Filter, Valve and Pipng in semiconductor application

TSMC F14 TFE3 劉易昌

May 10 2011

OutlineOutline

Filter Introduction Introduction Valve IntroductionIntroduction Piping IntroductionIntroduction Q&AQ&A

Filter Introduction

What is a Filter?

A filter consists of a series A filter consists of a series

of pores (channels) of a of pores (channels) of a

given sizegiven size

All particles bigger than the All particles bigger than the

pore size are retainedpore size are retained

All particles smaller than All particles smaller than

the pore can go through the pore can go through

the membranethe membrane

Depth Filter Characteristics & Structure

Relatively thick (fractions of an inch)Relatively thick (fractions of an inch) Random structureRandom structure High particle holding capacityHigh particle holding capacity Relatively low retention efficiencyRelatively low retention efficiency Potential for shedding & particle Potential for shedding & particle

releaserelease Typically used as pre-filterTypically used as pre-filter High material contentHigh material content Materials: Polypropylene fiber or Materials: Polypropylene fiber or

fiberglassfiberglass

Membrane Filter Characteristic

Relatively thin (150 microns)Relatively thin (150 microns) Continuous polymeric sheetContinuous polymeric sheet Defined pore size with high retention Defined pore size with high retention

efficiencyefficiency High Porosity ( Track etched low porosity )High Porosity ( Track etched low porosity ) Low particle holding capacityLow particle holding capacity Typically used as final filtersTypically used as final filters Materials - PTFE, PVDF, UPE etcMaterials - PTFE, PVDF, UPE etc..

Comparison of Membrane and Depth Filter Characteristics

Membrane Depth

Thickness Thinner (<150um) Thicker (fractions of an inch)

Form Continuous Polymer Sheet

Interlocked Fibers

Dirt Holding Capacity

Lower Higher

Retention Efficiency

Higher Lower

Media Migration & Shedding

Little Can be high with pulsation

Material PTFE ,UPE PVDF etc.

Polypropylene fiber or fiberglass

Use Final Filters Pre Filters

Depth Filter – Graded DensityDepth Filter – Graded Density

Filter is constructed by wrapping multi-layers of Filter is constructed by wrapping multi-layers of fibrous non-woven media on a corefibrous non-woven media on a core

There is retention gradient along the depth of flThere is retention gradient along the depth of flow direction by using different mediaow direction by using different media

Larger particles retained at outer section and sLarger particles retained at outer section and smaller particle retained at inner sectionmaller particle retained at inner section

Planargard : CMP1,3,5,7,9,11,13,16Planargard : CMP1,3,5,7,9,11,13,16

Layers of M edium

D irection of Flow

Flow

Schematic of Depth Filter

Typical Filtration Devices: Pleated Cartridges

Filter "pack" contains membrane, plus Filter "pack" contains membrane, plus upstream & downstream fibrous suppoupstream & downstream fibrous supports.rts.

Supports can be a source of particles Supports can be a source of particles and can prevent efficient removal of band can prevent efficient removal of bubbles.ubbles.

Pleat pack is thermoplastically potted tPleat pack is thermoplastically potted to form a cartridge.o form a cartridge.

Can be made in varied lengths from 2" Can be made in varied lengths from 2" to 40".to 40".

Permeate

Flow Path

Inle

t F

low

Pat

h

CrossSection

of Pleats

Filter Cartridge Holders

T-Style Housing

Inlet Outlet

Typical Flow Path

Inline Housing

Inlet

Outlet

Typical Flow Path

Typical Disposable Filter Assembly

Vent

Drain

Internal Filter Element

outlet

inlet

C onnections : F lartek, Butt W eld, e tc.

Retention Mechanisms: Sieving and Interception

In sieving (size exclusion), particles are too large to pass In sieving (size exclusion), particles are too large to pass though the pore structure. They are either captured on the though the pore structure. They are either captured on the surface or in smaller passages inside of the structure.surface or in smaller passages inside of the structure.

For interception to occur, the particles move with the fluid For interception to occur, the particles move with the fluid flow but touch a surface and are held there by strong forces.flow but touch a surface and are held there by strong forces.

Retention Mechanisms: Adsorption

Most particles in liquids have a negative charge and can Most particles in liquids have a negative charge and can be captured by attraction to a positively charge spots on be captured by attraction to a positively charge spots on the filter.the filter.

Can be a large factor in liquids with some membranes.Can be a large factor in liquids with some membranes.

+

++

++

++

+

+

+

++

+

+

++

+

+

+

+ +

+

++

++

+

+

Retention Mechanisms: Diffusion

Due to molecular motion, very fine particles move in an almost Due to molecular motion, very fine particles move in an almost random manner that follows a mean free path. Variations along this random manner that follows a mean free path. Variations along this path may cause the particles to come in contact with the filter path may cause the particles to come in contact with the filter structure and be captured.structure and be captured.

Although this is a factor in liquids, it is the largest factor for high Although this is a factor in liquids, it is the largest factor for high efficiency gas filters.efficiency gas filters.

Actual path

Mean Free Path

What is Pore Size Rating and Nominal Retention?

Pore Size Rating Definition:Pore Size Rating Definition: the largest actual or estimated size pores or the largest actual or estimated size pores or

“holes” in a filter“holes” in a filter

Nominal Retention:Nominal Retention: Some Fractional Retention of a particular Some Fractional Retention of a particular

particle size (ex. 90%, 95%, 99%, 99.9%, etc.)particle size (ex. 90%, 95%, 99%, 99.9%, etc.)

What is Pore Size Distribution? Pore Size Distribution Definition:Pore Size Distribution Definition:

An estimate of the range and frequency of pore sizAn estimate of the range and frequency of pore sizes which make up a given filter membranees which make up a given filter membrane

0.20.10.050.01 1.0

Pore Size (micrometers)

# Of P

ore

s

Tight DistributionLoose Distribution

• Both are 0.2 um rated filters based on definition of pore size rating

Loose Vs Tight DistributionLoose Vs Tight Distribution

Effects of Particle Loading

Smaller membrane pores are Smaller membrane pores are plugged first. plugged first.

Larger pores remain open Larger pores remain open resulting in pathway for particles resulting in pathway for particles to travel throughto travel through

Retention decreases with heavy Retention decreases with heavy loadingloading

Decrease in retention can occur Decrease in retention can occur before any noticeable pressure before any noticeable pressure drop increasedrop increase

Increase in pressure drop or reduction in retention

Simple Cartridge/Bowl Installation

Twist cartridge 1/4 turn to lock Tighten locking ringAttach bowl to head

Housing Type For Cartridge Filters Chemlock HHousing Type For Cartridge Filters Chemlock Housing ousing

Micro Contamination Removal

What do we use to Remove This Undesired Matter?What do we use to Remove This Undesired Matter?

FiltersFilters - Particle Removal- Particle Removal

PurifiersPurifiers - - Molecular Impurities Molecular Impurities

(e.g. H2O, O2, Hydrocarbon..)(e.g. H2O, O2, Hydrocarbon..)

Gas filters- Materials of Construction

PTFE (Teflon)PTFE (Teflon) Chemically stable to all gasesChemically stable to all gases Low pressure dropLow pressure drop

MetalMetal Stainless steel (316L Low sulfur)Stainless steel (316L Low sulfur)

Chemically stable, except in corrosivesChemically stable, except in corrosives & Ozone & Ozone NickelNickel

Chemically stable to most gasesChemically stable to most gases Not for Ozone, CO, hydride gases (PHNot for Ozone, CO, hydride gases (PH33, AsH, AsH33, B, B22HH66))

CeramicsCeramics Chemically stable to most gasesChemically stable to most gases can release organics and light metalscan release organics and light metals

Structure of Gas FilterStructure of Gas Filter

Filter MembraneFilter Housing

bodyfitting

Supportcore

Valve Introduction

A valve is a device that regulates, directs or controls the flow of a fluid (gases, liquids, fluidized solids, or slurries) by opening, closing, or partially obstructing various passageways. Valves are technically pipe fittings, but are usually discussed as a separate category. In an open valve, fluid flows in a direction from higher pressure to lower pressure.

Valves may be operated manually, either by a handle, lever or pedal. Valves may also be automatic, driven by changes in pressure, temperature, or flow. These changes may act upon a diaphragm or a piston which in turn activates the valve, examples of this type of valve found commonly are safety valves fitted to hot water systems or boilers.

More complex control systems using valves requiring automatic control based on an external input (i.e., regulating flow through a pipe to a changing set point) require an actuator. An actuator will stroke the valve depending on its input and set-up, allowing the valve to be positioned accurately, and allowing control over a variety of requirements.

What’s a valve

由於閥類種類繁多無法完全列舉 , 一般閥類的用途如球型閥 , 球閥 , 栓塞閥 , 蝶形閥 , 閘閥 , 針閥等僅是流體的延續 , 調整或阻斷作用 , 而特殊閥類的用途如逆止閥 , 電磁閥 , 排洩閥 , 隔離閥 , 空氣釋放閥等為保護設備 , 管路系統或操作需求。閥類的使用主要需依流體的種類 , 設備及使用需求去設計安插。蒸氣 ,水 , 空氣 , 瓦斯 , 油類等 , 不同的流體使用不同閥類 , 壓力等級和構造型式。

以下為廢水廠 , 電子廠 , 焚化爐 , 一般學校家庭常用閥類

球型閥 (Globe Valve) 可較精準調整流量依型式使用任何流體球閥 (Ball Valve) 可調整流量但不精準一般設計全開及全關上 , 依型式常使用在水 , 空氣 , 瓦斯 , 藥劑 , 油類流體栓塞閥 (Plug Valve–Eccentric Plug Type) 可調整流量但不精準一般設計全開及全關上 , 依型式常使用在水及污泥流體蝶形閥 (Butterfly Valve) 可調整流量但不精準 , 依型式常使用在水 , 空氣流體閘閥 (Gate Valve) 可調整流量但不精準一般設計全開及全關上 , 依型式使用任何流體逆止閥 (Check Valve) 保護設備或不同流體防止逆流 , 依型式使用任何流體減壓閥 (red Valve) 依設備系統需求降低某部份或系統流體壓力

Valve type

Valves are quite diverse and may be classified into a number of basic types. Valves may also be classified by how they are actuated:

•Hydraulic

•Pneumatic

•Manual

•Solenoid

•Motor

Valve Type and classified

球型閥 globe valve 球閥 (Ball Valve)

栓塞閥 (Plug Valve–Eccentric Plug Type)蝶形閥 (Butterfly Valve)

逆止閥 (Check Valve)

A check valve, clack valve, non-return valve or one-way valve is a mechanical device, a valve, which normally allows fluid (liquid or gas) to flow through it in only one direction

Advantages over Ball and Gate Valves

     In order to operate and seal effectively, seat wear is inherent in most ball and gate valve designs.  When the seats eventually wear away so does the ball or gate valve ability to seal.  Emergency sealant injection to energize the seal most often enters the flow, potentially damaging downstream instrumentation and or contaminating the flow media.

    In fire-safe ball and gate valves when the primary elastomeric or plastic seals wear away or are destroyed, metal to metal contact between the secondary metal seal on the ball or gate creates abrasion and costly damage to the key sealing components.

•Solenoid Valve, Pneumatic Control Valve

電磁閥

A- Input sideB- DiaphragmC- Pressure chamberD- Pressure relief conduitE- SolenoidF- Output side

1. Valve Body

2. Inlet Port

3. Outlet Port

4. Coil / Solenoid

5. Coil Windings

6. Lead Wires

7. Plunger

8. Spring

9. Orifice

The media controlled by the solenoid valve enters the valve through the inlet port (Part 2 in the illustration above). The media must flow through the orifice (9) before continuing into the outlet port (3). The orifice is closed and opened by the plunger (7). The valve pictured above is a normally-closed solenoid valve. Normally-closed valves use a spring (8) which presses the plunger tip against the opening of the orifice. The sealing material at the tip of the plunger keeps the media from entering the orifice, until the plunger is lifted up by an electromagnetic field created by the coil.

•Direct acting 2-way valves • Two-way valves are shut-off valves with one inlet port and one outlet port. In the de-energized condition, the core spring, assisted by the fluid pressure, holds the valve seal on the valve seat to shut off the flow. When energized, the core and seal are pulled into the solenoid coil and the valve opens. The electro-magnetic force is greater than the combined spring force and the static and dynamic pressure forces of the medium.

•Direct acting 3-way valves Three-way valves have three port connections, one being the "common" port and two valve seats. One valve seal always remains open and the other closed in the de-energized mode. When the coil is energized, the mode reverses.  This is the pneumatic equivalent of a single-pole single-throw electrical switch.

•Direct acting 4-way valves Four-way valves have four port connections and two valve seats. When the coil is energized, one set of ports is connected straight through to the other set of ports.  In the de-energized mode, the connection is reversed.

氣動閥

調壓閥手動閥

調壓閥

手動閥

半導體使用的一些閥件

電磁閥

Piping Introduction

Within industry, piping is a system of pipes used to convey fluids (liquids and gases) from one location to another. The engineering discipline of piping design studies the efficient transport of fluid.

Industrial process piping (and accompanying in-line components) can be manufactured from wood, fiberglass, glass, steel, aluminum, plastic, copper, and concrete. The in-line components, known as fittings, valves, and other devices, typically sense and control the pressure, flow rate and temperature of the transmitted fluid, and usually are included in the field of Piping Design (or Piping Engineering). Piping systems are documented in piping and instrumentation diagrams (P&IDs). If necessary, pipes can be cleaned by the tube cleaning process.

What’s piping

降伏強 抗拉強 伸長率N/mm2 N/mm2 %

{Kg

f/mm2}

{Kg

f/mm2}

301205(21)

以上520(53)

以上 40以上 187以下 90以下 200以下

301J1205(21)

以上570(58)

以上 45以上 187以下 90以下 200以下

302205(21)

以上520(53)

以上 40以上 187以下 90以下 200以下

304205(21)

以上520(53)

以上 40以上 187以下 90以下 200以下

304L175(18)

以上480(49)

以上 40以上 187以下 90以下 200以下

310S205(21)

以上520(53)

以上 40以上 187以下 90以下 200以下

316205(21)

以上520(53)

以上 40以上 187以下 90以下 200以下

316L175(18)

以上480(49)

以上 40以上 187以下 90以下 200以下

321205(21)

以上520(53)

以上 40以上 187以下 90以下 200以下TESSP304DK 90以下 200以下

175(18)

以上480(49)

以上 40以上 187以下

鋼種

拉伸試驗 硬度試驗

HB HRB HV

降伏強 抗拉強 伸長率 彎曲N/mm2 N/mm2 % 角度

{Kg

f/mm2}

{Kg

f/mm2}

401205(21)

以上400(45)

以上 20以上 201以下 93以下 210以下 180。厚度之1.0倍

420J1225(23)

以上520(53)

以上 18以上 223以下 97以下 234以下 180。厚度之1.0倍

420J2225(23)

以上540(55)

以上 18以上 223以下 99以下 247以下 180。厚度之1.0倍

降伏強 抗拉強 伸長率 彎曲N/mm2 N/mm2 % 角度

{Kg

f/mm2}

{Kg

f/mm2}

430205(21)

以上450(46)

以上 22以上 183以下 88以下 200以下 180。厚度之1.0倍

430LX175(18)

以上360(37)

以上 22以上 183以下 88以下 200以下 180。厚度之1.0倍

410L195(20)

以上360(37)

以上 22以上 183以下 88以下 200以下 180。厚度之1.0倍

鋼種

拉伸試驗 硬度試驗 彎度試驗

HB HRB HV內側半

徑

彎度試驗

HB HRB HV內側半

徑鋼種

拉伸試驗 硬度試驗

不銹鋼管

Major classifications of steel

SAEdesignati

onType

1xxx Carbon steels2xxx Nickel steels3xxx Nickel-chromium steels4xxx Molybdenum steels5xxx Chromium steels6xxx Chromium-vanadium steels7xxx Tungsten steels8xxx Nickel-chromium-vanadium steels9xxx Silicon-manganese steels

SAEdesignatio

Type

10xx Plain carbon (Mn 1.00% max)11xx Resulfurized12xx Resulfurized and rephosphorized15xx Plain carbon (Mn 1.00% to 1.65%)

13xx Mn 1.75%

23xx Ni 3.50%25xx Ni 5.00%

31xx Ni 1.25%, Cr 0.65% or 0.80%32xx Ni 1.25%, Cr 1.07%33xx Ni 3.50%, Cr 1.50% or 1.57%34xx Ni 3.00%, Cr 0.77%

40xxMo 0.20% or 0.25% or 0.25% Mo &0.042 S[3]

44xx Mo 0.40% or 0.52%

41xxCr 0.50% or 0.80% or 0.95%, Mo0.12% or 0.20% or 0.25% or 0.30%

Molybdenum steels

Chromium-molybdenum (Chromoly) steels

Carbon steels

Manganese steels

Nickel steels

Nickel-chromium steels

SAEdesignatio

Type

43xxNi 1.82%, Cr 0.50% to 0.80%, Mo0.25%

43BVxxNi 1.82%, Cr 0.50%, Mo 0.12% or0.35%, V 0.03% min

47xxNi 1.05%, Cr 0.45%, Mo 0.20% or0.35%

81xx Ni 0.30%, Cr 0.40%, Mo 0.12%81Bxx Ni 0.30%, Cr 0.45%, Mo 0.12%[3]

86xx Ni 0.55%, Cr 0.50%, Mo 0.20%87xx Ni 0.55%, Cr 0.50%, Mo 0.25%88xx Ni 0.55%, Cr 0.50%, Mo 0.35%93xx Ni 3.25%, Cr 1.20%, Mo 0.12%94xx Ni 0.45%, Cr 0.40%, Mo 0.12%97xx Ni 0.55%, Cr 0.20%, Mo 0.20%98xx Ni 1.00%, Cr 0.80%, Mo 0.25%

46xxNi 0.85% or 1.82%, Mo 0.20% or0.25%

48xx Ni 3.50%, Mo 0.25%

50xx Cr 0.27% or 0.40% or 0.50% or 0.65%50xxx Cr 0.50%, C 1.00% min50Bxx Cr 0.28% or 0.50%[3]

51xxCr 0.80% or 0.87% or 0.92% or 1.00%or 1.05%

51xxx Cr 1.02%, C 1.00% min51Bxx Cr 0.80%[3]52xxx Cr 1.45%, C 1.00% min

61xxCr 0.60% or 0.80% or 0.95%, V 0.10%or 0.15% min

72xx W 1.75%, Cr 0.75%

92xxSi 1.40% or 2.00%, Mn 0.65% or0.82% or 0.85%, Cr 0.00% or 0.65%

9xx Various SAE gradesxxBxx Boron steelsxxLxx Leaded steels

High-strength low-alloy steels

Chromium steels

Chromium-vanadium steels

Tungsten-chromium steels

Silicon-manganese steels

Nickel-chromium-molybdenum steels

Nickel-molybdenum steels

鍍鋅鋼管 - EMT

PVC 管是水電工最常用的管材 , 它可用於水管也可以用於電管 , 因厚度不同有分給水管與排水管或電管 , 因為耐酸鹼所以適合作各種場所 ,但是 PVC 管怕熱 , 加熱之後會軟化 , 所以不適合在高溫場所 , 但也因此可利用加熱來彎曲 PVC 管及擴管 , 縮管等 , 使配管更方便 , 再搭配預製好的彎頭與三通等另件及專用膠水一般來說 PVC 管 . 管壁上都有標示 .

電管 ~E 水管 ~A or B其製造材質相同 . 唯有管壁厚度的差異而已 . 因電 (E) 管為配線保護使用 . 故其管壁厚度也較薄 . 水管又紛給水 ( 需承受水壓故管壁厚度大於排水用管 )/ 排水使用 . 建議按實際需求使用合適管件 . 較為安全 .

PVC管

PVC 雙套管

在半導體工廠很多地方必須使用雙套管方式施工尤其是以運送 chemical 等液體管路其最重要的目的是防止化學品因管線破裂造成外洩及防護人員安全為主

並在外管標示該管路明稱及運送方向以利使用者快速辨識該化學品種類

In chemistry, polytetrafluoroethylene (PTFE) is a synthetic fluoropolymer of tetrafluoroethylene that finds numerous applications. PTFE is most well known by the DuPont brand name Teflon.

PTFE is a fluorocarbon solid, as it is a high-molecular-weight compound consisting wholly of carbon and fluorine. PTFE is hydrophobic: neither water nor water-containing substances wet PTFE, as fluorocarbons demonstrate mitigated London dispersion forces due to the high electronegativity of fluorine. PTFE has one of the lowest coefficients of friction against any solid.

PTFE is used as a non-stick coating for pans and other cookware. It is very non-reactive, partly because of the strength of carbon–fluorine bonds, and so it is often used in containers and pipework for reactive and corrosive chemicals. Where used as a lubricant, PTFE reduces friction, wear, and energy consumption of machinery.

What’s the PTFE (Teflon)

Propertiesgeneral Upper service temperature 260 °C

Chemical resistance excellent

Specific gravity 2.15

Melting point 327 °C

electrical Dielectric constant 2.1

Dielectric dissipation factor 0.0002

Dielectric strength > 1400 Volt / mil

Mechanical Tensile strength 3500 psi

Elongation 300 %

Compressive strength 3500 psi

Flexural Modulus 90 000 psi

Hardness D-60

Enviromental Water absorption < 0.01 %

Water resistance excellent

Oxygen index >95 %

Material Poly Tetra Fluoro Ethylene (PTFE)

Datasheet PTFE Tubing

PTFE is the most chemically resistant plastic known. Its mechanical properties are low compared to other engineered plastics, but it can be improved by adding fillers such as glass fiber, carbon, graphite and similar materials.

PTFE has almost ideal dielectric properties. Its dielectric constant (2.1) and power-loss factor (0.0002) are low and remain so over a wide range of temperatures and frequencies. In certain applications, such as fuel hoses, some electrical conductivity is required to dissipate static charges. When exposed to flame, PTFE decomposes leaving just a little residue.

PTFE is extremely inert and stable up to a temperature of 260 °C.PTFE is also virtually unaffected by oxygen, ozone and UV light.

Homework Please briefly describe retention mechanism Please briefly describe retention mechanism

of filter.of filter. What is the definition of pore size What is the definition of pore size

distribution? distribution? Please briefly describe valve classified and Please briefly describe valve classified and

choice 3 types valve and describe its choice 3 types valve and describe its function.function.

What is the PTFE tube and its character?What is the PTFE tube and its character?