SEMI SMT-ELS Standards SuiteIntroduction of SEMI SMT-ELS. SEMI SMT-ELS Standards Suite and Freeze...

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1 Copyright © 2020 SEMI Japan CONNECT - COLLABORATE - INNOVATE - GROW - PROSPER Copyright © 2020 SEMI Japan SEMI SMT-ELS Standards Suite - Surface Mount Technology – Equipment Link Standards - As of Feb. 12, 2019 Flow Manufacturing Forum / Automation Technology Committee, SEMI Homepage: http://www1.semi.org/jp/SEMI_SMT-ELS

Transcript of SEMI SMT-ELS Standards SuiteIntroduction of SEMI SMT-ELS. SEMI SMT-ELS Standards Suite and Freeze...

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Copyright © 2020 SEMI Japan

CONNECT - COLLABORATE - INNOVATE - GROW - PROSPER

Copyright © 2020 SEMI Japan

SEMI SMT-ELS Standards Suite- Surface Mount Technology – Equipment Link Standards -

As of Feb. 12, 2019

Flow Manufacturing Forum / Automation Technology Committee, SEMI

Homepage: http://www1.semi.org/jp/SEMI_SMT-ELS

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Copyright © 2020 SEMI Japan

This document introduces the concept and functions of

SEMI SMT-ELS Standards suite

that makes SMT assembly line smarter

Please visit

http://www1.semi.org/jp/SEMI_SMT-ELSfor up-to-date information

Introduction

Position of This Document

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• Demonstrations Done• JISSO PROTEC Tokyo June 2019

• NEPCON ASIA Shenzhen August 2019

• Productronica München November 2019

• APEX San Diego February 2020

• Watch the demo videos on: http://www1.semi.org/jp/SEMI_SMT-ELS

Introduction

Demonstrations

JISSO PROTEC / Tokyo

June 2019

NEPCON ASIA / Shenzhen

August 2019

Productronica / München

November 2019

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Introduction of SEMI SMT-ELSMotivation and Overview of SEMI SMT-ELS

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• SEMI SMT-ELS (Equipment Link Standards)

• The Standards suite to make SMT assembly line smarter

• Replacement of SMEMA

• Addition of data communication capabilities

• Host interface including tiered host capability

• Equipment and equipment data communication

• SEMI Standards:

• Global Standards that have been supporting semiconductor manufacturing lines

and related factories

Introduction of SEMI SMT-ELS

What is SEMI SMT-ELS?

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• Provide the smart automation scheme of assembly line for IoT era• Combination of Vertical Management and Horizontal Control

• Replacement of SMEMA and addition of data communication capability

• Object Oriented Panel and Panel data handling/tracking• Panel ID, Product ID, Inspected Data, etc.

• Functional extendibility over decades

• Provide highly interoperable equipment interface supported by global

standard for:• Flexible mix-and-match of equipment from various suppliers

• Quick ramp up of assembly line

• Cost suppressions such as:• Use of SMEMA generation equipment with minimal modification

• Conformance with low end PLCs

• Use of the same protocol for both Vertical and Horizontal communications

Introduction of SEMI SMT-ELS

Purpose of SEMI SMT-ELS

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Factory Host

Host

Core

Local Host

• Single protocol supports communications between:• Factory Host - Local Host/Equipment Multiple line management (TBD)

• Local Host - Equipment Single line control

• Equipment – Equipment Equipment cooperation

• Equipment - Equipment Panel and Panel Data transfer

Proposed System Structure

SEMI SMT-ELS System

SEMI SMT-ELS Equipment

SEMI A1

PESCI

SEMI A1

PESCI

Equipment

Core

SEMI A1

PESCI

SEMI An on A1

SEMI A2 on A1

SEMI SMT-ELS Wrapper

SEMI A1

PESCI

SEMI A1

PESCI

Wrapper

Core

SEMI A1

PESCI

SEMI SMT-ELS Equipment

SEMI A1

PESCI

SEMI A1

PESCI

Equipment

Core

SEMI A1

PESCI

SMEMA Equipment

SEMI A1

PESCI

SEMI A1

PESCI

SEMI SMT-ELS Placement Eq.

SEMI A1

PESCI

SEMI A1

PESCI

Equipment

Core

SEMI A1

PESCI

Host

Core

Wrapper Interface (Including SMEMA)

SEMI A2 Info

SEMI A2 Info

SEMI A1

PESCI

SEMI

A2/A1

SEMI

A2/A1

SEMI

A2/A1

SEMI An on A1

SEMI An

F-GEM

SEMI An

F-GEM

SEMI An

F-GEM

SEMI An

F-GEM

SEMI An

F-GEM

SEMI An

F-GEM

SEMI A2

SMASH

SEMI A2

SMASH

SEMI A2

SMASH

SEMI A2

SMASH

SEMI A2

SMASH

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• SEMI SMT-ELS Standards suite consists of the following SEMI Standards

• Freeze Version Management• For interoperability, a guide that specifies the combination of the versions of above Standards is required

• SEMI SMT-ELS Freeze Version 0 is available now• SEMI A2-1019 Specification for Surface Mount Assembler Smart Hookup (SMASH)

• SEMI A1-1019 Specification for Production Equipment Smart Connection Interface (PESCI)

• SEMI A1.1-1019 Specification for TCP/IP Interface for Production Equipment Smart Connection Interface (PESCI)

• Please contact SEMI staff to purchase the above documents

Introduction of SEMI SMT-ELS

SEMI SMT-ELS Standards Suite and Freeze Version

Tier Function

SMT Applications Host / Equipment applications

Host – Equipment communication control

Equipment – Equipment communication control

SEMI A2 SMASH Message and behavior for SMT assembly line

SEMI A1 PESCI General-purpose equipment connection interface

SEMI A1.1 TCP/IP Interface for PESCI TCP/IP Interface for SEMI A1 PESCI

TCP/IP TCP/IP Interface

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SMEMA Equipment ConformanceUse of SMEMA Generation Equipment in SEMI SMT-ELS Line

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• A SMEMA equipment can be used as a SEMI SMT-ELS equipment by adding

Virtual SMASH Controller on the top• With minimal modification to perform equipment control such as conveyor width

change via Proprietary Interface

SMEMA Equipment Conformance

Compatibility with SMEMA Equipment

Virtual SMASH Controller

SMEMA

Equipment

SEMI SMT-ELS

Equipment

SMEMASMEMA

SEMI

SMT-ELSSEMI SMT-ELS

Equipment

SEMI

SMT-ELS

Proprietary

Interface for Data

Host

SEMI SMT-ELS

Virtual SEMI SMT-ELS Equipment

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Concept of SEMI A1 PESCIThe General-Purpose Equipment Interface that SEMI SMT-ELS Uses

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• A general-purpose Production Equipment Smart Connection Interface

• General-purpose Data communication channel (GD)• Tiered Host connection

• Equipment Group ➔ Local Host ➔ Upper Tier Host

• Various addressing modes• Equipment to equipment, equipment to the local host, equipment to upper tier host, inter

host

• Message definitions are open to upper tier Standard per application area

• Up to ten Material and Material Data transfer channels (Tracks)• Object Oriented simultaneous transfer of Material and its Material Data

• Material Data definition is open to the upper tier Standard per application area

• Compatible with various transfer means such as conveyors, AGVs, robots

• Support Uni-direction, Alternate-direction, and Bi-direction transfer operation

• For the up-to-date information, visit:• http://www1.semi.org/jp/SEMI_A1_PESCI

Concept of SEMI A1 PESCI

What is SEMI A1 PESCI?

LineLine

Line

Line

Line

LineLine

LineLine

Local Host

Equipment

T0

T1

T0

T1

Equipment

T1

T1

T0

T1

T0

T0

Equipment

T0

T1

T0

T1

Equipment

T0

T1

T0

T1

GDGD

GDGD

GDGD

L0LineL1

L0LineL1

L0LineL2

GD Line

Upper Tier Host

GD Line

Track

Track

Track

Track

Track

Track

MD

MD

MD

MD

MD

MD

MD

MD

MD

MD

MD

MD

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• Production Line Management:• Through Host-equipment communication

(Point to Point)

• Equipment settings and observations

• Material tracking

• Production Execution Control:• By equipment-equipment communication

(Daisy chain)

• Autonomous Production Execution:• By equipment-equipment collaboration

• Through General Data communication

• Object Oriented Material and Material Data transfer• Simultaneous handoff of Material and Material Data

• Direct reference of attached Material Data

• Exception handlings of handoff (Pause – Recovery)

Concept of SEMI A1 PESCI

Orthogonal “Line Management” and “Execution Control”

Industry Network free

PLC conformance

Production Line

Management

Production Execution Control

Set, Trace, and Log

by the Host

Object Oriented “Material and Material Data” Transfer

Autonomous Production Execution by Equipment

Production Line Management in Vertical and Production Execution Control in Horizontal

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Next SegmentOne Segment of a Production Line

• Tiered Host operation

• Localization of equipment dependent detail control in a Segment

• Easy to change per Segment

Concept of SEMI A1 PESCI

Segment and Tiered Host Operation Capability

Equipment

Star Connection

Flow Connection

Host

Upper Tier Host

Branch Merge

Loop

Turn

Back

Host

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• Host and Equipment connection (point to point) for:• Equipment management

• WIP tracing

• Equipment and Equipment connection (daisy chain) for:• Generic communication between equipment via the adjacent equipment

• Simultaneous handoff of Material and its Material Data

Concept of SEMI A1 PESCI

Application of SEMI A1 PESCI

Equipment Equipment Equipment Equipment

Material Data Material Data Material Data

General Data General Data General Data

Material Material Material

Object Oriented “Material and Material Data” Transfer throughout Equipment Chain

SEMI A1 SEMI A1 SEMI A1

SEMI A1

HostEquipment

Setting &

Log by the

Host

General

Data

Autonomous Process Execution and Line Management by Equipment Chain

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• SEMI A1 defines communication channels for equipment• Material and Material Data (MD) (Material Handshake)

• Performs simultaneous handoff of Material and its Data

• General Data (GD) (Data Handshake)• Performs generic data communication

• Both for host-equipment and equipment-equipment communications

• Simple “Memory Image Exchange” type of messaging• Better conformance even with low-end PLC

• SEMI A1.1 defines TCP/IP interface for SEMI A1• TCP/IP interface for both MD and GD Handshakes

• “Memory Image Exchange” messaging scheme• for better conformance with low cost control components such as PLC

• Direct mapping on TCP/IP• for higher compatibility among various control components

Concept of SEMI A1 PESCI

Definition Overview of SEMI A1/1.1

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HC

• Connections for production line (SEMI A1)• General Data between the host and equipment Data Handshake

• General Data between adjacent equipment Data Handshake

• Material and Material Data handoff between equipment Material Handshake

• Communication Protocol for SEMI A1 (SEMI A1.1)• Direct mapping on TCP/IP

• Connectivity between PLCs based on different Fieldbus

(Intra equipment communication may be done by own Fieldbus)

• PLC conformance (SEMI A1/1.1)• Messaging to exchange Memory Mapped Data

Concept of SEMI A1 PESCI

Connectivity and Interoperability

TCP/IP

Equip. Applications

SEMI A1.1

SEMI A1Fieldbus

A

TCP/IP

SEMI A1.1

SEMI A1Fieldbus

B

Equip. Applications

Fieldbus

A

TCP/IP

SEMI A1.1

SEMI A1

Equip. Applications

TCP/IP

SEMI A1.1

Fieldbus

B

SEMI A1

Equip. Applications

Fab System (Host)

VC VC VC VC

TCP/IP

SEMI A1.1System

SEMI A1

Host Applications

VC: Vertical Communication

HC: Horizontal Communication

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Handoff Handoff

HC HC

Concept of SEMI A1 PESCI

Equipment Model of SEMI A1 PESCI

Host

Equipment

VC

Preset of Recipe,

Route, etc.

Completion Event

Log (for analysis)

Exception

Handling

Material Data + Material

Start

Event

Material Data + Material

Autonomous Execution by Equipment

➢ Refer Material Data and follow to the

preset recipes

➔Reduction of load and cost of the host

Inter-Equipment CollaborationInter-Equipment Collaboration

Line Management by the Host

➢ Equipment setting, watch, log

➢ Material Data creation, trace, log

➔Information aggregation to the host

Standardized communication specification

➢ Direct use of TCP/IP

➢ Memory Block transfer for PLC

conformance

➔Connectivity, quick launch

Simultaneous handoff of Material and

Material Data

➢ Instance ID, Product ID, Log

➢ Material require equipment to

process according to the Material

Data

➔Object Oriented

Inter Equipment Communication

➢ Autonomous coordination along

with the line

➔Reduction of Host load/cost

VC: Vertical Communication

HC: Horizontal Communication

➢ Production Line Management in

Vertical

➢ Production Execution Control in

Horizontal (Multiple Tracks)

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Copyright © 2020 SEMI Japan Concept of SEMI A1 PESCI

General Data Communication (Vertical)

Interleave

Equipment Equipment Equipment Equipment

Broadcast

Response

Upstream and Equipment

Host and Equipment

Thread Management

Time

Host

SEMI A1General

DataSEMI A1

General

DataSEMI A1

General

DataSEMI A1

General

Data

Upper Tier Host

SEMI A1General

Data

Equipment and Equipment

Full Duplex

SEMI A1 supports various Addressing Modes for Vertical Communication

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SEMI A1 supports various Addressing Modes for Horizontal Communication

Concept of SEMI A1 PESCI

General Data Communication (Horizontal)

General Data

SEMI A1

General Data

SEMI A1

Equipment Equipment Equipment Equipment

General Data

SEMI A1

Host

Broadcast

Response

Specified Equipment

Adjacent Equipment Full Duplex

Time

Interleave

Thread Management

General Data

SEMI A1

General Data

SEMI A1

Autonomous Process Execution and Line Management by Equipment Chain

➢ Full Duplex

➢ Broadcasting

➢ Thread Management

➢ Interleaving Management

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Copyright © 2020 SEMI Japan Concept of SEMI A1 PESCI

Material and Material Data Transfer

Equipment Equipment Equipment Equipment

Material Data Material Data Material Data

Material Material Material

Object Oriented “Material and Material Data” Transfer throughout Equipment Chain

SEMI A1 SEMI A1 SEMI A1

Host

SEMI A1 supports simultaneous handoff of Material and Material Data

Multiple Tracks are controlled independently

➢ Object Oriented way

➢ Material carries its characteristics as Material Data

➢ Equipment refers Material Data and executes prespecified operation

Material Data

Material

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• Material Data is an identification tag of the WIP

• Consists of the following three sections• Instance ID Identifier of the individual material

• Class ID Identifier of the product class, the material belongs to

• Log Result record at each equipment• Applied parameters or measured results (value or classification)

• To be used as process log

• May also be used for notifications for process/route changes to the equipment after

Concept of SEMI A1 PESCI

Typical Example of Material Data (MD)

Field Mnemonic Definition Usage

Instance ID Material ID Identifier of this individual material To be used to identify this individual material

Class ID Product ID Identifier of Product this material to be To be used to select recipe or route

Version ID Identifier of Version of the product May be used for modification of recipe or route

Log Result E0 Result record at equipment 0 Control of process or branch in the equipment after

Result E1 Result record at equipment 1

Result E2 Result record at equipment 2

……. …….

Result En Result record at equipment n

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• Line Information• Full duplex data channel

• For “General Data”

• By “Data Handshake”

• Track Information 1 .. n• n tracks of half duplex transportation channels

• For “Material and Material Data”

• By “Material Handshake”

Concept of SEMI A1 PESCI

“Line” a Connection between EquipmentOne “Line” Consists of

➢ One Line Information channel

➢ Up to ten Track Information channels

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• Three Track Types• Uni-Direction Material flows to one direction

• Alternate-Direction Material flows both directions alternatively

• Bi-Direction Materials are swapped in one cycle

• Multiple Tracks per one Line

Concept of SEMI A1 PESCI

Track Types

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Multiple set

Single set

“Alternate-Direction”

Equipment A Equipment B

A(S/R) A(S/R)

: :

“Bi-Direction”

Equipment A Equipment B

X(S+R) X(S+R)

: :

S: “Send Port” R: “Receive Port” A: “Alternate Port” X: “Exchange Port”

“Uni-Direction”

Equipment A Equipment B

S R

: :

: :

A(S/R) A(S/R)

A(S/R) A(S/R)

X(S+R) X(S+R)

X(S+R) X(S+R)

R S

R S

S R

S R

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• Supports line topology that includes:

• Branch

• Merge

• Loop

• Turn back

Concept of SEMI A1 PESCI

Line Topology

25

Equipment

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• Handoff Step function

• Compatible with handoff mechanisms that require multiple handoff steps

• Conveyor, Robot, Isolation doors, etc.

• Operator assistance and recovery

• Pause – Recovery functions

• Operator or equipment initiated upon handoff exception

• Restart, Resume, Forward, Abort can be selected for recovery

Concept of SEMI A1 PESCI

Handoff Function

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Copyright © 2020 SEMI Japan Concept of SEMI A1 PESCI

Pizza Factory Analogy of SEMI A1 Application

Material Data:

➢My name is #132

➢I am going to be Pizza Type A

➢13:20.15 Started

Material Data:

➢My name is #132

➢I am going to be Pizza Type A

➢13:20.15 Started

➢13:20.45 12in. t=5mm @E1

Material Data:

➢My name is #132

➢I am going to be Pizza Type A

➢13:20.15 Started

➢13:20.45 12in. t=5mm @E1

➢13:21.30 Cheese and tomatoes

are put @E2

Material Data:

➢My name is #132

➢I am going to be Pizza Type A

➢13:20.15 Started

➢13:20.45 12in. t=5mm @E1

➢13:21.30 Cheese and tomatoes

are put @E2

➢13:24.55 3 minutes @E3

Work Order:

➢If Type A comes, I make

it t=5mm

➢If Type B comes, I make

it t=4mm

E1 E2 E3

Work Order:

➢If Type A comes, I bake it

for 3 minutes

➢If Type B comes, I bake

it for 2 minutes

Host

Work Order:

➢If Type A comes, I put

cheese and tomatoes

➢If Type B comes, I put

four different cheeses

Manufacturing Management:

➢I am the host.

➢I preset all work orders to my workers.

➢I start material and take all working log.

General Data: Autonomous Process Execution and Line Management by Equipment Chain

Material Data: Object Oriented “Material and Material Data” Transfer throughout Equipment Chain

General Data:

Hey, getting thick!

➔Ok, I adjust!

General Data:

I’m getting sick

➔Ok, I halt.

GD Handshake

MD Handshake

SEMI A1

GD Handshake

MD Handshake

SEMI A1

GD Handshake

MD Handshake

SEMI A1

GD Handshake

MD Handshake

SEMI A1

General Data:

Work Order Setting and Log

by the Host

GD Handshake GD Handshake GD Handshake

SEMI A1 SEMI A1 SEMI A1

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Functions of SEMI SMT-ELS Currently Available Functions of SEMI SMT-ELS

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• SEMI SMT-ELS Standard Suite supports both:• Host – equipment (Vertical) communication Point to point

• Equipment – equipment (Horizontal) communication Daisy chain

• SEMI SMT-ELS Standard Suite has the following tier structure• SEMI A2 SMASH Messages and behaviors for SMT assembly line

• SEMI A1 PESCI General-purpose equipment connection interface

• SEMI A1.1 TCP/IP Interface for PESCI TCP/IP Interface for SEMI A1 PESCI

Functions of SEMI SMT-ELS

Position of SEMI SMT-ELS Standards Suite

Equipment

SEMI A1/A1.1 PESCI

TCP/IP

Host Interface

E2E Interface

SEMI A2 SMASH

Equipment

SEMI A1/A1.1 PESCI

TCP/IP

Host Interface

E2E Interface

SEMI A2 SMASH

Host

SEMI A1/A1.1 PESCI

TCP/IP

Equipment Interface

SEMI A2 SMASH

Equipment

SEMI A1/A1.1 PESCI

TCP/IP

Host Interface

E2E Interface

SEMI A2 SMASH

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• Equipment management by the host• Inter-equipment network setting (can also be done manually)

• Route setting of Panel (can also be done manually)

• Equipment to equipment communication/cooperation• Panel Data reference mode setting

• Immediate product change

• Simultaneous transfer of Panel and Panel Data• On-demand product change by Panel attached Panel Data

• Traceability of a Panel

• Handoff functions by using conveyor• Handoff Step function which executes multiple step handoff

• Pause – Recovery function for exception handling

• Preconditions• SMEMA equipment conformance with Virtual SMASH Controller

• PLC conformance (not only for PC level controller)

Functions of SEMI SMT-ELS

Functions Currently SEMI SMT-ELS Provides

On Demand Product Change, Inspection Data Transfer, etc.

Equipment setting

Route setting

Log

Immediate Product change, etc.

Host-Equipment Communication

Inter-Equipment

Communication

Panel and Panel Data Transfer

Panel Data

Industry Network Independent Protocol

Use of SMEMA Generation Equipment

with SEMI SMT-ELS Controller

PLC Conformance

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Copyright © 2020 SEMI Japan Functions of SEMI SMT-ELS

Inter-equipment Network Setting/CheckingSetNetConfig message from the host sets IP Address and Port Number

to be used for equipment-equipment communication (Can also be set manually)

Inter-equipment communication is opened by this action

Inter-equipment

Network

Setting/Checking

SetNetConfig

GetNetConfig➔ CurrentNetConfig

GetNetStatus➔ CurrentNetStatus

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Route Setting of PanelSetRouteConfig message sets required number of Routes to each equipment

(can also be set manually)

Route is selected and used per Product or Inspection Result

Route 0

Route 1

Route 2

SetRouteConfig links logical Routes and the physical Tracks (lanes) of the equipment

Branch condition can also be setPanel Data

Panel

Route Setting of

Panel

SetRouteConfig

GetRouteConfig➔ CurrentRouteConfig

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Panel Arrival/Departure EventsPanelArrived and PanelDeparted messages from equipment provides Panel tracking.

Panel Data and user defined production data are reported to the host.

Panel Tracking

PanelArrived Panel Data

PanelDeparted Panel Data + User defined data

Panel Data

Panel

Panel and Panel Data

Handoff Handoff

HC HC

Host

Equipment

VC

PanelDepartedPanelArrived

Panel Data

Panel

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• The following Panel Data is defined

• Items can optionally be added per the requirements of each production line

Functions of SEMI SMT-ELS

Panel Data

Field Mnemonic Definition MD Mode Usage

M0 M1 M2

Instance ID Panel IX Panel Index used by SMASH C C C

Panel ID Panel Identifier C C R To be used for Panel identification

Top Bottom Specify the surface, top or bottom C C R

Class ID Product IX Product Index used by SMASH C C C

Product ID Product ID of the Panel C R R To be used for recipe or route selection

Panel Width Width of the Panel C R R To be used for conveyor width setting

Panel Length Length of the Panel C C C

Panel Thickness Thickness of the Panel C C C

Log Inspection Result Result from inspection equipment C C C Downstream equipment may use

User defined O O O

R: Required, C: Conditional, O: Optional

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• Panel and Panel Data are transferred simultaneously

• Assembly line can select M0 to M2 per Panel Data availability

Functions of SEMI SMT-ELS

Panel Data Reference Mode

Reference Mode M0 M1 M2 Note

Use For transition use

Panel Data is not

valid yet

Product

Management

Product and Panel

Managements

Panel Data to be

used

Not used

Top Bottom

Product ID

Panel Width

Panel ID

Top Bottom

Product ID

Panel Width

Trace of a Panel No No Yes Panel ID

Panel ID reader is

required

Top / Bottom No Yes Yes

On demand

Product change

No Yes Yes Product ID

Panel Width

Immediate Product

Change

Yes Yes Yes By horizontal

communication

Panel Handoff Yes Yes Yes

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Setting of Panel Data Reference Mode

Setting of Panel Data Reference Mode

SetMDReferMode (M0) No Panel Data reference

SetMDReferMode (M1) Refer Production ID

SetMDReferMode (M2) Refer Panel ID as well

SetMDReferMode sets Panel Data Reference Mode by using Horizontal Communication

Setting shall be done when no Panel is in the line

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Product Change per Panel Data Reference Mode

Immediate change of Product

M0: SetRouteSpec is used to change product setting change of the Route

M1, M2: SetRouteSpec is used to preannounce product setting of Panel queued for the Route

M0 Advance change of product setting to the Route by SetRouteSpec message

M1, M2 On-demand change of product setting of the Panel by Panel Data

on-demand change of Product

M0: Panel Data is not referenced

M1, M2: Panel Data is referenced to change product setting

Panel Data

Panel

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M0: No Panel Data ReferencePanel Data is transferred with the Panel but not referenced

(Transition use, equivalent function with SMEMA)

Route 0

Route 1

Route 2

Equipment deals the Panel with the Product specification set to the Route

Route Specification Setting

Panel Data is not referenced

Panel

SetRouteSpec is sent to the next equipment before changing to the new product

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M1, M2: Panel Data ReferencePanel Data is transferred with the Panel and referenced

Route 0

Route 1

Route 2

Route Specification Setting (Optional)

Panel Data can be acquired (especially in M2)

SetRouteSpec may be used as a preannouncement of product

change

Panel Data is referenced

Panel

Equipment deals the Panel with the Product specification brought by the Panel Data

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• Vertical Communication

• Production Program management (Recipe Management)

• Equipment production events

• Horizontal Communication

• Inter-Segment connection (such as carrier handling AGV interface)

Functions of SEMI SMT-ELS

Functions to be Added Shortly

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SEMI SMT-ELS ActivitiesOrganization, Activities and Document Control

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Copyright © 2020 SEMI Japan SEMI SMT-ELS Activities

SEMI SMT-ELS Organization

SEMI

SEMI

Standards

SEMI

Tech. Community

Automation Technology

(AT) Committee

A1 TF(SEMI A1)

Responsible to SEMI A1/A1.1 PESCI

SMT TF(Surface Mount Technology)

Responsible to SEMI A2 SMASH

Flow Manufacturing

(FM) Forum

A1 WG(SEMI A1)

Responsible to SEMI A1/A1.1 PESCI

SMT WG(Surface Mount Technology)

Responsible to SEMI A2 SMASH

Global Standardization organization

that is open for those who have the

same Technical Interest

The technical committee that

is responsible to flow shop

type manufacturing line

Responsible

Task Forces

Technology Community that

consists of the members who

has the same Business Interest

The forum for Flow shop

type manufacturing line

Responsible

Working Groups

Development and improvement of Standards

Ballot actions and adjudications

Application knowhow sharing

Hosting of Interoperability Testing

Industry interactions (promotion, feedback)

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SEMI

PDCA

Cycle

SEMI SMT-ELS Activities

Relationship between FM Forum and AT Committee

Standard

Requirements

Prototyping

Factory

Requirements

Interoperability

Testing

FM Forum

PDCA

Cycle

Standard

Development

Standard

Voting

/ Review

Standard

Proposal

Standard

Publication

AT Committee

Industry

SEMI StandardsSEMI Technology Community

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• Flow Manufacturing Forum hosts interoperability testing• Interoperability should be managed by the forum members since SEMI should be

neutral and is not in the position to test or certificate

• Two testing categories• Equipment Level Testing

• Package Level Testing

• Participants who appropriately performed the testing with multiple proven

members are posted to SEMI SMT-ELS homepage

• Please visit SEMI SMT-ELS homepage for up-to-date information

SEMI SMT-ELS Activities

Interoperability Testing Support

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• SEMI SMT-ELS homepage

• http://www1.semi.org/jp/SEMI_SMT-ELS

• SEMI A1 PESCI homepage

• http://www1.semi.org/jp/SEMI_A1_PESCI

• Association Contact

• Junko Collins, Director, Standards & EHS /SEMI Japan

• Email: [email protected]

SEMI SMT-ELS Activities

For More Information

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Thank you!SEMI SMT-ELS