Mos Models

39
MOS Models (5/23/00) Page 1 ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 1.8 - MOSFET MODELS INTRODUCTION Objective The objective of this presentation is: 1.) Understand how the MOS transistor works 2.) Understand and apply the simple large signal model 3.) Understand and apply the small-signal model Outline MOS Structure and Operation Large Signal Model Small-Signal Model Capacitance Short Channel Large Signal Model Subthreshold Large Signal Model Summary

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mosfet models

Transcript of Mos Models

Page 1: Mos Models

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ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000

1.8 - MOSFET MODELS INTRODUCTION

Objective

The objective of this presentation is:

1.) Understand how the MOS transistor works

2.) Understand and apply the simple large signal model

3.) Understand and apply the small-signal model

Outline

• MOS Structure and Operation

• Large Signal Model

• Small-Signal Model

• Capacitance

• Short Channel Large Signal Model

• Subthreshold Large Signal Model

• Summary

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MOS STRUCTURE AND OPERATION Metal-Oxide-Semiconductor Structure

n+ n+

Polysilicon

p+

p- substrate

LightlyDoped p

HeavilyDoped n

HeavilyDoped p

LightlyDoped n

IntrinsicDoping Fig1.8-1

Bulk/Substrate Source Gate DrainThin Oxide(10-100nm

100Å-1000Å)

Metal

Terminals:

• Bulk - Used to make an ohmic contact to the substrate

• Gate - The gate voltage is applied in such a manner as to invert the doping of the material directlybeneath the gate to form a channel between the source and drain.

• Source - Source of the carriers flowing in the channel

• Drain - Collects the carriers flowing in the channel

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Formation of the Channel for an Enhancement MOS Transistor

Polysilicon

p+

p- substrate

Fig1.8-2

VB = 0 VG =VTVS = 0 VD = 0

n+ n+p+

p- substrate

VB = 0 VG < VTVS = 0 VD = 0

Polysilicon

p+

p- substrate

VB = 0 VG >VTVS = 0 VD = 0

Subthreshold (VG<VT)

Threshold (VG=VT)

Strong Threshold (VG>VT)

n+ n+

n+ n+

Inverted Region

Inverted Region

Polysilicon

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The MOSFET Threshold Voltage

When the gate voltage reaches a value called the threshold voltage (VT), the substrate beneath the gatebecomes inverted (it changes from p-type to n-type).

VT = φMS +

-2φF - Qb

Cox +

QSS

Cox

whereφMS = φF(substrate) - φF(gate)

φF = Equilibrium electrostatic potential (Femi potential)

φF(PMOS) = - kTq ln(NA/ni) = -Vt ln(NA/ni)

φF(NMOS) = kTq ln(ND/ni) = Vt ln(ND/ni)

Qb ≈ 2qNAεsi(|-2φF+vSB|)

QSS = undesired positive charge present in the interface between the oxide and the bulk silicon

Rewriting the threshold voltage expression gives,

VT = φMS -2φF - Qb0

Cox -

QSSCox

- Qb - Qb0

Cox = VT0 + γ |-2φF + vSB | - |-2φF|

where

VT0 = φMS - 2φF - Qb0Cox

- QSSCox

and γ = 2qεsiNA

Cox

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Signs for the Quantities in the Threshold Voltage Expression

Parameter N-Channel P-ChannelSubstrate p-type n-typeφMS Metal − − n+ Si Gate − − p+ Si Gate + +φF − +Qb0,Qb − +Qss + +VSB + −γ + −

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Example 1 - Calculation of the Threshold Voltage

Find the threshold voltage and body factor γ for an n-channel transistor with an n+ silicon gate if tox =200 , NA = 3 × 1016 cm-3, gate doping, ND = 4 × 1019 cm-3, and if the positively-charged ions at theoxide-silicon interface per area is 1010 cm-2.

SolutionFrom above, φF(substrate) is given as

φF(substrate) = −0.0259 ln

3× 1016

1.45 × 101 0 = −0.377 V

The equilibrium electrostatic potential for the n+ polysilicon gate is found from as

φF(gate) = 0.0259 ln

4 × 1019

1.45 × 1010 = 0.563 V

Therefore, the potential φMS is found to be

φF(substrate) − φF(gate) = −0.940 V.

The oxide capacitance is given as

Cox = εox/tox = 3.9 × 8.854 × 10-14

200 × 10-8 = 1.727 × 10-7 F/cm2

The fixed charge in the depletion region, Qb0, is given as

Qb0 = − [2 × 1.6 × 10-19 × 11.7 × 8.854 × 10-14 × 2 × 0.377 × 3 × 1016]1/2 = − 8.66 × 10-8 C/cm2.

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Example 1 - Continued

Dividing Qb0 by Cox gives −0.501 V. Finally, Qss/Cox is given as

QssCox

= 1010 × 1.60 × 10-19

1.727 × 10-7 = 9.3 × 10-3 V

Substituting these values for VT0 gives

VT0 = - 0.940 + 0.754 + 0.501 - 9.3 x 10-3 = 0.306 V

The body factor is found as

γ = 2 × 1.6 × 10-19 × 11.7 × 8.854 × 10-14 × 3 × 1016

1/2

1.727 × 10-7 = 0.577 V1/2

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SIMPLE LARGE SIGNAL MOSFET MODEL

Large Signal Model Derivation

Derivation-

1.) Let the charge per unit area in the channel inversion

layer be

QI(y) = -Cox[vGS - v(y) - VT] (coulombs/cm2)

2.) Define sheet conductivity of the inversion layer per

square as

σS = µoQI(y)

cm2

v·s

coulombs

cm2 = ampsvolt =

1Ω/sq.

3.) Ohm's Law for current in a sheet is

JS = iDW = -σSEy = -σS

dvdy → dv =

-iDσSW dy =

-iDdyµoQI(y)W → iD dy = -WµoQI(y)dv

4.) Integrating along the channel for 0 to L gives

⌡⌠0

L

iDdy = - ⌡⌠0

vDS

WµoQI(y)dv = ⌡⌠0

vDS

WµoCox[vGS-v(y)-VT] dv

5.) Evaluating the limits gives

iD = WµoCox

L

(vGS-VT)v(y) - v2(y)

2

vDS 0

→ iD = WµoCo x

L

(vGS-VT)vDS - vDS2

2

n+ n+

yv(y)

dy

0 Ly y+dyp-Source Drain

+

-vGS

-iD+

vDS

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Saturation Voltage - V D S (sat)

Interpretation of the large signal model:iD

vDS = vGS - VT

Increasingvalues of vGS

Saturation RegionActive Region

vDS

The saturation voltage for MOSFETs is the value of drain-source voltage at the peak of the invertedparabolas.

diDdvDS

= µoCoxW

L [(vGS-VT) - vDS] = 0 → vD S (sat) = vG S - V T

Useful definitions:

µoCoxW

L = K’W

L = β

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Complete Large Signal Model

Regions of Operation of the MOS Transistor:

1.) Cutoff Region:

iD = 0, vGS - VT < 0 (Ignores subthreshold currents)

2.) Active Region

iD = µoCoxW

2L [ ]2(vG S - V T ) - vD S vDS , 0 < vDS < vGS - VT

3.) Saturation Region

iD = µoCoxW

2L ( )vG S - V T 2 , 0 < vGS - VT < vDS

Output Characteristics of the MOSFET:

vDS = vGS - VT

iD /ID0

0.75

1.0

0.5

0.25

00 0.5 1.0 1.5 2.0 2.5

vGS-VTVGS0 - VT

= 0

vGS-VTVGS0 - VT

= 0.5

vGS-VTVGS0 - VT

= 0.707

vGS-VTVGS0 - VT

= 0.867

vGS-VTVGS0 - VT

= 1.0

Channel modulation effects

vDSVGS0 - VT

ActiveRegion Saturation Region

Cutoff Region

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Influence of V D S on the Output Characteristics

Channel modulation effect:

As the value of vDS increases, it causes the effective L to decrease which causes the current to increase.

Illustration:

Polysilicon

p+

p- substrateFig1.8-3

VG > VT VD > VDS(sat)

n+n+

DepletionRegion

Xd

B S

Leff

Note that Leff = L - Xd

Therefore the model in saturation becomes,

iD = K’W2Leff

(vGS-VT)2 →diD

dvDS = -

K’W2Leff

2 (vGS - VT)2 dLeffdvDS

= iD

Leff dXddvDS

≡ λiD

Therefore, a good approximation to the influence of vDS on iD is

iD ≈ iD(vDS=0) + diD

dvDS vDS = iD(vDS=0)(1 + λvDS) =

K’W2L (vGS-VT)2(1+λvDS)

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Influence of the Bulk Voltage on the Large Signal MOSFET Model

Illustration of the influence of the bulk:

VSB0 = 0V:

VSB1>0V:

VSB2 > VSB1:

Poly

p+ n+ n+

p-

+-

Bulk Source

Gate Drain

VDS>0VGS>VT

Substrate/Bulk

VSB0=0V

Poly

p+ n+ n+

p-

+-

Bulk Source

Gate Drain

VDS>0VGS>VT

Substrate/Bulk

VSB1

Poly

p+ n+ n+

p-

+-

Bulk Source

Gate Drain

VDS>0VGS>VT

Substrate/Bulk

VSB2

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Influence of the Bulk Voltage on the Large Signal MOSFET Model - Continued

Bulk-Source (vBS) influence on the transconductance characteristics-

vGS

iD Decreasing valuesof bulk-source voltage

VT0 VT1 VT2 VT3

VBS = 0

vDS vGS - VT

In general, the simple model incorporates the bulk effect into VT by the following empirically developed

equation-

VT(vBS) = VT0 + γ 2|φf| + |vBS | - γ 2|φf|

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MOSFET Schematic Symbols

Enhancement:

D

G

S

D

G

S

D

G

S

D

G

S

B

B

D

G

S

D

S

G

NMOS

PMOS

VBS ≠0V VBS=0V Simple

Fig1.8-4

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Summary of the Simple Large Signal MOSFET Model

N-channel reference convention:

Non-saturation-

iD = WµoCox

L

(vGS - VT)vDS - vDS2

2 (1 + λvDS)

Saturation-

iD = WµoCox

L

(vGS - VT)vDS(sat) - vDS(sat)2

2 (1 + λvDS) = WµoCox

2L (vGS - VT) 2 (1 + λvDS)

where:µo = zero field mobility (cm2/volt·sec)

Cox = gate oxide capacitance per unit area (F/cm2)

λ = channel-length modulation parameter (volts-1)

VT = VT0 + γ 2|φf | + |v B S | - 2|φf| VT0 = zero bias threshold voltage

γ = bulk threshold parameter (volts-0.5)

2|φf| = strong inversion surface potential (volts)

For p-channel MOSFETs, use n-channel equations with p-channel parameters and invert current.

+

+

- -

+

-vBS

vDS

vGS

iD

D

B

S

G

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MOSFET

Constants for Silicon:

Constant Symbol Constant Description Value UnitsVGkni

ε0

εsi

εox

Silicon bandgap (27°C)BoltzmannÕs constantIntrinsic carrier concentration (27°C)

Permittivity of free space

Permittivity of silicon

Permittivity of SiO2

1.2051.381x10-23

1.45x1010

8.854x10-14

11.7 ε0

3.9 ε0

VJ/Kcm-3

f/cm

F/cm

F/cm

Model Parameters for a Typical CMOS Bulk Process (0.8µm CMOS n-well):

Parameter Parameter Typical Parameter ValueSymbol Description N-Channel P-Channel Units

VT0 Threshold Voltage(VBS = 0)

0.7 ± 0.15 −0.7 ± 0.15 V

K' TransconductanceParameter (in saturation)

110.0 ± 10% 50.0 ± 10% µA/V2

γ Bulk thresholdparameter

0.4 0.57 (V)1/2

λ Channel lengthmodulationparameter

0.04 (L=1 µm)

0.01 (L=2 µm)

0.05 (L = 1 µm)

0.01 (L = 2 µm)

(V)-1

2|φF| Surface potential atstrong inversion

0.7 0.8 V

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MOSFET SMALL SIGNAL MODELSmall-Signal Model

Complete schematic model:

rds

G

S

gmvgsvgs

+

-gmbsvbs

vds

+

-

id

Fig. 4.2-4

B

vbs

+

-

G

S

B

D

G

S

B

D

S

D

where

gm ≡ diD

dvGS |Q

= β(VGS-VT) = 2βID gds ≡ diD

dvDS |Q

= λiD

1 + λ vD S ≈ λiD

and gmbs = ∂ιD∂vBS

Q =

∂iD

∂vGS

∂vGS

∂vBS

Q

=

- ∂iD∂vT

∂vT

∂vBS

Q

= gmγ

2 2|φF | - VB S = ηgm

Simplified schematic model:

rdsG

D

S

G

D

S

G

S

gmvgsvgs

+

-

vds

+

-

id

Fig. 4.2-2

D

S

Extremely important assumption:

gm ≈ 10gmbs ≈ 100gds

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Illustration of the Small-Signal Model Application

DC resistor:

DC resistance = vi

Q

= VI

• Useful for biasing - creating current from voltage andvice versa

Small-Signal Load (AC resistance):

rds

G

S

gmvgsvgs

+

-gmbsvbs

vds

+

-

id

Fig. 4.2-4

B

vbs

+

-

G

S

B

D

G

S

B

D

S

D

AC resistance = vdsid

= 1

gm + gd s ≈

1gm

VT

i

vFig. 4-2-2B

ID

VDS

AC Resistance

DC Resistance

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Example 2 - Small-Signal Load Resistance

Find the small signal resistance of the MOS diodeshown using the parameters of Table 3.2-1.Assume that the W/L ratio is 10µm/1µm.

Solution

If we are going to include the bulk effect, we must first find the dc valueof the bulk-source voltage. Unfortunately, we do not know the thresholdvoltage because the bulk-source voltage is unknown. The best approach is toignore the bulk-source voltage, find the gate-source voltage and then iterate ifnecessary.

∴ VGS = 2Iβ + VT0 =

2·100110·10 + 0.7 = 1.126V

Thus let us guess at a gate-source voltage of 1.3V (to account for the bulk effect) and calculate the resultinggate-source voltage.

VT = VT0 + γ 2|φF | - (-3.7) - γ 2|φF| = 0.7 + 0.4 0.7+3.7 - 0.4 0.7 = 1.20V ⇒ VGS = 1.63V

Now refine our guess at VGS as 1.6V and repeat the above to get VT = 1.175V which gives VGS = 1.60V.

Therefore, VBS = -3.4V.

VDD = 5V

100µA

rac

Fig. 4.2-5

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Example 2 - Continued

The small signal model for this example is shown.

The ac input resistance is found by,

iac = gdsvac - gmvgs - gmbsvbs

= gdsvac + gmvs + gmbsvs = vac(gm+gmbs+gds)

∴ rac =

vaciac

= 1

gm+gmbs+gds

Now we must find the parameters which are,

gm = 2βID = 2·110·10·100 µS = 469µS, gds = 0.04V-1·100µA = 4µS,

and gmbs = 469µS·0.4

2 0.7+3.4 = 0.0987·469µS = 46.33µS

Finally,

rac = 106

469 + 46.33 + 4 = 1926Ω

If we had used the previous approximations of gm ≈ 10gmbs ≈ 100gds, then we could have simply let

rac ≈ 1

gm =

1469 = 2132Ω

Probably the most important result of this approximation is that we would not have to find VBS which tooka lot of effort for little return.

rds

G,D,B

S

gmvgs gmbsvbsvds = vgs

+

-

id

Fig. 4.2-6

rac

vac

iac

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Small-Signal Model for the Active Region

gm = ∂iD

∂vGS |Q

= K’WVDS

L (1+λVDS) ≈

K’W

L VDS

gmbs = ∂iD

∂vBS |Q

= K’Wγ VD S

2L 2φF - V B S

gds = ∂iD

∂vDS |Q

= K’W

L ( VGS - VT - VDS)(1+λVDS) + IDλ

1+λVDS

K’WL (VGS - VT - VDS)

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MOSFET CAPACITANCES

Types of Capacitance

Physical Picture:

SiO2

Bulk

Source DrainGate

CBS CBD

C4

C1 C2 C3

Fig1.8-5

FOX FOX

MOSFET Capacitances consist of:

• Depletion capacitance

• Charge storage or parallel plate capacitance

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MOSFET Depletion Capacitors

Model:

CBS = CJ·AS

1 - vB SPB

MJ

+ CJSW·PS

1 - vB SPB

MJSW

, vBS ≤ FC·PB

and

CBS = CJ·AS

( )1- FC1+MJ

1 - (1+MJ)FC + MJ VB SPB

+ CJSW·PS

( )1 - F C1+MJSW

1 - (1+MJSW)FC + MJSW VB SPB ,

vBS> FC·PB

where

AS = area of the sourcePS = perimeter of the sourceCJSW = zero bias, bulk source sidewall capacitanceMJSW = bulk-source sidewall grading coefficient

For the bulk-drain depletion capacitance replace "S" by "D" in the above.

SiO2

Polysilicon gate

Bulk

A B

CD

EF

GH

Drain bottom = ABCDDrain sidewall = ABFE + BCGF + DCGH + ADHE

Source Drain

Fig1.8-6

FC·PB

PB

vBS

CBS

vBS ≤ FC·PBvBS ≥ FC·PB

Fig1.8-6B

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Charge Storage (Parallel Plate) MOSFET Capacitances - C 1 , C 2 , C 3 and C 4

Bulk

LDMask

W

Oxide encroachment

ActualL (Leff)

Gate

Mask L

Source-gate overlapcapacitance CGS (C1)

Drain-gate overlapcapacitance CGD (C3)

FOX

ActualW (Weff)

FOX

Fig1.8-7

Source

Gate

Drain

Gate-ChannelCapacitance (C2)

Channel-BulkCapacitance (C4)

Overlap capacitances:

C1 = C3 = LD·Weff·Cox = CGSO or CGDO (LD ≈ 0.015 µm for LDD structures)

Channel capacitances:

C2 = gate-to-channel = CoxWeff·(L-2LD) = CoxWeff·Leff

C4 = voltage dependent channel-bulk/substrate capacitance

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Charge Storage (Parallel Plate) MOSFET Capacitances - C 5

View looking down the channel from source to drain

Bulk

Overlap Overlap

Source/DrainGate

FOX FOXC5 C5

Fig1.8-8

C5 = CGBO

Capacitance values and coefficients based on an oxide thickness of 140 Å or Cox=24.7 × 10−4 F/m2:

Type P-Channel N-Channel UnitsCGSO 220 × 10−12 220 × 10−12 F/m

CGDO 220 × 10−12 220 × 10−12 F/m

CGBO 700 × 10−12 700 × 10−12 F/m

CJ 560 × 10−6 770 × 10−6 F/m2

CJSW 350 × 10−12 380 × 10−12 F/m

MJ 0.5 0.5MJSW 0.35 0.38

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Expressions for C GD , C G S and C G B

Cutoff Region:

CGB = C2 + 2 C 5 = Cox(Weff)(Leff) + 2CGBO(Leff)

CGS = C1 ≈ Cox(LD)Weff) = CGSO(Weff)

CGD = C3 ≈ Cox(LD)Weff) = CGDO(Weff)

Saturation Region:

CGB = 2C5 = CGBO(Leff)

CGS = C1 +(2/3)C2 = Cox(LD+0.67Leff)(Weff)

= CGSO(Weff) + 0.67Cox(Weff)(Leff)

CGD = C3 ≈ Cox(LD)Weff) = CGDO(Weff)

Active Region:

CGB = 2 C 5 = 2CGBO(Leff)

CGS = C1 + 0.5C2 = Cox(LD+0.5Leff)(Weff)

= (CGSO + 0.5CoxLeff)Weff

CGD = C3 + 0.5C2 = Cox(LD+0.5Leff)(Weff)

= (CGDO + 0.5CoxLeff)Weff

p+

p- substrate

Fig1.8-9

VB = 0 VG >VTVS = 0 VD >VG -VT

n+ n+p+

p- substrate

VB = 0 VG < VTVS = 0 VD > 0

Polysilicon

p+

p- substrate

VB = 0 VG >VTVS = 0 VD <VG -VT

Cutoff

Saturated

Active

Inverted Region

Inverted Region

Polysilicon

n+ n+

Polysilicon

n+ n+

CGD

CGB

CGS

CGS CGD

CGDCGS

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Illustration of C GD , C G S and C G B

0 vGS

CGS

CGS, CGD

CGDCGB

CGS, CGD

C2 + 2C5

C1+ 0.67C2

C1, C32C5

VT vDS +VT

Off Saturation Non-Saturation

vDS = constant vBS = 0

Capacitance

C1+ 0.5C2

Fig1.8-10

C4 Large

C4 Small

Comments on the variation of CBG in the cutoff region:

CBG = 1

1C2

+ 1

C4

+ 2C5

For vGS ≈ 0, CGB ≈ C2 + 2C5

(C4 is large because of the thin inversion layer in weak inversion where VGS is slightly less than VT))

For 0<vGS VT, CGB ≈ 2C5

(C4 is small because of the thicker inversion layer in strong inversion)

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Small-Signal Frequency Dependent Model

rds

G

S

gmvgsvgs

+

-gmbsvbs

vds

+

-

id

Fig1.8-15B

vbs

+

- S

D

Cgd

Cgb

Cgs

Cbs

Cbd

The depletion capacitors are found by evaluating the large signal capacitors at the DC operating point.

The charge storage capacitors are constant for a specific region of operation.

Gainbandwidth of the MOSFET:

Assume VSB = 0 and the MOSFET is in saturation,

fT = 1

2π gm

Cgs + Cgd ≈

12π

gmCgs

Recalling that

Cgs ≈ 23 CoxWL and gm = µoCox

WL (VGS-VT)

gives

fT = 3

4π µo

L2 (VGS-VT)

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Summary of the MOSFET Large Signal Model

where,

rG, rS, rB, and rD are ohmic and contact resistances

iBD = Is

exp

vBD

Vt - 1 and iBS = Is

exp

vBS

Vt - 1

S

rSCGB

CGS CBS

iBS

iBD

vBD

vBS

+ -

+ - BrB

iD

CBDCGD

rD

D

rGG

Page 30: Mos Models

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SHORT-CHANNEL MOSFET MODEL

Velocity Saturation

The most important short-channel effect in MOSFETs is the velocity saturation of carriers in thechannel. A plot of electron drift velocity versus electric field is shown below.

5x104

105

2x104

104

5x103

105 106 107

Electric Field (V/m)

Ele

ctro

n D

rift

Vel

ocity

(m

/s)

Fig1.8-11

An expression for the electron drift velocity as a function of the electric field is,

vd ≈ µnE

1 + E/Ec

where

vd = electron drift velocity (m/s)

µn = low-field mobility (≈ 0.07m2/V·s)

Ec = critical electrical field at which velocity saturation occurs

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Short-Channel Model Derivation

As before,

JD = JS = iDW = QI(y)vd(y) → iD = W QI(y)vd(y) =

WQI(y)µnE

1 + E/Ec → iD

1 +

E EC

= WQI(y)µnE

Replacing E by dv/dy gives,

iD

1 +

1 EC

d vdy = WQI(y)µn

dvdy

Integrating along the channel gives,

⌡⌠

0

L

iD

1 +

1Ec

d vdy dy = ⌡⌠

0

vDS

WQI(y)µndv

The result of this integration is,

iD = µnCox

2

1 + 1Ec

vD S

L

WL [2(vGS - VT)vDS - vDS

2] = K’

2[1 + θ(vGS-VT)] WL [2(vGS - VT)vDS - vDS

2]

where θ = 1/LEc with dimensions of V-1.

The saturation voltage has not changed so substituting for vDS by vGS-VT gives,

iD = K’

2[1 + θ(vGS-VT)] WL [ vGS - VT]2

Note that the transistor will enter the saturation region for vDS < vGS - VT in the presence of velocitysaturation.

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The Influence of Velocity Saturation on the Transconductance Characteristics

The following plot was made for K’ = 110µA/V2 and W/L = 1:

0

200

400

600

800

1000

0.5 1 1.5 2 2.5 3

i D/W

(µA

/µm

)

vGS (V)

θ = 0

θ = 0.2

θ = 0.4

θ = 0.6

θ = 0.8θ = 1.0

Fig1.8-12

Note as the velocity saturation effect becomes stronger, that the drain current-gate voltage relationshipbecomes linear.

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Circuit Model for Velocity Saturation

A simple circuit model to include the influence of velocity saturation is thefollowing:

We know that

iD = K’W2L (vGS’ -VT)2 and vGS = vGS’ + iD RSX or vGS’ = vGS - iDRXS

Substituting vGS’ into the current relationship gives,

iD = K’W2L (vGS - iDRSX -VT)2

Solving for iD results in,

iD = K’

2

1 + K’ WL RSX(vGS-VT)

WL (vGS - VT)2

Comparing with the previous result, we see that

θ = K’ WL RSX → RSX =

θLK’W =

1EcK’W

Therefore for K’ = 110µA/V2, W = 1µm and Ec = 1.5x106V/m, we get RXS = 6.06kΩ.

G

D

S

RSX

+

vGS

-

vGS'+

-

iD

Fig1.8-13

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Output Characteristics of Short-Channel MOSFETs †

IBM, 1998, tox = 3.5nm

800

700

600

500

400

300

200

100

0-1.8 -1.2 -0.6 0.0 0.6 1.2 1.8

NFETLeff = 0.08µm

VGS=1.8V

VGS=1.4V

VGS=1.0V

VGS=0.6V

PFETLeff = 0.11µm

VGS=-1.8V

VGS=-1.4V

VGS=-1.0V

VGS=-0.6V

Drain Voltage (V)

Dra

in C

urre

nt (

µA/µ

m)

Fig1.8-14

† Su, L., et.al., “A High Performance Sub-0.25µm CMOS Technology with Multiple Thresholds and Copper Interconnects,” 1998 Symposium on VLSITechnology Digest of Technical Papers, pp. 18-19.

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SUBTHRESHOLD MOSFET MODEL

Weak inversion operation occurs when the applied gate voltage is below VT and pertains to when thesurface of the substrate beneath the gate is weakly inverted.

yyzzn+ n+

p-substrate/well

VGS

Diffusion Current

n-channel

Regions of operation according to the surface potential, φS.

φS < φF : Substrate not inverted

φF < φS < 2φF : Channel is weakly inverted (diffusion current)

2φF < φS : Strong inversion (drift current)

Drift current versus diffusion current in a MOSFET:

log iD

10-6

10-120 VT

VGS

Drift CurrentDiffusion Current

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Large-Signal Model for Subthreshold

Model:

iD = Kx WL evGS/nVt(1 - e-vDS/Vt)(1 + λvDS)

where

Kx is dependent on process parameters and the bulk-source voltage

n ≈ 1.5 - 3

and

Vt = kTq

If vDS > 0, then

iD = Kx WL evGS/nVt (1 + λvDS)

Small-signal model:

gm = ∂iD

∂vGS |Q

= qIDnkT

gds = ∂iD

∂vDS |Q

IDVA

VGS=VT

VGS<VT

iD

vDS00 1V

Fig1.8-18

1µA

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SUBSTRATE CURRENT FLOW IN MOSFETS

Impact Ionization

Impact Ionization:

Occurs because high electric fields cause an impact which generates a hole-electron pair. The electronsflow out the drain and the holes flow into the substrate causing a substrate current flow.

Illustration:

Polysilicon

p+

p- substrate

Fig1.8-16

VG > VTVD > VDS(sat)

n+

DepletionRegion

B S

FixedAtom

Freehole

Freeelectron

A n+

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Model of Substrate Current Flow

Substrate current:

iDB = K1(vDS - vDS(sat))iDe-[K2/(vDS-vDS(sat))]

where

K1 and K2 are process-dependent parameters (typical values are K1 = 5V-1 and K2 = 30V)

Schematic model:

D

G

S

B

iDB

Fig1.8-17

Small-signal model:

gdb = ∂iDB∂vDB

= K2 IDB

VDS - VDS(sat)

This conductance will have a negative influence on high-output resistance current sinks/sources.

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SUMMARY

Simple Large-Signal Model

Non-saturation-

iD = WµoCox

L

(vGS - VT)vDS - vDS2

2 (1 + λvDS)

Saturation-

iD = WµoCox

2L (vGS - VT) 2 (1 + λvDS)

Small-Signal Model

gm ≡ diD

dvGS |Q

= β(VGS-VT) = 2βID gds ≡ diD

dvDS |Q

= λiD

1 + λ vD S ≈ λiD gmbs =

gmγ2 2|φF | - VB S

Capacitances

0 vGS

CGS

CGS, CGD

CGDCGB

CGS, CGD

C2 + 2C5

C1+ 0.67C2

C1, C32C5

VT vDS +VT

Off Saturation Non-Saturation

vDS = constant vBS = 0

Capacitance

C1+ 0.5C2

Fig1.8-10

C4 Large

C4 Small