BNC Overview

Ali ShakouriDirector, Birck Nanotechnology CenterJanuary 16, 2013

BNCDirector@purdue.edu

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Benchmarking and Recharge Analysis

Ron Reger, Collin Steele, and Dave Lubelski

• Birck has good total facility user base, but short of average in cleanroom

• Our external users are very low in both scenarios• Our facility and tool use are both low compared to average

Utilization

Purdue Avg(6) Mich Harv UMN Purdue Avg(5) MIT UCSB

Total # users 496 524 444 641 377   236 496 476 539

Internal 470 376 301 380 287   228 345 450 292

External (acad) 5 78 54 160 40   1 70 21 65

External (other) 21 70 89 101 50   7 81 5 182

# faculty groups 123 82 72 54 65   69 83 130 52

Monthly users 278 247 201 298 125   101 191 120 254

Total tool hours 42,397 51,196 63,900 40,566 17,200   19,149 49,735 N/A N/A

Internal 41,307 45,303 49,200 31,415 14,480   19,014 39,787 N/A N/A

External 1,090 6,915 14,700 9,151 2,720   135 9,948 N/A N/A

Training hours 1,624 3,196 4,200 5,800 1,872   1,036 1,848 N/A N/A

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Cleanroom + External Lab Cleanroom only

• Birck’s internal & external tool costs are competitive

Tool Costs

Purdue Avg(6) Mich Harv UMN Purdue Avg(5) MIT UCSB

DRIE (e.g. STS)Internal (1 hr) $75 $113 $77 $50 $89   $75 $82 $128 $35

Internal (16 hr, 4 entrances) $1,485 $957 $800 $980 $779   $1,485 $1,007 $510 $560

E-beamInternal (1 hr) $140 $141 $114 $48 $155   $140 $127 $60 $215

Internal (16 hr, 4 entrances) $1,405 $1,367 $768 $948 $971   $1,405 $1,023 $476 $1,475

Contact Aligner (MA6)Internal (1 hr) $55 $99 $53 $0 $101   $55 $58 $51 $35

Internal (16 hr, 4 entrances) $445 $514 $222 $180 $539   $445 $406 $408 $35

Evap. 100nm Au

Internal $175 $160 $114 $100 $162   $175 $183 $340 $35

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Cleanroom + External Lab Cleanroom only

Recharge Rates (Starting July 2013)

– Rates haven’t been increased for over 3 years (inflation ~7-8%, salaries/benefit gone up), so we propose to increase Scifres and general lab equipment rates by 5%

– We will move to a daily rate for Scifres, capped for the entire month after 8 days of entry ($40/day, capped at $320/month)

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Fiji Atomic Layer

DepositionCleanroom

• Aluminum Oxide and Hafnium Oxide; ~ 1 Å/cycle

• Thermal & plasma capability• Capable of alternate precursors,

subject to approval

EasyTube 3000

Lab 2221

• Graphene CVD• Single and multi-layer deposition• Thermal and plasma capability• New materials, subject to

approval

MA24 AlignerCleanroom

• Refurbished and installed• Start-up in February• Front and backside alignment

New Equipment

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Heidelberg Direct Laser

WriterCleanroom

• Laser lithography• 1 m, (future upgrade 0.6 m)• Mask making and direct write• Arrived, to be installed

Nikon Microscopes

Cleanroom

• Expensive parts: lenses, filters• Training needed

• Lamps left on• Filters removed and

lost/broken

STS ASECleanroom

• Back-up DRIE silicon etcher• Bosch deep etch process• Installation Spring 2013

New Equipment

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RamanLab 1227

• Horiba LabRam• Wavelengths 633 & 532 nm• Manual sample stage

Spectro-scopic

EllipsometerLab 1263

• Thin film characterization• Multiple wavelengths &

angles• VASE: Variable Angle

Spectroscopic Ellipsometry

PVD Sputtering

Cleanroom

• New, 2” targets• Installation spring 2013• RF & DC capability• Au and many other materials

New Equipment

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New Laboratories at BNCNew Laboratories at BNC

Project Location Former Use Size

1 BRK 1069 Storeroom 400 ft2

2 BRK 2100J J-Bay 1,980 ft2

2 BRK 2100F F-Bay 1,020 ft2

3 BRK 1151 Machine Shop 1,400 ft2

3 BRK 1152 Dock 384 ft2

4 BRK 1100A Subfab Staff Area 1,500 ft2

Total new laboratory space: 6,648 ftTotal new laboratory space: 6,648 ft22

John Weaver and Mark Voorhis

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Areas Affected – CleanroomAreas Affected – Cleanroom

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Areas Affected – First FloorAreas Affected – First Floor

BNC Community• Birck Coffee Hour (Fridays 3:30-4:30pm)• Learn about recent advances in nanotechnology (BNC Seminars and Journal Club)

New Center Initiatives• Nano-Manufacturing • In-vivo, in-vitro devices• Electro thermal/ Power devices • Imaging• Nano Education (REU site) • Topological materials/Solar• Discovery to commercialization• Always interested in new ideas: contact: shakouri@purdue.edu