Standard Stages for Motion Control Applications
Transcript of Standard Stages for Motion Control Applications
Standard Stages for Motion Control Applications
www.nanomotion.com
FB Stage Catalog
Nanomotion designs and manufactures advanced motion systems, sub-systems modules and piezo motor/drive components.
The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets.
These compact stage configurations are provided in both standard atmospheric configurations as well as vacuum versions that can support clean operation to ISO Class 3 cleanliness. The modular design allows for easy mounting of axes, to each other, along with the use of standard angle brackets for Z mounting. All axes utilize precision crossed roller bearings with anti‐migration and optical encoders for precision positioning requirements.
For applications not suitable to standard stage configurations, please feel free to contact Nanomotion’s team of application engineers to learn about our custom stage capabilities.
PRODUCT FEATURES
Precision standard stages for atmosphere and vacuum
Linear stages for with travel up to 200mm travel
Rotary stages for continuous motion
Z‐Wedge stage for pure vertical motion
Goniometric stages for tip/tilt about a common pivot
Customized Solutions
Give OEMs Unlimited
Possibilities.
• 1 •
FBS050/020/050 Linear Stage
Mechanical Design Characteristics
Performance SpecificationsMODEL FBS050020 FBS050050
Travel Range (mm) 20mm 50mm
Encoder Resolution Standard 100nm
Optional 10nm
Bi-directional Repeatability Standard 1µm
Optional 100nm
Absolute Accuracy Standard 5µm 10µm
(Error mapping available) Optional 2.5µm 7µm
Minimum Incremental AC Mode 100nm
Move Convergence UHR Mode 5nm
DC Mode <1nm
Maximum Velocity 200mm/sec 200mm/sec
Straightness & Flatness ±4µm ±4µm
Pitch & Yaw ±40µrad ±40µrad
Load Capacity - Horizontal 1.8kg 1.8kg
Load Capacity - Vertical 0.4kg 0.3kg
Dynamic Stall Force 16N 16N
Motor Stiffness 1.7N/µ 1.7N/µ
Holding Force without Power 14N
MODEL FBS050020 FBS050050
Stage Plate Material Aluminum — Black Anodized
Motor HR4 Piezo, ultrasonic standing wave
Bearing Type Precision crossed rollers with anti-migration device
Encoder Linear optical encoder with gold tape scale
Cable Lengths (m) 3m
MTBF (hours) 30,000
Stage Mass (g) 405g 550g
Carriage Moving Mass (g) 158g 230g
RoSH Compliant
Vacuum Compatible Options High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available
MECHANICAL DRAWINGS FBS0500020 12
.59
TO C
ENTE
RO
F M
ASS
51.40TO CENTEROF MASS
29.
50
1
40
55
50 107
20 40
5 x M4x0.7 - 6H 8
27.6
TO C
ENTE
RO
F M
ASS
20
ENCODER CABLE MOTOR CABLE
46.1
7.5
4
0
40 CABLE HOLDER
GROUND
75
57.50 55 ±10 mm TRAVEL
D
D
4x
4.4
4x 8
4x 4.5 SECTION D-DMOUNTING HOLES
• 2 •
European View Dimensions are Metric
Download Motion Product STEP file at: https://www.nanomotion.com/support-downloads/downloads1/
MECHANICAL DRAWINGS FBS0500050
29.
5
5.4
52.7TO CENTER
OF MASS
12TO
CEN
TER
OF
MA
SS GROUND
107
50
40
40
20
40
OF
MA
SS
5xM4x0.7 8
80
20
MOTOR CABLE
ENCODER CABLE
40
40 46.1
20
CABLE HOLDER
TO C
ENTE
R
130
80 ±25 mm TRAVEL
82.50
B
B
4x
4.4
4x 8
4x 4.5 SECTION B-B
MOUNTING HOLES
• 3 •
European View Dimensions are Metric
Download Motion Product STEP file at: https://www.nanomotion.com/support-downloads/downloads1/
• 4 •
FBS075/040/060/100 Linear Stage
MECHANICAL DESIGN CHARACTERISTICS
PERFORMANCE SPECIFICATIONS
MODEL FBS075040 FBS075060 FBS075100
Travel Range (mm) 40mm 60mm 100mm
Encoder Resolution Standard 100nm
Optional 10nm
Bi-directional Repeatability Standard 1µm
Optional 100nm
Absolute Accuracy Standard 6µm 8µm 10µm
(Error mapping available) Optional 3µm 4µm 5µm
Minimum Incremental AC Mode 100nm
Move Convergence UHR Mode 5nm
DC Mode <1nm
Maximum Velocity 200mm/sec 250mm/sec 250mm/sec
Straightness & Flatness ±4µm ±5µm ±5µm
Pitch & Yaw ±40µrad ±60µrad ±60µrad
Load Capacity - Horizontal 3.0kg 3.0kg 3.0kg
Load Capacity - Vertical 0.8kg 0.65kg 0.65kg
Dynamic Stall Force 32N
Motor Stiffness 3N/µm
Holding Force without Power 28N
MODEL FBS075040 FBS075060 FBS075100
Stage Plate Material Aluminum — Black Anodized
Motor HR8 Piezo, ultrasonic standing wave
Bearing Type Precision crossed rollers with anti-migration device
Encoder Linear optical encoder with gold tape scale
Cable Lengths (m) 3m
MTBF (hours) 30,000
Stage Mass (g) 727g 918g 1062g
Carriage Moving Mass (g) 284g 447g 445g
RoSH Compliant
Vacuum Compatible Options High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available
55
40
39.
9
5xM5x0.8 6
80
40
4xM4x0.7 6
20
MOTOR CABLE
ENCODER CABLE CABLE HOLDER
32
62.8 TO CENTER
OF MASS
16.6
TO
CEN
TER
OF
MA
SS 5
GROUND
0.01
0.01
55
55
120
12.
5
51
10 CABLE HOLDER 120
80 ±20 mm TRAVEL 82.50
A
A
4x
5.8
4x 5.6 SECTION A-A
MOUNTING HOLRS
• 5 •
MECHANICAL DRAWINGS FBS075040
European View Dimensions are Metric
Download Motion Product STEP file at: https://www.nanomotion.com/support-downloads/downloads1/
32
5
49.5TO CENTEROF MASS
14.8
TO
CEN
TER
OF
MA
SS0.01
0.01
105
5
5
120 55
75 55 40 4 x M4x0.7 6
5 x M5x0.8 6
40 55
37.5
52.
4
120
80 ±20 mm TRAVEL 82.50
A
A
4x
5.8
4x 10 4x 5.6
SECTION A-AMOUNTING HOLRS
• 6 •
MECHANICAL DRAWINGS FBS075060
European View Dimensions are Metric
Download Motion Product STEP file at: https://www.nanomotion.com/support-downloads/downloads1/
32
15.3
TO C
ENTE
RO
F M
ASSTO CENTER
OF MASS 5
GROUND
CABLE HOLDER
0.01
0.01
55
40
55
64.9
TO
CEN
TER
OF
MA
SS
4x M4x0.7 65x M5x0.8 6
4x M5x0.8 6 37.5
75
110
40
MOTOR CABLE
55
110
10
130
55 10
120
CABLE HOLDER
230
132.5
130 ±50 mm TRAVEL
B
B
8x
5.8
8x 10 8x 5.6
SECTION B-BMOUNTING HOLES
• 7 •
MECHANICAL DRAWINGS FBS075100
European View Dimensions are Metric
Download Motion Product STEP file at: https://www.nanomotion.com/support-downloads/downloads1/
• 8 •
FBS100100 Linear Stage
Mechanical Design Characteristics
Performance SpecificationsMODEL FBS100100
Travel Range (mm) 100mm
Encoder Resolution Standard 100nm
Optional 10nm
Bi-directional Repeatability Standard 1µm
Optional 100nm
Absolute Accuracy Standard 10µm
(Error mapping available) Optional 7µm
Minimum Incremental AC Mode 100nm
Move Convergence UHR Mode 5nm
DC Mode <1nm
Maximum Velocity 250mm/sec
Straightness & Flatness ±4µmm
Pitch & Yaw ±50µrad
Load Capacity - Horizontal 2.7kg
Load Capacity - Vertical 0.4kg
Dynamic Stall Force 32N
Motor Stiffness 3N/µ
Holding Force without Power 28N
MODEL FBS100100
Stage Plate Material Aluminum — Black Anodized
Motor HR8 Piezo, ultrasonic standing wave
Bearing Type Precision crossed rollers with anti-migration device
Encoder Linear optical encoder with gold tape scale
Cable Lengths (m) 3m
MTBF (hours) 30,000
Stage Mass (g) 1811g
Carriage Moving Mass (g) 710g
RoSH Compliant
Vacuum Compatible Options High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available
120
8
0 5
5
80 55
82.2
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ENTE
RO
F M
ASS
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100
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27.
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17x M5x0.8 - 6H 6
MOTOR CABLE
CABLE HOLDER
18.1
TO C
ENTE
RO
F M
ASS
60.5TO CENTEROF MASS 5
GROUND
0.01
0.01
20
80
20
22.
5
80
164
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10
145
CABLE HOLDER 265
167.5 165 ±50 mm TRAVEL
A
A
8x
5.8
8x 10 8x 5.5
SECTION A-AMOUNTING HOLES
• 9 •
MECHANICAL DRAWINGS FBS100100
European View Dimensions are Metric
Download Motion Product STEP file at: https://www.nanomotion.com/support-downloads/downloads1/
• 10 •
FBS150/150/200 Linear Stage
Mechanical Design Characteristics
Performance SpecificationsMODEL FBS150150 FBS150200
Travel Range (mm) 150mm 200mm
Encoder Resolution Standard 100nm
Optional 10nm
Bi-directional Repeatability Standard 1µm
Optional 100nm
Absolute Accuracy Standard 12µm 15µm
(Error mapping available) Optional 7µm 8µm
Minimum Incremental AC Mode 100nm
Move Convergence UHR Mode 5nm
DC Mode <1nm
Maximum Velocity 200mm/sec 200mm/sec
Straightness & Flatness ±5µm ±5µm
Pitch & Yaw ±50µrad ±50µrad
Load Capacity - Horizontal 1.8kg 1.47kg
Load Capacity - Vertical NA NA
Dynamic Stall Force 30N 30N
Motor Stiffness 3N/µm 3N/µm
Holding Force without Power 28N
MODEL FBS150150 FBS150200
Stage Plate Material Aluminum — Black Anodized
Motor HR8 Piezo, ultrasonic standing wave
Bearing Type Precision crossed rollers with anti-migration device
Encoder Linear optical encoder with gold tape scale
Cable Lengths (m) 3m
MTBF (hours) 30,000
Stage Mass (g) 4399g 5435g
Carriage Moving Mass (g) 1677g 2054g
RoSH Compliant
Vacuum Compatible Options High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available
22.5
TO
C
ENTE
R O
F M
ASS
102.3 TO CENTEROF MASS
50
GROUND 0.01
0.01
12.5 2 x 25
125
27.
5 125
1
50
55 80 125 175
12.
5
8 x 4.20 7
9 x 5 0.50
102.3 TO CENTEROF MASS
MOTOR HOLDER
CABLE HOLDERS
CABLE HOLDERS
203.8 205 ±75 mm TRAVEL
360
A
A
8x
6.1
8x 11 8x 6.6 SECTION A-A
MOUNTING HOLES
• 11 •
MECHANICAL DRAWINGS FBS150150
European View Dimensions are Metric
Download Motion Product STEP file at: https://www.nanomotion.com/support-downloads/downloads1/
9x M5x0.8 6 1
25
127.7TO CENTEROF MASS
150
5x 5 0.50
12.
5 55 80 125 225
27.
5
MOTOR CABLE
CABLE HOLDER
127.7TO CENTEROF MASS
50
27.3
TO C
ENTE
RO
F M
ASS
GROUND
0.01
0.01
50 125 50
125
15
CABLE HOLDER
455
257.5 255 ±100 mm TRAVEL
A
A
8x 11
8x
5.3
8x 6.6 SECTION A-AMOUNTING HOLES
• 12 •
MECHANICAL DRAWINGS FBS150200
European View Dimensions are Metric
Download Motion Product STEP file at: https://www.nanomotion.com/support-downloads/downloads1/
• 13 •
FRS060-360 Rotary Stage
Mechanical Design Characteristics
Performance SpecificationsMODEL FRS060360
Travel Range (mm) n x 360
Encoder Resolution Standard 5 arc sec.
Optional 0.5 arc sec.
Bi-directional Repeatability Standard 50 arc sec.
Optional 5 arc sec.
Accuracy Standard (arc sec.) 10 arc sec.
Optional (arc sec.) 5 arc sec.
Maximum Velocity 8.3 rad/sec
Flatness ±5µm
Load Inertia Capacity 0.0035kg.m2
Load Capacity - Moment 2kg
Dynamic Stall Force 0.96Nm
Stage Stiffness 0.0032 Nm/µrad
Holding Force without Power 0.86Nm
MODEL FRS060-360
Stage Plate Material Aluminum — Black Anodized
Motor 2 x HR2 Piezo, ultrasonic standing wave
Bearing Type Precision crossed roller rotary bearing
Encoder Linear optical encoder with metal ring
Cable Lengths (m) 3m
MTBF (hours) 30,000
Stage Mass (g) 581g
Moving Mass (g) 268g
Moving Inertia 0.102 gr-m2
RoSH Compliant
Vacuum Compatible Options High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available
14.7
TO
CEN
TER
OF
MA
SS
34.
6
0.01
0.01
55
55
95
146.4
3.9
TO C
ENTE
R O
F M
ASS
0.3 TO CENTER OF MASS
27.5
27.
5
A
A
6 x M3 - 6H 6MOUNTING SURFACE
54.50
12 THRU ALL
48
MOTOR CABLEMOTOR CABLE
ENCODER CABLE
MOUNTING HOLES4x 3.5
MO
UNTIN
G H
OLE
S4x
5.5
MO
UNTIN
G H
OLE
S4x
10
SECTION A-A
• 14 •
MECHANICAL DRAWINGS FRS060-360
European View Dimensions are Metric
Download Motion Product STEP file at: https://www.nanomotion.com/support-downloads/downloads1/
• 15 •
FZS0850100 Z Wedge Stage
Mechanical Design Characteristics
Performance SpecificationsMODEL FZS085010
Travel Range (mm) 10mm
Encoder Resolution Standard 10nm
Bi-directional Repeatability Standard 0.1µm
Accuracy Standard 3µm
Minimum Incremental AC Mode 100nm
Move Convergence UHR Mode 5nm
(encoder & control dependant) DC Mode <1nm
Maximum Velocity (vertical) 50mm/sec
Straightness & Flatness ±2µm
Pitch & Yaw ±30µrad
Load Capacity 5kg
Dynamic Stall Force (N) 160N
Motor Stiffness (N/µ) 57N/µm
Holding Force without Power 150N
MODEL FZS085010
Stage Plate Material Aluminum — Black Anodized
Motor HR8 Piezo, ultrasonic standing wave
Bearing Type Precision crossed rollers with anti-migration device
Encoder Linear optical encoder with gold tape scale
Cable Lengths (m) 3m
MTBF (hours) 30,000
Stage Mass (g) 1300g
Carriage Moving Mass (g) 310g
RoSH Compliant
Vacuum Compatible Options High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available
152.5
24.
6
83.9
GROUNDENCODER CABLE
0.01
122
4 X M5x0.8 - 6H 10
4 x 5.50 THRU 10 5.40
MOUNTING HOLES
110
55
55 40
40
58
4 x M4x0.7 - 6H 8
M4x0.7 - 6H 8
128
.8
85
63.
58
79
5 XCABLE MOUNTING
0.01
56.
3 ±5
8
MOTOR CABLE 1.
10
0
128.80 1.3
63.
7 5
3.7
1.3
UPPER POSITION
LOWER POSITION
• 16 •
MECHANICAL DRAWINGS FZS0850100
European View Dimensions are Metric
Download Motion Product STEP file at: https://www.nanomotion.com/support-downloads/downloads1/
• 17 •
FGS100/125/160 Goniometer Stage
Mechanical Design Characteristics
Performance SpecificationsMODEL FGS100125 FGS100160
Travel Range (deg) ±10˚ ±10˚
Encoder Resolution Standard 0.171 arc sec. 0.134 arc sec.
Optional 0.0171 arc sec 0.0134 arc sec
Bi-directional Repeatability Standard 2 arc sec.
Optional 0.2 arc sec.
Minimum Incremental AC Mode 0.165 arc sec. 0.128 arc sec.
Move Convergence UHR Mode 0.0082 arc sec. 0.0064 arc sec.
DC Mode 0.000165 arc sec. 0.000129 arc sec.
Maximum Velocity (deg/sec) 100 deg/sec 85 deg/sec
Load Capacity (kg) 3kg 3kg
Inertial Capacity (kg.m2) 0.0512kg.m2 0.083kg.m2
Dynamic Stall Force 2040Nm 2600Nm
Motor Stiffness 0.045N* m/µrad 0.074N* m/µrad
Holding Force without Power 1836Nm 2340Nm
MODEL FGS100125 FGS100160
Stage Plate Material Aluminum — Black Anodized
Motor HR4 Piezo, ultrasonic standing wave
Bearing Type Precision crossed rollers with anti-migration device
Encoder Linear optical encoder with gold tape scale
Cable Lengths (m) 3m
MTBF (hours) 30,000
Stage Mass (g) 773g 842g
Carriage Moving Mass (g) 461g 423g
RoSH Compliant
Vacuum Compatible Options High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available
18.3
TO C
ENTE
RO
F M
ASS
53.1TO CENTEROF MASS
125
35
GROUND
0.01
0.01
55
55
50.1
TO C
ENTE
RO
F M
ASS
100
6.5
22.
5
80
4 x 3.30 10.10ENCODER CABLE
MOTOR CABLE
55
55
83.4 5
5
22.
5
7.9
A
A
44.
9
4X 4.4(MOUNTING HOLES)
4X 8
(MO
UN
TIN
G H
OLE
S)
4X 4
.5(M
OU
NTI
NG
HO
LES)
SECTION A-A
• 18 •
MECHANICAL DRAWINGS FGS100125European View Dimensions are Metric
44.
9
10° 10°
R125
136
.80
TRAVEL 10 DEG
Download Motion Product STEP file at: https://www.nanomotion.com/support-downloads/downloads1/
• 19 •
MECHANICAL DRAWINGS FGS100160 European View Dimensions are Metric
18.3
TO C
ENTE
RO
F M
ASS
53.1TO CENTEROF MASS
125
35
GROUND
0.01
0.01
55
55
50.1
TO C
ENTE
RO
F M
ASS
100
6.5
22.
5
80
4 x 3.30 10.10ENCODER CABLE
MOTOR CABLE
55
55
83.4 5
5
22.
5
7.9
A
A
44.
9
4X 4.4(MOUNTING HOLES)
4X 8
(MO
UN
TIN
G H
OLE
S)
4X 4
.5(M
OU
NTI
NG
HO
LES)
SECTION A-A
R160
10° 10°
171
.50
TRAVEL 10 DEG
Download Motion Product STEP file at: https://www.nanomotion.com/support-downloads/downloads1/
• 20 •
FB Series Wiring Configuration
Motor Wiring: 9 Pin D-type Female Connector
Encoder Wiring: 15 Pin D-type Male Connector
PIN FUNCTION DESCRIPTION
1 GND System Ground
2 N.C. With AB1A Driver — Phase
3 Motor - Up White Wire — High Voltage Input
4 Motor - Common Black Wire — High Voltage input for AB1A
GND for AB5, AB2, AB4, XCD Controller/Driver
5 Motor-Down Red Wire — High Voltage input
6 Motor Connected Short Pin 6 to Pin 1 — Enables Driver
Safety Input Open on Pin 6 — Disables Driver
7 GND System Ground — Connected to Connector Hood
8 N.C. Not Connected
9 N.C. Not Connected
PIN FUNCTION DESCRIPTION
7,9 5v Power
2,9 0v Power
14 A+ Incremental Signals
6 A- Incremental Signals
13 B+ Incremental Signals
5 B- Incremental Signals
12 Z+/Q- Reference Mark/Index
4 Z-/Q+ Reference Mark/Index
15 Shield Inner Shield
Case Shield Outer Shield
1,3 N.C. Not Connected
10,11 N.C. Not Connected
Product Features
Product Description
Technical SectionFB Series
The FB Series of alignment stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing linear, rotary and vertical motion.
The FB Series of stages provide single and multi-axis motion performance for a wide range of applications in optical alignment, semiconductor, biomedical, and the analytical instrumentation markets. These compact stages are provided in both atmosphere and
vacuum configurations and can support clean room operation to Class 10.
The FB Series is a modular design that allows for easy mounting for multi-axis applications. All FB Series stages are designed with precision optical encoders and precision crossed roller bearings, with the linear axes having an anti-migration device.
• Linear stages for 20mm to
200mm travel.
• Rotary Stage for continues motion
• Z-Wedge stage for 10mm travel
• Nanomotion’s direct drive piezo
motor with zero backlash and
no hysteresis.
• Integrated 100nm (0.1μm)
optical encoder.
• 21 •
Motion AccuracyFB Series
STRAIGHTNESS
A linear axis has six degrees of freedom that can create potential errors in motion. There are 3 degrees of linear errors, considering the linear displacement (travel), Straightness of motion, & Flatness of motion. There are 3 degrees of angular error, which consist of Pitch, Yaw, and Roll.
1. The movement in the direction of translation, which is the actual motion displacement. This accuracy is governed by the precision of the feedback device and the ability of the motor/servo system to control the displacement of motion.
2. Straightness & Flatness are linear errors related to deviations in motion in a vertical plane or left/right plane.
3. Pitch & Yaw are angular errors that result in inclination (pitch) or twisting (yaw) of the moving surface, about the direction of travel.
4. Roll is an angular error that results in the tilting of the moving surface, off to the side, of the direction of motion.
Nanomotion’s FB Linear Series uses precision crossed roller bearings, yielding high stiffness, low friction and minimizing the linear and angular errors. The mounting surfaces for the bearings are precision machined aluminum, designed to reflect the bearing accuracy.
This illustration depicts the various elements that contribute to error. A given axis has linear er-rors, in the form of straightness & flatness and angular errors in the form of pitch, yaw & roll.
• 22 •
Vacuum & Ultra High Vacuum Compatibility & CleanlinessFB Series
Nanomotion’s infrastructure includes:
• Cleaning and baking equipment • Vacuum chambers for testing
• Residual Gas Analysis Equipment • Particle counting
• Cleanroom for assembly and testing
Nanomotion supports all vacuum/UHV applications with well established infrastructure for RGA analysis and performance testing in vacuum. Our cleanroom supports the assembly and testing of ultra-clean stages.
Nanomotion’s motors and stages are available in vacuum and UHV compatible configurations, leveraging extensive research on materials, adhesives, and lubricants, providing high performance motion control. Motion systems
are specifically designed and manufactured to meet the most stringent performance along with vacuum compatibility and cleanliness.
Nanomotion Motors & Stages are available in: -V version for high vacuum (10-7 Torr) -U version for Ultra High Vacuum (10-10 Torr)
Linear, rotary, tilt, and Z-wedge stages are configure specifically for vacuum / UHV
environments, assembled and tested in a cleanroom, then packaged in dry air or nitrogen. Single and multi-axis assemblies are available to meet the most demanding motion requirements.
• 23 •
Move and Settle Motion Profiles & BrakingFB SeriesThe ability to step and settle to a stable position is essential to many motion applications. Nanomotion’s piezo stages have:
• zero backlash • zero hysteresis • no internal motor inertia • faster response than traditional
motor technology
The ability to accelerate an axis with Nanomotion’s piezo motor technology is greatly enhanced as the inertia only comes from the moving load. Aside from an ultrasonic standing wave, there are no moving parts internal to the motor. The ability to stop (brake) and hold position with stability is also enhanced by the inherent friction of the ceramic tip working on a ceramic drive surface. These characteristics allow for optimum move and settle, along with the ultimate in position stability.
The ability to make more than 20 moves in 1 second, averaging 50msec, for move and settle, is demonstrated over 25 million cycles.
The motion profile below reflects the position and velocity profile, reaching position stability
at the end of the move command, settling to +/- 1 encoder count. The drift (position stability) is measured at <5nm per minute.
The motion profile reflects the position and velocity profile, reaching position stability at the end of the move command, settling to +/- 1 encoder count. The drift (position stability) is measured at <5nm per minute.
• 24 •
Position Repeatability and Accuracy In The Direction of MotionFB Series
The graph above represents a test, simulating 5 years of operation service, moving 90°, 180°, 270°, 360° and back to home.
Accuracy in our normal servo mode (AC) is to 1µRad
Accuracy in our high resolution mode (DC) is to 0.1µRad
Position repeatability is to +/- 1 µRad
• 25 •
Position Repeatability and Accuracy In The Direction of MotionFB SeriesThere are many design and component factors that impact the ability to achieve position repeatability and accuracy.
All Nanomotion motion systems are closed loop with a position sensor. The position sensors vary in the available resolution and the absolute accuracy. In addition to the position sensors, design considerations that impact the systems stiffness, materials (thermal expansion) and bearing selection are all key factors in determining the precision of motion.
Nanomotion has extensive experience is system configurations ranging from 0.5nm resolution to 1µm resolution. Ultimately the position resolution will be a key factor in determining the position repeatability, as most systems will be repeatable to < 5 encoder counts. Actual errors in the position sensor can be factored out based on measurements with a laser interferometer or auto collimator, yielding standard accuracy in the sub-micron level and achievable accuracy in nanometer level.
Nanomotion utilizes metrology tools such as laser interferometry and auto collimators to validate all aspects of motion performance.
The long travel stage to the right and the graph below reflect an absolute position accuracy of 12 microns over 306mm. The position repeatability is 2 microns with a 0.1µm resolution encoder.
Increasing the encoder resolution can improve position repeatability.
Laser error mapping can improve position accuracy by adding correction points.
• 26 •
Application Data Sheet
Please use this as a guideline to the stage selection process
Name: ____________________________________________________________________________________
Company: __________________________________________________________________________________
Phone: ______________________________________ Email: ____________________________________ Application Description Describe the application in text ____________________________________________________________________________________________________ ____________________________________________________________________________________________________ ____________________________________________________________________________________________________
Operating Environment Min/Max Operating Temperature ____________________________________________________________________ – [C/F] Min/Max Storage Temperature __________________________________ –______________________________ [C/F] Pressure/Vacuum________________________________________________________________________________ [Torr] Magnetic: n Yes n No Cleanliness Class: ____________________________________________________________________________________ Other Environmental Considerations: ___________________________________________________________________ ____________________________________________________________________________________________________ ____________________________________________________________________________________________________ ____________________________________________________________________________________________________
Multi Axis Configurations Choose configuration and define which axis is top of each other. X ______________________________________________ R ______________________________________________ XR ______________________________________________ XY ______________________________________________ XZ ______________________________________________ Example: Z mounted onto X with ZR ______________________________________________ XYZ ______________________________________________ XYR ______________________________________________ XYZ ______________________________________________ XYZR ____________________________________________ R1R2 ____________________________________________ Other ____________________________________________ Number of Interpolated axes ________________________
Sketch If Required To Explain
• 27 •
Application Data Sheet
Please use this as a guideline to the stage selection process
Positioning Requirements
Repeatable The error returning to the same position __________________________________________________________ [nm/µ]
Absolute Accuracy The error from position zero to a target point. __________________________________________________ [µm]
Typical Step Size _________________________________________________________________________ [nm/µm/mm]
Smallest Incremental Step ____________________________________________________________________ [nm/µm]
Encoder Resolution Nanomotion to define encoder resolution. ________________________________________________ [nm/µm] Motion Requirements– Maximum Travel per axis:
X ______________________ Y ____________________ Z ______________________ [mm]
R1 ____________________ R2 ________________ [Degrees or Continuous] Define: Constant Velocity (speed uniformity at what velocity and over what distance)
____________________________________________________________________________________________________
Move and Settle (move distance and time)
____________________________________________________________________________________________________ Load Requirements Payload Mass____________________________________________________________________________________ [Kg] Thrust Force ______________________________________________________________________________________ [N] Payload directly mounted to the stage surface n Yes n No Distance from the stage surface to the CoG of the payload __________________________________________ [mm]
Please sketch on Axes Configuration chart for multi-axes configuration Rotary Application, define moment of inertia ______________________________________________________ [kg.m2] Electrical Main Power:n 12Vn 24V n 48V n Battery ____________________ n Other ______________________________ Controller Nanomotion: ________________________________________________________________________________________ Other Brand: ________________________________________________________________________________________ Controller Interface– Define specific requirements in communication protocol, packaging or interfacing with other devices: ____________________________________________________________________________________________________ ____________________________________________________________________________________________________
Motor Amplifier– Nanomotion to determine driver: ________________________________________________________
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How To Order
FB S 050 020 -100 04 FBS050020-10004
FB = Linear FG = Goniometer
FZ = Z Wedge
S = Standard V = Vacuum
100 = 100nm Encoder 010 = 10nm Encoder
04 = HR4 Motor 08 = HR8 Motor
050 = 50mm Wide 075 = 75mm Wide
100 = 100mm Wide 150 = 150mm Wide
020 = 20mm Travel 040 = 40mm Travel 050 = 50mm Travel 060 = 60mm Travel 100 = 100mm Travel 150 = 150mm Travel 200 = 200mm Travel
FR S 060 360 -500 04 FRS060360-50004
FR = Rotary
S = Standard V = Vacuum
500 = 5.0 arc sec Encoder 050 = 0.5 arc sec Encoder
04 = (2) HR2 Motors
100 = 100nm Encoder
04 = HR4 Motor
060 = 60mm Dia Mounting 360 = 360˚ Travel
FG S 100 125 100 04 FGS100125-10004
FG = Goniometer
125 = Pivot Radius 160 = Pivot Radius
S = Standard V = Vacuum
100 = 100mm Long Top
FZ S 085 010 -010 08 FZS085010-01008
FZ = Z Wedge
S = Standard V = Vacuum
010 = 10nm Encoder
08 = HR8 Motor
085 = 85mm Wide 010 = 10mm Travel
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Nanomotion Ltd. Worldwide Headquarters
Mordot HaCarmel Industrial Park
Yokneam 20692 Israel
t: +972 73 2498000
f: +972 73 2498099
Nanomotion Inc. U.S. Headquarters
1 Comac Loop, Suite 14B2
Ronkonkoma, New York 11779
t: (800) 821-6266
t: (631) 585-3000
f: (631) 585-1947
www.nanomotion.com
©Copyright 2020 Nanomotion Inc. All rights reserved. Specifications are subject to change without notice. All trademarked names are the property of their respective owners.