Interfacing Peripherals to Computer System or disk interfacing technology
Interfacing the NanoMicro Macro Worldscitris-uc.org/files/2006-04-10-CITRIS_Asia/pdfs/... · ·...
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The CITRIS NanoLab Center Interfacing the NanoMicroMacro Worlds Professor Nathan Cheung Acting Director, CITRIS NanoLab Center, University of California, Berkeley Tokyo, Japan April 10, 2006
Transcript of Interfacing the NanoMicro Macro Worldscitris-uc.org/files/2006-04-10-CITRIS_Asia/pdfs/... · ·...
The CITRIS NanoLab Center
Interfacing the NanoMicroMacro Worlds
Professor Nathan Cheung Acting Director, CITRIS NanoLab Center, University of California, Berkeley Tokyo, Japan April 10, 2006
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All we need is great connections
Transportation Health Care Education
Disaster Mitigation Environment Energy
Nano Devices
Micro Systems
Clusters
Massive Cluster
Gigabit Ethernet
Wireless Beacon Optical Network
Self Assembly Tolerant Architecture
Global Connections
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The CITRIS Building at UC Berkeley
Main CITRIS Building
CITRIS NanoLab Center Feb, 2008
Cory Hall and the current Berkeley Microlab
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The CNC Vision • 14,000 sq/ft Class100 area • >120 Principal Investigators and >500 Lab Users • 100/150/200mm wafer processing tools • A premier shared research facility
– worldclass multidisciplinary micro/nanofabrication research – innovative, with commercial and societal impact
• Supporting education and outreach – summer internship and visiting researcher programs – nanofabrication related short courses and educational materials
• Serving the industry – Exploratory research with nano materials and their integration with microsystems
– providing testbed sites for • facility, tool, and process monitoring
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Ubiquitous Electronics
Energy Conversion
0.001
0.01
0.1
1
10
100
0 10 20 30 40
curren
t (nA)
time (min)
A)
BioSensing/ Diagnostics
Nano Photonics
Integration Nano CMOS
Materials, Device, and Microsystem Research
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Supporting the CITRIS Mission
CITRISNetwork
Millennium Cluster
WLAN / Bluetooth Pager
Motorola Pagewriter 2000
Visualization Human Centered Computing
H.323 GW
Environmental Monitoring
Smart Dust
Wearable Displays
Smart Building
Smart Classroom
Earthquake Engineering
Sensor Network Tiny OS
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The First University IC Lab …was built in 1962 at UC Berkeley
Researchers David Hodges and William Oldham in the original Berkeley Microlab.
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A shared facility: For more than 20 years, the Microlab has supported researchers from:
9 UCB departments
4 UC campuses
3 U.S. National Labs
Infrastructure is at capacity
The Microlab …expanded around the IC lab and opened in 1983
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The Present Microlab Education 351 1968 1982 grad and post grad researchers 2216 1983 2005 grad, postgrad,and industrial researchers Impact on California Economy 68 1996 – 2005 Berkeley Microlab Affiliate members (BMLA)
Incubates >40 California start-up companies
ICs
Optoelectronics
MEMS
Bioelectronics
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The Microlab Legacy Sample Firsts and Bests
First surface polysilicon micromachining for MEMS; pinjointed gears, cranks, and springs; rotary electrostatic drive motor.
L.S. Fan, Y.C. Tai and R.S. Muller
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The Microlab Legacy Sample Firsts and Bests
Demonstrated world’s shortest gate length transistor 15nm Lg FinFET (2000)
(Profs. Hu, King,and Bokor, EECS)
1.0 0.5 0.0 0.5 1.0 1.5 2.0 10 12
10 10
10 8
10 6
10 4
10 2
10 12
10 10
10 8
10 6
10 4
10 2
Nbody= 2x10 18 cm 3
P+Si 0.4 Ge 0.6 Gate
NMOS PMOS
V d =0.05 V
V d =1.0 V
V d =0.05 V
V d =1.0 V
Drain Current, I d [A/um]
Gate Voltage, V g [V]
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Fluidic Self Assembly (FSA) Process Lowcost HighVolume assembly of RFID tags and related products.
Nanoblock IC and Corresponding hole.
Professor J.S. Smith and Alien Technology
The Microlab Legacy Sample Firsts and Bests
158mmwide straps Ready to attach to RFID antennas
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1D Functional Heterojunctions LOHNs
• NanoElectronics •Thermoelectrics
COHNs
•NanoOptics •NanoFludics
Nanotape
•Selective sensors
Si/SiGe AlGaN/GaN TiO2/SnO2 GaN/AlGaN
Prof. P. Yang, Chemistry, UCB
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Temperature (K) 0 100 200 300 400
Thermal Con
ductivity
(W/m
K)
0
500
1000
1500
2000
2500
3000
3500
Nanowire Nanowire Transport Properties (Thermal, Electrical, Thermoelectric) Transport Properties (Thermal, Electrical, Thermoelectric)
Pt heater line
Multiwall nanotube bundle
Prof. A. Majumdar, ME, UC Berkeley
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Organic Electronics
Professor Vivek Subramanian EECS, UC Berkeley
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Immuno Sensor
Professor Bernard Boser, EECS, UC Berkeley
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The PicoBeacon: An EnergyScavenging Radio
Professor Jan Rabaey, EECS, UC Berkeley
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Laser Contact
Tuning Contact
Nanometer Wavelength Resolution Laser for Optical Networks
Tuning Contact
Movable Mirror
Top DBR
QW Active Region
Contact
Oxidation Layer
Bottom DBR
Laser Output
Professor ChangHasnain, EECS, UC Berkeley
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NearField Simulations
Insitu Monitoring
Resistanc
e
Pulses (95 mJ/cm 2 )
0
500
1000
1500
2000
2500
0 50 100 150 200 250 300
30 mJ/cm 2 : 50 pulses
50 mJ/cm 2 : 50 pulses 50 mJ/cm 2 : 100 pulses
Fermtosecond Laser Annealing
Profs. Nathan Cheung (EECS) and Costas Grigoroupolous (ME)
V
plasma sheath
+
wafer target
V
plasma sheath
+
wafer target
UltraLow energy Plasma Doping
Si Nanowire FET Processing
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New Capabilities, New Frontiers Quantum dot and nanowire growth CVD, RTP
Diffusion, oxidation Nanowire/QD synthesis Gate stack engineering
GATE
SOURCE
DRAIN
20 nm 20 nm
10 nm 10 nm
GATE
SOURCE
DRAIN
20 nm 20 nm
10 nm 10 nm 10 nm 10 nm
DoubleGate FinFET 6” / 8” DUV and Ebeam litho Nanoimprint CDSEM
Nanowire characterization and integration Metrology
Wafer bonding PG /direct write maskmaking
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New Capabilities, New Frontiers
Ge Source Ge Drain
T Si = 3 nm
Gate
SiO 2 Si
XTEM of UTB MOSFET w/ raised Ge S/D
Ge Source Ge Drain
T Si = 3 nm
Gate
SiO 2 Si
XTEM of UTB MOSFET w/ raised Ge S/D MOCVD / ALD Sputter Dep (Mo, Ti, TiN) TEOS ozone conformal SiO2 Pulsed gas DRIE
Reactive ion etch of SiC Metal etch Piezoelectric AlN dep (Ferroelectric BFO dep)
BNC substrate integration 2D polymer microlens CMP, plating
Polymer processing Organic semiconductor
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From Blocks to Superblocks MOCVD Quantum Dots (Weber)
ZnO Nanowires (Yang) CNT on Si (Lin)
Tuning Contact
Movable Mirror Tunable Quantum
Well VCSEL (Chang Hasnain)
Substrate Nanodots
Waveguide
Photonic Crystal
Organic Optical Material
Nanowires
InterLevel Dielectric
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Infrastructure support for both fundamental research and applied integration of : à Nanoscaled CMOS electronics à Nano electromechanical systems NEMS à Bioelectronics device and technology
Energy Conversion Immuno Sensor Heterogeneous Integration
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For any CNC related questions, please contact:
UC Berkeley Microlab Faculty Director Professor Nathan Cheung [email protected]
UC Berkeley Microlab Technology Manager Dr. Bill Flounders
THANK YOU FOR YOUR ATTENTION
