Service Checklist & Customer Maintenance List 301.91.0005-HC301, FEB.2013

M:\Customer Service\servicecontracts\Delphi\Delphi Iasi\HC301\Training and maintenance program 2012\Service checklist 301.91.0005-HC301, FEB.2013.doc

Printed: 15 Feb 2013

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Date 1-2-2013

Revision 0 Signed LJH

SERVICE CHECKLIST

Customer Delphi Iasi

Machine nr. HC301

Machine type HTC-1200/4-Spu/1PS

SAT date 26-05-2011

Service level platinum-extra

Service nr. 301.91/0005 February 2013

Name Hauzer engineer Laurens Juhász

Date of visit 4-2-2013 till 15-2-2013



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Date 1-2-2013


SYS Cathode Type Cathode SPU/ACA

Magnet conf. NSN/SNS

TRG Mat. P.S. Power Supply Pulsed/DC

1 SpuUc S-N-S Cr DC 2 SpuUc N-S-N WC Pulsed DC 3 SpuUc S-N-S Cr DC 4 SpuUc N-S-N WC Pulsed DC

SYS – SYSTEM

APS – AIR PRESSURE SYSTEM

APS ok nok

X Check / Drain condensate service unit. V

x Check filter service unit. V

X Check switch point service unit. V

X Check connections, hosts. V

X Check for leakage V

X Check for water in the CWS - air pressure system. V

Remarks:

BL – CONTROL CABINET BL ok nok

X Check if cabinet is clean. V

X Check electrical connections. V

X Check cabinet lightning. V

X Check fan’s. V

X Check roof cooler, (set at 25ºC). V

X Check voltage monitor. V

X Check supply voltages. V

X Check if relays correct fit in relays sockets. V

X Check if all components are tightened correctly. V

X Check temperature in control cabinet. V

X Check door switches. V

PLC Do not reset PLC, call Hauzer (S-Eng or JVR) first.

X Check if PLC modules are securely engaged V

X Check ‘run’ led on CPU, and +5 and +24V led’s on PS407. V

X Check ‘’error’’ led and error message (if apply to), in case of any fault call HTC V

X Check USB connections. V

X Check modem V



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PC ok nok

X Check modem. V

X PC maintenance (Citect) V

X Check printer V

X Check keyboard and mouse V

X Check cabinet temperature. V

X Check reading and writing of drives V

X Check monitor V

X Check if cabinet is clean. *1) V

X Check EM-stops and reset button. V

X Check USB ports. V

X Check alarm lights. V Information: - Do not reset PLC, call Hauzer (S-Eng or JVR) first. - External UPS system (UPS power supplied by customer to Hauzer machine). - Hauzer paging system: no actions. - No door filters.

Remarks: *1) The PC cabinet was very dirty (full of dust). Advised customer to clean the PC-cabinet more frequently.

BPS – BIAS POWER SUPPLY

BPS ok nok

X Check voltage, current AV/set points in computer and on machine. V

X Check electrical connections V

X Check fan’s. V

X Check arc-handling. V

X Check pulse unit. V

Bias-diode module.

X Check Bias-diode module (R-C-D circuit) at output BPS. V

X Check function UNI-BI-polar relays. V

Information: - 1x Bias 4018

Remarks:



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BV – CATHODES BV: ok nok

X Check cathodes. V

X Check magnet plate. V

X Check water connections, hoses (leakage, tightened etc.) V

X Check cover switches. V

X Action Customer: Check during target replacement: isolation flange, gas-pipe, gas-pipe holes, gas-pipe O-rings, dust , dirt.

V

X Explain [Action Customer: Check during target replacement: isolation flange, gas-pipe, gas-pipe holes, gas-pipe O-rings, dust , dirt.] to customer.

V

Cathode Coils V

X Check coil power supplies sv/ av on computer and on machine. V

X Check cathode coils. V

X Check water connections, hoses (leakage, tightened etc.) V

PLS

X

Check sv and av on machine and computer PI source : voltage, current (DC) PI support: power, voltage, current (AC) PI filament: resistance

V

X Check both filaments V

X Check cover switch V

X Check ignition circuit, V

X Check ignition feed through. V

X Check PLS-anode: isolation (megger 1000V), surface, damage, A/O coating. V

X Check ignition wire (robe). V

X Check anode-feed through. V

X Check for water leakage (plasma source and anode) V

X Check anode voltage machine ⇔ PC. V

X Check bottom-shield (floating), pump shield (floating) and top-shield (non floating). V

X Check PLS chambers, cleaning is customer expected. V

Serial switch.

Check serial switch (ARM-20/15C) V

Information:

- 1x ARM-20/15C

Remarks:



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CAB - CABLING CAB ok nok

X Check cables V


Remarks:

CPS – CATHODE POWER SUPPLY CPS ok nok

X Check voltage, current, power AV/set points in computer and on machine. V


X Check fan’s. V

X Check arc-handling. V

X Check pulse unit V Information: - 2 x DC3016; 1xDC4016 1 x PMP16 - 4 x Kniel. 140V-10A.

Remarks:



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CWS – COOL WATER SYSTEM

General (for all circuits). ok nok

X Change main water filter. V

X Check city water valve. V

X Check for water leaks. V

X Check for calcification. V

X Check water hoses and connections. V

X Check and note water temperatures, pressures and flows. V

X Check settings pressure-, temperature- and flow switches. V

X Check heat exchangers. V

X Check water pumps. V

X Check manual ball valves. V

X Check pressure relief valves. V

X Check manometers. V

X Check temperature meters. V

X Check temperature switches. V

X Check bronze water filters. *1) V

X Check flow meters. V

X Change air-vents. *2) V

X Check pneumatic ball valves. V

X Check expansion vessels. V

X Check pressure switches. V

X Check refill valves. V

X Check refill one way valves. V

X Check refilling of the systems. V

X Check regulation of temperature controlled water circuits. V

X Check if electrical and pneumatic connectors/ cables/ hoses are installed correct. V

X Check water heaters. V

X Check function of emergency drain system. V

X Check goggle(s). V

Remarks: *1) The bronze filter of the door/recipient had a lot of metal pieces inside after cleaning filter is okay. (this is the first maintenance on this machine so it is possible that some dirt of the production of the machine was inside) *2) Five air-vents are replaced by new ones. During the next visit all air-vents will be replaced by new ones.

FRM – FRAME

FRM ok nok

X Check frame covers. V

X General check V

Remarks:



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GFW – GAS FLOW

GFW Ok nok

X Check gas-frame holes. V

X Gas-pipe vacuum feed through: check/clean/ change O-rings. V

X Action Customer: Check during target replacement: isolation flange, gas-pipe, gas-pipe holes, gas-pipe O-rings, dust , dirt.

V

X Explain [Action Customer: Check during target replacement: isolation flange, gas-pipe, gas-pipe holes, gas-pipe O-rings, dust , dirt.] to customer.

V

X Check if flexible hoses are damaged. V

X Cath. Gas valves; check/clean, change O-rings. ( zie information). V

X MFC’s check: leaking, regulating, offset, computer offset, SV and AV. V

X All MFC’s must be send to the supplier (every year) by the customer, for calibration. V

X Check nupro’s (leaking, open/closing) V

X Main-venting valve: Check/clean, change O-rings. V

X Fine-venting valve 1: check/clean, change O-rings. V

X Fine-venting valve 2: check/clean, change O-rings. V

X Gas ballast MFC: check function, leaking, regulating, offset, computer offset, SV and AV.

V

Check gas ballast N2 supply filter. V

Remarks:



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GRS – RECTIFIER SYSTEM

GRS ok nok

X Check/Clean cabinet V

X Check electrical connections V

X Check cabinet lightning. V

X Check fan’s. V

X Check relays in relays socket V

X Check if all components are tightened correctly V

X Check door switches. V

X Check roof coolers, 25ºC. V

Remarks:

HC – HAUZER COATER

HC ok nok

X Check/change lip seals. V

X Check shielding. V

X Check vacuum chamber V

X Check cover switches. V

X Check door switch door 1+2 V

X Check if bolds of door-hinges are tightened. V

X Check position from table rail to shaft V

X Check horizontal position substrate table, rails and end-stops. V

X Check doorstop door 1 and 2 V

X Check door-locks. V

Cool plates.

X Check cool plates. V

X Check radiation shield. Damages, if installed correct, clean. V

Remarks:



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HCR - HEATERS

HCR ok nok

Check if HTR nut is tightened. V

X Visually check Heaters. V

X Check heating of each heater (heater cleaning). V

X Check heater-plates. V

X Check (2) stationary thermocouples (values, visual). V

Thyristor.

X Check regulating of thyristor. V

Remarks:

HCS – SHUTTERS

HCS: ok nok

X Check if shutters open and close correct. V

X Check if shutters move correct V

X Check feedback signals V

X Check pneumatics valves V

X Check coupling between actuator and rotary feed through V

X Check shutter stops. V

X Check view port shutters. V

X Check view port protection glasses *1) V

Remarks *1) Advised customer to have protection glasses on store.



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SUB – SUBSTRATE DRIVE SYSTEM SUB ok nok

X Check margin between coupling and pitchfork (3 mm) V

X Check coupling mechanism (feed through, etc.). V

X Check Bellow: leakage, damage etc. V

X Check substrate motor. V

X Check oil gearbox V

X Change oil gearbox (change oil in February 2014) *1) V

X Check torque limiter. V

X Check gear wheel. V

X Check gear belt V

X Check rotation sensor V

X Check pulley Ferrofludics V

X Leak check Ferrofludics (substrate vacuum feed through) V

X Check (2) rotating-thermocouples (values, visual). V

X Check TC feed through. V

X Check slip-ring. V

X Check manual rotation V

X Check isolation substrate shaft to recipient (megger 1000V) V Information:

- Torque limiter: Mayr type 3; setting: 150Nm. After every activation the limiter has to be ‘’resetted’’ again by a lever.

Remarks: *1) Change gearbox oil in February 2014.



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VFS – VACUUM FLOW SYSTEM

VFS. ok nok

X Check roots pump: oil-level, -colour *2) *3) V

X Check roughing pump: oil-level, -colour. *1) *3) *4) V

X Check dust filter: oil level oil etc. V

X Check oil mist filter. *3) V

X Check Turbo’s: oil-level, -colour, sound. *3) V

X Check turbo venting valve. V

X Check Barksdale switch points, 900 mBar + 800 mBar. V

X Check MKS vacuum switch (2x) switch point: 1mBar V

X Leak check total machine. V

X Check vacuum end pressure V

X Make leak rate V

X Check vacuum seals V

X HVV‘s: Check/clean, change O-rings. V

X Roughing valve: Check/clean, change O-rings. V

X Backing valve: Check/clean, change O-rings. V

X Manual valve: Check/ clean, change O-rings. V

X Penning / Pirani sealing valve: Check/ clean, change O-rings. V

X Baratron sealing valve: Check/ clean, change O-rings. V

X Roughing line venting valve: Check/ clean, change O-rings. V

X Check/adjust Pirani’s. A1,2,3 (Roughing line Pirani) V

X Check/clean penning and change ignition aid if necessary. V

X Check Baratron: measurement, offset, zeroing *4) V

X Check/clean pressure relief valve. V

X Check turbo flushing pressure + reducing valve. V

X Check turbo flushing sealing gas valves. V

X Turbo flushing valve: Check/clean, change O-rings. V

X Check Bellows. V Information:

- 3 x Pfeiffer Hipace 2300 U turbo pumps. - Gas ballast valve is part of pump group.

Remarks: *1) The roughing pump (DUO255) is in poor condition an overhaul to the Pfeiffer work shop is necessary. Advised the customer to do an overhaul of the roughing pump and have a spare roughing pump in store at the Delphi Iasi plant. Having a spare Roughing pump saves production down time. It is advisable to change the oil and dust filters of the Roughing pump every 3 months. (See also remarks in the Pfeiffer document attached to this HTC document.) *2) The Roots pump (Octa 1000) is filled at the engine side with P3 oil and at gearing side with D1 (note: D1 = Androl555 oil). *3) Showed the customer how to refill oil and do maintenance on the Roughing- Roots- and Turbo pump. *4) (on going issue of the deviation of the Baratron) Replaced the temporary MKS627 Baratron by a new Baratron MKS120A. For one week the Baratron MKS120A values remains reliable but then after one week they are not any more. The problem with the Baratron can be related to vibrations generated by the Roughing pump. (Note: the software need to be changed when you replace a Baratron MKS120A to MKS627 please Contact HTC when you want to do this!) Further action on the Baratron issue will be done by HTC.



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PRC – PROCESS

PRC ok nok

X After every service visit run process V

Remarks: (on going issue) Customer has still hardness problems (not every batch is within the limits). Customer did a test with a bottle of acetylene gas connected close to the machine. The result of this test was that the harness was within the limits.

PCR – PRODUCTCARRIER.

PCR Ok nok

Check PCR-recipient catch: lock, unlock, handle. V

Check table-rail: horizontal, water leveled. V

Check table-blocking mechanism on PCR table-rail. V

Check table-stop on rail. V

Check hydraulic system: up/ down movement, rollers, oil-(level), high-pressure hose. V

Check table weight – supports: magnets, adjustment, and safety pin. V

Check if PCR rolls correct. V

Check breaks. V

General check. V

Information: - No maintenance only a general check.

Remarks:

SAT – SATELITE TABLES

SAT ok nok

X General check V Information:

- No maintenance only a general check.

Remarks:

UTI - UTILITIES

UTI ok nok

X The utilities should be according Hauzer specification and are to customer’s responsibility. See utility list.

V

Information: - 3 x 400VAC ± 10%, +PE, 50Hz.

Remarks:



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SYSTEM DESCRIPTION

Instr. list

Actual 7-Feb-2013

APS Air pressure Bar 5.5 -6.5 6,2

CWS C/W

P feed vacuum chamber (cold water) [235] Bar 1.2-9 5,1

P return vacuum chamber (cold water) [232] Bar 1.2-9 1,2 T feed (cold water) [341] ºC 13-20 15,7 T feed (warm water) [341] ºC 15-60 16,4 Flow Plasma source [124] L /min >5 9,5 Flow recipient, Door 1 and 2 [123] L /min >32 92,8 Flow Cathode 1 [151] L /min >25 34,8 Flow Cathode 2 [152] L /min >25 34,8 Flow Cathode 3 [153] L /min >25 33,3

Flow Cathode 4 [154] L /min >25 36,3

Flow cool plate [155] L /min >25 42,4

Cold P feed [231] Bar 4,5-6 5,1

P return [233] Bar 1,5-2 1,9

T feed [340] ºC 13-20 15,7

T return c [342] ºC 13-20 17

Flow electrical cabinets. [121] L /min >15 25,9

Flow turbo pumps, subs. Feethr. coils [150] L/min >1,5 4,4

UTI T Chiller ºC 12- 15 15

P city water [234] Bar 3 - 5 4

VFS Pressure penning (after 1 night pumping). m Bar <5E-6 2,34E-6

Leak Rate (after 1 night pumping) mB.ltr/sec.

<5E-4 3,48E-5



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HC301 301.91.05 FEB 2013

PREVENTIVE MAINTENANCE SPARE PART LIST

Customer list Amount

on machine

Amount for Periodical maintenance

Amount used during visit

SYS HTC.nr. Description Type/ specification

Dimensions main component Remarks

BL

1 PLC-Battery. PLC S7-300 serie S7-300 no battery installed. 0 0 0

CWS

1 33623 filter cartridge city water filter, AFL 10 P 3/4''PV

AMA filter 1 1 1

2 35330 Caleffi De-aerator Aquastop is removed. Open the plug

9 9 5

GFW

1 34877 VAT DN16 Gate-seal Cath.gas vlv's 4 4 4

2 34878 VAT DN16 Bonnet-seal Cath.gas vlv's 4 4 4

3 34879 VAT DN1 6 Seal-set Cath.gas vlv's 4 0 0

4 34877 VAT DN16 Gate-seal Fine vent. gas vlv 2 1 1

5 34878 VAT DN16 Bonnet-seal Fine vent. gas vlv 2 1 1

6 34879 VAT DN1 6 Seal-set Fine vent. gas vlv 2 0 0

7 34877 VAT DN16 Gate-seal Main vent. gas vlv 1 1 1

8 34878 VAT DN16 Bonnet-seal Main vent. gas vlv 1 1 1

9 34879 VAT DN1 6 Seal-set Main vent. gas vlv 1 0 0

10 6172 Gasfeedthrough O-ring Cath.(4) gasfeedthro 8 0 0

SUB

1 33661 oil gear-box substrate motor (change oil FEB 2014) gear box Motor: S67 DT71

D4 2 2 0



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HC301 301.91.05

FEB 2013 PREVENTIVE MAINTENANCE SPARE PART LIST

Customer list

Amount on

machine

Amount for Periodical

maintenance

Amount used

during visit

FVS HTC.nr. Description Type/ specification Dimensions main component Remarks

1 3387 VAT 250 Gate seal serie 12.1 High vacuum valve 1+2 3 3 3

2 30909 VAT 250 bonnet seal serie 12.1 High vacuum valve 1+2 3 3 3

3 26451 VAT 250 seal-set serie 12.1 High vacuum valve 1+2 1 0 0

4 35848 VAT DN160 Gate seal Roughing valve 1 1 1

5 35849 VAT DN160 Bonnet seal Roughing valve 1 1 1

6 35850 VAT DN160 seal-set Roughing valve 1 0 0

7 34877 VAT DN 16 Gate-seal Roughing line vent valve 1 1 1

8 34878 VAT DN16 Bonnet-seal Roughing line vent valve 1 1 1

9 34879 VAT DN16 Seal-set Roughing line vent valve 1 0 0

10 30906 VAT 160 Gate seal Backing valve 1 1 1

11 30907 VAT 160 Bonnet Backing valve 1 1 1

12 26450 VAT 160 seal-set Backing valve 1 0 0

13 36726 VAT DN40 Gate seal Manual leaktest valve 1 1 0

14 36725 VAT DN40 Bonnet seal Manual leaktest valve 1 1 0

15 36724 VAT DN40 seal-set Manual leaktest valve 1 0 1

16 34898 VAT DN25 Gate seal penn/pir seal vlv 1 1 1

17 34897 VAT DN25 Bonnet penn/pir seal vlv 1 1 1

18 35484 VAT DN25 seal-set penn/pir seal vlv 1 0 0

19 34877 VAT DN16 Gate seal Baratron seal vlv. 1 1 1

20 34878 VAT DN16 Bonnet seal Baratron seal vlv. 1 1 1

21 34879 VAT DN16 seal-set Baratron seal vlv. 1 0 0

22 11406 AVA 016X pressure relief valve press. relief valve 1 1 1



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HC301 301.91.05

FEB 2013 PREVENTIVE MAINTENANCE SPARE PART LIST

Customer list Amount

on machine

Amount for Periodical

maintenance

Amount used during visit

VFS HTC.nr. Description Type/ specification Dimensions main component Remarks 23 14908 Set of penning ignition aids Penning 1 1 1 24 36592 Air filter replacement silencer Silencer HVM 91485 pos.2 Main+Rough.vent.filter, 2 0 0

26 36720 VAT vacuum grease For 5 - 6 x HVV's VAT 12.1 extensive maint. 1 0 1

Used parts from customer Amount

1

2

3 4 5

Used parts but parts are not listed on spare part list (e.g. from extra sn'r).

1 35529 Solenoid + diode for HVV High vacuum valve 1+2 Old one was broken 1 2 3 4 5

Part left at customer but not used during visit.

1 35527 cws pressure relieve valve 8bar CWS 2 2 26451 VAT250 seal set serie 12.1 High vacuum valve 1+2 2 3 4 5



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Service nr.: 301.91/0005 Time sheet Engineer HC: 301 Name / address customer: DELPHI Diesel Systems IASI Romania

Name Engineer Date Hours Travel hours

L. Juhász 3-Feb-2013 9 L. Juhász 4-Feb-2013 10 L. Juhász 5-Feb-2013 11 L. Juhász 6-Feb-2013 9 L. Juhász 7-Feb-2013 10 L. Juhász 8-Feb-2013 10 L. Juhász 11-Feb-2013 10 L. Juhász 12-Feb-2013 12 L. Juhász 13-Feb-2013 8,5 L. Juhász 14-Feb-2013 9,5

L. Juhász 15-Feb-2013 10 L. Juhász 17-Feb-2013 9



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Service number: 301.91/0005 Date:

15-Feb- 2013

Coating unit: HC301 Name / adress customer:

Delphi Diesel Systems Iasi 707307 MICROSLAVA IASI DISTRICT Romania

Name customer representative:

Name Hauzer Engineer:

Laurens Juhász

Signature customer representative:

By signing this document, the customer declares that all the parts mentioned in the column [Amount used during visit] have been used during the maintenance visit. These parts will be charged to the customer The customer declares to have noted all remarks. Where indicated, it will be the customer’s responsibility to take necessary action(s).

Signature Hauzer Engineer:

Service Checklist & Customer Maintenance List 301.91.0005-HC301, FEB.2013

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Transcript of Service Checklist & Customer Maintenance List 301.91.0005-HC301, FEB.2013