Conventional SEM (C)SEM Environmental SEM ESEM material em paper… · Conventional SEM "(C)SEM"...

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1 2 Conventional SEM "(C)SEM" Environmental SEM "ESEM"

Transcript of Conventional SEM (C)SEM Environmental SEM ESEM material em paper… · Conventional SEM "(C)SEM"...

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Conventional SEM "(C)SEM" Environmental SEM "ESEM"

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Increasing chamber pressure

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temperature just above 0°C reduces as much as possible the chamber pressure while still preventing sample freezing(Ice formation may destroy the microstructure)

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Dust Mite

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KCL Crystals grown from gas in ESEM at 600°C

Phase transitions

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KCL Crystals grown from gas in ESEM at 600°C

Phase transitions

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HydrationProcesses

Salt dissolving in water condensed from the ESEM environment

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PASTA Party

The future of scanning (electron) microscopy…?

An Introduction to Helium Ion Microscopy and its Nanotechnology Applications

John A. Notte*, Lou Farkas, Raymond Hill, Bill Ward*

ALIS Corporation, 10 Technology Drive, Peabody, MA 01960, USA, [email protected]

Microscopy today (2006)

The principle: field ion microscope as a source

Pyramidal tip

round tip

30kV Electrons vs He Ions

5kV Electrons vs 30kV He

(top) Secondary electron SEM image of alignment cross.(bottom) Secondary electron ALIS image of same alignment cross

• small interaction volume for SE-I

• almost no SE-II

• high SE-Yield (currents in the fA-pA range)

• SE-Yield depends on atomic number z, material contrast

Rutherford back-scattered ions(left) Secondary electron image of a solder bump showing topography, but not much material difference.(right) RBI image of same solder bump clearly showing the difference between areas of tin (dark) and lead (bright).

Laser shot on coated material

SE RBI

SE RBI

RBI are not affected by charging effects

ALIS RBI Images: No Charging Artifacts even on Uncoated Biological Samples

RBI images show no signs of charging on insulating materials. Sample is Uncoated Benthic Foraminifera courtesy of WHOI.