Background Statement for SEMI Draft Document...

Background Statement for SEMI Draft Document 5102AREVISION TO ADD A NEW SUBORDINATE STANDARD SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE GAUGES TO SEMI E54-0710, SENSOR/ACTUATOR NETWORK STANDARDNote: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

BackgroundThe SEMI E54 Sensor/Actuator Network (SAN) specification describes how different devices can communicate over an industrial communication network like DeviceNet, Profibus, Seriplex, etc.

The specification is divided into Common Device Models (used by all devices) and Specific Device Models (mass flow controllers, pumps). Several Specific Device Models (SDMs) are currently not defined.

In order to have a common definition and behavior of all devices, it is necessary to define as much as possible Specific Device Models which are used in Semiconductor Equipment.

Work is currently being done on the implementation of a Profibus/Profinet SEMICONDUCTOR Devices Profile. Missing SDMs need to be defined to support the Profibus profile (at the moment Vacuum Gauges, Mass Flow Controller, Pressure Control Valve, RF/DC Generators).

This ballot proposes to add, as a SEMI E54 subordinate standard, a sensor/actuator network specific device model for vacuum pressure gauges. Specifically, this document addresses the minimum attributes, services, and behavior a Vacuum Pressure Gauge (VPG) device must support to be interoperable on the Sensor/Actuator Network. Some parts of this document are defined in the same way as done in the CIP specification from ODVA.

Review and Adjudication InformationTask Force Review Committee Adjudication

Group: Sensor Bus TF NA Information & Control CommitteeDate: Tuesday, October 25, 2011 Wednesday, October 26, 2011Time & Timezone: 1:00 PM to 3:00 PM, Pacific Time 8:00 AM to 4:30 PM, Pacific TimeLocation: SEMI Headquarters SEMI HeadquartersCity, State/Country: San Jose, CA San Jose, CALeader(s): James Moyne (Applied Materials)

Rolf Enderes (Inficon, EU SANPro TF)Jack Ghiselli (Consultant)David Bricker (Applied Materials)Lance Rist (RistTex)

Standards Staff: Paul Trio (SEMI NA)408.943.7041 /[email protected]

Paul Trio (SEMI NA)408.943.7041 / [email protected]

This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation.

Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.

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SEMI Draft Document 5102AREVISION TO ADD A NEW SUBORDINATE STANDARD SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE GAUGES TO SEMI E54-0710, SENSOR/ACTUATOR NETWORK STANDARD1 Purpose1.1 This specification is part of a suite of standards which specify the implementation of SEMI standards for the Sensor/Actuator Network. The specific purpose of this specification is to describe a network-independent application model comprised of device objects which are common to all Vacuum Pressure Gauges on a semiconductor equipment Sensor/Actuator communications network.

2 Scope2.1 This specification specifically addresses the minimum attributes, services, and behavior a Vacuum Pressure Gauge (VPG) device must support to be interoperable on the Sensor/Actuator Network.

2.2 This specification is intended to ensure a high-degree of device interoperability on the Sensor/Actuator Network, while still allowing flexibility for product differentiation and technology evolution.

2.3 The model specified in this specification is used in conjunction with the Sensor/Actuator Network Common Device Model (CDM) to completely describe the VPG as it appears from the network interface.

2.4 This specification, together with the Sensor/Actuator Network Standard, the Sensor/Actuator Network Common Device Model, and a Sensor/Actuator Network Communication Specification, form a complete interoperability specification for the VPG.

2.5 To comply with this specification, a device must implement and support, at a minimum, the required attributes, services, and behavior identified in these documents. Support for optional attributes, services, and behavior are not required to be compliant to this specification. Optional attributes, services, and behavior are specified in these documents to promote further device interoperability as features evolve and are adopted by more manufacturers. If optional attributes, services, and behavior are implemented for this device, they must be implemented as identified in this document.

NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use..

3 Limitations3.1 This specification is a companion to a suite of specifications which together make up the Sensor/Actuator Network Communication standard. Therefore, using portions of this specification that relate to network communications necessarily requires an understanding of the associated network specification.

3.2 As this document is a specification for the Vacuum Pressure Gauge Model, it does not contain any definition of objects, attributes, services, or behavioral descriptions that are already defined in the Sensor/Actuator Network Common Device Model (CDM). Additional attributes, attribute assignments, services, and/or service parameters that are Vacuum Pressure Device-specific and/or implementation-specific are contained in this specification.

3.3 While this specification is sufficient to completely describe the VPG as it appears from the network, it does not fully describe behavior of the VPG which is not visible from the network. This allows flexibility in implementation techniques and product differentiation between manufacturers. Manufacturer-specific objects may be defined by the manufacturer, but are, by definition, outside the scope of this standard.

3.4 This specification is compatible, but not compliant, with SEMI E39. This means that although this specification does not require compliance with SEMI E39, it is extensible such that implementations may be developed that are fully compliant with both standards. Note that the concepts and terminology of this specification are compatible with

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Page 1 Doc. 5102A SEMI

Semiconductor Equipment and Materials International3081 Zanker RoadSan Jose, CA 95134-2127Phone: 408.943.6900, Fax: 408.943.7943

DRAFTDocument Number: 5102A

Date: 5/8/2023

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Informational (Blue) Ballot1000AInformational (Blue) Ballotjn lthose of SEMI E39. However, SEMI E39 has specific requirements that are intended for higher level applications and, thus, are not applied to the Vacuum Pressure Gauge Device Model.

3.5 Operation over the entire range specified for an attribute within a specific object instance is not a requisite for compliance with this specification.

4 Referenced Standards and Documents4.1 SEMI Standards

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model

4.2 IEEE Standard1

IEEE 754 — Floating Point Definition

4.3 Other Documents

ODVA — Common Industrial Protocol (CIP) Specification2

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology5.1 Terminology Defined in Standard for Sensor/Actuator Network Common Device Model [SEMI E54.1]

5.1.1 Attribute5.1.2 Behavior5.1.3 Byte5.1.4 Character5.1.5 Device5.1.6 Device Manager (DM) Object5.1.7 Device Model5.1.8 Instance5.1.9 Nibble5.1.10 Object5.1.11 S, A, and C Objects5.1.12 Sensor Actuator Controller (SAC) Object5.1.13 Service5.1.14 State Diagram5.2 Definitions5.2.1 boolean (BOOL) — a binary bit representing 0 and 1 corresponding to FALSE and TRUE or DISABLE and ENABLE respectively.5.2.2 common device model (CDM) — refers to Sensor/Actuator Network Common Device Model. [SEMI E54.1]5.2.3 data type — an unsigned short integer formatted as an enumerated byte to specify attribute data format. The intended use of this attribute type is in cases where an attribute, or set of attributes, may be defined, allowing for more than one level of support (e.g., INT or REAL). The following values are defined: 0 = INT 1 = REAL 2 = USINT 3 = SINT

1 Institute of Electrical and Electronics Engineers, IEEE Operations Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, New Jersey 08855-1331, USA. Telephone: 732.981.0060; Fax: 732.981.1721; http://www.ieee.org2 ODVA, 1099 Highland Drive, Ann Arbor, Michigan, USA. Telephone: 734.975.8840; Fax: 734.922.0027; http://www.odva.org





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http://www.odva.org/

http://www.ieee.org/

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Informational (Blue) Ballot1000AInformational (Blue) Ballotjn l 4 = DINT 5 = LINT 6 = UINT 7 = UDINT 8 = ULINT 9 = LREAL 10–99 = Reserved for CDM 100–199 = Reserved for SDMs 200–255 = Manufacturer-Specified

5.2.4 data units — an unsigned integer formatted as an enumerated byte to specify attribute data units. The intended use of this attribute type is in cases where an attribute, or set of attributes, may be defined, allowing for more than one unit’s context. The values are defined in an appendix of this document.5.2.5 date — a data structure of four bytes used to represent a calendar date. Table 1 defines the format of the date data type.

Table 1 Date Format

Data # Description Range

0–1 Year Unsigned Integer2 Month Unsigned Short Integer (range of 1–12)3 Day Unsigned Short Integer (range of 1–31)

5.2.6 double integer (DINT) — an integer, four bytes long, in the range −231 to 231 −1.5.2.7 enumerated byte — a byte with assigned meaning to the values 0 through 255. May take on one of a limited set of possible values.5.2.8 full scale range — the defined 100% value of an attribute in its assigned units. This value is not necessarily the maximum value for the attribute. As an example, the indicated flow attribute value may attain 120% of the full scale range.5.2.9 gas calibration — a reference to a set of parameters or methods which are used to calibrate or correct the device for a particular gas type, range, and units.5.2.10 gas standard number — a number that references a gas type. The number and its referenced gas type are defined in SEMI E52.5.2.11 gas standard symbol — a text symbol that references a gas type. The symbol and its referenced gas type are defined in SEMI E52.5.2.12 last valid value (LVV) — the most recent value successfully assigned to an attribute.5.2.13 long integer (LINT) — an integer, eight bytes long, in the range −263 to 263 −1.5.2.14 long real (LREAL) — a double floating point number, eight bytes long, as defined in IEEE 754.5.2.15 manufacturer — in the context of this document, this refers to the manufacturer of the device.5.2.16 null character — a byte with a value of zero.5.2.17 programmed gas calibration — a reference to a particular gas type, range, and units for which the device is currently calibrated.5.2.18 real (REAL) — a floating point number, four bytes long, as defined by IEEE 754.5.2.19 short integer (SINT) — an integer, one byte long, in the range −128 to 127.5.2.20 signed integer (INT) — an integer, two bytes long, in the range −32768 to 32767.5.2.21 text string — a string of one-byte characters. See ¶ 5.1 for a definition of a character.5.2.22 unsigned integer (UINT) — an integer, two bytes long, in the range 0 to 65535.5.2.23 unsigned short integer (USINT) — an integer, one byte long, in the range 0 to 255.





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Informational (Blue) Ballot1000AInformational (Blue) Ballotjn l5.2.24 Vacuum pressure gauge (VPG) — a self contained device, consisting of one ore more vacuum pressure sensors and signal processing electronics, commonly used in semiconductor industry to measure the pressure of gas.5.2.25 vacuum pressure single gauge device (VG) — a self-contained device, consisting of one vacuum pressure sensor and signal-processing electronics, commonly used in semiconductor industry to measure the pressure of gas.5.2.26 vacuum pressure gauge / combo device (CG) — a self-contained device, consisting of several vacuum pressure sensors and signal-processing electronics, commonly used in semiconductor industry to measure the pressure of gas. The characteristic of these combo devices is that only one vacuum pressure sensor outputs an actual pressure value at one time. The other sensors are in overrange which means that the pressure is higher than the measurement range of the gauge or underrange condition which means that the pressure is lower than the measurement range of the gauge.

5.2.26.1 Example: A vacuum pressure gauge with two Sensor Analog Input instances

Pirani measuring instance: measurement range: 1E-3 Torr .. 760 Torr

Hot Cathode Ion Gauge measurement range: 1E-10 Torr .. 1E-3 Torr

When working at 1E-5 Torr, the Pirani measuring instance will be in an Underrange condition whereas the Hot Cathode Ion Gauge will output its normal pressure value.Working at 100 Torr the Pirani measuring instance will output its normal pressure value whereas the Hot Cathode Ion Gauge will be in an Overrange condition.5.2.27 vacuum pressure gauge / multi device (MG) — a self-contained device, consisting of several vacuum pressure sensors and signal-processing electronics, commonly used in semiconductor industry to measure the pressure of gas. The characteristic of these multi devices is that several vacuum pressure sensors output an actual pressure value at the same time. Normally sensors (at a minimum two) are in normal working conditions (no underrange, no overrange).

6 Requirements6.1 In order to implement this standard in a Vacuum Pressure Gauge, it is necessary to also implement SEMI E54.1 and one of the Sensor/Actuator Network Communication standards. See § 2 for more information on a complete interoperability standard.

7 Conventions7.1 This document embraces the Harel State Chart notation, the transition table definition format, the object attribute representation formats, service message definition formats, and behavior definition formats as specified in SEMI E54.1.7.2 Figure 1 describes the convention for object representation used throughout this specification.

Figure 1

Object Representation

8 Device High Level Structure8.1 General Description — The high level object view of a VPG device is shown in Figure 2.8.1.1 Note that the “VPG” objects are depicted in Figure 2 only for the purposes of illustrating a high level view of the device and its component objects. In the context of this document, these objects are not addressable, do not have addressable attributes, do not have accessible services, nor do they exhibit any defined behavior. These objects are only included in the figures to aid in the visualization of the device.8.1.2 This document defines in detail all of the component objects unique to the VPG devices. References, rather than definitions, are included for the DM, the SAC, and other objects defined in SEMI E54.1.8.1.3 Many of the objects defined in this document inherit properties from other objects. The properties inherited include attribute, service, and behavior definitions. These other objects are specified here or in SEMI E54.1.





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Informational (Blue) Ballot1000AInformational (Blue) Ballotjn l8.1.4 This document provides for future extensions, as well as manufacturer-specific enhancements, by reserving object attribute identifiers and object service identifiers. Specifically, all object definitions in this document specify or reserve the first 64 attribute identifiers (A1–A64) and the first 64 service identifiers (S1–S64), allowing manufacturers to specify identifiers beyond these ranges. Additionally, byte-enumerated attributes are specified or reserved from 0 to 63, allowing manufacturers to specify enumerations beyond this range (64 to 255).8.1.5 Vacuum Pressure Gauge (VPG) Device Description — A Vacuum Pressure Gauge device profile is composed of the component objects and object relationships shown in Figure 2.

Figure 2Vacuum Pressure Gauge Device

High Level Structure

8.1.6 General Requirements8.1.6.1 Device Objects — All objects are defined in terms of their object name and instance identifier. Identifiers for all objects described in this document are summarized in Table 2.

Table 2 Vacuum Pressure Gauge Device Objects

Referenced Document Section

Object Name

Object Identifier VPG Minimum Instances

Maximum Instances

8.2 Device Manager (DM) VPG 1 1 18.3 Sensor Actuator

Controller (SAC)VPG 2 1 1





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Informational (Blue) Ballot1000AInformational (Blue) Ballotjn l8.4 Sensor-AI VPG 3 1 Manufacturer-Specified8.5 Assembly VPG 4 1 Manufacturer-Specified8.6 Actuator-AO VPG 5 0 Manufacturer-Specified- Reserved VPG 6 – VPG 64 - -- Manufacturer-Specified > VPG 64 - -

8.1.6.2 Object Services — Not all object services listed in this document can necessarily be requested over the network. They are included in this document because their behavior may generate network activity.8.1.6.3 Object Behavior — For all service requests received over the network that are unsupported by the object, or contain a parameter value which is beyond the supported range, or which is otherwise invalid, a network-specific service error response is generated as specified in SEMI E54.1.8.2 Device Manager Object (DM)8.2.1 The Device Manager object instance is the device component responsible for managing and consolidating the device operation as specified in SEMI E54.1. The following sections specify the components of the DM object that are not specified in the Common Device Model.8.2.2 Device Manager Object Attributes — Additional specifications on required and optional DM object instance attributes are listed in Table 3 (see SEMI E54.1, SAN Common Device Model for the complete definition of the Device Manager Object)

Table 3 DM Object Attributes

Attribute Name Attribute Identifier Access Network Required Form

Device Type A1 R Yes Refer to CDM. [SEMI E54.1]Exception Detail Alarm A13 R No Refer to CDM. [SEMI E54.1]Exception Detail Warning A14 R No Refer to CDM. [SEMI E54.1]Reserved A33–A64 - - Reserved for SDM future expansion.Manufacturer-Specified >A64 - - Manufacturer-Specific attributes

8.2.2.1 Device Type — An attribute which uniquely identifies the type of the device on the network. The device type attribute is assigned as follows:

Vacuum Pressure Single Gauge Device = “VG”

Vacuum Pressure Combo Gauge Device = “CG”

Vacuum Pressure Multi Gauge Device = “MG”

8.2.2.2 Exception Detail Alarm (Optional) — An attribute which identifies the detailed alarm status of the device. Table 4 defines the bit assignments associated with the alarm exception detail.

Each vacuum pressure gauge has to support two device specific alarm bytes. Depending on the vacuum gauge type these bytes are defined differently. The definition of these device specific alarm conditions is provided in the Sensor Analog Input section. These bits are copied from the Sensor Analog Input section into the Device Manager Exception Detail Alarm section.

Table 4 Exception Detail Alarm Bit Assignments

Bit Device-Specific Alarm [0]

0-7 Bitdefinition as specified in Sensor Alarm attribute in Sensor Analog Input VG





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Bit Device-Specific Alarm [1]

0-7 Bitdefinition as specified in Sensor Alarm attribute in Sensor Analog Input VG

8.2.2.3 Exception Detail Warning (Optional) — An attribute which identifies the detailed warning status of the device. Table 5 defines the bit assignments associated with the warning exception detail.

Table 5 Exception Detail Warning Bit Assignments

Bit Device-Specific Warning [0]

Status Extension (Bitdefinition as specified in Sensor Alarm attribute in Sensor Analog Input VG)

Bit Device-Specific Warning [2]

Bitdefinition as specified in Sensor Warning attribute in Sensor Analog Input

8.2.2.3.1 All Sensor Status information originates from the Sensor-AI Object.8.2.2.3.2 The meaning of the Sensor Alarm and Sensor Warnings is defined by the used type of gauge (see definition in Sensor-AI Object).8.2.2.3.3 Combination and multiple gauges have several Sensor Analog Input instances according to the implemented measurement principles of the device. Therefore the Device Manager supports a set of Device Exception Detail Alarms and Device Exception Detail Warnings for each measuring principle which is part of the device. The following Exception Detail Alarm and Exception Detail Warning structure applies for Single Gauges, Combination Gauges and Multiple Gauges:

Table 6 Device Manager Instance Attributes Exception Detail Alarm for Single Gauges, Combination Gauges and Multiple Gauges: (additional explanation to definition in E54.1)

Attribute Name Attribute Identifier

Access Network

Required Value

Exception Detail Alarm (optional) DmA13 - N

Common Exception Detail Alarm Block - - -

Size - RO - 2

Common Exception Detail Alarm (Byte 0) - RO -

Common Exception Detail Alarm (Byte 1) - RO -

Device Specific Detail Alarm Block - - -

Size - RO - Depending on device structure

Device Exception Detail Alarm (Byte 0) measuring principle 1

- RO - Copy of Sensor Alarm (0) of Sensor AI Object

Device Exception Detail Alarm (Byte 1) measuring principle 1






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Access Network

Required Value

Combination and Multiple Gauges Only:

Device Exception Detail Alarm (Byte 0) measuring principle N


Device Exception Detail Alarm (Byte 1) measuring principle N


End of Combination and Multiple Gauges Only

Manufacturer Specific Detail Alarm Block - - -

Size - RO - 1

Manufacturer Specific Detail Alarm - RO - Manufacturer specific

Table 7 Device Manager Instance Attributes Exception Detail Warning for single gauges(additional explanation to definition in E54.1)


Access Network

Required Value

Exception Detail Warning (optional) DmA14 - N Common Exception Detail Block - - - Size - RO - 2 Common Exception Detail Warning(Byte 0) - RO - As defined in E54.1 Common Exception Detail Warning (Byte 1) - RO - As defined in E54.1 Device Specific Detail Warning Block - - - Size - RO - depending on device

structure Status Extension - Copy of Status Extension of

Sensor-AI Object Device Exception (Byte 0) Detail Warning measuring principle 1


Device Exception Detail Warning (Byte 1) measuring principle 1


Manufacturer Specific Detail Warning Block - - - Size - RO - 1 Manufacturer Specific Detail Warning - RO - Manufacturer specific

Table 8 Device Manager Instance Attributes Exception Detail Warning for combination and multiple gauges(additional explanation to definition in E54.1)


Access Network

Required Value

Exception Detail Warning (optional) DmA14 - N Common Exception Detail Block - - - Size - RO - 2 Common Exception Detail Warning(Byte 0) - RO - As defined in E54.1





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Informational (Blue) Ballot1000AInformational (Blue) Ballotjn l Common Exception Detail Warning (Byte 1) - RO - As defined in E54.1 Device Specific Detail Warning Block - - - Size - RO - depending on device

structure Class Level Status Extension - Copy of Device Level Status

Extension of Sensor-AI Object

Device Exception (Byte 0) Detail Warning measuring principle 1


Device Exception Detail Warning (Byte 1) measuring principle 1


Combination and Multiple Gauges Only: Device Exception Detail Warning (Byte 0) measuring principle N


Device Exception Detail Warning (Byte 1) measuring principle N


End of Combination and Multiple Gauges Only Manufacturer Specific Detail Warning Block - - - Size - RO - 1 Manufacturer Specific Detail Warning - RO - Manufacturer specific

8.2.2.3.4 Initial and Default Values

Table 9 DM Object Attribute Initial and Default Values

Attribute Initial Value Default Value Comment

Device Type VG, CG, MG VG, CG, MG Vacuum Pressure Gauge Single Device = “VG

Vacuum Pressure Combo Gauge Device = “CG”

Vacuum Pressure Multi Gauge Device = “MG”

8.3 Sensor Actuator Controller Object (SAC) — The Sensor Actuator Controller object instance is the device component responsible for coordinating the interaction of the vacuum pressure gauge device with the sensory/actuation environment as specified in SEMI E54.1.8.4 Sensor-AI Object — The Sensor-AI object inherits the attributes, services, and behavior of the Sensor-AI as defined in SEMI E54.1. The Sensor-AI-VPG object instance is the device component responsible for retrieving a reading from a physical pressure sensor, optionally correcting the reading with a manufacturer-specified algorithm, then making the value available over the network and/or to an Analog Actuator Object.8.4.1 Sensor-AI Object Attributes (Class Level)

For Combination and Multigauges the following attributes have to be supported on a class level.

Table 10 Sensor-AI VPG_Class Level Object Attributes


Class Level Status Extension A1 R N Byte

Active Value A2 R Y Context specific

Active Instance Number A3 RO N Byte





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Reserved A4–A64 - - Reserved for future expansion

Manufacturer-Specified >A64 - - Manufacturer-Specific attributes

8.4.1.1 Class Level Status Extension (Optional) — An attribute which identifies whether the complete vacuum pressure gauge with several measuring principles is out of its absolute overrange or absolute underrange or within any other failure condition. That means if the bit “Underrange” is set, all instances of the gauge are in an underrange condition, or if the bit “Overrange” is set, all instances of the gauge are in an overrange condition.

Table 11 Class Level Status Extension Definition for combination and multiple gauges

Status Extension

Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

reserved reserved reserved reserved reserved Underrange (of all

implemented sensors exceeded)

Overrange (of all

implemented sensors exceeded)

Reading Invalid1

1 Logical inversion of Reading Valid

8.4.1.2 Active Value (Optional) — An attribute which is used in conjunction with combination gauges where only one measurement value is valid at a specific time. The measurement value of the measurement principle not in overrange and not in underrange is available by this attribute. 8.4.1.3 Active Instance number (Optional)

This attribute defines which instance of the Sensor-AI Object is currently active and providing its value to the Active Value class attribute.

8.4.2 Sensor-AI Object Attributes (Instance Level)

The following attributes are defined additionally to the Sensor-AI Object definition in E54.1





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Table 12 Sensor-AI VPG Object Attributes


Reading Valid A1 R Yes BOOL

Status Extension A2 R Yes Byte

Sensor Alarm A3 R Yes Array of Bytes

Sensor Warning A4 R Yes Array of Bytes

Safe Value A5 RW No Context specific

Safe State SaiA68 RW No Enumerated Byte / As defined in E54.1, butvalue range is expanded for vacuum pressure gauges

Zeroing Status A6 R No BOOL

Reserved A10–A64 - - Reserved for future expansion

Manufacturer-Specified >A64 - - Manufacturer-Specific attributes

8.4.2.1 Reading Valid (Optional) — An attribute which identifies whether the pressure value is valid or whether the gauge is in an Overrange, Underrange or failure condition.8.4.2.2 Status Extension (Optional) — An attribute which identifies whether the pressure value is in an “Overrange”, “Underrange” or any other “Reading Invalid” condition.

Table 13 Status Extension Definition (for single gauges)

Status Extension

Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

Underrange Exceeded

Overrange Exceeded

Reading Invalid1

1 Logical inversion of Reading Valid

8.4.2.3 Sensor Alarm (Optional) — An attribute which identifies the Sensor Alarm conditions of the device. Because different vacuum pressure sensors could be realized, a different set of Sensor Alarms is provided for different sensor types).





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Table 14 Sensor Alarm Definition

Bit Sensor Alarm [0]

Heat Transfer Vacuum Gauge Diaphragm Gauge Cold Cathode Ion Gauge Hot Cathode Ion Gauge

7 reserved reserved reserved Sensor Filament 8 Alarm







0 Sensor Element Failure Diaphragm failure reserved Sensor Filament 1 Alarm

Bit Sensor Alarm [1]


7 reserved reserved reserved reserved



4 reserved reserved reserved Environment Failure

3 reserved reserved Overpressure High Voltage Off

Overpressure Emission Off

2 Over temperature of electronics Over temperature of electronics

Over temperature of electronics

Over temperature of electronics

1 Electronics Failure Electronics Failure Electronics Failure Electronics Failure


8.4.2.4 Sensor Warning (Optional) — An attribute which identifies the Warning Alarm conditions of the device Because different vacuum pressure sensors could be realized, a different set of Sensor Warnings is provided for different sensor types).8.4.2.5 Sensor Warning Definition





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Table 15 Sensor Warning Definition

Bit Sensor Warning [0]


7 reserved reserved reserved Sensor Filament 8 Warning6 reserved reserved reserved Sensor Filament 7 Warning5 reserved reserved reserved Sensor Filament 6 Warning4 reserved reserved reserved Sensor Filament 5 Warning3 reserved reserved reserved Sensor Filament 4 Warning2 reserved reserved reserved Sensor Filament 3 Warning1 reserved reserved reserved Sensor Filament 2 Warning0 reserved Not at temperature reserved Sensor Filament 1 Warning

Bit Sensor Warning [1]


7 reserved reserved reserved reserved6 reserved reserved reserved reserved5 reserved reserved reserved reserved4 reserved reserved reserved Sensor Warning3 reserved reserved Overpressure High

Voltage OffPressure Too High for Degas

2 Sensor High Temperature Warning

reserved No Ignition Detected Reserved

1 Electronics Warning Electronics Warning Electronics Warning Electronics Warning0 reserved reserved reserved Exceeded Maximum C7E

Ratio

8.4.2.6 Safe Value Definition

If the Safe State is set to “Use Safe Value”, the device will output this value for all states different than Executing.

8.4.2.7 Safe State DefinitionTable 16 Safe State Attribute

The Safe State attribute is defined as in E54.1. Only the value “Use Safe Value” is added here.



Attribute Value DM Object State

0 Zero1 Full-Scale2 Last Valid Value3 Use Safe Value

4-63 Reserved64-255 Open



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Table 17 Safe Value Attribute

8.4.2.8 Zeroing Status (Optional) — An attribute which specifies whether the object is actually zeroing. This attribute is an enumerated byte that can take on one of the following values: 0 = Not Zeroing 1 = Zeroing

8.4.2.9 Sensor-AI Object Services — The services provided by the Sensor-AI object instance are defined in SEMI E54.1. The Sensor-AI object supports the additional services listed below.8.4.2.10 A device may support any of these services, in whole or in part, as specified by the manufacturer. A manufacturer may specify a subset of the service parameter values which is supported. The following table lists the services supported by the Sensor-AI object instance:

Table 18 Sensor-AI-VPG Object Services

Service Service Identifier Type Description

Perform Zero Offset S1 R Used to instruct the object to perform an zeroing operation.

Reserved S2–S64 - Reserved for future expansion.

Manufacturer-Specified >S64 - Manufacturer-Specific services

8.4.2.11 Perform Zero Offset (Optional) — This service is used to instruct the Sensor-AI object instance to perform a one-time automatic zeroing operation on the device. This service causes the automatic zeroing of the Sensor-AI-VPG object instance value attribute by modifying the value of the offset attribute such that attribute value of the Sensor Analog Input instance equals the target value sent with the request. Table 19 describes the parameter specified for this service.

Table 19 Perform Zero Service Parameter Definitions

Parameter Req/Ind Rsp/Cnf Data Type Description

Zero Service Target Value

M - Byte The value to which the Value attribute of the Sensor Analog Input instance will be set.

8.4.3 Sensor-AI Object Behavior — The behavior exhibited by the Sensor-AI-VPG object instance is inherited from the Sensor-AI object defined in SEMI E54.1. Additional specific behavior associated with the Sensor-AI-VPG object is defined below.



Attribute Value DM Object State

0 Zero1 Full-Scale2 Last Valid Value3 Use Safe Value

4-63 Reserved64-255 Open



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8.4.3.1 Sensor-AI-VPG ZEROING Application Process

8.4.3.1.1 The Perform Zero Offset service is used to cause the “Analog Sensor Input” instance to modify its Offset attribute value so that the “Analog Sensor Input ” Instance attribute “Value” is equal the “Zero Service Target Value”. The exact algorithm is manufacturer specific.

8.4.3.1.2 The value “Zero Service Target Value”, used by the “Perform Zero Offset” service, represents the actual pressure value the device should be reporting at the time of the service request.

8.4.3.1.3 The user has to make sure that the gauge is in an appropriate condition at starting the “Perform Zero Offset” service and during the time the service is performed. There are no state transitions defined. During the execution of the service the device keeps in normal Operating condition.

8.4.3.2 Combo Gauges versus Single Gauges versus Multigauges

8.4.3.2.1 The use and the mapping of the attributes Active Instance Number, Value, Active Value, Status Extension and Class Status Extension to the assemblies or the Device Manager Object is compared in the following table.

Class Attribute Single GaugesCombination Gauges

(more than one measuring instance)

Multigauges

Sensor Analog Input

Class Attribute:

Active Instance Number

Not used Represents the actual measuring instance of the Sensor Analog Input ClassMapped to Assemblies

Not used

Instance Attribute: “Value”

Represents the measurement value of the gauge (only one value available)Mapped to Assemblies

Each instance has one pressure attribute “Value” reporting the measurement value of the corresponding measurement principle used in that instance.

Each instance has one pressure attribute “Value” reporting the measurement value of the corresponding measurement principle used in that instance. Mapped to Assemblies

Class Attribute:“Active Value”

Not used Represents the pressure “Value” of the actual measuring instanceMapped to Assemblies

Not used

Instance Attribute:“Status

Extension”

Informs about the underrange or overrange condition of the measurement gaugeMapped to attribute “Exception Detail Warning” of the Device Manager Object (Table 7)

Informs about the underrange or overrange condition of each single measurement instance which is implemented in the device.

Informs about the underrange or overrange condition of each single measurement instance which is implemented in the device

Class Attribute:

Class Level Status

Extension

Not used Identifies whether the complete vacuum pressure gauge respectively each measuring principle is in its overrange or underrange condition (Instance 1…Instance n in underrange or overrange)Mapped to attribute “Exception Detail Warning” of the Device Manager Object (Table 8)

Identifies whether the complete vacuum pressure gauge respectively each measuring principles is in its overrange or underrange condition (Instance 1…Instance n in underrange or overrange)Mapped to attribute “Exception Detail Warning” of the Device Manager Object (Table 8)





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8.4.3.3 Behavior for attributes Data Type of the Sensor Analog Input Object

8.4.3.3.1 Data Type behavior for Assemblies and Object Class specifications

8.4.3.3.1.1 To avoid conflicts between different defined data types (REAL / integer) in assemblies and object class specifications the following behavior is specified:

8.4.3.3.1.2 If a device is configured to work with an assembly with a specified data type, this data type overwrites all data types previously selected by object class specifications.

8.4.3.3.2 Data Type behavior for different Object Instance specification

8.4.3.3.2.1 To avoid conflicts between differently defined data types (REAL / integer) in different Sensor Analog Input Instances the following behavior is specified:

8.4.3.3.2.2 Once the data type is changed in one instance, this data type is valid for all instances and objects of the device.

8.5 Assembly-VPG Object — The Assembly-VPG object inherits attributes, services, and behavior from the Assembly object. The Assembly object instance is the device component which provides a mechanism of grouping more than one attribute from one or more object instances into a single data structure for access over the network.8.5.1 Assembly-VPG Object Attributes

Table 20 Assembly-VPG Object Attributes for Single Gauges

Attribute Name

Attribute Identifier

Access Network

Required Data Index

Source Object ID

Source Attribute ID

Description

Assembly 1 A1 R No 1 SAI 16 Sensor-AI, Value (INT / 2 Byte)

Assembly 2 A2 R Yes1 DM A12 Device Manager Exception Status2 SAI 16 Sensor-AI, Value (INT / 2 Byte)

Assembly 3 Reserved for future specificationAssembly 4 A4 R No 1 SAI 16 Sensor-AI, Value (REAL / 4 Byte)

Assembly 5 A5 R No1 DM A12 Device Manager Exception Status2 SAI 16 Sensor-AI, Value (REAL / 4 Byte)

Assembly 6-7 Reserved for future specification

Assembly 8 A8 R No 1 DM A12 Device Manager Exception Status

Assembly 9 A9 R No1 DM A12 Device Manager Exception Status2 SAI VPG 2 Sensor-AI VPG, Active Value (INT / 2 Byte)

Assembly 10 A10 R No1 DM A12 Device Manager Exception Status2 SAI VPG 3 Sensor-AI, Active Instance3 SAI VPG 2 Sensor-AI, Active Value (INT / 2 Byte)

Assembly 11 Reserved for future specification

Assembly 12 A12 R No2 SAI VPG 3 Sensor-AI, Active Instance3 SAI VPG 2 Sensor-AI, Active Value (REAL / 4 Byte)

Assembly 13 A13 R No1 DM A12 Device Manager Exception Status2 SAI VPG 3 Sensor-AI, Active Instance3 SAI VPG 2 Sensor-AI, Active Value (REAL / 4 Byte)


Assembly 15 A15 R No 1 SAI 16

Sensor-AI, Value (INT / 2 Byte) Instance 1Sensor-AI, Value (INT / 2 Byte) Instance 2Sensor-AI, Value (INT / 2 Byte) Instance 3Sensor-AI, Value (INT / 2 Byte) Instance 4





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Attribute Name

Attribute Identifier

Access Network

Required Data Index

Source Object ID

Source Attribute ID

Description

Assembly 16 A15 R No

1 DM A12 Device Manager Exception Status2

SAI 16

Sensor-AI, Value (INT / 2 Byte) Instance 13 Sensor-AI, Value (INT / 2 Byte) Instance 24 Sensor-AI, Value (INT / 2 Byte) Instance 35 Sensor-AI, Value (INT / 2 Byte) Instance 4


Assembly 18 A15 R No

1

SAI 16

Sensor-AI, Value (REAL/4 Byte) Instance 12 Sensor-AI, Value (REAL/4 Byte) Instance 23 Sensor-AI, Value (REAL/4 Byte) Instance 34 Sensor-AI, Value (REAL/4 Byte) Instance 4

Assembly 19 A15 R No1 DM A12 Device Manager Exception Status2 SAI 16 Sensor-AI, Value (REAL/4 Byte) Instance 13 Sensor-AI, Value (REAL/4 Byte) Instance 24 Sensor-AI, Value (REAL/4 Byte) Instance 35 Sensor-AI, Value (REAL/4 Byte) Instance 4

8.6 Actuator-AO Object — The Actuator-AO object instance defines object attributes, services, and behavior as defined in SEMI E54.1. The Actuator-AO object instance is the component responsible for driving an analog output of the device for generating an analog pressure output reading. If supported, this attribute value of the Actuator AO Object corresponds to the analog output of the device.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standard(s) set forth herein for any particular application. The determination of the suitability of the standard(s) is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature respecting any materials or equipment mentioned herein. These standards are subject to change without notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.





Date: 5/8/2023

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