Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe...

62
Scanning Probe Techniques MSN506 notes

Transcript of Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe...

Page 1: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Scanning Probe Techniques

MSN506 notes

Page 2: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Imaging

• There are two approaches to microscopy– Parallel

• All pixels of an image is recorded simultaneously, or directly viewed by eye

– Sequential• Information from each pixel is collected

sequentially and recorded electronically, then the image is reconstructed

Scanning probes

Page 3: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Scanning probes

• Sequential data collection• A sharp tip interacting with the sample

surface• Relative tip location on the sample is

scanned in XY and Z• Interaction is recorded as a function of

location and other parameters• Image is reconstructed directly from

measured signals or after data processing

Page 4: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

History of scanning probes• Profilometry (one dimensional topography)• Scanning Tunneling Microscope• Atomic force microscope

– A large number of spin-off variants• Scanning electrical probes

– Scanning Hall probe microscopy– Scanning Single electron transistor microscopy– Etc…

Page 5: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning
Page 6: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning
Page 7: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

STMScanning Tunneling Microscope

Page 8: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning
Page 9: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning
Page 10: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Tunneling current: High resolution from a blunt tip ?

Page 11: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning
Page 12: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning
Page 13: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

STS (Scanning Tunneling Spectroscopy)

• Feedback is momentarily turned off at a specific location

• Rapidly, the voltage is swept and current is recorded (IV curve)

• The quantity (dI/dV)/(I/V) is proportional to the density of states on the sample (under certain assumptions about the tip)

• Feedback is resumed to avoid a tip-crash due to drift

Page 14: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

STS (Scanning Tunneling Spectroscopy)

Appl. Phys. Lett., Vol. 73, No. 1, 6 July 1998

Page 15: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

STS (Scanning Tunneling Spectroscopy)

Page 16: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

STS (Scanning Tunneling Spectroscopy)

Electronic structure of

atomically resolved

carbon nanotubes

Jeroen W. G. Wildoer*, Liesbeth C. Venema*,

Andrew G. Rinzler†, Richard E. Smalley† & CeesDekker

Page 17: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

With STM, Imaging is possible …

• In air,• In fluids (elechtrochemistry)• Under vacuum• Under a large temperature range (mK to

1000 K)• … only on conductors

Page 18: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

AFM

Page 19: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Profilometer• A stylus is dragged over a surface and

interaction is measured

Record player

Page 20: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

AFM Cantilever Springs

Spring Constant N/m

Resonance Frequencies

Typical values 0.01 to 50 N/m

Typical 10 Khz to 500 Khz

Page 21: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Deflection Readout in AFM

• Beam deflection• Fiber optic interferometer• Piezoresistive

Page 22: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Deflection Readout in AFM

• Beam deflection

Quadrant photodiode(4 photodiodes closely placed)

Focused or Partly collimated laser

Signal proportional to deflectionLarge dynamic range

10-4 Angstroms/sqrt(Hz)sensitivity achievable

Page 23: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Fiber optic Fabry-Perot interferometer in AFM

Periodic output as a function of distance

10-6 Angstroms/sqrt(Hz) sensitivity achievable

Page 24: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Piezoresistive readout• Piezoresistance: resistance changes with

applied stress

Piezocoefficient

stress

For a rectangular cantilever beam of dimensions L, w, tStress is given by

Simple but not as sensitiveRequires extra fabrication stepsDuring fabrication of microcantilevers

Page 25: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Feedback

• Tip-sample separation must be kept constant during imaging

Page 26: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Tip-Sample Mechanical Interaction

• Contact• Interminent contact (tapping)• True noncontact• Long range interactions

Page 27: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Contact between a sharp tip and a surface

• Herzian Contact theory is frequently used

Using elastic properties of the tip and surface materials, a relation between the force felt by the tip and the sample as a function of tip sample separation can be calculated

Page 28: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Simplest tip-sample interaction model

Tip sample separation

surface

Force

Infinitely hard surface

Page 29: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Simplest tip-sample interaction model

Tip sample separation

surface

Force Finite hardness surface(tip can indent the surface)

Page 30: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Van der Waals forces

These are attractive forcesDue to polarization of the Tip and the sample surface atoms

Page 31: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Electrostatic Forces• Long range attractive forces due to

charges on the tip and the sampleV

Energy = ½ C(z) V2

Force = - d Energy / dz Tip-sample capacitance can be accurately modelled

Page 32: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

A large number of force models

Force depend on many factors including tip-geometry, tip-sample separation, bias voltage, ambient atmosphere, presence of surface water film etc.

Page 33: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Typical Force-Distance curve

Page 34: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Directional Forces• Vertical and lateral forces can be

simultaneously imaged

Lateral forces can be interpreted as frictional forces

Page 35: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Interminent contact / Tapping AFM

• Cantilever oscillation amplitude and phase is measured

• Feedback is maintained to keep the oscillation amplitude fixed

• Amplitude, Phase and topography can be imaged simultaneously

Page 36: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Cantilever Mechanical Resonance(s)

Upon interaction with the sample, resonance properties change

Page 37: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Cantilever Mechanical Resonance(s)

Q factor (dissipation) is an importantFeature of the cantilever oscillation

Determines how much the oscillatorWill respond to an on-resonance excitation

Active Q-Control only affectsspeed response, does not change ultimate force sensitivity

Page 38: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Cantilever Mechanical Resonance(s)

Page 39: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Tapping mode AFM

Robust to DC drifts in the deflection detection system and electronicsVery small interaction forces compared to contact modeTip generally retains sharpness longer

Page 40: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Phase in tapping mode AFM

Freq. Shift

Page 41: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Phase in tapping mode AFM

Phase can be related to the stiffness of the sample

Page 42: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Phase in tapping mode AFM

Page 43: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Noncontact AFM

Cantilever is made into a self-oscillator (phase is locked by an external circuit)Can be extremely sensitive, and resolution can be compared to STMIn UHV

Page 44: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Noncontact AFMTrue atomic resolution generally only possible with true noncontactmodeIn UHV

Page 45: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Noncontact AFM

Page 46: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Effect of Ambient Conditions• Vacuum

– High Q (10000), no water film, true non-contact imaging, high resolution

• Air– Moderate Q (500), good tapping mode

performance, nanometer range XY resolution• Fluid

– Low Q (10), Q control needed for tapping mode, excitation problematic, contact mode imaging, good for biological applications

Page 47: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Spatial Resolution• XY resolution generally limited by tip radius

(typically 5 to 15 nm)• Z resolution limited by scanner electronics

– Noise performance, mechanical design, DAC resolution

• In true noncontact mode, on a flat surface, XY resolution is sub-Angstrom– A single adatom on the tip dominantly

interacts with the sample

Page 48: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning
Page 49: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning
Page 50: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Resolution• Highest resolution generally possible on a

flat substrate

Mica and graphite are generally used asflat substrates

Due to their layered structure, they cleavealong single planes

Page 51: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Mica

Page 52: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Example Applications of AFM

Page 53: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Other Scanning probe microscopes

• Electrostatic forces– Surface potentials and surface charge– Workfunction imaging (kelvin probe)

• Magnetic forces• Scanning Hall Probes• Scanning single electron transistors• Thermal imaging• Near field optical imaging• Tip enhanced Raman

Page 54: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Electrostatic/magnetic force imaging

Double pass scheme (lift mode etc.)

Page 55: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Electrostatic Imaging• Sub-electronic charge sensitivity

Surface potential imaging discriminates Au and Ag nanoparticles

Page 56: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

MRFM• Tries to measure the NMR or ESR signal

for imaging in 3D

Page 57: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

MRFM• Tries to measure the NMR or ESR signal

for imaging in 3D

Page 58: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Scanning Near Field Optical

Left : ‘aperture’ SNOM with optical fibres. Right : ‘apertureless’ (‘scattering’) SNOM.

Page 59: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Tip enhanced Raman

Page 60: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

Tip enhanced Raman

Plasmonic enhancement

topo

raman

Page 61: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

ForceDistance Spectroscopy

Page 62: Scanning Probe Techniques - Bilkent Universityaykutlu/msn/hw/msn506SPM.pdf · Scanning Probe Techniques MSN506 notes. Imaging • There are two approaches to microscopy ... – Scanning

ForceDistance Spectroscopy