Waveguide Alignment System · 2017-06-07 · The systems we provide for various types of device...
Transcript of Waveguide Alignment System · 2017-06-07 · The systems we provide for various types of device...
The systems we provide for various types of device alignment feature our easy-to-use "Optical
Aligner" alignment software and are built upon our craftsman-style processing and assembly
technologies. In addition, we have developed a system for surface alignment with an auto-collimator
outside the machine. We can support various types of customer requests from development to mass
production.
WF-1000
WA-1000
WF-2000
Manual Waveguide Alignment System
Automatic Waveguide Alignment System
Waveguide Device Alignment Composition System 290
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Waveguide Alignment System
Model Number Name
286
Manual Waveguide Alignment System / WF-1000
Fiber Optic & Waveguide Alignm
ent
■Introducing the newly developed, multi-vision examination system
●Since the device end face can be observed directly, various types of information can be obtained, ●Stage features a precision positioner (FPP03-13), eliminating most backlash and allows for fine alignment. ●Gap control with a precision of 0.5μm or less can be performed.
Unit Name
Receiving and
Ejecting Unit
W.G.Unit
Axis Sign
X
Y
Z
θx
θy
θz
Xw
Yw
Actuator
Fine Pitch Positioner (FPP03-13)
Fine Pitch Positioner (FPP03-13)
Fine Pitch Positioner (FPP03-13)
Micrometer
Micrometer
Micrometer
Micrometer
Micrometer
Stroke
Coarse : ±6.5mm
Fine : 0.3mm
Coarse : +5mm, -3.5mm
Fine : 0.3mm
Coarse : ±6.5mm
Fine : 0.3mm
±2deg
±2deg
±3deg
±3.25mm
±6.5mm
Resolution
Coarse : 1mm
Fine : 0.5μm
Coarse : 1mm
Fine : 0.5μm
Coarse : 1mm
Fine : 0.5μm
0.01deg
0.01deg
0.0086deg
0.01mm
0.01mm
Application
Alignment
Alignment
Focus, Evacuate
Matching Surface
Matching Surface
Matching Surface
Coarse Alignment
Coarse Alignment
287CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
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Fiber Array
Multi-vision
Rectangular Mirror
Optical axis
Device
Yθ y
θ zθ x X Z Fiber Array
■Features of the Multi-vision System
●Using a high-precision right-angle mirror, surface alignment and end face observation of the device are possible from
above only with one observation optical system. This easily enables measurable rough alignment. ●High-precision surface alignment with parallelism of 0.05° or less (*) is possible. (*) The precision varies with the device end face roughness.
Collimator reflected light Edge face image (Left : FA, Right : WG)
288
Automatic Waveguide Alignment System / WA-1000
Fiber Optic & Waveguide Alignm
ent
●Easy-to-see device mounting section with open space.
●Includes an evacuation mechanism to prevent damage to the device.
●Easily attached/detached device holder.
●Design matches the rotating center of the three (3) axis swivel stage to enable accurate fine adjustment.
<Setup Example>
289CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
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■Software
"Optical Aligner," Kohzu Precision's original application software, is installed in this equipment. (PC: DOS/V, OS: Windows 2000)
This alignment software was designed to support not only FA-PLC-FA but also different equipment configurations. The GUI can be customized
for each user. Similar multi-functional softwares on the market are generally complicated to operate and is not easy-to-use, but this software
was created to be easy to use and allows individual users to save their own forms.
Unit Name
Receiving and
Ejecting Unit
W.G. Unit
Alignment Accuracy
Stability
Gap Accuracy
Axis sign
X
Y
Z
θx
θy
θz
Xw
Yw
θyw
±0.1db
±0.1db / 1h
≦ 0.5μm
Actuator
Automatic
Automatic
Automatic
Automatic
Automatic
Automatic
Automatic
Automatic
Automatic
Stroke
±12.5m
±2.5m
±12.5m
±3deg
±5deg
±5deg
±3.25m
±3.25m
360deg
Resoluion
0.05μm
0.05μm
0.05μm
0.00078deg
0.001deg
0.0003deg
0.01mm
0.01mm
1deg
Application
Alignment
Alignment
Focus, Evacuate
Matching Surface
Matching Surface
Alignment
-
-
-
Driver Type
Micro-step
Micro-step
Micro-step
-
-
-
-
-
-
Note : Depends on device and measurement environment
Data Base
Optical alignment
Image processing
Stage controller
Work sheet
Power meter
Another controller
Optical Aligner
■Features
290
Waveguide Device Alignment Composition System / WF-2000
Fiber Optic & Waveguide Alignm
ent
■Specifications
PJ200
Alignment System
Unlike the problems of previous assembly equipment, the compact size and high reliability of WF-2000 is made possible by parallelism adjustment of devices with the PJ200 surface alignment system and by setting a device with holder on the equipment in advance. Our "Optical Aligner" standard alignment software is included.
Unit Name
Receiving Unit
Ejecting Unit
Axis Sign
Xin
Yin
Zin
θzin
Xout
Yout
Zout
θzout
Actuator
Motorized
Motorized
Motorized
Motorized
Motorized
Motorized
Motorized
Motorized
Stroke
35mm
5mm
35mm
±5deg
35mm
5mm
35mm
±5deg
Resolution
0.05μm
0.05μm
0.05μm
0.000786deg
0.05μm
0.05μm
0.05μm
0.000786deg
Application
Alignment
Alignment
Focusing
Alignment
Focusing and Switching
Alignment
Focusing
Alignment
Driver Type
Micro-step
Micro-step
Micro-step
Half-step
Micro-step
Micro-step
Micro-step
Half-step
■Examinaion Unit
■Mechanical Section
θX
θY
Stroke
±2.5°
±2.5°
Resolution
0.01°
0.01°
■Mechanical SectionMeasurement Range
±1.4°
Resolution
21 sec
Measurable Distance
0~100mm
Beam Deameter
φ1~8
■Auto-Colimetor
CCD:monochrome 1/3inch
Lens : 1 time W.D.68mm LED light
291CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
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Auto-colimetor
Rectangular Mirror
One-touch clamp
Surface Matching System「PJ200」
One-touch clamp
θz AxisY Axis
X Axis
Z Axis
Waveguide Alignment System Mechanism Unit
■Features
■Surface alignment with the PJ200 surface matching system Using a right-angle mirror and auto-collimator placed with high precision, the parallelism between the waveguide top face and the fiber array top face, and between the waveguide end face and the fiber array end face is adjusted. The adjustment precision is 0.05° or less. (The adjustment precision varies with the device surface precision and material.)
■A holder with completed surface matching is moved to the alignment equipment and is set on the alignment stage. The holder setting can be easily performed with a single operation clamp system. ※Adhesive can be applied at this time.
PJ200 (Surface Matching System) FM2-20 (Fiber Array Holder equipped with angle adjustment mechanism)
a
1, High-precision surface matching Using the PJ200 surface matching system, precision adjustment of parallelism between devices at 0.05° or less is possible. High-precision surface alignment enables the following. ●Bias of the bonding layer is low and the gap can be reduced to 0.5 μm or less.
●Measurable bonding conditions allows position displacement during UV curing to be reduced to the minimum. 2, Reduction of cycle time and improvement of efficiency ●By separating the surface alignment process from the equipment, the next device can be prepared between the alignment process and the UV curing process.
●When assembling the same type of device repeatedly, the PJ200 surface matching system can be used for holder angle calibration. This enables multiple alignment units to be supported with one PJ200 surface alignment system.
3, New type holder Measurable holding with spring pressure is possible.
Position displacement due to heat generated by ultraviolet irradiation can be reduced using an optional extremely low expanding material.