electrical Engineering
Nano Manufacturing
Multi-Facet Technology
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Nanotechnology research activities in Korea
Large PDP, LCD displayCircuit manufacturing
Digital controlHigh density storage
Center for next-generation display technology
(2002~2012)FY 180 million $(Hanyang Univ.)
Nanostructured Materials Nanostructured Optical
MaterialsNano tube mass production
Center for NanostructuredMaterials Technology
(2002~2012)FY 107 million $
(KIST)
Nano ElectronicsSpintronics
Molecular ElectronicsNano Lithography
Tera-level Nanodevices(1999~2009)
FY 142.4 million $(SAIT)
Nano PatterningNano Probing
Nano AssemblyNano-manufacturing
Nano Control
Center for NanoscaleMechatronics & Manufacturing
(1999~2009)FY 142.4 million $
(KIMM)
Activities in Research Institutes
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Nanotechnology research activities in Korea
Large capacity StorageScanning Probe Microscope
Near Field Recording
Development of Next Generation Large Capacity Information Storage Device
(1999~2002)FY 8 million $
(ETRI)
Nanocomposites Nanopowders
Bulk NanomaterialsNanodevices
High Performance Nanocomposites Program
(1999~2002)FY 6 million $
(KIST)
System IC ManufacturingLithography
CMPProcessor
A Collaborative Project for Excellence in Basic System
IC Technology(1998~)
FY 30 million $/year(COSAR)
Nano CompositeNano fabricationNano PatterningNano MachineNEMS/MEMS/
Ultra precision measurement and Control
Creative Research Initiative Groups(1997~ )
FY 24 million$/year(KIST, KAIST, and etc)
Activities in Research Institutes
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Nanotechnology research activities in Korea
Activities in industry
• PET Nanocomposite for characteristic improvement of Gas barrier
• Nano material for CMP• Paste for cigarette filter and cosmetics
Others
• MRAM using nano structured ITO, SET-memory, spin array of magnetic material
• Reliability study of flash memory using discrete charge-storage
• Tera-bit CNT memory device• High-density, low-power consuming, high speed single
electron memory device using quantum phenomena in nano structuring
• Nano data storage system• Tera-bit data storage device• Tera-bit CNT memory device• Hybrid nano particle• Display technology using CNT• MR component and individual process for MRAM• Circuit using single electron
Semiconductor industry
(Samsung, LG, Hynix)
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Nanotechnology research activities in KAIST
?Vision for NT of KAIST
?Need and Objective
?The Nanotechnology is one of key technologies in 21 century along with BT, IT, ET, CT.?There are sufficient demands for Nanotechnology research and education.?KAIST has various research groups and facilities for Nanotechnology. ?KAIST fosters creative and interdisciplinary scientists(engineers) who will lead Nanotechnology advancement.?KAIST sets a goal of developing several creative technologies and educating professionals in Nanotechnology field.
?Establishment of Nano Fab. Center (under construction)?Establishment of KAIST Nano Research Institute. (2001.11)?Nano-Soc (system on chip) (under construction) ?Nanotechnology Interdisciplinary Program has been established in 2002 and total 9 departments are involved.?Participation in “National Nano Technology Development Plan” which is mainly concentrating on the development of semi conductor-related nanodevices and nanomaterials.
?Plan
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Nanotechnology research activities in KAIST
?Total 89 Labs in 13 departments are involved.
- 4 Creative Research Centers :Center for Nanospinics of Spintronics MaterialsDigital Nanolocomotion CenterCenter for Functional NanomaterialsCenter for Billionth Uncertainty Precision Engineering
- 2 Engineering Research Center :Center for Advanced Functional PolymersCenter for Ultramicrochemical Process Systems
- 8 National Research Laboratories :Semiconductor Thin Film, Electon Microscopy, Protein Microscopy,Nano Laser, Quantum Computation, Environmental Catalysis, Biomolecular Eng., Carbon-Metal Hybrid Nano Materials.
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Nanotechnology research activities in KAIST
Nanomaterials(43)
Nanodevices(23)
Nanocharacterization(8)
Nanotheory(15)
?Nanomaterial
?Nanodevices
?Nanocharacterization
?Nanotheory
Nanomagnetic material, Self assembleed nanomaterials, Nanocomposites, Nanobiomaterials, Nanopaticles, Hybrid-nanomaterials, Nanoporus materials, etc.
Quantum Computer, Nanophotonics, Nanoelectronics, SET, Nanobiochip, Nanolocomotion, Nanopositiong devices, MEMS/NEMS, etc.
Electrochemical, Neutron/Proton, Nanocontact chracterization
Nanoelectronics structure, NanosimulationTotal 89 Labs
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Nano Fab. Center in KAIST
Research Development
?Provide repeatable and stable processing service.?Manufacturing prototype service.?8 inch wafer processing.
Nano PI Lab. Nano Device Lab
Maximize synergy effect by collaborating with satellite Labs
?Establish fundamental technology.?Processing services for atomic manipulation, biochemical bonding& MEMS.?Specimen processing
Contribution to NT advancementContribution to
NT advancement
Fundamentalidea
Commercialization
One-Stop Service
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Satellite institutes of KAIST Nano Fab. Center
Korea Research Institute ofBioscience and biotechnology
Korea Institute ofEnergy Research
Korea Research Institute ofChemical Technology
Korea Institute ofMachinery and Materials
Electronics and TelecommunicationsResearch Institute
Korea AerospaceResearch Institute
Korea Institute ofGeoscience and Mineral Resources
Hoseo University
Korea BasicScience Institute
Korea Research Institute ofStandards and Science
Korea Atomic EnergyResearch Institute
Korea Electric PowerResearch Institute
Nano Fab Center
All the institutes are located within 10 minutes
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
Nano Fab. Center in KAIST
NanoFab Center 1. class 1 : Nano Patterning Lab. / Characterization2. class 1,000 : Nano Device Lab.(8”) with SMIF3. class 10,000 : Nano Pi Lab. (= 6”) with flexibility
“Nano Fab. is a new field which applies nanotechnology to existing sciences and technologies and is a fusion of various studies integrated together.”
Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology
International Conference on Nano Manufacturing To Be Organized
? Sponsoring Organizations : KSME, KSPE, ICASE
? Purpose?To provide an international focus for exchanging technical information?To identify and resolve technical issues having to do with Nano Manufacturing Technology?To enable and promote commercialization of Nanotechnology-based products through
science and engineering of manufacturing
? Key Conference Scope?Theory, modeling and simulation?Nanomaterials?Fabrication/Processing?Instrumentation and Characterization?Nanodevices and Systems
? Highlights of Conference?Technical program
- Plenary Talks - Invited Sessions- Panel Sessions - Poster Sessions- Forums - Tutorials/ Workshops
?Technical Tour- To Nanotechnology-related industries and research institutes
? Organized by KAIST
Top Related