High Resolution Imaging structure and morphology phase heterogeneity & defects Electron Diffraction...

• High Resolution Imaging • structure and morphology • phase heterogeneity & defects • Electron Diffraction • determine crystallography • SAED • CBED • XEDS (energy-dispersive x-ray spectrometry) • Si(Li) detector • EELS (electron energy-loss spectroscopy) • disperses electrons in energy • elemental and chemical analysis HI-MAG Analytical Electron Analytical Electron Microscopy Microscopy

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$Page 1: High Resolution Imaging structure and morphology phase heterogeneity & defects Electron Diffraction determine crystallography SAED CBED XEDS (energy-dispersive.$

• High Resolution Imaging• structure and morphology• phase heterogeneity & defects

• Electron Diffraction• determine crystallography• SAED• CBED

• XEDS (energy-dispersive x-ray spectrometry)

• Si(Li) detector• EELS (electron energy-loss spectroscopy)

• disperses electrons in energy• elemental and chemical analysis• EFTEM possible with an imaging

energy filter

HI-MAG

Analytical Electron MicroscopyAnalytical Electron Microscopy

$Page 2: High Resolution Imaging structure and morphology phase heterogeneity & defects Electron Diffraction determine crystallography SAED CBED XEDS (energy-dispersive.$

EELS EELS vs.vs. EDS EDS

courtesy Gatan EELS course

$Page 3: High Resolution Imaging structure and morphology phase heterogeneity & defects Electron Diffraction determine crystallography SAED CBED XEDS (energy-dispersive.$

Analytical Electron MicroscopyAnalytical Electron Microscopy

EFTEM Mn-C-O Map

25 nm

3 nm

3D imaging field emission STEM

zeptoanalysis nano diffraction HRTEM

0.5 nm

nanoparticles

3 um

tomographyEFTEM Mn-C-O Map

25 nm

Valence mapping

3 nm

3D imaging field emission STEM

zeptoanalysis nano diffraction HRTEM

0.5 nm

nanoparticles

3 um

3D Monte Carlo

chemical sinogram

$Page 4: High Resolution Imaging structure and morphology phase heterogeneity & defects Electron Diffraction determine crystallography SAED CBED XEDS (energy-dispersive.$

3D Reconstructionideal

assumedby

software

reality

newsoftwareneeded

noise added to projections

$Page 5: High Resolution Imaging structure and morphology phase heterogeneity & defects Electron Diffraction determine crystallography SAED CBED XEDS (energy-dispersive.$

““Rubik’s Cube”Rubik’s Cube”

O K mapN K map Cu L map

Al K map Si K map Ti K map

Cu K map Al K map**different contrast stretch

RGB overlay

✔ Forward problem solved. Can we solve the inverse

problem?

$igcar.gov.inSTUDYOFMICROSTRUCTURE,MICROCHEMISTRYAND LATTICE …technique called "Convergent Beam Electron Diffraction" (CBED) offers the possibility of measurementof lattice strain$

igcar.gov.inSTUDYOFMICROSTRUCTURE,MICROCHEMISTRYAND LATTICE …technique called "Convergent Beam Electron Diffraction" (CBED) offers the possibility of measurementof lattice strain

$precession and convergent beam electron diffraction · resolution. In this presentation the interest of using diffraction techniques, either Convergent Beam Electron diffraction (CBED,$

precession and convergent beam electron diffraction · resolution. In this presentation the interest of using diffraction techniques, either Convergent Beam Electron diffraction (CBED,

Introduction to XEDS in the AEMtpm.amc.anl.gov/Lectures/XEDSAEMShortCourse.pdfzaluzec@aaem.amc.anl.gov Brief Review of X-ray Generation Instrumentation: ... Recall that for each atom

Introduction to XEDS in the AEMtpm.amc.anl.gov/Lectures/[email protected] Brief Review of X-ray Generation Instrumentation: ... Recall that for each atom

$0214365 187:9=?;A@CBED - web.cs.elte.huweb.cs.elte.hu/analysis/keleti/papers/fundamenta.pdf0214365 187:9=?;A@CBED F;HGA;I3KJL;HM N4O)PQN4ORO4S T U8V WYX[ZA\]W ^:_$