Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer...
Transcript of Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer...
![Page 1: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/1.jpg)
Flexible, Hybrid Electronics by Micro-Transfer-Printing
Christopher A. Bower, X-Celeprint
![Page 2: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/2.jpg)
Micro Assembly Unlocks New Opportunities
for Wafer Fabricated Devices
“Micro-Transfer Printing” (µTP)
The promise of high-performance devices
anywhereWafer Fabricated Devices
Single-crystal
Fine lithography
(ICs, LEDs, Lasers, etc…)
Plastic, Glass, Ceramic, Paper
Other semiconductors
![Page 3: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/3.jpg)
Rapid, Precise Microdevice Assembly via Printing
1. Form undercut microdevices, anchored at endpoints
2. Transfer them to a target substrate by elastomer stamp printing
3. Interconnect to form systems
![Page 4: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/4.jpg)
Rate Dependent Adhesion
slow lift-off fast lift-off
> 10 cm/sec
Nature Materials, 5, 33 (2006)
“The adhesion between the solid objects and the stamp is rate-sensitive owing to the viscoelastic behavior of the elastomer”
“if you place the stamp on the layer of chips and peel it off quickly the chips adhere to the stamp.
Impress the stamp on the target substrate and peel it off slowly, the chips adhere to the target.” Ken Werner [http://www.displaydaily.com/display-daily/28030-the-only-disruptive-technology-at-display-week]
![Page 5: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/5.jpg)
Precise dispersal of devices from dense arrays
Populated Stamp
Non-native “Target” Substrate
1st transfer 2nd transfer
Densely packed micro componentsDispersed micro components
Source Wafer
Printing
Patterned stamp
![Page 6: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/6.jpg)
Precise dispersal of microscale LEDs
![Page 7: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/7.jpg)
Stamp Fabrication
7
Silicon Master Low-Pressure Injection Molding Elastomer Stamp
![Page 8: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/8.jpg)
Stage (x, y)
Print Head (z, θ, Tx, Ty)
Optics (x, y, z)
Automated Micro Transfer Printing
Semprius Factory, Henderson, NCRTP, NC
Semprius, Durham, NC
stamp + motion + optics
1. pick-
up,
2. print,
3. clean.
[repeat]
Tyndall National Institute, IrelandR&D Printer, imec, Ghent, Belgium
![Page 9: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/9.jpg)
Examples of Printed LEDs
![Page 10: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/10.jpg)
µLED Displays
10
100 µm
1 cm
0.2 mm
SID 2016
• 128RGB x 128 PMILED Display
• > 98,000 interconnections
Science 325, 977 (2009).
![Page 11: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/11.jpg)
Plastic Display with Printed Inorganic LEDs
![Page 12: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/12.jpg)
Active Matrix Display with Printed iLEDs and µICs
Two 180nm ASICs (> 400T)
Semi-additive Copper RDLSID 2016
![Page 13: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/13.jpg)
Summary and Acknowledgements
Releasable high-performance microscale devices (LEDs, ICs, etc…)
+
High speed, room temperature, deterministic assembly
+
Interconnection methods compatible with plastic substrates
= a coherent technology approach to high performance plastic electronics
Thanks to the X-Celeprint team.
Thanks to the John Rogers lab at University of Illinois – Urbana-Champaign
Thanks to the technical staff at Semprius, RTI Int’l, and Tyndall Nat. Inst.
![Page 14: Flexible, Hybrid Electronics by Micro-Transfer- · PDF file“Micro-Transfer Printing” ... > 10 cm/sec Nature Materials, 5 ... Optics (x, y, z) Automated Micro Transfer Printing](https://reader030.fdocuments.us/reader030/viewer/2022011723/5aa5e2497f8b9ac8748dc449/html5/thumbnails/14.jpg)
Micro Assembly Unlocks New Opportunities
for Wafer Fabricated Devices
“Micro-Transfer Printing” (µTP)
The promise of high-performance devices
anywhereWafer Fabricated Devices
Single-crystal
Fine lithography
(ICs, LEDs, Lasers, etc…)
Plastic, Glass, Ceramic, Paper
Other semiconductors