Developments In Precision Positioning Stages with High Speed Range
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Transcript of Developments In Precision Positioning Stages with High Speed Range
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Developments In Precision Positioning Stages with High Speed Range
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This webinar will be available afterwards at
designworldonline.com & email
Q&A at the end of the presentation
Hashtag for this webinar: #DWwebinar
Before We Start
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Moderator
Leslie Langnau Design World
Presenter
George Jaffe Steinmeyer
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Finding A Precision Positioning Stage for
Applications with Extremely Large Velocity Range
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1. Problem description
2. State of the art
3. New approach to the problem
4. Results of field tests
5. Some Applications
“Dual-Speed”- Drive for Nanopositioning with Ball Screws
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• High dynamic velocity range (extremely slow to fast)
(Measurement, microelectronics, engineering,…)
• High system accuracies for positioning - in sub-micrometer range
• Repeatability < 100 nm
• Long travel - up to 300 mm and more
1. Problem description – some typical requirements for such a linear positioning stage
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Speed from 1 km/h up to 300 km/h
Dynamic range = 3 x 102 : 1
Speed from 0.05 mm/s up to 100 mm/s
Dynamic range = 2 x 103 : 1
But suppose the . . .
Requirement is 10 nm/s up to 100 mm/s
Dynamic range = 1 x 107 : 1 ! !
Dr. Ing. h.c. F. Porsche AG
Another way to look at the issue . . .
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Advantages Disadvantages
Ball screw /
DC-Motor/
Stepper motor
- horizontal and vertical application
- cost effective
- robust and tested principle
- low dynamic range
(1 : 2000)
Direct drives - relatively cost effective
- very high accel and velocities possible
- no drive wear
- vertical usage critical (brake)
- heat generation
Piezo stack - travels possible in submicrometer range - very short travel ranges
- closed loop difficult
- position drift
- high voltage
2. State of the art – generally 3 possibilities
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Combination of ball screw/motor-drive and piezo stacks
Mad City Labs Inc.
XY-
Piezo.stack-
system
XY-
Ball.screw-
system
2. State of the art – or “if one stage doesn‘t work, use two!”
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• 2 stages = discontinuous position (variable performance)
• due to series connection of drives -> low system stiffness
(low self frequency)
• 2 force generators / 2 measuring systems / 2 controllers
• piezo mechanism is sensitive to shock and overload
• high costs
2. Stacked stages – what are the limitations of this approach?
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Combination DC-Motor with ball screw drive/rotating piezo motor
DC-motor
Rotating piezo-motor
Permanent-electromagnetic coupling
Bellows coupling
Incremental measuring system
Slide system
Rotational encoder
Fixed bearing
Support bearing
Ball screw
3. A New (and Patented) Approach to the Problem
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Characteristics of the rotary piezo motor
3. A New Approach to the Problem
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Characteristics of the measuring system
- Scale resolution programmable from 5 μm-5 nm
- Accuracy 1 μm
- Interpolation error
< ± 0.12 μm over a
scale period of 20 μm
3. A New Approach to the Problem – more details
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Rotating piezo motor – Test assembly
Piezo motor
3. A New Approach to the Problem – test set-up
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Positioning: 10µm steps
2005
4010
6015
8020
10025
0
[nm]
4. First results of field tests – 10 µm steps
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Positioning: 1µm steps
1015
812
609
406
203
0
[nm]
4. First results of field tests – 1 µm steps
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Positioning: 50nm steps
-13
0
13
26
39
52
65
[nm]
4. First results of field tests – 50 nm steps
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So, by way of review . . . “Dual Speed” stage
• We now have the possibility to move extremely slowly or
quite rapidly in a single stage with a common drive
element
• We are no longer limited to only very small movements in
small increments
• Now to some applications . . .
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e.g. Optical 3D measurement
Alicona Imaging - Graz
5. Optical 3D Tool
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• Coarse adjustment, focussing and scanning with
combined drive system possible
• Measuring range not limited to piezo stack range as
with this instrument
Physik Instrumente (PI) GmbH & Co. KG.
5. Confocal Microscopy
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Thanks for your attention!
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Questions? Design World Leslie Langnau [email protected] Phone: 440.234.4531 Twitter: @DW_RapidMfg
Steinmeyer George Jaffe [email protected] Phone: 781.273.6220
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Thank You
This webinar will be available at designworldonline.com & email
Tweet with hashtag #DWwebinar
Connect with
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