Sergey Sukhoveyev- Ultra high aspect-ratio MEMS and NEMS on basis of fibrous composite technology

8/3/2019 Sergey Sukhoveyev- Ultra high aspect-ratio MEMS and NEMS on basis of fibrous composite technology

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T E C H N I C A L P A P E R

Ultra high aspect-ratio MEMS and NEMS on basisof fibrous composite technology

Sergey Sukhoveyev

Received: 4 June 2007/ Accepted: 16 December 2007 / Published online: 8 January 2008

The Author(s) 2008

Abstract Indisputably, microelectronics is the mother

of the MEMS/NEMS technologies. Unfortunately, themajority of developed MEMS and NEMS devices inherited

from microelectronics technologies not only of merit but

also deficiencies one of which is their planarity. Recently

developed devices on the flexible base and also devices

with the moving elements on the hinges, in principle,

remain geometrically flat. With this micro- and nano-

mechanisms (motors, actuators, sensors, etc.) they are not

divided with the base (from silicon or another material)

large part of which (volume and mass) functionally is not

used and has usual of macro sizes (dimensions of a chip).

As a result, these ultra modern planar technologies are

helpless with the creation of powerful autonomous

3D-devices with the overall sizes *(110) mm3. The

author makes the attempt to estimate the prospects for

development and fabrication of topology complex 3D

MEMS/NEMS, for example, flaying microrobot and elastic

micro motor on the basis of fibrous compositesultra high

aspect-ratio glass structures with predetermined 3D micro-

and nano-topologies and embedded wires.

1 Fibrous composite mems/nems technology

The name of fiber technology came from the process of

product manufacture in fibrous composite. The fibers can

be polymeric, glass or other materials but today this tech-

nology uses glass. Fibrous MEMS/NEMS technologypreceded from micro channel plates the well known in

electronic industry as MCP. About 70% of the area of such

plates (thickness of*0.4 mm) is comprises of identical

cylindrical channels with a diameter from several units to

tens of micrometers. This process circumstance was used

for preparing the hyperfine vacuum-tight windows-filters of

soft X-ray for the SR beam-line (Chesnokov et al. 1991). In

this filter geometrically high transparent MCP performs the

role of the supporting structure.

There are other examples of non-traditional use of MCP.

For example, they were used in area of the mechanical

mass separators of atoms and molecules of intensive

molecular beams (Murphy 1989). In recent years, new

interest in the application of MCP structures has been

stimulated by the intensive development of laser units. In

particular, the work (Tonucci et al. 1992) communicates

about the development of the MCP with the diameter of

the channels and the partition thickness between them

*33 nm. In this case the density of openings is

*3 9 1010 cm-2. The potential of the use of such struc-

tures is very high since the channels of structure can be

filled with materials with different properties (polymers,

metals, alloys, semiconductors, etc.). A novel method of

producing ordered arrays of glass nanocones with precisely

controlled height, lattice constant and aspect ratio is

recorded by (Urso et al. 2007).

In 1989 Sergey Sukhoveyev and Edward Kolerov from

Scientific Research Institute of Vacuum Techniques

(Moscow, Russia) proposed some design for thick X-Ray

masks with ultra-high aspect-ratio microstructure (Kolerov

and Sukhoveyev 1989). In contrast to MCP, in such masks

from lead glass, the cross-section of each channel can be

very predictable. It was the first step (not yet realized) on

S. Sukhoveyev (&)

Electronics Department, Sub-Faculty of Micro System

Techniques, Moscow State Institute of Radioengineering,

Electronic and Automatic (Technical University),

Pros. Vernadskogo, 78, 119954 Moscow, Russia

e-mail: [email protected]

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DOI 10.1007/s00542-007-0519-6


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the way to the creation of fibrous composite MEMS and

NEMS. It was not realized since the authors creating this

mask as a technological tool for LIGA-technology, resulted

in an obtained fundamentally new product-microstructure

with geometric parameters that exceed LIGA-microstruc-

tures. Moreover, the prime cost of this new product proved

to be to very low, and the special features of fibrous

composite technology gave fundamentally new possibili-ties to the area of production volumetric microstructures:

obtaining geometrically similar microstructures on any

assigned scale in one and the same technological process.

The author of this article proposed to fill channels with

low-temperature alloy for the purpose of the creation of the

built-in wires or electrodes, and on this basis developed the

design of the fibrous composite stator of 3-phase syn-

chronous micromotor with external diameter of (0.02 -

2.0) mm. It is interesting that this idea was first perceived

in earnest only Russian childrens popular periodical

journal, Young Technician (Sukhoveyev and Ilin 1992)

which inspired to the development of fibrous compositeMEMS/NEMS technology (Beloglazov et al. 1999).

The essence of fiber technology consists of the process

of drawing the bundle from the tightly packed and spliced

fibers and (or) capillaries which primary are made of two

sorts of glass sharply differing from each other in terms of

solubility in the aqueous solution HCl. Most frequently

used hexagonal fibers, Fig. 1b, c, enable the densest

packing of the bundle and minimal withdrawal of

topological sizes of the cross-section of the bundle during

its pulling. The fibers composition in the bundle is deter-

mined by the pattern of the cross section of the

microstructure assigned on a certain scale. In this case the

dissoluble fibers (D) form the future channels, Fig. 2. They

further stretch the bundle into the thinner preserving the

geometric similarity of the bundles cross-section, Fig. 3.

The scale of pulling the bundle does not exceed the values

*(1:20 - 1:24). The prepared bundle is cut into parts

from which it is possible to form new bundle. This process

can be repeated many times. For example, an X-ray mask,

Fig. 7, was made from hexagonal fibers with the transverse

size of*0.5 mm, and each of these fibers was obtained by

pulling a bundle from*4,000 fibers. Cutting of the drawn

bundle is done by diamond disk using the internal cutting

edge. The minimum faultless length of the bundle piece in

this case comprises*0.3 mm. A shorter length and flat or

non-flat geometry of the microstructures can be obtained

by additional polishing. Figure 4 illustrates formation of

3D-structure by etching the bundle from indissolved core

(ID) and dissoluble shell (D)Fig. 4a, and from dissoluble

core and indissolved shellFig. 4b. Generally, the dis-

soluble and insoluble parts can have any assigned profile

section. The cantilevers are formed by etching the bundle

end, Fig. 4a. In the case shown by Fig. 4b the channels are

formed. Vacuum-tight partitions inside the channels,

Fig. 4c, can be obtained by etching two sides of the bundle.

In our experiments 5 lm-partitions were made inside the

channels of the X-ray mask of lead glass with a thickness

of the mask*5 mm. Figures 5, 6 and 7 demonstrate some

examples of the structures with cantilevers and X-ray

masks. In principle, the technology enables fabrication of

the cantilevers with predictable cross-sections, including

the channels, which can be filled with electrically con-

ducting substance.

Fiber composite technology gives great possibilities in

area of creation of microdevices with embedded wires or

electrodes. For example, Fig. 8 shows the fibers composi-

tion in the bundle forming the stator of a 3-ph synchronous

micromotor with a permanent magnet-rotor. The part of

these fibers (six groups) contains capillaries filled with

PbSn solder the melting point of which lower than the

softening temperature of the glass. This rule is primary

important for the pulling of the bundles containing

Fig. 1 Packing diagram of bundle from round (a) and hexagonal

fibers (b, c)

1100 Microsyst Technol (2008) 14:10991110

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embedded micro and nanowires. It is one of the original

properties of the fiber technology. In the pulling process,

the bundle cross-section decreases continuously so that

directly in one cycle of pulling, geometrically similar

microstructures with an infinite number of standard sizes

can be obtained. None of the other technologies provide

this possibility. Moreover, specially selected composition

of the hollow and continuous fibers in the bundle enables

the fabrication of topologically complex microstructures

with predictable cross-sections without the retention of the

geometric similarity of the cross-section during pulling of

the bundle. For example, Fig. 9a shows a section of the

hollow cylinder with noncircular channels. The stator of

the micromotor, Figs. 9b and 10, was prepared by this

process. The channels of the stators preform were filled up

by PbSn-alloy. These capillary wires perform the role of

the active parts of the 1-turn phase windings. Figure 10

shows design, electric scheme and photo of 3-ph syn-

chronous micromotor with the stator and NdFeB rotor

described above.

The technology enables batch fabrication for different

types of devices which can involve, for example, fluidic,

light and X-ray devices. The fibers composition in the

bundle is selected specifically for this. The example of the

batch fabrication of the stators mentioned above, with

external diameter of*160 lm is shown by Fig. 11.

In principle, the plastic deformation process allows

giving to the composite bundle any 3D-geometry. For

example, twisting of the bundle is easily attended in

practice. The channels can be twisted around the axis of

bundle to some preset angle. Figure 12 gives some patterns

of the simplest devices which could be obtained in this

Fig. 2 Bundle packing diagram: dissoluble (D) and indissoluble (ID)

fibers

Fig. 3 Bundle pulling diagram

Fig. 4 Diagram of the production of the relief of the structure

Microsyst Technol (2008) 14:10991110 1101

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case: Fig. 12a shows a structure with the twisted channels

that can be used as micro turbines or micro-worm con-

veyor, and Fig. 12b-analogous to its conical structure. The

possible application of such microstructures is not limited

only to mechanics. Its use in optics, X-ray and thermal

neutron optics, and also multichannel electron micro-optics

is distinctly evident from these figures. It is important to

emphasize the roughness of the channels does not exceed

*10 nm. This makes it possible to channel X-radiation by

them on the basis of the total external reflection effect.

Figure 12c shows the scheme of twisted cable, the

minimum diameter in practice composes *20 lm. With

powering this cable by 3-phase current it can be used as the

stator of the micromotor with an external rotor. It is not

difficult to see in this design some mechanical devices, for

example, a cylindrical gear. If the cable is made with

dissoluble shell for each of lived, and these shells are

eliminated to the specific length, Fig. 12d, such device

pretends to the use as an electrostatic actuator with

mechanical efforts (F).

Concluding the examination of the infinite series of the

possible applications of fibrous microstructures, one addi-

tional very important observation should be made. The

Fig. 8 Stator of micromotor with six groups of the capillary wires

Fig. 6 X-Ray code aperture (mask) from lead glass. Minimal lateral

size of the partition *400 nm

Fig. 7 X-Ray mask from lead glass with submicron partitions

*(200300) nm

Fig. 5 Micro-cantilevers (diameter*7 lm)


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channels of fibrous microstructures can be filled with gases,

electrolytes, semiconductor materials, and also by materi-

als with other properties. In this case there are no visible

obstacles for all these diverse forms and types of channels

that would be present in one and the same microstructure.

Specifically in this the author sees unique special featuresof fibrous composite technology.

2 Prospects for fibrous composite nanotechnology

In contrast to planar technologies, the production of fibrous

nanostructures does not require special technological

equipment and super-expensive clean rooms. Nano-

dimensional structures, including structures with embedded

nanowires they obtain as a result of repeated pulling of the

bundle (amazingly simple and does not require any com-

mentary). The author saw some other original possibilities

of fibrous nanotechnology. One of them relates to pro-

duction of non-planar NEMS without using any

lithography processes (Sukhoveyev 2000) and as an

example is explained by the schematic of the production of

the stator of the micromotor, Fig. 13. According to this

diagram, the glass-fiber preform carries out two primary

tasks. First, it is used as the sacrificial body with prede-

termined 3D geometry and thus forms the geometric form

of the fabricated device. In the general case, this preform

can be prepared from the dissoluble and indissolved glasses

(partially sacrificial). Second, after removal of the surface

layer of the perform, for example by etching process

(Fig. 13bc) the special relief is fabricated and used later

as mask at the next step, Fig. 13d. This technological

approach makes it possible to fabricate devices from dif-

ferent materials: metals, polymers, rubber, etc.

Other prospects of using the fiber technology in the

NEMS area include the possibility of preparing the struc-

tures with sub-micron thickness partitions between the

channels. In the case of using the glass ultra-thin parti-

tions (as is known) possess membrane properties. Such

nanostructure arrays involving the channels filled by dif-

ferent sorts of electrolytes become similar to natural nerve

fibers. Consequently, under specific conditions they must

transfer signal-stimulus (information) from one end

to the other. Fibrous structure can be prepared with a

smoothly changing cross-section along its length. It is

known a change of a nerve fiber diameter ensures a change

in the speed of transmission on it of nerve impulse, and

Nature skillfully uses this with the creation of living

Fig. 10 Design, electric scheme and photo of the 3-ph micromotor

with NdFeB rotor and 1-turn phase windings: 1 hollow cylinder with

the channels inside the wall; 2 PbSn wires; 3 metal disk-connector

for all wires (point o); 4 rotor; 5 shaft; Ax, By, Cz-phase windings,

P power source

Fig. 9 Hollow cylinder: before (a) and after (b) filling the noncir-

cular channels by PbSn solder (microwires)


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organisms. Thus, it is possible to speak about the possi-

bility of designing of artificial nerve fibers on the basis of

fibrous structures or, more modest-unique sensors.

It should be noted, fibrous nanotechnology provides not

only the possibility of preparing the structures unique in the

topology, but also it does not require expensive equipment

and rooms. In addition, it does not use any radiation. Finally,

this technology can be realized at any geographical point.

3 Prospects for fibrous composite technology in the

robotics

Creation of self-powered mobile sensors, microrobots

(MR) and mobile networks is at present new development

stage of MEMS technologies. On a global scale, the net-

works will accomplish monitoring the planets surrounding

media, on a global scale they will be able, for example: to

protect of a state border, inspect unattended areas of atomic

power plants, etc. One of the important tasks of the creationof mobile MR, caused by the idea that maximally small

overall size and the mass of detail of MR must be multi-

functional, and their quantity in the ideal must be equal to

one (one detailone MR). However, such MR is not

practically realized. Actually, one brief enumeration alone

of the vitally important knots (onboard power source,

engine, onboard controller, sensor, and transceiver) speaks

for itself. The author made an attempt at the estimation of

the possibility of designing the flying micro-robot by use of

the fibrous composite technology (Sukhoveyev 2003).

As the prototypes in this case the plants seeds which are

flying in air were selected. More precisely they float in it.

Reynolds Number is so small with the small dimensions of

the micro air vehicle (MAV) that it occurs much nearer to

the regime of floating in viscous air. From natural objects

the author spied the MAV prototype as dandelion seed

with a cone-shaped parachute system from fibers, Fig. 14.

Fig. 13 Non-flat fabrication

process sequence

(amin * 30 nm): a fabrication

of a sacrificial substrate 1 from

soluble glass with channels 2;

b, c etching of external surface

3 to obtain relief (mask);d fabrication of the promoter 4;

e removing the relief (mask) by

etching; f, g fabrication of the

functional layers 5, 6, by

electroplating ore another way;

h removing of the sacrificial

substrate

Fig. 11 The bundle with batch-fabricated seven preforms of the

micromotor stators (external diameter *160 lm)

Fig. 12 Schemes of the twisted structures


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Sometimes in flight separate seeds interlace by their fibers

and form the hovering clouds. Previously has been spo-

ken about of ideal MR design. From this point of view,

the MAV design similar to the seed of dandelion is very

attractive. Fibers can perform simultaneously the roles of

parachute system, elastic feet (landing) or elastic guarding

shell (collision with an obstacle), and also the role of the

onboard source of electrical energy and radio-antenna.

In particular, the battery from the coaxial capacitors

executed in the form of fibers can have the following cal-

culated parameters. If charging voltage U= 2V, the outside

diameter of the cable (external electrode) 2R = 20 lm,

thickness of dielectric layer (R - r) = 0.5 lm, permeability

of dielectric e = 4, and the length of each cable l = 20 mm,

the capacity of one cable will be*87 pF. If the endsof these

cables are fixed and connected with each other (in parallel)

on area *4 mm2, and each cable occupies space

*(30 9 30) lm2 the number of cables in the battery will

prove to be equal *4444, and its capacity C* 0.4F.

Energy of this battery will be*0.8 J. If will be used as the

dielectric polymeric materials (density * 1,400 kg/m3) the

mass of battery (without mass of thin film external cable

electrode) will be*40 mg, and the specific density of the

stored energy of the battery is 0.02 J/kg.

The scheme of the MAV power unit with this battery

can appear analogous to Fig. 15 on which the number of

cables is shown in the reduced quantity. Cables can be

located on both sides of the disk since as their function,

they guarantee not only of planning MAV but also damp-

ing impacts with the obstacles and landings.

In principle, the simplest MAV can have aboard a

reserve of energy sufficient only for the sensor functioning

and delivery to its operator any alarm message about

target (fire, harmful gas, etc). However, according to the

authors intention, it must be capable of the autonomoustakeoff after landing. Therefore, in order to be joined away

from the earth by catching random puff of wind, the MAV

must be supplied with additional actuators ensuring its

takeoff and support of gliding condition. For this purpose

instead of disk 1, Fig. 15, it is more expedient to use the 3-

or 4-blade propeller, Fig. 16, which can revolve on a shaft

3 by magnetostatic slide bearing.

This propeller can be made in the form of tape solar cell

and fulfill the function of charger for the low-voltage fiber

battery. In addition, the unipolar dc-motors supplied with

its own propellers can be placed at the tips of the blades of

this propeller, Fig. 17. The mass of such a propeller can be*50 mg (the 1 cm2element can provide short-circuit

current *2.8 mA (1.8 - 2.3) V.

Another approach can use lithium film batteries. It is

important to note these micromotors, according to their

operating principle, must be dc-unipolar motors since, in

this case, their stator windings are powered directly from

the onboard power source without use of any additional

devices. Unfortunately, the very low power of these mi-

cromotors is pay for the gain in mass and simplicity of

design. Obviously, the presence of a propeller does not

solve the problem of takeoff in all possible situations. For

example, if the MAV sits in the grass, the possibility to

untwist the propeller is small.

In addition, the wing-actuator and/or micromotor on

reactive thrust can be used. It should be noted they would be

effective for super-light weight MAVs only. The design of

these actuators appears as follows. The shaft 3 of the pro-

peller, Fig. 16, can be used simultaneously as the fuselage.

Its external surface is covered with electrically conductive

film 3, Fig. 18. The ferromagnetic layer 4 is made over the

film 3 in the section of shaft angular sector *300. Elastic

Fig. 14 Dandelion seed: f fiber; s seed

Fig. 15 Art-work of the low-voltage battery-parachute system: 1

disk-shaped solar cell; 2 cross-section of the fiber battery; 3 cables

Fig. 16 Solar cell-propeller: 1 blade of solar cell-propeller; 2, 3

magnetostatic bearing


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ferromagnetic wings 2 (one or several pairs) are attached to

the section of shaft that is free from film 4.

With current on the film along the fuselage, the resulting

ring-shaped magnetic flux is locked in the air gaps between

layer 4 and wings 2. This actuator is an electromechanical

resonator with wings in kind of moving element. One of the

authors ideas for the complex motion microwing is non-

continuous wing from elastic fibers of predetermined

length, Fig. 19. In this case we have a system of resonators

with their own mechanical parameters for each fiber.

It should be noted the independent application of such

wing-actuators can be useful for other devices. For exam-

ple, autonomous MRs designed to only creep could be

propelled along the same surface by jumping with the aidof the wing-actuator. In this case, power consumption for

its motion by jumping can prove to be less than con-

sumption for rolling or sliding along the surface. Another

scenario is possible, for example, during monitoring of

unattended areas of harmful or dangerous production,

storage, tunnels, etc. In these cases inspection robot with a

wing-actuator could be moved along an assigned route,

along a guide of cord, for example, along a powered wire-cord, passed through the fuselage.

Another takeoff-actuator can be an engine of the reac-

tive thrust, executed directly as a part of the bushing 2,

Fig. 16, which in this case combines the functions of the

bearing and the holder of the fibers (capacitors of battery).

The author took the design of this device, initially devel-

oped as a multichannel electron optic lens, Fig. 20, as the

basis of this engine. When the potentials U1 and U2 are

present on electrodes 3 and 6, an electric field 8 forms the

meniscus 9 of liquids 7 at the open end of each of the

channels 2. The form of the meniscus can be changed (by

supplying potential to the electrode that is isolated from

electrode 6 by insulator 10) to such an extent, the detach-

ment of the drop of liquid occurs, creating reactive thrust.

Technology provides the possibility of preparing the plate

1 with a minimum thickness of*0.3 mm and channels 2

with a minimum diameter of*0.3 lm. The cross-section

of the channels 2 can have any assigned geometry and

sizes. The distance between these channels can be also

predetermined. In addition, channels 2 can be prepared in a

cone-shaped core, twisted relative to the longitudinal axis

of the plate at specific angle. Electrode 3 consists of

capillary wires, the cross-section of which, and their

arrangement relative to the walls of the channels 2 can also

be predetermined. In general, the author sees the wider

application area of this design, in particular: a plasma

electron gun, liquid-metal ionic source, micro pump,

electrochemical microprobe, photon crystal, the wave-

guide of X-radiation, and also a device with all possible

combinations of the devices in the composition of one plate

enumerated above.

Returning to the MAV, one say the liquid propellant

rocket engine can also be prepared in the form of fibrous

Fig. 17 Solar cell-propeller with unipolar dc-motors (3): 1 blade; 2

detail of the magneto-static bearing; 4 propeller

Fig. 18 Flapping wings actuator: 1 fuselage; 2 wing; 3 electro-

conductive layer; 4 ferromagnetic layer

Fig. 19 Wings from independent fibers (1)


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composite packed in orthogonal planes. In this case, each of

the fibers can contain one or several channels 2 with elec-

trodes 3. This engine can shoot liquid in the three mutually

perpendicular directions resulting in thrust vector of the

engine being controlled. A model of this composite, in the

form of cube*(5 9 5 9 5) mm, prepared by the gluing of

the preformed micromotor stators (Sukhoveyev et al. 1999)

is shown in Fig. 21. In the shear of the angle of model are

three visible orthogonal channels with six electrodes 3 each.

This model is a demonstration of the extraordinarily wide

and original possibilities of fibrous composite technology in

the field of the MAV creation. A common form of the MAV

Dandelion is shown by Fig. 22.

4 Micromotors on the basis of flexible fibrous

shells and their segments

It is known that stators winding of electric motors creates

a moving magnetic field. One of the simplest forms of such

a 2-phase winding appears a strip winding consisting of

two identical periodically bent conductors displaced rela-

tive to each other to fourth of their period along their

common longitudinal axis. Among the practical tasks of

MEMS there are tasks of displacement of microparticles,

liquid or other objects along the surface or in the depth

of body. In such micro-elevators as we find use grid

constructions from the microwire and multilayer tape

windings. Very often the windings with assigned 3D-

geometry can be made as independent attached elements of

the device only. This deficiency can be overcome by using

fibrous technology that enables fabrication of the micro-

structures with periodic relief of the surface. This relief iswell visible, for example, on the walls of the channels of

the X-Ray mask, Fig. 7. Earlier has been noted (Bel-

oglazov et al. 1999) a structure with this relief can be used

as X-Ray diffraction grating.

The stator involves two identical periodic surface

structures separated from each other by the air gap, and

Fig. 21 Example of the glass array with the microchannels placed in

orthogonal planes

Fig. 22 Art-work of the MAV Dandelion

Fig. 20 Scheme of the fluidic multichannel rocket engine; 1 fiber

glass array; 2 channel; 3 embedded microelectrodes; 4, 6 film

electrodes; 5, 10 insulating layers; 7 fluid; 8 field lines; 9 meniscus;

U1, U2-electrodes potentials


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these structures are displaced relative to each other,

Fig. 23b. The phase stator windings are obtained by fab-

ricating a thin, continuous electrically conductive layer on

these surfaces with a relief. The profile of the windings can

have, for example, a form of meandering. With the pow-

ering of the windings by currents I1 and I2 taking place in a

direction transverse to the relief and moved between

themselves in the gap on the phase of the stator a runningmagnetic field will occur. The field speed is determined by

current frequency and by the period of the relief. Rotor or

slider they place in the gap. This is the special feature of

the described motors. They can be made on the structured

surface of the flexible fibrous shell or its segments with any

3D geometry and have several sections with the relief

surface between which, in the gaps (if necessary, nonlin-

ear), several moving elements of the motor can be moved.

In the case of a cylindrical motor with a revolving rotor,

one of the two parts of the stators preform with the periodic

relief of the surface can take the form, shown by Fig. 24.

Fibrous preforms, Fig. 24, can be hollow or continuous.Two such parts of the stator can be attached on both sides

of the shaft with the rotor. The outside diameter of this

stator which can be actually are made at precise dimensions

*20 lm. This device can also be used as an angular dis-

placement sensor. One property of fibers is their flexibility.

The value of a safe bend radius of the fiber comprises not

less than its hundred radiuses. Consequently, this property

of fiber gives new possibilities to the construction of

microdevices.

The author must emphasize here the selection of MAV as

the object of the possible application of the described

construction of micromotors is made for the purpose to

exclusively emphasize the enormous potential field of

activity for fibrous composite technology in the MEMS area.

5 Electrode and 3d-winding systems

from glass-metallic fabrics

It is well known the micro-robotics world needs very

powerful motors and actuators with 3D complex topology.

One of the most significant challenges is the creation of

some design and method of fabrication way for the

electrical windings, having many turns, with a complex,

predictable non-flat topology. There are similar tasks in

the area of non-contacts manipulation of the micropartsby travelling electric and magnetic fields (Moesner and

Higuchi 1997) and (Moesner et al. 1997). In an early

paper (Sukhoveyev et al. 1999) an idea of utilizing the

flexible fabrics from electro-conductive microfibers or

microwires in MEMS-area was briefly proposed. Recently

the glass-metallic fabrics were made by using industrial

equipment from the fabrication of conventional glass

fibers with low softening temperatures and metallic wires

made from Mo, Cu, FeNialloys with diameters of 20

120 lm (Sukhoveyev and Suetin 2003). The width of

such an industrial fabric band is about 1.0 m. Tiny pieces

cut from the fabric band demonstrate a high flexibility

suited to bond such a piece to the non-flat substrate with a

predictable 3D geometric shape. Flexibility of the fabric

is the main key that opens a door to novel and unusual

applications of the fabrics in the MEMS-area. Particu-

larly, such an approach enables fabricating of the

windings and electrode systems with numerical shapes.

The skeleton of the electric part of the fabric involves

long parallel elastic microwires. These microwires inter-

twine slim and long parallel flexible fiberglass beams.

Fig. 23 Micromotor on the basis of fibrous stator with periodic relief

surface: a diagram of currents I1 and I2; b design of stator; 1 part of

stator with periodic relief; 2 conducting layer; 3 ferromagnetic slider

or rotor

Fig. 24 Fibrous preforms of the stator (a, b, c) with the periodic

relief


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Figure 25 shows a general view of the fabric. The shapeof the elastic microwires is similar to a sinusoidal func-

tion every half-wave of which, intertwines two (Fig. 25b)

or three (Fig. 25c) fiber-glass beams. Another interesting

architecture feature of the fabric is a periodical space shift

of the neighboring half-wave of the wires. The shift

period equals *(a + b) (see Fig. 25b). This fabric feature

can be used in order to create 3D microsystems

that explore moving electric or magnetic fields by 2- or

3-phase windings or electrode systems. In such a system

the field will be moved along the fabric surface (flat or

non-flat). It is very important to mark a choice for the

method of fabrication some device from described fabricmust contains the way of fabrication leads and intercon-

nections between microwires manufacturing. If the fabric

is fixed on thin substrate from material that can be plas-

tically deformed without disruption of the fabric wires,

some area (or several areas) of such a preform can be

deformed by micro stamping. The wires after stamping

can have some predictable topology. When these wires

are powered the fabric can works, for example, as elec-

tromagnetic coil or an electron optic lens.

6 Conclusions

Thus, fibrous composite technology enables fabrication of

volumetric micro- and nano-structures with an ultra-high

aspect ratio inaccessible in its geometry to other known

technologies. At present, microand nanostructures from

the glass already are found a use as MCP, MEMS/NEMS

powerful devices, X-ray waveguides and lenses, and pho-ton crystals. It is important that one and the same

technology for preparing these completely different in the

functions devices is used. Exceptionally important are

other aspects. Fibrous composite technology does not use

radiation, it does not need extra-pure accommodations, it

can be realized practically at any geographical point and,

finally, it needs a minimum quantity of specialists of

average qualification. And the latter, fibrous composite

technology conceals the inexhaustible possibilities since

the materials which it can use are not exhausted.

Acknowledgments The author expresses gratitude to ProfessorPeter Maltcev of the Moscow State Institute of Radioengineering,

Electronics and Automation (Technical University) for the fruitful

discussions and critical relation to the work of the author in the area

of MEMS and NEMS.

Open Access This article is distributed under the terms of the

Creative Commons Attribution Noncommercial License which per-

mits any noncommercial use, distribution, and reproduction in any

medium, provided the original author(s) and source are credited.

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