National Nanotechnology InitiativeInteragency Grand Challenge Workshop:

Instrumentation and Metrology for Nanotechnology

Summary Day One: Tuesday, January 27, 2004

• Keynote Session

• Plenary Session

• Short Reports from other NNI Grand Challenge Workshops on Metrology and Instrumentation Issues

• Introduction to Breakouts

• Lunch (working)

• Breakout Sessions Tracks 1 - 5: Current State of the Art

– Track 1 - Instrumentation and Metrology for Nanocharacterization– Track 2 - Instrumentation and Metrology for Nanomechanics – Track 3 - Instrumentation and Metrology for Nanoelectronics, Photonics, and

Magnetics– Track 4 - Instrumentation and Metrology for Nanofabrication – Track 5 - Instrumentation and Metrology for Nanomanufacturing– Track 6 - Crosscut - Computational Science Issues

• Networking Reception – (postponed because of ice storm)

Summary Day Two: Wednesday, January 28, 2004

• Plenary Session

• Breakout Sessions: Future Needs, Barriers and Grand Challenges

• Working Lunch

• Challenges Breakouts

• Networking Reception - Advanced Measurement Laboratory Foyer– Ahmad Soueid, HDR – Details of the NIST Advanced Measurement Laboratory

Summary Day Three: Thursday, January 29, 2004

• Review of Breakouts

• Discussion, Holes, Questions and Summary Charge

• Tracks 1-5 Report Preparation

• Track 6 Breakout Session • Crosscut – Computational Science Issues

• Lunch (working) All tracks

• Complete Report Preparation

Acknowledgements• Clare Allocca (NIST)• James Arnold (NASA)• Avram Bar-Cohen (U MD.) • Kristin Bennett (DOE)• Marylyn Bennett (Texas Instruments)• Ronald Boisvert (NIST)• Altaf H. (Tof) Carim, (DOE)• Richard Cavanagh (NIST)• Hongda Chen (USDA)• Julie Chen (NSF)• Charles Clark (NIST)• Stephanie Hooker (NIST)• Stephen Hsu (NIST)• Bryan Huey (NIST)• Alan Karr (National Institute of Statistical

Sciences)• Robert Keller (NIST)• John Kramar (NIST)• Jorn Larsen-Basse (NSF)• T. J. Mountziaris (NSF)• Jon Pratt (NIST)• Nora Savage (EPA)• Nell Sedransk (NIST)

• Kevin Lyons (NIST)• Mark Lundstrom (Purdue)• David Seiler (NIST)• Richard Silver (NIST)• Robert Shull (NIST)• Douglas Smith (NIST)• Dennis Swyt (NIST)• Guebre Tessema (NSF)• Peter Votruba-Drzal (NIST)• James Whetstone (NIST)• David Wollman (NIST)• Xiang Zhang (UCLA)• John Sargent (DOC/TA)• Mark Bello (NIST)• Kathy Kilmer (NIST)• Sarah Bell (NIST)• Angela Ellis (NIST)• Thelma Allen (NIST)• Todd Snouffer (NIST)• Geoff Holdridge• Steven Gould• Sam Gill• Jason Barnard

Day One: Tuesday, January 27, 2004Keynote Session10:00 Dr. Arden Bement, Jr. Director of the National Institute of Standards and Technology – Welcome10:15 Hon. Phillip J. Bond, Under Secretary of Commerce for Technology10:45 Dr. Clayton Teague, Director, National Nanotechnology Coordination Office

Plenary Session11:00 Dr Juri Matisoo – Semiconductor Industry Association - "Grand Challenges as viewed by the Semiconductor Industry" 11:30 Dr. Duncan Stewart – Hewlett Packard - "Metrology for Nanoelectronics and Molecular Electronics"12:00 Break12:15 Dr. Thomas A. Cellucci - ZYVEX - "Nanotechnology Tools:  Solving Real-World Needs"12:45 Dr. Joergen Garnaes - Danish Institute of Fundamental Metrology - "Needs for nanometrology from the European stand point"

Reports from other NNI Grand Challenge Workshops on Metrology and Instrumentation Issues1:15 Dr. Barbara Karn, Environmental Protection Agency – Environmental1:25 Dr. Cliff Lau, Department of Defense – Chemical, Biological, Radiological, and Explosive1:35 Dr. Barbara Baird, Cornell University – NanoBiotechnology1:45 Dr. Robert Hull, University of Virginia – NanoMaterials

Introduction to Breakouts 1:55 Breakout session instructions – Joan Pellegrino, Energetics, Inc.

Breakout Sessions Tracks 1 - 5: Current State of the Art2:00 Working Lunch

Plenary Talks Organized Brainstorming on State of the Art (Breakouts A1-A5)Stretch BreakContinue Brainstorming

4:00 Assignments for Day 2 (Session cut short due to ice storm)6:00-7:00 Reception (Postponed due to ice storm)

Day Two: Wednesday, January 28, 2004

8:25 Dr. Michael T. Postek – Call to Order

Plenary Session

8:30 Dr. William Phillips, National Institute of Standards and Technology “Quantum Computing with Atoms in Optical Nanostructures"

9:00 Dr. Lucas Novotony, University of Rochester “Instrumentation for Nanoscale Characterization”9:30 Dr. Eric Steel, National Institute of Standards and Technology – “Nanoscale Chemical

Characterization:  Moving to 3D”10:00 Break

Breakout Sessions: Future Needs, Barriers and Grand Challenges

10:30 Plenary talks (Future Needs)Organized Brainstorming and Prioritization of Future Needs (Breakouts B1-B5)Working LunchGap Analysis/Challenges (Breakouts C1-C5)Organized Brainstorming on Technical BarriersIdentification of Instrumentation and Metrology Grand Challenges to Overcome Barriers

3:00 Stretch Break3:15 Completion of Matrices for Grand Challenges4:45 Preparation for Summary Presentations5:00 Instructions and Assignments for Day 35:30- 7:00 Reception (NIST Lunch Club and Employee Lounge)

Arden Bement – Welcoming comments to the AMLAhmad Soueid, HDR – Details of the NIST Advanced Measurement Laboratory

Day Three: Thursday, January 29, 2003

8:25 Dr. Michael T. Postek – Call to order

8:30 Review of Combined Breakouts Track 1 Richard Cavanagh8:45 Review of Combined Breakouts Track 2 Clare Allocca9:00 Review of Combined Breakouts Track 3 - Robert Shull9:15 Review of Combined Breakouts Track 4 – Charles Clark9:30 Review of Combined Breakouts Track 5 James Whetstone9:45 Review of Track 6 - Ron Boisvert10:00 Andy Henson NPL

10:15 Discussion, Holes, Questions and Summary Charge

10:30 Break

11:00 Report Preparation (detailed outline) Tracks 1-5

11:00 Track 6 (parallel) Breakout Session: Crosscut – Computational Science IssuesPlenary TalksBrainstorm Barriers and Needs

1:00 Lunch (working) All tracks

1:00 Track 6 Develop Recommendations2:00 Complete Report Preparation Tracks 1-52:00 Complete Recommendations Track 62:15 Discuss Next Steps 2:20 Adjourn