Conventional SEM (C)SEM Environmental SEM ESEM material em paper… · Conventional SEM "(C)SEM"...
Transcript of Conventional SEM (C)SEM Environmental SEM ESEM material em paper… · Conventional SEM "(C)SEM"...
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temperature just above 0°C reduces as much as possible the chamber pressure while still preventing sample freezing(Ice formation may destroy the microstructure)
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KCL Crystals grown from gas in ESEM at 600°C
Phase transitions
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HydrationProcesses
Salt dissolving in water condensed from the ESEM environment
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PASTA Party
The future of scanning (electron) microscopy…?
An Introduction to Helium Ion Microscopy and its Nanotechnology Applications
John A. Notte*, Lou Farkas, Raymond Hill, Bill Ward*
ALIS Corporation, 10 Technology Drive, Peabody, MA 01960, USA, [email protected]
Microscopy today (2006)
5kV Electrons vs 30kV He
(top) Secondary electron SEM image of alignment cross.(bottom) Secondary electron ALIS image of same alignment cross
• small interaction volume for SE-I
• almost no SE-II
• high SE-Yield (currents in the fA-pA range)
• SE-Yield depends on atomic number z, material contrast
Rutherford back-scattered ions(left) Secondary electron image of a solder bump showing topography, but not much material difference.(right) RBI image of same solder bump clearly showing the difference between areas of tin (dark) and lead (bright).
Laser shot on coated material
SE RBI
SE RBI
RBI are not affected by charging effects
ALIS RBI Images: No Charging Artifacts even on Uncoated Biological Samples
RBI images show no signs of charging on insulating materials. Sample is Uncoated Benthic Foraminifera courtesy of WHOI.