Positioned for thenext challenge inultra-pure filtration.

mott corporationH i g h P u r i t y P r o d u c t s

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5µm (x100)

Mott Corporation.First and foremost, a supplier of improvement.

Before getting into products,let’s talk about possibilities.

Seems like a strange way to lead into aproduct brochure. Especially when there’sso much to say about Mott porous metalfilters and flow restrictors. But identifyingthe goal first, and then either choosing ordevising the best possible solution is howour High Purity product family began, andhow it continues to grow.

What are your biggest needs? Is there arecurring challenge somewhere? WhileMott porous metal can’t solve all theproblems within a fab, it can do a lotmore than people realize – often betterthan any other media, and sometimesreplace altogether different technologies.

Making strides in, and beyond,high-purity filtration.

Semiconductor manufacturers are discover-ing many uses for Mott porous metaloutside of the gas line. Current uses –either in production or at some stage ofdevelopment – include:

• CMP (solid and liquid)• Vacuum platens• Heat transfer• Media retention• Wafer transport• Gas and liquid dispersion

See howother industries benefit.

Outside of the high-purity arena, Mottproducts are used in countless applications,ranging from precious-metal catalyst recoveryin petrochem to gas/liquid contacting in foodprocessing facilities. And why is that impor-tant to someone producing wafers? BecauseMott is a consummate problem solver. Andit just so happens that our raw material –porous metal – lends itself to a multitudeof solutions.

That’s been our mode of operation since1959. A complete and exclusive dedicationto the development, application, and refine-ment of one type of media, and one only –porous metal. In 1989, we brought thatmedia for the first time to semiconductormanufacturing, originally for the purpose offiltration. Now we’re adding new uses. Andeach time, it begins with the same type ofquestion: “Is there a way…?”

Hastelloy is a registered trademark of Haynes International, Inc., Teflon® is a registered trademark of E. I. DuPont Nemours & Co., Inc.

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WhatmakesMott porousmetalmedia themedia of choice.

When it comes to strength, precision,efficiency and longevity, no filter mediaworks more reliably than Mott porous metalmedia. This unique substance makes Mottfilters highly efficient and virtually indestruc-tible, offering semiconductor manufacturersa whole new level of comfort, coupled withthe tremendous savings of eliminating annu-al change-outs. For years, users of alternativehigh-purity filtration media have switchedover to Mott filters for the distinct advantagesthey provide:

• Unique high-flow nickel media –GasShield® PENTA® POU filters providethe high flow rates and low ∆P of Teflon®

filters, with all the strength and perfor-mance benefits of Mott porous metal.

• Uniform, high-precision porosity –Strictly controlled pore sizes are the resultof Mott’s patented NanoMetal® Mediaprocess.

• Depth filtration – The compacting andsintering process arranges pores randomly,creating a labyrinth of irregular pathswhich more effectively capture particlesthat enter the media.

• No media migration – “Solid-statediffusion bonding” holds filter mediatogether at the molecular level, makingit virtually inseparable, even under theharshest conditions.

• High-temperature capabilities –Mott all-metal construction withstandssustained temperatures as high as 450°C.

• Corrosion resistance – Mott filter ele-ments constructed of corrosion-resistantalloys such as nickel and Hastelloy® C-22withstand the harmful effects of corrosivegases like Hydrogen Bromide andTungsten Hexafluoride.

• Tolerance of high differentialpressures – Mott filters provide thehighest level of protection, with point-of-use filters capable of enduring upto 5000 psig for special applications witha maximum ∆P of 1000 psid.

• Wide selection of designs andmaterials – Mott offers the widestselection of all-metal filters for high-purityapplications. There’s 316L stainless steel,nickel and Hastelloy C-22 constructionto ensure chemical compatibility. Andyou can choose from standard in-linepoint-of-use, bulk, utility, IGS, high-flowand low-volume filters, plus inlineGasketFilters™ and flow restrictors. Afull product offering, which means Mottis your best single source for obtainingthe precise all-metal filter you require.

GasShield filters feature all-metal,all-welded construction to provideyears of reliable performance.

Mott Porous Metal.The ultimate media for high-purity filtration.

Guaranteed.

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• In-line point-of-use filters – GasShieldpoint-of-use filters are available in over 20standard designs, constructed of 316Lstainless steel, nickel, or Hastelloy C-22,and rated for flows up to 600 slpm andinlet pressures as high as 5000 psig.

• IGS filters – Mott offers a full line offilter and flow restrictor products indesigns compatible with the gas systeminterfaces presently gaining acceptancein process tools, gas cabinets and valvemanifold box installations. Our IGS filtersare designed to provide greater systemflexibility coupled with ease of change-outand reduced leadtimes. Filters are offeredin 316L SS, nickel and Hastelloy C-22 forgas compatibility and range in flow ratesfrom 10 to 100 liters per minute.

• The high-flow metal alternative –When high flow is a high priority, Mottoffers the ideal solution – GasShieldPENTA® point-of-use filters. PENTA filterelements are constructed from Mott’sunique high-flow nickel media that com-bines true 9-log filtration with a high flowand low ∆P – in compact housings assmall as 3.31" long. PENTA filters offerthe key benefits of Teflon® with thestrength, long life and assurance thatcomes only from Mott.

• Reliability, with room to spare – Testshave shown that it would take a constantflow of 300,608 particles per liter at 10slpm to reach full GasShield capacity infive years. Yet in the field, an actual conta-mination level in a very unclean systemmight be 10 particles per cubic ft., or0.353 particles per liter – equating to atremendous level of protection, even withyears of continuous use.

The industry’slargest selectionof all-metal, highpurity gas filters.

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• Bulk and utility filters – Like theirpoint-of-use counterparts, GasShield bulkand utility filters are made to last, offeringreliable main-line filtration for years.Designed to accommodate flows from1000 slpm to 25,000 slpm, GasShieldbulk filters are available with 316Lstainless steel or nickel filter elements.Additional bulk designs can be providedfor applications involving higher pressuresor highly corrosive gases.

• Where there’s a special need, expecta GasShield solution – The GasShieldfilter line also includes products designedfor highly specific purposes or positionsin the gas line – such as the compactall-nickel GasketFilter that fits inside a1/4" face seal fitting. And the POUDiffuser which reduces the velocityof purge gas to ensure a uniform andlaminar flow of gas into the contaminatedenvironment.

• Flow restrictors – Mott also offers HighPurity Flow Restrictors, in which porousmetal filter elements are designed intodouble-male face seal fittings to provideconsistent, long-lasting, wear- and plug-resistant flow control – with a minimalfootprint to conserve space.

GasShield Particle Capacity Test

Filter Tested: GasShield POU-05-SV1

Flow Rate: 10 slpm

Filter Area: 2.2 in.2

Total particle challenge:3.6 x 1012 particles/in.2

(7.9 x 1012 particles)

Downstream particles: 0

Pressure drop increase: 1.38 psid

Particles required to reach challengecapacity, running at 10 slpm, 24 hours/day, for 5 years: 300,608 particles/liter

Particles normally encountered in5 years: < 0.353 particles/liter

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A clean processfrom start to finish.

Ensuring the best performance, andmaximumout-of-box cleanliness.

Every GasShield filter is manufactured, testedand packaged in a Class 100 clean roomenvironment. Fully documented processsteps are strictly followed under controlledconditions to keep out contaminants suchas hydrocarbons, and reduce post-installationpurge and dry-down times for increasedproductivity. Filters with as little as 10 ppbmoisture are available.

Themost stringent quality control.

We’ve always been Mott’s toughestcustomer.

A single Mott filter may be subjected toas many as 30 quality-control measures. Andto meet today’s standards, computer-baseddocumentation and scheduling are inte-grated with Mott’s manufacturing databaseto ensure process consistency and timelyproduction.

Prior to shipment, GasShield filters are100% pressure-burst tested and helium leakrate tested. Each filter is then pulsed withclean dry nitrogen.

For even greater assurance, independenttesting laboratories evaluate the performanceof GasShield filters, and submit their findingsin detailed reports. Suffice it to say that bythe time any GasShield filter arrives at yourlocation, it will have proven its integrityseveral times over.

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Mott’s state-of-the-art TIG welders, operated in aClass 100 clean room, join filter housings andelements with the utmost precision.

Designs by request – creating newMott solutions.

With dozens of GasShield configurations, there’s a verygood chance Mott already has the solution you need.Yet it’s also possible that yours is an altogether new kindof challenge. If that’s the case, we’re more than happyto work with you.

Developing new products has been the cornerstoneof Mott’s growth and success. Working side-by-side withcustomers, often applying porous metal where it’s neverbeen applied before, has led to major advancements incontrolling costs and increasing manufacturing efficiency.Mott has, for example, worked with specific customerrequirements to create load lock chamber diffusers fortheir individual tools. So, if you don’t see what you needhere, or in one of our catalogs, ask us.

If anyone can customize a porous metal solution tothe task at hand, it’s Mott.

Think of the possibilities.

Microscopic evaluation in the development lab.

For thorough evaluation of new products, and periodicspot-checks of existing ones, Mott maintains a Develop-ment and Testing Laboratory. Both scanning electron andoptical microscopes, along with computer-controlledporometers, are used to inspect pore size, shape, anddistribution. Bench tests can be run with inert and corro-sive gases to verify gas/media compatibility, and to ensurecorrosion resistance in the field. Particle counters, particle-size analyzers and a fully instrumented test stand are usedto evaluate filter performance.

Asignificant investment inR&D, year after year.

Mott continuously supports Research and Developmentefforts to provide solutions based on best-available indus-try technologies. And because these technologies changefrequently, we work hard to stay abreast of – and evendrive – advancements. There is simply no other way tomaintain our commitment to meeting customer require-ments with the best means the industry has to offer.

A dry-down box is used toproduce filters with lessthan 10 ppb moisture.

Horiba laser-scattering particlesize distribution analyzer.

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