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Background Statement for SEMI Draft Document 4327FRevision to SEMI S17-0701: SAFETY GUIDELINE FOR UNMANNED TRANSPORT VEHICLE (UTV) SYSTEMNote: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background Statement

This is a technical ballot as Doc. #4327F.

Doc. #4327E was balloted to update S17-0701 and failed at the Japan EHS Committee on September 2010. The TF has worked on the document to improve the criteria and definitions and to address the negatives and comments received during the previous ballot. As a result, some sections are added and some section titles are updated in this ballot document.

The voting results of Doc. #4327F will be reviewed by the S17 Revision Task Force on November 22 at SEMI Japan, Tokyo, and will be adjudicated at the Japan EHS Committee meeting to be held on December 3, 2010 at Makuhari Messe, Chiba, Japan during SEMICON Japan 2010.

If you have any questions, please contact the S17 revision Task Force co-leaders as shown below:

Shigehito Ibuka (Task Force co-leader), [email protected], orNorio Nakashima (Task Force co-leader), [email protected] .

or

Akiko Yamamoto, SEMI Japan staff at [email protected].

mailto:[email protected]

mailto:

Safety Checklist for SEMI Draft Document #4327FRevision to SEMI S17-0701: SAFETY GUIDELINE FOR UNMANNED TRANSPORT VEHICLE (UTV) SYSTEMDeveloping/Revising BodyName/Type: S17 Revision Task ForceTechnical Committee: EHSRegion: Japan

LeadershipPosition Last First AffiliationLeader Ibuka Shigehito TELLeader Nakashima Norio MuratecAuthor/Editor* Crawford Moray Hatsuta SeisakushoChecklist Author** Only necessary if different from leaders

Documents, Conflicts, and ConsiderationSafety related codes, standards, and practices used in developing the safety guideline, and the manner in which each item was considered by the technical committee# and Title Manner of ConsiderationSEMI S1 — Safety Guideline for Equipment Safety Labels

Referenced as guideline for hazard indication.

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

Referenced as guideline for safety design considerations for SemiconductorManufacturing Equipment.

SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

Used as an example of guidance for conformance to Ergonomics and HumanFactors.

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

Referenced as guideline for Risk Assessment.

SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment

Used as an example of guidance for manual.

SEMI S22 ― Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

Referenced as guideline for visual indicating devices.

SEMI S26 — Environmental, Health, and Safety Guideline for FPD Manufacturing System

Referenced as guideline for safety design considerations for FPDManufacturing System.

ANSI/RIA/ISO 10218-1 — Robots for Industrial Environment – Safety Requirements Part 1 – Robot

Referenced as a standards of requirements for the robotic manipulator.

ANSI/RIA R15.06 — Industrial Robots and Robot Systems – Safety Requirements


ANSI/ISA SP 84.01―Application of Safety Instrumented Systems for the Process Industry

Used as an example of recognized standards for Fail-to-safe equipment control system (FECS).

ISO 10218-1 — Robots for Industrial Environments – Safety requirements - Part 1: Robot


ISO 13857 — Safety of machinery – Safety distances to prevent hazard zones being reached by upper and lower limbs

Referenced as a standard for guards.

ISO 13849-1 — Safety of machinery – Safety-related parts of control systems – Part 1 General principles for design

Used as an example of recognized standards for Fail-to-safe equipment control system (FECS).

ISO 14119 — Safety of machinery – Interlocking devices associated with guards - Principles for design and selection

Cited for door interlock design of guards.

ISO 14120 — Safety of machinery – Guards - General requirements for the design and construction of fixed and movable guards

Referenced as a standard for guards.

IEC 60204-1 — Safety of machinery – Electrical equipment of machines - Part 1: General requirements

Referenced as a standard to consider subcriteria of emergency operation and manual operation.

IEC 61508 series — Functional safety of electrical/electronics/programmable electronic safety-related systems

Referenced as a guideline for safety PLC.

IEC 61310-1 — Indication, marking and actuation-Part 1: Requirements for visual, auditory and tactile signals

Referenced as guideline for acoustic indicating device.

FEMA (Federal Emergency Management Agency) 450 — NEHRP (National Earthquake Hazards Reduction Program) recommended provision for seismic regulations for new buildings and other structures (FEMA 450) 2003 edition

Referenced as a guideline for seismic protection.

Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices cited in the safety guideline# and Title Inconsistency with This Safety Guideline

Other conflicts with known codes, standards, and practices or with commonly accepted safety and health principles to the extent practical# and Title Nature of Conflict with This Safety Guideline

Participants and ContributorsLast First AffiliationIbuka Shigehito Tokyo ElectronNakashima Norio Muratec AutomationIzumi Takanori Muratec AutomationYamamoto Makoto Muratec AutomationNojima Takao IntelOyama Koichi Hokuyo AutomaticSato Eiji RorzeSekiguchi Yuichi TUV SUD JapanNakatani Eiji SOKUDOAjimine Tetsuo DaifukuInoue Masaya OmronMatsumoto Hiroyuki Hitachi Plant TechnologySugita Yoshihiro TUV Rhineland Japan Aihara Hisashi TakenakaNagesh Rao Safe TechnoKishida Shouhei Hokuyo AutomaticNishiguchi Naokatsu Dainippon Screen ManufacturingMurata Masanao Muratec AutomationFujino Koichi UlvacCrane Lauren Applied MaterialsFunk Rowland SalusHom Jeffrey ULQuizon George ULRehder Alan ULSklar Eric Safety GuruMashiro Supika Tokyo ElectronKryska Paul NovellusCrawford Moray Hatsuta SeisakushoVargas-Bernal Rafael Instituto Tecnologico Superior IrapuatoKawaguchi Masaaki DaifukuImaeda Yukihiro Murata MachineryLarsen Sean Cymer

The content requirements of this checklist are documented in Section 14.2 of the Regulations Governing SEMI Standards Committees.

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Informational (Blue) Ballot1000ASEMI Draft Document #4327FRevision to SEMI S17-0701: SAFETY GUIDELINE FOR UNMANNED TRANSPORT VEHICLE (UTV) SYSTEM

1 Purpose1.1 This safety guideline is intended as a set of safety considerations for unmanned transport vehicle (UTV) system. UTV system is used to automate the movement of material within semiconductor or flat panel display (FPD) factories or laboratories. UTV system includes both floor traveling vehicle (FTV) system and overhead traveling vehicle (OTV) system.

2 Scope2.1 This safety guideline applies to UTV and UTV system used in semiconductor or FPD manufacturing.

2.2 This safety guideline addresses both floor traveling and overhead traveling UTV and UTV system. FTV system includes automated guided vehicle (AGV) system and rail guided vehicle (RGV) system. OTV system includes overhead shuttle (OHS) system and overhead hoist transport (OHT) system.

2.3 Evaluations for conformance to this document should be conducted on all UTV and UTV system including separate items such as rails, control panels, power panels, lifter of OHT or OHS from maintenance/service space, and any other type of equipment necessary for operation, maintenance or service of the UTVs.

2.4 This document contains the following sections:

Purpose

Scope

Limitations

Referenced Standards and Documents

Terminology

General Provisions

Manuals

Building Interface

Ergonomics and Human Factors

Seismic Protection

Design for Injury Prevention in UTV System Hazard Zone

Collision Protection

Emergency Operation

Manual Operation

Maintenance and Service

Interface to Automated Material Handler of Semiconductor or FPD Manufacturing Equipment

Protection from Load held by UTV

Hazard Indication

Hazardous Materials

Related Documents

This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Page 1 Doc. 4327E SEMI

Semiconductor Equipment and Materials International3081 Zanker RoadSan Jose, CA 95134-2127Phone:408.943.6900 Fax: 408.943.7943

DRAFTDocument Number: 4327E

Date: 5/6/2023

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Informational (Blue) Ballot1000ANOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

3 Limitations3.1 This safety guideline may have limited application to UTV and UTV system without on-board power (direct or induced) such as primary-grounded linear-motor-driven OHS and OHS system. Determinations of applicability should be made by section when evaluating such UTV or UTV system.

3.2 This safety guideline does not address material transportation, handling mechanisms, or AMHS included as part of semiconductor manufacturing equipment (SME) or FPD Manufacturing System (FPDMS). These types of mechanisms or AMHS should be evaluated as part of the manufacturing equipment or manufacturing system per SEMI S2 or SEMI S26.

3.3 Person Guided Vehicle (PGV) is not a UTV, therefore, PGV is not addressed by this safety guideline.

3.4 This safety guideline does not supersede international, national or local codes, regulations and laws, which may impose separate requirements for assessing the safety of installations.

4 Referenced Standards and Documents4.1 SEMI Standards

SEMI E15.1 — Specification for 300 mm Tool Load Port

SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface

SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface

SEMI S1 — Safety Guideline for Equipment Safety Labels

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

SEMI S13 — Environmental, Health and Safety Guideline for Documents provided to the Equipment User for Use with Semiconductor Manufacturing Equipment

SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

SEMI S26 — Environmental, Health, and Safety Guideline for FPD Manufacturing System

4.2 ANSI Standards1

ANSI/RIA/ISO 10218-1 — Robots for Industrial Environment – Safety Requirements Part 1 – Robot

ANSI/RIA R15.06 — Industrial Robots and Robot Systems – Safety Requirements

ANSI/ISA SP 84.01 ― Application of Safety Instrumented Systems for the Process Industry

4.3 ISO Standards2

ISO 10218-1 — Robots for Industrial Environments – Safety requirements - Part 1: Robot

ISO 13857 — Safety of machinery – Safety distances to prevent hazard zones being reached by upper and lower limbs

ISO 13849-1 — Safety of machinery – Safety-related parts of control systems – Part 1 General principles for design

1 American National Standards Institute, Headquarters: 1819 L Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020; Fax: 202.293.9287. New York Office: 11 West 42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900; Fax: 212.398.0023; http://www.ansi.org2 International Organization for Standardization, ISO Central Secretariat, 1 rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30; http://www.iso.ch





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http://www.ansi.org/

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Informational (Blue) Ballot1000AISO 14119 — Safety of machinery – Interlocking devices associated with guards - Principles for design and selectionISO 14120 — Safety of machinery – Guards - General requirements for the design and construction of fixed and movable guards

4.4 IEC Standards3

IEC 60204-1 — Safety of machinery – Electrical equipment of machines - Part 1: General requirementsIEC 61310-1 — Indication, marking and actuation-Part 1: Requirements for visual, auditory and tactile signals

IEC 61508 series — Functional safety of electrical/electronics/programmable electronic safety-related systems

4.5 BSSC (Building Seismic Safety Council)4

FEMA (Federal Emergency Management Agency) 450 — NEHRP (National Earthquake Hazards Reduction Program) recommended provision for seismic regulations for new buildings and other structures (FEMA 450) 2003 edition

5 Terminology5.1 Abbreviations and Acronyms

5.1.1 AGV — Automated Guided Vehicle

5.1.2 AMHS— Automated Material Handling System

5.1.3 EMO — Emergency Off

5.1.4 E-Stop — Emergency Stop

5.1.5 FPD — Flat Panel Display

5.1.6 FECS — Fail-to-safe Equipment Control System

5.1.7 FPDME — FPD Manufacturing Equipment

5.1.8 FPDMS — FPD Manufacturing System

5.1.9 FTV — Floor Traveling Vehicle

5.1.10 HEI — Hazardous Energy Isolation

5.1.11 OHB — Overhead Buffer

5.1.12 OHS — Overhead Shuttle

5.1.13 OHT — Overhead Hoist Transport

5.1.14 OTV — Overhead Traveling Vehicle

5.1.15 PGV — Person Guided Vehicle

5.1.16 RGV — Rail Guided Vehicle

5.1.17 SME — Semiconductor Manufacturing Equipment

5.1.18 UTV — Unmanned Transport Vehicle

5.2 Definitions

5.2.1 automated operation — system operation under full pre-programmed control of a computer controller.

5.2.2 automated guided vehicle (AGV) — a vehicle guided by something other than rail, but traveling on the floor.

3 International Electrotechnical Commission, 3 rue de Varembé, Case Postale 131, CH-1211 Geneva 20, Switzerland. Telephone: 41.22.919.02.11; Fax: 41.22.919.03.00; http://www.iec.ch4 Building Seismic Safety Council, 1090 Vermont, Avenue, N.W., Suite 700, Washington, D.C. 20005; phone 202-289-7800; fax 202-289-1092; e-mail [email protected]





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Informational (Blue) Ballot1000A5.2.3 automated material handling system (AMHS) — system that moves load automatically by means of a robot, a vehicle, or a conveyor, etc., without being touched by someone’s hand.

5.2.4 Emergency Off (EMO) — function to place the UTV system into a safe shutdown condition without generating any additional hazard to personnel or the facility when an EMO actuator (e.g., button) is activated.

5.2.5 Emergency-stop (E-stop) — function to place all moving parts of a UTV or the part of the UTV system on which the E-stop actuator located into a safe stop condition without generating any additional hazard to personnel or the facility when an E-stop actuator (e.g., button) is activated.

5.2.6 Fail-to-safe equipment control system (FECS) — a safety-related programmable system of control circuits designed and implemented for safety functions in accordance with recognized standards such as ISO 13849-1 or IEC 61508, ANSI/ISA SP 84.01. These systems [e.g., safety Programmable Logic Controller (PLC), safety-related Input and Output (I/O) modules] diagnose internal and external faults and react upon detected faults in a controlled manner in order to bring the equipment to a safe state. [SEMI S2]

5.2.7 fault-tolerant — designed so that a reasonably foreseeable single point failure does not result in an unsafe condition. [SEMI S2]

5.2.8 floor traveling vehicle (FTV) — AGV or RGV.

5.2.9 FPD manufacturing system (FPDMS) — system used to manufacture, assemble, or test FPD products. The FPDMS is constructed by integration of equipment that processes substrates (e.g., glass substrates, reticules), its component parts and its auxiliary, support, or peripheral equipment (e.g., chemical controllers, chemical distribution systems, vacuum pumps) and AMHS. Each piece of equipment or AMHS is the subsystem of the FPDMS. FPDMS also includes other items (e.g., structures, piping, ductwork, effluent/exhaust treatment systems, valve manifold boxes, filtration, and heaters) specific to the aforementioned system, but may not include such an item if the item is part of a facility and can support more than one piece of FPD manufacturing system [SEMI S26].

5.2.10 guard — physical barrier designed to provide protection.

5.2.11 hazard zone — the space inside the UTV operating space where there is a risk of injury to personnel.

5.2.12 hoist — the assembly in an OHT that performs loading/unloading operation by transferring a load.

5.2.13 lifting device — a mechanical or electro-mechanical structure that is provided for the purpose of raising and lowering a UTV during maintenance or service tasks.

5.2.14 load — load is the object to be transported by a UTV system. Load includes a carrier (cassette, box, pod, etc.) and its contents.

5.2.15 loading/unloading operation — the action necessary to move a load to and from a UTV system. This operation may involve hoisting, manual, or robotic manipulation to transfer loads between a UTV system and SME or between a UTV system and FPDME (such as process equipment or stockers).

5.2.16 manual operation — any control outside of automated operation.

5.2.17 manufacturing equipment — machinery, associated electrical equipment, apparatus, process modules or devices used to manufacture, measure, assemble and test semiconductor or FPD products but not including any product (e.g., substrates, semiconductors) or UTV system.

5.2.18 overhead buffer (OHB) — hanging shelf for placing FOUP temporarily under or on same height of OTV hanging from the ceiling

5.2.19 overhead hoist transport (OHT) — a vehicle that travels overhead on a rail (or rails) and does have a hoist.

5.2.20 overhead shuttle (OHS) — a vehicle that travels overhead on a rail (or rails) and does not have a hoist.

5.2.21 overhead traveling vehicle (OTV) — OHS or OHT, a vehicle that travels overhead, and may or may not have a hoist.

5.2.22 rail guided vehicle (RGV) — a vehicle guided by a rail (or rails) on the floor.





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Informational (Blue) Ballot1000A5.2.23 station — the destination point where a UTV is programmed to stop for loading/unloading operation (also known as a control point).

5.2.24 travel — the automated motion of a UTV along a rail or programmed path from one station to another station. Travel does not include loading/unloading operation.

5.2.25 unmanned transport vehicle (UTV) — a vehicle used to automate the movement of production material within semiconductor or FPD factories. There are two types of UTVs; FTV and OTV.

5.2.26 user — party that acquires UTV system for the purpose of using it to manufacture semiconductors or FPDs.

5.2.27 UTV system — consists of UTV, and equipment and fixtures for driving and controlling UTV such as controller, guided rail, guards, etc.

6 General Provisions6.1 This safety guideline provides the minimum safety considerations for design, construction and evaluation specific to UTV systems.

NOTE 1: It is recommended to refer to other SEMI safety guidelines for safety considerations on design and construction that are not covered in this guideline.

6.2 The UTV system supplier should reduce the risk to an acceptable level.

6.2.1 Risk assessment should be performed to identify and evaluate hazards, and appropriate protective measures should be applied to reduce the risk. Risk assessment should be initiated early in the design phase, and updated as the design matures.

NOTE 2: Refer to SEMI S2 Safety Philosophy section for information on protective measures.

NOTE 3: Refer to SEMI S10 for risk assessment.

6.3 Evaluation — Conformance to SEMI S17 of all UTV and UTV system should be technically evaluated in accordance with the criteria of §7 through §19 of this safety guideline .

7 Manuals7.1 The UTV system supplier should provide the user with manuals based on the originally intended use of the UTV and UTV system. The manuals should describe the scope and normal use of the UTV and UTV system, and provide information to enable safe operation, maintenance, and service of the UTV and UTV system.

7.2 The manuals should conform to SEMI S13.

8 Building Interface8.1 UTV System Interface to the Building Component — When a UTV system is required to interface with building components (e.g., doors, elevators, fire walls), the UTV supplier should provide the user with written specifications for the interface.

8.2 The FTV operating space should not overlap an evacuation route.

9 Ergonomics and Human Factors9.1 General — Ergonomics and human factors design principles should be incorporated into the development of UTV system to identify and eliminate or mitigate ergonomic hazards and human factors-related hazards.

9.2 Provisions for Conformance — The UTV system should be assessed to the guidelines set forth in SEMI S8. The Supplier Ergonomic Success Criteria (SESC; see SEMI S8), or the equivalent, should be used to document the assessment.

10 Seismic ProtectionNOTE 4: Users have facilities in regions that are susceptible to seismic activity. The user may require more stringent design criteria because of increased site vulnerability (e.g., local soil conditions, building design and installation floor level





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Informational (Blue) Ballot1000Asuch as in multi-fabrication-floor facility may produce significantly higher accelerations) and local regulatory requirements. Certified drawings and calculations may be required in some jurisdictions.

10.1 General — The UTV system should be designed to control the risk of personnel injury, damaging adjacent manufacturing equipment, damaging components of the UTV system, and facility damage due to movement, overturning, or fall of components of the UTV system during a seismic event. The criteria of this section are intended to accomplish two things:

(1) allow UTV system suppliers to design the internal frame and components to withstand seismic forces properly at the development and/or design stage of their products and systems even when the site and facility where they are installed are not yet specified; and

(2) allow UTV system designers to provide users with the information needed to appropriately secure the UTV system within their facility.

10.1.1 Because preventing all damage to the UTV system may be impractical, the design should be made to control the failure and displacement of components that may result in incident that can cause any harm that is ranked catastrophic or severe in the severity group of SEMI S10.

10.2 Design Seismic Loads — The components of UTV system and all devices used for anchoring the UTV system should be designed as described by 10.2.1 or 10.2.2. If 10.2.1 and 10.2.2 are not applicable due to the actual installation or structural configuration of the UTV system, 10.2.3 should be followed.

10.2.1 For the UTV system supported by the structure of the floor halfway between grade elevation and roof elevation, each component of the system should be designed to withstand a horizontal seismic load of 100% of the weight of the component and a vertical seismic load of ±50% of the weight of the component, both acting at the component’s center of mass. The seismic design should be done to include both cases when the UTV is empty and when the UTV is fully loaded.

10.2.2 For the UTV system supported directly by the roof structure or indirectly through secondary frames, each component of the system should be designed to withstand a horizontal seismic load of 150% of the weight of the component and a vertical seismic load of ±75% of the weight of the component, both acting at the component’s center of mass. The seismic design should be done to include both cases when the UTV is empty and when the UTV is fully loaded.

10.2.3 UTV system suppliers should follow Appendix 1 and determine proper seismic loads. The factors of the Equation 6.2-1 in Appendix 1 can be changed based on the actual structural configuration of the UTV system.

10.2.4 UTV system suppliers should design structurally the components of UTV system and all devices by seismic force analysis and determine seismic measures.

NOTE 5: Horizontal seismic loads should be calculated independently on each of the X-axis and Y-axis, or on the axis that produces the largest loads on the anchorage points.

NOTE 6: It is not the intent of this document to show a complete guide of the seismic protection design or calculations. The seismic protection systems and methods vary from country to country: USA, Taiwan and Japan, etc. As practical guidebooks, there are FEMA 451, Seismic Design and Construction Guideline for Building Equipment published by the Building Center of Japan (available in Japanese language only) and FM Global Property Loss Prevention Data Sheets 1-2 Earthquakes.

NOTE 7: Because the UTV system may be placed into service anywhere in the world, it is recommended that the seismic protection design of the UTV system be based upon requirements that allow the UTV system, as designed, to be installed in most sites worldwide. The above horizontal seismic loads are based on requirements for General Manufacturing and Process Machinery in Seismic Zone (Ss=200%, Fa=1.0) in NEHRP Recommended Provisions for Seismic Regulations for New Buildings and Other Structures (FEMA 450). The building structure is assumed to be single-fabrication-floor facility as major and typical. The vertical seismic loads conform to the seismic design code for buildings in Taiwan for general sites and Taipei Basin and also to the Seismic Design and Construction Guideline for Building Equipment of Japan. They are assumed to satisfy most design situations worldwide.

NOTE 8: It is recommended that the user engage a professional mechanical, civil, or structural engineer to make sure the conditions above are appropriate for the planning site and facility.

NOTE 9: For near-fault sites in Taiwan, the local code, if any, requires the vertical seismic load should be 2/3 of horizontal seismic load.





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Informational (Blue) Ballot1000ANOTE 10: The horizontal seismic loads above are equivalent to those of important grade (seismic resistant class A) in the guideline of BCJ (Building Center of Japan). In the guideline, seismic resistant grade is classified to three categories: highly important grade (seismic resistant class S), important grade (seismic resistant class A), and ordinary grade (seismic resistant class B).

10.3 The supplier should provide the following data and procedures to the user. This information should be included in the installation instructions.

A drawing of the UTV system, its support equipment, and its connections.

The locations of the tie-ins, attachments, and anchorage points identified.

The type of feet or other anchorage points to the facility used and their locations on a base frame plan drawing.

The weight distribution on each foot or each anchorage point.

Physical dimensions, including width, length, and height of each structurally independent component.

Weight and location of the center of mass for each structurally independent component.

Acceptable locations on the component for anchorage.

NOTE 11: It is not the intent of this document that the UTV system supplier provides the attachment point hardware. Such hardware may be provided as agreed upon between the supplier and the user.

NOTE 12: It is the responsibility of the user to verify that the leveling, seismic reinforcing, and load distribution are adequate.

11 Design for Injury Prevention in UTV System Hazard Zone 11.1 The UTV system should be designed with safety measures so that personnel can not enter the hazard zone of the UTV system when the UTV are automatically operating.

11.1.1 The lowest part of OTV (underside edge when loaded) should be at least 2500 mm above the walkway floor level.

NOTE 13: Minimum clearance is equivalent to the value found in ISO 13857.

EXCEPTION ：When the risk assessment result shows the risk is an acceptable level, or when the risk is reduced to an acceptable level by using additional safety measures, the minimum clearance may be less than 2500 mm.

11.1.2 Fixed guards should be installed to restrict the entry of personnel into the FTV system's hazard zone. When entry into the FTV system's hazard zone is required for maintenance or service, guards should include doors for this purpose.

EXCEPTION: When the risk of collision is reduced to an acceptable level, guards may not be required to restrict entry of personnel into the FTV operating space (Refer to §12.1 UTV Collision Protection, §18.1 Hazard Indication for UTV system, and §17 Protection from Load held by UTV).

NOTE 14: It is recommended that the guards be designed to comply with ISO 13857 and ISO 14120.

11.1.2.1 When a door is opened during automatic operation of the UTV, the UTV system should go into a safe shutdown condition (EMO).

11.1.2.2 A door is an interlocked guard and should have a door locking device. EXCEPTION: When there is sufficient distance from the door to the FTV, such that there is not enough time for personnel to access the FTV before it comes to a safe shutdown condition, a door locking device is not required. However, the safety interlock system should have the following functions:

FTV should not start before the door is closed.

When the door is opened, the interlock system should give a stop command to the FTV.

NOTE 15: It is recommended that the interlock design for the interlocking doors comply with ISO 14119.

11.1.2.2.1 The safety interlock system design should comply with the safety interlock criteria in SEMI S2.





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Informational (Blue) Ballot1000A11.1.2.2.2 The FTV should not start until the doors are closed and door locking devices are activated.

11.1.2.2.3 The door locking devices should not be released unless drive power of all FTVs is off and the FTVs are stopped.

11.1.2.2.4 Where a door is provided to a space in which maintenance or service tasks are performed with personnel inside, and confinement of such personnel may cause injury, the door should be designed to be capable of being opened from the inside.

11.1.3 The safety measures should also include written safety procedures for the personnel doing maintenance or service inside the UTV system hazard zone.

12 Collision Protection12.1 UTV Collision Protection — When the UTV operating space is not separated by guards from personnel working space, the UTV should incorporate collision prevention measures that protect personnel. The UTV should also incorporate measures that prevent collision with other obstacles.

12.1.1 UTV Collision Prevention and Collision Detection Function — The UTV should incorporate a collision prevention function that can detect personnel and obstacles that are in front of the direction of motion, and can safely stop the UTV to prevent a collision with them. The UTV should also incorporate a function that can detect a collision with personnel or obstacle and immediately stop the UTV. In this case, the power to the drive actuator should be isolated and the UTV should go into an emergency stop.

12.1.1.1 The collision prevention function should incorporate a non-contact close proximity detection device.

NOTE 16: Examples of such devices are infrared, laser, and ultra-sonic devices.

12.1.1.2 The collision detection function should incorporate a contact detection device.

NOTE 17: An example of such a device is a bumper switch.

12.1.1.2.1 The UTV bumpers should be designed to minimize the risk to personnel in the event of a collision.

12.1.1.2.2 The UTV bumpers' width should be equal to or larger than the width of the UTV, as measured perpendicular to the direction of motion.

12.1.1.2.3 The UTV collision prevention and collision detection devices should be designed in accordance with the Safety Interlock Systems section of SEMI S2.

12.2 Protection of UTV Collision with Other UTV — When more than one UTV can be in operation at the same time, the UTV system should incorporate collision protection measures that prevent UTV from colliding with other UTV.

12.2.1 When designing measures for preventing UTV collision with other UTV, the following should be taken into consideration.

UTVs should not collide with the UTV in front. UTVs should not collide at branches or convergences. UTVs should not collide at intersections.

12.2.1.1 Examples of measures for preventing UTV collision with other UTV are listed below. These measures may be realized by independent or combined functions.

12.2.1.1.1 Incorporate collision prevention measures into UTV. An example of a collision prevention measure is a non-contact close proximity detection device, such as described in ¶12.1.1.1. Collision prevention function may also be realized by interlocking the UTVs.

12.2.1.1.2 Use traffic control to prevent a UTV from colliding with another UTV at branches and convergences. An example of a collision prevention at a place of concern, the UTV system controller monitors the place and only gives permission for one UTV to pass that place at a time.





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Informational (Blue) Ballot1000A12.3 When the UTV operating space is not separated by guards from the personnel operating space, the maximum UTV speed should be decided so that the risk associated with a collision between UTV and personnel is controlled to be an acceptable level.

NOTE 18: Some countries and regions have regulations regarding the maximum speed of AGVs.

12.4 In any case, speed of the UTV or any exposed moving part of the material handling mechanism on the UTV should not exceed 250 mm/sec when manually operated.

NOTE 19: The maximum manual operation speed is equivalent to the value found in ANSI/RIA/ISO 10218-1. Manual operation speed is covered in ¶14.2.2.

12.5 UTV Body Shape ― The UTV body shape should be designed to minimize the risk to personnel and objects in the event of a collision.

13 Emergency Operation13.1 This section describes E-stop function of individual UTVs and lifting device, and EMO function of the UTV system.

13.1.1 UTV and lifting device should be provided with E-stop actuators (e.g., buttons).

13.1.1.1 The number of E-stop actuators should be decided by the result of risk assessment.

13.1.1.2 E-stop should override all other functions and operations in all modes, except for EMO.

13.1.1.3 E-stop should safely stop all moving parts using one of the methods below. The selection should be made by risk assessment.

Immediately remove power to the machine actuator that can cause a hazardous situation(s).

Control power to the machine actuators that can cause a hazardous situation(s) in such a way to stop the hazardous motion as quickly as possible without creating other hazards. After the controlled stop, immediately remove the power to the actuators.

NOTE 20: The methods bulleted above are equivalent to stop category 0 and stop category 1 of IEC 60204-1, respectively.

13.1.1.4 Resetting the E-stop should not restart the motion of the UTV or lifting device.

13.1.1.5 The E-stop circuit should consist of electromechanical components.

EXCEPTION 1: Solid-state devices and components may be used, provided the system or relevant parts of the system are evaluated and found suitable for use. The components should be evaluated and found suitable considering abnormal conditions such as over voltage, under voltage, power supply interruption, transient over voltage, ramp voltage, electromagnetic susceptibility, electrostatic discharge, thermal cycling, humidity, dust, vibration and jarring. The final removal of power should be accomplished by means of electromechanical components.

EXCEPTION 2: FECS may be used provided the FECS conforms to an appropriate standard for electronic safety system. Components of the FECS should be tested and certified according to the requirements of the standard used. IEC 61508 and ISO 13849-1 are examples of internationally recognized electronic safety system standards. The final removal of power should be accomplished by means of electromechanical components.

NOTE 21: A FECS is a subsystem of a (PES) Programmable Electronic System. IEC 61508 is the preferred standard for complex PES.

13.1.1.6 All E-stop circuits should be fault-tolerant.

13.1.1.7 E-stop button should be red and mushroom shaped. When a background exists immediately around the button, it should be yellow. When this combination is used, it should be distinguishable from the EMO button.

NOTE 22: The colors of the E-stop button and background are equivalent to the colors found in IEC 60204-1.

13.1.1.8 The E-stop button should be labeled “Emergency-stop” or “E-stop”. The label may be on the button or on the background.





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Informational (Blue) Ballot1000A13.1.1.9 The E-stop button should be located in a place that is easy for personnel to operate.

13.1.2 UTV System EMO — Operation of the UTV system EMO should cause all UTVs and associated equipment under the system control to go into a safe shutdown condition.EXCEPTION: EMO function is not applicable to a UTV system that consists of UTVs that have their own battery power source and are controlled by remote wireless controllers (e.g., AGV). In those systems, each UTV should be provided with an E-stop function.13.1.2.1 EMO should conform to Emergency Shutdown section of SEMI S2.

13.1.2.2 The Position of the UTV System EMO — The EMO button should be installed where personnel have easy access. For example:

Near the UTV system control panel and operation terminal.

Near the load port of the process equipment and station.

On the wall or on an EMO stand in the space where the UTV system operates.

On the guards of the UTV system hazard zone.

13.1.2.3 When the UTV system EMO is installed close to another equipment's EMO, the personnel may have difficulty in discriminating between them. In such a case, the UTV system EMO should be labeled to identify it (e.g., OHT EMO).

13.2 Provision should be made to release personnel who may become trapped by the UTV when power of UTV is disrupted upon activation of EMO, etc.

13.2.1 Measures, procedures and any necessary tools should be provided to release a person trapped by a UTV without using drive power. The method should not rely on more than one person being able to assist the person who is trapped. When external power is used to release the brake, the voltage should be decided by risk assessment.

NOTE 23: A 24V battery is recommended as the external power source for this purpose.

14 Manual Operation14.1 When the adjustment of UTV system is required to be performed inside the UTV operating space with interlocks bypassed, the manual should include the necessary procedures to ensure the safety of the personnel carrying out the adjustment.

14.2 The UTV should be equipped with a manual movement function that permits personnel to maneuver the UTV. This includes all functions necessary for error recovery such as travel and loading/unloading.

14.2.1 When adjusting the UTV requires that interlocks be disabled or defeated, the means of disabling or defeating interlocks should require a manual operation.

14.2.2 When the UTV is under manual operation, speed of the UTV or any exposed moving part of the material handling mechanism on the UTV should not exceed 250 mm/sec. If a significant risk exists at 250 mm/sec., a lower speed should be provided based on reaction times and ability to avoid the hazard.

NOTE 24: The maximum manual operation speed is equivalent to the value found in ANSI/RIA/ISO 10218-1.

14.3 Manual Operation Box — If a UTV requires person to perform manual operation, the UTV should have a manual operation mode in which the UTV should be controlled exclusively by a manual operation box that is held by the personnel operating the UTV.

14.3.1 The manual operation box should be configured so each button that activates motion or sequence needs to be held throughout the motion or sequence, or motion stops immediately.

14.3.2 A hardware based device should be provided to transfer the control to the manual operation box. Transfer of the control to the manual operation box should immediately disable all other control of the UTV except safety interlocks, E-stop and EMO.

14.3.3 A wired manual operation box should be provided with an E-stop push button.





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Informational (Blue) Ballot1000A14.3.4 Cable length for a wired manual operation box should be optimized to allow the operator to remain outside the operating space, but not to allow operation from a position where the operator cannot constantly watch the UTV under adjustment.

14.4 When sufficient safe distance is maintained between the personnel and the UTV operating space and the risk from UTV motion is acceptable, a wireless manual operation box may be used.

14.4.1 A wireless manual operation box should include a separate and clearly identifiable means to initiate the stop function of the UTV. A UTV which is designed to be controlled by a wireless manual operation box should have a means of automatically initiating the stopping of the UTV and of preventing a potentially hazardous operation, in the following situations:

when a stop signal is received.

when a fault is detected in the wireless control system.

when a valid signal (which includes a signal that communication is established and maintained) has not been detected within a specified period of time.

14.4.2 A variation in the battery voltage of a wireless manual operation box should not cause a hazardous situation. If one or more potentially hazardous motions are controlled using a battery powered wireless manual operation box, a clear warning should be given to the personnel using the wireless manual operation box when a variation in battery voltage exceeds specified limits. Under those circumstances, the wireless manual operation box should remain functional long enough for the personnel using it to put the UTV into a non-hazardous situation.

14.4.3 A wireless manual operation box should not be able to control multiple UTVs at the same time, except for the stop function.

15 Maintenance and Service15.1 UTV Maintenance or Service — The UTV supplier should provide safety procedures in the manual provided to the user, so that maintenance and service of the UTV can be carried out safely.

15.1.1 When personnel are to carry out maintenance or service of the UTV system, lockable HEI capabilities should be provided for tasks that may result in contact with hazardous energy sources.

15.1.1.1 UTV should have a manual operation function that allows the UTV to be moved manually. See §14.

15.1.1.2 A function should be incorporated into the UTV, so that it is possible to move the UTV even when the power to the UTV is off. An example of this is releasing the brake to the UTV drive motor.

NOTE 25: See ¶13.2.1 for releasing brakes.

15.1.1.3 When a special device (e.g., UTV transportation wagon, lifting device) is needed to move a UTV from its operating space to a dedicated space outside the operating space, the UTV system supplier should supply the device.

15.1.1.3.1 Lifting device provided by the UTV supplier for maintenance or service should satisfy relevant criteria of SEMI S2.

16 Interface to Automated Material Handler of Semiconductor or FPD Manufacturing Equipment16.1 Protection from Loading/Unloading Motion of UTV — UTV system should be interlocked as necessary with equipment such as manufacturing equipment, load ports, conveyors, and automated warehouses, so that loads can be transferred safely and UTV do not collide with the equipment.

16.1.1 The safety interlock system design should comply with the safety interlock criteria in SEMI S2.

16.2 When the UTV operating space is not separated by guards from personnel working space, loading/unloading mechanisms on UTVs should have measures to prevent personnel to be exposed to mechanical hazards of the mechanisms. Measures should also be taken to prevent inadvertent motion of loading/unloading mechanisms. Measures should be decided by the result of risk assessment.





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Informational (Blue) Ballot1000A16.2.1 If robotic manipulators are used on FTVs for loading/unloading operations, the robotic manipulator should meet requirements of the appropriate international or national standard (e.g., ISO 10218-1, ANSI/RIA/ISO 10218-1, or ANSI/RIA R15.06). If there are deviations from these general industry standards because of unique semiconductor applications, these deviations should be documented by the evaluator and assigned a risk factor according to a risk assessment.

17 Protection from Load held by UTV17.1 Protection from Released Load from UTV ─ Risks associated with hazards from uncontrolled release of load should be mitigated to an acceptable level.

17.1.1 UTV system should be designed so a single point of failure of the UTV system does not allow a load to fall if falling or fallen load can cause unacceptable risks to human safety or damage facilities including manufacturing equipment.

17.1.2 UTV load holding mechanisms should have load-shift prevention mechanism (such as stoppers), so that if the UTV stops suddenly, the load is securely held in place.

17.2 Protection from Material held by OTVs — In addition to the provisions in ¶17.1, the following should also be provided on OTVs.

17.2.1 Inadvertent lowering or uncontrolled drops of the OTVs’ hoist mechanisms or loads should also be prevented.

17.3 The UTV should be designed to prevent loads from being placed on the UTV in such a manner that the load overhangs any edge (length or width) of the UTV.

18 Hazard IndicationNOTE 26: The integrated design of any hazard indicator system or other safety system requires a coordinated effort among the UTV system supplier, the process equipment supplier, and the user. The following are the minimum hazard indicators to be designed into the UTV system equipment.

18.1 Hazard Indication for UTV System — Safety related information of UTV systems should be indicated visually. Additional acoustic indication should also be considered. The result of a risk assessment should be used to determine the hazard indications to be used. The following are hazard indication measures.

Indicating devices

Hazard warning labels

Safety signs (Including Floor Marking)

18.1.1 Indicating devices include acoustic indicating devices and visual indicating devices.

18.1.1.1 Visual Indicating Devices ― The status of the UTV system (automatic, manual, normal, fault) should be clearly identifiable by the visual indicator color and whether it is on, off or flashing.

NOTE 27: Visual indicating devices include lamps, lights and displays. See SEMI S22 for colors used for visual indicating devices.

18.1.1.1.1 The positions of visual indicators should be selected so that they are visible from all necessary viewing positions.

NOTE 28: It is recommended that safety information of high importance be indicated with flashing visual indicators in conjunction with an acoustic indicating device. When using a Light Tower as the visual indicating device, refer to SEMI S2.

18.1.1.2 Acoustic Indicating Devices ― Acoustic indicating devices should be used to warn of an imminent hazard and should mark the onset and the duration of a hazardous situation. They should have a sound level that is perceptibly higher than the level of ambient noise. They should be easily recognizable, and clearly distinct from other acoustic signals and ambient noise.

NOTE 29: The same acoustic indicating device may be used to identify different conditions by using different sounds, e.g., continuous sounds, intermittent sounds, etc. See IEC 61310-1.





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Informational (Blue) Ballot1000A18.1.1.3 When the UTV operating space is not separated from personnel operating space, the following devices should be provided on UTV.

18.1.1.3.1 Startup Alarm — When the UTV restarts after stopping for 5 seconds or more, the UTV should set off an audible alarm sound at least for one second before it begins to move.

18.1.1.3.2 When a safety device (such as EMO, E-stop, bumper switch) is activated, the UTV system should both light a lamp(s) and generate an alarm sound to alert personnel.

18.1.1.3.3 Turn Signal Lamps — To indicate the UTV is preparing to turn/spin-turn (right or left) and during the turn cycle, the UTV should light turn signal lamp(s). Turn signal lamps should be clearly visible from the side in the direction of the turn.

18.1.2 Safety Labels ― Safety labels should be provided to identify and warn against hazards found by the result of risk assessment. Safety labels should comply with SEMI S1 and SEMI S2.

18.1.3 Safety Signs （ Including Floor Marking) ― Documents provided to the user by the UTV supplier should have information about the recommended safety signs to be used in the UTV operating space and maintenance space (including alerts, signs, color coding, and safety poles for the UTV operation and maintenance space).

18.2 The written documentation provided by the UTV system supplier should include information on hazard indication, including warning measures, warning contents, and warning locations for the UTV system.

19 Hazardous Materials19.1 Batteries for UTV System — If the UTV system requires the use of batteries, the following should be included in the documentation provided by the UTV system supplier.

NOTE 30: Battery charging stations may have to meet international, national, or local regulations (such as EU Directives or U. S. Department of Labor, Occupational, Safety and Health Act Regulations).

19.1.1 Specifications provided by the UTV system supplier for battery recharging, battery maintenance and battery storage spaces should specify the following.

Requirements for eye-washing equipment.

Requirements for ventilation.

Restrictions on smoking and other sources of ignition.

Personnel splash protection requirements during electrolyte handling.

Requirements for dealing with electrolyte spill from a damaged battery case.

19.1.2 The UTV system supplier should provide disposal instructions for batteries that constitute hazardous waste (such as lead, nickel cadmium or lithium).

19.1.3 The UTV system supplier should provide information on the nature, volume, and risks of hazardous waste (such as lead or lithium) referring to Environmental Considerations section of SEMI S2.

20 Related Documents20.1 CEN Standards5

EN 1525 — Safety of Industrial Trucks – Driverless Trucks and their Systems

20.2 US Code of Federal Regulations 6

29 CFR 1910 — Occupational Safety and Health Standards

20.3 JIS Standards7

5 European Committee For Standardization, 36, rue de Stassart, B-1050 Brussels, Belgium6 United States Occupational Safety and Health Administration, 200 Constitution Avenue, Washington, D.C. 20210, U.S.A. Available from U.S. Department of Labor Website: www.osha.gov





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Informational (Blue) Ballot1000AJIS D 6801 — Glossary of Terms Relating to Automatic Guided Vehicle Systems

JIS D 6802 — General Rules on the Safety of Automatic Guided Vehicle Systems

JIS D 6803 — General Rules on the Design of Automatic Guided Vehicles

JIS D 6804 — General Rules on the Design of Automatic Guided Vehicle Systems

JIS D 6805 — Testing Method of Characteristics and Functions of Automatic Guided Vehicles

7 Japanese Industrial Standards available in Japanese language only through Japanese Standards Association, 1-24, Akasaka 4-chome, Minato-ku, Tokyo, Japan 107-8440





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Informational (Blue) Ballot1000AAPPENDIX 1SEISMIC PROTECTIONNOTICE: The material in this appendix is an official part of SEMI (doc#) and was approved by full letter ballot procedures on (date of approval).

A1-1 Derivation of §10, Seismic Load Guidelines

A1-1.1 The horizontal seismic loadings found in §10, were based on following assumptions for factors in Equation 6.2-1 in Section 6.2.6 in FEMA 450 (2003 Edition):

(Equation 6.2-1)

Fp is not required to be taken as greater than:Fp=1.6 SDSIpWp (Equation 6.2-3)

Fp should not be taken as less than:Fp=0.3 SDSIpWp (Equation 6.2-4)

Where:Fp: Seismic design force centered at the component’s center of gravity and distributed relative to component’s mass distribution.ap : Component amplification factor = 1.0 (i.e., treat Manufacturing and Process Machinery General in Table 6.4-1 in FEMA 450)Rp : Component response modification factor = 1.5 (in the condition of Section 6.2.8.1 in FEMA 450)Ip : Component importance factor = 1.5 (i.e., the component is required to function after an earthquake in Section 6.2.2 in FEMA450)SDS : Short period spectral acceleration parameter in Section 3.3.3 in FEMA 450 = 2/3 SMS = 2/3FaSS =2/3*(1.0)*(2.0)=4/3 where: SMS= The maximum considered earthquake, 5-percent-damped, spectral response acceleration parameter

at short periods adjusted for site class effects as defined in Section 3.3.2 in FEMA 450 SS : The mapped, maximum considered earthquake, 5-percent-damped, spectral response acceleration parameter at short periods as determined in Section 3.3.1

=2.0 (i.e., 200%g in Figure 3.3.3) Fa : Site coefficient defined in Table 3.3-1 =1.0 (i.e., Site Class D, SS≥1.25 )Wp: Operating weight of a nonstructural component. z: Height in structure at point of attachment of component. h: Average roof height of structure relative to the base elevation. The building structure is assumed to be single-fabrication-floor facility as major and typical.　In

single-fabrication-floor facility, for components of UTV installed at halfway between grade elevation and roof elevation, and supported by the structure of the floor halfway between grade elevation and roof elevation z/ h should be 0.5.

In single-fabrication-floor facility, for components of UTV supported through the secondary frame by the main structure of roof , z/ h should be 1.0





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0.4ap SDSWp z Fp = 1+2

Rp h IP

0.4ap SDSWp z 0.4*1.0*4/3* Wp Fp = 1+2 = (1+2*0.5) =1.067Wp≈1.0Wp

Rp h (1.5/1.5) IP

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Informational (Blue) Ballot1000A

NOTE 1: In multi- fabrication-floor facility,, z/ h varies according to the supporting structure height z.

A1-1.2 Assumptions Used for Above Derivation

A1-1.2.1 Because typical UTV system is considered rigid, a frequency response analysis was not considered to be necessary.

A1-1.2.2 Generally UTV system does not use vibration isolation. In case of the component supported by vibration isolators, the value of ap should be changed to 2.5 in Equation 6.2-1, Equation 6.2-3 and Equation 6.2-4 and should calculate the Fp for the each case.

A1-1.3 Vertical Seismic Load — Based on Section 6.2.6 in FEMA450, the nonstructural component should be designed for a concurrent force ±0.2SDSWP. However, based on the current seismic design code for buildings in Taiwan (issued in 2005) and “Seismic Design and Construction Guideline for Building Equipment” published by Building Center of Japan (BCJ) the vertical design force for the nonstructural components and equipment is defined as follows:

For general sites and Taipei Basin in Taiwan and for anywhere in Japan: Fpv = (1/2)Fph

For near-fault sites in Taiwan: Fpv = (2/3) Fph

Where, Fph is the horizontal design force, which is the same as Fp used in FEMA450

This guideline adopts the former condition as standard, so the seismic vertical seismic load of component supported by the structure of the floor at halfway between grade elevation and roof elevation is set to be 50% of the operating weight and that supported from the roof structure is set to be 75% of the operating weight.

NOTE 2: The vertical component serves to, in effect, reduce the amount of mass that is available to resist overturning or toppling. As for suspended system, the vertical component acts to increase the weight of component and works to pull down the support elements of the system (e.g., OTV system).

NOTE 3: In Japan, there are several guidelines for non-structural elements or building equipment. “Seismic Design and Construction Guideline for Building Equipment” published by Building Center of Japan (BCJ) were conformed to The Building Standard Law of Japan and have been adopted as a jurisdictional requirement to the building constructions. Appropriateness of the criteria in the guideline has been verified in several large earthquakes over 6 Lower of the JMA Seismic Intensity in Japan (http://www.jma.go.jp/jma/kishou/know/shindo/explane.html). In the guideline mentioned above, the basic seismic coefficient for equipment is 0.4 and the values of design horizontal seismic coefficient are 0.4, 0.6, 1.0, 1.5 and 2.0. If designers practice dynamic analysis or other detail calculation methods to determine the design horizontal seismic coefficient, values should be rounded and classified to the five values mentioned above. The task force adopted this rule to set the values of horizontal loading and vertical loading. In this guideline, the vertical loading is set to be 50% of horizontal loading.

A1-1.4 Component Anchorage (Section 6.2.8.2 in FEMA 450) — Anchors embedded in concrete or masonry should be proportioned to carry the least of the following:

1. The design strength of the concrete part,2. 1.3 times the force in the connected part due to the prescribed forces, and 3. The maximum force that can be transferred to the connected part by the component structural system.

NOTE 4: It is not the intent of this document that the UTV system supplier provides anchors. Such hardware may be provided as agreed upon between the supplier and the user.

A1-1.5 Horizontal Displacement Restraint — For OTV suspended from ceiling, in order to restrict the lateral displacement of the suspended guide-rails and OTV within acceptable condition in case of earthquake, rigid-frames and/or bracings should be designed and implemented.





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0.4ap SDSWp z 0.4*1.0*4/3* Wp Fp = 1+2 = (1+2*1.0) =1.6 Wp ≈1.5 Wp

Rp h (1.5/1.5) IP

http://www.jma.go.jp/jma/kishou/know/shindo/explane.html

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Informational (Blue) Ballot1000ARELATED INFORMATION 1PROTECTIVE DEVICE OPTION CONSIDERATION FOR LOADING/UNLOADING OPERATIONS AT SEMICONDUCTOR or FPD MANUFACTURING EQUIPMENT LOAD STATIONS

NOTICE: This related information is not an official part of SEMI (doc#) and was derived from (origin of information). This related information was approved for publication by (method of authorization) on (date of approval).

R1-1 PurposeR1-1.1 This Related Information should act as an application note for consideration and selection of safety devices that may be provided to protect loading/unloading operations where risks are generated by OTVs.

R1-1.2 OTV suppliers are not required to provide such devices, except as necessary to comply with local jurisdictional requirements.

NOTE 1: Refer to the main body of this safety guideline for devices recommended for protecting equipment.

R1-2 ScopeR1-2.1 Protective Devices As related to the UTV equipment, devices designed to protect personnel or equipment from injury or damage during raising or lowering of loads into position.

R1-2.2 Protective devices should be considered when OTVs with hoisting mechanisms are present.

R1-2.3 Protective devices function to warn of, or prevent transfer of, loads when personnel or equipment are at risk.

R1-2.4 This application note covers the following types of devices:

Sensors

Shields

Alarms

Signs and visual alerts

Communication protocol

NOTE 1: This should not be considered as a complete list. There could be many other solutions.

R1-3 LimitationsR1-3.1 This Related Information is not intended to apply to situations where load ports are installed only in locations inaccessible to personnel walking on the floor (such as SEMI E15.1 Option 2 load ports).

R1-3.2 This Related Information does not apply to spaces using only FTVs or PGVs.

R1-4 ConsiderationsR1-4.1 Protective devices should be considered for preventing transfer of loads when personnel or equipment are at risk.

R1-4.2 Protective device integration should be considered with a coordinated effort between UTV system supplier, manufacturing equipment supplier and the end user customer.

R1-5 Shield OptionsR1-5.1 Shield Device Shield devices are physical shielding which is placed to block access to a hazard space.





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Informational (Blue) Ballot1000AR1-5.2 Shield devices, when selected, should be capable of fitting within the dimensional limitations of the load ports. (See SEMI E15.1 for dimensional requirements and exclusion zones for 300 mm load ports.)

R1-5.3 Shield device types may include:

Safety guard

Automatic doors

R1-5.4 Shield devices, when chosen, should prevent simultaneous loading/unloading operation by a FTV or personnel and an OTV.

R1-5.5 Protective Device Interlocks — These confirmation signals from shield devices are used to interrupt the transfer process if a shield is breached.

R1-5.5.1 In the case of UTV system, protective device interlocks should communicate to the UTV equipment either directly or through the manufacturing equipment.

R1-5.5.2 Communication should be via a protected-path communications protocol that is fail-safe.

R1-6 AlarmsR1-6.1 Alarms Alarms consist of audible and visual notices of hazards that may be approaching.

R1-6.2 Alarms may also be selected as protective devices.

R1-6.3 Alarms may be field configurable to allow for selection of type of audible or visual allowed, or to allow for selection of either audible or visual and elimination of the other type.

R1-7 Signs and Visual AlertsR1-7.1 Signs such as “Caution”, “Warning”, or other sign appropriate to the hazard may be selected as a method of protection.

R1-7.2 Signs should be compatible with SEMI S1, or should be approved by the local jurisdictional authority.

R1-7.3 Visual Alerts an indicator applied to floors or vertical surfaces surrounding a potential are of delivery, which indicates to personnel present that a hazard exists in the space.

R1-7.4 Visual alerts may include:

Striped tape on the floor

Warning guards

Railings

NOTE 1: This should not be considered a complete list there could be many other solutions.

R1-8 Communication ProtocolR1-8.1 Communication Protocol A method of communicating the status of the equipment to a centrally monitored location. This may be direct or through the equipment communication path.

R1-8.2 Protective devices offered should be capable of communicating with floor-traveling and overhead-traveling UTV system through some type of interface.

R1-9 Providing InformationR1-9.1 If protective devices are offered, the UTV system supplier should provide documentation to the user about protective devices available.

R1-9.2 Information should be provided to the user to explain the function of any protective devices that may be offered.

R1-9.3 Information may also be needed by suppliers of other equipment to insure adequate communication between equipment types.





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Informational (Blue) Ballot1000ANOTICE: SEMI makes no warranties or representations as to the suitability of the safety guidelines set forth herein for any particular application. The determination of the suitability of the safety guidelines is solely the responsibility of the user. Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. These safety guidelines are subject to change without notice.

By publication of this safety guideline, Semiconductor Equipment and Materials International (SEMI) takes no position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this safety guideline. Users of this guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.





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