Measurement issues of on-Silicon de- embedding test structures …€¦ · De-embedding structure :...
Transcript of Measurement issues of on-Silicon de- embedding test structures …€¦ · De-embedding structure :...
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Measurement issues of on-Silicon de-
embedding test structures in the Sub-THz range
Chandan Yadav, Marina Deng, Sébastien Fregonese, Magali De Matos
and Thomas Zimmer
IMS Laboratory, University of Bordeaux, France
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OUTLINE
Motivations
mmW and Sub-mmW Applications
Transistor HF Characterization Challenges
Sub-THz Silicon On-Wafer Calibration Kit
On-wafer Calibration Kit for Measurements up to 500 GHz
On-Wafer TRL Application up to 220 GHz
Methodology
Focus on Open-M1 de-embedding structure
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OUTLINE
Motivations
mmW and Sub-mmW Applications
Transistor HF Characterization Challenges
Sub-THz Silicon On-Wafer Calibration Kit
On-wafer Calibration Kit for Measurements up to 500 GHz
On-Wafer TRL Application up to 220 GHz
Methodology
Focus on Open-M1 de-embedding structure
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mmW and sub-mmW Applications
Millimeter and Sub-Millimeter Wave Frequency Ranges and Applications
Imaging
35 GHz 60 GHz 77 GHz 122 GHz 140 GHz up to THz
frequency
WLAN
WiGig
Auto. radar
Sensors
94 GHz
Auto. radar
Sensors
Imaging (safety, medical)
Spectroscopy
Sensors
Imaging
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mmW and sub-mmW Applications
Silicon-Germanium State-of-the-art Technologies
0.13µm SiGe
BiCMOS HBT
90nm SiGe
BiCMOS HBT
55nm SiGe
BiCMOS HBT
fT/fmax
505/720 GHz [1]
250/370 GHz [2]
300/420 GHz [3] 320/370 GHz [4]
[1] B. Heinemann et al., IEDM 2016 (IHP)
[2] J. Bock et al., BCTM 2015 (Infineon)
[3] R.A. Camillo-Castillo et al., BCTM 2013 (IBM)
[4] P. Chevalier et al., IEDM 2014 (STMicroelectronics)
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Transistor HF Characterization Challenges
Measurement accuracy
On-wafer device measurements S-parameters
RF circuit/system design
Accurate compact models
Relies on
Extracted from/validated by
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Accurate S-parameters measurements above 110 GHz =
big challenge
Transistor HF Characterization Challenges
Measurement accuracy
RF circuit/system design
Accurate compact models
Relies on
Extracted from/validated by
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Transistor HF Characterization Challenges
Caliration & De-embedding issues
Standard procedure (2-step calibration)
1 Off-wafer
calibration on
ISS
Reference plane
after calibration
Vectorial Network Analyzer (VNA)
Port 1 Port 2
mmW head mmW head RF probes
Impedance Standard Substrate
Source=Cascade Microtech
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Transistor HF Characterization Challenges
Calibration & De-embedding issues
Standard procedure (2-step calibration)
2 On-wafer de-
embedding
HBT = 20x smaller than the accesses
De-embedding step is critical Ref. plane after de-embedding
(DUT terminals)
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Transistor HF Characterization Challenges
Calibration & De-embedding issues
Standard procedure (2-step calibration)
1 Off-wafer calibration on
ISS
Calibration validity?
Material change Back-probe
environment on alumina ≠ on silicon
Contact resistance on golden pads ≠ on aluminum pads
Thru from ISS calkit RF pads on Si
2 On-wafer de-embedding
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Transistor HF Characterization Challenges
Calibration & De-embedding issues
Standard procedure (2-step calibration)
1 Off-wafer calibration on
ISS
Calibration validity?
On-wafer calibration
2 On-wafer de-embedding
TRL is the “calibration of choice for metrological applications” [5]
On-wafer calibration-kit development is needed
[5] D.F. Williams, T-MTT March 2014
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OUTLINE
Motivations
mmW and Sub-mmW Applications
Transistor HF Characterization Challenges
Sub-THz Silicon On-Wafer Calibration Kit
On-wafer Calibration Kit for Measurements up to 500 GHz
On-Wafer TRL Application up to 220 GHz
Methodology
Focus on Open-M1 de-embedding structure
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Sub-THz On-Wafer TRL Calibration Kit
Implementation on Silicon Substrate (BiCMOS55 – STMicroelectronics)
Pad Open Thru
Line (50-500 GHz) Line (13-120 GHz)
Pad Load (for impedance correction)
BEOL : 8 copper layers
GND = Metal 4
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Sub-THz On-Wafer TRL Calibration Kit
THRU REFLECT LINE LOAD
On-wafer TRL calibration kit for 140 - 500 GHz
Ref. plane after
TRL cal.
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OUTLINE
Motivations
mmW and Sub-mmW Applications
Transistor HF Characterization Challenges
Sub-THz Silicon On-Wafer Calibration Kit
On-wafer Calibration Kit for Measurements up to 500 GHz
On-Wafer TRL Application up to 220 GHz
Methodology
Focus on Open-M1 de-embedding structure
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On-Wafer TRL Application
IMS S-parameters Measurement Benches
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On-Wafer TRL Application
Methodology
Measurement versus EM simulation comparison
Measurement with different probe pitches and topologies
EM sim. of intrinsic test structures
EM sim. of complete test structures
REF
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On-Wafer TRL Application
De-embedding structure
Open M1 structure and its terminal capacitances
C11 C22
C12 Port-1 Port-2
Intrinsic
Open-M1 Open-M1 Open M1 Terminal Capacitances
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On-Wafer TRL Application
De-embedding structure
Open-M1 measured and simulated terminal Capacitances up to 220 GHz
TRL cal. meas. vs intrinsic structure sim.
Microscopic view of Picoprobe Probe
(140 GHz – 220 GHz)
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On-Wafer TRL Application
De-embedding structure : Influence of Probe design
Open-M1 measured and simulated terminal Capacitance up to 220 GHz
TRL cal. meas. vs intrinsic structure sim.
Verification of C12 behavior
Cascade Infinity probe
(140 GHz – 220 GHz)
Can Probe design influence result ?
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On-Wafer TRL Application
De-embedding structure : Influence of Probe design
Open-M1 measured and simulated terminal Capacitance up to 220 GHz
TRL cal. meas. vs intrinsic structure sim and TRL cal. sim .
Verification of C12 behavior
Microscopic view of Picoprobe Probe
(140 GHz – 220 GHz)
Probe Model in HFSS
Probe design can influence result!
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On-Wafer TRL Application
De-embedding structure : Influence of crosstalk b/w two ports
Open-M1 measured and simulated terminal Capacitance up to 220 GHz
TRL cal. meas. vs TRL cal. sim .
Effect of crosstalk b/w two ports in C12
l → Original line length of THRU
d → Extended length of line in THRU
Note: Other structures length is also extended in a similar way.
Crosstalk is not a dominant factor in C12 behavior
l
d
d
Original THRU
Extended length THRU
Ref
ere
nce
Pla
ne
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On-Wafer TRL Application
De-embedding structure : Solution for improvement
Probe design- CPW probe model in HFSS
New probe design TRL cal. sim predicts C12 behavior close to intrinsic sim.
Depending on probe design - C12 can have only positive value
CPW Probe Model in HFSS
Green color
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On-Wafer TRL Application
De-embedding structure : Solution for improvement
Improvement in test structures design
Better design of test structures can lead C12 towards positive value
Modified test Structure design
Copper Metal
original test Structure design
Pink color
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Conclusions & Perspectives
On-wafer TRL calibrated measurements for de-embedding structure up
to 220 GHz Probes of different pitches and topologies some differences
EM simulation of intrinsic and complete structures Better agreement with measurements with complete structures simulation
Influence of RF pad design and probes on TRL calibration
Perspectives:
Pad design improvement through layout design using EM simulation
Application to SiGe HBT characterization up to 500 GHz
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THANK YOU !