Silicon Capacitive MEMS Pressure Sensors

Outline

A Few Words about ES Systems

MEMS Pressure Sensor Technology

Comparison

Application Examples

Outline

A Few Words about ES Systems

MEMS Pressure Sensor Technology

Comparison

Application Examples

Company

• Established: 2013, spin off from Theon Sensors,

based in Athens, Greece

• Main products: Pressure sensors, Gas flow sensors,

IoT system solutions

• Number of Employees: 15

ES SYSTEMS has designed & developed its own silicon capacitive fabrication process.

ES SYSTEMS is within 5 companies worldwide that use silicon capacitive pressure sensor technology!

• Strategic Partnerships: ESA, Corallia, Greek Space Cluster, Greek Microelectronics Cluster

• ESA R&D Call Partnerships: Thales Alenia Space, Airbus D&S, OHB

Design Capabilities

✓ Full custom design and simulation of MEMS sensors based on modern processes (In -house)

▪ Pressure Sensors (ESS is the owner and exclusive user of the process)

▪ Flow Sensors (Open Process)

ASIC

MEMS

SYSTEM

Pressure Sensor Die

Flow Sensor Die

✓ Full custom design and simulation of CMOS analog, digital and mixed signal conditioning ASIC’s based on modern submicron processes (In -house)

➢ 2nd Generation of ASIC’s (0.18um CMOS)

✓ Proven radiation hardened CMOS ASIC design

Capacitive Interface

Resistive Interface

✓ Design, Modeling and Simulation of Sensor Packages

✓ Design, Modeling and Simulation of Mechanical Parts

✓ Vibration / Shock Analysis; Stress Analysis; Thermal Analysis

Packages

Housings

Analysis

Products

Pressure Sensors

Gas Flow Sensors IoT System Solutions

Medical Flow Sensor Industrial Flow Transmitter

Absolute Gauge/Differential Medium Isolated Sensor

Medium Isolated Transmitter

Medium Isolated Transmitter - Aerospace

Environmental Sensing Board

Equipment Condition Monitoring System

Infrastructure

ES Systems possesses all the necessary testing infrastructure to fully characterize its MEMS sensors or packaged sensors

Die Bonder

Wire Bonder

Probe Station

Vibration Shaker

Pressure Controller LP

Pressure Controller HP

Rate Table Climatic Chambers

Impedance Analyzer Signal Analyzer

Cleanroom Facilities Laboratory and Small Scale Production Facilities

Flow Controllers

Outline

A Few Words about ES Systems

MEMS Pressure Sensor Technology

Comparison

Application Examples

Types of Pressure Sensors

Absolute Gauge

SealedDifferential

Piezoresistive Technology Principle of Operation

MEMS Capacitive Technology Principle of Operation

Silicon Capacitive Sensor

Pros & Cons of MEMS Capacitive Pressure Sensors

Pros Cons

Proof Pressure Calibration Algorithms

Burst Pressure Cost of Production

Temperature Performance

Power Consumption

Performance

Long Term stability

CCM

CR1 CS2 CR2CS1

Outline

A Few Words about ES Systems

MEMS Pressure Sensor Technology

Comparison

Application Examples

Differential Pressure Flow Meter for Filter Monitoring

Wafer Level Encapsulation

Normal Operation Clogged Operation

Application Advantages:• Minimum in-line Pressure Drop Requirement• Great Over Pressure Tolerance

Production Equipment -Automated Pumps & Valves

Wafer Level Encapsulation

Application Advantages:• Increased Safety

Powerless Pressure Monitoring System

Integrated Sensor

LC Circuit

RFID

Application Advantages:• No Biasing Required• Solution Impossible without Capacitive

Pressure Sensor

Wireless Level Monitoring at Closed Tanks

Wafer Level Encapsulation

Sensor1

Sensor2

Sensor3

Sensor5

SensorN

Create Sensor Pairs

Create Sensor Network

Send Data to Cloud

Sensor4

Sensor6 SensorN+1

*Data Processing can befused with data gatheredfrom environmental sensors

Application Advantages:• Great Over Pressure Tolerance• Great Long Term Performance• Wireless

Wireless Monitoring of Pressure at Gas Cylinders

Wafer Level EncapsulationSensor1

Sensor2

Sensor5

SensorN

Create Sensor Network

Send Data to Cloud

Sensor4

Sensor6SensorN+1

Sensor3

Questions & Discussion

Thank you!Visit us @ Stand 1-349