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UPW MICRO 2017MICROELECTRONICS INDUSTRY WATER MANAGEMENT

CONFERENCE AGENDA

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A MESSAGE FROM THE ORGANIZERS

UPW Micro 2017 marks the 20th time this group has met to discuss the challenges and solutions in ultrapure water production for semicon-ductors. In that last 20 years, node sizes have shrunk from 250 nm to 10 nm, and to say that end-users’ needs have changed during this time is an understatement. We’re thrilled to have all of you join us in Portland to continue discussing the evolution of the industry’s water needs at a time when the industry itself is rapidly evolving. For our part, GWI is excited to continue supporting the industry with Ultrapure, the online publication focusing in part on water for microelectronics, but this isn’t the only thing we at GWI have been working on.

Some of you will have joined us for the inaugural Ultrapure Water Learning Series on May 30th. A growing issue within the industry is that of training—and retaining—skilled operators and technicians in fabs. We hope that the ongoing Learning Series, while not expressly created with operators in mind, can be a small contribution towards addressing this need. We anticipate running courses for the Learning Series regularly, so please be on the lookout for announcements and updates regarding future training sessions.

While most of will be familiar with Ultrapure Water Journal, it is our pleasure to announce that we plan to begin the publication of a peer-reviewed journal focusing on UPW for microelectronics. We’ve assembled a panel of reviewers with a wide range of expertise to provide a rigorous, scholarly approach to publishing within the industry. We’ve reviewed a number of articles already and have many more in the works. We encourage you to submit a technical note, technical paper or scientific paper. If you’re interested, please ask a GWI staff member for more information.

Next year, we’re returning to Austin, and we hope to see many of you there. As we continue to bring the focus of the conference closer to end-user needs, we want to help you answer the question that continues to drive the industry:: how do we make it better? Please do not hesitate to suggest ways for GWI to improve these efforts. Thank you again for joining us at UPW Micro 2017.

The 2017 UPW Micro Team

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2017 CO-MODERATORS

LEARNING SERIES WORKSHOPDAY 0 | MAY 30, 2017

8:00-9:00

A. Foyer

Registration open + Continental breakfast

Broadway I-III

10:00-11:00 PVDF piping design, sizing, joining, support, QA/QC

Casey Williamson, Semtec

Broadway I-III

11:00-12:00 Operation and troubleshooting for UPW & water management systems

Slava Libman, FTD Solutions LLC and Betty Pennington, Air Liquide - Balazs NanoAnalysis

9:00-10:00

Broadway I-III

UPW distribution system design

Dave Buesser, FTD Solutions LLC

Steven EdmundIntel

Bob McIntoshEnviro-Energy Solutions

Dan WilcoxSamsung Austin Semiconductor

Bernie ZerfasGLOBALFOUNDRIES

Season HillSamsung Austin Semiconductor

Alan KnappEvoqua Water Technologies

Slava LibmanFTD Solutions LLC

We’d like to thank our panel of co-moderators for their contribution to this year’s Ultrapure Water Micro agenda.

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A. Foyer

15:00-15:30 Break

Broadway I-III

13:00-14:00 Key UPW instruments: how to best measure UPW system performance

Casey Williamson, Semtec

Broadway I-III

14:00-15:00 Cooling tower/scrubber optimization - water treatment and makeup water options

Philip Yu, Nalco Water, an Ecolab company

Broadway I-III

15:30-16:30 Reverse osmosis operations

Bill Loyd, DOW Water & Process Solutions

Broadway I-III

16:30-17:30 Ion exchange resins: how they work & why they work and don’t work

Bjoern Dinges, Lanxess

LEARNING SERIES WORKSHOPDAY 0 | MAY 30, 2017

A. Foyer

12:00-13:00 Lunch

A lunch hour stipend will be given to workshop attendees

Hands-on training for plastic welding will be available on-site. For anyone interested in learning about an Infrared (IR) Thermal Fusion Machine for bonding PVDF and other thermal plastics, a sign-up sheet will circulate the room. One-hour sessions will start on the hour in Broadway IV after 10 people have signed up for a particular time slot.

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MAIN AGENDA DAY 1 | MAY 31, 2017

8:00-8:15

Pav. East &West

Introduction notes + 2016 Presentations recognition

7:00-8:00

A. Ballroom

Registration + Breakfast

A. Ballroom

10:05-11:50 Roundtables session

The UPW Micro Roundtables Session is a platform to exchange ideas and insights and to engage with the each other in a more conversational setting. Each Roundtable speaker will lead three 30-minutes discussion groups.

SEE PAGE 19 FOR TOPICS

A. Foyer

9:45-10:05 Coffee break

A. Foyer

11:50-12:00 Networking break

Pav. East &West

8:55-9:45 Combined track presentation

Slava Libman, FTD Solutions LLC

UPW IRDS and SEMI: reinforced process of enabling advanced existing and future semiconductor technologies

Pav. East &West

8:15-8:55 Keynote address

Archita Sengupta, Intel

The future of contamination control in the next generation supply chain for beyond 14nm node semiconductor processes

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ULTRAPURE WATER TRACK

Pav. East

12:00-12:30 Simulation of metal contamination in wet cleaning of doped Silicon wafer

Drew Sinha, Sumco

Pav. East

14:30-15:00 A new method for the rapid identification of sub-20nm particles in UPW

David Blackford, Kanomax FMT

Co-Authors: CT Associates, Air Liquide-Balazs NanoAnalysis

Pav. East

12:30-13:00 Measurement of high molecular weight polymers by a scanning threshold particle counter

Gary Anderson, Kanomax FMT Co-Author: CT Associates

A. Ballroom

13:00-14:00 Lunch Sponsored by

Session 1 Enabling Advanced Fab Needs

A. Foyer


Pav. East

14:00-14:30 UPW quality in high purity chemical manufacturing

Daniel Stucky, Samsung Austin Semiconductor

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WATER MANAGEMENT TRACK

Pav. West

12:30-13:00 Change your surface water treatment system to a ground water treatment system with only 24 hours notice

Brad Herbert, ON Semiconductor

Co-Author: H2Morgan LLC

A. Ballroom

13:00-14:00 Lunch Sponsored by

Session 1 Innovations in Water Management

Pav. West

12:00-12:30 Employing biochemistry to address semiconductor industry environmental challenges

Dave Buesser and Boris Eliosov, FTD Solutions LLC

A. Foyer


Pav. West

14:00-14:30 Biochip: an innovative carrier media in moving bed bioreactor for non-chemical wastewater treatment

Thuyen Thi Khanh Nguyen, Intel Vietnam

Pav. West

14:30-15:00 Low hanging fruit: reclaim opportunity for point of use abatement

Chris England, M + W Group

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Pav. East

16:00-16:30 Particle removal and metrology from a practical point of view

Glen Sundstrom, Evoqua Water Technologies

A. Foyer

17:30-18:30 Drinks Reception Sponsored by

18:45-21:45 Offsite dinnerPunch

Bowl Social

Punch Bowl Social 340 SW Morrison St. Portland, Oregon 97204

Pav. East

16:40-17:10 Joint track: Keeping UPW technology knowledge alive: a case for community colleges

Dr. Gregory Carr, Clackamas Community College

Pav. East

15:30-16:00 Comparison of optical particle counting and aerosol-based particle counting technologies for UPW monitoring and diagnostics.

Gary Van Schooneveld, CT Associates

Co-Author: Kanomax FMT, Aerosol Devices

A. Foyer

17:10-17:30 Break

Session 2 UPW Particle Measurement and Control

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Offsite dinner sponsored by

Diverse corporations in 170 countries look to Nalco Water, an Ecolab company, to deliver customized solutions and expert, onsite service. Harnessing inno-vative water, hygiene and process technologies and services, we partner with our customers to minimize their water consumption, maximize their results and optimize their total cost of operation.

www.Nalco.com

Session 2 Enduser Perspective in Water Management

Pav. West

15:30-16:00 Corrosion control using dynamic makeup water blends for cooling towers

Joel Martin, Nalco Water, an Ecolab Company

Co-Author: Samsung Austin Semiconductor

Pav. West

16:00-16:30 Repurposing used or surplus water treatment equipment and membranes in water management

Dileep Agnihotri, Water Surplus

Co-Authors: Samsung Austin Semiconductor,

Cypress Semiconductor

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MAIN AGENDA DAY 2 | JUNE 1, 2017

7:00-8:00

A. Ballroom



Session 3 Enduser Perspective in UPW

Pav. East &West


Mark Knudson, Tualatin Valley Water District

Water supply in the Portland region

Pav. East &West


Dane Louvier, Samsung Austin Semiconductor

Utility planning to support production capacity increases

Pav. East

9:30-10:00 Million dollar task force: new organic material deposition on filters in UPW

Irina Belozerova, Intel

Pav. East

10:00-10:30 sTPC enabled new UPW ultra filter product quality for microelectronics manufacturing

James Lee, Samsung Austin Semiconductor

Pav. East

10:30-11:00 Joint track: Bacteria in UPW: myths and reality pt. II

Bernie Zerfas, GLOBALFOUNDRIES

Co-Author: Air Liquide - Balazs NanoAnalysis

A. Foyer

9:10-9:30 Coffee Break Sponsored by

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Pav. East &West


Mark Knudson, Tualatin Valley Water District

Water supply in the Portland region

Pav. East &West


Dane Louvier, Samsung Austin Semiconductor

Utility planning to support production capacity increase


7:00-8:00

A. Ballroom



Session 3 Water Management Using Membranes

Pav. East

10:30-11:00 Joint track: Bacteria in UPW: myths and reality pt. II

Bernie Zerfas, GLOBALFOUNDRIES

Co-Author: Air Liquide - Balazs NanoAnalysis

A. Foyer

9:10-9:30 Coffee Break Sponsored by

Pav. West

9:30-10:00 Opportunities for biomimetic aquaporin membranes in microelectronics water management

Claus Hélix-Nielsen, Aquaporin

Pav. West

10:00-10:30 A new way to obtain normalized flow data from RO units

Randy Majerle, Nalco Water, an Ecolab Company

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A. Foyer

13:00-14:00 Lunch + Raffle winner announcement

Pav. East

11:30-12:00 Evaluation of H2O2 removal system and its analytical method in UPW

Jeongyun Choi, Samsung Engineering

12:00-12:30

Pav. East

Continuous online monitoring of H2O2 in UPW

Yukio Noguchi, Nomura

Pav. East

14:00-14:30 Optimization of UPW system by improving the performance of elemental technology

Yasuharu Minato, Kurita

Pav. East

12:30-13:00 Joint track: Online peroxide analyzer concentration validation for semiconductor UPW

Varinder Malik, Samsung Austin Semiconductor


Session 4 Peroxide Measurement and Management in UPW

Session 5 UPW System Optimization

A. Foyer

11:00-11:30 Coffee break Sponsored by

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A. Foyer

13:00-14:00 Lunch + Raffle winner announcement

Pav. East

12:30-13:00 Joint track: Online peroxide analyzer concentration validation for semiconductor UPW

Varinder Malik, Samsung Austin Semiconductor


Session 4 Water Management Using UV

Session 5 Pushing the Envelope of UPW Systems

Pav. West

14:00-14:30 Reduced biological fouling with the combination of ion exchange and reverse osmosis membranes

Beryn Adams and Jerry Aguilar, Lanxess

A. Foyer

11:00-11:30 Coffee break Sponsored by

Pav. West

11:30-12:00 Quartz glass deep UV transmission and degradation in UPW UV reactors

Klaus Zoltner, Heraeus

Pav. West

12:00-12:30 The impact of quartz quality in UV water processing

George Diefenthal, Neotech Aqua

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Pav. East

14:30-15:00 Real-time plant modeling and control system simulation: the perfect match

Laurent Misslin, Ovivo Switzerland

Pav. East

15:00-15:30 Primary mixed bed performance optimization for enabling part per trillion UPW quality

Varinder Malik , Samsung Austin Semiconductor

A. Ballroom

16:00-16:40 Closing drinks + Closing remarks

Pav. East

15:30-16:00 Joint Track: Long-term UPW plant operation practices as an efficient service to a semiconductor company

Philippe Rychen, Ovivo Switzerland

Co-Author: Ovivo France, Soitec

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Pav. West

14:30-15:00 Minimizing metal ions and particles in UPW discrete components used for shutoff and non-shutoff

Ed Cellucci, Plast-0-Matic



A. Ballroom

16:00-16:40 Closing drinks + Closing remarks

Pav. West

15:00-15:30 Investigation of a new final UF module for advanced UPW system

Fumitaka Ichihara, Organo Corporation

Pav. East

15:30-16:00 Joint Track: Long-term UPW plant operation practices as an efficient service to a semiconductor company

Philippe Rychen, Ovivo Switzerland

Co-Author: Ovivo France, Soitec

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ABOUT OUR SPONSORS

3M Separation & Purification Sciences Division is a leading producer of fluid filtration and separations media globally. For over 100 years 3M has provided solutions for industrial and high purity water applications.

Whether it’s Liqui-Cel™ Membrane Contactors for dissolved gas control to industry-leading levels, Liqui-Flux™ ultrafiltration modules for reliable and sustained performance, or media filtration solutions that help you remove unwanted particulates, 3M Separation & Purification Sciences Division is ready to help solve your separation and filtration challenges.

Aquafine is the leading provider of innovative industrial fluid treatments using ultraviolet (UV) technology. Developing high-performance, eco-friendly prod-ucts for today’s most demanding UV applications. Whether disinfection, total

oxidizable carbon (TOC) reduction, chlorine and chloramines destruction, ozone destruction, or ad-vanced oxidation processes (AOP), Aquafine’s products provide effective UV treatment. With thousands of installations worldwide, Aquafine recognizes that water impurities, compliance to state, federal and international regulations, and equipment reliability are often the most important factors, and they work with customers to create a strategic partnership. continues leading the way to safer, more efficient UV treatment solutions.

Evoqua Water Technologies offers the experience, innovation and deep knowledge that your production processes require to meet the stringent demands of the microelectron-ics and solar industries. Evoqua’s water solutions will help you meet your requirements for regulatory compliance, lifecycle cost and UPW quality. We provide cutting edge solutions for water recycle/reuse incorporating the latest emerging technologies.

Water management answers from Evoqua prove their worth daily in:

• Semiconductors Fabs• Disc Drive Manufacturing• University Nano Technology • Solar Research and Development• Solar Cell Manufacturing• Semiconductor Equipment Manufacturing

Evoqua – Transforming Water. Enriching Life.

Intel is a world leader in the design and manufacturing of essential products and tech-nologies that power the cloud and an increasingly smart, connected world. Intel deliv-ers computer, networking, and communications platforms to a broad set of customers including original equipment manufacturers (OEMs) , original design manufacturers (ODMs), cloud and communications service providers, as well as industrial, communi-cations and automotive equipment manufacturers. We are expanding the boundaries

of technology through relentless pursuit of Moore’s Law and computing breakthroughs that make amazing experiences possible.

Samsung Austin Semiconductor (SAS) is one of the most advanced semi-conductor manufacturing facilities in the world. It is also home to Samsung Austin Research and Development Center (SARC) - a world-class R&D Center

which develops high-performance, low-power, complex CPU and System IP architecture and designs for Samsung’s System LSI division. SAS produces digital LSI logic components for tablets, smart phones, and other mobile devices. With over 2600 employees and 2.3 million square feet of space, SAS is design-ing and producing a full range of design rule devices. Since 1997, SAS has invested approximately $15 billion in its Austin, Texas, campus, making it one of the largest direct foreign investments in United States history.

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ABOUT OUR SPONSORS

ChemTrace®, a Quantum Global Technologies company is a globally recog-nized leader of analytical testing with its copy exact laboratories in the United States, South Korea and Taiwan. ChemTrace network of laboratories operate in

cleanrooms and utilize class 100 or better mini-environments to ensure contamination-free preparation and testing of critical materials and components used in Semiconductor, Solar, Photonics and LED manufacturing.

Founded in 1993, ChemTrace® provides state of the art analytical services and problem solving exper-tise including customized solutions in identifying and analyzing contamination sources from clean room consumables, tool components, air, water, wafers/wafer depositions and cleaning chemicals for the ultimate yield optimization. Our expertise lies in micro-contamination analysis in the form of trace metals, organics, anions/cations and particles.

GEMÜ Valves is a leading world-wide manufacturer of high quality valves, measurement and control systems. GEMÜ’s products are well known for their modular design, high performance, and superior quality. We strive to

consistently provide a level of service exceeding the expectations of our customers. Every inquiry and order is carefully considered so the customer can be offered the most suitable GEMÜ product to match their requirements. GEMÜ’s overriding philosophy is to ensure each and every customer contact is a quality experience. GEMÜ is committed to the pursuit of quality and excellence in the development, production and manufacturing of our products.

Harrington Industrial Plastics is the country’s largest distributor of indus-trial plastic piping serving all industries with corrosive and high-purity applications. Harrington carries a complete line of piping products and accessories, and particularly noted for its technically trained sales staff.

There are now over 50 strategically located branches throughout the continental U.S., and Hawaii. These facilities house all the components for a complete system such as piping, tubing, hose, tanks, grating, filtration, pumps, and instrumentation. A Harrington representative is available to you 24 hours a day, 7 days a week. To reach your local branch call (800) 213-4528.

Heraeus Quartz is a market and technology leader in the production of high-pu-rity quartz materials. We specialize in the development and manufacturing of both high purity quartz and synthetic fused silica for the microlithography,

optics, semiconductor and lamp industries. We work closely with our customers to produce mainly syn-thetic fused materials needed for general production as well as custom materials. Typical products used in the disinfection market would include both undoped and doped tubing for lamps and sleeves along with plate and rod materials.

Asahi/America offers a wide selection of thermoplastic piping systems and components for projects ranging from ultrapure water applications to water treatment and chemical feed lines. Headquartered in Lawrence, MA, Asahi/America domestically manufactures custom piping components and maintains a large inventory capable of supplying multi-million dollar projects.

Asahi/America’s offering includes the Purad® PVDF high purity piping system, which is manufactured to the most stringent quality and purity standards. Asahi/America’s Poly-Flo® and Chem Proline® systems are ideal solutions for water treatment applications. We also maintain an extensive fleet of welding equipment to support large projects across the country.

GF Piping Systems develops, produces and markets a comprehensive range of piping systems and components in a variety of materials used worldwide to transport water, gases and aggressive media. Delivery of the products – whether fittings, valves, measurement and control technology, pipes or jointing technolo-

gies – is always fast, flexible and dependable.

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Mar Cor is a leading provider of turnkey high purity water systems and services for the Life Science market. With 30 service locations in the US and Canada and over 1000 installations, we provide a wide range of pre-engineered totally

automated energy efficient water system platforms such as our BioPure LSX. Mar Cor also provides customized solutions to meet all of your high purity water requirements. Our area of focus are compa-nies in pharmaceutical, electronics, cosmetics, medical device, and food & beverage. All our systems use current technologies for energy & utility conservation and the latest in data acquisition. Mar Cor is a division of Cantel Medical symbol CMD NYSE.

Mettler-Toledo Process Analytics is a leader in process and pure water mon-itoring instrumentation used in pharmaceutical and biotech applications, of-

fering systems for the measurement parameters of pH/ORP, dissolved oxygen, TOC, dissolved CO2, and conductivity. METTLER TOLEDO’s innovation continues with the introduction of the 7000RMS analyzer for on-line microbial monitoring.

OVIVO is a global leader in sustainable water treatment solutions for industrial, municipal water and wastewater treatment, spanning all industries worldwide. The company’s passion to create value in water is executed through the design, installa-tion and commissioning of highly sophisticated water treatment systems, providing the best solutions to treat and recycle water at the lowest energy cost.

While the world acknowledges that it is facing a clean water crisis, the demand for water is ever in-creasing. OVIVO develops and provides high-performance technologies to serve the semiconductor industry’s use of water and has had great success in meeting the most stringent TOC requirements (< 0.3 ppb).

Worldwide Experts in Water Treatment

SnowPure manufactures and supplies an array of water purification and process components to system integrators in 55 countries. With decades of exporting experience and industry knowledge, SnowPure works closely with OEMs to help

optimize system design and performance. Our technical expertise helps guide customers before, during, & after sales. SnowPure’s products are used worldwide across multiple industries and in a variety of processes. Our technologies include: Electrodeionization (EDI), Power Supplies, Nanofiltration (NF), Ultrafiltration (UF), Reverse Osmosis (RO), Ion-Exchange Membranes (IXM), Electrodialysis (ED), Ultraviolet (UV), and Gas-Transfer Membranes (GTM).

QUA is an innovator of advanced membrane technologies that address the most demanding water purification requirements. Headquartered in the USA, QUA provides its global customers and OEM partners in industrial, manufacturing, and infrastructure markets with best practices in R&D, innovation, quality, and customer service. QUA’s diverse product portfolio includes fractional electrodeionization technology (FEDI®),

polymeric (Q-SEP®) and ceramic (CeraQTM) ultrafiltration membranes, and submerged membrane biore-actor modules (EnviQ®). These products are specifically designed for high purity water treatment, wastewa-ter recycle/reuse, seawater desalination, potable water purification applications.

ABOUT OUR SPONSORS

Levitronix is the worldwide leader in magnetically levitated Bearingless Motor technology, specializing in supplying ultra-pure fluid handling devices for Micro-electronics, Life Science and Industrial applications. Levitronix’ innovative and

revolutionary pump technology incorporates a magnetically suspended pump impeller. The technology results in ultra-low particle shedding for all applications with the highest purity requirements.

LANXESS is a leading specialty chemicals company with sales of EUR 7.7 billion in 2016 and about 19,200 employees in 25 countries. The company is currently represented at 75 production sites worldwide. The core business of LANXESS is the development, manufacturing and marketing of chemical intermediates,

additives, specialty chemicals and plastics.

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Roundtables Topics

1. Capacity Management - Do I need more or manage what I have better? Dave Buesser, FTD Solutions LLC

2. UPW costs - Operating costs, maintenance, staffing, prevention vs repair Craig Christensen, Intel

3. Organics control - How to control an already very small number? What should I focus on? Philippe Rychen, Ovivo Switzerland

4. Keeping UPW knowledge technology alive in your organization Greg Carr, Clackamas Community College

5. Implications of SEMI standards to the UPW system design and OPS (SEMI F57, F63, F49, F61, F75, C79, and C93) Bob McIntosh, Enviro-Energy Solutions

6. What to do about particle measurement Steven Edmund, Intel

7. Mixed bed regeneration - Perils and pitfalls Beryn Adams, Lanxess

8. What is new in contamination control that I am not doing now? Slava Libman, FTD Solutions LLC

9. What are the top items coming from IRDS affecting UPW? Dan Wilcox, Samsung Austin Semiconductor

10. Bacteria Myth and reality Bernie Zerfas, GLOBALFOUNDRIES

11. Wastewater challenges: Volume, monitoring, treatment design to name a few Tim Alig, Intel

12. Water reuse / reclaim: Past, present, and future Irina Belozerova, Intel

13. Cooling and heating water loops: Typical issues and secrets of reliability and lower cost Philip Yu, Nalco Water, an Ecolab Company

14. Issues and opportunities related to CMP slurry, backgrinding, wastewater treatmentand and recycling Scott Ray, HighQ-Factory GmbH - US Operations

15. UPW Recycling - Is it worthwhile? David Harris, Ovivo

16. Water and wastewater analysis: What’s new and today’s challenges James Yates, Axine Water Technologies

17. CU wastewater treatment Michael Wismer, Evoqua Water Technologies

18. Fluoride wastewater treatment Brad Herbert, On Semiconductor

19. H2O2 in UPW treatment Varinder Malik, Samsung Austin Semiconductor

20. H202 in wastewater Boris Eliosov, FTD Solutions LLC

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SPONSORS & PARTNERS

Lanyards Sponsor Notebooks Sponsor

Dinner Sponsor

Day 1 Lunch Sponsor

Drinks ReceptionWi-Fi KeycardsCharging StationDay 2 Breaks

Sponsors

Worldwide Experts in Water Treatment

Exhibitors

ANALYTICAL INSTRUMENTS

Partners

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