EDA Introduction - Tistory

EDA Introduction

HyuckSoo Lim

2HyuckSoo Lim , Miracom Inc.

SEMI Interface A Standard?

• Also known as Equipment Data Acquisition (EDA)

• Using SOAP/XML messages over an HTTP or HTTPS connection


SECS/GEM vs Interface A

SECS/GEM Interface A

SECS/GEM requires support for only one client connection. Interface A requires support for multiple concurrent clients.

SECS/GEM is only partially self-describing and therefore relies on good documentation.

Interface A is self-describing through the E125 standard's metadata including a listing and description of all available data.

SECS/GEM data is relatively flat and unorganized. Interface A presents the data in a hierarchy, organized by the major hardware components.

Data in a SECS/GEM message is highly structured and relatively inflexible.

Interface A uses XML; therefore the inherently design to accommodate additional metadata.

SECS/GEM is only used in a few industries; therefore there are a limited number of experts in the world.

SOAP/XML and HTTP are the backbone of most Internet and Intranet applications.

There are relatively few software packages in the world to deal with SECS/GEM technology; most are only known to the Semiconductor industry.

There are a tremendous number of software packages worldwide from many industries that can handle SOAL/XML and HTTP technology.

In most factories, the SECS/GEM interface is used for equipment configuration and control; therefore subject to extensive oversight and lengthy change procedures.

Interface A is independent of the GEM interface and therefore immediately available for the dynamic data collection needs of the process engineers.


SECS/GEM & Interface A Similarities

SECS/GEM Interface A

Status VariablesEquipment ConstantsData Variables

Parameters

Alarms Exceptions

Collection Events (S6,F11) Events in DCP

E39 Objects SEMIObjTypeInstance IDs

Trace Data Collection Traces in DCP

Reports Data Collection PlansData Collection Reports

State Machines State Machines

Enable Collection EventsDisable Collection Events

ActivatePlanDeactivatePlan

Define & Link Reports (S2,F33 & S2,F35) DefinePlan


EDA Overview

• The EDA interface suite of standards is focused on two main capabilities.– SEMI E125, is the equipment self-description (or metadata)– SEMI E134, is Data collection

• The complete set is as follows:– SEMI E125, Equipment Self Description– SEMI E120, Common Equipment Model– SEMI E134, Data Collection Management– SEMI E132, Equipment Client Authentication and Authorization

• SEMI E147 provides a useful technical overview of EDA.– SEMI E147, Guide for Equipment Data Acquisition


Related Standard

• The helpful set is as follows:– SEMI E128, XML Message Structures– SEMI E138, XML Semiconductor Common Components– SEMI E145, Classification for Measurement Unit Symbols in

XML– SEMI E151, Guide for Understanding Data Quality


Interface A Client Operations

SEMI E125

Equipment Self Description


SEMI E125, Equipment Self Description

• Defines equipment metadata– The metadata is built upon the structural elements of the E120

equipment model

• Provides messaging services for clients to acquire the metadata definitions from the equipment


Organization of Metadata Concept

E125 : Equipment Self Description

Equipment Node Description

State Machines

Events

SEMI Objects

Exceptions

Parameters

Types

Units

Equipment

Module

Subsystem

Module

Subsystem

……

……

IO Device

E120 : Common Equipment Model


Interface for Accessing Equipment Metadata


Metadata Client Interface


Describing Equipment Nodes


Describing Typed Parameters


Unit Class


Parameter Classifications


Describing Exceptions


Describing State Machines


Describing State Machine Instances


Describing Implemented SEMIObjTypes


Describing SimpleEvent


Typical Equipment Metadata Use Case


Use Case Realization for “Retrieve StateMachine Descriptions”


Use Case Realization for “Retrieve SEMIObjType Descriptions”


Use Case Realization for “Retrieve Exception Descriptions”


Use Case Realization for “Retrieve Equipment Parameter Descriptions”


Use Case Realization for “Retrieve Equipment Configuration”

SEMI E120

Common Equipment Model


SEMI E120, Common Equipment Model

• Provides the tools for creating a structural model of the equipment.

• SEMI E125 provides the means to add parameters, state models, exceptions, and SEMI Objects to the structural elements


CEM Model Extension


Inheritance Hierarchy


Relationship View


Nameable Class


EquipmentElement Class


ExecutionElemtnt Class


Extension Class


Equipment Class


Module Class


Subsystem Class


IODevice Class


MaterialLocation Class


SoftwareModule Class


Example : Equipment Hierarchy


Example : Equipment Hierarchy with Shared Object


Equipment Modeling Representation

SEMI E134

Data Collection Management


SEMI E134, Data Collection Management

• Defines the means for the client/user to define and control data collection plans (DCPs).

• DCPs can specify event data collection, trace data collection, and exception reporting.


Consumer Specifies What Data Should Be Sent Off-Tool


The DataCollectionManager Interface


DCPDefined Class


UnauthorizedOperation Error


InvalidPlan Error


NoSuchPlan Error


DCPDeavtivated Class


DCPNotActive Class


DCPIsActive Error


DCPActivated Class


DCPDeleted Class


ObjTypeRequest Class


ObjTypeResult and Related Classed


Data Collection Privileges


Data Collection Plan


DataCollectionPlan State Model


DataCollectionPlan-Active State Model Diagram


TraceRequest State Model


Operational Performance State Diagram


Data Collection Reports


Event Reports


Exception Reports


Trace Reports


DCPConsumer Interface and Argument Types

SEMI E132

Equipment Client Authentication and Authorization


SEMI E132, Equipment Client Authentication and Authorization

• Defines security for EDA messaging, including encryption of equipment-bound message content and means to limit client access to only the appropriate capabilities.


Equipment Communication

Via Serial Cable Via Ethernet


Security Administration Model


Authentication Message Flow


Abstract Model of ACL


ACL Entry Description


Security Administration Interface


UnauthorizedOperationError Description


UnrecognizedPrivilegeError Description


DefinedPrivilege Description


ActiveSession Description


RequestRejectedError


Session Message Flow


Generic Session Services


Session Establishment State Diagram


Authenticated Session State Diagram


Session Client Interface


Discovery Services


EquipmentInterfaceDescription

EDA Introduction - Tistory

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