Plasma Cleaner
description
Transcript of Plasma Cleaner
![Page 1: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/1.jpg)
23-Aug-06 mgbersch
Plasma Cleaner
Instructions for Use
![Page 2: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/2.jpg)
23-Aug-06 mgbersch
Fischione 1020 Plasma Cleaner
![Page 3: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/3.jpg)
23-Aug-06 mgbersch
General• Most of the cleaning process with the 1020 are
automatic.• The process is started by entering a cleaning
time.• Once the process starts the specimen chamber
will automatically pump and initiate plasma cleaning. The chamber will remain under vacuum until vented by the user.
• VENTING TAKES 3 – 4 MINUTES. TURBO PUMP MUST SPIN DOWN.
![Page 4: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/4.jpg)
23-Aug-06 mgbersch
Gas Supply• Make sure the gas
supply is on and there is gas.
• Gas is an Argon – Oxygen mixture.
• NOTE, just check the gauge. Do NOT adjust ANY valves.
![Page 5: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/5.jpg)
23-Aug-06 mgbersch
Check Control Panel• Normally the
specimen holder will be under vacuum.
• First check the control panel.
• If the “HIGH VACUUM” light is illuminated, you must vent the specimen chamber.
![Page 6: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/6.jpg)
23-Aug-06 mgbersch
Venting the Specimen Chamber• Press VENT on the
control panel.
• The VENTING LED will illuminate.
• It takes 3 – 4 minutes to vent the chamber.
![Page 7: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/7.jpg)
23-Aug-06 mgbersch
Chamber at Atmosphere• Wait until the ATMOSPHERE LED is illuminated
before opening chamber.
![Page 8: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/8.jpg)
23-Aug-06 mgbersch
Remove the plug• After the chamber is
vented, remove the plug from the TEM specimen port.
• Place the plug in the plastic bag on top of the plasma cleaner.
• The chamber is now ready for insertion of the TEM specimen holder.
![Page 9: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/9.jpg)
23-Aug-06 mgbersch
Insert TEM Specimen Holder
• Insert the TEM specimen holder into the chamber.
• The specimen holder may come to a stop but may not be fully inserted (see image). Do not push on the specimen holder at this time. WAIT.
![Page 10: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/10.jpg)
23-Aug-06 mgbersch
Set Cleaning Time• Using the number pad
on the control panel input the cleaning time. Cleaning time for most TEM specimens is 30 sec to 5 minutes.
• Press SET to start the pump down and cleaning cycle.
![Page 11: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/11.jpg)
23-Aug-06 mgbersch
Check Holder and Clean Cycle• When the pumping
cycle starts the holder should then move into the specimen chamber. CHECK THIS.
• When cleaning is underway, the gas mixture will luminesce. This can be observed through the window.
![Page 12: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/12.jpg)
23-Aug-06 mgbersch
Clean cycle end and vent• The timer will count
down as the cleaning cycle continues. At zero cleaning will end but the chamber remains under vacuum.
• To Vent, press VENT.• REMEMBER: 3 to 4
minutes to vent chamber.
![Page 13: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/13.jpg)
23-Aug-06 mgbersch
Shut Down # 1• Remove the holder
from the specimen chamber.
• Replace the Plug
![Page 14: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/14.jpg)
23-Aug-06 mgbersch
Shut Down # 2• Press PUMP to pump
down the chamber.• Chamber is left under
vacuum
• Wait and make sure the chamber returns to HIGH VACUUM
![Page 15: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/15.jpg)
23-Aug-06 mgbersch
APPENDIX• An accessory is
available for inserting SEM stubs (FEI type).
• A vacuum pumping station for TEM holders is also avaible.
![Page 16: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/16.jpg)
23-Aug-06 mgbersch
Remove the TEM Port• The TEM port must be
removed before the SEM specimen holder can be placed in the cleaning chamber.
• Unscrew the black retaining ring and remove.
• Take out the TEM port and place on a clean surface. Be careful of, and check the large O-ring
![Page 17: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/17.jpg)
23-Aug-06 mgbersch
Insert the SEM specimen holder• Insert the SEM
specimen holder. Be careful of the large O-ring.
• The holder sits flushin the opening when fully inserted.
![Page 18: Plasma Cleaner](https://reader033.fdocuments.us/reader033/viewer/2022061610/56815a9c550346895dc81cde/html5/thumbnails/18.jpg)
23-Aug-06 mgbersch
High Vacuum Docking Stations• TEM holders can be
kept under vacuum in the TEM Docking station.
• To use:– Contact CAF
personnel.