TM-3000, Micrómetro Óptico 2D

2 DIMENSIONAL MULTI-POINT OUTER DIAMETER

Measurement Guide

2

Problems with Conventional Measuring Methods

It is generally understood that non-contact outer diameter measurement should be done with one-dimensional,

thrubeam type laser scan micrometers.

As product accuracy improves and the inspection standards become more rigorous and versatile, conventional methods

of measurement are becoming increasingly less able to perform the required inspections.

Moreover, laser scan type measurement raises concerns about accuracy related to target positioning and durability,

given that it uses motors and a laser.

Now KEYENCE proposes a non-contact, two-dimensional outer diameter measurement instrument which will satisfy

both of these needs.

Measuring the outer diameter of an inclined target

Measuring the outer diameter of a target with a rough surface

Measuring the outer diameter at multiple points at narrow intervals

• The target is fixed with a jig for measurement.

CONVENTIONAL METHOD

• It is difficult to distinguish whether the detected error was caused by theinclination or by the target itself.

P R O B L E M

• The target is fixed with a jig and the outer diameter is measured at one point.

CONVENTIONAL METHOD

• The measured value greatly varies depending on the measurement point due to surface roughness.

• If the stage is unstable, the accuracy decreases.

P R O B L E M

• The target is scanned while the target or sensor head is moved and the result iscalculated with an external device.

• The target position is changed and the outer diameter is measured at each point.Multiple heads are required.

CONVENTIONAL METHOD

• If the stage is unstable, the accuracy decreases and more time is required.

• When the target position is changed an error may occur depending on the position.

• Using multiple heads increases the cost.

P R O B L E M

3

Measuring the runout at multiple points of a rotating target

Measuring the outer diameter at a fi xed point

Measuring the height difference of a stepped target

Measuring the maximum/minimum outer diameter

20 mm

• The sensor head is moved to each point to perform discrete measurements.

CONVENTIONAL METHOD

• Simultaneous measurement is impossible.

• Some kind of movement mechanism is required.

• The time required can be expressed as:

Number of measurement points x Rotation time.

P R O B L E M

• The target is pressed against a hard stop for measurement.

• The target is scanned while the target or sensor head is moved and the movement iscontrolled with an external device.

CONVENTIONAL METHOD

• Error can occur due to mounting variations.

• The scanning requires time.

P R O B L E M


CONVENTIONAL METHOD

• If the stage is unstable, the accuracy decreases and more time is required.

• If the target inclines, the measured value becomes larger.

P R O B L E M


CONVENTIONAL METHOD

• If the stage inclines, the accuracy decreases and more time is required.

• The scanning requires some time.

P R O B L E M

4

Reflecting mirror

Semiconductorlaser

Polygon mirror

Light-receivingelement (for synchronization)

Transmitter

Collimator lens (FѲ lens)

Target

Light-receiving element

Edge detection

Receiver

Light receiving lens

Motor

A semiconductor laser beam is applied

onto a polygon mirror which is rotated

by a motor to scan the measuring range.

The time in which the laser beam is

interrupted by the target is measured to

obtain the dimension of the target.

Light-receiving element

Polygon mirror Motor

Mirror

Lens

Diffusion unit

telecentric receiving lens Light transmitting lens

Receiver TransmitterLEDCMOS

TargetLens

Mirror

PRINCIPLES OF THE CONVENTIONAL LASER SCAN TYPE

Structure

Principle

Structure Principle

Features of the 2D Micrometer TM-3000 Series

The optical system using a Green LED, and telecentric lenses apply uniform LED light onto the target.

This light projects an image on the 2D CMOS and the edges between the light and dark areas are detected to allow

measurement at multiple points. Moreover, the motor-less structure and longer life light source provide high durability.

5

FULL IMAGE MEASUREMENT

2D measurement captures all of

the target information at once. The

measurement is based on the 2D

silhouette image projected on the

CMOS. This allows measurement

at desired points or measurement

with position correction, which is

possible only by using 2D images.

The 2D method allows measurement of the

entire range in one instant.

Since no scanning laser is used, a

specified point can be measured exactly.

No motorized mechanism

A system with no moving parts provides

higher durability. This eliminates the

problem of motor durability which has

been a disadvantage of laser scan type

micrometers.

Ultra long life LED

The GaN (Gallium Nitride) LED used as a

light source has achieved high reliability

without being affected by light source

deterioration due to electrical noise.

With the laser scan type, the measurement

point is only one dimensional. It is impossible

to measure multiple points simultaneously or to

correct target inclination.

The path of the laser scan varies with every

sampling due to the surface accuracy of the

polygon mirror. The laser scan type is also

affected by inconsistent motor rotation which

increases over time. The longer the instrument

is used, the greater the inconsistency of the

laser scan path becomes.

TM-3000 Series CONVENTIONAL LASER SCAN TYPE

CONVENTIONAL LASER SCAN TYPE


TM-3000 Series

TM-3000 Series

Polygon mirror

Reflecting mirror

Light transmitting lens

LED

Lens

Diffusion unit

Mirror

Scanning direction

The driving mechanism decreases durability and

requires maintenance. There is also a concern

about laser deterioration due to electrical noise.

Only one point can be measured.

■ Enlarged view of the transmitter of the TM 3000 Series

■ Enlarged view of the transmitter of the laser scan type

CAMERA METHOD WITHOUT A SCANNING LASER

HIGH DURABILITY

6

1Measuring the outer diameter

of an inclined target


at a fixed point


of a target with a rough surface

6Measuring the height difference

of a stepped target


at multiple points with

narrow intervals

7Measuring the maximum,

minimum and outer diameter

4Measuring the eccentricity at

multiple points of a rotating target

TILT DISTANCE

ROUGHNESS STEP

NARROW MAX

ECCENTRICITY

Measurement screenMeasuring the outer diameter of a stepped shaft

➔ See page 7. ➔ See page 9.



➔ See page 8.

2D Applications for Multi-Point Measurement

The TM-3000 Series provides a wide measuring range indicated by the dimensions shown in the left figure below.

When a target is placed in this range, its silhouette can be obtained as shown in the right figure below. Specify a

desired point on the silhouette to obtain the measured value of the point.

7

Measuring the outer diameter of an inclined target

Measuring the outer diameter of a target with a rough surface

Θ

Since the TM-3000 Series measures outer diameter based

on a 2D image, and can provide information on the target

inclination. Based on this information, it can measure outer

diameters while correcting the inclination automatically.

An area is defined based on the captured image.

Calculating the average of the diameters within the area

minimizes the error caused by surface roughness during

measurement.

If the target inclines, the scanned diameter becomes larger

(The gray curve in the graph on the right), resulting in improper

measured values.

When a target with a rough surface was measured, the measured

value fluctuated depending on the measurement position, resulting

in greater error.

9.950

10.000

10.050

10.100

10.150

10.200

10.250

10.300

0 5 10 15 20

Inclination angle [°]

Me

asu

red

va

lue

[m

m]

Laser scan type

TM-040

Copy roller scan data

0 2 4 6 8 10

Moving distance [mm]

Me

asu

red

va

lue

[5

μm

/div

]

Laser scan type

TM-040 (average of 100 lines)

TILT

ROUGHNESS

1

2

(Actual application example)

Measuring the outer diameter of a catheter

(Actual application example)

Measuring the outer diameter of a copy roller



TM-3000 Series

TM-3000 Series

8

Measuring the outer diameter at multiple points at narrow intervals

Measuring the eccentricity at multiple points of a rotating target

You can obtain measured values by just specifying an

area around the target section on the captured image.

Unlike conventional micrometers, the measurement can be

completed without the troublesome process of changing

the target position or preparing a moving mechanism.

Just selecting measurement points from the captured data

allows measurement. The measurement of the deviation

at multiple points can be perfectly synchronized and

conducted at once, resulting in significant reduction of

cycle time.

The only way to measure outer diameters at narrow intervals was

either by 1) changing the target position or 2) scanning the target.

Measurement took more time and effort, and incurred more costs

due to jig maintenance

The time required for the measuring of multiple points was

expressed as: Number of measurement points x Rotation time,

and also required time to move to the measurement points.

Consequently, a 100% inspection was impossible.

0.035 sec./target

CycleTime

TM-3000 When laser scan type is used with a linear slide

2.0 sec./target

Three-point measurement of eccentricity

Cycle Time

TM-3000

Laser scantype

Measurement point 1

Measurement point 2

Measurement point 3

Movementtime

Movementtime

NARROW

ECCENTRICITY

3

4

(Actual application example) Measuring the outer diameter of an injection needle

(Actual application example) Measuring the eccentricity at multiple points of a solenoid valve



TM-3000 Series

TM-3000 Series

Narrow intervals

9

Measuring the outer diameter at a fi xed point

Measuring the height difference of a stepped target

The position correction function allows outer diameter

measurement at a fixed distance from a specified point.

Correcting the position displacement or inclination of the

target enables quality evaluation on an actual production line.

Effects of inclination can be corrected during measurement

when calculating from 2D data. Both height difference and

outer diameter can be measured with one sampling, allowing

inline measurement.

Conventional micrometers required the preparation of a special jig

which aligns the target for measurement. Accurate measurement

was difficult because the measured value varied every time due to

position variation.

After the reference point was measured, the target was moved to

measure the point of different height. The system required a moving

mechanism which caused problems such as accuracy issues

and higher cost. In addition, accurate measurement was difficult

because the resultant value became larger when the target inclined.

PLC’s internal calculation using the result obtained with a laser scan type

Cycle Time

Measu

red v

alu

e [0

.1 m

m/d

iv]

Data including fluctuation caused by stage instability

Error introduced by inclination

Height difference to be measured

2.0 sec.

+

Error introduced by inclination

DISTANCE

STEP

5

6

(Actual application example) Measuring the outer diameter of a drill bit

Reference

(Actual application example) Measuring the height difference/outer diameter of an injector



TM-3000 Series

TM-3000 Series

Measurement result for a shaft of 10 mm diameter

Measurement 1 Measurement 2 Measurement 3 Measurement 4

TM-3000Series

10.001 9.999 10.001 10.002

Laser scan type

10.004 10.004 10.008 10.120

Error introduced by the target position

Measurement 5 Measurement 6 Measurement 7 Measurement 8

TM-3000Series

10.002 9.998 10.001 10.002

Laser scan type

10.003 10.002 10.006 10.002

10

Measurement is conducted at once using the entire image,

and the maximum diameter can be determined from the

result. Since the maximum value can be specified from

the entire image, measurement is not affected by errors

resulting from the use of a jig.

The conventional micrometers scanned the target and then

determined the maximum diameter from the scanned data.

The measurement took more time, or was not accurate due to the

influence of the accuracy of the jig.

MAX

7

PLC’s internal calculation using the result obtained with a laser scan type

Cycle TimeM

easu

red v

alu

e [2 m

m/d

iv]

Maximum value

Data including errors introduced by the inclination of the stage

2.0 sec.CONVENTIONAL LASER SCAN TYPE

TM-3000 Series(Actual application example)

Measuring the outer diameter of an ampule

Measuring the maximum/minimum outer diameter

APPL ICATION

Simultaneousmonitoring of theroller and film can beperformed, which willavoid deflectioncaused by vibrationas well as generateno accidental errorcaused byinstallation.

Evaluation can beperformed withoutremoving samplesfrom the testingmachine since thedeformation volumecan be monitoredwith force applied.

The sensor canmeasure theworkpiece whilecorrecting tilt. Inaddition, the sensorhas deep depth offocus and widemeasurement range,allowing stablemeasurement.

Multi-pointmeasurement of outerdimension can beperformed withoutscanning, which canboth improve accuracyand reduce takt.

Thickness measurement of film Measurement of ingot width and notch

Measurement of deformation volume in material on tension testing machine Dimension measurement of engine bulb

11

Fully compatible

65 mm

2.65"

30 mm

1.18"

High accuracy with wide measurement range

Measuring range

Smallest detectable object

Measurement accuracy

Repeatability

0.3 to 30 mm 0.01" to 1.18"

0.3 mm 0.01"

±2 μm ±0.08 Mil

±0.15 μm ±0.006 Mil

LS-7070M (with monitor function)

LS-7070 (without monitor function)

LS-7030M (with monitor function)


Measuring range



Repeatability

0.5 to 65 mm 0.02" to 2.56"

0.5 mm 0.02"

±3 μm ±0.12 Mil

±0.2 μm ±0.008 Mil

Large-diameter type

Fully compatibleStandard type

Fully compatibleSmall diameter type

Standard type achieving both high speed and high accuracy

The measuring head and controller can be connected in

any combination regardless of the measuring range or

serial number. Reliable operation can be continued even

during maintenance, or when the specifications are

changed abruptly.

6 mm 0.24"LS-7010M (with monitor function)


Measuring range



Repeatability

0.04 to 6 mm 0.002" to 0.24"

0.04 mm 0.002"

±0.5 μm ±0.02 Mil

±0.06 μm ±0.002 Mil

Further high accuracy for measuring tiny targets

Digital switch type controller also available

LS-7001

LS-7601

High-performance controller

Fully compatible

PRODUCT L INEUP

Large-diameter type TM-065

Measuring range ø65 mm ø2.56"

Smallest detectable object 0.5 mm 0.02"

Measurement accuracy ±3 μm 0.12 Mil

Repeatability ±0.2 μm 0.007 Mil

Standard type TM-040



Measurement accuracy ±2 μm 0.08 Mil


High-precision type TM-006



Measurement accuracy ±0.5 μm 0.02 Mil


TM-3001

CA-MP81

High-speed, high-accuracy CCD Micrometer LS-7000 Series

2D Micrometer TM-3000 Series

Measuring head

Controller

Controller

Monitor

Sensor head

KA1-1091

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Copyright (c) 2011 KEYENCE CORPORATION. All rights reserved. TMReason-KA-TG-E 1111-1 611605 Printed in Japan

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SAFETY INFORMATIONPlease read the instruction manual carefully in

order to safely operate any KEYENCE product.

The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice.

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T O C O N TA C T Y O U R L O C A L O F F I C E

* 6 1 1 6 0 5 *

LASER DISPLACEMENT LK-G5000 Series

Vibration test ofhigh-temperature-muffler

Thickness measurement/loop control of a rubber sheet

❙ Sampling rate of 392 kHz

❙ Linearity of ± 0.02% of F.S.

❙ Repeatability down to 0.01 µm 0.0004 Mil

LASER DISPLACEMENT (2D) LJ-G Series

Checking the assembly accuracy of an auto body

❙ High-accuracy of ± 0.1% of F.S.

❙ High-speed sampling

❙ Simultaneous measurement/ judgement at 8 points

CONFOCAL DISPLACEMENT LT Series

Measuring the profile of solder paste on a PWB

❙ Surface scanning method for a variety of highaccuracy measurements

❙ Multiple measurement modes

❙ 0.3 µm 0.01 Mil resolution

SPECTRAL INTERFERENCE SI Series

OPTICAL MEASUREMENT SYSTEM IM Series

Spectrum unit

Controller

SI-F1000VThickness

measurement type

SI-F80

Long distance type

SI-F10Micro-head type

SI-F01

1nmBest in its Class

Resolution

0.00004 Mil

Measuring roller run out withhigh accuracy

Measuring the thickness ofglass discs

❙ Sub-Pixel Measurement Accuracy

❙ Instantaneous Batch Measurements at 99 Points

❙ NO Positioning Necessary

❙ Pattern Registration & Search

❙ Measures in Seconds

❙ Built-In GD&T Tools

The IM Series is a one step solution to conventional quality control

inspection problems. With the press of a button, KEYENCE’s patented

pattern analysis tools provide traceable 2D analysis of any part placed

on the measurement stage. With an industry leading 100 nm resolution,

the IM Series provides unprecedented solid state measurement in a low

cost, green, and space saving package.

Cylindrical lens Semiconductor laser

2D Ernostar lens

E3-CMOS

OK OK NG

OK/NG judgments based on the tolerance

User-friendly basic measurement menu

TM-3000, Micrómetro Óptico 2D

Technology

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