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Transcript of Lab seminar, September 11, 2014, Jin Ho Shin – 1 Fab-level Preventive Maintenance Scheduling A -...
Lab seminar, September 11, 2014, Jin Ho Shin – 1
Fab-level Preventive Maintenance SchedulingA
- Fundamental thesis to express semiconductor fab -
Jin Ho Shin
Department of Industrial and Systems Engineering KAIST, South Korea
Thursday, September 11, 2014
Lab seminar, September 11, 2014, Jin Ho Shin – 2
Presentation Overview
• Introduction– Preventive Maintenance– Semiconductor Manufacturing Factory– Queueing Network– Fab-level PM
• Fundamental Thesis– “The Queueing Network Analyzer” by W.WHITT– Decomposition with Aggregation (DWA)– “A Queuing Network Model for Wafer Fabrication Using Decomposition without Aggregation” By Dean Grosbard, Adar Kalir, Israel Tirkel, and Gad Rabinowitz
• Future works – Minho’s PM research– Autosched AP
• Concluding remarks
Lab seminar, September 11, 2014, Jin Ho Shin – 3
Introduction
• Preventive Maintenance in semiconductor manufacturing - Complex and essential than any other manufacturing system- Need to be scheduled carefully- Availability vs Reliability
Preventive Maintenance
Semiconductor Manufacturing
Factory
Queueing Net-work
Fab-level PM
Lab seminar, September 11, 2014, Jin Ho Shin – 4
Introduction
• Semiconductor Manufacturing FacilityPreventive Maintenance
Semiconductor Manufacturing
Facility
Queueing Net-work
Fab-level PM
- 4 complicating stages
(2) Probing (3) Assembly or Packing (4) Final Testing(1) Fabrication
(1) Fabrication
(2)(3)(4)
Lab seminar, September 11, 2014, Jin Ho Shin – 5
Introduction
• Semiconductor Manufacturing Facility, Fab- Complex manufacturing system- Toolsets are linked each other- Toolsets are affected by each other
Preventive Maintenance
Semiconductor Manufacturing
Facility
Queueing Net-work
Fab-level PM
Lab seminar, September 11, 2014, Jin Ho Shin – 6
Introduction
• Queueing Network- Networks of queues have proven to be useful models to analyze the performance of complex systems- To analyze fab, Node: Toolset / Customer: Wafer / Tools: Number of servers
Preventive Maintenance
Semiconductor Manufacturing
Factory
Queueing Net-work
Fab-level PM
Lab seminar, September 11, 2014, Jin Ho Shin – 7
Introduction
• Preventive maintenance in fab level- Currently, PM is scheduled based on toolset- One toolset can affect many other toolsets
Preventive Maintenance
Semiconductor Manufacturing
Facility
Queueing Net-work
Fab-level PM
Lab seminar, September 11, 2014, Jin Ho Shin – 8
Fundamental Thesis
• The Queueing Network Analyzer- W.WHITT / THE BELL SYSTEM TECHNICAL JOURNAL, VOL. 62,No. 9, 2779-2812, November 1983
QNA
DWA
QNM using DWOA
?
?
Lab seminar, September 11, 2014, Jin Ho Shin – 9
Fundamental Thesis
• Deterministic routesQNA
DWA
QNM using DWOA
Lab seminar, September 11, 2014, Jin Ho Shin – 10
Fundamental Thesis
• Deterministic routesQNA
DWA
QNM using DWOA
Lab seminar, September 11, 2014, Jin Ho Shin – 11
Fundamental Thesis
• Variability of intel-arrivalQNA
DWA
QNM using DWOA
Lab seminar, September 11, 2014, Jin Ho Shin – 12
Fundamental Thesis
• Decomposition with Aggregation- Performed well over a wide range of queueing networks- Three basic linear operators / Superposition, Departure, Splitting
QNA
DWA
QNM using DWOA
Lab seminar, September 11, 2014, Jin Ho Shin – 13
Fundamental Thesis
• A Queuing Network Model for Wafer Fabrication Using Decomposi-tion without Aggregation
- Dean Grosbard, Adar Kalir, Israel Tirkel, and Gad Rabinowitz / THE BELL SYSTEM TECHNICAL JOURNAL, VOL. 62,No. 9, 2779-2812, November 1983
- Bitran & Tirupati / “Splitting is the main cause of poor estimation”
QNA
DWA
QNM using DWOA
Lab seminar, September 11, 2014, Jin Ho Shin – 14
Fundamental Thesis
• A Queuing Network Model for Wafer Fabrication Using Decomposi-tion without Aggregation
- One stream to several operations
QNA
DWA
QNM using DWOA
Lab seminar, September 11, 2014, Jin Ho Shin – 15
Future works
• Minho’s PM research- Change the -> - Change the form to apply (Time-based PM, Assumption, etc.)
• Autosched AP- Simulation result for comparison- Currently: Follow existing demo fab-simulation
Lab seminar, September 11, 2014, Jin Ho Shin – 16
Concluding Remarks
• So far, fab-level PM optimization is not saturated topic • Targeting: Applying the to queueing network and find the fab-level PM optimiza-
tion model during this semester• Consistently accustom to Autosched AP