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Leak Testing InstrumentsHelium Leak Detectors

C17

180.01.02Excerpt from theLeybold Vacuum Full Line Catalog 2005Product Section C17Edition May 2005

C17

Contents

GeneralApplications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.03

Leak Detection - Leak Testing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.04

Leak Detection Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.05

Operating Principles of the Helium Leak Detectors . . . . . . . . . . . . . . C17.07

ProductsHelium Leak Detectors

PhoeniXL 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.10

PhoeniXL 300 Dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.12

PhoeniXL 300 Modul . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.14

Product-Related AccessoriesCalibrated Leaks for Vacuum and Sniffer Aplications . . . . . . . . . . . . C17.18

Screw-in Calibrated Leaks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.20

Accessories for the PhoeniXL 300, PhoeniXL 300 Dry and PhoeniXL 300 Modul . . . . . . . C17.22

Helium Sample Probes (Sniffers) . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.24

Other AccessoriesConnection Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.26

Connection Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.26

Leybold Vacuum Full Line Catalog 20052

Leak Testing Instruments

Leybold Vacuum Full Line Catalog 2005 C17

General Leak Testing Instruments

3

Semiconductor production � � �

Vacuum coating � �

Research and development � � � �

Chemistry/pharmaceutical � � � �

Metallurgy/furnaces � �

Lamps and tube manufacture � �

Automotive industry � �

Laser engineering � �

Particle accelerators � �

Analytical engineering � � � �

Systems with cryo pumps � � � �

Cooling and air conditioning � �

Electrical engineering � �

Mechanical engineering � �

Power plants � �

Systems engineering � �

UHV applications � � � �

Calibrated leaks C17.18 � � � �

Screw-in calibrated leaks C17.20 � � � �

Transportation means C17.22 � � � �

Partial flow system C17.22 � �

PC software LeakWare C17.22 � � � �

Helium sniffers C17.24 � � � �

Exhaust filter sets standard standard

Interfaces standard standard standard standard

Gas ballast facilities standard

Trigger relay boards standard standard standard standard

Seal kits � � � �

Accessories

Test

Inst

rum

ents

/

Leak

Detec

tors

PhoeniXL 30

0

PhoeniXL 30

0 Dry

PhoeniXL 30

0 Modul

(oil-fre

e)

Page

Applications and Accessories

ApplicationsPhoen

iXL 300 M

odul

(oil-sea

led)

C17

General



Leak Detection – Leak Testing

Vac

uum

met

hod

Ove

rpre

ssur

e m

etho

d

Helium leak detector PhoeniXL 300 with helium sniffer

103................100 10-1 10-2 10-3 10-4 10-5 10-6 10-7 10-8 10-9 10-10 10-11 10-12 mbar · l · s-1

Pressure rise

Helium leak detector PhoeniXL 300 with partial flow pump set

Helium leak detector PhoeniXL 300 Modul

Helium leak detector PhoeniXL Dry

Bubble test

Pressure drop test

Whether a component or a system isleak-tight depends on the applicationit is to be used in and the leak ratethat is acceptable. Absolutely leak-tight components and systemsdo not exist. A component is considered technically leak-tight if itsleak rate remains below a value defined for this particular component.In order to provide a quantitative measure, the term “leak rate” with thesymbol “qL” was introduced. In vacuum technology mbar x l x s-1 isused as the unit for leak rates.

A leak rate of 1 mbar x l x s-1 existsin a closed vessel having a volume of1 liter when the pressure increasesby 1 mbar within one second, or incase of an overpressure it decreasesby 1 mbar within one second.

The wide range of leak rates fromseveral 100 mbar x l x s-1 to below10-11 mbar x l x s-1 as they occur inpractice necessitates the use of different leak detection principles and

hence leak detectors (see figure).

Besides the determination of the totalleak tightness, it is usually importantto locate the leak, quickly and precisely, in order to seal it.Instruments for local leak detection

are called leak detectors. The leakdetectors presented in this productsection can be used for the localization of leaks, and in additionsome are suitable for determining thetotal leak rate of test objects.

Leak rate

Pa x m3 x s-1

1 mbar x l x s-1 (He)

1 atm x cm3 x s-1 *) = cm3 (STP) x s-1

1 Torr x l x s-1*)

1 kg x h-1 Luft

1 g/a C2H2F4 (R 134a)

1 10 9.87

0.1 1 0.99

0.101 1.01 1

0.133 1.33 1.33

23.4 234 234

6.41 x 10-7 7.58 x 10-6 6.3 x 10-6

Pa x m3 x s-1atm x cm3 x s-1 1)

mbar x l x s-1 1)atm x cm3 x s-1 1)

cm3 x s-1 1)

Overview of the leak rate detection ranges

Leak rate

Pa x m3 x s-1

1 mbar x l x s-1 (He)

1 atm x cm3 x s-1 *) = cm3 (STP) x s-1

1 Torr x l x s-1*)

1 kg x h-1 Luft

1 g/a C2H2F4 (R 134a)

1) According to international system of units only Pa x m3 x s-1 is permissible

7.5 4.28 x 10-2 2.28 x 106

0.75 4.3 x 10-3 2.28 x 105

0.76 4.3 x 10-3 2.3 x 105

1 5.7 x 10-3 3.0 x 105

175 1 –

4.8 ·x 10-6 – 1

Torr x l s-1 1) Luft C2H2F4 (R 134a)atm x cm3 x s-1 1) kg x h-1 g/a

V x ∆p∆t

qL = (mbar x l x s-1)



5

There are two main groups of leakdetection methods; for both there arespecial instruments available:

Vacuum Methods

The equipment to be tested isevacuated. The pressure ratiobetween inside and outside is 0:1.

Overpressure Methods

The equipment to be tested ispressurized with a search gas or asearch gas mixture.

The pressure ratio between insideand outside is over 1:1.

Between the two methods there existmany variations depending on theparticular application.

General Notes

1. The lowest leak rates can only bemeasured by employing the vacuummethod, whereby the followingapplies: The lower the leak rate, thehigher the requirements areconcerning cleanness and ultimatevacuum.

2. If possible the test objects shouldbe tested under the same conditionsthat will be used in their finalapplication, i.e. parts for vacuumoperation should be tested accordingto the vacuum method and parts for

overpressure operation should betested using the overpressuremethod.

Leak Testing Based onVacuum Methods(Vacuum inside the test object)

Pressure Rise Method

With this method it is only possible todetermine the total leak rate. The testobject is evacuated with a vacuumpump or a vacuum pump system. Avalve is used to isolate the test objectfrom the vacuum pump. The pressurewill then rise as a function of time.Curve (a) shows the theoreticalpressure rise if there is only a leak.Curve (b) shows the pressure risedue to outgassing from the surfacesof the test object. This pressure risetends to tail off in the direction of asaturation level. If in such a case thetime allowed for monitoring thepressure rise is too short, a leak willbe indicated which in reality does notexist. If one waits long enough for thepressure to rise, i.e. after the bend ofcurve (b) the outgassing process canthen be disregarded, so that the leakrate can be determined from theknown volume of the test object andthe measured pressure rise over afixed rise time (see equation on page4). Curve (c) shows the pressure riseas it occurs in practice, whereoutgassing and leak rate add. Thedetectable leak rate depends on thevolume of the test object, theobtained ultimate pressure and theoutgassing from the test object. Inconnection with very large test

objects this method is timeconsuming if extremely low leak ratesare to be determined in the fine andrough vacuum range.

Local Leak Detection

The test object is evacuated by avacuum pump (auxiliary pump) untilthe pressure is low enough for theleak detector to operate. When usinga helium leak detector, its own pumpsystem will take care of furtherevacuation. Suspicious spots on thetest object will then be sprayed witha fine jet of search gas. Search gasentering through leaks into the testobject is pumped out by the vacuumpump and it is converted by the leakdetector into an electrical signalwhich is then displayed. This permitsrapid detection and determination ofthe size of even the smallest leaks.

Integral Method

Determination of the total leak rate ofa test object. The testing arrange-ment is the same as for local leakdetection, but in this case the testobject is not sprayed with search gas on selected areas, but it issurrounded by a hood or a chamberwhich is filled with the search gas.Thus the entire outer surface of thetest object comes into contact withthe search gas. If the search gasenters the test object, the total leakrate is indicated independently of thenumber of existing leaks. With heliumleak detectors it is possible to deter-mine the helium content of the air.This is utilized in the detection ofgross leaks.

Leak Detection Methods

Local leak detection – Evacuated test object (left) and Integral method – Evacuated test object (right)Pressure rise in a vacuum chamber after switchingoff the pump; double log. plot

1

2

3

4

5

LD

HELIUM

2

3

4

LD

HELIUM

1

5

a) Pressure rise due to leakageb) Pressure rise due to outgassing

from the chamber wallsc) Both effects combined

1 Test object 3 Search gas cylinder 5 Hood 7 Sniffer probe2 Leak detector 4 Vacuum pump 6 Spray gun for search gas

Pre

ssur

e

Time

C17

General



Leak Testing Based on

Overpressure Methods(Overpressure within the test object)

Pressure Drop Method

The test object is filled with a gas (forexample air or nitrogen) until thetesting pressure is reached. Precisionvacuum gauges are used to detect apossible pressure drop during thetesting period. This method is simpleto implement, it is suitable for thedetermination of gross leaks and canbe improved upon by usingdifferential pressure gauges. Byapplying soap solutions or similar,leaks can be located.

Local Leak Detection with LeakDetectors – Sniffing

The test object is filled with thesearch gas or the search gas/airmixture to which the leak detector issensitive. The leak detector isequipped with a sniffer probe,whereby there is a low pressure atthe probe tip. If the sniffer tip passessuspicious points on the test objectthe search gas coming out of theleak is sucked in and transferred tothe detection system of the leakdetector. After conversion intoelectrical signals these are displayedoptically and acoustically by the leakdetector.

Integral Method – Hood Test

To determine the total leak rate of atest object subjected to a search gasoverpressure, the test object is

surrounded by a hood of a knownvolume. The search gas whichescapes through the leaks collects inthe hood.

After a fixed accumulation period asniffer probe is used to measure theconcentration of the search gaswhich has collected in the hood.Before this the leak detector shouldbe calibrated by a referencemeasurement using a known searchgas concentration.

The leak rate can then be determinedby the equation for qL where V is thevolume of the hood, Dp is the partialpressure difference of the search gas(concentration change) and t is theaccumulation period.

Uncertainties in the determination ofthe volume, leaks in the hood and awrong accumulation period makeprecise leak rate measurementsbased on this method veryquestionable.

Integral Method – Vacuum HoodTest

This test is a variation of the hoodtest described above, which hasconsiderable advantages. A vacuumchamber which is evacuated by anauxiliary pump and which isconnected to a leak detector is usedas the hood. The search gasescaping through the leaks isconverted by the detection system ofthe leak detector into electricalsignals which are immediatelydisplayed. After calibration of theleak detector with a calibrated leak it

is possible to quantitatively determinethe total leak rate.

This method permits the detection ofvery small leaks and is especiallysuited for automatic industrial leakdetection.

Integral Method – Bombing-Test

This method is used for testinghermetically sealed componentssuch as transistors, IC-packages ordry reed relays. It is basically avariation of the vacuum hood test.Here the test objects are placed in avessel which is pressurized with thesearch gas - preferably helium. At afairly high search gas pressure andafter a period of up to several hours itis tried to enrich the search gasinside leaky test objects. This is theactual so called “bombing” process.

After this, the test objects aretransferred to a vacuum chamberand their total leak rate is determinedin the same way as in the vacuumhood test. During evacuation of thevacuum chamber down to therequired testing pressure, those testobjects which have a gross leakalready lost their accumulated searchgas. These parts are not detected asleaking during the actual leak test.Therefore the test with the vacuumchamber is often preceded by a“bubble test”.

This method permits the detection ofthe lowest leak rates and is usedmainly in automatic industrial leaktesting especially when it is notpossible to fill the parts with gas inany other way.

Leak detection – Search gas overpressure in the test object

2

3

LD

HELIUM

1

7

Integral method (search gas accumulation)Search gas overpressure in the test object

2

3

LD

HELIUM

1

7

5

Integral-Methode – Search gas overpressure in the test object

2

3

4

LD

HELIUM

1

5

Key to the Figures1 Test object 3 Search gas cylinder 5 Hood 7 Sniffer probe2 Leak detector 4 Vacuum pump 6 Spray gun for search gas


general Leak Testing Instruments

7

Operating Principles of the Helium LeakDetectors

Operating PrincipleA helium leak detector permits thelocalization of leaks and thequantitative determination of the leakrate, i.e. the gas flow through theleak. Such a leak detector istherefore a helium flow meter.

In practice the leak detectorperforms this task by firstlyevacuating the part which is to betested, so that gas from the outsidemay enter through an existing leakdue to the pressure differencepresent. If only helium is brought infront of the leak (for example byusing a spray gun) this helium flowsthrough the leak and is pumped outby the leak detector. The heliumpartial pressure present in the leakdetector is measured by a sectormass spectrometer and is displayedas a leak rate. This is usually given interms of volume flow of the helium(pV-flow).

Important SpecificationsThe two most important features of aleak detector are its measurementrange (detection limits) and itsresponse time.

The measurement range is limited bythe lowest and the highest detectableleak rate. The lowest detectable leakrate is defined by the sum of drift andnoise in the most sensitive measure-ment range. Usually the sum of noiseamplitude and zero drift per minute ismade to be equivalent to the lowestdetectable leak rate. With leakdetectors the amount of drift is solow, that the noise amplitude alonedetermines the detection limit.

The highest detectable leak ratedepends strongly on the methodemployed. Especially the counterflowmethod and partial flow operation(see description below) permit themeasurement of very high leak rateseven with a sensitive helium leakdetector. In addition the multistageswitchable high impedance inputamplifiers of the leak detectors alsopermit the measurement of high leakrates.

In practical applications, especially inthe localization of leaks the responsetime is of great significance. This is thetime it takes from spraying the test

object with helium until a measuredvalue is displayed by the leak detector.The response time of the electronicsignal conditioning circuitry is animportant factor in the overall responsetime. In the case of leak detectors theresponse time of the electronic circuitryis well below 1 s.

The volume flow rate for helium at thepoint of the test object is of decisivesignificance to leak detection oncomponents which are pumpeddown solely by the leak detector. Thisvolume flow rate provided by the leakdetector takes care of the heliumentering through a leak and itensures quick detection by the leakdetector. On the other hand thevolume of the test object delays thearrival of the helium signal. Theresponse time can be calculated onthe basis of the following simpleequation:

Response time for helium tA = 3

(for 95% of the final value)

with V = Volume of the test objectSHe = Volume flow rate for

helium at the point of the test object (or at the inlet of the leakdetector, if it alone pumps down the testobject).

V

SHe

C17

General



Main Flow MethodThe classic operating principle ofhelium leak detectors is based on themain flow method. Here the entirehelium flow passes through the highvacuum system of the leak detector,where the mass spectrometer measures the partial pressure of thehelium. In this, the use of a liquidnitrogen cold trap is essential toremove water vapor or other condensible gases in the vacuumsystem which impair the operation.Moreover, the use of a cold trap permits the low operating pressuresfor the mass spectrometer to be reached (below 10-4 mbar) despitethe directly connected (and possiblycontaminated) test object.

The advantages of the main flowmethod are:

– Highest sensitivity, i.e. low detection limit

– Short response time due to a highvolume flow rate at the inlet.

The main flow method is thus especially suitable for stationary leakdetection on components. Leakdetection on systems having theirown pump sets and at higher pressures requires the use of anexternal throttling valve, i.e. a partialflow with subsequently reduced sensitivity is utilized.

Counterflow MethodWith this method the test object is notconnected to the high vacuum.Instead it is connected to the fore-vacuum (between turbomolecularpump and backing pump), so thatthe entire gas flow (especially watervapor) does not contribute to thepressure increase in the massspectrometer. Thus a cold trap is nolonger required!

The helium which now enters theforevacuum can still be detected, asit is able to flow against the pumpingdirection of the turbomolecular pumpinto the mass spectrometer. This isdue to the high particle velocity of thehelium. The sensitivity of this counter-flow arrangement is equal to that ofthe main flow principle, provided theright combination of volume flow rateof the backing pump and heliumcompression of the turbomolecularpump is used.

The advantages of the counterflowmethod are:

– No liquid nitrogen is required

– High permissible inlet pressures(i.e. pressure within the testobject)

This makes the counterflow methodespecially suitable for mobile leakdetection on systems. For leak detection on larger componentswhere a short response time isessential (i.e. high volume flow rate)an additional turbomolecular pumpstage is required at the inlet of theleak detector.

Main flow method Counterflow method Partial flow method

Partial Flow MethodIn order to expand the measurementrange in the direction of higher leakrates and for operation at higher inletpressures, helium leak detectorsincorporate a partial flow or a grossleak system. This consists basicallyof a throttle and a rotary vane pump.At pressures above the normal inletpressure (main flow: above 10-2 mbar, counterflow: above 10-1 mbar) or in the case of high helium leak rates, the inlet valve isclosed and the main flow is allowedto enter the partial flow pump, whereas only a small part enters theleak detector via the partial flowthrottle. Thus the total pressure andthe helium pressure are dropped tovalues suitable for operation of theleak detector.

To obtain correct leak rate readingsin the partial flow mode, the partialflow ratio, i.e. the ratio between theactually measured gas flow and thetotal gas flow must be known andstable.

In all leak detectors this is achievedby a partial flow throttle made of rubywith a precisely machined hole. Thisensures that the quantitatively determined leak rates are always correct without calibration, even forgross leaks.

Main flow orcounterflowleak detector

Testleak



9

Calibration of Helium Leak

Detectors with Calibrated

LeaksIn the process of leak detection oneexpects that a test object which doesnot have a leak produces a zero reading on the leak detector. In thisany malfunctions are excluded. Thuscalibrated leaks, i.e. artificial leakswhich produce a known helium leakrate are essential for reliable results.

To obtain a quantitatively correct leakrate reading the sensitivity of the leakdetector must also be adjusted. Thisrequires the use of a calibrated leak.

Leybold offers calibrated helium leaksof various designs covering the rangebetween 10-9 to 10-4 mbar x l x s-1

as part of the standard range of products. All leak rates are traceableto the standards of the German

Calibration Service controlled by thePTB (Federal Institution of Physicsand Technology). If requested eachhelium calibrated leak can be supplied with a calibration certificateissued by the German CalibrationService. The calibration itself is performed by the German CalibrationService for Vacuum which is run byLeybold on behalf of the PTB.

C17

Helium Leak Detectors



Advantages to the User� Lowest detectable leak rate

� Short He recovering time condition

� Quick start-up

� Extremely fast response time

� Oil-free gas admission system

� One of the smallest helium leakdetectors in the world

� High sensitivity

� Fast leak rate readout also at lowleak rates

Typical ApplicationsLeak tests in connection with

� Quality assurance

� Automotive industry

� Analytical instruments

� Systems manufacture

� Power station engineering

� Research and development

� Semiconductor industry

� High vacuum and ultra-highvacuum engineering

� Ideal tool for industrial seriesproduction testing – in the coolingand air conditioning industries, forexample

In connection with the sniffer lineswhich are available as accessoriesthe PhoeniXL 300 may also be usedas a sniffer leak detector.

In connection with a partial flowpump set the PhoeniXL 300 may alsobe used for the detection of leaks onlarge vessels.

Helium Leak DetectorPhoeniXL 300

The PhoeniXL 300 is a portable multi-purpose helium leak detector andequally well suited to both serviceand series production testing.

Its rugged design and its ease of usemake the PhoeniXL 300 to a user-friendly leak detector in its class.

PhoeniXL 300

Ordering Information


Helium Leak Detectors Leak Testing Instruments

11

Technical Data

Smallest detectable helium leak rate

(Vacuum mode) mbar x l x s-1


(Sniffer mode) mbar x l x s-1

Max. detectable helium leak rate


Max. inlet pressure mbar (Torr)

with partial flow pump set mbar (Torr)

Pumping speed during the

evacuation process

50 Hz m3 x h-1 (cfm)


Pumping speed for

helium at the inlet l/s

Time constant of the leak signal

(blanked off, 63 % of final value) s

Leak rate measurement range

mbar x l x s-1

Units of measurement (selectable)

Time until ready for operation min

Mass spectrometer

Ion source

Detectable masses amu

Test port DN

Dimensions (W x H x D) mm

Weight kg (lbs)

≤ 5 x 10-12

< 1 x 10-7

1 x 10-1

15 (11.25)

1000 (750)

2.5 (1.5)

3.0 (1.8)

> 2.5

< 1

1 x 10-12 to 1 x 10-1

mbar x l x s-1, atm x cc x sec-1, Pa x m3 x s-1, ppm, Torr x l x s-1, g/a, oz/y

< 2

180° magnetic sector field

2 yttrium/iridium long-life cathodes

2, 3 and 4

1 x 25 KF

495 x 440 x 315

40.0 (88.2)

PhoeniXL 300

115 V / 60 Hz, mbar readout,

with integrated calibrated leak TL 7

230 V / 50/60 Hz, mbar readout,


PC software LeakWare

Seal kit

For further accessories see Section

“Accessories for PhoeniXL 300,

PhoeniXL 300 Dry und PhoeniXL 300 Modul”

Part No. 251 000

Part No. 250 000

Part No. 140 90

Part No. 200 99 150

PhoeniXL 300

PhoeniXL 300

C17




Portable and Dry Helium Leak DetectorPhoeniXL 300 Dry

Advantages to the User� Oil-free “dry” pump system

� Small footprint

� Quick start-up

� Extremely fast response

The PhoeniXL 300 Dry is a compactportable helium leak detectorcapable of meeting the highestcleanness requirements.

Based on the well-proven technologyof the PhoeniXL 300 Dry, equippedwith an oil-free pump system, thePhoeniXL 300 Dry meets the highestrequirements concerning cleannesswhile at the same time being small insize.

Typical ApplicationsLeak tests with stringentrequirements concerning cleanness,for example

� Semiconductor industry– after repairs or maintenance

work

� Semiconductor industry– Production of semiconductor

components

� Pharmaceutical/medicine

� Laser

PhoeniXL 300 Dry



13

Technical Data







Max. permissible inlet

pressure mbar (Torr)


evacuation process



Pumping speed for helium at the inlet l/s




mbar x l x s-1



Mass spectrometer

Ion source


Test port DN


Weight kg (lbs)

≤ 2 x 10-11

< 1 x 10-7

1 x 10-1

15 (11.25)

1.6 (0.94)

1.9 (1.12)

> 2.5

< 1

1 x 10-11 to 1 x 10-1

mbar x l x s-1, atm x cc x sec-1, Pa x m3 x s-1, ppm, Torr x l x s-1, g/a, oz/y

< 2

180° magnetic sector field

2 yttrium/iridium long-life cathodes

2, 3 and 4

1 x 25 KF

495 x 440 x 315

36 (79.4)


PhoeniXL 300 Dry

115 V / 60 Hz, mbar readout,


230 V / 50/60 Hz, mbar readout,



Seal kit




Part No. 251 001

Part No. 250 001

Part No. 140 90

Part No. 200 99 150

PhoeniXL 300 Dry

PhoeniXL 300 Dry

C17




Mobile and Flexible Helium Leak DetectorPhoeniXL 300 Modul

The PhoeniXL 300 Modul combinesthe excellent characteristics of thePhoeniXL 300 with those of the pumpsystem which has been added to thebasic leak detector module.

This results in two basic groups:

� Dry, mobile leak detectors withselectable pumping speed

� Oil-sealed, mobile leak detectorsoffering a high pumping speed atan optimum price-to-performanceratio.

PhoeniXL 300 Modul

with Oil-Sealed

Backing PumpThis combination represents apowerful leak detector, the pumpingspeed of which is adapted to theparticular application in each case.

Advantages to the User� Cost-effective leak detector

� Pumping speed optimized for theparticular application

� Fast response

� Quick recovery


� Fast leak rate readout also at lowleak rates

Typical ApplicationsAll applications involving short cyclesand/or larger volumes and whichrequire a mobile system, like forexample:

� Automotive industry

� Cooling and air conditioning

� Manufacturers of furnaces/machines/systems

� Packaging

The PhoeniXL 300 Modul representsthe basic unit of an entire family ofleak detectors. It is based on thePhoeniXL300, is not equipped with anintegrated backing pump and maybe easily adapted by adding anexternal backing pump to suit a widerange of applications.

PhoeniXL 300 Modul

with Dry-Compressing

Scroll PumpThis combination represents a dryhigh-performance leak detector.

Advantages to the User� Very high pumping speed which is

also acceptable for testingsemiconductor productionchambers without having to usetheir own pump systems

� Fast response

� Quick recovery (after helium contamination)

� Absolutely dry


Typical ApplicationsAll applications which demand aclean process, like for example:

� Semiconductor industry (chip manufacturers)

� Semiconductor industry (tool manufacturers and sub-contractors)

� High purity gas industry

� Research and development

� UHV applications

PhoeniXL 300 Modul



15

Technical Datawith Rotary Vane Vacuum Pump







Max. permissible inlet

pressure mbar (Torr)


evacuation process

scroll pump / TRIVAC D 25 B pump

(60 Hz) m3 x h-1 (cfm)

Pumping speed for helium

at the inlet flange l/s




mbar x l x s-1



Mass spectrometer

Ion source


Test port DN


Weight (without pump) kg (lbs)

≤ 5 x 10-12 ≤ 8 x 10-12

< 1 x 10-7 < 1 x 10-7

10-1 10-1

15 (11.25) 15 (11.25)

30 (18) 36 (21.6)

> 2.5 > 2.5

< 1 < 1

1 x 10-12 to 1 x 10-1 1 x 10-12 to 1 x 10-1

mbar x l x s-1, atm x cc x sec-1, mbar x l x s-1, atm x cc x sec-1,

Pa x m3 x s-1, ppm, Torr x l x s-1, g/a, oz/y Pa x m3 x s-1, ppm, Torr x l x s-1, g/a, oz/y

≤ 2 ≤ 2

180° magnetic sector field 180° magnetic sector field

2 yttrium/iridium long-life cathodes 2 yttrium/iridium long-life cathodes

2, 3 and 4 2, 3 and 4

1 x 25 KF 1 x 25 KF

495 x 440 x 315 495 x 440 x 315

30 (66.2) 30 (66.2)

with Scroll PumpPhoeniXL 300 Modul

C17





PhoeniXL 300 Modul without backing pump

115 - 230 V / 50/60 Hz


Seal kit

Pumps

TRIVAC D 25 B; 230 V, 50/60 Hz

Scroll, 100 - 230 V / 50/60 Hz

CART 300




Part No. 250 002

Part No. 140 90

Part No. 200 99 150

Part No. 113 35

Part No. 200 000 214

upon request

PhoeniXL 300 Modul

The following Part Nos. contain onlythe individual components neededfor assembly by the customer.



17

Notes

C17

Accessories



Calibrated Leaks for Vacuum and Sniffer Applications

Calibrated Leaks for

Vacuum ApplicationsTL 4 and TL 6Calibrated leaks without gas reservoir(capillary type of leak) for sensitivityand signal response time deter-minations during vacuum leakdetection and for determination ofsniffer sensitivity for overpressureleak detection. Nominal leak rateranges 10-4 mbar x l x s-1 for TL 4and 10-6 mbar x l x s-1 for TL 6.Suitable for helium. A purging valvewith hose nozzle permits a rapidexchange of the gas in the deadvolume.

TL 4-6Helium calibrated leak (capillary leak)for gross leaks, adjustable in therange between 10-4 to 10-6 mbar x l x s-1, withexchangeable helium reservoir,pressure gauge and two manuallyoperated valves. For calibration ofleak rate readings and the alignmentof helium mass spectrometers in thevacuum pressure range and fordetermining the sensitivity of sniffersin the overpressure range.

TL 5

Calibrated helium leak (capillary leak)with reservoir which may be refilledand with a leak rate in the range of10-5 mbar x l x s-1. Special calibratedleak for use in a vacuum.

TL 7Helium calibrated leak (capillary leak)with helium reservoir and electro-magnetically operated valve. Leakrate range 10-7 mbar x l x s-1. Theelectromagnetically operated valveprovided permits the opening andclosing of the calibrated leak to becontrolled by the leak detector’ssoftware.

TL 8 and TL 9Helium calibrated leak calibrated fora leak rate in the range of 10-8 mbar x l x s-1 (helium leak rate)for TL 8 and 10-9 mbar x l x s-1 for TL 9, with gas reservoir anddiaphragm shutoff valve. Foralignment of a helium mass spectro-meter, for calibration of the leak ratedisplay of helium leak detectors andfor response time measurements inconnection with larger volumes.

NoteAll calibrated leaks with theexception of the TL 5 are not suitedfor use in a vacuum.

Advantages to the User� Factory certificate (included)

in accordance with DIN 55 350-18-4.2.2

� Highly accurate

� Very low temperature dependence

� Determination of the nominal leakrate by comparison with acalibrated leak having a PTB 1)

certificate

� DKD 2) certificate (optional)traceable to PTB

� Custom models for specialapplications

The nominal leak rate applies only ifthe calibrated leak has beenconnected to a vacuum system at apressure of less than 1 mbar.

1) Federal Institution of Physics and Technology2) German Calibration Service

Calibrated leaks are required for thealignment of mass spectrometers, forthe calibration of leak rates and fordetermining the response time ofvacuum systems.

Test leaks

Cal ibrated LeakOrdering Information


Accessories Leak Testing Instruments

19

Technical Data

TL 4, without helium gas reservoir

TL 6, without helium gas reservoir

TL 4-6, with helium gas reservoir

TL 5, with helium gas reservoir




S-TL 4, with helium gas reservoir



10-4 mbar x l x s-1 Vacuum and sniffer DN 16 KF

10-6 mbar x l x s-1 Vacuum and sniffer DN 16 KF

10-4 to 10-6 mbar x l x s-1 Vacuum and sniffer DN 16 KF

10-5 mbar x l x s-1 Vacuum Discharging opening

10-7 mbar x l x s-1 Vacuum (for installation Nozzle

within the PhoeniXL 300)

10-8 mbar x l x s-1 Vakuum DN 10 KF

10-9 mbar x l x s-1 Vakuum DN 10 KF

10-4 mbar x l x s-1 Sniffer Nozzle



Leak Rate Range

Leak DetectionMethod

Connection Flange

TL 4, without helium gas reservoir 1)

TL 6, without helium gas reservoir 1)

TL 4-6, with helium gas reservoir 1)

TL 5, with helium gas reservoir 1)


for installation within the PhoeniXL 300


TL 9, with helium gas reservoir 1

S-TL 4, with helium gas reservoir 1)



Set of calibrated leaks for power plants

1000, 100, 10 mbar x l x s-1

Rubber bladder

Hose clamp

Helium can; 1 l, 12 bar (for TL 4-6)

DKD calibriation for TL 7/8

1) with factory certificate

Part No. 155 65

Part No. 155 66

Part No. 155 80

Part No. 122 67

Part No. 140 23

Part No. 165 57

Part No. 144 08

Part No. 122 37

Part No. 122 38

Part No. 122 39

Part No. 115 16

Part No. 200 20 218

Part No. 200 20 217

Part No. 252 001

Part No. 154 15

Calibrated Leaks for

Sniffer ApplicationsThese calibrated leaks have been setto a fixed value within the typical leakrate range (see OrderingInformation). The exchangeablecalibration gas reservoir is monitoredthrough the built-in manometer.

Helium calibrated leaksS-TL 4 to S-TL 6 with leak rates from10-4 to 10-6 mbar x l x s-1.

Set of Calibrated Leaks

for Power PlantsThese three calibrated leaks of 1000,100 and 10 mbar x l x s-1 allow leaktests under partial flow conditionsunder the ambient conditions ofpower plants.

C17

Accessories



Screw-in Calibrated Leaks

Calibrated Leak with

Screw-in SleeveIs used as a so-called master leak tocheck the entire helium leak testingsystem.

Generally two leaktight test samplesare equipped with these calibratedleaks. These will ensure proper separation between “passed andrejected” parts.

They are fitted to the customer’s testsamples either by a welded joint orthe screw-in sleeve is glued in place.


Pin Type CasingServes as a calibrated leak for theentire helium leak testing systemwithout being influenced by the presence of a test sample.

Here a dummy is placed in the testchamber. The connection to the testchamber is directly by a DN 10 KF fitting. The test gas connection is either by a VCO fitting or a hosenozzle for flexible connections.

Connections on the side of the customer’s system are

- 16 KF running to the vacuumchamber

- Hose nozzle, 10 mm in diameter orVCO fitting, 10 mm in diameter


Cylindrical CasingIs used to check the sensitivity of asniffing facility.

Before and after the actual test, theoperator checks the sensitivity of histest facility within the scope of a plausibility check.

The connection on the side of thecustomer’s system is provided via aVCO fitting for a diameter of 10 mm.

Depending on the type of applicationthese calibrated leaks are eitherinstalled in the test sample as amaster leak or used as a continuallyavailable facility in the test chamberitself.

Calibrated leak with screw-in sleeve

The manufacturers of helium leaktesting systems are in need of calibrated leaks of various sizes withindividually adjusted leak rates forthe purpose of setting up and calibrating their systems.

Leybold is now offering a new familyof calibrated leaks which are capableof meeting the requirements concerning type and required leakrate.

Calibrated leak with pin type casing Calibrated leak with cylindrical casing

Typical Applications� As a master calibrated leak built-in

directly into the test sample

� Directly installed to the test chamber

� Use as a calibrated leak for sniffer applications

Advantages to the User� Various types adapted to different

customer requirements

� Simple to operate

� Easy to install

� Ideal installation dimensions

� As a rule, all calibrated leaks aresupplied with a certificate (factorycertificate) indicating the leak ratewhich has been set up

Ordering Information 1)



21

Technical Data

Leak rate mbar x l x s-1Casing only Field 1 Field 2 Field 3

1 - 10-4 10-2 - 10-5 10-3 - 10-8

Cal ibrated Leak

Calibrated leak

with screw-in sleeve

with pin type casing and VCO fitting

with pin type casing and hose nozzle

with cylindrical casing and VCO fitting

– Part No. 143 00 Part No. 143 01 Part No. 143 02– – Part No. 143 05 Part No. 143 06– Part No. 143 08 Part No. 143 09 Part No. 143 10– – – Part No. 143 14

Cal ibrated Leak

1) When ordering please always state leak rate, test pressure and helium concentration

Leak rate as a function of applied test pressure vs. 0 bar

Calibrated leak with screw-in sleeve Calibrated leak with pin type casing and hose nozzle

Calibrated leak with pin type casing and VCO fitting Calibrated leak with cylindrical casing and VCO fitting

C17

AccessoriesLeak Testing Instruments


Accessories for the PhoeniXL 300,PhoeniXL 300 Dry and PhoeniXL 300 Modul

Remote Control UnitFor the PhoeniXL 300, PhoeniXL 300 Dry and PhoeniXL 300 Modulincluding connection line 4 m andfixing bracket for fixation to the hou-sing of the PhoeniXL 300.

Search Gas Spray GunThe search gas spray gun with PVChose (5 m long) is used for wellaimed spraying of search gas at places where a leak is suspected.

Remote control unit Search gas spray gun

Partial Flow System only forPhoeniXL 300 and PhoeniXL 300 Modulwith following advantages:

� Faster response

� Entry into the measure modealready at an inlet pressure of1000 mbar.

� Faster venting of large test objects

Equipment:Valve block (with inlet valve, ventingvalve, bypass or purging valve) plusright-angle bellows valve DN 25 KFmade of stainless steel, solenoiddrives, suited for remote control bythe PhoeniXL 300.

The partial flow systems are availablewithout pumps.

Replacement Ion SourceComplete replacement component,including two built-in yttrium coatediridium cathodes

8 m Extension LineThe use of extension lines permitsoperation of the PhoeniXL 300 up to30 m away from the test objects. A maximum of three extension lines(of 8 m each) may be connected inseries.

Partial flow system without pump Replacement ion source

Extension line

PC Software LeakWareThe Windows PC software is used fordata acquisition, documentation ofthe measurements and to control theoperation of the leak detector.

Hardware > 486 DX and 8 MB RamSoftware Windows 95, 98, NT, 2000.


Transport Case 300For impact protected transportationof the PhoeniXL 300; complete withstrong carrying handles and plasticcastors. Separate case foraccessories.Transport case 300



23


Remote control unit

including fixing brackets

Transport case 300

Transport cart CART 300

Partial flow system 1)

for PhoeniXL 300;

115 - 230 V / 50/60 Hz, without pump

Pumps

TRIVAC D 25 B, 230 V / 50/60 Hz

Scroll, 100-230 V / 50/60 Hz

AF 16-25 exhaust filter,

for partial flow system

Replacement ion source


8 m long extension line

Search gas spray gun

1) 5 centering rings, 5 clamping rings and 1 vacuum hose 1 m with DN 25 KF are included

Part No. 252 002

Part No. 252 004

upon request

Part No. 140 20

Part No. 113 35Part No. 200 000 214

Part No. 189 11

Part No. 165 04

Part No. 140 90

Part No. 140 22

Part No. 165 55

Accessories

C17

Accessories



Helium Sample Probes (Sniffers)

Advantages to the UserHelium Sniffer Line SL 300 forPhoeniXL 300� Sniffer line connects directly at the

test connection

� Very fast response

� Extremely low detection limit< 1 x 10-7 mbar x l x s-1

� Rigid sniffer tips 120 mm(included)

� Very rugged industrial design

Helium Sniffers QUICK-TEST QT 100 for PhoeniXL 300� Sniffer leak detection for greater

distances between test object andleak detector

� Diaphragm pump for sucking thesearch gas

� Smallest detectable leak rate 1 x 10-6 mbar x l x s-1

� Short response and decay times

� High sniffer velocity

� Switching power supply, can berun off mains voltages from 100 to 230 V AC

Typical Applications� Storage and transportation vessels

for gases and liquids

� Gas supply systems

� Gas compressors

� Components for the cooling andair conditioning industries

� Heat pumps and components forthermal energy recovery units

� Chemical production plants

� Supply and phone lines laid in theground

� Power station condensers andturbines

� Window and door seals of carbodies, refrigerators and alike

� Revision checks on leak testingsystems

� Measurement of helium concen-trations ranging from ppm to %

� All hollow objects exposed tooverpressures

Helium sniffers in connection with theleak detectors are used for leaktesting test samples in which a helium overpressure is present.Besides accurate pinpointing of leaksit is also possible to determine theleak rate of the escaping helium.

Helium sniffer line SL 300 Helium sniffer QUICK-TEST QT 100 with sniffer

QT 100SL 300Ordering Information



25

Technical Data

Smallest detectable leak rate mbar x l x s-1

Supply voltage

Signal response time, approx.

at a length of

05 m s

20 m s

50 m s

Connection flange DN

Weight kg (lbs)

< 10-7 10-6

– 100-230 V, 50/60 Hz

< 1 1

– < 6

– 20

25 KF 25 KF

0.6 (1.3) 3.5 (7.7)

Helium sniffer line SL 300

4 m long, straight handle, with

red/green LED for go/no-go indication,

rigid and flexible sniffer tip 120 mm

Helium sniffer QUICK-TEST QT 100

Sniffer line for the QT 100

05 m

20 m

Part No. 252 003 –

– Part No. 155 94

– Part No. 140 08

– Part No. 140 09

SL 300 QT 100

C17

Accessories



Leak Detectors Hel ium Sniffers Cal ibrated Leaks

PhoeniXL 300 – DN 25 KF

PhoeniXL 300 Dry – DN 25 KF

PhoeniXL 300 Modul – DN 25 KF

If components of the same nominal width are connected, only one centering ring and one clamping ring will be required.

SL 300 – DN 25 KF

QT – DN 25 KF

ST 100 – DN 25 KF

TL 4 – DN 16 KF

TL 6 – DN 16 KF

TL 4-6 – DN 16 KF

Connection Flanges

Connection Components

When wanting to connect accessories (helium sniffer and calibrated leaks) to a leak detector, the following reducers andcomponents may be necessary:

Reduct ion Reducers Centering RingsStainless steel/FPM

Clamping RingsAluminum

DN 25 / 16 KF

DN 40 / 25 KF

DN 40 / 16 KF

Part No. 183 86, Aluminum or

Part No. 885 04, Stainless steel





DN 25 KF, Part No. 883 47






DN 20 / 25 KF Part No. 183 42

DN 10 / 16 KF, Part No. 183 41

DN 20 / 25 KF, Part No. 183 42

DN 32 / 40 KF, Part No. 183 43

DN 10 / 16 KF, Part No. 183 41

DN 32 / 40 KF, Part No. 183 43

The following metal hoses are recommended to connect the leak detectors to systems:

Nominal Width Length Order ing Information

DN 16 KF

DN 16 KF

DN 25 KF

DN 25 KF

DN 40 KF

DN 40 KF

Further connecting components, like quick clamping rings and other components are described in Product Section C13 “Vacuum Fittings and Feedthroughs”

1.0 m

0.5 m

1.0 m

0.5 m

1.0 m

0.5 m

Part No. 868 01

Part No. 867 91

Part No. 868 03

Part No. 867 93

Part No. 868 05

Part No. 867 95



27

Notes

vacuumLeybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-221 347-0Fax: +49-221 [email protected] w w w . l e y b o l d . c o m

P.R. China

Leybold Vacuum (Tianjin) International Trade Co., Ltd.Beichen Economic Development Area (BEDA),No. 8 Western Shuangchen RoadTianjin 300400, ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 [email protected]

Leybold Vacuum (Tianjin)Equipment Manufacturing Co., Ltd.Beichen Economic Development Area (BEDA),No. 8 Western Shuangchen RoadTianjin 300400, ChinaPhone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 [email protected]

Leybold Vacuum (Tianjin) International Trade Co., Ltd.Beijing Branch:1-908, Beijing Landmark Towers8 North Dongsanhuan RoadChaoyang DistrictBeijing 100004, ChinaSales and Service:Phone: +86-10-6590-7607Fax: +86-10-6590-7622

Leybold Vacuum (Tianjin) International Trade Co., Ltd.Shanghai Branch:Add: No. 33, 76 Futedong SanRd., Waigaoqiao FTZ , Shanghai 200131, ChinaSales and Service:Phone: +86-21-5064-4666Fax: [email protected]

Leybold Vacuum (Tianjin)Guangzhou Branch:Add: G/F,#301 Building, 110 Dongguangzhuang Rd.Tianhe District, Guangzhou 510610, ChinaSales:Phone: +86-20-8723-7873Phone: +86-20-8723-7597Fax: [email protected]

India

Leybold Vacuum India Pvt Ltd.A-215 Road No. 30MIDC Wagle Industrial EstateThane(W) - 400 604 MaharashtraIndiaSales and Service:Phone: +91-22-2581 2929Fax: +91-22-2581 [email protected]

Netherlands

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Leybold Vacuum España S.A.C/. Huelva, 7E-08940 Cornella de Llobregat (Barcelona)Sales: Phone: +34-93-666 46 16Fax: +34-93-666 43 [email protected] Service: Phone: +34-93-666 49 51Fax: +34-93-685 40 10

Sweden

Leybold Vacuum Scandinavia ABBox 9084SE-40092 GöteborgSales and Service: Phone: +46-31-68 84 70 Fax: +46-31-68 39 39 [email protected]/delivery address:Datavägen 57BSE-43632 Askim

Switzerland

Leybold Vacuum Schweiz AGLeutschenbachstrasse 55CH-8050 ZürichSales: Phone: +41-1-308 40 50 Fax: +41-1-302 43 73 [email protected]: Phone: +41-1-308 40 62 Fax: +41-1-308 40 60

USA

Leybold Vacuum USA Inc.5700 Mellon RoadExport, PA [email protected]: Eastern & Central time zonesPhone: +1-724-327-5700Fax: +1-724-733-1217Pacific, Mountain, Alaskan & Hawaiian time zonesPhone: +1-480-752-9191Fax: +1-480-752-9494Service: Phone: +1-724-327-5700Fax: +1-724-733-3799

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Leybold Vacuum UK Ltd.Waterside Way, Plough LaneGB-London SW17 0HBSales: Phone: +44-20-8971 7000 Fax: +44-20-8971 7001 [email protected]: Phone: +44-20-8971 7030 Fax: +44-20-8971 7003 [email protected]

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Leybold Vacuum GmbHBonner Strasse 498 D-50968 ColognePhone: +49-221-347 1234 Fax: +49-221-347 1245 [email protected]

Leybold Vacuum GmbHSales Area North/EastBranch office BerlinBuschkrugallee 331. ObergeschossD-12359 BerlinPhone: +49-30-435 609 0 Fax: +49-30-435 609 10 [email protected]

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Leybold Vacuum GmbHSales Area WestBranch office CologneEmil-Hoffmann-Straße 43D-50996 Cologne-SuerthPhone: +49-221-347 1270 Fax: +49-221-347 1291 [email protected]

Leybold Vacuum GmbHService CenterEmil-Hoffmann-Straße 43D-50996 Cologne-SuerthPhone: +49-221-347 1439 Fax: +49-221-347 1945 [email protected]

Leybold Vacuum GmbHMobile after sales serviceEmil-Hoffmann-Straße 43 D-50996 Cologne-SuerthPhone: +49-221-347 1765 Fax: +49-221-347 1944 [email protected]

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Japan

Leybold Vacuum Japan Co., Ltd.Head OfficeTobu A.K. Bldg. 4th Floor23-3, Shin-Yokohama 3-chomeKohoku-ku, Yokohama-shiKanagawa-ken 222-0033Sales:Phone: +81-45-4713330Fax: +81-45-4713323

Leybold Vacuum Japan Co., Ltd.Osaka Branch OfficeMURATA Bldg. 7F2-7-53, Nihi-MiyaharaYodogawa-ku Osaka-shi 532-0004Sales:Phone: +81-6-6393-5211Fax: +81-6-6393-5215

Leybold Vacuum Japan Co., Ltd.Tsukuba Technical S.C.Tsukuba Minami Daiichi Kogyo Danchi21, Kasumi-no-Sato, Ami-machi, Inashiki-gunIbaraki-ken, 300-0315Service:Phone: +81-298-89-2841Fax: +81-298-89-2838

Korea

Leybold Vacuum Korea Ltd.#761-4, Yulkeum-ri,SungHwan-eup, Cheonan-CityChoongchung-Namdo,330-807, KoreaSales:Phone: +82-41-580-4420Fax: +82-41-588-3737Service:Phone: +82-41-580-4415Fax: +82-41-588-3737

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Leybold Vacuum Taiwan Ltd.No 416-1, Sec. 3Chung-Hsin Rd., Chu-TungHsin-Chu, Taiwan, R.O.C.Sales and Service:Phone: +886-3-5833988Fax: +886-3-5833999

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HotlineSales: +49-221-347 1234Service: +49-221-347 [email protected]@leybold.com

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