e-Diagnostics and EEC Guidance - SEMATECH and EEC Guidance ... single point of control is enforced...

e-Diagnostics and EEC Guidance

www.sematech.org/public/resources/ediag/index.htm

Harvey Wohlwend / [email protected], 512.356.7536

18 March 2002

e-Diagnostics OverviewKey Benefits:• Reduce time to qualify new

equipment• Reduce repair time = higher

availability = increased output

• Anticipate problems before they occur

• Provide data to support equipment continuous improvement and new product development

Supplier X Main Office

Supplier Y Main Office

Remote monitoringRemote diagnosticsRemote de-bugging/fixRemote sensingModel tool behavior


Serial line IP Remote ControlTelnetEthernet IPVPN

Protocol Options

Equipment X Equipment Y

Firewall &Authentication• Data Security• Safety Infrastructure

Interface A

Internet• Mainstream Computing

Technologies• Open Architectures

Interface C

Goal: Significant reduction in equipment support costs

03/13/2003 haw\e-mfg\roadshow\Europe e-diag 2002 - 3

ISMT e-Diagnostics OutputSupplier site Guidelines and

Standards

Level 2 - Analysis:Automated Reporting and Analysis

Level 3 - Prediction:Predictive Maint., Self Diagnostics

CapabilityRoadmap

Level 0 - Access & Remote Collaboration:Remote connectivity to the tool and remote collaboration

capabilities (text, audio, video)

Level 1 - Collection & Control:Remote Tool Operation, Performance

Monitoring,Equipment Configuration

Current industry maturity level

Supplier CapabilityGuidelines

Data EncryptionGuidelines

e-Diag DMZ

Data InterfaceStandards

Network SecurityGuidelines

Controlled AccessPoint Guidelines

Full Documentation Available at:http://www.sematech.org/public/resources/ediag/index.htm

ICMaker CapabilityGuidelinesICMaker site


Focus: Improved Data• SECS/GEM – Still The Primary Equipment Control I/F• Interface A – Equipment Data Interface

– Getting more & better data from the equipment• Interface C - External Access to e-Diagnostics• Interface B – Among Applications and to FICS/MES

EES (Equipment Engineering System)

APC App 1

APC App 2

e-Diag App 1

OEE App 1

OEE App2

FDC App1

EE Applications

EEAccess Control

EE DataCollection

And StorageFICS/MES

•Equipment Control•WIP Tracking•Factory Scheduling

Global EE Data

Fire Wall

Interface B

SECS/GEMInterface

Interface ASupplier RemoteLocation

Remote monitoringRemote diagnosticsRemote de-bugging/ fixRemote sensingSpare parts Mgt.

Interface C Factory Network


Data Acquisition Vision

UtilizationTracking

Station Controller

Equipment

Current StateHealth

Monitor R2R (APC) FDC

SECS-II/GEM data & controlsemiconductor proprietary

Custom

Desired State

UtilizationTracking

SC

Equipment

HealthMonitor R2R (APC) FDC

SECS-II/GEM

Mainstream technology (SOAP)data-only, independent of host

Data Acquisition Requirements Status

• System Requirements:– Host-independent data collection:

clients setup and collect data near-real-time independent of host on/off-line status

– Security: only factory-authorized applications permitted to collect data, single point of control is enforced at factory level

– Self-describing interface: equipment structure, implemented state models, available data items & types, events, exceptions, and alarms can be learned at runtime from the tool

– ‘Baseline’ process control data: all data currently accessible to SECS-II host, with improvements in the ability to collect sampled data for up to 50 parameters per process chamber at a frequency 1% of shortest recipe step (worst case assumption is 1000 scalar parameters at 10Hz)

– Equipment operational data: visibility into module- subsystem- and potentially actuator-level activity for facilitating equipment health monitoring and diagnostics/troubleshooting

e

UtilizationTracking

SC

Equipment

Current State

Desired State

R2R FDC

UtilizationTracking

SC

Equipment

HealthMonitor R2R FDC

SECS-II/GEM data & controlSemiconductor proprietary

SECS-II/GEM data & controlSemiconductor proprietary

CustomCustom

SECS-II/GEMSECS-II/GEM

Mainstream technology (SOAP)Data-only, independent of host

Mainstream technology (SOAP)Data-only, independ nt of host

Diag.App.


“e” Standards Summary

• e-Mfg/EEC related standards activity is HOT!– Multiple TFs meet weekly w/good

attendance

• The e-Manufacturing related standards effort is the largest combined effort I&CC has attempted

– Global participation, including NA, Japan, Europe

• Much progress is being made– Over 20 ballots (blue and yellow) are in the system– Some have passed ballot and are now SEMI standards

• The goal is steady, rapid progress– Infrastructure standards (XML, CEM) approved – October 2002– Interim DDA solution approved - December 2002– Equipment self-description approved – March 2003– Data interface definition by Summer 2003– More activity to follow

Current Interface A - Related SpecificationsE121 – Guide for Style & Usage of XML for Semiconductor Manufacturing Applications (XML TF)

– Foundational guidelines for XML usage within SEMI

3569 – Provisional Specification for XML Message Structures– XML structures required to encode message header information for

asynchronous messages

E120 – Common Equipment Model (OBEM TF)– Abstract model of equipment physical equipment structure

3510 – Equipment Self Description (DDA TF)– Abstract model of equipment metadata describing units, types, equipment

structure, state models and events, alarms/exceptions, etc.

• 3507 – Equipment Client Authentication and Authorization (DDA TF)– Abstract model of authenticated communication and Access Control List

management

• 3509 – Data Collection Management (DDA TF)– Abstract model of Data Collection Plans, DCP management interface and state

models, and DCP reporting formats

PR8/3563 – Proposed Standard for Equipment Data Acquisition (DDA TF)– Concrete specification of SOAP 1.1 reduced-scope interface for data collection


Data Acquisition Interim Solution• Ballot

– 3563 – Interim EDA Guide• Definition of an ‘interim’ interface to sync industry on concepts and technology• Facilitate near-term e-Diagnostic systems while specs are developed

• Phased approach:– New Technologies

• Adoption of new technologies in the industry will also involve significant learning and adjustment period for suppliers, ICM’s, and application providers

– Lead time for suppliers• Equipment supporting data collection without impacting equipment performance is

expected to require design and development time

– Interim solutions• Simpler, single-client, minimally configurable push of equipment data. Provide

access to data on new technologies while complete specifications are being designed and developed

• Not a SEMI specification (essentially a precursor to the final standards). Targets current generation of 300mm equipment


DDA Task Force Ballot Schedule

Diagnostics Data Acquisition (DDA)#3571 - e-Diagnostics Guide (Overview) SNARF Blue Ballot Yellow Ballot#3563 - EDA Interim Interface Blue Ballot Yellow Ballot Proposed#3509 - Data Collection Std. Blue Ballot Yellow Ballot 2nd Yellow#3510 - Meta Data/Equipment Descr. Blue Ballot Yellow Ballot 2nd Yellow#3507 - Authentication/Security Blue Ballot Yellow Ballot 2nd Yellow#TBD - 3510.1 Tech. Spec (XML/SOAP) SNARF Yellow Ballot 2nd Yellow#TBD - 3507.1 Tech. Spec (XML/SOAP) SNARF Yellow Ballot#TBD - 3509.1 Tech. Spec (XML/SOAP) SNARF Yellow Ballot

Interim ItfComplete

#3571 - e-Diagnostics Guide (Overview)#3563 - EDA Interim Interface#3509 - Data Collection Std.#3510 - Meta Data/Equipment Descr.#3507 - Authentication/Security#TBD - 3510.1 Tech. Spec (XML/SOAP)#TBD - 3507.1 Tech. Spec (XML/SOAP)#TBD - 3509.1 Tech. Spec (XML/SOAP)

2nd Yellow

2nd Yellow2nd Yellow

Interface A Standardized

2004 2004 2004 2004Cycle 1

Winter Mtg US/Jpn

SEMICON Europa

Cycle 2

SEMICON West

Japan June Mtgs

Cycle 3

SEMICON

Southw est

Cycle 4

SEMICON Japan

Meet July 22Meet Mar 18 Meet July 22Meet Mar 18

2002 2002 2002 2002 2003 2003 2003 2003Cycle 1

Winter Mtg US/Jpn

SEMICON Europa

Cycle 2

SEMICON West

Japan June Mtgs

Cycle 3

SEMICON

Southw est

Cycle 4

SEMICON Japan

Cycle 1

Winter Mtg US/Jpn

SEMICON Europa

Cycle 2

SEMICON West

Japan June Mtgs

Cycle 3

SEMICON

Southw est

Cycle 4

SEMICON JapanSEMI Document/Standard

Voting (Yellow) ballots at:http://www.semi.org/web/wcontent.nsf/url/stds_ybic

Informational (Blue) ballots at:http://www.semi.org/web/wcontent.nsf/url/stds_bbic


e-Diagnostics Leads into EEC and e-Manufacturing

Standardizing the Interface A Data Port

Equipment Supplier

Equipment

FactorEquipment

EngineeringCapability

Fault Detection & ClassificationRun-to-Run ControlMachine matchingSpare Parts ManagementPredictive Maintenance...

e-Diagnostics

e-Data

e-Manufacturing is automated,data-driven,

productivity optimization

y


e-Diagnostic Capabilitiese-Diagnostic Capabilities

Implementation - ICMImplementation - ICM Implementation - SupplierImplementation - SupplierITIT

Network AdministrationNetwork Administration

System/Product AdminSystem/Product Admin

User ManagementUser Management

Change Control/MgtChange Control/Mgt

IS/IT Policies/ProcIS/IT Policies/Proc

TrainingTraining

ITIT

Network AdministrationNetwork Administration

System/Product AdminSystem/Product Admin

User ManagementUser Management

Change Control/MgtChange Control/Mgt

IS/IT Policies/ProcIS/IT Policies/Proc

TrainingTraining

Bus

ines

sB

usin

ess Service Level Aggr’sService Level Aggr’s

LegalLegal

Operational ProceduresOperational Procedures Bus

ines

sB

usin

ess Service Level Aggr’sService Level Aggr’s

LegalLegal

Operational ProceduresOperational Procedures

http://www.sematech.org/public/resources/ediag/guidelines/guidelines.htm

Leve

l 1Le

vel 1

Data CollectionData Collection

Data SecurityData Security

Remote Equipment Operation

Remote Equipment Operation

Leve

l 0Le

vel 0

CollaborationCollaboration

File TransferFile Transfer

e-Diagnostics System Administration

e-Diagnostics System Administration

SignOn (Login)SignOn (Login)

Leve

l 2Le

vel 2

FilteringFiltering

Data CompressionData Compression

PerformancePerformance

ReportingReporting

Data AnalysisData Analysis

Leve

l 3Le

vel 3

Self-DiagnosisSelf-Diagnosis

Decision LogicDecision Logic

NotificationNotification

Measurement & Assessment Checklist Structure


Data Quality Needed

SEMI Task Force Focus

• Quality of Reporting of Data - The Protocol

• Quality of the Data Itself

(1) Quality of Protocol-Missing Messages-Missing Variables-Duplicate Events-Out-of-order Messages-Completion before Start-Reply to Request-Well-formed Reply-Proper Events Reported-…

(2) Quality of Data-Accuracy and Precision-Resolution-Correct Data-Correct time-stamping-Sufficient Context with Data-Data Freshness-…

SECS/GEM

EDAPort

e-Diagnostics & Interface A Prototyping

Supplier Main Office


Supplier providedinfrastructure & pilot

EquipmentSimulator

EquipmentSimulator

or e-DiagnosticsServer

e-DiagnosticsServer

ISMT provided Infrastructure

Supplier provided pilot

InternetInternet

ISMT ProvidesNetwork infrastructure, internal firewall, hosts pilot activities, $$

Supplier ProvidesEquipment simulator or tool, e-Diagnostics pilot, remote pilotMust include OEM, but may also include 3rd party

e-Diagnostics Working Group providesPrototype (Guidebook) evaluation criteria, evaluation results

http://www.sematech.org/public/resources/e-manuf/rfp/index.htm


Prototyping Invitation to Demonstrate1. e-Diagnostics prototyping opportunity available at

ISMTComplete solutions not expectedInfrastructure availableConfirm Guidebook integrityAccelerate industry learningLeveraging Assessment Checklist during prototypes

2. EDA Port prototyping opportunity available at ISMTConfirm integrity and completeness of SEMI document 3563 (Interface A) definitionUnderstand implications of separating control and dataUnderstand performance: XML/SOAP/HTTP, data collection plans, trace data collection, bottlenecks, etc.

Multiple Prototypes Requested


Equipment Engineering Capabilities (EEC)

EEC is about improving equipment OEE through access to data for:e-Diagnostics, Run-to-Run Control, Fault Detection, Maintenance

Support, Recipe Control, Machine-to-Machine Matching, IM, etc.

ISMT and Selete are collaborating to set industry directionEEC Guidelines v2.5 are available:http://www.sematech.org/public/resources/ediag/guidelines/guidelines.htm

ISMT driving SEMI StandardsThe focus is on the detail and quality

of the data available from equipmentWe are leveraging new technologies

(e.g., XML) for a new “data port”Data analysis leads to enhanced

equipment control standards - RaP

Plans for 2003• Completion of Interface A and supporting Standards

• Further Prototyping/Commercialization efforts– Tied to actual standards as they are completed

• e-Diagnostics Guidebook updated and communicated– Compliance assessments, safety, security, data interface, tool interface

• Definition of Interface C– Link through factory firewall to enable supplier access to equipment data

• Education – Workshops, SEMI STEP programs, etc.

FactoryEquipment

ControlSystem

Examples: Ethernet, VPN, Authentication and Authorization

InternetInternet

• Leverage Supplier Experts• Remote Diagnostics• Remote Monitoring• Debugging Capabilities

Real-Time Diagnostic DataAccurate Historical Performance Data

IC Maker Site EquipmentSupplier Site

e-Diagnostics and EEC Guidance - SEMATECH and EEC Guidance ... single point of control is enforced...

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