Semicon Pte Ltd Semicon Pte Ltd. 1. Purpose If a chemical leaks at the bottom of equipment or pipe...

Chemical Leak Finder

Semicon Pte Ltd

Semicon Pte. Ltd Hitachi-Kokusai RHC Series (1)

1. Purpose

• If a chemical leaks at the bottom of equipment or pipe fitting area,

• An Engineer can confirm the chemical type by visual without inspection without

using litmus paper

• Even small leaks or fumes can be detected.

• Therefore, an Engineer can find the exact leak point and can prevent

secondary accidents.

Chemical Leak FinderSemicon Pte. Ltd

Semicon Pte. Ltd Hitachi-Kokusai RHC Series (1)2

2. Current Issues

1. An engineer needs Litmus paper to determine if a leak is acidic or alkali

2. Its not easy to find the exact leak point at the bottom of the tool.

3. Its difficult to detect small volume leaks.

4. Its almost impossible to detect chemical fumes without leak detectors.

5. Its too expensive to install leak detectors in all areas

6. It’s difficult to confirm chemical type at upper plenum area because it is difficult

to reach.

7. Can’t use Litmus paper due to particle and fire issues.If Litmus Paper meets

Acid it will cause a burn



3.Tool Weak Point

* If a chemical leak occurs in the inside of tool, Engineers need litmus pa-

per to check chemical type. They also need time to find the exact leak

point. It is very dangerous for the engineer to spend too much time

identifying the type and exact leak point inside the tool because long

exposures can cause health issues.



3. Line Weak point

* At the bottom of equipment and upper area of Plenum, there are many

chemical pipe lines and difficult reach to check for leaks.


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Semicon Pte. Ltd


3. Valve area Weak Point

1. Can’t confirm chemical type by visual

2. Need litmus paper if find liquid leak.

3. Can’t detect small size leak even if onje

has a liquid leak detector

4. Can’t detect Chemical Fume

(Chemical fume is more dangerous)

Chemical Leak Finder33

Semicon Pte. Ltd

Semicon Pte. Ltd Hitachi-Kokusai RHC Series (1)4

4. The Solution

• If one installs leak finder at suspect areas, Engineers can easily find

chemical leak points and type by visual inspection.

• Leak finder can detect chemical fume and small leaks as well so engineers

can prevent secondary accident with quick action


* Leak finder material is PVC. It doesn’t catch fire nor generate particles.

Semicon Pte. Ltd


5 . Product Test


After install ACID

Pipe

ACID leak

After install Alkali

Pipe

Alkali leak

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Semicon Pte. Ltd


5. Product Test


Paper type

Bottom area of tool Acid chemical leak

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Semicon Pte. Ltd


6. Chemical Reaction Test ( Sheet & Tape type)


■ Character : Same character with Litmus paper by Chemical optimization

Can detect DI water Leak by visual.

■ Reaction Test : Different colors based on Acid & Alkali Ph concentration,

It doesn’t melt even with 100% H2SO4

PH 1 PH 2 DIW PH 9 PH 11PH 3 PH 10PH 7~8

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Semicon Pte. Ltd


6. Chemical Reaction Test ( C Ring type)


■ Character : Can detect Acid, Alkali and DI water.

Can use high temperature ( Max 100 )℃

■ Reaction Test : Different colors based on Acid & Alkali Ph concentration,

Can confirm chemical type by visual

PH 1 PH 2 DIW PH 9 PH 11PH 3 PH 10

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Semicon Pte. Ltd

Semicon Pte. Ltd Hitachi-Kokusai RHC Series (1)Chemical Leak Finder63

6. Fume Reaction Test (C Ring Type)

Pump Exhaust line(No Gas Flow ) Chamber BCL3 Gas flow Pump Exhaust BCL3 Gas

flow

React by

Chloline Fume

Semicon Pte. Ltd


7. Product Type


1

Ring Type

Leak FinderProduct

Sheet Type

Apron Type

Wipes Type

Tape Type

Semicon Pte. Ltd


7. Product Type : C Ring Type


■ Application : Liquid Delivery pipe Fitting

■ Size : Can supply Customer spec ( ¼” , ½” , ¾” , 1” , 2” etc. )

■ Packing : 12EA / Box

■ Use : Acid & Alkali

■ Material : PE(Polyethylene)

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Semicon Pte. Ltd


7. Product type :Tape Type


■ Application : Bottom area of tool

■ Size : 20mm ~ 250mm / 50m

■ Packing : 1 EA


■ Material : PVC (Polyvinyl chloride)

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Semicon Pte. Ltd


7. Product type : Wiper Type


■ Application : Tool Cleaning or out side cleaning Can check Chemical during cleaning

■ Size : 215mm * 215mm

■ Packing : 100EA


■ Material : Polyester

■ Application : Working and Repair

■ Size : 770mm * 620mm

■ Packing : 10EA

■ use : Acid & Alkali

■ Material : PU Coating and no Particle

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Wiper type

Semicon Pte. Ltd

Semicon Pte. Ltd Hitachi-Kokusai RHC Series (1)7. Product type : Pipe cover


Semicon Pte. Ltd


8. Leak zone Install sample

8Chemical Leak Finder

■ Installed Tape and sheet type leak finder at base of tool. ■ Installed name and contact point sheet at corner area

Semicon Pte. Ltd


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10. Benefit


Can detect Chemical

Fume by visual

Prevent secondary accidentCan check

Acid ,Alkali

Can find exact Leak

point

Easy check chemical type by visual


• This product doesn’t have any particle and fire issues and can detect Acid and Alkali chemicals by visual inspection. Its easily to find the exact leak point in order to prevent secondary accidents

Semicon Pte. Ltd


9. Product Feature

9 Chemical Leak Finder

Specifically designed for Chemical Lines

No melting and fire issue for high concentration acid chemicals (PH 0~2) for Tape & Sheet

No Particle issue

No twisting or lifting with Chemical reaction

Long life time inside of Fab. (Only reacts with chemicals and Direct Sun light)

Semicon Pte. Ltd

11. RFID Reader for Safety Patrol

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■ RFID READER with Software

Option : 1D, 2D BARCODE SCANER 및 CAM-ERA MODULE

After the engineer attaches an RF Tag at the Leak

zone, Engineer can input Leak status (OK/no good)

Can manage Patrol history with status

Semicon Pte. Ltd

Semicon Pte Ltd Semicon Pte Ltd. 1. Purpose If a chemical leaks at the bottom of equipment or pipe...

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