Sem

Materials Characterization Labwww.mri.psu.edu/mcl

Scanning Electron Microscopy Mark S. Angelone John Cantolina

MCL [email protected] [email protected]

JUNE 22, 2005


250 MRLAugust 179:45 AMParticle Characterization

114 MRI BldgAugust 249:45 AMX-ray photoelectron spectroscopy (XPS/ESCA)

114 MRI BldgAugust 2411:00 AMAuger Electron Spectroscopy (AES)

541 Deike Bldg.July 279:45 AMChemical analysis (ICP, ICP-MS)

541 Deike Bldg.August 109:45 AMSmall angle x-ray scattering (SAXS)

114 MRI Bldg August 39:45 AMAtomic Force Microscopy (AFM)

250 MRL Bldg.July 209:45 AMOrientation imaging microscopy (OIM/EBSD)

114 MRI BldgJuly 1311:00 AMTEM sample preparation

114 MRI BldgJuly 139:45 AMFocused Ion Beam (FIB)

250 MRL Bldg.July 610:15 AMHigh temperature sintering lab (20 min lecture only)

250 MRL bldg.July 69:45 AMDielectric Characterization (25 min lecture only)

250 MRL Bldg.June 299:45 AMX-ray Diffraction (XRD)

541 Deike Bldg.June 2211:00 AMAnalytical SEM

541 Deike Bldg.June 229:45 AMScanning electron microscopy (SEM)

114 MRI BldgJune 159:45 AMTransmission Electron Microscopy (TEM/STEM)

250 MRL Bldg.June 89:45 AMThermal analysis (TGA, DTA, DSC)

LocationDateTimeTechnique

NOTE LOCATIONS: The MRI Bldg is in the Innovation Park near the Penn Stater Hotel; MRL Bldg. is on Hastings Road.More information: www.mri.psu.edu/mcl

Summer Characterization Open HousesSummer Characterization Open Houses


BeaverStadium

Park Ave.

Park Ave.

Porter RoadPollock Road

University Drive

College Ave.

Shortlidge Road North

Bur ro w

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Centre Community

Hospital

E&ES Bldg:SEM

Hosler Bldg:SEM,AFM,ESEM, FE-SEM, EPMA, ICP, ICP-MS,BET, SAXS

MRI Bldg:XPS/ESCA, FIB SIMS, TEM, HR-TEM, FE-Auger, AFM, XRD

Atherton Street

(322 Business)

MRL Bldg:SEM, XRD, OIM, DTA, DSC, TGA, FTIR, Raman, AFM, Powder, dielectric, prep, shop, IC, UV-Vis

Hastings Road

Penn Stater Hotel

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Materials Characterization Lab Locations

Route 322

I-99 00

Steidle Bldg:Nanoindenter

Deike Bldg:


• Facilities/Instruments• User Training• Operators/Analyst for hire• 24/7• Online bookings• User fees• website/contacts to get started

MCL SERVICES


Things To Do Today

― Overview of SEM Techniques― specific applications from Penn State materials― discussion of MCL capabilities― how to get started ― campus resources― a brief lab tour


• MCL SEM CAPABILITY

• CSEM

• VARIATIONS

• MICROANALYSISLater this morning


SEM VARIANTS

• IMPROVE RESOLVING POWER•Theoretical Limits ˜ 5 – 7 Å•LaB6•Field Emitter

• EXPAND SAMPLE RANGE•Insulating•Out gassing•WET•Beam sensitive

• EXTEND INFORMATION•SE type/BSE typediscriminating detectors

•XRAY: EDS, WDS•CL•BSED/OIM•Dynamic Experiments(Temp, Humidity, Atmosphere…..)


CSEM

(Conventional Scanning Electron Microscopy)

• W – Hairpin Emitter

•M H V

•SE via ETD

•3-4 nm P-P Resolution

•50X – 30,000X Typical

•Up to 200mm sample size typical

•MHV compatible electrically conducting samples


SE

B

B

BB B B

Beam

PM LGS

F

Specimen

-50 V to+ 250 V

+ 12 kV


CSEM


• W – Hairpin Emitter

•M H V

•SE via ETD

•3-4 nm P-P Resolution

•50X – 30,000X Typical

•Up to 200mm sample size typical

•MHV compatible electrically conducting samples


CSEM


• FEI/PHILIPS XL20, XL30• HITACHI 3500N• HITACHI 3000

• ADDITIONAL INFORMATION:• BSE (H 3500N)• EDS

• XL20 Z > 11, spectra only• H3500N Z > 5, spectra, maps, etc

• BSED/OIM (H3500N)

• USER FEATURES:• Digital Images (All)• Print Images (XL20)• Motorized Stage (H3500N)

• APPLICATIONS:• Aggregate microstructures• Semi conductor device structures• Corrosion/weathering• Materials defects


FESEM(Field Emission SEM)

• Field Emission Tips• Cold• Schotky• Thermal

• UHV

• Short W.D. SE Detectors

• 1nm P-P Resolution

• 500X – 450,000X +

• JEOL 6700F •SE only

• 80mm motorized stage

• Small samples typical (< 15mm)

• LV-SEM (2-3nm @ 1kV• Beam sensitive samples• Insulators• Surface contrast

• Applications


Carbon 1s


ESEM(ENVIRONMENTAL SEM)

• W-Hairpin• 3-4 nm P-P• 25X – 30,000X Typical• 100 mm Stage

Same as CSEM


ESEM(ENVIRONMENTAL SEM)

• W-Hairpin• 3-4 nm P-P• 25X – 30,000X Typical• 100 mm Stage

Same as CSEM

• 3 VAC MODES• HIGH (CSEM)• LOW (LVSEM)• WET (ESEM)

• FEI QUANTA 200

• Information Sources•SE/BSE All modes• EDS Z> 5 spectra, maps, quant• Charge contrast (?)

• USER FEATURES• Great GUI• Digital Images/Spectra• Image Analysis• IR Chamber View• Heating (1000°C)

• APPLICATIONS• All CSEM• Insulators• Out Gassing•Wet Mode• Dynamic Heat/Cool/Wet


Insulators


Out Gassing


Wetting


DynamicHeat/Cool/Wet


www.mri.psu.edu/mcl

Mark Angelone310 Hosler Bldg

[email protected]

Sem

Business

Transcript of Sem