UN/Teo ICINaOOM S.l..a/UM ~""/NA Manor Royal 8ef!lenwsteenweg 709 23 Fu Te Road(N) Crawley 8 1600 Sint-Pieters-Leeow Wal Gao Q!ao Free Trade Zone We-st Sussex, RH10 9LW Tet • )Z 2 36300)0 Pudonj , Shangllal Tel: Fax - )2 2 3630064 200131,Chlna Office -44 129) 528844 Tet .86 21 5866 9618 Sale-s & SeMel' 08459 21 2223

a"~MANY Fax -86 21 S866 9993 Fax: Ammerthalstra/!.e )6 Office -44 129) 5)H53 85551 Klrchheim JAPAN Sale-s & Service -44 129) 53<11<19 Munich 1078-1 , YmI'Ilhashl

Te l: Vachlyo-shi , Chiba AM.~/~A5 Sales 0 800 000 14 56 Japan , 276-8523 301 BallardYale Street Service 0 800 000 1<1 57 Tel -81 <17 <158 8831 Wilmington, MAOI887 Fax: fax .81 4745888)5 Tel.19786585<110 OHice -49 89 99191899 Fax·l 978 658 7969 Sales & Service +49 89 99191888 5INaAPO~. Toll Free (USA only): 42 Loyan'il Drive Tel ·1800 848 9800 ~AAN~e Loyan'illndustrlal Estate

125 Avenue Louis Roche Sin!lapore 508962 ~ANAOA 92238 Genf)E'villlers, Cedex Tel · 656546 8408 5860 Chedworth Way Paris Fax -65 6546 8407 Misslssauga, Ontario Te l; Canada, L5R OA2 Office .33 14798240 1 TAIWAN Tel_I 800 387 4076 Sales .)) 1.,1 2112 56 No_ 4)<1 Chun!l-Hwa Road Fax -I 90S 501 1225 Service .3) 1<1'2112 45 Tauren Town, MlaoU County

fax ; 351 Taiwan &~AZII.. Office -33 1479844 54 Tel -886 37611 .,22 Rua Bernardo Wrona, 222 Sales & Service -n 1<11 21 12)8 Fax .886)7611401 02710-060, Sao Paulo, SP Brasil INOlA ICOF:l&A Tel .55 11 3952 5000 20) Surya Kiran BtJilding Daewoo Enllineerinll Bulldin!l Fax .55 11 39652766 19 Kasturba Gandhi Mar!l 5th Floor

New Delhi -110001 9-) Sunae-donll I TAI..Y India BtJndan'il-jU, Sunllnam City Via Carpacclo)5 Tet .911141510065 Kyungki-do , 1<orea 20090 Trezzano sui Navi!llio Fax _9111 4151 02<15 Tel -82)17167070 Milan fax .82 31 738 1001 Office .)9 02« 4471 1.F:lA.1.. Sales .39 02« 447242 5 Habarzet Boulevard AUIiiTAAI..IA Service .)9 02« 447217 Gat 2000 Industrial Zone 1688 Ipswich Road Fax .39 02 43 401 6)8 Qiryat Gat 82000 Rocklea Qtd, 4106

Tel .972 86810633 AU$tralia , fax ·972 8 681 0f>40 Tet; .6140199 1193 0

Fax: ·61 298869249 • 0 < 0

1; PLEASE CONTACT ANV OF THE ABOVE FOR DETAILS Of OTHER SALES AND SERVICE CENTERS IN YOUR AREA S_ ] co Edwards and the Edwards loao are trade marks of Edwards Limited 00

• CI Edwards Limited 2007

~ WWW,.OWA,qO.VACUUM.~OM Go INFOC.OWA,qO.VACUUM.~OM @OWAROS

~rlptlon

Clellfl and ~ Kit

~Kitforr2MI75S

6liI<k Kit for E2M275S

E2M175S and E2M275S Rotary Pump Service Kits

(iZOWA I=lOS

Itftll Numb«

o\lt>6·0H)1

A366-0H)<I

Al61-01 -1l-4

Important safety Information

Vaaa.m pumps 'r~ po( ... Ually~~ If incorr«tly used. f~;red Ot .... inuined. so plN~ 'P9foach the r~lr or INIlnU!"'nc~ with caution.

Ant incOlr«tly fitted spar~ PIIrt'! could ~~ 'fOAJI' pump and coo.Ad be potenti.Uy da.,-aus .

~ .1Iow lI'OqUIIlifled personnel to att"""t to r_ Ot rPplac~ ifI'/ pa.rt of the pump.

If you hII~'~ tIoubts about the S<!'!VIcInt pnxf'dtKH or the products uPilbilitiH pIe.~ contM;1 [dwllrds.

Ik'IOte ~urnint Iny equ~ to Edwlfds lOt rejNlir pieas.e 100Iow the Edwards HSI procf'dtK~.nd comjll~t~.n HS2 d«laratlon form to wam of any substlncH used Ot produc:Pd In the equipment Wt can be da.,-aus. T'he proce<lur~ and forms ar~ Included wit~ the.,....", instruction fTWI\/jIls.nd can be down· loaded t.ther with Edwards local contact details from -.w.edwlfdsyiK\.UT1.com

AlwaY' conlC<m to S<!'!VIce SCI'H!duiH unlHS atlverse conditions neoc<!'SSitat~ more frequent S<!'!VIcint.

• Report any ~ect be1Ole.n accident or consequential damage can OCClK.

• Observe local and country specllic regulations. norms and guidelines.

• ~r .((ow anyone to rltfl\OVe larl~ Of heavy components witN:>ut .dequat~ iIItlnt equipment.

• lk'Iore maintenance work Is ~un. ensur~ the pump is switched off and isoiatPd from the mains.

T'he pump .... y haYl! beoen exposed to prOCI!"OH which use hazardous substances Ol procklces by'prO<luc;ts which lie ~ntttDUS 10 n.man health.nd 51lety. lor nampie. chemically actl"". blolO\llcllly ilCtive or radioactlYO! sutnunces.

• llefore working on" pumP. em.K~ Wt the correct ptl"WNl prot«IM ooquipmeot h aYlllabi~ and beint 1M'd. AlwaY' we .. 51fety IOfties. We .. a brNlher .... sk with positive lir prewK~ and take other precautions 1f)lOU believe the pump .... y be contamhated with ~rdous ~tan<:es and dlats.

When .pplying ~.iInts and lubriclnts. pt"e'YO!nt contact wiIIlthe skin by _ ..... wltabi~ II~.

Seals .... y contain f\uof~Mt_, -...tIlch when properly llandied is not d ..... """ but -...tIleh ffIIy Pfoduc~ I to_Ie and corros"'" rflldue ,hydr~ fluoride « hydrofIuor1c acid) in the event 01 elU:es,1ve tIe.It Ot flre deJ>e'nd1nt on trw cirC\lfmlln(es 01 deviCUotion and other .... tm.1s 1nYotYed.

On compllMloo of .... lnlenance. check the IU"P functions correclly.nd that IlIprds and protection devices are fIItPd.nd worklna correctly.nd that the po.mp is electrically 51fe.

If !he P'-OfIIl Is IMd for hIIndling llaurdous ~tar\Ces chedt the pump for Iw·til~UWS1 befOf~ 1M.

DII.pose 01 waste 011 .nd Iny p<OC<!'SS by·products In KCordanc:~ with 1oc.1 and ""Iional 51flM.y .nd ~I requlremenli. It II USUIUy iUtwll to dispose of WlISte o~ into dflins or Wiler tOUflH. Of 10 bury it.

Edwards limited ".....". Royal c.rawtey. West Sus~~. UK RHt091W Tel: -(44J 129) 528344 F.x: - (44) 12935):1-45)

o Edw.rds Limited 200II. Edwards and tile Edwards IOID Ire \rJodemarks of Edwards UmltPd.

I I

~OWAFOOS

Contents

Section

2

(ntroduction

Kit Parts ...

Pam In the CI~an and ~lIaul Kit .................................. . Part'! In the Blade Kits ................................................... .

Page

. .....••••••........ 1

. ................... 2

. ........... 1 . ........•

3 How to use the KitS ........................... . .......................... 12

Illustrations

Figure

Killtems for .... In oil bo_ sub"ssembly ................ . ............... . Kit Items for Inl~t valve wb-auembiy ................................... . Killtems lor o~ box er\d·plate and 011 filter SUb,"ssembly .................................... .

• Kit Items for lIS bolIliast v,l"" sub'luembly ...................................... ............ . . 5 Kit ill'ITIS fOt oil distributor sub·,.sembly ................................................ .. 6 Kit items for IiV stator sub·,.,...,..,bly ....................................... . 1 Kit items for LV 1tltor sub·m.embly ....................................... .

Tables

Table , , ,

Clean and Clve<tIaulKit itl'lTlS ............................................................... . OMI15S B<ade Kit ite<m .......................................... . ElM215S 8{ade Killtems .......................................... .

Trademark credits

VitO<'>" h a tr.demari< of DuPont Perlormanc~ Elastomers 1.1.C.

o Edwlrds Limited 2008. AU rithts res.erYPd. Edw.rds and the Edw~rds I0IO .r~ tr~rks of Edwards LlmitPd.

Page .,

. ........... .... 6 . ...... 1 ....... 8

.. ....... 9 . ..... 10 . .... 11

Page . ...... 2

............... ...........

(iiOWA"'O S

This pa ge 1\&5 ~ inl .. nllon.Uy left blank.

,

Pa~e II o Edwards limited 100II. illt rights '~ed. Edwards and 1M EOward' loao are trademark, of Edwards Limited.

~CWAF=lCS

1 Introduction

~ Insuuctiom applv to bolh the C~"" and ~ Kit and 1M Bade Kits. which .... supplied ~PI'''!e1V:

~ rKom~ tNt you UIoe.ll the 11_ In the Clean.nd Dvm'wIuI Kit, particul,rly.ll ~«mpono1>ts • ~)IOU ~e the ""mp. The items supplied in tM kit are listed In Table I. Thne Items are shown in FiilJl'e5 1 \07. InslnKllons for the use of the kit are III"en In Section 1.

Use it Blade Kit t~ wtth it Clean and OYMIaui Kit when you replace dw rot.ry JIUIl1Il tMcIes. You !!lUSt replace.1I the blade .ssembly itl!lTlS w'llh th<M supplied In tM ~oprIale Blade Kit. The iteml supplied In tho-!IlIde' Kits are listed In T.ble 2 for the E2M175S.nd In Table) for the E2M2~S. The$e Items Ire.t.own in fiB~rt'S 6.11d 1. InstrlJCtionslor the 1M of the 81ade Kits "" II;~n In Section 1.

IC (""'arch. Limite<! 2003. AU rial'lll ,~",e<I.

Edwards ind the Edwards logo are l.ademarki of Edwards limited.

::J ... -, o Q. C () ... -. o ::J

~OWAROS A166·9<J·840 I",,,, (

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2 -u OJ ..., 2.1 rt

Kit Parts

Parts in the Clean and Overhaul Kit

Table 1 • (Ie ..... nd Overhaul Kit Items

Sin (mmjlnd fntur .. (if applklble,

UlL.n,.tlon Descrlptloo Q ..... ntlty LI'fIIlh. diameter (x width)

,,~ luppl!.d o • In,ide dI,rnetet (X) • numiM'r of coils In /I !.prin.

In

'" OowtYHal , ",Inch BSP

'" Dowty HM • 'f. Inch asp

Siu Imm).nd f ... ture (If 'pplk.bte, '" OowtyHII , , Inch liSP

IIlust'lIllon Description Clwnlity 1.I'f\Ith. dIam~H Ix width)

,,~ wpplieod 0. IMI~ dI.,...l..-(X). nurnbe1- of colis," /I sprl". '" Oil H.l , .~.

'" on sell 1 Viton ..

, Piston r1nt , ". 0· ... , 0146·14 Viton .. '" 0·"", , '" " 0· ... , 0111 '" O·rln!! , 0210

". O-nna , 0181 '" 0·11,,& , 0211

" O·nng , em '" 0·11,,& ! 0216

'" O·rfng , 02J9

". Spilt pin , "'6 inch diameter. 1 loch 10l1i Stainless 51 ..... l

'" O·,lni , 0)]5

" Val~~d ,

'" O·rin!l , '><0

" "'ston I.ce , '" O·rin!I , "', ., Shlfl~alst_ , '" O·rfng , ~

53 Fell boIU," filtet , ". O·rl"R , 00S4·2~

" DowtyHIL , "I \rich lisP '00 Exhaust v,lv .. nAlobl"< , OMl~SonIy

" Ball.st "'11~ , ,., Exhaust ""Iv .. nAlobl"< , OM2~SonIy

n Dlstfibuto< Il'~ , '" "" """

, E2M175S only

" Dlaphl'ijm , '" LId~l

, E2M215S only

" LV elhauU ".IV\" rubb« , '" Knltflll"Sh p)lo.l"t , El"'l~S OIIly

., F~ter lINd p1J<tt , '" "'''''''''' """ , E2M1~SonIy

" llall.st psl<t1. , 10' "",,00'

, " &.1",",1 pillet , " val"" body II~el ,

'" Exhaust w.m1ne labl"l , .. Exhaust piket , <

" End pille Ilasket , " Body i_sloet ,

Pilge 2 o fdw.rOi limited lOOS . All rithu r~. Edw3lds and W Edwa,," 1"!iO /Ire trll~rl<s 01 Edw .. ds limitf'(! .

CI Edwards Limited 2008. All lights ,~. Etfw;I,ds and ~ Edwlfds toto ar .. lrNl"mlrks 01 EdwardS LImited.

Pa~ l

Al66·99·~ Iss.ue C ~OWAFIOS ;>:: -. ...,.

2.2 Parts in the Blade Kits -0 O! ..., T.bl" 2 · [210\1755 811de KIt Item • ...,. '" lI~tr.tlon

-"~ QUlnttty ,- -'''' no "' .... ,

m ~-,

'" OIIIURP~ ,

• T.bl. 1· [2M215S 81ade Kit item.

Ilh"tratlon Dfl(rlption QUlnttty Item .u~l~

no HV bl~de , m LV blade , no 011 pump bllde ,

Pa~. () [dward!; Limited lOOB. All rlshts ,~.

Edward!;...,;1 the Edward!; 109O .re uado!mIfb of Edw.rds Lknited.

() Edward!; limited lOOB. AU riilllS fe-!ol>tVed. Edward!; ,nd the [dw¥ds lotO Me tfademarks 01 Edward!; limited.

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O £dw;mh Umlttd 2008. AllliahU~. Edwatds arod U~ Edwards tOto ~re (fldemlfks 04 £dwlfds Umited.

~DWARDS

1 ~

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o Edward!; Limill!d 2008. All rlthlS rfVM!d. Pate 7 Edw.m:ts and tile Edwards toto If. I.adotmark< of £d'wa«1s llmitf'd.

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.....

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(I Edward!; limited lOOll. "U '!tills rHefYed. Edwlrcn and ~ Edwards 10t0.,~ trlclerNt'~. til [""'.rd> limited.

~CWARCS

Fltl.lr~ 5 . Kit It~"" for 011 distributor sub·~nmbly

CI Edward< limited 200II. All 'it'll' r~ed . . ... , (dw~rd1. and t~ Edwards Loto Ire Ir~rks of Edwards Um;(ed .

AlM·99·~ Issue C @CWA~CS @CWA~CS Al66·9'j·!40 Issue C

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Pa~ 10 " Edwards UmnN 21XlS. All riahts ~. (I Edwards lirnilN llXlS. All riihu ,~. P~ 1 1

EdwvdS MId [ tw Edwards 1090 Irf Uadem.ilrks of £dwJ'ds Umitfd. Edwards and the Ed'w .. ds logo Ife t~rks 01 Edwards limlled.

riiiOWARDS I

~ 3 How to use the Kits rt o c '" (!)

rt =r (!)

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'"

~~ awropri~t~, refer to tile pump Instruction manual for information about routlt>e ma;ntet\ill>C~ of tile pumps.

1. Di.connKI the rotary pump from the ~Iectrical supply and allow it to cool.

Z. Drain the oil from the rotary pump.

3. Olsm""tle the pump and, referring tn FiiUres 1 to 7 a. appropriate , repl",e tile cnmponents with lhose in the (lean and Overhaul Kit. Clean all expo.ed surfaces with a suitable cleanlnl! fluid .

4. I~t tile rotary pump blad~ as\l'lTlbl.y fO! sijos of wear. Ensure there Is less than 0.15 mm d~aranc~ hetween ~ach blade and its rotor >lot: if the d"aranc~ Is v"ater than 0.15 mm, you must replace tile bIlIdes if you wish to obtain good vacuum perfO!manc~. Seal the used blades In a pli".Itk ball and dlspo$e of the blades In accordanc~ with alltoul Ind rIiIUnnal safety and environ"""'tal r~lrernents.

5. Rl'iSSI'mbie the pump uslrlg tile awrDPriate new ~a'il<"ts supplied.

6. Fill the rotary pump 011 box with the correct 'lWmlty of rleW 011.

7. The (lean and Overhaul Kit contal .... an exh<o..st warning label (Item BII. II such a label Is not alreody litteci to the pump:

• Rl'mDV<' th~ backl"8 strip from the label.

Attach the label to the top of the oil box lid. dose to the "wust outlet: see figure 1.

8. Connect the elKtrical supply and switch on tile rotary pump:

Check the direction of rotation of thl' pump.

Check that the ollll'Vl'l in the sisht lIaS! on the pump end·plate laU. by 3 to 5 mm when you !tart the pump. If thl, does not haoppen, reter to tile pump Instruction man~1.

9. Open the!l'lS ballast valV<' and operate tile rotary pump for at lean 1 hour.

o Edward! Llmiteci ZOO8. All rights reoerveci. Edwards and the Edwards I~O are trademarh of Edward! Llmlteci.

~CWAI=?CS' Form HS1

Return of Edwards Equipment Procedure

INTRODUCTION Before returning your equipment, you must warn Edwards if substances you used (and produced) in the equipment can be hazardous. This information is fundamental to the safety of our Service Centre employees and will determine the procedures employed to service your equipment. Complete the Declaration (HS2) and send it to Edwards before you disratch the equipment. It is important to note that this declaration is for Edwards interna use only, and has no relationship to local, national or international transportation safety or environmental requirements. As the person offering the equipment for shipment, it is your responsibili ty to ensure compliance with applicable laws.

GUIDELINES Equipment is 'uncontaminated· if it has not been used, or if it has only been used with substances that are not hazardous. Your equipment is 'contaminated' if it has been used with any substances classified as hazardous under EU Directive 67/548/EEC (as amended) or QSHA Occupational Safety (29 CFR 1910). If your equipment has been used with radioactive substances, biological or infectious agents, mercury, polychlorinated biphenyls (PCB's) , dioxins or sodium azide, you must decontaminate it before you return It to Edwards. You must send independent proof of decontamination (for example a certificate of analysis) to Edwards with the Declaration (HS2) . Phone Edwards for advice. If your equipment is contaminated, you must either:

Remove all traces of contamination (to the satisfaction of laws governing the transportation of dangerous/hazardous substances). Qr, properly classify the hazard, mark, manifest and ship the equipment in accordance with applicable laws governing the shipment of hazardous materials.

Note: Some contaminated equipment may not be suitable (or airfreight.

PROCEDURE 1. Contact Edwards and obtain a Return Authorisation Number for your equipment. 2. Complete the Return of Edwards Equipment· Declaration (HS2). 3. If the equipment is contaminated, you must contact your transporter to ensure that you

property classify the hazard, mark, manifest and ship the equipment, in accordance with applicable laws governing the shipment of contaminated /hazardous materials. As the person offering the equipment for shipment, it is your responsibility to ensure compliance with applicable taw. Note: Equipment contaminated with some hazardous materials, such as semiconductor by-products, may not be suitable for airfreight - contact your transporter for advice.

4. Remove all traces of hazardous gases: pass an inert gas through the equipment and any accessories that will be returned to Edwards. Where pOSSible, drain all fluids and lubricants from the equipment and its accessories.

5. Seal up all of the equipment"s inlets and outlets (including those where accessories were attached) with blanking flanges or, for uncontaminated product, with heavy gauge tape.

6. Seal equipment in a thick polythene/polyethylene bag or sheet. 7. If the equipment is large, strap the equipment and its accessories to a wooden pallet. If

the equipment is too small to be strapped to a pallet, pack it in a suitable strong box. 8. E·mail via scan, fax or post a copy of the original with signature of the Declaration (HS2)

to Edwards. The Declaration must arrive before the equipment. 9. Give a copy of the Declaration (HS2) to the transporter. You must tell your transporter

if the equipment is contaminated.

10. Seal the original Declaration in a suitable envelope : attach the envelope securely to the outside of the equipment package, in a clear weatherproof bag. WRITE YOUR RETURN AUTHORISATION NUMBER CLEARLY ON THE OUTSIDE OF THE ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT PACKAGE.